CN201695081U - Substrate delivery mechanism of horizontal vacuum coating machine - Google Patents
Substrate delivery mechanism of horizontal vacuum coating machine Download PDFInfo
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- CN201695081U CN201695081U CN2010202189053U CN201020218905U CN201695081U CN 201695081 U CN201695081 U CN 201695081U CN 2010202189053 U CN2010202189053 U CN 2010202189053U CN 201020218905 U CN201020218905 U CN 201020218905U CN 201695081 U CN201695081 U CN 201695081U
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- synchronous
- transmission shaft
- vacuum coating
- delivery mechanism
- substrate delivery
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Abstract
The utility model relates to a substrate delivery mechanism of a horizontal vacuum coating machine, which comprises a vacuum coating box body, a drive motor, a synchronous long shaft, drive shafts, synchronous belts, synchronous wheels and friction wheels. The synchronous long shaft is installed between two side box panels of the vacuum coating box body and is driven by the drive motor. The number of the drive shafts is multiple and the drive shafts are evenly arranged on the two side box panels of the vacuum coating box body in parallel. One end of each drive shaft is provided with one synchronous wheel. Every two adjacent drive shafts are driven by the synchronous belt. The other end of each drive shaft is provided with one friction wheel. The synchronous wheels arranged at the two ends of the synchronous long shaft are arranged on the drive shafts at the ends of the side box panels of the vacuum coating box body in a driving way respectively through the synchronous belts. The utility model has the advantages that the structure is simple and reliable, the manufacturing is easy, the substrate delivery stability is high, the replacement of the friction wheels is convenient, the industrialized production can be realized, and the substrate delivery mechanism can substitute for the substrate delivery mechanism of the production line of the existing horizontal vacuum coating machine and is particularly suitable for a TCO coating production line and the like.
Description
Technical field
The utility model discloses a kind of horizontal vacuum coating equipment substrate delivery mechanism, belong to vacuum plating machinery technical field.
Background technology
Traditional horizontal vacuum coating equipment production line, generally be at normal temperatures substrate surface to be carried out vacuum plating, its substrate delivery mechanism, many major axis normally evenly have been arranged in parallel in vacuum chamber, be evenly equipped with O shape rubber ring on the major axis, utilize between O shape rubber ring and the substrate and produce frictional force, realize the transmission of substrate.The transport unit of this structure under the situation of normal temperature vacuum plating, can satisfy the requirement that substrate is transmitted substantially; But because it adopts the structure that a plurality of O shape rubber rings are set on whole major axis, when O shape rubber ring uses for some time, wearing and tearing appear, when needing to change O shape rubber ring, whole major axis must be taken out, change O shape rubber ring more one by one, complex process, the time is long, influences the works better of complete machine.Particularly after production line coating process such as TCO occurred, vacuum plating was to carry out under the condition of heating, therefore, adopted O shape rubber ring as transmission parts, can not satisfy the needs of technology; This is because O shape rubber ring is at high temperature aging easily, distortion, causes shorten its work-ing life, and it is long to change O shape rubber ring complex procedures, time, influences the normal operation of equipment; Simultaneously, owing to adopt the structure of whole major axis, at high temperature, major axis deforms easily, causes the transport process smoothness to reduce, and influences the homogeneity of plated film.
The utility model content
The purpose of this utility model be to overcome the deficiency of prior art and provide a kind of simple in structure, reliable, processing and manufacturing easily, substrate transmits the smoothness height, friction wheel is changed horizontal vacuum coating equipment substrate delivery mechanism easily.
