CN108161261A - It reforms station apparatus - Google Patents
It reforms station apparatus Download PDFInfo
- Publication number
- CN108161261A CN108161261A CN201810107325.8A CN201810107325A CN108161261A CN 108161261 A CN108161261 A CN 108161261A CN 201810107325 A CN201810107325 A CN 201810107325A CN 108161261 A CN108161261 A CN 108161261A
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- China
- Prior art keywords
- axis
- reforming
- fixture block
- blend stop
- station apparatus
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- 238000002407 reforming Methods 0.000 claims abstract description 67
- 239000000203 mixture Substances 0.000 claims abstract description 47
- 230000001360 synchronised effect Effects 0.000 claims abstract description 28
- 230000009471 action Effects 0.000 claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 239000004579 marble Substances 0.000 claims description 27
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 27
- 239000003638 chemical reducing agent Substances 0.000 claims description 9
- 239000000872 buffer Substances 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 239000004575 stone Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 41
- 230000007246 mechanism Effects 0.000 abstract description 37
- 238000000034 method Methods 0.000 abstract description 9
- 230000008569 process Effects 0.000 abstract description 9
- 230000003028 elevating effect Effects 0.000 description 14
- 238000010586 diagram Methods 0.000 description 12
- 238000010521 absorption reaction Methods 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000012876 carrier material Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012946 outsourcing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
- B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
Abstract
The present invention relates to station apparatus of reforming, driving wheel and driven wheel are freely and rotatably supported on substrate, synchronous belt is placed on driving wheel and driven wheel, the side of synchronous belt is installed by the first fixture block, the opposite side of synchronous belt installs the second fixture block, it is corresponding on first fixture block and the second fixture block that right slide plate and left skateboard are installed, reform left blend stop and right blend stop of reforming are correspondingly provided on left skateboard and right slide plate, reform left blend stop and reform right blend stop in parallel arrangement, synchronous belt drives the first fixture block and the second fixture block to take exercises the opposite linear motion in direction, left skateboard and right slide plate is made to take exercises the opposite linear motion in direction, drive reform left blend stop and right blend stop of reforming it is opposite simultaneously or backwards to moving, it generates closure or expansion action and centering is positioned to carrier.It reforms for carrying the carrier come to material fetching mechanism, carries out automatic positioning centering action, carry out place mat for later process, promote point-to-point handling precision when carrying.
Description
Technical field
The present invention relates to a kind of for positioning the station apparatus of reforming of centering, belong to technical field of automation equipment.
Background technology
The automatic loading and unloading system of wafer laser cutting equipment is mainly carried out brilliant using Three Degree Of Freedom wafer conveying robot
Circle is carried, and existing Three Degree Of Freedom wafer conveying robot belongs to standard outsourcing piece, and device layout can be by Manipulator Transportation space
Influence, equipment integral layout needs carried out according to the carrying space of manipulator, cause device space utilization rate not high, simultaneously
Manipulator price itself costly, is unfavorable for batch device cost control, is also unfavorable for mass production.In handling precision side
Face, the architectural characteristic of Three Degree Of Freedom wafer conveying robot, point-to-point handling precision generally all in 200um or so, belong to relatively low
Accuracy class.In terms of motion control, device software control needs to be communicated and controlled with manipulator control unit, meeting in this way
Increase the control difficulty of device software entirety.
The carrier for being mounted with product is carried out by what is more important, material fetching mechanism from magazine, whole process carrier quilt
Translation is the guiding mechanism of no any auxiliary to constrain, then for motion flow later, has certain risk.If
The position degree of carrier has error, is just likely to result in subsequent Suction cup assembly and is adsorbed onto carrier edge afterwards vertically downward, even
It is not adsorbed onto on carrier, can all lead to vacuum breaker phenomenon, so that product cannot be firmly sucked and be promoted.
Therefore, it is necessary to design one kind to reform station apparatus, the carrier that material fetching mechanism carrying comes is reformed, to carrier
It is automatically positioned and centering action, place mat is carried out for action in next step.
Invention content
The purpose of the present invention is overcoming the shortcomings of the prior art, a kind of station dress of reforming for positioning centering is provided
It puts.
