CN108996106A - A kind of vacuum equipment live-roller with on-line monitoring function - Google Patents

A kind of vacuum equipment live-roller with on-line monitoring function Download PDF

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Publication number
CN108996106A
CN108996106A CN201810782250.3A CN201810782250A CN108996106A CN 108996106 A CN108996106 A CN 108996106A CN 201810782250 A CN201810782250 A CN 201810782250A CN 108996106 A CN108996106 A CN 108996106A
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CN
China
Prior art keywords
roller unit
roller
driving
driving roller
synchronizing wheel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810782250.3A
Other languages
Chinese (zh)
Inventor
王志海
邝斌
戴春田
陈金良
齐鹏飞
何光俊
赖新暖
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhongshan Ruike New Energy Co Ltd
Original Assignee
Zhongshan Ruike New Energy Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhongshan Ruike New Energy Co Ltd filed Critical Zhongshan Ruike New Energy Co Ltd
Priority to CN201810782250.3A priority Critical patent/CN108996106A/en
Publication of CN108996106A publication Critical patent/CN108996106A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00Roller-ways
    • B65G13/02Roller-ways having driven rollers

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention discloses a kind of vacuum equipment live-rollers with on-line monitoring function, including driving device, vacuum cavity, at least one set of driving roller unit and monitoring device;The driving roller unit is rotatably connected in the vacuum cavity, and the input terminal of the driving roller unit and driving device transmission connection, the output end of the driving roller unit are connect with monitoring device.The present invention is connect with monitoring device by the output end of each driving roller unit in vacuum equipment live-roller, the working condition of each driving roller unit can directly be monitored, when a certain driving roller unit breaks down, monitoring device can be monitored accurately and be the discovery which driving roller unit breaks down, it may be implemented quickly to check, ensure to take counter-measure in time to equipment, bigger loss caused by avoiding because of failure.Present invention application technical field of vacuum equipment.

