CN109594054A - Vacuum coating flow transfer device and its transmission method and application - Google Patents
Vacuum coating flow transfer device and its transmission method and application Download PDFInfo
- Publication number
- CN109594054A CN109594054A CN201811587603.0A CN201811587603A CN109594054A CN 109594054 A CN109594054 A CN 109594054A CN 201811587603 A CN201811587603 A CN 201811587603A CN 109594054 A CN109594054 A CN 109594054A
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- transmission
- assembly
- wheel
- transfer device
- vacuum coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention provides a kind of vacuum coating flow transfer device and its transmission method and applications, including transfer chamber, are set to the driving mechanism transmitting indoor transmission assembly and being sequentially connected with transmission assembly；Pass-through box is offered on the side wall of transfer chamber, driving mechanism includes horizontal drive component and the rotary drive assembly with transmission assembly transmission connection；Rotary drive assembly is for circumferentially rotating the transmission assembly, to adjust the transmission direction of transmission assembly；Transmission assembly includes bearing support, more than one transmission axle being set on bearing support and the transmission wheel being set on transmission axle, and transmission wheel is sequentially connected with horizontal drive component synchronization.The transfer device can be applied to vacuum coating production line, and the present invention realizes that the specimen holder after contraposition freely transmits in each functional chamber.Meanwhile the open loop and closed-loop type structure of production line may be implemented in structure of the invention, improves efficiency and utilization of area rate.
Description
Technical field
The invention belongs to technical field of vacuum plating more particularly to a kind of vacuum coating flow transfer device and its transmitting sides
Method and application.
Background technique
Organic thin film electroluminescent display device (OLED) is one that organic semiconducting materials shine under electric field action
Emerging technology is rapidly developed in recent years.The low energy consumption of OLED illuminating product, environmental protection, ultra-thin, high color saturation, face
The advantages that light source, becomes one of the main trend of the following illuminating product development.Nowadays OLED illuminating device mainly passes through
Prepared by the method for evaporation coating, in actual production, because it will be produced in high vacuum conditions, and there is multiple tracks work is deposited
Skill, traditional producing line scheme are using cluster formula (Cluster) structure, i.e., multiple octagonal cavitys are connected, each illiciumverum cavity
The vapor deposition cavity that different function is installed on each side is used in intermediate octagonal cavity as transmission, and inside is equipped with transmission and uses
Manipulator, the product being deposited (glass substrate) pass sequentially through each octagonal cavity.Octagonal cavity is main as transmitting cavity
Substrate is completed from a function cavity to another functional chamber by vacuum mechanical-arm.For large size vapor deposition production line, very
Empty manipulator is expensive, and what it is due to transmitting is usually transmitting glass substrate, and lighter in weight leads to the vapor deposition cavity of each function
Alignment device is all needed, and this transfer mode evaporation source is only point source, cannot achieve line evaporation source mode and evaporate, low efficiency,
Stock utilization is low.
Summary of the invention
In order to solve the deficiencies in the prior art, the present invention provides a kind of film flow transfer device and its transmission method with answer
With.
The purpose of the present invention is achieved through the following technical solutions:
A kind of vacuum coating flow transfer device, including transfer chamber, be set to the indoor transmission assembly of transmitting and with the transmission
The driving mechanism of component transmission connection；Pass-through box is offered on the side wall of the transfer chamber, the transfer chamber passes through each biography
Window is passed to be connected to from different functional compartments respectively；
The driving mechanism includes horizontal drive component and rotary drive assembly；The rotary drive assembly and the transmission assembly
Transmission connection, for circumferentially rotating the transmission assembly, to adjust the transmission direction of transmission assembly；
The transmission assembly includes bearing support, transmission axle and transmission wheel, and the transmission wheel is set to described hold by transmission axle
It carries on bracket, the transmission wheel is provided with more than one, and the transmission wheel is sequentially connected with the horizontal drive component synchronization.