The purpose of the present invention is achieved through the following technical solutions：
It reforms station apparatus, feature is：Include driving wheel, driven wheel, synchronous belt, the first fixture block, the second fixture block, left cunning
Plate, right slide plate, left blend stop of reforming, reform right blend stop and substrate, driving wheel and driven wheel are freely and rotatably supported on substrate,
Synchronous belt is placed on driving wheel and driven wheel, and the first fixture block, the opposite side installation second of synchronous belt are installed in the side of synchronous belt
The right slide plate of installation is corresponded on fixture block, the first fixture block and the second fixture block and left skateboard, left skateboard are reformed with being correspondingly provided on right slide plate
Left blend stop and right blend stop of reforming, for left blend stop of reforming with right blend stop of reforming in parallel arrangement, synchronous belt drives the first fixture block and second
Fixture block is taken exercises the opposite linear motion in direction, and left skateboard and right slide plate is made to take exercises the opposite linear motion in direction, and drive is returned
Just left blend stop and right blend stop of reforming are simultaneously in opposite directions or backwards to moving, and generation is closed or expansion action feels relieved to carrier positioning.
Further, above-mentioned station apparatus of reforming, wherein, it is parallel that the left blend stop of reforming with right blend stop of reforming is placed in two
It, can be along its linear slide in the linear guide of arrangement.
Further, above-mentioned station apparatus of reforming, wherein, it is drivingly connected by a servo motor and driving wheel.
Further, above-mentioned station apparatus of reforming, wherein, the input shaft of servo motor and a speed reducer is sequentially connected,
The output shaft of speed reducer is drivingly connected with driving wheel.
Further, above-mentioned station apparatus of reforming, wherein, the driving wheel and driven wheel be freely and rotatably supported in
On bearing block, bearing block is installed on substrate.
Further, above-mentioned station apparatus of reforming, wherein, first fixture block and the second fixture block are pressed from both sides for metal belt
Block.
Further, above-mentioned station apparatus of reforming, wherein, the station apparatus of reforming is installed on the movement of X-Y marbles
On platform.
Further, above-mentioned station apparatus of reforming, wherein, the X-Y marbles motion platform includes X-axis moving cell
With Y-axis moving cell, the X-axis moving cell includes X-axis marble pedestal, X-axis the linear guide, X-axis connecting plate and control X-axis
The X-axis linear motor of connecting plate movement, X-axis the linear guide and X-axis linear motor are installed on X-axis marble pedestal, X-axis connection
Plate is placed in X-axis the linear guide, and X-axis linear motor is drivingly connected with X-axis connecting plate, so as to control X-axis connecting plate along X-axis straight line
Guide rail moves；
The Y-axis moving cell includes Y-axis marble pedestal, Y-axis the linear guide, Y-axis connecting plate and control Y-axis connecting plate
The Y-axis linear motor of movement, Y-axis the linear guide and Y-axis linear motor are installed on Y-axis marble pedestal, and Y-axis connecting plate is placed in
In Y-axis the linear guide, Y-axis linear motor is drivingly connected with Y-axis connecting plate, so as to which Y-axis connecting plate be controlled to be transported along Y-axis the linear guide
It is dynamic；The Y-axis marble pedestal is connected on X-axis connecting plate, and Y-axis the linear guide is in 90 degree of angles with X-axis the linear guide.
Further, above-mentioned station apparatus of reforming, wherein, X-axis grating scale, Y are installed on the X-axis marble pedestal
Y-axis grating scale is installed on axis marble pedestal.
Further, above-mentioned station apparatus of reforming, wherein, the limiting of two X-axis is installed slow on the X-axis marble pedestal
Device is rushed, respectively positioned at the both ends of X-axis the linear guide；Two Y-axis limiting buffer devices are installed, respectively position on Y-axis marble pedestal
In the both ends of Y-axis the linear guide.
The present invention has significant advantages and beneficial effects compared with prior art, embodies in the following areas：
The present invention reform station apparatus can be used for material fetching mechanism carrying come carrier reform, active wheel drive synchronize
With the first fixture block and the second fixture block linear motion that do direction opposite is driven, transport the left and right slide plate opposite straight line in direction of taking exercises
Dynamic, drive left and right blend stop of reforming is opposite simultaneously or backwards to moving, and generates and is closed or expansion action, carrier is carried out automatic positioning and
Centering action so that carrier positions position and centering is accurate, and place mat is carried out for later process.Promote point-to-point carrying when carrying
Precision.
