CN101473208A - 相对高试验压力下大泄漏处痕量气体泄漏检测系统和方法 - Google Patents
相对高试验压力下大泄漏处痕量气体泄漏检测系统和方法 Download PDFInfo
- Publication number
- CN101473208A CN101473208A CNA2007800233921A CN200780023392A CN101473208A CN 101473208 A CN101473208 A CN 101473208A CN A2007800233921 A CNA2007800233921 A CN A2007800233921A CN 200780023392 A CN200780023392 A CN 200780023392A CN 101473208 A CN101473208 A CN 101473208A
- Authority
- CN
- China
- Prior art keywords
- inlet
- forepump
- vacuum pump
- trace
- test
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000001514 detection method Methods 0.000 title claims abstract description 14
- 239000007789 gas Substances 0.000 claims description 38
- 239000001307 helium Substances 0.000 claims description 21
- 229910052734 helium Inorganic materials 0.000 claims description 21
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 20
- 238000009792 diffusion process Methods 0.000 claims description 11
- 238000005070 sampling Methods 0.000 claims description 10
- 230000008569 process Effects 0.000 claims description 7
- 241000937413 Axia Species 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 150000002371 helium Chemical class 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 238000007634 remodeling Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
Description
Claims (14)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/513,716 US7500381B2 (en) | 2006-08-31 | 2006-08-31 | Systems and methods for trace gas leak detection of large leaks at relatively high test pressures |
US11/513,716 | 2006-08-31 | ||
PCT/US2007/018962 WO2008027411A1 (en) | 2006-08-31 | 2007-08-28 | System and method for trace gas leak detection of large leaks at relatively high test pressures |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101473208A true CN101473208A (zh) | 2009-07-01 |
CN101473208B CN101473208B (zh) | 2010-12-08 |
Family
ID=38809021
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007800233921A Expired - Fee Related CN101473208B (zh) | 2006-08-31 | 2007-08-28 | 相对高试验压力下大泄漏处痕量气体泄漏检测系统和方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7500381B2 (zh) |
EP (1) | EP2059780B1 (zh) |
KR (1) | KR20090043534A (zh) |
CN (1) | CN101473208B (zh) |
HK (1) | HK1132036A1 (zh) |
WO (1) | WO2008027411A1 (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105556272A (zh) * | 2013-09-16 | 2016-05-04 | 英福康有限责任公司 | 具有多级隔膜泵的嗅探泄漏探测器 |
CN107449559A (zh) * | 2017-09-13 | 2017-12-08 | 苏州热工研究院有限公司 | 一种用于核电机组控制区内水池不锈钢覆面的氦查漏方法 |
CN108369151A (zh) * | 2015-11-11 | 2018-08-03 | 英福康有限责任公司 | 测试气体入口处的压力测量 |
CN111542699A (zh) * | 2018-04-16 | 2020-08-14 | 爱德华兹有限公司 | 多级真空泵和差异化地抽吸多个真空室的方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8955370B1 (en) | 2008-04-18 | 2015-02-17 | Sandia Corporation | Detection of gas leakage |
US8201438B1 (en) | 2008-04-18 | 2012-06-19 | Sandia Corporation | Detection of gas leakage |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3690151A (en) * | 1968-07-25 | 1972-09-12 | Norton Co | Leak detector |
US4472962A (en) * | 1981-08-03 | 1984-09-25 | Balzers Aktiengesellschaft | Low pressure leak detector |
US4735084A (en) * | 1985-10-01 | 1988-04-05 | Varian Associates, Inc. | Method and apparatus for gross leak detection |
US4845360A (en) * | 1987-12-10 | 1989-07-04 | Varian Associates, Inc. | Counterflow leak detector with high and low sensitivity operating modes |
US5238362A (en) * | 1990-03-09 | 1993-08-24 | Varian Associates, Inc. | Turbomolecular pump |
US5538373A (en) * | 1992-02-20 | 1996-07-23 | Giddings & Lewis, Inc. | Machine tool vibration isolation system |
US5542828A (en) * | 1994-11-17 | 1996-08-06 | Grenci; Charles A. | Light-gas-isolation, oil-free, scroll vaccum-pump system |
DE4445829A1 (de) * | 1994-12-22 | 1996-06-27 | Leybold Ag | Gegenstrom-Schnüffellecksucher |
US5932797A (en) * | 1996-05-08 | 1999-08-03 | Southeastern Universities Research Assn. | Sensitive hydrogen leak detector |
DE19735250A1 (de) * | 1997-08-14 | 1999-02-18 | Leybold Vakuum Gmbh | Verfahren zum Betrieb eines Heliumlecksuchers und für die Durchführung dieses Verfahrens geeigneter Heliumlecksucher |