Description

A kind of vacuum equipment live-roller with on-line monitoring function
Technical field
The present invention relates to technical field of vacuum equipment, pass more particularly to a kind of vacuum equipment with on-line monitoring function Dynamic roller.
Background technique
Vacuum equipment is widely used in modernization industry production, such as physical gas phase deposition technology, chemical vapor deposition Technology, gas phase transport the field of industrial production such as deposition technique and plasma surface treatment technology.Most of vacuum equipments and its His equipment constitutes automation or semi-automatic production line, and the on-line monitoring of vacuum equipment live-roller failure is for the normal of production line Operation is of great significance.Live-roller is one of main kind of drive of vacuum equipment, and operating status on-line monitoring is especially heavy It wants.
Vacuum equipment mainly monitors live-roller by one or more of mode at present: the power of 1. monitoring live-rollers is defeated Enter the working condition of device (such as motor etc.);2. monitoring the working condition of driving member (such as synchronizing wheel, synchronous belt etc.);3. Monitor the working condition of live-roller input end connection (such as magnetic fluid seal driving device, shaft coupling etc.);4. monitoring vacuum The position for the workpiece that equipment is processed.Above method is by the working condition of some components in monitoring live-roller or to lead to The position judgement transmission roll working state for crossing monitoring vacuum equipment institute workpieces processing, cannot completely react the work of entire live-roller Make state, reliability is relatively low.
Summary of the invention
The purpose of the present invention is to provide a kind of vacuum equipment live-rollers with on-line monitoring function, can monitor each The working condition of live-roller, and live-roller Failure Alarm is provided in time, it is ensured that counter-measure is taken to equipment in time, is avoided for some reason Barrier causes bigger loss.
The technical scheme adopted by the invention is that: a kind of vacuum equipment live-roller with on-line monitoring function, including drive Dynamic device, vacuum cavity, at least one set of driving roller unit and monitoring device;The driving roller unit is rotatably connected on the vacuum In cavity, the input terminal of the driving roller unit and the driving device transmission connection, the output end of the driving roller unit with Monitoring device connection;
The driving roller unit includes live-roller, the first magnetic fluid seal driving device and the second magnetic fluid seal driving dress It sets, one end of the live-roller is connected by the output shaft of first shaft coupling and the first magnetic fluid seal driving device, the other end Connected by the input shaft of second shaft coupling and the second magnetic fluid seal driving device.
It advanced optimizes, several driving roller units are arranged in parallel and are rotatably connected in the vacuum cavity, adjacent It is rotated synchronously between the driving roller unit by driving member, the input terminal of one of them driving roller unit and the driving Device transmission connection, the output end of each driving roller unit are connect with monitoring device.
It advanced optimizes, the driving member includes the first synchronizing wheel, the second synchronizing wheel and synchronous belt, first synchronizing wheel It is fixedly connected on the second synchronizing wheel on the input shaft of the first magnetic fluid seal driving device, first synchronizing wheel is located at The outside of second synchronizing wheel, the first synchronizing wheel or second on the first magnetic fluid seal driving device of adjacent two are synchronous Wheel is connected by the toothed belt transmission.
It advanced optimizes, the monitoring device includes several monitoring unit, each second magnetic fluid seal driving dress The output shaft set has been correspondingly connected with the monitoring unit.
It advanced optimizes, each monitoring unit is electrically connected with warning device.
It advanced optimizes, the driving device passes through transmission belt and the transmission connection of the first synchronizing wheel or the second synchronizing wheel.
Beneficial effects of the present invention: the output end that the present invention passes through each driving roller unit in vacuum equipment live-roller It is connect with monitoring device, can directly monitor the working condition of each driving roller unit, when event occurs for a certain driving roller unit When barrier, monitoring device can be monitored accurately and be the discovery which driving roller unit breaks down, and may be implemented quickly to check, really Guarantor takes counter-measure to equipment in time, bigger loss caused by avoiding because of failure.
Detailed description of the invention
The present invention is further described with embodiment with reference to the accompanying drawing.
Fig. 1 is the structural schematic diagram of the present embodiment;
Fig. 2 is the connection schematic diagram of driving device and driving member.
Specific embodiment
The vacuum equipment live-roller with on-line monitoring function as depicted in figs. 1 and 2, including driving device 1, vacuum chamber Body 2, at least one set of driving roller unit and monitoring device, driving roller unit are rotatably connected in the vacuum cavity 2, live-roller list The input terminal and driving device 1 of member are sequentially connected, and the output end of driving roller unit is connect with monitoring device, and driving roller unit is driving It is rotated under the drive of dynamic device, and monitors the revolving speed of driving roller unit by monitoring device.
Driving roller unit includes live-roller 41, the first magnetic fluid seal driving device 42 and the second magnetic fluid seal driving dress 43 are set, one end of live-roller 41 is connected by the output shaft of first shaft coupling 44 and the first magnetic fluid seal driving device 42, separately One end is connected by the input shaft of second shaft coupling 45 and the second magnetic fluid seal driving device 43.First magnetic fluid seal driving " O-ring seal " that device 42 and the second magnetic fluid seal driving device 43 are formed reaches the sealing effect to vacuum cavity 2.Together When live-roller 41 one end pass through the output axis connection of first shaft coupling 44 and the first magnetic fluid seal driving device 42, live-roller 41 other end is connected by the input shaft of second shaft coupling 45 and the second magnetic fluid seal driving device 43, makes the first magnetic fluid Sealed gearing device 42, live-roller 41 and the revolving speed having the same of the second magnetic fluid seal driving device 43.
When the quantity of driving roller unit is multiple, all driving roller units are arranged in parallel and are rotatably connected on vacuum chamber It in body 2, is rotated synchronously between adjacent drive roller unit by driving member, the input terminal and driving dress of one of driving roller unit 1 transmission connection is set, the output end of each driving roller unit is connected with monitoring device.Each driving roller unit is in driving device and biography It is rotated synchronously under the drive of moving part, the output end of each driving roller unit is connect with monitoring device, when some live-roller list When member breaks down, monitoring device monitors that the revolving speed that corresponding revolving speed and monitoring device are arranged is different, and then judges it is tool That driving roller unit of body breaks down, and realizes quickly investigation, it is ensured that takes the live-roller failure of vacuum equipment answer in time To measure, bigger loss caused by avoiding because of failure.
Driving member includes the first synchronizing wheel 51, the second synchronizing wheel 52 and synchronous belt 53, and the first synchronizing wheel 51 is synchronous with second Wheel 52 is fixedly connected on the input shaft of the first magnetic fluid seal driving device 42, and the first synchronizing wheel 51 is located at the second synchronizing wheel 52 Outside, the first synchronizing wheel 51 or the second synchronizing wheel 52 on two adjacent the first magnetic fluid seal driving devices 42 pass through same Step band 53 connects, and rotates synchronously two adjacent the first magnetic fluid seal driving devices.
Monitoring device includes several monitoring unit 31, and the output shaft of each the second magnetic fluid seal driving device 43 connects It is connected to corresponding monitoring unit 31, each monitoring unit 31 is electrically connected with warning device 6.When the second magnet fluid sealing passes The dynamic corresponding monitoring unit 31 of device 43 monitors set by the revolving speed and monitoring unit 31 of the second magnetic fluid seal driving device 43 It when definite value difference, that is, can determine whether that corresponding driving roller unit breaks down, then notice management in time sounded an alarm by alarm Personnel are handled.
Driving device 1 passes through transmission belt 7 and the transmission connection of the first synchronizing wheel 51 or the second synchronizing wheel 52.Using transmission belt 7 The mode of transmission, which can use the first synchronizing wheel 51 of design or the second synchronizing wheel 52 originally, can simplify the structure of device, simultaneously The transmission belt kind of drive also has the characteristics that stable drive.
Certainly, the invention is not limited to above embodiment, those skilled in the art are without prejudice to the present invention Equivalent deformation or replacement can be also made under the premise of spirit, these equivalent variation or replacement are all contained in the claim of this application In limited range.