Description of the drawings
Fig. 1：The present invention reforms the structure schematic diagram of station apparatus；
Fig. 2：The present invention reforms the positive structure schematic of station apparatus；
Fig. 3：The present invention reform station apparatus be applied to automatic loading and unloading system schematic diagram；
Fig. 4：The structure diagram of carrier；
Fig. 5：The structure diagram of magazine；
Fig. 6：The connection diagram of magazine and Z axis elevating movement unit；
Fig. 7：The connection diagram of material fetching mechanism and Y-axis moving cell；
Fig. 8：Rotate the structure diagram of material handling unit；
Fig. 9：The structure diagram of microscope carrier unit；
Figure 10：The schematic diagram of one working condition of automatic loading and unloading system；
Figure 11：The schematic diagram of another working condition of automatic loading and unloading system.
Specific embodiment
For a clearer understanding of the technical characteristics, objects and effects of the present invention, specific implementation is now described in detail
Scheme.
As shown in Figure 1 and Figure 2, station apparatus of reforming includes driving wheel 603, driven wheel 604, synchronous belt 606, the first fixture block
607th, the second fixture block 608, left skateboard 610, right slide plate 609, left blend stop 612 of reforming, reform right blend stop 611 and substrate 605, it is main
Driving wheel 603 and driven wheel 604 are freely and rotatably supported on bearing block, and bearing block is installed on substrate 605, synchronous belt 606
It is placed on driving wheel 603 and driven wheel 604, the first fixture block 607, the opposite side of synchronous belt 606 are installed in the side of synchronous belt 606
Second fixture block 608 is installed, the first fixture block 607 and the second fixture block 608 are metal belt fixture block, the first fixture block 607 and the second fixture block
It is corresponding on 608 that right slide plate 609 and left skateboard 610 are installed, it is correspondingly provided with left blend stop 612 of reforming on left skateboard 610 and right slide plate 609
With right blend stop 611 of reforming, left blend stop 612 of reforming is in parallel arrangement with right blend stop 611 of reforming, reform left blend stop 612 and the right side of reforming
Blend stop 611 is placed in the linear guide 613 of two parallel arrangements, can be along its linear slide；Servo motor 601 and speed reducer 602
Input shaft is sequentially connected, and output shaft and the driving wheel 603 of speed reducer 602 are drivingly connected, and the work of servo motor 601 makes synchronous belt
606 operatings, synchronous belt 606 drive the first fixture block 607 and the second fixture block 608 to take exercises the opposite linear motion in direction, make left cunning
Plate 610 and right slide plate 609 are taken exercises the opposite linear motion in direction, and drive, which is reformed, left blend stop 612 and reforms right blend stop 611 simultaneously
Opposite or movement backwards, generates closure or expansion action and positions centering to carrier 1.
Servo motor 601 and speed reducer 602 are direct-connected, and driving wheel 603 and speed reducer 602 are direct-connected, the rotation of servo motor 601
Movement passes to driving wheel 603, then follower 604 is driven to rotate by synchronous belt 606.First folder is installed on synchronous belt 606
607 and second fixture block 608 of block, the first fixture block 607 and the second fixture block 608 are tightly held tightly with synchronous belt 606, are done together with synchronous belt
Straight reciprocating motion.First fixture block 607 and the second fixture block 608 are mounted on the both sides of synchronous belt 606, and synchronous belt both sides are then to do directly
Line moves, and just moves in a straight line the first fixture block 607 and the second fixture block 608.Due to the first fixture block 607 and the second fixture block 608
606 both sides of synchronous belt rather than homonymy are separately mounted to, therefore, the direction of motion of the first fixture block 607 and the second fixture block 608 is just
It is good on the contrary, when and it is close, when and it is separate.First fixture block 607 and the second fixture block 608 be divided into not with the right side in the linear guide
Slide plate 609 is connect with left skateboard 610, and left and right slide plate is divided into not to be connect with left and right blend stop of reforming, and allows for left blend stop of reforming in this way
612 move in opposite directions or backwards simultaneously with right blend stop 611 of reforming, and the final effect for generating closure or opening is realized and carrier 1 is determined
Heart action.
