CN108996106A - A kind of vacuum equipment live-roller with on-line monitoring function - Google Patents
A kind of vacuum equipment live-roller with on-line monitoring function Download PDFInfo
- Publication number
- CN108996106A CN108996106A CN201810782250.3A CN201810782250A CN108996106A CN 108996106 A CN108996106 A CN 108996106A CN 201810782250 A CN201810782250 A CN 201810782250A CN 108996106 A CN108996106 A CN 108996106A
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- China
- Prior art keywords
- roller unit
- roller
- driving
- driving roller
- synchronizing wheel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 238000012544 monitoring process Methods 0.000 title claims abstract description 31
- 238000012806 monitoring device Methods 0.000 claims abstract description 21
- 230000005540 biological transmission Effects 0.000 claims abstract description 19
- 239000011553 magnetic fluid Substances 0.000 claims description 29
- 230000008878 coupling Effects 0.000 claims description 9
- 238000010168 coupling process Methods 0.000 claims description 9
- 238000005859 coupling reaction Methods 0.000 claims description 9
- 230000001360 synchronised effect Effects 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
- B65G13/02—Roller-ways having driven rollers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of vacuum equipment live-rollers with on-line monitoring function, including driving device, vacuum cavity, at least one set of driving roller unit and monitoring device;The driving roller unit is rotatably connected in the vacuum cavity, and the input terminal of the driving roller unit and driving device transmission connection, the output end of the driving roller unit are connect with monitoring device.The present invention is connect with monitoring device by the output end of each driving roller unit in vacuum equipment live-roller, the working condition of each driving roller unit can directly be monitored, when a certain driving roller unit breaks down, monitoring device can be monitored accurately and be the discovery which driving roller unit breaks down, it may be implemented quickly to check, ensure to take counter-measure in time to equipment, bigger loss caused by avoiding because of failure.Present invention application technical field of vacuum equipment.
Description
Technical field
The present invention relates to technical field of vacuum equipment, pass more particularly to a kind of vacuum equipment with on-line monitoring function
Dynamic roller.
Background technique
Vacuum equipment is widely used in modernization industry production, such as physical gas phase deposition technology, chemical vapor deposition
Technology, gas phase transport the field of industrial production such as deposition technique and plasma surface treatment technology.Most of vacuum equipments and its
His equipment constitutes automation or semi-automatic production line, and the on-line monitoring of vacuum equipment live-roller failure is for the normal of production line
Operation is of great significance.Live-roller is one of main kind of drive of vacuum equipment, and operating status on-line monitoring is especially heavy
It wants.
Vacuum equipment mainly monitors live-roller by one or more of mode at present: the power of 1. monitoring live-rollers is defeated
Enter the working condition of device (such as motor etc.);2. monitoring the working condition of driving member (such as synchronizing wheel, synchronous belt etc.);3.
Monitor the working condition of live-roller input end connection (such as magnetic fluid seal driving device, shaft coupling etc.);4. monitoring vacuum
The position for the workpiece that equipment is processed.Above method is by the working condition of some components in monitoring live-roller or to lead to
The position judgement transmission roll working state for crossing monitoring vacuum equipment institute workpieces processing, cannot completely react the work of entire live-roller
Make state, reliability is relatively low.
Summary of the invention
The purpose of the present invention is to provide a kind of vacuum equipment live-rollers with on-line monitoring function, can monitor each
The working condition of live-roller, and live-roller Failure Alarm is provided in time, it is ensured that counter-measure is taken to equipment in time, is avoided for some reason
Barrier causes bigger loss.
The technical scheme adopted by the invention is that: a kind of vacuum equipment live-roller with on-line monitoring function, including drive
Dynamic device, vacuum cavity, at least one set of driving roller unit and monitoring device;The driving roller unit is rotatably connected on the vacuum
In cavity, the input terminal of the driving roller unit and the driving device transmission connection, the output end of the driving roller unit with
Monitoring device connection;
The driving roller unit includes live-roller, the first magnetic fluid seal driving device and the second magnetic fluid seal driving dress
It sets, one end of the live-roller is connected by the output shaft of first shaft coupling and the first magnetic fluid seal driving device, the other end
Connected by the input shaft of second shaft coupling and the second magnetic fluid seal driving device.
It advanced optimizes, several driving roller units are arranged in parallel and are rotatably connected in the vacuum cavity, adjacent
It is rotated synchronously between the driving roller unit by driving member, the input terminal of one of them driving roller unit and the driving
Device transmission connection, the output end of each driving roller unit are connect with monitoring device.