Claims (6)

1. a kind of vacuum equipment live-roller with on-line monitoring function, it is characterised in that: including driving device (1), vacuum chamber Body (2), at least one set of driving roller unit and monitoring device;
The driving roller unit is rotatably connected in the vacuum cavity (2), the input terminal of the driving roller unit and the drive Dynamic device (1) transmission connection, the output end of the driving roller unit are connect with monitoring device;
The driving roller unit includes that live-roller (41), the first magnetic fluid seal driving device (42) and the second magnet fluid sealing pass One end of dynamic device (43), the live-roller (41) passes through first shaft coupling (44) and the first magnetic fluid seal driving device (42) Output shaft connect, the other end passes through the input shaft phases of second shaft coupling (45) and the second magnetic fluid seal driving device (43) It connects.
2. the vacuum equipment live-roller with on-line monitoring function according to claim 1, it is characterised in that: several described Driving roller unit is arranged in parallel and is rotatably connected in the vacuum cavity (2), passes through biography between the adjacent driving roller unit Moving part rotates synchronously, the input terminal of one of them driving roller unit and the driving device (1) transmission connection.
3. the vacuum equipment live-roller with on-line monitoring function according to claim 2, it is characterised in that: the transmission Part includes that the first synchronizing wheel (51), the second synchronizing wheel (52) and synchronous belt (53), first synchronizing wheel (51) are synchronous with second Wheel (52) is fixedly connected on the input shaft of the first magnetic fluid seal driving device (42), the first synchronizing wheel (51) position The first synchronizing wheel in the outside of the second synchronizing wheel (52), on the first magnetic fluid seal driving device (42) of adjacent two (51) or the second synchronizing wheel (52) is connected by the synchronous belt (53) transmission.
4. the vacuum equipment live-roller with on-line monitoring function according to claim 2 or 3, it is characterised in that: described Monitoring device includes several monitoring unit (31), and the output shaft of each second magnetic fluid seal driving device (43) is corresponding It is connected with the monitoring unit (31).
5. the vacuum equipment live-roller with on-line monitoring function according to claim 4, it is characterised in that: each described Monitoring unit (31) is electrically connected with warning device (6).
6. the vacuum equipment live-roller with on-line monitoring function according to claim 3, it is characterised in that: the driving Device (1) passes through transmission belt (7) and the transmission connection of the first synchronizing wheel (51) or the second synchronizing wheel (52).
CN201810782250.3A 2018-07-17 2018-07-17 A kind of vacuum equipment live-roller with on-line monitoring function Pending CN108996106A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810782250.3A CN108996106A (en) 2018-07-17 2018-07-17 A kind of vacuum equipment live-roller with on-line monitoring function

