CN111606025A - Special workpiece coating equipment - Google Patents

Special workpiece coating equipment Download PDF

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Publication number
CN111606025A
CN111606025A CN202010322698.4A CN202010322698A CN111606025A CN 111606025 A CN111606025 A CN 111606025A CN 202010322698 A CN202010322698 A CN 202010322698A CN 111606025 A CN111606025 A CN 111606025A
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CN
China
Prior art keywords
workpiece
station
coating
platform
workpieces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202010322698.4A
Other languages
Chinese (zh)
Other versions
CN111606025B (en
Inventor
高文波
姜翠宁
徐从高
李本嫣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangdong Sheng Boer Photoelectric Technology Co ltd
Original Assignee
Guangdong Sheng Boer Photoelectric Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangdong Sheng Boer Photoelectric Technology Co ltd filed Critical Guangdong Sheng Boer Photoelectric Technology Co ltd
Priority to CN202010322698.4A priority Critical patent/CN111606025B/en
Publication of CN111606025A publication Critical patent/CN111606025A/en
Application granted granted Critical
Publication of CN111606025B publication Critical patent/CN111606025B/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B65G47/24Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
    • B65G47/248Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles by turning over or inverting them
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568Transferring the substrates through a series of coating stations

Abstract

The embodiment of the invention discloses special workpiece coating equipment, which comprises a workpiece conveying and primary treatment matching line, an automatic control production line and a vacuum coating production line; the vacuum coating production line comprises vacuum coating equipment, wherein the vacuum coating equipment is provided with a process chamber and a standing chamber; the workpiece conveying and primary processing matching line is used for turning the workpiece over and conveying the workpiece into the automatic control production line in a reverse side state after the workpiece is fed on the front side; and the automatic control device is used for turning over the workpiece and sending the workpiece to an automatic control production line in a front state after receiving the workpiece subjected to the reverse static placing; and the automatic control production line is arranged between the workpiece conveying and primary processing matching line and the vacuum coating production line. According to the embodiment of the invention, the production line is automatically controlled, and the workpiece conveying and primary treatment matching line and the vacuum coating production line are butted, so that the workpiece sequentially passes through the processes of front feeding, reverse coating, reverse static placing, front coating, front static placing and front discharging, the full-automatic treatment of the workpiece coating can be realized, and the automation degree is high.

Description

Special workpiece coating equipment
Technical Field
The invention relates to automatic film coating equipment for workpieces, in particular to full-automatic film coating equipment for the front and the back of a workpiece in a vacuum environment.
Background art:
with the progress of science and technology, the requirements on the processing technology of materials, particularly the surface coating technology, are higher and higher, while the conventional coating equipment at home and abroad has lower automation degree and has the defect of deformation of the surface of a workpiece caused by temperature rise in the coating process.
The invention content is as follows:
in order to solve the problem of low automation degree of the existing coating equipment, the embodiment of the invention provides the coating equipment for the special workpiece.
A special workpiece coating device at least comprises a workpiece conveying and primary processing matching line, an automatic control production line and a vacuum coating production line;
the vacuum coating production line at least comprises vacuum coating equipment, and the vacuum coating equipment is provided with a process chamber and a standing chamber positioned behind the process chamber; the process chamber is used for carrying out reciprocating reverse coating on the back of the workpiece in a back state, and the standing chamber is used for carrying out reverse standing treatment on the workpiece after the back coating is finished; the process chamber is used for carrying out reciprocating positive film coating on the front surface of the workpiece in the front surface state, and the static placing chamber is used for carrying out positive static placing treatment on the workpiece subjected to positive film coating;
the workpiece conveying and primary processing matching line is used for turning the workpiece over and conveying the workpiece into the automatic control production line in a reverse side state after the workpiece is fed on the front side; and the automatic control device is used for turning over the workpiece and sending the workpiece to an automatic control production line in a front state after receiving the workpiece subjected to the reverse static placing;
the automatic control production line is arranged between the workpiece conveying and primary processing matching line and the vacuum coating production line; at least used for receiving the workpiece which is sent from the reverse side after being overturned in the forward direction and conveying the workpiece to a process chamber of a vacuum coating production line in the forward direction; the workpiece is reversely conveyed to a workpiece conveying and primary processing matching line for overturning, so that the workpiece which is reversely placed is overturned to a front state; the processing chamber is used for positively receiving the workpiece which is conveyed in a positive state after being overturned and positively conveying the workpiece to the vacuum coating production line; and the workpiece is used for reversely receiving the workpiece which is withdrawn from the process chamber and is subjected to the positive standing and discharging, and conveying the workpiece to a discharging station for the front side discharging of the workpiece.
According to the embodiment of the invention, the production line is automatically controlled, and the workpiece conveying and primary treatment matching line and the vacuum coating production line are butted, so that the workpiece sequentially passes through the processes of front feeding, reverse coating, reverse static placing, front coating, front static placing and front discharging, the full-automatic treatment of the workpiece coating can be realized, and the automation degree is high.
Description of the drawings:
in order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic diagram of an exemplary layout of a special workpiece coating apparatus and auxiliary apparatus according to an embodiment of the present invention;
FIG. 2 is an exemplary functional block diagram of a special workpiece coating control system according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a 90 ° turnover apparatus according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a 180 ° turnover apparatus according to an embodiment of the present invention;
fig. 5 is a schematic structural view of the automatic grabbing and transferring device of the embodiment of the present invention moving back and forth between the combining station and the 180 ° turnover device;
FIG. 6 is a partial left view of FIG. 5;
fig. 7 is a schematic view of an installation structure of a gripping platform and a clamp of the automatic gripping and transferring device according to the embodiment of the present invention;
FIG. 8 is a schematic structural diagram of a four-station translational lifting device according to an embodiment of the invention;
FIG. 9 is an exemplary functional block diagram of an automatic control system for auxiliary coating of a special workpiece according to an embodiment of the present invention;
FIG. 10 is a schematic structural view of a vacuum deposition apparatus according to an embodiment of the present invention;
FIG. 11 is an exemplary functional block diagram of a special workpiece vacuum coating control system according to an embodiment of the present invention;
FIG. 12 is an exploded view of a special workpiece in accordance with an embodiment of the invention, right side up and carried by a first substrate holder;
fig. 13 is an exploded view of a special workpiece according to an embodiment of the invention, with the back side facing up and carried by a second substrate holder.
The specific implementation mode is as follows:
in order to make the technical problems, technical solutions and advantageous effects solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
When embodiments of the present invention refer to the ordinal numbers "first", "second", etc., it should be understood that the words are used for distinguishing between them unless the context clearly dictates otherwise.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The embodiment of the invention provides a special workpiece coating method, which is shown in a combined figure 1 and a figure 10 and at least comprises the following steps:
after the front surface of the workpiece is loaded, the workpiece is sent into a process chamber 12 of the vacuum coating equipment 1 in a reverse surface state;
carrying out reciprocating type reverse coating on the back of the workpiece in a process chamber 12 of the vacuum coating equipment 1;
performing anti-static placing treatment on the workpiece subjected to back surface coating in a static placing chamber 13 of the vacuum coating equipment 1;
after the workpiece is withdrawn from the vacuum coating equipment 1, the workpiece is sent into the process chamber 12 of the vacuum coating equipment 1 again in a positive state;
carrying out reciprocating positive film coating on the front surface of the workpiece in a process chamber 12 of the vacuum film coating equipment 1;
carrying out positive static placing treatment on the workpiece subjected to the positive surface film coating in a static placing chamber 13 of the vacuum film coating equipment 1;
the workpiece is conveyed to the unloading station 41 for front unloading of the workpiece.
According to the embodiment of the invention, the workpiece can sequentially pass through the processes of front feeding, reverse film coating, reverse static placing, front film coating, front static placing and front discharging, so that the full-automatic film coating treatment of the front feeding and the front discharging of the workpiece is realized, and the automation degree is high.
After the film coating device is applied to the workpiece, the film thickness of the surface of the workpiece meets the requirement of more than 2um, the uniformity of the film layer meets the requirement of less than 5%, the actually measured uniformity data can reach 1.06-1.42%, and the insulating property of the coated workpiece can reach more than 5.0E10 ohm.
The invention can make the daily output more than 2 sheets on the basis of meeting the process requirements, and can control the temperature rise within 70 ℃ in the film plating process, and finally balance to 65 ℃, and the surface of the workpiece can not deform due to the temperature rise.
As an equivalent embodiment of this embodiment, the present invention may also be a positive plating film, a positive static placing, a negative plating film, a negative static placing, and a selection of the positive plating film or the negative plating film in sequence, which may be determined according to actual requirements, and all belong to the protection scope of this application.