The utility model is to adopt following proposal to realize: a kind of horizontal vacuum coating equipment substrate delivery mechanism, comprise vacuum plating casing, driving motor, synchronous major axis, transmission shaft, synchronous band, synchronizing wheel, friction wheel, described synchronous major axis is installed between described vacuum plating casing two side box plates and by described driving motor and drives, and described synchronous major axis two ends respectively are provided with a synchronizing wheel; Described transmission shaft is a plurality of, parallel being distributed on described vacuum plating casing two side box plates, and the axis of described a plurality of transmission shafts is on the same straight line; One end of described each transmission shaft is provided with described synchronizing wheel, drives by described transmission belt between the adjacent in twos transmission shaft, and the other end of described each transmission shaft is provided with described friction wheel; The synchronizing wheel that described synchronous major axis two ends are provided with drives the transmission shaft of being located on this distolateral boxboard of vacuum plating casing by synchronous band respectively.
In the utility model, described friction wheel outer circumference surface is provided with guiding annular groove or the guiding annular steps with described friction wheel coaxial line, and the cross section of described guiding annular groove is a semicircular arc, and the cross section of described annular steps is 1/4 circular arc.
In the utility model, described friction wheel is made by the GCr15 material.
In the utility model, described transmission shaft is installed on described vacuum plating casing two side box plates by the magnetic current sealing cover.
The utility model is owing to adopt parallel uniform a plurality of transmission shafts on vacuum plating casing two side box plates, and the structure of friction wheel is set at an end of transmission shaft, two circular guideways that utilization is located under the substrate frame are installed on respectively between the guiding annular groove or guiding annular steps that is provided with on the described friction wheel, contact by the circular guideway that is provided with under friction wheel surface and the substrate frame, produce frictional force, realization is to the transmission of substrate frame, and then reaches and transmit the purpose that places the substrate on the substrate frame; Because transmission shaft is separately positioned on vacuum plating casing two side box plates, the transmission shaft end is provided with the structure of friction wheel, on the one hand, after the friction wheel wearing and tearing, when needing to change, only need directly the friction wheel of transmission shaft end to be dismantled, can change friction wheel easily, overcome prior art with changing the strigil complex procedures, the defective that time is long, on the other hand, because the transmission shaft branch is located on vacuum plating casing two side box plates, can adopt the very short minor axis of length, even under hot environment, the probability of its distortion reduces significantly, thereby, overcome that major axis at high temperature deforms easily in the prior art, cause the transport process smoothness to reduce, influence the inhomogeneity defective of plated film; In addition, the utility model adopts the magnetic current sealing cover, transmission shaft is installed on vacuum plating casing two side box plates, on the one hand, utilize the magnetic current sealing medium that is provided with in the magnetic current sealing cover to form the sealing transmission that vacuum dynamic seal is realized transmission shaft, on the other hand, utilize the cooling water recirculation system that is provided with in the magnetic current sealing cover, reduce the temperature of magnetic current sealing cover, effectively improve the stationarity of transmission shaft running and the high temperature life of magnetic current sealing cover; Particularly the utility model adopts a driving motor to drive synchronous major axis, then, by synchronous each transmission shaft of band transmission, effectively guarantees the synchronous rotation of each transmission shaft, further improves the stationarity that substrate transmits.
In sum, it is convenient that the utility model is simple in structure, reliable, processing and manufacturing easy, substrate transmits the smoothness height, friction wheel is changed, can realize suitability for industrialized production, substitute the substrate delivery mechanism of existing horizontal vacuum coating equipment production line, be adapted to the use of coating film production lines such as TCO especially.
Description of drawings
Accompanying drawing 1 is the utility model master sectional view.
Among the figure: 1--vacuum plating casing, the 2--driving motor, the synchronous major axis of 3--, the 4--transmission shaft, 5--is with synchronously, 6--synchronizing wheel, 7--friction wheel.
Embodiment
Concrete structure of the present utility model describes in detail below in conjunction with drawings and Examples.