Preferably, the rotary drive assembly includes first motor, the magnetic fluid with the transmission connection of first motor output shaft
Sealing element, one end of the magnetic fluid seal are connect with the transmission assembly.
Preferably, the transmission assembly further includes the synchronizing wheel being fixedly connected on the transmission axle and is connected to each described
Transmission belt between synchronizing wheel, the synchronizing wheel pass through transmission belt Synchronous Transmission.
Preferably, the horizontal drive component includes the second motor, and the driving wheel connecting with the second motor output shaft is described
Driving wheel is sequentially connected by transmission belt and synchronizing wheel.
Preferably, the magnetic fluid seal includes axle sleeve and shaft, and one end of the shaft and the transmission assembly connect
It connects, the other end and first motor are sequentially connected, and hollow cavity is provided in the shaft, and the driving wheel and transmission belt setting exist
In the hollow cavity, second motor is fixed in the shaft.
Preferably, the two sides of the bearing support are provided with mutual corresponding first limit assembly, two be oppositely arranged
Distance between first limit assembly is suitable with the width of the sample, first limit assembly be set to neighboring transmission wheel it
Between.
Preferably, the second limit assembly is provided on the side wall of the transfer chamber, second limit assembly is oppositely arranged
In the two sides of pass-through box.
Preferably, the transfer chamber bottom is provided with the transmitting support wheel for being used to support the sample, the transmitting support
Wheel is respectively arranged at below pass-through box.
Preferably, a kind of vacuum coating production line, the vacuum coating stream including at least one as described in any of the above one
Piece transfer device, further includes multiple functional compartments, and the multiple functional compartments are the laminating chamber of sequentially connected substrate exposure mask, first have
Machine deposited chamber, the first transfer transition room, the second organic vapor deposition room, the separation chamber of substrate exposure mask and the second transfer transition room, it is described
Pass through the end to end formation ring structure in the second transfer transition room, the vacuum coating flow transmitting between laminating chamber and separation chamber
The transfer chamber of device is set between functional compartments described in any two.
Preferably, the sample of vacuum coating flow transfer device described in any of the above or the vacuum evaporation production line
Transmission method, transmission method include the following steps,
S1, the starting rotary drive assembly, adjust the transmission direction of transmission assembly, are allowed to the pass-through box phase with sample to be passed
It is corresponding；
S2, sample to be passed is entered into transfer chamber by pass-through box from transfer chamber side, and makes sample support on transmission wheel；
S3, starting horizontal drive component, driving transmission wheel operating, the transmission wheel drive the sample to reach rotation process position
It sets；
S4, rotary drive assembly driving transmission assembly rotate predetermined angular；
S5, horizontal drive Component driver transmission wheel continue to transmit, until sample spreads out of transfer device.
The beneficial effects of the present invention are embodied in: the specimen holder after realizing contraposition freely transmits in each functional chamber.Using
Linear transfer mode, allows evaporation source line source in functional chamber, improves efficiency and stock utilization.Meanwhile this hair
The open loop and closed-loop type structure of production line may be implemented in bright structure, improves efficiency and utilization of area rate.
Detailed description of the invention
Fig. 1: the schematic perspective view of vacuum coating flow transfer device of the present invention.
Fig. 2: Fig. 1 another view stereo structural schematic diagram.
Fig. 3: the schematic diagram of the section structure of vacuum coating flow transfer device of the present invention.
Fig. 4: the structural schematic diagram of vacuum coating flow transfer device of the present invention when in use.
Fig. 5: vacuum coating flow transfer device of the present invention cooperates schematic diagram with other functional compartments.
Fig. 6: vacuum coating production line schematic diagram of the present invention.
