CN108394903B - 一种纳米级碳化硅微粉的制备方法 - Google Patents
一种纳米级碳化硅微粉的制备方法 Download PDFInfo
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- CN108394903B CN108394903B CN201810366094.2A CN201810366094A CN108394903B CN 108394903 B CN108394903 B CN 108394903B CN 201810366094 A CN201810366094 A CN 201810366094A CN 108394903 B CN108394903 B CN 108394903B
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- China
- Prior art keywords
- silicon carbide
- micro powder
- nano
- crushing
- particle size
- Prior art date
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- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 54
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 53
- 239000000843 powder Substances 0.000 title claims abstract description 34
- 238000002360 preparation method Methods 0.000 title claims abstract description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000002270 dispersing agent Substances 0.000 claims abstract description 11
- 239000002253 acid Substances 0.000 claims abstract description 9
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims abstract description 5
- 235000011114 ammonium hydroxide Nutrition 0.000 claims abstract description 5
- 238000007873 sieving Methods 0.000 claims abstract description 4
- 238000001694 spray drying Methods 0.000 claims abstract description 4
- 230000003068 static effect Effects 0.000 claims abstract description 4
- 239000000725 suspension Substances 0.000 claims abstract description 4
- 239000002245 particle Substances 0.000 claims description 33
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 9
- 238000007667 floating Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- 238000005406 washing Methods 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims description 7
- 238000000227 grinding Methods 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 229920000642 polymer Polymers 0.000 claims description 6
- 239000002002 slurry Substances 0.000 claims description 6
- 239000004115 Sodium Silicate Substances 0.000 claims description 5
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical group [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 claims description 5
- 229910052911 sodium silicate Inorganic materials 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 3
- 238000011049 filling Methods 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 150000004706 metal oxides Chemical class 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 3
- 238000004806 packaging method and process Methods 0.000 claims description 3
- 238000007670 refining Methods 0.000 claims description 3
- 239000004576 sand Substances 0.000 claims description 3
- 238000012216 screening Methods 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 239000007921 spray Substances 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 3
- 239000000375 suspending agent Substances 0.000 claims description 3
- 238000005303 weighing Methods 0.000 claims description 3
- 238000003621 hammer milling Methods 0.000 claims 1
- 238000005554 pickling Methods 0.000 abstract description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract description 4
- 238000001914 filtration Methods 0.000 abstract description 3
- 238000005054 agglomeration Methods 0.000 abstract description 2
- 230000002776 aggregation Effects 0.000 abstract description 2
- 229910052742 iron Inorganic materials 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000000746 purification Methods 0.000 abstract description 2
- 239000002994 raw material Substances 0.000 abstract description 2
- 238000011084 recovery Methods 0.000 abstract description 2
- 238000001179 sorption measurement Methods 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000003513 alkali Substances 0.000 description 1
- 238000000498 ball milling Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000010902 jet-milling Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 230000009967 tasteless effect Effects 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
- C01B32/914—Carbides of single elements
- C01B32/956—Silicon carbide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/64—Nanometer sized, i.e. from 1-100 nanometer
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/80—Compositional purity
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Nanotechnology (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201810366094.2A CN108394903B (zh) | 2018-04-23 | 2018-04-23 | 一种纳米级碳化硅微粉的制备方法 |
Applications Claiming Priority (1)
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CN201810366094.2A CN108394903B (zh) | 2018-04-23 | 2018-04-23 | 一种纳米级碳化硅微粉的制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN108394903A CN108394903A (zh) | 2018-08-14 |
CN108394903B true CN108394903B (zh) | 2021-04-09 |
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CN201810366094.2A Active CN108394903B (zh) | 2018-04-23 | 2018-04-23 | 一种纳米级碳化硅微粉的制备方法 |
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CN (1) | CN108394903B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110983446A (zh) * | 2019-12-25 | 2020-04-10 | 北京北方华创微电子装备有限公司 | 碳化硅原料加工方法 |
CN113277515B (zh) * | 2020-09-30 | 2024-05-28 | 连云港市沃鑫高新材料有限公司 | 硅晶圆切割用高纯碳化硅微粉及其制备装置、方法 |
CN113860310B (zh) * | 2021-09-27 | 2022-07-26 | 连云港市沃鑫高新材料有限公司 | 一种超细碳化硅尾料中纳米级碳化硅的提取方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100374371C (zh) * | 2006-09-07 | 2008-03-12 | 郑州华硕精密陶瓷有限公司 | 喷雾造粒制备亚微米级碳化硅微粉的方法 |
CN101659393B (zh) * | 2009-08-21 | 2013-04-17 | 江苏大学 | 一种制备纳米硅微粉的方法 |
CN103553625B (zh) * | 2013-11-16 | 2015-04-22 | 连云港龙塔研磨材料有限公司 | 碳化硅精细陶瓷用碳化硅微粉的制备方法 |
CN105269654A (zh) * | 2015-10-15 | 2016-01-27 | 宁波伏尔肯机械密封件制造有限公司 | 碳化硅反射镜的3d打印制备方法 |
WO2017180083A1 (ru) * | 2016-04-15 | 2017-10-19 | Андрей ЦЫБА | Способ промышленного производства нанопорошков sic и нанокомпозита sio-c высокого качества и комплекс для его реализации |
CN107162000A (zh) * | 2017-07-04 | 2017-09-15 | 烟台华锐微粉有限公司 | 一种碳化硅刃料的再生方法 |
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2018
- 2018-04-23 CN CN201810366094.2A patent/CN108394903B/zh active Active
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CN108394903A (zh) | 2018-08-14 |
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Effective date of registration: 20200323 Address after: No.1 Workshop, Shandong Hongda new energy industrial park, No.1, Qingdao Road, Taocun Town, Qixia City, Yantai City, Shandong Province Applicant after: Shandong Huayi Kechuang Nanomaterials Co.,Ltd. Address before: 264003 2nd floor west of No.18 Wentao Villa, Laishan District, Yantai City, Shandong Province Applicant before: Liu Huanxin |
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Effective date of registration: 20200728 Address after: 264030 West, 2nd floor, building 18, Wentao villa, Laishan District, Yantai City, Shandong Province Applicant after: Liu Huanxin Address before: No.1 Workshop, Shandong Hongda new energy industrial park, No.1, Qingdao Road, Taocun Town, Qixia City, Yantai City, Shandong Province Applicant before: Shandong Huayi Kechuang Nanomaterials Co.,Ltd. |
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Effective date of registration: 20211216 Address after: 264030 plant 1 in Shandong Hongda new energy industrial park, No. 1, Qingdao Road, Taocun Town, Qixia City, Yantai City, Shandong Province Patentee after: Shandong Huayi Kechuang Nanomaterials Co.,Ltd. Address before: 264030 West, 2nd floor, building 18, Wentao villa, Laishan District, Yantai City, Shandong Province Patentee before: Liu Huanxin |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A preparation method of nanoscale silicon carbide micro powder Granted publication date: 20210409 Pledgee: Shandong Qixia Rural Commercial Bank Co.,Ltd. Pledgor: Shandong Huayi Kechuang Nanomaterials Co.,Ltd. Registration number: Y2024980001722 |
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Granted publication date: 20210409 Pledgee: Shandong Qixia Rural Commercial Bank Co.,Ltd. Pledgor: Shandong Huayi Kechuang Nanomaterials Co.,Ltd. Registration number: Y2024980001722 |