Referring to accompanying drawing 1,2, a kind of horizontal vacuum coating equipment of the utility model substrate delivery mechanism, comprise vacuum plating casing 1, driving motor 2, synchronously major axis 3, transmission shaft 4, be with 5 synchronously, synchronizing wheel 6, friction wheel 7, described synchronous major axis 3 is installed between 1 liang of side box plate of described vacuum plating casing 8,9 and by described driving motor 2 and drives, and described synchronous major axis 3 two ends respectively are provided with a synchronizing wheel 6-1; Described transmission shaft 4 is a plurality of, parallel being distributed on 1 liang of side box plate of described vacuum plating casing 8,9, and the axis of described a plurality of transmission shafts 4 is on the same straight line; One end of described each transmission shaft 4 is provided with described synchronizing wheel 6-3, drives by described transmission belt 5 between the adjacent in twos transmission shaft 4, and the other end of described each transmission shaft 4 is provided with described friction wheel 7; The synchronizing wheel 6-2 that described synchronous major axis 3 two ends are provided with is respectively by driving the transmission shaft of being located on vacuum plating casing 1 this distolateral boxboard 4 with 5 synchronously; Described friction wheel 7 outer circumference surfaces are provided with guiding annular groove 10 or the guiding annular steps 11 with described friction wheel 7 coaxial lines, and the cross section of described guiding annular groove 10 is a semicircular arc, and the cross section of described annular steps 11 is 1/4 circular arc; Described friction wheel is made by the GCr15 material; Described transmission shaft 4 is installed on 1 liang of side box plate of described vacuum plating casing by magnetic current sealing cover 12.
Principle of work of the present utility model is sketched in following: two circular guideways that utilization is located under the substrate frame are installed on respectively between the guiding annular groove or guiding annular steps that is provided with on the described friction wheel, contact by the circular guideway that is provided with under friction wheel surface and the substrate frame, produce frictional force, realization is to the transmission of substrate frame, and then reaches and transmit the purpose that places the substrate on the substrate frame.
Claims (4)
1. horizontal vacuum coating equipment substrate delivery mechanism, comprise vacuum plating casing, driving motor, synchronous major axis, transmission shaft, synchronous band, synchronizing wheel, friction wheel, it is characterized in that: described synchronous major axis is installed between described vacuum plating casing two side box plates and by described driving motor and drives, and described synchronous major axis two ends respectively are provided with a synchronizing wheel; Described transmission shaft is a plurality of, parallel being distributed on described vacuum plating casing two side box plates, and the axis of described a plurality of transmission shafts is on the same straight line; One end of described each transmission shaft is provided with described synchronizing wheel, drives by described transmission belt between the adjacent in twos transmission shaft, and the other end of described each transmission shaft is provided with described friction wheel; The synchronizing wheel that described synchronous major axis two ends are provided with drives the transmission shaft of being located on this distolateral boxboard of vacuum plating casing by synchronous band respectively.
2. a kind of horizontal vacuum coating equipment substrate delivery mechanism according to claim 1, it is characterized in that: described friction wheel outer circumference surface is provided with guiding annular groove or the guiding annular steps with described friction wheel coaxial line, the cross section of described guiding annular groove is a semicircular arc, and the cross section of described annular steps is 1/4 circular arc.
3. a kind of horizontal vacuum coating equipment substrate delivery mechanism according to claim 2, it is characterized in that: described friction wheel is made by the GCr15 material.