Specific embodiment
With reference to embodiments and attached drawing is specifically described technical solution of the present invention, and present invention discloses a kind of vacuum coatings
Flow transfer device, as shown in connection with fig. 6, the transfer device are applied in vacuum coating production line.The production line has multiple function
Energy room is constituted, and the multiple functional compartments are the laminating chamber 51 of sequentially connected substrate exposure mask, the first organic vapor deposition room 52, first biography
Defeated transition chamber 53, the second organic vapor deposition room 54, the separation chamber 55 of substrate exposure mask and the second transfer transition room 56, the laminating chamber 51
Pass through the end to end formation ring structure in the second transfer transition room 53, the vacuum coating flow transmitting dress between separation chamber 55
The transfer chamber 1 set is set between functional compartments described in any two.Specifically, in conjunction with shown in Fig. 1-Fig. 5, the vacuum coating stream
Piece transfer device include the transfer chamber 1 being set in rack 3, the transmission assembly being set in transfer chamber 1 and with the transmission group
The driving mechanism of part transmission connection.In order to facilitate movement, the bottom of the rack 3 is provided with shifting roller 31.The transfer chamber 1
Side wall on offer pass-through box 11, the vacuum coating flow transfer device by each pass-through box 11 respectively from it is different
Functional compartments connection.The structure of the transfer chamber 1 can diversification, use is rectangular, round or polygon, and four are used in the present embodiment
Side shape, the pass-through box 11 are set on each side wall of transfer chamber 1.
The driving mechanism includes horizontal drive component and the rotary drive assembly for circumferentially rotating the transmission assembly；
The rotary drive assembly and the transmission assembly are sequentially connected, to adjust the transmission direction of transmission assembly.
The transmission assembly includes bearing support 2, transmission axle 21 and transmission wheel 22, and the transmission wheel 22 passes through transmission axle 21
It is set on the bearing support 2, the transmission wheel 22 is provided with more than one, the transmission wheel 22 and the horizontal drive group
The connection of part Synchronous Transmission.Transmission wheel described in the present embodiment 22 is provided with four groups, avoid sample in the transmission due to frictional force not
Foot causes slipping phenomenon.Simultaneously as sample in transmission process it is possible that the case where laterally offset, preferably to carry out
Limit, the transmission takes turns 22 borders and uses staged, and cascaded surface of the transmission wheel 22 close to 21 end of transmission axle is lower, the sample
It is placed on the ladder end face between opposite transmission wheel 22.
It is fixedly connected with synchronizing wheel 23 on the transmission axle 21, is connected with transmission belt 24, institute between each synchronizing wheel 23
It states synchronizing wheel 23 and passes through 24 Synchronous Transmission of transmission belt.Preferably to cooperate transmission, transmission belt is avoided to skid, adjacent synchronizing wheel it
Between be provided with pinch roller 25, the pressure holding of pinch roller 25, so that transmission belt 24 keeps some tension, increases transmission belt in transmission belt 24
Frictional force between 24 and synchronizing wheel avoids skidding, it is ensured that accurate transmission.
In order to assist limit of the sample in transmission process, the two sides of the bearing support 2 are provided with mutual corresponding
One limit assembly 211, the distance between two the first limit assemblies 211 being oppositely arranged is suitable with the width of the sample, described
First limit assembly 211 is set between neighboring transmission wheel 22, and in the present embodiment, first limit assembly 211 is using limit
Wheel form reduces the friction between the first limit assembly 211 and the sample while definitely defining horizontal direction of transfer
Power.The second limit assembly 222 is provided on the side wall of the transfer chamber 1, second limit assembly 222 is oppositely arranged on transmitting
The two sides of window 11.
1 bottom of transfer chamber is provided with the transmitting support wheel 223 for being used to support the sample, the transmitting support wheel
223 are respectively arranged at 11 lower section of pass-through box, since transmission wheel 22 is apart from 11 certain distance of pass-through box, when one end of sample is from one
When functional compartments are by the entrance transfer chamber 1 of pass-through box 11, or when sample is from by the next functional compartments of entrance of pass-through box 11, sample
The extension end of product 4 does not have stress point, and Yi Fasheng, which is turned over, to be fallen, and the end of the sample is supported on by the support wheel 223, avoids institute
Unstable turn over of sample center of gravity is stated to fall.To avoid substrate end from being run into, generally places the substrate on specimen holder and is transmitted,
Sample 4 i.e. in the present invention preferentially uses specimen holder.