Similarly, as an equivalent implementation manner of this embodiment, the invention can also perform back-side loading and back-side unloading, and the selection of front-side loading or back-side loading is also determined according to actual requirements, and both belong to the protection scope of this application.
Further, as a preferable mode of the present embodiment, but not limited thereto, the step "after the workpiece is loaded on the front surface, the workpiece is sent to the process chamber 12 of the vacuum plating apparatus 1 in a reverse surface state" includes:
after the front surface of the workpiece is fed, turning the workpiece for 180 degrees for the first time and conveying the workpiece to a second substrate frame of the combination station 35; feeding the workpiece from the front side, namely conveying the workpiece in a state that the front side of the workpiece faces upwards;
forward conveying the workpiece and the second substrate holder from the combining station 35 to the automatic control production line 2;
the workpiece and the second substrate holder are forwardly output from the automatic control line 2 to the process chamber 12 of the vacuum plating apparatus 1.
Still further, as a preferable mode of the present embodiment, but not limited thereto, the method further includes, after the front surface of the workpiece is loaded and before the first 180 ° turnover:
cleaning the workpiece in a vertical state;
turning the workpiece by 90 degrees to enable the cleaned workpiece to be turned from a vertical state to a horizontal front state, wherein the front state refers to a state that the front of the workpiece faces upwards;
the work is conveyed to the buffer transfer station 33.
Further, as a preferable mode of the present embodiment without limitation, the step "the work is sent again into the process chamber 12 of the vacuum coating apparatus 1 in a front state after exiting the vacuum coating apparatus 1" includes:
reversely outputting the workpiece and the second substrate frame from the vacuum coating equipment 1 to an automatic control production line 2;
reversely outputting the workpiece and the second substrate holder from the automatic control production line 2 to the combining station 35;
turning the workpiece for 180 degrees for the second time, and replacing the second substrate frame with the first substrate frame;
forward conveying the workpiece and the first substrate holder from the assembly station 35 to the automatic control line 2;
the workpiece and the first substrate holder are outputted from the automatic control line 2 to the process chamber 12 of the vacuum plating apparatus 1 in the forward direction.
Still further, as a preferable mode of the present embodiment, but not limited thereto, the step of "conveying the workpiece to the unloading station 41 for front unloading of the workpiece" includes:
reversely outputting the workpiece and the first substrate frame from the vacuum coating equipment 1 to an automatic control production line 2;
the automatic control production line 2 conveys the workpiece and the first substrate holder to the unloading station 41 for workpiece front unloading, which means that the workpiece is unloaded in a state that the front side is upward.
Still further, as a preferable mode of the present embodiment but not limited thereto, the step of turning the workpiece by 90 ° includes: the cleaned workpiece is turned over from the vertical state to the horizontal frontal state by the 90 ° turning device 32.
Further, as a preferable mode of the present embodiment, but not limited thereto, the step of turning the workpiece 180 ° for the first time includes:
grabbing the workpiece from the buffer conveying station 33 to a 180-degree turnover device 34 for 180-degree turnover;
the flipped workpiece is picked from the 180 ° flipper 34 and transferred to the substrate holder of the assembly station 35.
Still further, as a preferable mode of the present embodiment, but not limited thereto, the step of turning the workpiece 180 ° twice includes:
the workpiece is grabbed from the combined station 35 through the automatic grabbing and transferring device 36 and is conveyed to the 180-degree turnover device 34 to be turned over for 180 degrees; and
the flipped workpiece is picked from the 180 ° turnover device 34 by the automatic pick-and-place device 36 and transferred back to the substrate holder of the combining station 35.
Still further, as a preferable mode of the present embodiment, but not limited thereto, the automatic control production line 2 positively outputs two workpieces to the vacuum coating apparatus 1 through the four-station translation lifting device 22, where the two workpieces are two workpieces to be statically placed or two workpieces to be coated; and
the automatic control production line 2 reversely receives four workpieces reversely output from the vacuum coating equipment 1 through the four-station translation lifting device 22, wherein the four workpieces comprise two workpieces to be statically placed and two workpieces to be overturned or two workpieces to be statically placed and two workpieces to be unloaded; and
the automatic control production line 2 moves to the unloading station 41 through the four-station translation lifting device 22 to unload the two workpieces to be unloaded.
As shown in fig. 2, an embodiment of the present invention further provides a special workpiece coating control system 5, which at least includes:
a main control unit;
the cleaning driving unit is electrically connected with the main control unit and used for driving the cleaning equipment to clean the workpiece in the vertical state under the control of the main control unit;
the 90-degree turnover conveying driving unit is electrically connected with the main control unit and used for driving the 90-degree turnover device to turn over the workpiece by 90 degrees under the control of the main control unit, so that the cleaned workpiece is turned over to a horizontal front state from a vertical state and conveyed to the buffer conveying station;
the automatic grabbing and transferring driving unit is electrically connected with the main control unit and used for driving the automatic grabbing and transferring device to move to the buffering conveying station to grab the workpiece and transfer the workpiece to the 180-degree turnover device under the control of the main control unit; or the automatic grabbing and transferring device is driven to move to the combined station to grab the workpiece and transfer the workpiece to the 180-degree turnover device;
the 180-degree turnover driving unit is electrically connected with the main control unit and is used for driving the 180-degree turnover device to carry out first 180-degree turnover on the workpiece transferred to the 180-degree turnover driving unit under the control of the main control unit so that the workpiece enters the next procedure in a reverse state; or driving the 180-degree turnover device to carry out 180-degree turnover for the second time on the workpiece transferred to the 180-degree turnover device, so that the workpiece enters the next procedure in a front state;
the automatic control system is electrically connected with the main control unit and is used for controlling the four-station translation lifting device under the control of the main control unit;
and the vacuum coating control system is electrically connected with the main control unit and is used for controlling the vacuum coating equipment to coat the workpiece under the control of the main control unit.
According to the embodiment of the invention, by the special workpiece coating control system, at least a 90-degree turnover device, an automatic grabbing and transferring device, a 180-degree turnover device, a four-station translation lifting device and vacuum coating equipment can be fully automatically controlled according to a coating process, full-automatic workpiece coating treatment can be realized, and the automation degree is high.
As shown in fig. 1, the embodiment of the present invention further provides a special workpiece coating apparatus, which at least includes a workpiece conveying and primary processing coordination line 3, an automatic control production line 2, and a vacuum coating production line.
The vacuum coating production line at least comprises vacuum coating equipment 1, wherein the vacuum coating equipment 1 is provided with a process chamber 12 and a standing chamber 13 positioned behind the process chamber 12; the process chamber 12 is used for carrying out reciprocating reverse plating on the back of the workpiece in a back state, and the standing chamber 13 is used for carrying out reverse standing treatment on the workpiece after back plating; the process chamber 12 is used for performing reciprocating positive film coating on the front surface of the workpiece in the front surface state, and the static placing chamber 13 is used for performing positive static placing treatment on the workpiece subjected to positive film coating;
the workpiece conveying and primary processing matching line 3 is used for turning the workpiece over and conveying the workpiece into an automatic control production line in a reverse side state after the workpiece is fed on the front side; and is used for turning over the workpiece and sending the workpiece into the automatic control production line 2 in a front state after receiving the workpiece which is subjected to the reverse static placing;
the automatic control production line 2 is arranged between the workpiece conveying and primary processing matching line 3 and the vacuum coating production line; at least used for receiving the work piece which is sent from the reverse side after being overturned in the forward direction and conveying the work piece to a process chamber 12 of a vacuum coating production line in the forward direction; the workpiece conveying and initial processing matching line 3 is used for reversely receiving the workpiece which is withdrawn from the process chamber 12 and is subjected to reverse standing and placing, and reversely conveying the workpiece to the workpiece conveying and initial processing matching line 3 for turning, so that the workpiece subjected to reverse standing and placing is turned to a front state; the process chamber 12 is used for forward receiving the workpiece which is delivered in a front state after being overturned and forward conveying the workpiece to a vacuum coating production line; and for reversely receiving the workpiece after completion of the positive standing and being ejected from the process chamber 12 and conveying the workpiece to the unloading station 41 for front-side unloading of the workpiece.
According to the special workpiece coating equipment provided by the embodiment of the invention, the workpiece conveying and primary treatment matching line and the vacuum coating production line are butted through the automatic control production line, so that the workpiece sequentially passes through the processes of front feeding, reverse coating, reverse static placing, front coating, front static placing and front discharging, the full-automatic treatment of workpiece coating can be realized, and the automation degree is high. The daily output is more than 2, and the temperature rise can be controlled within 70 ℃ in the film coating process, so that the surface of the workpiece cannot deform due to the temperature rise. Meanwhile, the insulating property of the coated workpiece can reach more than 5.0E10 ohm, and the thickness and uniformity of the coating film of the workpiece meet the requirements.