FR2784184B1 (fr) * | 1998-10-01 | 2000-12-15 | Cit Alcatel | Detecteur de fuite compact |
DE10156205A1 (de) * | 2001-11-15 | 2003-06-05 | Inficon Gmbh | Testgaslecksuchgerät |
US7232297B2 (en) * | 2003-05-08 | 2007-06-19 | Automotive Motion Technology Limited | Screw pump |
US7204127B2 (en) * | 2003-06-11 | 2007-04-17 | Varian, Inc. | Method and apparatus for large leak testing |
-
2006
- 2006-08-31 US US11/513,716 patent/US7500381B2/en active Active
-
2007
- 2007-08-28 KR KR1020097003981A patent/KR20090043534A/ko not_active Application Discontinuation
- 2007-08-28 WO PCT/US2007/018962 patent/WO2008027411A1/en active Application Filing
- 2007-08-28 CN CN2007800233921A patent/CN101473208B/zh not_active Expired - Fee Related
- 2007-08-28 EP EP07837455.0A patent/EP2059780B1/en active Active
-
2009
- 2009-10-28 HK HK09109971.5A patent/HK1132036A1/xx not_active IP Right Cessation
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105556272A (zh) * | 2013-09-16 | 2016-05-04 | 英福康有限责任公司 | 具有多级隔膜泵的嗅探泄漏探测器 |
CN105556272B (zh) * | 2013-09-16 | 2018-06-22 | 英福康有限责任公司 | 具有多级隔膜泵的嗅探泄漏探测器 |
CN108369151A (zh) * | 2015-11-11 | 2018-08-03 | 英福康有限责任公司 | 测试气体入口处的压力测量 |
CN108369151B (zh) * | 2015-11-11 | 2021-06-04 | 英福康有限责任公司 | 测试气体入口处的压力测量 |
CN107449559A (zh) * | 2017-09-13 | 2017-12-08 | 苏州热工研究院有限公司 | 一种用于核电机组控制区内水池不锈钢覆面的氦查漏方法 |
CN107449559B (zh) * | 2017-09-13 | 2019-04-23 | 苏州热工研究院有限公司 | 一种用于核电机组控制区内水池不锈钢覆面的氦查漏方法 |
CN111542699A (zh) * | 2018-04-16 | 2020-08-14 | 爱德华兹有限公司 | 多级真空泵和差异化地抽吸多个真空室的方法 |
US11326604B2 (en) | 2018-04-16 | 2022-05-10 | Edwards Limited | Multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers |
Also Published As
Publication number | Publication date |
---|---|
WO2008027411A1 (en) | 2008-03-06 |
EP2059780A1 (en) | 2009-05-20 |
US7500381B2 (en) | 2009-03-10 |
KR20090043534A (ko) | 2009-05-06 |
US20080053199A1 (en) | 2008-03-06 |
CN101473208B (zh) | 2010-12-08 |
EP2059780B1 (en) | 2017-04-19 |
HK1132036A1 (en) | 2010-02-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101473208B (zh) | 相对高试验压力下大泄漏处痕量气体泄漏检测系统和方法 | |
EP0218458B1 (en) | Method and apparatus for gross leak detection | |
US5880357A (en) | Leak detector with vacuum pumps and operating process for same | |
JPH02110335A (ja) | 漏れ検出器用のポンプ系 | |
JP2655315B2 (ja) | 複合分子ポンプを使用した漏洩探知装置 | |
US8757987B2 (en) | Vacuum pump for differentially pumping multiple chambers | |
CN103119413B (zh) | 渗漏检测装置 | |
US5341671A (en) | Helium leak detector | |
KR101456843B1 (ko) | 리크 디텍터 | |
JP2005330967A (ja) | 軽量気体用真空ポンプシステム | |
US7600989B2 (en) | Leak detector comprising an inlet | |
US4893497A (en) | Leak detection system | |
CN111213043B (zh) | 用于检查待测物体的密封性的泄漏检测器 | |
JP4357528B2 (ja) | リークディテクタ | |
US7240536B2 (en) | Test-gas leak detector | |
JP2002147393A (ja) | 漏れ検出ポンプ | |
US5974864A (en) | Leak detector with back-up pump | |
US5049168A (en) | Helium leak detection method and system | |
KR100857235B1 (ko) | 가스 누출 감지 장치와, 이를 구비하는 반도체 제조 설비및 그의 처리 방법 | |
JP3675983B2 (ja) | ヘリウムリークディテクター | |
CN118355254A (zh) | 一种气体专用的真空泄漏检测仪及其生产方法 | |
US20140349826A1 (en) | Centrifuge | |
JP2001004479A (ja) | 気体用多重管の内側配管漏洩探知の方法及び装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
REG | Reference to a national code |
Ref country code: HK Ref legal event code: DE Ref document number: 1132036 Country of ref document: HK |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: AGILENT TECHNOLOGIES CO., LTD. Free format text: FORMER OWNER: VARIAN INC. Effective date: 20110401 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20110401 Address after: American California Patentee after: Varian Inc. Address before: American California Patentee before: Varian Inc. |
|
REG | Reference to a national code |
Ref country code: HK Ref legal event code: GR Ref document number: 1132036 Country of ref document: HK |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101208 Termination date: 20200828 |
|
CF01 | Termination of patent right due to non-payment of annual fee |