4. a kind of horizontal vacuum coating equipment substrate delivery mechanism according to claim 3 is characterized in that: described transmission shaft is installed on described vacuum plating casing two side box plates by the magnetic current sealing cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202189053U CN201695081U (en) | 2010-06-08 | 2010-06-08 | Substrate delivery mechanism of horizontal vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202189053U CN201695081U (en) | 2010-06-08 | 2010-06-08 | Substrate delivery mechanism of horizontal vacuum coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201695081U true CN201695081U (en) | 2011-01-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010202189053U Expired - Lifetime CN201695081U (en) | 2010-06-08 | 2010-06-08 | Substrate delivery mechanism of horizontal vacuum coating machine |
Country Status (1)
| Country | Link |
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| CN (1) | CN201695081U (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101974737A (en) * | 2010-07-28 | 2011-02-16 | 常州亿晶光电科技有限公司 | Graphite boat anti-seize transmission device |
| CN104213094A (en) * | 2013-06-04 | 2014-12-17 | 金弼 | Vacuum coating device |
| CN105543789A (en) * | 2015-12-31 | 2016-05-04 | 苏州新爱可镀膜设备有限公司 | Roller way conveying mechanism in film plating production line |
| CN106567912A (en) * | 2016-11-07 | 2017-04-19 | 中国电子科技集团公司第四十八研究所 | Belt transmission device for flat PECVD devices |
| CN108996106A (en) * | 2018-07-17 | 2018-12-14 | 中山瑞科新能源有限公司 | A kind of vacuum equipment live-roller with on-line monitoring function |
| CN109238695A (en) * | 2018-09-19 | 2019-01-18 | 中山瑞科新能源有限公司 | A kind of vacuum equipment with live-roller on-line monitoring function |
| CN109594054A (en) * | 2018-12-25 | 2019-04-09 | 苏州方昇光电股份有限公司 | Vacuum coating flow transfer device and its transmission method and application |
| CN110093594A (en) * | 2019-05-20 | 2019-08-06 | 北京捷造光电技术有限公司 | One kind being used for large area PECVD substrate transfer structure |
-
2010
- 2010-06-08 CN CN2010202189053U patent/CN201695081U/en not_active Expired - Lifetime
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101974737A (en) * | 2010-07-28 | 2011-02-16 | 常州亿晶光电科技有限公司 | Graphite boat anti-seize transmission device |
| CN101974737B (en) * | 2010-07-28 | 2014-04-16 | 常州亿晶光电科技有限公司 | Graphite boat anti-seize transmission device |
| CN104213094A (en) * | 2013-06-04 | 2014-12-17 | 金弼 | Vacuum coating device |
| CN105543789A (en) * | 2015-12-31 | 2016-05-04 | 苏州新爱可镀膜设备有限公司 | Roller way conveying mechanism in film plating production line |
| CN105543789B (en) * | 2015-12-31 | 2018-06-19 | 苏州新爱可镀膜设备有限公司 | Roller conveyor structure in coating film production line |
| CN106567912A (en) * | 2016-11-07 | 2017-04-19 | 中国电子科技集团公司第四十八研究所 | Belt transmission device for flat PECVD devices |
| CN108996106A (en) * | 2018-07-17 | 2018-12-14 | 中山瑞科新能源有限公司 | A kind of vacuum equipment live-roller with on-line monitoring function |
| CN109238695A (en) * | 2018-09-19 | 2019-01-18 | 中山瑞科新能源有限公司 | A kind of vacuum equipment with live-roller on-line monitoring function |
| CN109594054A (en) * | 2018-12-25 | 2019-04-09 | 苏州方昇光电股份有限公司 | Vacuum coating flow transfer device and its transmission method and application |
| CN110093594A (en) * | 2019-05-20 | 2019-08-06 | 北京捷造光电技术有限公司 | One kind being used for large area PECVD substrate transfer structure |
| CN110093594B (en) * | 2019-05-20 | 2021-05-18 | 北京捷造光电技术有限公司 | Be used for large tracts of land PECVD substrate transmission structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: XIANGTAN HONGDA VACUUM TECHNOLOGY CO., LTD. Free format text: FORMER NAME: XIANGTAN HONGDA VACUUM EQUIPMENT CO., LTD. |
|
| CP01 | Change in the name or title of a patent holder |
Address after: 411100 Hunan province Xiangtan City Jiuhua Industrial Park Shengshi Road No. 8 Patentee after: Xiangtan Hongda Vacuum Technology Co., Ltd. Address before: 411100 Hunan province Xiangtan City Jiuhua Industrial Park Shengshi Road No. 8 Patentee before: Xiangtan Hongda Vacuum Equipment Co., Ltd. |
|
| CX01 | Expiry of patent term |
Granted publication date: 20110105 |
|
| CX01 | Expiry of patent term |