Further, as a preferred embodiment of the present invention, but not limited thereto, as shown in fig. 1, the workpiece conveying and preliminary processing line 3 includes at least a 180 ° turnover device 34, and the 180 ° turnover device 34 is at least used for performing a first 180 ° turnover on the workpiece after the front side of the workpiece is loaded, so that the workpiece enters the next process in a reverse side state; and the turnover device is used for turning over the workpiece which is reversely placed for 180 degrees for the second time so that the workpiece enters the next procedure in a front state.
Still further, as a preferable mode of the present embodiment, but not limited thereto, as shown in fig. 1, 4, and 5, the 180 ° turnover device 34 includes at least:
a chassis 341;
the turnover frame 342 is arranged on the bottom frame 341 and can turn over 180 degrees relative to the bottom frame 341;
the clamping mechanism is arranged on the turnover frame 342 and comprises an upper clamp and a lower clamp, the upper clamp is arranged above the turnover frame 342, the lower clamp is arranged below the turnover frame 342, and both the upper clamp and the lower clamp can be closed or opened;
when the upper clamp is opened and the lower clamp is closed, the workpiece can enter the clamping mechanism from top to bottom and is horizontally placed on the lower clamp; when the upper clamp and the lower clamp are closed simultaneously, the workpiece is clamped in the clamping mechanism under the combined action of the upper clamp and the lower clamp, and the turnover frame 342 can drive the clamping mechanism and the workpiece to turn over for 180 degrees; after the workpiece is turned over, the upper clamp is positioned below, the lower clamp is positioned above, the lower clamp is opened, and the workpiece can be far away from the clamping mechanism from bottom to top.
Further, as a preferred mode of the present embodiment but not limited thereto, as shown in fig. 4, the upper clamp includes a front upper clamp 343 and a rear upper clamp 344, which are arranged in front of and behind each other, and the front upper clamp 343 and the rear upper clamp 344 can move toward or away from each other along the roll-over stand 342 to close or open the upper clamp; the lower clamp includes a front lower clamp and a rear lower clamp 346 arranged in front and rear, and the front lower clamp and the rear lower clamp 346 can approach to each other or move away from each other along the roll-over stand 342 to close or open the lower clamps.
Still further, as a preferred embodiment of the present invention, but not limited to, as shown in fig. 4, each of the front upper clamp 343, the rear upper clamp 344, the front lower clamp, and the rear lower clamp 346 includes a clamping fixture and a tensioning cylinder 340, and the tensioning cylinder 340 can drive the clamping fixture to move up and down to enable the clamping fixture to clamp or loosen the workpiece.
Still further, as a preferable mode of the present embodiment, but not limited thereto, as shown in fig. 5, the bottom frame 341 is further provided with a turnover limiting mechanism 347 engaged with the turnover frame 342, and in the turnover state, the turnover limiting mechanism 347 is disengaged from the turnover frame 342, and the turnover frame 342 rotates with respect to the bottom frame 341; in the non-turnover state, the turnover limiting mechanism 347 tightly pushes the turnover frame 342, and the turnover frame 342 is fixed relative to the bottom frame 341.
Further, as a preferred embodiment of the present invention, but not limited thereto, as shown in fig. 1, 5 and 6, the workpiece conveying and preliminary processing line 3 further includes at least an automatic gripping and transferring device 36, and a buffer transfer station 33 and a combining station 35 respectively located on both left and right sides of the 180 ° turnover device, and the automatic gripping and transferring device 36 can freely move back and forth among the buffer transfer station 33, the 180 ° turnover device 34 and the combining station 35.
Still further, as a preferable mode of the present embodiment, but not limited thereto, the automatic gripping and transferring device 36 is at least used for gripping and transferring the workpiece from the buffer transfer station 33 to the 180 ° turnover device 34 for 180 ° turnover; and
the second substrate holder is used for grabbing the workpiece subjected to the first 180-degree turnover from the 180-degree turnover device 34 and conveying the workpiece to the combination station 35; and
the turnover device is used for grabbing the work piece after the completion of the reversed standing from the combined station 35 and conveying the work piece to the 180-degree turnover device 34 for 180-degree turnover; and
for gripping the workpiece after the second 180 ° turn-over from the 180 ° turning device 34 and transferring it to the first substrate holder of the assembly station 35.
Further, as a preferable embodiment of the present embodiment, but not limited thereto, as shown in fig. 6, the automatic gripping and transferring device 36 includes:
a transfer platform 361, which is matched with the bottom frame 341 and can freely move back and forth along the bottom frame 341;
a gripping platform 362 arranged below the transfer platform 361 and capable of lifting up and down relative to the transfer platform 361;
the clamps 363, which are provided below the grasping platform 362 in pairs, can approach each other or move away from each other along the grasping platform 362, thereby clamping or loosening the workpiece.
Further, as a preferred mode of the present embodiment, but not limited to, as shown in fig. 6 and 7, a linear guide 364 is installed on a lower surface of the grasping platform 362, sliders 365 are respectively installed at two ends of the linear guide 364, the clamps 363 are respectively installed in one-to-one correspondence with the sliders 365, and the two clamps 363 are driven by the positive and negative thread ball screw pair 366, so that the clamps 363 clamp or unclamp the workpiece by approaching or departing from each other along the linear guide 364.
Still further, as a preferable mode of the present embodiment, but not limited thereto, the transfer platform 361 is provided with a lifting cylinder 367, and an output end of the lifting cylinder 367 is connected to the grasping platform 362, so as to drive the grasping platform 362 to move up and down; the transfer platform 361 and the bottom frame 341 are driven by a gear and a rack to engage with each other, so that the transfer platform 361 can freely move back and forth along the bottom frame 341 among the buffer transfer station 33, the 180-degree turnover device 34 and the combination station 35.
Further, as a preferable embodiment of the present embodiment, but not limited thereto, as shown in fig. 1 and 6, the buffer transfer station 33 and the combining station 35 are provided with the transmission mechanism 30, and the automatic gripping and transferring device 36 is located above the transmission mechanism 30 and the 180 ° turnover device 34.
Further, as a preferable mode of the present embodiment, but not limited thereto, as shown in fig. 1, the workpiece conveying and preliminary processing line 3 further includes at least a cleaning device 31, and the cleaning device 31 is used for cleaning the workpiece that is turned over to the vertical state after the front side is loaded.
Still further, as a preferable mode of the present embodiment without limitation, as shown in fig. 1, the workpiece conveying and preliminary processing line 3 further includes at least a 90 ° turnover device 32 between the cleaning apparatus 31 and the buffer transfer station 33, and as shown in fig. 3, the 90 ° turnover device 32 includes at least:
the support base frame 321 is supported by the support base frame,
a turnover adjusting clamp assembly 322, which is arranged on the support chassis 321 and can be turned over from a vertical state to a horizontal state relative to the support chassis 321 after clamping the workpiece which is cleaned and conveyed in the vertical state;
the lifting adjusting transmission assembly 323 is disposed on the supporting base frame 321, and can lift up and down relative to the supporting base frame 321 to receive the workpiece turned to the horizontal state and facing upward, and convey the workpiece to the next station, such as the buffer transfer station 33.
Still further, as a preferred mode of the present embodiment without limitation, as shown in fig. 3, the tumble adjustment clamp assembly 322 includes:
the overturning bracket 3221 is hinged to the supporting chassis 321, and can be overturned from the vertical state to the horizontal state or overturned from the horizontal state and reset to the vertical state relative to the supporting chassis 321;
the clamping assembly is arranged on the overturning bracket 3221 and comprises an upper clamping piece and a lower clamping piece which are arranged oppositely, and the upper clamping piece and the lower clamping piece can slide relative to the overturning bracket 3221 to mutually approach to clamp a workpiece or mutually separate to loosen the workpiece.
Further, as a preferred embodiment of the present invention, but not limited to, as shown in fig. 3, the upper clamping assembly includes an upper claw mounting plate 3222 disposed on the turning support 3221 and capable of sliding relative to the turning support 3221, a pair of claws 3223 disposed on the upper claw mounting plate 3222 and spaced apart from each other and capable of moving toward and away from each other, and a clamping cylinder 3224 disposed on each claw 3223 and used for controlling the opening and closing of the claw.
Further, as a preferred embodiment of the present invention, but not limited thereto, as shown in fig. 3, the lower clamp assembly includes a lower jaw mounting plate 3225 provided on the turning support 3221 and slidable with respect to the turning support 3221, a pair of jaws 3223 provided on the lower jaw mounting plate 3225 and spaced apart from each other and adjustable toward and away from each other, and a clamp cylinder 3224 provided on each jaw for controlling opening and closing of the jaw.