It advanced optimizes, the driving member includes the first synchronizing wheel, the second synchronizing wheel and synchronous belt, first synchronizing wheel
It is fixedly connected on the second synchronizing wheel on the input shaft of the first magnetic fluid seal driving device, first synchronizing wheel is located at
The outside of second synchronizing wheel, the first synchronizing wheel or second on the first magnetic fluid seal driving device of adjacent two are synchronous
Wheel is connected by the toothed belt transmission.
It advanced optimizes, the monitoring device includes several monitoring unit, each second magnetic fluid seal driving dress
The output shaft set has been correspondingly connected with the monitoring unit.
It advanced optimizes, each monitoring unit is electrically connected with warning device.
It advanced optimizes, the driving device passes through transmission belt and the transmission connection of the first synchronizing wheel or the second synchronizing wheel.
Beneficial effects of the present invention: the output end that the present invention passes through each driving roller unit in vacuum equipment live-roller
It is connect with monitoring device, can directly monitor the working condition of each driving roller unit, when event occurs for a certain driving roller unit
When barrier, monitoring device can be monitored accurately and be the discovery which driving roller unit breaks down, and may be implemented quickly to check, really
Guarantor takes counter-measure to equipment in time, bigger loss caused by avoiding because of failure.
Detailed description of the invention
The present invention is further described with embodiment with reference to the accompanying drawing.
Fig. 1 is the structural schematic diagram of the present embodiment;
Fig. 2 is the connection schematic diagram of driving device and driving member.
Specific embodiment
The vacuum equipment live-roller with on-line monitoring function as depicted in figs. 1 and 2, including driving device 1, vacuum chamber
Body 2, at least one set of driving roller unit and monitoring device, driving roller unit are rotatably connected in the vacuum cavity 2, live-roller list
The input terminal and driving device 1 of member are sequentially connected, and the output end of driving roller unit is connect with monitoring device, and driving roller unit is driving
It is rotated under the drive of dynamic device, and monitors the revolving speed of driving roller unit by monitoring device.
Driving roller unit includes live-roller 41, the first magnetic fluid seal driving device 42 and the second magnetic fluid seal driving dress
43 are set, one end of live-roller 41 is connected by the output shaft of first shaft coupling 44 and the first magnetic fluid seal driving device 42, separately
One end is connected by the input shaft of second shaft coupling 45 and the second magnetic fluid seal driving device 43.First magnetic fluid seal driving
" O-ring seal " that device 42 and the second magnetic fluid seal driving device 43 are formed reaches the sealing effect to vacuum cavity 2.Together
When live-roller 41 one end pass through the output axis connection of first shaft coupling 44 and the first magnetic fluid seal driving device 42, live-roller
41 other end is connected by the input shaft of second shaft coupling 45 and the second magnetic fluid seal driving device 43, makes the first magnetic fluid
Sealed gearing device 42, live-roller 41 and the revolving speed having the same of the second magnetic fluid seal driving device 43.
When the quantity of driving roller unit is multiple, all driving roller units are arranged in parallel and are rotatably connected on vacuum chamber
It in body 2, is rotated synchronously between adjacent drive roller unit by driving member, the input terminal and driving dress of one of driving roller unit
1 transmission connection is set, the output end of each driving roller unit is connected with monitoring device.Each driving roller unit is in driving device and biography
It is rotated synchronously under the drive of moving part, the output end of each driving roller unit is connect with monitoring device, when some live-roller list
When member breaks down, monitoring device monitors that the revolving speed that corresponding revolving speed and monitoring device are arranged is different, and then judges it is tool
That driving roller unit of body breaks down, and realizes quickly investigation, it is ensured that takes the live-roller failure of vacuum equipment answer in time
To measure, bigger loss caused by avoiding because of failure.
Driving member includes the first synchronizing wheel 51, the second synchronizing wheel 52 and synchronous belt 53, and the first synchronizing wheel 51 is synchronous with second
Wheel 52 is fixedly connected on the input shaft of the first magnetic fluid seal driving device 42, and the first synchronizing wheel 51 is located at the second synchronizing wheel 52
Outside, the first synchronizing wheel 51 or the second synchronizing wheel 52 on two adjacent the first magnetic fluid seal driving devices 42 pass through same
Step band 53 connects, and rotates synchronously two adjacent the first magnetic fluid seal driving devices.
Monitoring device includes several monitoring unit 31, and the output shaft of each the second magnetic fluid seal driving device 43 connects
It is connected to corresponding monitoring unit 31, each monitoring unit 31 is electrically connected with warning device 6.When the second magnet fluid sealing passes
The dynamic corresponding monitoring unit 31 of device 43 monitors set by the revolving speed and monitoring unit 31 of the second magnetic fluid seal driving device 43
It when definite value difference, that is, can determine whether that corresponding driving roller unit breaks down, then notice management in time sounded an alarm by alarm
Personnel are handled.