The rotary drive assembly includes first motor 61, the magnetic fluid seal 28 being arranged in outside transfer chamber 1, described
28 one end of magnetic fluid seal and first motor output shaft are sequentially connected, and the other end of the magnetic fluid seal 28 passes through transmitting
The cavity wall of room 1 is connect with the transmission assembly.The magnetic fluid seal 28 is set to 1 lower section of transfer chamber, and the magnetic fluid is close
Sealing 28 is connect including shaft and the axle sleeve being set in outside the shaft, one end of the shaft with bearing support 2, and the other end is logical
The output shaft for crossing transmission belt and first motor 61 is sequentially connected, and the first motor output shaft rotation drives the shaft rotation,
To drive the transmission assembly unitary rotation, so that the horizontal direction of transfer of transmission assembly is adjusted, it is corresponding with each pass-through box.
The horizontal drive component includes the second motor 6, the driving wheel 26 with the second motor 6 output axis connection, the drive
Driving wheel 26 is sequentially connected by transmission belt 27 and synchronizing wheel 23.Specifically, one is provided in the shaft of the magnetic fluid seal
The hollow cavity of end opening, the driving wheel 26 and transmission belt 27 are arranged in the hollow cavity, and second motor 6 is fixed
It is arranged in the shaft.The output shaft of second motor 6 passes through the side wall of the shaft, with the intracorporal drive of the hollow cavity
Driving wheel is coaxially connected, and one end of the transmission belt 27 bypasses driving wheel 26, and the other end is driven the synchronizing wheel by the opening
23, the rotation of the second motor drives synchronizing wheel rotation, to drive transmission wheel rotation, conveys the sample in the horizontal direction.It is described
Driving wheel 26 can also use gear or sprocket form, herein with no restrictions.Present invention further teaches above-described Vacuum Depositions
The sample transmission method of film flow transfer device or the vacuum evaporation production line, transmission method include the following steps,
S1, the starting rotary drive assembly, adjust the transmission direction of transmission assembly, are allowed to the transmitting with sample to be passed 4
Window is corresponding；
S2, sample 4 to be passed is entered into transfer chamber by pass-through box 11 from 1 side of transfer chamber, and transmits sample support
On wheel 22；
S3, starting horizontal drive component, 22 operating of driving transmission wheel, the transmission wheel 22 drive the sample to reach rotation process
Position；
S4, rotary drive assembly driving transmission assembly rotate predetermined angular；If desired in orthogonal first functional compartments 71 or
It is transmitted in second functional compartments 72, then the rotation angle of transmission assembly is 90 °.
S5, horizontal drive Component driver transmission wheel continue to transmit, until sample 4 spreads out of transfer device.
Sample in the present invention can may be specimen holder for substrate, pass through rotary drive assembly and horizontal drive group
Part combines, and can freely transmit sample in each functional chamber with production requirement, greatly improve efficiency of transmission.