Still further, as a preferred mode of the present embodiment, but not limited to, as shown in fig. 3, the upper and lower claw mounting plates 3222 and 3225 are mounted on the turning support 3221 through a sliding rail assembly (i.e., a slider, a guide rail), and the upper and lower claw mounting plates 3222 and 3225 are controlled by a second claw adjusting drive 3227 (a front and back teeth ball screw pair) disposed on the turning support 3221, so that the claws 3223 on the upper and lower claw mounting plates 3222 and 3225 are moved toward each other to clamp a workpiece or are moved away from each other to loosen a workpiece.
Further, as a preferred embodiment of the present invention, but not limited to, as shown in fig. 3, the pair of left and right spaced-apart fingers 3223 are also mounted on the upper finger mounting plate 3222 or the lower finger mounting plate 3225 via a slide rail assembly (i.e., a slider, a guide rail), and controlled by a first finger adjustment drive 3226 (a front and back teeth ball screw pair) provided on the upper finger mounting plate 3222 or the lower finger mounting plate 3225, so that the left and right spaced-apart fingers 3223 can be adjusted to approach each other or move away from each other according to the size of the workpiece.
Still further, as a preferable mode of the present embodiment, but not limited thereto, as shown in fig. 3, the elevation adjustment transfer assembly 323 includes:
a lifting platform 3231 which is arranged on the supporting base frame 321 and can lift up and down relative to the supporting base frame 321;
the transmission wheel group 3232 is arranged on the lifting platform 3231 and used for receiving and conveying the workpiece to the next station;
and the lifting cylinder is arranged on the supporting base frame 321, is connected with the lifting platform 3231 and is used for driving the lifting platform 3231 to lift up and down.
Still further, as a preferable mode of the present embodiment, but not limited to, as shown in fig. 3, the transmission wheel set includes a front transmission wheel set and a rear transmission wheel set, the front transmission wheel set and the rear transmission wheel set are mounted on the lifting platform 3231 through a slide rail assembly 3233 (i.e. a slide block or a guide rail), and are controlled through a transmission wheel set adjusting screw assembly 3234 (a positive and negative teeth ball screw pair) disposed on the lifting platform 3231, so that the front transmission wheel set and the rear transmission wheel set can be adjusted to approach each other or move away from each other according to the size of the workpiece.
Further, as a preferred mode of the present embodiment, but not limited to, as shown in fig. 1 and 8, the automatic control production line 2, especially the automatic control production line for auxiliary coating of special workpieces, includes at least a lower platform 21 extending from front to back and a four-station translation lifting device 22.
The front half part of the lower platform 21 is positioned between the combination station 35 and the vacuum coating equipment 1, and the left side of the rear half part is opposite to the unloading station 41 and/or the substrate frame storage station 42;
a four-station translation lifting device 22, which is arranged on the lower platform 21, can move back and forth along the lower platform 21 as shown in the direction A of fig. 8, and is provided with two upper transmission platforms which are distributed back and forth and two lower transmission platforms which are distributed back and forth, each transmission platform can transmit forward or backward along the direction B shown in fig. 8, and the lower transmission platform can lift up and down along the direction C shown in fig. 8;
the four-station translation lifting device 22 has a first reverse material receiving state, a first forward feeding state, a first empty vehicle receiving state, a first vehicle changing state, a first forward material receiving state and a second forward feeding state;
in a first reverse material receiving state, the four-station translation lifting device 22 moves forwards along the lower platform 21 to a position opposite to the vacuum coating equipment 1, and the upper transmission platform performs reverse transmission in sequence so as to reversely receive two workpieces to be statically placed on the substrate frame, which are output from the process chamber 12 of the vacuum coating equipment 1 in sequence in reverse; the lower transmission platform is lifted upwards and then reversely transmitted to reversely receive two workpieces to be overturned, which are placed on the second substrate frame and are sequentially and reversely output from the static placing chamber 13 of the vacuum coating equipment 1;
in a first forward feeding state, the four-station translation lifting device 22 is opposite to the vacuum coating equipment 1, the lower transmission platform is reset downwards, and the upper transmission platform is sequentially transmitted in a forward direction, so that the two received workpieces to be statically placed and the substrate frames thereof are sequentially and forwardly output to the static placing chamber 13 of the vacuum coating equipment 1 for reverse static placing or forward static placing;
in the first empty receiving state, the four-station translation lifting device 22 is far away from the vacuum coating equipment 1 and moves backwards to a position opposite to the substrate holder storage station 42, the upper transmission platform thereof transmits forward, and the transmission is transited through a transmission station 40 to receive two first substrate holders conveyed from the substrate holder storage station 42;
in the first vehicle changing state, the four-station translation lifting device 22 moves forwards along the lower platform 21 to a position opposite to the combined station 35, and the lower transmission platform rises upwards and then performs reverse transmission in sequence so as to output the two second substrate frames and the workpieces to be turned carried by the two second substrate frames to the combined station 35 in sequence; after the automatic grabbing and transferring device 36 grabs the workpiece to be turned over of the combined station 35 to the 180-degree turning device 34 for turning over, the lower layer transmission platform of the four-station translation lifting device 22 carries out forward transmission so as to receive the second substrate frame output forward from the combined station 35; after the lower transmission platform is reset downwards, the upper transmission platform performs reverse transmission so as to reversely output the first substrate frame received by the upper transmission platform to the combination station 35;
when the automatic grabbing and transferring device 36 grabs the turned-over workpiece from the 180-degree turning device 34 and places the turned-over workpiece back on the first substrate frame of the combining station 35, the four-station translation lifting device 22 enters a first positive material receiving state, and the upper transmission platform of the four-station translation lifting device forwards transmits the workpiece to receive the turned-over workpiece and the first substrate frame which are positively conveyed by the combining station 35;
in the second forward feeding state, the four-station translation lifting device 22 moves to a position opposite to the vacuum coating equipment 1 along the lower platform 21, and the upper transmission platform sequentially transmits forward, so that the received turned-over workpiece and the first substrate frame are sequentially and positively output to the process chamber 12 of the vacuum coating equipment 1 for positive coating.
According to the embodiment of the invention, through the automatic control production line of the auxiliary coating, automatic seamless butt joint can be at least realized between the combined station and the vacuum coating equipment, the functions of four-out and two-in of workpieces and automatic replacement of substrate frames are realized, full-automatic treatment of coating of the workpieces can be realized, and the automation degree is high.
Still further, as a preferable mode of the present embodiment, but not limited thereto, the four-station translational lifting device 22 further has a second reverse material receiving state, a third forward feeding state, a discharging state, a second empty receiving state, a second vehicle changing state, a second forward material receiving state, and a fourth forward feeding state;
in a second reverse material receiving state, the four-station translation lifting device 22 moves forwards along the lower platform 21 to a position opposite to the vacuum coating equipment 1, the upper transmission platform performs reverse transmission in sequence to reversely receive two workpieces to be statically placed on the substrate frame, which are output from the process chamber 12 of the vacuum coating equipment 1 in sequence in reverse direction, wherein the two workpieces to be statically placed are workpieces which need to be statically placed forwards after positive coating or workpieces which need to be statically placed backwards after reverse coating, the workpieces which need to be statically placed backwards after the two reverse coatings are respectively placed on the second substrate frame, and the workpieces which need to be statically placed forwards after the two positive coatings are respectively placed on the first substrate frame; the lower transmission platform is lifted upwards and then reversely transmitted to reversely receive two workpieces to be unloaded which are sequentially and reversely output from the static placing chamber 13 of the vacuum coating equipment 1 and are placed on the first substrate frame;
in a third forward feeding state, the four-station translation lifting device 22 is opposite to the vacuum coating equipment 1, the lower transmission platform is reset downwards, and the upper transmission platform sequentially transmits forwards, so that the two received workpieces to be statically placed and the substrate frames thereof are sequentially and forwardly output to the static placing chamber 13 of the vacuum coating equipment 1 for positive static placing or reverse static placing;
in the unloading state, the four-station translation lifting device 22 moves backwards to the unloading station 41 away from the vacuum coating equipment 1, and the lower transmission platform lifts upwards and outputs two workpieces to be unloaded and a first substrate frame;
in the second empty receiving state, the four-station translation lifting device 22 moves to a position opposite to the substrate holder storage station 42, after the lower transmission platform is reset downwards, the upper transmission platform is sequentially and positively transmitted and transited through a transmission station 40 to sequentially receive two second substrate holders conveyed from the substrate holder storage station 42;
in the second vehicle changing state, the four-station translation lifting device 22 moves forwards along the lower platform 21 to a position opposite to the combined station 35, and the upper transmission platform performs reverse transmission successively to output the second substrate frame to the combined station 35 successively;
the automatic grabbing and transferring device 36 on the combination station 35 moves reversely to the buffer conveying station 33, the workpieces with front feeding are grabbed and conveyed to the 180-degree turnover device 34 in the forward direction for 180-degree turnover, the turnover workpieces are grabbed from the 180-degree turnover device 34 and placed on a second substrate frame of the combination station 35, the four-station translation lifting device 22 enters a second forward material receiving state, and the upper transmission platform of the four-station translation lifting device transmits in the forward direction to receive the turnover workpieces and the second substrate frame conveyed by the combination station 35 in the forward direction;
in a fourth forward feeding state, the four-station translation lifting device 22 moves to a position opposite to the vacuum coating equipment 1 along the lower platform, and the upper transmission platform sequentially transmits forward, so that the received turned-over workpiece and the second substrate frame are sequentially and forwardly output to the process chamber 12 of the vacuum coating equipment 1 for reverse coating.
