CN108369151B - 测试气体入口处的压力测量 - Google Patents

测试气体入口处的压力测量 Download PDF

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Publication number
CN108369151B
CN108369151B CN201680064312.6A CN201680064312A CN108369151B CN 108369151 B CN108369151 B CN 108369151B CN 201680064312 A CN201680064312 A CN 201680064312A CN 108369151 B CN108369151 B CN 108369151B
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China
Prior art keywords
inlet
vacuum
vacuum pump
line
gas inlet
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CN201680064312.6A
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Chinese (zh)
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CN108369151A (zh
Inventor
亚尔马尔·布鲁恩斯
卢多尔夫·格道
诺伯特·莫瑟尔
君特·史密斯
丹尼尔·维茨格
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Inficon GmbH Deutschland
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Inficon GmbH Deutschland
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
CN201680064312.6A 2015-11-11 2016-11-10 测试气体入口处的压力测量 Active CN108369151B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102015222213.6 2015-11-11
DE102015222213.6A DE102015222213A1 (de) 2015-11-11 2015-11-11 Druckmessung am Prüfgaseinlass
PCT/EP2016/077242 WO2017081136A1 (de) 2015-11-11 2016-11-10 Druckmessung am prüfgaseinlass

Publications (2)

Publication Number Publication Date
CN108369151A CN108369151A (zh) 2018-08-03
CN108369151B true CN108369151B (zh) 2021-06-04

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CN201680064312.6A Active CN108369151B (zh) 2015-11-11 2016-11-10 测试气体入口处的压力测量

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US (2) US20180328809A1 (https=)
EP (1) EP3374746B1 (https=)
JP (1) JP6883036B2 (https=)
KR (1) KR102684152B1 (https=)
CN (1) CN108369151B (https=)
DE (1) DE102015222213A1 (https=)
TW (1) TWI718204B (https=)
WO (1) WO2017081136A1 (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3069639B1 (fr) * 2017-07-26 2019-08-30 Pfeiffer Vacuum Sonde de reniflage, detecteur de fuites et procede de detection de fuites
FR3070489B1 (fr) * 2017-08-29 2020-10-23 Pfeiffer Vacuum Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester
FR3072774B1 (fr) * 2017-10-19 2019-11-15 Pfeiffer Vacuum Detecteur de fuites pour le controle de l'etancheite d'un objet a tester
CN110007013A (zh) * 2019-02-01 2019-07-12 中国石油天然气集团公司 一种输气管道气体组分实时分析系统及实时分析方法
CN111707423B (zh) * 2020-06-18 2022-04-15 苏州镓港半导体有限公司 真空系统测漏方法及用于真空系统的测漏装置
DE102020132896A1 (de) * 2020-12-10 2022-06-15 Inficon Gmbh Vorrichtung zur massenspektrometrischen Leckdetektion mit dreistufiger Turbomolekularpumpe und Boosterpumpe
GB2606392B (en) * 2021-05-07 2024-02-14 Edwards Ltd A fluid routing for a vacuum pumping system
DE102021119256A1 (de) * 2021-07-26 2023-01-26 Inficon Gmbh Leckdetektoren
DE102022115562A1 (de) * 2022-06-22 2023-12-28 Inficon Gmbh Verfahren zur Messung der Umgebungskonzentration eines leichten Gases mit einer massenspektrometrischen Gegenstrom-Lecksuchvorrichtung
CN117167253A (zh) * 2023-08-08 2023-12-05 兰州空间技术物理研究所 一种容积式真空泵性能测试气体引入装置
GB2632683A (en) * 2023-08-17 2025-02-19 Thermo Fisher Scient Bremen Gmbh Mass spectrometer comprising a vacuum system and a method of operation
WO2025057320A1 (ja) * 2023-09-13 2025-03-20 株式会社島津製作所 試料導入システム
CN118010261B (zh) * 2023-12-27 2026-02-10 北京中科科仪股份有限公司 一种氦质谱检漏仪以及喷氦检漏方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4326264A1 (de) * 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor mit Vakuumpumpe sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
JP2005164525A (ja) * 2003-12-05 2005-06-23 Sensistor Technologies Ab 対象物の密封性を測定するためのシステム及び方法
CN101473208A (zh) * 2006-08-31 2009-07-01 凡利安股份有限公司 相对高试验压力下大泄漏处痕量气体泄漏检测系统和方法
CN101495848A (zh) * 2006-07-27 2009-07-29 因菲康有限公司 检漏装置
CN103207050A (zh) * 2013-04-15 2013-07-17 中国航天科技集团公司第五研究院第五一〇研究所 一种可延长密封器件候检时间的质谱检漏预充氦法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0746074B2 (ja) * 1984-11-27 1995-05-17 日電アネルバ株式会社 真空計
EP0283543B1 (de) 1987-03-27 1991-12-11 Leybold Aktiengesellschaft Lecksuchgerät und Betriebsverfahren dazu
DE4140366A1 (de) * 1991-12-07 1993-06-09 Leybold Ag, 6450 Hanau, De Lecksucher fuer vakuumanlagen sowie verfahren zur durchfuehrung der lecksuche an vakuumanlagen
DE4228313A1 (de) * 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
DE19504278A1 (de) * 1995-02-09 1996-08-14 Leybold Ag Testgas-Lecksuchgerät
FR2761776B1 (fr) * 1997-04-03 1999-07-23 Alsthom Cge Alcatel Detecteur de fuite a gaz traceur
DE19735250A1 (de) * 1997-08-14 1999-02-18 Leybold Vakuum Gmbh Verfahren zum Betrieb eines Heliumlecksuchers und für die Durchführung dieses Verfahrens geeigneter Heliumlecksucher
DE10324596A1 (de) * 2003-05-30 2004-12-16 Inficon Gmbh Lecksuchgerät
US7204127B2 (en) * 2003-06-11 2007-04-17 Varian, Inc. Method and apparatus for large leak testing
US8661875B2 (en) * 2012-05-07 2014-03-04 Caterpillar Inc. System and method to detect accumulator loss of precharge
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4326264A1 (de) * 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor mit Vakuumpumpe sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
JP2005164525A (ja) * 2003-12-05 2005-06-23 Sensistor Technologies Ab 対象物の密封性を測定するためのシステム及び方法
CN101495848A (zh) * 2006-07-27 2009-07-29 因菲康有限公司 检漏装置
CN101473208A (zh) * 2006-08-31 2009-07-01 凡利安股份有限公司 相对高试验压力下大泄漏处痕量气体泄漏检测系统和方法
CN103207050A (zh) * 2013-04-15 2013-07-17 中国航天科技集团公司第五研究院第五一〇研究所 一种可延长密封器件候检时间的质谱检漏预充氦法

Also Published As

Publication number Publication date
JP6883036B2 (ja) 2021-06-02
JP2018533736A (ja) 2018-11-15
WO2017081136A1 (de) 2017-05-18
CN108369151A (zh) 2018-08-03
US20200264066A1 (en) 2020-08-20
EP3374746B1 (de) 2020-07-15
TW201721119A (zh) 2017-06-16
EP3374746A1 (de) 2018-09-19
DE102015222213A1 (de) 2017-05-11
KR20180088833A (ko) 2018-08-07
US20180328809A1 (en) 2018-11-15
TWI718204B (zh) 2021-02-11
KR102684152B1 (ko) 2024-07-10

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