Hereinafter, the combined vacuum coating production line course of work illustrates the concrete application of vacuum coating flow transfer device, this
In embodiment, there are four the tools of transfer chamber 1, is separately positioned on 53 both ends of the first transfer transition room and the second transfer transition
56 both ends of room.The vacuum coating production line at work, imports substrate exposure mask laminating chamber 51 after substrate cleaning, aligns with MASK
It is fixed on MASK clip together afterwards, from the transmission mechanism of inside cavity to driving front together with MASK clip, process first has
Machine deposited chamber 52 completes first time organic material vapor deposition, then turns round by two transfer chambers 1 and the first transfer transition room
Second of organic material vapor deposition is completed using the second organic vapor deposition room 54 after 180 °.After the completion of vapor deposition, substrate transfer to substrate
The separation chamber MASK separates substrate with MASK clip, and substrate is taken away the electrode vapor deposition for carrying out rear end, MASK clip warp by manipulator
It is turned round after 180 ° by two transfer chambers 1 and the second transfer transition room and is re-transmitted to substrate exposure mask laminating chamber 51, under loading
Continue to be deposited after one substrate.During vapor deposition, substrate makees uniform motion, and line source is static, the knot of the linear evaporation source simplified
The control logic of structure and substrate motion.The upper a piece of MASK being deposited directly is back to starting point and connects next substrate, improves
The utilization rate of MASK, substantially increases production efficiency.The vacuum coating flow transfer device is applied in the circular line
In, compared to manipulator etc. transmitting steering mode can the significantly more efficient space using vacuum evaporation producing line, can quickly essence
The direction of transfer of true adjustment Large substrates or specimen holder, improves the working efficiency of the entire production line.
Certainly still there are many specific embodiments by the present invention, are just not listed one by one herein.It is all using equivalent replacement or
Equivalent transformation and all technical solutions formed, all fall within the scope of protection of present invention.
Claims (10)
1. a kind of vacuum coating flow transfer device, it is characterised in that: including transfer chamber, be set to the indoor transmission assembly of transmitting
And the driving mechanism with transmission assembly transmission connection；Pass-through box, the transfer chamber are offered on the side wall of the transfer chamber
It is connected to respectively from different functional compartments by each pass-through box；
The driving mechanism includes horizontal drive component and rotary drive assembly；The rotary drive assembly and the transmission assembly
Transmission connection, for circumferentially rotating the transmission assembly, to adjust the transmission direction of transmission assembly；
The transmission assembly includes bearing support, transmission axle and transmission wheel, and the transmission wheel is set to described hold by transmission axle
It carries on bracket, the transmission wheel is provided with more than one, and the transmission wheel is sequentially connected with the horizontal drive component synchronization.
2. vacuum coating flow transfer device as described in claim 1, it is characterised in that: the rotary drive assembly includes the
One motor, the magnetic fluid seal with the transmission connection of first motor output shaft, one end of the magnetic fluid seal and the biography
Defeated component connection.
3. vacuum coating flow transfer device as claimed in claim 2, it is characterised in that: the transmission assembly further includes fixing
The synchronizing wheel being connected on the transmission axle and the transmission belt being connected between each synchronizing wheel, the synchronizing wheel pass through transmission
Band Synchronous Transmission.
4. vacuum coating flow transfer device as claimed in claim 3, it is characterised in that: the horizontal drive component includes the
Two motors, the driving wheel connecting with the second motor output shaft, the driving wheel are sequentially connected by transmission belt and synchronizing wheel.
5. vacuum coating flow transfer device as claimed in claim 4, it is characterised in that: the magnetic fluid seal includes axis
Set and shaft, one end of the shaft are connect with the transmission assembly, and the other end and first motor are sequentially connected, in the shaft
It is provided with hollow cavity, the driving wheel and transmission belt are arranged in the hollow cavity, and second motor is fixed at
In the shaft.
6. vacuum coating flow transfer device as described in claim 1, it is characterised in that: the two sides of the bearing support are arranged
There is mutual corresponding first limit assembly, distance and the width phase of the sample between two the first limit assemblies being oppositely arranged
When first limit assembly is set between neighboring transmission wheel.
7. vacuum coating flow transfer device as described in claim 1, it is characterised in that: be arranged on the side wall of the transfer chamber
There is the second limit assembly, second limit assembly is oppositely arranged on the two sides of pass-through box.
8. vacuum coating flow transfer device as described in claim 1, it is characterised in that: the transfer chamber bottom setting is useful
In the transmitting support wheel for supporting the sample, the transmitting support wheel is respectively arranged at below pass-through box.