Purpose using speed reducer 602 is to increase the torque of servo motor 601, that is, the driving of increase belt driving wheel
Power, so as to finally increase the thrust of reform left blend stop 612 and right blend stop 611 of reforming so that carrier movement is more smooth.
Station apparatus of reforming is mountable on X-Y marble motion platforms, and X-Y marbles motion platform is moved comprising X-axis
Unit and Y-axis moving cell, X-axis moving cell include X-axis marble pedestal, X-axis the linear guide, X-axis connecting plate and control X-axis
The X-axis linear motor of connecting plate movement, X-axis the linear guide and X-axis linear motor are installed on X-axis marble pedestal, X-axis connection
Plate is placed in X-axis the linear guide, and X-axis linear motor is drivingly connected with X-axis connecting plate, so as to control X-axis connecting plate along X-axis straight line
Guide rail moves；Y-axis moving cell includes Y-axis marble pedestal, Y-axis the linear guide, Y-axis connecting plate and control Y-axis connecting plate fortune
Dynamic Y-axis linear motor, Y-axis the linear guide and Y-axis linear motor are installed on Y-axis marble pedestal, and Y-axis connecting plate is placed in Y
In axis the linear guide, Y-axis linear motor is drivingly connected with Y-axis connecting plate, so as to which Y-axis connecting plate be controlled to be transported along Y-axis the linear guide
It is dynamic；Y-axis marble pedestal is connected on X-axis connecting plate, and Y-axis the linear guide is in 90 degree of angles with X-axis the linear guide.X-axis Dali
X-axis grating scale on stone pedestal is installed, Y-axis grating scale is installed on Y-axis marble pedestal.It is equipped on X-axis marble pedestal
Two X-axis limiting buffer devices, respectively positioned at the both ends of X-axis the linear guide；The limiting of two Y-axis is installed slow on Y-axis marble pedestal
Device is rushed, respectively positioned at the both ends of Y-axis the linear guide.
Above-mentioned station apparatus of reforming is applied to automatic loading and unloading system, as shown in figure 3, automatic loading and unloading system includes：With
In carrying product carrier 1, for place carrier magazine 2, for deliver magazine up and down motion Z axis elevating movement unit 3,
For grip carrier material fetching mechanism 4, for driving Y-axis moving cell 5 that material fetching mechanism moves along a straight line, for being positioned to carrier
The station apparatus 6 of reforming of centering, for rotating the rotation material handling unit 7 of delivery vehicle and microscope carrier unit 8, magazine 2 and reform
Station apparatus 6 be located at the side of Y-axis moving cell 5 and along material fetching mechanism 4 the direction of motion in front and rear arrangement, Y-axis moving cell 5
It being drivingly connected with material fetching mechanism 4, drives its linear motion, magazine 2 is from bottom to top equipped with the bearing groove that multilayer is used to place carrier,
The feed inlet and outlet of magazine 2 is right against the traffic direction of material fetching mechanism 4, and microscope carrier unit 8 is located at the opposite side of Y-axis moving cell 5, rotation
Transhipment material unit 7, which is located at, reforms between station apparatus 6 and microscope carrier unit 8.
Material fetching mechanism 4 is carried the carrier 1 that comes and reformed by station apparatus 6 of reforming, carrier is carried out automatic positioning and
Centering action.Because when material fetching mechanism 4 from magazine 2 by carrier 1 carry out until reform station when, whole process carrier
It is translated, it is the guiding mechanism of no any auxiliary to constrain, then for motion flow later, rotates the suction of material handling unit 7
Disk 701 goes absorption carrier surrounding vertically downward, is to have certain risk by carrier promotion.If the position degree of carrier has error,
It is just likely to result in sucker 701 and is adsorbed onto carrier edge afterwards vertically downward, even without being adsorbed onto on carrier, can all cause brokenly
Vacuum phenomenon, so that product cannot be firmly sucked and be promoted.Therefore, by station apparatus 6 of reforming, from the change of station
Change, that is, carrier is just easily positioned and felt relieved, is next by the closure of reform left blend stop 612 and right blend stop 611 of reforming
Place mat is carried out in step action.