Driving device 1 passes through transmission belt 7 and the transmission connection of the first synchronizing wheel 51 or the second synchronizing wheel 52.Using transmission belt 7
The mode of transmission, which can use the first synchronizing wheel 51 of design or the second synchronizing wheel 52 originally, can simplify the structure of device, simultaneously
The transmission belt kind of drive also has the characteristics that stable drive.
Certainly, the invention is not limited to above embodiment, those skilled in the art are without prejudice to the present invention
Equivalent deformation or replacement can be also made under the premise of spirit, these equivalent variation or replacement are all contained in the claim of this application
In limited range.
Claims (6)
1. a kind of vacuum equipment live-roller with on-line monitoring function, it is characterised in that: including driving device (1), vacuum chamber
Body (2), at least one set of driving roller unit and monitoring device;
The driving roller unit is rotatably connected in the vacuum cavity (2), the input terminal of the driving roller unit and the drive
Dynamic device (1) transmission connection, the output end of the driving roller unit are connect with monitoring device;
The driving roller unit includes that live-roller (41), the first magnetic fluid seal driving device (42) and the second magnet fluid sealing pass
One end of dynamic device (43), the live-roller (41) passes through first shaft coupling (44) and the first magnetic fluid seal driving device (42)
Output shaft connect, the other end passes through the input shaft phases of second shaft coupling (45) and the second magnetic fluid seal driving device (43)
It connects.
2. the vacuum equipment live-roller with on-line monitoring function according to claim 1, it is characterised in that: several described
Driving roller unit is arranged in parallel and is rotatably connected in the vacuum cavity (2), passes through biography between the adjacent driving roller unit
Moving part rotates synchronously, the input terminal of one of them driving roller unit and the driving device (1) transmission connection.
3. the vacuum equipment live-roller with on-line monitoring function according to claim 2, it is characterised in that: the transmission
Part includes that the first synchronizing wheel (51), the second synchronizing wheel (52) and synchronous belt (53), first synchronizing wheel (51) are synchronous with second
Wheel (52) is fixedly connected on the input shaft of the first magnetic fluid seal driving device (42), the first synchronizing wheel (51) position
The first synchronizing wheel in the outside of the second synchronizing wheel (52), on the first magnetic fluid seal driving device (42) of adjacent two
(51) or the second synchronizing wheel (52) is connected by the synchronous belt (53) transmission.
4. the vacuum equipment live-roller with on-line monitoring function according to claim 2 or 3, it is characterised in that: described
Monitoring device includes several monitoring unit (31), and the output shaft of each second magnetic fluid seal driving device (43) is corresponding
It is connected with the monitoring unit (31).
5. the vacuum equipment live-roller with on-line monitoring function according to claim 4, it is characterised in that: each described
Monitoring unit (31) is electrically connected with warning device (6).
6. the vacuum equipment live-roller with on-line monitoring function according to claim 3, it is characterised in that: the driving
Device (1) passes through transmission belt (7) and the transmission connection of the first synchronizing wheel (51) or the second synchronizing wheel (52).
Priority Applications (1)
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CN201810782250.3A CN108996106A (en) | 2018-07-17 | 2018-07-17 | A kind of vacuum equipment live-roller with on-line monitoring function |
Applications Claiming Priority (1)
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CN201810782250.3A CN108996106A (en) | 2018-07-17 | 2018-07-17 | A kind of vacuum equipment live-roller with on-line monitoring function |
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Publication Number | Publication Date |
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CN108996106A true CN108996106A (en) | 2018-12-14 |
Family
ID=64599494
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CN201810782250.3A Pending CN108996106A (en) | 2018-07-17 | 2018-07-17 | A kind of vacuum equipment live-roller with on-line monitoring function |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109573615A (en) * | 2018-12-17 | 2019-04-05 | 惠科股份有限公司 | A kind of transmission device and its detection method and conveyer system |
CN110456173A (en) * | 2019-08-09 | 2019-11-15 | 三峡大学 | Device for rapid survey high voltage electric field, the intensity in magnetic field and its variation |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109573615A (en) * | 2018-12-17 | 2019-04-05 | 惠科股份有限公司 | A kind of transmission device and its detection method and conveyer system |
CN110456173A (en) * | 2019-08-09 | 2019-11-15 | 三峡大学 | Device for rapid survey high voltage electric field, the intensity in magnetic field and its variation |
CN110456173B (en) * | 2019-08-09 | 2022-01-25 | 三峡大学 | Device for rapidly measuring strength and change of high-voltage electric field and magnetic field |
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