9. vacuum coating production line, it is characterised in that: including at least one Vacuum Deposition as described in claim 1-8 any one
Film flow transfer device, further includes multiple functional compartments, and the multiple functional compartments are the laminating chamber of sequentially connected substrate exposure mask, the
One organic vapor deposition room, the first transfer transition room, the second organic vapor deposition room, the separation chamber of substrate exposure mask and the second transfer transition room,
Pass through the end to end formation ring structure in the second transfer transition room, the vacuum coating flow between the laminating chamber and separation chamber
Transfer chamber in transfer device is set between functional compartments described in any two.
10. the vacuum evaporation production line as described in vacuum coating flow transfer device or 9 as described in claim 1-8 arbitrarily
Sample transmission method, it is characterised in that: its transmission method includes the following steps,
S1, the starting rotary drive assembly, adjust the transmission direction of transmission assembly, are allowed to the pass-through box phase with sample to be passed
It is corresponding；
S2, sample to be passed is entered into transfer chamber by pass-through box from transfer chamber side, and makes sample support on transmission wheel；
S3, starting horizontal drive component, driving transmission wheel operating, the transmission wheel drive the sample to reach rotation process position
It sets；
S4, rotary drive assembly driving transmission assembly rotate predetermined angular；
S5, horizontal drive Component driver transmission wheel continue to transmit, until sample spreads out of transfer device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811587603.0A CN109594054A (en) | 2018-12-25 | 2018-12-25 | Vacuum coating flow transfer device and its transmission method and application |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811587603.0A CN109594054A (en) | 2018-12-25 | 2018-12-25 | Vacuum coating flow transfer device and its transmission method and application |
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| Publication Number | Publication Date |
|---|---|
| CN109594054A true CN109594054A (en) | 2019-04-09 |
Family
ID=65964274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811587603.0A Pending CN109594054A (en) | 2018-12-25 | 2018-12-25 | Vacuum coating flow transfer device and its transmission method and application |
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| Country | Link |
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| CN (1) | CN109594054A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114875374A (en) * | 2022-05-27 | 2022-08-09 | 安徽越好电子装备有限公司 | Transfer chamber, magnetron sputtering coating system and method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200981891Y (en) * | 2006-08-28 | 2007-11-28 | 深圳豪威真空光电子股份有限公司 | Substrate frame film coating device |
| CN201695081U (en) * | 2010-06-08 | 2011-01-05 | 湘潭宏大真空设备有限公司 | Substrate delivery mechanism of horizontal vacuum coating machine |
| CN102051581A (en) * | 2010-12-30 | 2011-05-11 | 东莞宏威数码机械有限公司 | Substrate film-coating processing system |
| CN102115875A (en) * | 2009-12-30 | 2011-07-06 | 初星太阳能公司 | Conveyor assembly with removable rollers for a vapor deposition system |
| JP2014007313A (en) * | 2012-06-26 | 2014-01-16 | Ulvac Japan Ltd | Substrate holding device and substrate processing apparatus |
-
2018
- 2018-12-25 CN CN201811587603.0A patent/CN109594054A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200981891Y (en) * | 2006-08-28 | 2007-11-28 | 深圳豪威真空光电子股份有限公司 | Substrate frame film coating device |
| CN102115875A (en) * | 2009-12-30 | 2011-07-06 | 初星太阳能公司 | Conveyor assembly with removable rollers for a vapor deposition system |
| CN201695081U (en) * | 2010-06-08 | 2011-01-05 | 湘潭宏大真空设备有限公司 | Substrate delivery mechanism of horizontal vacuum coating machine |
| CN102051581A (en) * | 2010-12-30 | 2011-05-11 | 东莞宏威数码机械有限公司 | Substrate film-coating processing system |
| JP2014007313A (en) * | 2012-06-26 | 2014-01-16 | Ulvac Japan Ltd | Substrate holding device and substrate processing apparatus |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114875374A (en) * | 2022-05-27 | 2022-08-09 | 安徽越好电子装备有限公司 | Transfer chamber, magnetron sputtering coating system and method |
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