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810782250.3A CN108996106A (en) 2018-07-17 2018-07-17 A kind of vacuum equipment live-roller with on-line monitoring function

Publications (1)

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CN108996106A true CN108996106A (en) 2018-12-14

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109573615A (en) * 2018-12-17 2019-04-05 惠科股份有限公司 A kind of transmission device and its detection method and conveyer system
CN110456173A (en) * 2019-08-09 2019-11-15 三峡大学 Device for rapid survey high voltage electric field, the intensity in magnetic field and its variation

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CN105189318A (en) * 2013-04-30 2015-12-23 伊东电机株式会社 Roller conveyor device, controller, and mechanical device abnormality detection method
WO2016019431A1 (en) * 2014-08-04 2016-02-11 Ezifix Mining Solutions Pty Ltd Conveyor roller monitoring apparatus, system and method
CN205471354U (en) * 2016-02-16 2016-08-17 重庆市欧华陶瓷有限责任公司 Roller fracture alarm device in roll table transfer chain
CN107235288A (en) * 2017-06-01 2017-10-10 昆山国显光电有限公司 A kind of roll-type transporting device
CN206750740U (en) * 2017-03-30 2017-12-15 镇江北新建材有限公司 A kind of live-roller gear of plaster tablet drying machine
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CN207275515U (en) * 2017-09-26 2018-04-27 江苏微导纳米装备科技有限公司 A kind of high-temperature vacuum cavity transmission mechanism
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CN201670558U (en) * 2010-04-20 2010-12-15 中原特钢股份有限公司 Roller way operation monitoring device
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CN102897535A (en) * 2012-10-17 2013-01-30 深圳市华星光电技术有限公司 Substrate-conveying system and substrate positioner
CN103112700A (en) * 2013-01-17 2013-05-22 辽宁科技大学 Long-distance belt conveyor roller fault detecting device
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CN204705198U (en) * 2015-06-03 2015-10-14 苏州汇科机电设备有限公司 The fire grate drives structure that a kind of chain can conveniently overhaul
CN204847154U (en) * 2015-07-30 2015-12-09 于远华 Belt conveyor with soft starting drive
CN205471354U (en) * 2016-02-16 2016-08-17 重庆市欧华陶瓷有限责任公司 Roller fracture alarm device in roll table transfer chain
CN206750740U (en) * 2017-03-30 2017-12-15 镇江北新建材有限公司 A kind of live-roller gear of plaster tablet drying machine
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CN207275515U (en) * 2017-09-26 2018-04-27 江苏微导纳米装备科技有限公司 A kind of high-temperature vacuum cavity transmission mechanism
CN208683674U (en) * 2018-07-17 2019-04-02 中山瑞科新能源有限公司 A kind of vacuum equipment live-roller with on-line monitoring function

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109573615A (en) * 2018-12-17 2019-04-05 惠科股份有限公司 A kind of transmission device and its detection method and conveyer system
CN110456173A (en) * 2019-08-09 2019-11-15 三峡大学 Device for rapid survey high voltage electric field, the intensity in magnetic field and its variation
CN110456173B (en) * 2019-08-09 2022-01-25 三峡大学 Device for rapidly measuring strength and change of high-voltage electric field and magnetic field

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