As shown in figure 4, carrier 1 includes to fix the transparent UV films 102 of product 101 and steel loop 103, transparent UV films
102 are placed on steel loop 103；The thickness of steel loop 103 is 1mm.Processed product is fixed by transparent UV films 102 with steel loop 103, is made
Carrier when carrying and process for product.
As shown in figure 5, magazine 2 is from bottom to top equipped with the several layers of slot 201 individually passed in and out for carrier 1, carrier is placed in 25 layers
Magazine in, can individually pass in and out per a piece of carrier, per spacing from level to level from for 5mm.Carrier to be processed from magazine 2 from upper and
Under be removed one by one, then on and under be sent back to one by one.After 25 carriers process, operator only needs to change another material
Box is again introduced into entire roboticized work.
As shown in fig. 6, magazine 2 is installed on Z axis elevating movement unit 3, Z axis elevating movement unit 3 drives magazine about 2
Movement.The main function of Z axis elevating movement unit 3 is that magazine 2 is driven to move up and down, and be the interlayer according to magazine 5mm
Away from lifting action is carried out, coordinate 4 moving carrier of material fetching mechanism.
As shown in fig. 7, material fetching mechanism 4 is placed on Y-axis moving cell 5, material fetching mechanism 4 grips carrier 1, Y-axis from magazine 2
Moving cell 5 drives material fetching mechanism 4 to move along a straight line, and carrier 1 is transported to station dress of reforming on station apparatus 6 or will reform
It puts the carrier for having completed to process on 6 and returns to magazine 2.Material fetching mechanism 4 moves in a straight line first, into magazine 2, then carries out
Pinching action takes out carrier from magazine 2, is then transported to reforming on station apparatus 6 of specifying again；On the contrary, during the material returned, it is
The carrier reformed on station apparatus 6 is sent back to again in magazine 2.
As shown in figure 8, rotation material handling unit 7 includes sucker 701, sucker elevating mechanism 702 and sucker rotating mechanism
703, sucker 701 is placed on sucker elevating mechanism 702, and sucker elevating mechanism 702 is installed on sucker rotating mechanism 703, sucker
Four suction nozzles are circumferentially evenly spaced on 701, for absorption carrier 1.
The effect of rotation material handling unit 7 is that station apparatus 6 of reforming has been completed to the carrier of positioning centering, passes through sucker 701
Absorption action, the enhancing action of sucker elevating mechanism 702 and the 180 degree spinning movement of sucker rotating mechanism 703, by carrier
Upper product is placed on microscope carrier unit 8 and is processed；On the contrary, the carrier processed is dynamic by adsorbing from microscope carrier unit 8
Make, after enhancing action and rotation 180 degree, carrier is placed at station apparatus 6 of reforming, realize that a material exchanges.Sucker
4 suction nozzles are evenly equipped on 701, the pull of vacuum of sucker keeps true from vacuum solenoid by the control of vacuum solenoid
Empty break-make, so as to adsorb and place product.Sucker elevating mechanism 702 is lifting cylinder, and the carrier adsorbed is done
One promotion or lowering action, leave original station, prepare for rotation in next step；Sucker rotating mechanism 703 passes through servo electricity
The carrying and exchange of material are realized in the rotary motion of machine.
As shown in figure 9, vacuum absorption holes 801 are distributed on microscope carrier unit 8, for absorption carrier 1.8 conduct of microscope carrier unit
Fixed station when work top and product when product is processed are carried.When the product of carrier is by rotation material handling unit 7
After being transported to the station of microscope carrier unit 8, entire automatic loading/unloading flow terminates, and proceeds immediately to processing cutting flow.On the contrary,
It is the starting point that feed back is carried, is sent back to carrier in magazine by loading and unloading system.
What is carried is carrier and product wafer thereon, Z axis elevating movement unit 3, Y-axis moving cell 5 and is reformed
Station apparatus 6 is driven using servo motor, and rotation material handling unit 7 uses servo motor and vacuum cup, the essence of whole system
Degree can be controlled within 20um.
During concrete application, Z axis elevating movement unit 3 moves up and down magazine 2 to suitable position, convenient for material fetching mechanism 4
Dop is gripped, and Y-axis moving cell 5 drives material fetching mechanism 4 to pull out the carrier of magazine 2 inside magazine, as shown in Figure 3.