Further, as a preferable mode of the present embodiment, but not limited thereto, as shown in fig. 8, the four-station translational lifting device 22 includes a walking platform 221 capable of moving back and forth along the lower platform 21, a lifting frame 222 disposed on the walking platform 221, and the upper transmission platform and the lower transmission platform disposed on the lifting frame 222, and the upper transmission platform and the lower transmission platform can be driven by the lifting frame 222 to lift up and down; wherein, the upper transmission platform comprises a front upper first transmission platform 223 and a rear upper second transmission platform 224; the lower stage driving stage includes a lower stage first driving stage 225 positioned below the upper stage first driving stage 223, and a lower stage second driving stage 226 positioned below the upper stage second driving stage 224.
Further, the embodiment also provides an automatic control method for auxiliary coating of a special workpiece, which at least comprises the following steps:
the four-station translation lifting device 22 reversely receives two workpieces to be statically placed and two workpieces to be overturned on the substrate frame; the two workpieces to be statically placed are workpieces which need to be statically placed reversely after being subjected to reverse film coating or workpieces which need to be statically placed positively after being subjected to positive film coating, the workpieces which need to be statically placed reversely after being subjected to the reverse film coating are respectively placed on the second substrate frame, and the workpieces which need to be statically placed positively after being subjected to the positive film coating are respectively placed on the first substrate frame; the two workpieces to be statically placed and the substrate frames thereof are reversely output to the upper layer of the four-station translation lifting device from a process chamber of the vacuum coating equipment; the two workpieces to be overturned are workpieces which need to be overturned and coated with films after being placed in a reversed and static mode, and the workpieces are respectively placed on the second substrate frame; two workpieces to be overturned and substrate frames thereof are reversely output to the lower layer of the four-station translation lifting device from a static placing chamber of the vacuum coating equipment;
the upper layer of the four-station translation lifting device 22 outputs two workpieces to be statically placed and substrate frames thereof to the static placing chamber 13 of the vacuum coating equipment 1 in a forward direction for reverse static placing or forward static placing;
the four-station translation lifting device 22 is far away from the vacuum coating equipment 1 and moves to a designated position such as a substrate frame storage station 42, and two first substrate frames are received through the upper layer;
respectively turning the workpieces to be turned on at the lower layer of the four-station translation lifting device 22 by 180 degrees, and respectively placing the turned workpieces on a first substrate frame at the upper layer of the four-station translation lifting device 22;
the upper layer of the four-station translation lifting device 22 positively outputs the two turned-over workpieces and the first substrate frame to the process chamber 12 of the vacuum coating equipment 1 for positive coating.
According to the embodiment of the invention, through the automatic control method of the auxiliary coating, the functions of at least four outlets and two inlets of the workpiece and automatic replacement of the substrate frame can be realized, the full-automatic treatment of coating of the workpiece can be realized, and the automation degree is high.
Still further, as a preferred mode of the present embodiment but not limited thereto, the method further comprises:
the four-station translation lifting device 22 reversely receives two workpieces to be statically placed and two workpieces to be unloaded on the substrate frame; the two workpieces to be statically placed are workpieces which need to be statically placed forwards after being subjected to forward film coating or workpieces which need to be statically placed backwards after being subjected to reverse film coating, the workpieces which need to be statically placed backwards after being subjected to the reverse film coating are respectively placed on the second substrate frame, and the workpieces which need to be statically placed forwards after being subjected to the forward film coating are respectively placed on the first substrate frame; the two workpieces to be statically placed and the substrate frames thereof are reversely output to the upper layer of the four-station translation lifting device 22 from the process chamber 12 of the vacuum coating equipment 1; the two workpieces to be unloaded are workpieces after being placed in a standing mode and are respectively placed on the first substrate frame; two workpieces to be unloaded and a first substrate frame thereof are reversely output to the lower layer of the four-station translation lifting device 22 from the static placing chamber 13 of the vacuum coating equipment 1;
the upper layer of the four-station translation lifting device 22 outputs two workpieces to be statically placed and substrate frames thereof to the static placing chamber 13 of the vacuum coating equipment 1 in a forward direction for positive static placing or reverse static placing;
the four-station translation lifting device 22 is far away from the vacuum coating equipment 1 and moves to the unloading station 41, two workpieces to be unloaded and a first substrate frame are output through the lower layer, and two second substrate frames are received through the upper layer;
turning the two workpieces which are conveyed in the forward direction and loaded on the two front sides by 180 degrees, and respectively placing the two turned workpieces on a second substrate frame on the upper layer of the four-station translation lifting device 22;
the upper layer of the four-station translation lifting device 22 positively outputs the two turned-over workpieces and the second substrate frame to the process chamber 12 of the vacuum coating equipment 1 for reverse coating.
Further, as a preferable mode of the present embodiment, but not limited thereto, the step of "turning the to-be-turned workpieces at the lower layer of the four-station translational lifting device by 180 ° and placing the turned workpieces at the first substrate holders at the upper layer of the four-station translational lifting device" includes:
the lower layer of the four-station translation lifting device 22 reversely outputs the workpiece to be turned and the second substrate frame to the combination station 35, and the automatic grabbing and transferring device 36 on the combination station 35 grabs and reversely conveys the workpiece to be turned to the 180-degree turning device for 34-degree turning;
the four-station translation lifting device 22 receives the second substrate frame which is output from the combination station 35 in the forward direction at the lower layer and outputs the first substrate frame which is received at the upper layer to the combination station 36 in the reverse direction;
grabbing the turned workpiece from the 180-degree turning device 34 and placing the workpiece on a first substrate frame of a combination station 35;
the upper layer of the four-station translation lifting device 22 receives the overturned workpiece and the first substrate frame which are positively conveyed by the combined station 35.
Further, as a preferable mode of the present embodiment, but not limited thereto, the step of "turning the two front-loaded workpieces being conveyed in the forward direction by 180 ° and placing the two turned workpieces on the second substrate holders on the upper layer of the four-station translational lifting device respectively" includes:
the automatic grabbing and transferring device 36 on the combination station 35 moves reversely to the buffer conveying station 33, and grabs and forwards conveys the workpieces loaded on the front side to the 180-degree turnover device 34 for 180-degree turnover;
the four-station translation lifting device 22 reversely outputs the second substrate frame received by the upper layer thereof to the combination station 35;
grabbing the turned workpiece from the 180-degree turning device 34 and placing the workpiece on a second substrate frame of the combination station 35;
the upper layer of the four-station translation lifting device 22 receives the turned-over workpiece and the second substrate frame which are positively conveyed by the combined station 35.
Still further, as shown in fig. 9 and 8, the embodiment of the present invention further provides an automatic control system 55 for auxiliary coating of a special workpiece, which is used for controlling the four-station translation lifting device 22; the automatic control system at least comprises:
a first control unit;
the working state receiving unit is electrically connected with the first control unit, is used for receiving the working state signal and sends the working state signal to the first control unit;
the walking driving unit is electrically connected with the first control unit and used for driving the walking platform 221 to move back and forth to a designated position along the lower platform 21 under the control of the first control unit according to the working state signal;
the lifting driving unit is electrically connected with the first control unit and used for driving the lifting frame 222 to drive the lower transmission platform and the upper transmission platform to lift upwards or reset downwards under the control of the first control unit according to the working state signal;
and the transmission driving unit is electrically connected with the first control unit and used for driving each transmission platform to transmit forwards or backwards under the control of the first control unit according to the working state signal.
According to the embodiment of the invention, the four-station translation lifting device can be automatically controlled by the automatic control system of the coating-assisting film, so that the full-automatic treatment of the film coating of the workpiece is realized in a matching manner, and the automation degree is high.
Further, as a preferable mode of the present embodiment, but not limited thereto, the working status signal at least includes a first reverse material receiving status signal;
the traveling driving unit drives the traveling platform 221 to move forwards along the lower platform 21 to a position opposite to the vacuum coating equipment 1 under the control of the first control unit according to the first reverse material receiving state signal;
the transmission driving unit drives the upper transmission platform to perform reverse transmission sequentially under the control of the first control unit according to the first reverse material receiving state signal and the moving in-place signal so as to reversely receive two workpieces to be statically placed on the substrate frame, which are output sequentially and reversely from the process chamber 12 of the vacuum coating equipment 1;
the lifting driving unit drives the lifting frame 221 to drive the lower transmission platform and the upper transmission platform to lift upwards under the control of the first control unit according to the first reverse material receiving state signal and the material receiving completion signal of the upper transmission platform;
and the transmission driving unit drives the lower transmission platform to perform reverse transmission sequentially under the control of the first control unit according to the first reverse material receiving state signal and the lifting in-place signal so as to reversely receive two workpieces to be overturned, which are placed on the second substrate frame and are sequentially and reversely output from the static placing chamber 13 of the vacuum coating equipment 1.
Still further, as a preferable mode of the present embodiment, but not limited thereto, the operation state signal further includes at least a first forward feeding state signal;
the traveling driving unit drives the traveling platform 221 to move forwards along the lower platform 21 to a position opposite to the vacuum coating equipment 1 under the control of the first control unit according to the first forward feeding state signal;
the lifting driving unit drives the lifting frame 222 to drive the lower-layer transmission platform and the upper-layer transmission platform to reset downwards under the control of the first control unit according to the first forward feeding state signal and the moving in-place signal;
and the transmission driving unit drives the upper transmission platform to sequentially transmit in the forward direction under the control of the first control unit according to the first forward feeding state signal and the reset in-place signal, so that the received two workpieces to be statically placed and the substrate frames thereof are sequentially and positively output to the static placing chamber 13 of the vacuum coating equipment 1 to be statically placed in the reverse direction or the positive direction.
Still further, as a preferable mode of the present embodiment, but not limited thereto, the operation state signal further includes at least a first empty receiving state signal;
the traveling driving unit drives the traveling platform 221 to move backwards to the substrate frame storage station 42 along the lower platform 21 away from the vacuum coating equipment 1 under the control of the first control unit according to the first empty vehicle receiving state signal;
and the transmission driving unit drives the upper transmission platform to perform forward transmission sequentially under the control of the first control unit according to the first empty receiving state signal and the moving in-place signal so as to receive the two first substrate frames conveyed from the substrate frame storage station 42.
Still further, as a preferable mode of the present embodiment, but not limited thereto, the operation state signal further includes at least a first vehicle change state signal;
the traveling driving unit drives the traveling platform 221 to move forwards along the lower platform 21 to a position opposite to the combined station 35 under the control of the first control unit according to the first vehicle change state signal;
the lifting driving unit drives the lifting frame 222 to drive the lower transmission platform and the upper transmission platform to lift upwards under the control of the first control unit according to the first vehicle changing state signal and the moving in-place signal;
the transmission driving unit drives the lower-layer transmission platform to perform reverse transmission successively under the control of the first control unit according to the first vehicle changing state signal and the lifting in-place signal so as to output two workpieces to be turned on the second substrate frame to the combination station 35 successively;
the transmission driving unit is used for driving the lower-layer transmission platform to transmit forward under the control of the first control unit according to the first vehicle changing state signal and a signal of grabbing and transferring the workpiece to be overturned at the combined station 35 to the 180-degree overturning device 34 for overturning by the automatic grabbing and transferring device 36 so as to receive the second substrate frame output from the combined station 35 in the forward direction;
the lifting driving unit drives the lifting frame 222 to drive the lower transmission platform and the upper transmission platform to reset downwards under the control of the first control unit according to the first vehicle changing state signal and the second substrate frame receiving completion signal;
and the transmission driving unit drives the upper layer transmission platform to perform reverse transmission under the control of the first control unit according to the first vehicle changing state signal and the reset in-place signal so as to reversely output the received first substrate frame to the combination station 35.
Further, as a preferable mode of the present embodiment, but not limited to, the working status signal further includes at least a first positive material receiving status signal;
and the transmission driving unit drives the upper transmission platform to forward transmit under the control of the first control unit according to the first forward material receiving state signal and a signal that the automatic grabbing and transferring device 36 grabs the turned-over workpiece from the 180-degree turnover device 34 and places the turned-over workpiece back to the first substrate frame of the combination station 35 so as to receive the turned-over workpiece and the first substrate frame which are positively conveyed by the combination station 35.
Still further, as a preferable mode of the present embodiment, but not limited thereto, the working status signal further includes at least a second forward feeding status signal;
the traveling driving unit drives the traveling platform 221 to move forwards along the lower platform 21 to a position opposite to the vacuum coating equipment 1 under the control of the first control unit according to the second forward feeding state signal;
and the transmission driving unit drives the upper transmission platform to sequentially transmit in the forward direction under the control of the first control unit according to the second forward feeding state signal so as to sequentially output the received turned-over workpiece and the first substrate frame in the forward direction to the process chamber 12 of the vacuum coating equipment 1 for forward coating.
Still further, as a preferable mode of the present embodiment, but not limited to, the working state signal at least further includes a second reverse material receiving state signal;
the traveling driving unit drives the traveling platform 221 to move forwards along the lower platform 21 to a position opposite to the vacuum coating equipment 1 under the control of the first control unit according to the second reverse material receiving state signal;
the transmission driving unit drives the upper transmission platform to perform reverse transmission sequentially under the control of the first control unit according to the second reverse material receiving state signal and the moving in-place signal so as to reversely receive two workpieces to be statically placed on the substrate frame, which are output sequentially and reversely from the process chamber 12 of the vacuum coating equipment 1; the two workpieces to be statically placed are workpieces which need to be statically placed forwards after being subjected to forward film coating or workpieces which need to be statically placed backwards after being subjected to reverse film coating, the workpieces which need to be statically placed backwards after being subjected to the reverse film coating are respectively placed on the second substrate frame, and the workpieces which need to be statically placed forwards after being subjected to the forward film coating are respectively placed on the first substrate frame;
the lifting driving unit drives the lifting frame 222 to drive the lower transmission platform and the upper transmission platform to lift upwards under the control of the first control unit according to the second reverse material receiving state signal and the material receiving completion signal of the upper transmission platform;
and the transmission driving unit drives the lower transmission platform to perform reverse transmission sequentially under the control of the first control unit according to the second reverse material receiving state signal and the lifting in-place signal so as to reversely receive two workpieces to be unloaded, which are placed on the first substrate frame and are output reversely sequentially from the static placing chamber 13 of the vacuum coating equipment 1.
Further, as a preferable mode of the present embodiment without limitation, the operation status signal further includes at least a third forward feeding status signal;
the traveling driving unit drives the traveling platform 221 to move forwards along the lower platform 21 to a position opposite to the vacuum coating equipment 1 under the control of the first control unit according to the third forward feeding state signal;
the lifting driving unit drives the lifting frame 222 to drive the lower transmission platform and the upper transmission platform to reset downwards under the control of the first control unit according to the third forward feeding state signal and the moving in-place signal;
and the transmission driving unit drives the upper transmission platform to sequentially transmit in the forward direction under the control of the first control unit according to the third forward feeding state signal and the reset in-place signal, so that the received two workpieces to be statically placed and the substrate frames thereof are sequentially and positively output to the static placing chamber 13 of the vacuum coating equipment 1 to be statically placed in the forward direction or reversely statically placed.
Still further, as a preferable mode of the present embodiment, but not limited thereto, the operating state signal at least further includes a discharge state signal;
the traveling driving unit drives the traveling platform 222 to move backwards to the unloading station 41 along the lower platform 21 away from the vacuum coating equipment 1 under the control of the first control unit according to the unloading state signal;
the lifting driving unit drives the lifting frame 222 to drive the lower transmission platform and the upper transmission platform to lift upwards under the control of the first control unit according to the unloading state signal and the moving in-place signal;
and the transmission driving unit drives the lower-layer transmission platform to output two workpieces to be unloaded and the first substrate frame under the control of the first control unit according to the unloading state signal and the lifting in-place signal.
Still further, as a preferable embodiment of the present embodiment, but not limited thereto, as shown in fig. 10, the vacuum plating apparatus 1 of the vacuum plating line includes at least:
the sheet inlet and outlet chamber 11 is used for providing a vacuum environment after receiving the workpiece in the positive direction so that the workpiece can enter the process chamber; or after the workpiece is reversely received, providing a non-vacuum environment so as to facilitate the output of the workpiece;
a process chamber 12 for performing a reciprocating plating process on two forward-conveyed articles in the in-out sheet chamber 11, comprising a first appearance detection chamber 1211, a first plating process chamber 1212, a first ion source chamber 1213, a second ion source chamber 1223, a second plating process chamber 1222, and a second appearance detection chamber 1221 connected in series; wherein, the first appearance detection chamber 1211, the first coating process chamber 1212 and the first ion source chamber 1213 form a first process chamber under vacuum environment for a workpiece to perform reciprocating coating in the first process chamber 121; the second appearance inspection chamber 1221, the second coating process chamber 1222, and the second ion source chamber 1223 form a second process chamber 122 under vacuum environment, so that another workpiece can be coated in a reciprocating manner in the second process chamber 122;
the static placing chamber 13 comprises a first static placing chamber 131 and a second static placing chamber 132 which can provide a vacuum environment, and is used for respectively placing two workpieces to be statically placed which are conveyed forward after being coated by the process chamber 12 into the first static placing chamber 131 and the second static placing chamber 132 and simultaneously carrying out static placing treatment.
Still further, as a preferable mode of the present embodiment, but not limited thereto, as shown in fig. 10, a first pump group 110 is provided outside the sheet inlet/outlet chamber 11, and when the first pump group 110 is activated, the sheet inlet/outlet chamber 11 can be brought into a vacuum state.
Further, as a preferred embodiment of the present invention, but not limited thereto, as shown in fig. 10, a second pump set 120 is disposed outside the process chamber 12, and when the second pump set 120 is activated, the first process chamber 121 and the second process chamber 122 can be brought into a vacuum deposition state.
Further, as a preferable mode of the present embodiment, but not limited thereto, transfer mechanisms for transferring the work into and out of the sheet inlet/outlet chamber 11, the process chamber 12, and the resting chamber 13, reciprocating in the first process chamber 121, and reciprocating in the second process chamber 122 are provided in the sheet inlet/outlet chamber 11, the process chamber 12, and the resting chamber 13, respectively.
Further, as a preferable mode of the present embodiment, but not limited thereto, the first appearance detecting chamber 1211 and the second appearance detecting chamber 1221 are respectively provided with an observation window, an industrial camera module located outside the observation window, and a line light source module located in each of the detecting chambers and below the observation window. The industrial camera component is used for acquiring photos of the workpiece in the film coating process in real time so as to track and analyze the film coating effect and state of the workpiece on line; and the linear light source assembly is used for providing an auxiliary lighting effect for the industrial camera assembly, and a circulating water cooling pipeline is arranged on the linear light source assembly.
The industrial camera assembly comprises a plurality of linear camera units which are arranged side by side and can be adjusted up and down, and at least comprises a front edge camera unit, a rear edge camera unit and a main body camera unit group positioned between the front edge camera unit and the rear edge camera unit; when the film is coated, the main body part of the workpiece protrudes upwards, and the front and rear edge camera units move downwards to adjust, so that the viewing distance from the front and rear edge camera units to the edge part of the workpiece is equal to the viewing distance from the main body camera unit group to the front surface of the main body part of the workpiece; when the film is reversely coated, the main body part of the workpiece is downward concave, and the front and rear edge camera units move upwards for adjustment, so that the viewing distance from the front and rear edge camera units to the edge part of the workpiece is equal to the viewing distance from the main body camera unit group to the back of the main body part of the workpiece; so as to adapt to the surface detection of the non-planar workpiece in different coating states.
Still further, as a preferable mode of the present embodiment, but not limited thereto, as shown in fig. 10, a flap valve 111 that can be opened and closed by turning is hinged to a side of the sheet feeding and discharging chamber 11 opposite to the automatic control line 2.
Further, as a preferable mode of the present embodiment, but not limited thereto, as shown in fig. 10, an openable or closable first gate valve 14 is provided between the tablet inlet/outlet chamber 11 and the process chamber 12, when the first gate valve 14 is opened, the tablet inlet/outlet chamber 11 and the process chamber 12 are communicated with each other, and when the first gate valve 14 is closed, the tablet inlet/outlet chamber 11 and the process chamber 12 are blocked from each other.
Still further, as a preferable mode of the present embodiment, but not limited thereto, as shown in fig. 10, an openable or closable second gate valve 15 is provided between the process chamber 12 and the static discharge chamber 13, and when the second gate valve 15 is opened, the process chamber 12 and the static discharge chamber 13 communicate with each other, and when the second gate valve 15 is closed, the process chamber 12 and the static discharge chamber 13 are shut off from each other.
An embodiment of the present invention further provides a vacuum coating control system for a special workpiece, as shown in fig. 11, which at least includes:
a second control unit;
the flap valve opening and closing driving unit is electrically connected with the second control unit and is used for driving the flap valve 111 to turn upwards under the control of the second control unit so as to open the sheet inlet and outlet chamber 11 for feeding workpieces; or the flap valve 111 is driven to turn downwards so as to close the sheet inlet and outlet chamber 11 after the workpiece is fed in and cut off the external environment;
a conveying driving unit electrically connected with the second control unit and used for driving the conveying mechanism to operate under the control of the second control unit, so that the workpieces can be conveyed into and out of the sheet inlet and outlet chamber 11, the process chamber 12, the static placing chamber 13, and can move back and forth in the first process chamber 121 and the second process chamber 122;
the first pump set driving unit is electrically connected with the second control unit and used for driving the first pump 110 set to start under the control of the second control unit so as to enable the in-out sheet chamber 11 to enter a vacuum-pumping state;
the first gate valve opening and closing driving unit is electrically connected with the second control unit and is used for driving the first gate valve 14 to open or close under the control of the second control unit so as to enable the wafer inlet and outlet chamber 11 to be communicated with or separated from the process chamber 12 and enable workpieces to be fed into the first process chamber 121 and/or the second process chamber 122;
the second pump set driving unit is electrically connected with the second control unit and used for driving the second pump set 120 to start under the control of the second control unit so as to enable the first process chamber 121 and the second process chamber 122 to enter a vacuum-pumping coating state;
the ion source starting unit is electrically connected with the second control unit and is used for controlling the first ion source chamber 1213 and the second ion source chamber 1223 to start the ion source under the control of the second control unit so as to start the ion source linkage;
the intermediate frequency power supply starting unit is electrically connected with the second control unit and is used for controlling the first coating process chamber 1212 and the second coating process chamber 1222 to start the intermediate frequency power supply to start intermediate frequency linkage under the control of the second control unit;
and the second gate valve opening and closing driving unit is electrically connected with the second control unit and is used for driving the second gate valve 15 to open or close under the control of the second control unit so as to communicate or separate the process chamber 12 and the static discharge chamber 13.
According to the embodiment of the invention, the vacuum coating control system can realize full-automatic control on the vacuum coating equipment at least according to the requirements of the coating process, is favorable for realizing full-automatic treatment of workpiece coating, and has high automation degree.
Further, as a preferable mode of the present embodiment, but not limited thereto, the special workpiece in the present embodiment may be a non-planar workpiece or a special-shaped workpiece.
Still further, as a preferable mode of the present embodiment without limitation, as shown in fig. 12, the special workpiece 6 in the present embodiment has a convex main body portion 61, and a rim portion 62 located around the main body portion 61; the first substrate frame 71 is embedded with an anti-slip rubber cushion block 70, when the first substrate frame 71 bears a workpiece and is coated with a film or is placed still, the peripheral edge 62 of the workpiece is in contact with the anti-slip rubber cushion block 70, at the moment, the front surface of the workpiece faces upwards, the main body part 61 of the workpiece protrudes upwards, and the distance from the front surface of the main body part of the workpiece to the target is the target base distance D1.
Further, as a preferred mode of the present embodiment but not limited thereto, as shown in fig. 13, a height-compensating pad 73 is disposed on the second substrate holder 72, an anti-slip rubber pad 70 is embedded on the height-compensating pad 73, when the second substrate holder 72 carries a reverse plating film of a workpiece or is placed in a reverse static state, the edge of the workpiece contacts the height-compensating pad 73 and the anti-slip rubber pad 70, at this time, the back surface of the workpiece faces upward, the main body portion 61 thereof faces downward, the distance from the back surface of the main body portion of the workpiece to the target is a target base distance D2, and D1 is equal to or substantially equal to D2. Therefore, when the workpiece is coated with a film or reversely, the consistency of the coating process, the thickness of the film and the performance of the film and the controllability of the coating temperature can be ensured.
In this embodiment, the front plating refers to a process of performing front plating in a process chamber by loading a workpiece on the first substrate holder 71 in a state that the front surface of the workpiece faces upward and the main body 61 thereof protrudes upward; the positive static placement refers to a process of carrying out positive film static placement in a static placement chamber on a first substrate frame 71 in a state that the front surface of a workpiece is upward and a main body part 61 of the workpiece is upward convex after the workpiece is coated with a film.
In this embodiment, the reverse plating refers to a process of performing a reverse plating in a process chamber by loading a workpiece on the second substrate holder 72 in a state where the back surface of the workpiece faces upward and the main body 61 thereof faces downward; the anti-static placing means that after the film is reversely coated on the workpiece, the workpiece is carried on the second substrate frame 72 in a state that the back surface is upward and the main body part 61 is downward, and the back surface film layer is statically placed in the static placing chamber.
The production line 2 is automatically controlled, so that the forward and reverse transmission of the workpiece is realized, and the corresponding substrate frame can be automatically matched to bear the workpiece according to the forward coating or reverse coating requirements of the coating process, so that the vacuum coating equipment does not need to be stopped for treatment, and the daily output energy is improved.
The foregoing is illustrative of one or more embodiments provided in connection with the detailed description and is not intended to limit the practice of the invention to the particular forms disclosed. Similar or identical methods, structures and the like as those of the present invention or several technical deductions or substitutions made on the premise of the conception of the present invention should be considered as the protection scope of the present invention.

Claims (10)

1. A special workpiece coating equipment is characterized by at least comprising a workpiece conveying and primary processing matching line, an automatic control production line and a vacuum coating production line;
the vacuum coating production line at least comprises vacuum coating equipment, and the vacuum coating equipment is provided with a process chamber and a standing chamber positioned behind the process chamber; the process chamber is used for carrying out reciprocating reverse coating on the back of the workpiece in a back state, and the standing chamber is used for carrying out reverse standing treatment on the workpiece after the back coating is finished; the process chamber is used for carrying out reciprocating positive film coating on the front surface of the workpiece in the front surface state, and the static placing chamber is used for carrying out positive static placing treatment on the workpiece subjected to positive film coating;
the workpiece conveying and primary processing matching line is used for turning the workpiece over and conveying the workpiece into the automatic control production line in a reverse side state after the workpiece is fed on the front side; and the automatic control device is used for turning over the workpiece and sending the workpiece to an automatic control production line in a front state after receiving the workpiece subjected to the reverse static placing;
the automatic control production line is arranged between the workpiece conveying and primary processing matching line and the vacuum coating production line; at least used for receiving the workpiece which is sent from the reverse side after being overturned in the forward direction and conveying the workpiece to a process chamber of a vacuum coating production line in the forward direction; the workpiece is reversely conveyed to a workpiece conveying and primary processing matching line for overturning, so that the workpiece which is reversely placed is overturned to a front state; the processing chamber is used for positively receiving the workpiece which is conveyed in a positive state after being overturned and positively conveying the workpiece to the vacuum coating production line; and the workpiece is used for reversely receiving the workpiece which is withdrawn from the process chamber and is subjected to the positive standing and discharging, and conveying the workpiece to a discharging station for the front side discharging of the workpiece.
2. The special workpiece coating equipment as claimed in claim 1, wherein the workpiece conveying and primary processing coordination line at least comprises a 180-degree turnover device, and the 180-degree turnover device is at least used for carrying out first 180-degree turnover on the workpiece after the front surface of the workpiece is fed so that the workpiece enters the next working procedure in a reverse surface state; and the turnover device is used for turning over the workpiece which is reversely placed for 180 degrees for the second time so that the workpiece enters the next procedure in a front state.
3. The special workpiece coating equipment as claimed in claim 2, wherein the workpiece conveying and primary processing line at least further comprises an automatic grabbing and transferring device, and a buffer conveying station and a combination station which are respectively positioned at the left side and the right side of the 180-degree turnover device, and the automatic grabbing and transferring device can freely move back and forth among the buffer conveying station, the 180-degree turnover device and the combination station.
4. The special workpiece coating equipment as claimed in claim 3, wherein the automatic grabbing and transferring device comprises:
the transfer platform is matched with the underframe and can freely move back and forth along the underframe;
the grabbing platform is arranged below the transferring platform and can lift up and down relative to the transferring platform;
the clamps are arranged below the grabbing platforms in pairs and can be close to or far away from each other along the grabbing platforms, so that the workpieces are clamped or loosened.
5. The special workpiece coating equipment as claimed in claim 3, wherein the workpiece conveying and primary processing coordination line at least further comprises cleaning equipment, and the cleaning equipment is used for cleaning the workpiece which is turned to be in a vertical state after being fed from the front side.
6. The special workpiece coating apparatus of claim 5, wherein the workpiece conveying and initial processing line further comprises a 90 ° turnover device located between the cleaning apparatus and the buffer transfer station, the 90 ° turnover device comprising:
a bottom frame is supported by the supporting frame,
the overturning adjusting clamping assembly is arranged on the supporting bottom frame and can overturn from a vertical state to a horizontal state relative to the supporting bottom frame after clamping a workpiece which is cleaned and conveyed in the vertical state;
the lifting adjusting transmission assembly is arranged on the supporting bottom frame, can lift up and down relative to the supporting bottom frame to receive the workpiece which is turned to be horizontal and faces upwards, and conveys the workpiece to the next station.
7. The special workpiece coating equipment as claimed in any one of claims 3 to 6, characterized in that the automatic control production line at least comprises a lower platform extending from front to back and a four-station translation lifting device; the front half part of the lower platform is positioned between the combination station and the vacuum coating equipment, and the left side of the rear half part is opposite to the unloading station and/or the substrate frame storage station; the four-station translation lifting device is arranged on the lower platform, can move back and forth along the lower platform, and is provided with two upper transmission platforms which are distributed back and forth and two lower transmission platforms which are distributed back and forth, each transmission platform can transmit forward or backward, and the lower transmission platforms can lift up and down.
8. The special workpiece coating equipment as claimed in claim 7, wherein the four-station translation lifting device comprises a walking platform capable of moving back and forth along the lower platform, a lifting frame arranged on the walking platform, and the upper transmission platform and the lower transmission platform arranged on the lifting frame, wherein the upper transmission platform and the lower transmission platform can be driven by the lifting frame to lift up and down; the upper-layer transmission platform comprises a front upper-layer first transmission platform and a rear upper-layer second transmission platform; the lower transmission platform comprises a lower first transmission platform and a lower second transmission platform, wherein the lower first transmission platform is positioned below the upper first transmission platform, and the lower second transmission platform is positioned below the upper second transmission platform.
9. The special workpiece coating apparatus of claim 8,
the automatic control production line positively outputs two workpieces to the vacuum coating equipment through the four-station translation lifting device, wherein the two workpieces are two workpieces to be statically placed or two workpieces to be coated; and
the automatic control production line reversely receives four workpieces reversely output from the vacuum coating equipment through the four-station translation lifting device, wherein the four workpieces are two workpieces to be statically placed and two workpieces to be turned over, or two workpieces to be statically placed and two workpieces to be unloaded; and
and the automatic control production line moves to the unloading station through the four-station translation lifting device to unload the two workpieces to be unloaded.
10. The special workpiece coating device of any one of claims 1 to 7, wherein the vacuum coating device of the vacuum coating production line at least comprises in series:
the wafer inlet and outlet chamber is used for providing a vacuum environment after the workpiece is positively received so that the workpiece can enter the process chamber; or after the workpiece is reversely received, providing a non-vacuum environment so as to facilitate the output of the workpiece;
the process chamber is used for simultaneously carrying out reciprocating type film coating treatment on two pieces of film which are conveyed in the forward direction through the film inlet and outlet chambers and comprises a first appearance detection chamber, a first film coating process chamber, a first ion source chamber, a second film coating process chamber and a second appearance detection chamber which are sequentially connected in series; the first appearance detection chamber, the first coating process chamber and the first ion source chamber form a first process chamber in a vacuum environment, and a workpiece is subjected to reciprocating coating in the first process chamber; the second appearance detection chamber, the second coating process chamber and the second ion source chamber form a second process chamber in a vacuum environment, and another workpiece can be subjected to reciprocating coating in the second process chamber;
and the static placing chamber comprises a first static placing chamber and a second static placing chamber and is used for simultaneously carrying out static placing treatment on the two workpieces to be statically placed which are conveyed in the forward direction after being coated by the process chamber.
CN202010322698.4A 2020-04-22 2020-04-22 Special workpiece coating equipment Active CN111606025B (en)

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Denomination of invention: Coating equipment for special workpiece

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