At this point, reforming for station apparatus 6 of reforming and reforms right blend stop 611 in opened condition at left blend stop 612, due to rotating material handling unit 7
Loading and unloading are shared with material fetching mechanism 4 and carry space, so in 0 degree of station of diagram.
And then, carrier is sent to station apparatus 6 of reforming and positioned by material fetching mechanism 4, as shown in Figure 10 so that carrier position
It puts positioning and centering is accurate.At this point, rotation material handling unit 7 is still in 0 degree of station position of diagram.
Then, the sucker 701 of rotation material handling unit 7 and the collective effect of sucker elevating mechanism 702 drop to carrier positions,
Into vacuum adsorbed, posterior sucker 701 rise, pass through sucker elevating mechanism 702 and complete sucker rise and fall and act so that carry
Body is detached from original station, as shown in figure 11, at this point, sucker rotating mechanism 703 is rotated by 90 ° first, after adsorbing good vector, first on
It rises, then rotates 180 degree, then decline again, finally carrier is placed on microscope carrier unit 8, complete entire loading and unloading flow.
Meanwhile if there is the product that processes on microscope carrier unit 8,180 degree rotation is carried out by rotating material handling unit 7,1 second
The time of clock is placed on and reforms on station apparatus 6 after carrier is rotated, and then retracts magazine by material fetching mechanism 4 again, completes to move back
Material acts.Entire loading and unloading system execution is highly stable, and efficiency is very high.Time by the charging of actually detected single is 5
Second or so, the material returned time at 4 seconds or so, completes a material and exchanges less than 10 seconds.
In conclusion the present invention reforms, station apparatus can be used for reforming to the carrier that material fetching mechanism carrying comes, actively
Wheel drive synchronous belt drives the first fixture block and the second fixture block linear motion that do direction opposite, and left and right slide plate is made to take exercises direction phase
Anti- linear motion drives left and right blend stop of reforming opposite simultaneously or backwards to moving, and generation is closed or expansion action, and carrier is carried out
Automatic positioning and centering action so that carrier positions position and centering is accurate, and place mat is carried out for later process.It is promoted and carries time point
To the handling precision of point.
It should be noted that：The foregoing is merely the preferred embodiment of the present invention, are not limited to the power of the present invention
Sharp range；Description above simultaneously, should can understand and implement for the special personage of correlative technology field, thus it is other without departing from
The equivalent change or modification completed under disclosed spirit, should be included in claim.
Claims (10)
1. station apparatus of reforming, it is characterised in that：Include driving wheel, driven wheel, synchronous belt, the first fixture block, the second fixture block, left cunning
Plate, right slide plate, left blend stop of reforming, reform right blend stop and substrate, driving wheel and driven wheel are freely and rotatably supported on substrate,
Synchronous belt is placed on driving wheel and driven wheel, and the first fixture block, the opposite side installation second of synchronous belt are installed in the side of synchronous belt
The right slide plate of installation is corresponded on fixture block, the first fixture block and the second fixture block and left skateboard, left skateboard are reformed with being correspondingly provided on right slide plate
Left blend stop and right blend stop of reforming, for left blend stop of reforming with right blend stop of reforming in parallel arrangement, synchronous belt drives the first fixture block and second
Fixture block is taken exercises the opposite linear motion in direction, and left skateboard and right slide plate is made to take exercises the opposite linear motion in direction, and drive is returned
Just left blend stop and right blend stop of reforming are simultaneously in opposite directions or backwards to moving, and generation is closed or expansion action feels relieved to carrier positioning.
2. station apparatus according to claim 1 of reforming, it is characterised in that：Left blend stop and the right blend stop of reforming of reforming is put
In two parallel arrangement the linear guide on, can be along its linear slide.
3. station apparatus according to claim 1 of reforming, it is characterised in that：Connected by a servo motor and active wheel drive
It connects.
4. station apparatus according to claim 3 of reforming, it is characterised in that：The input shaft of servo motor and a speed reducer passes
Dynamic connection, output shaft and the driving wheel of speed reducer are drivingly connected.
5. station apparatus according to claim 1 of reforming, it is characterised in that：The driving wheel and driven wheel rotate freely
Ground is supported on bearing block, and bearing block is installed on substrate.
6. station apparatus according to claim 1 of reforming, it is characterised in that：First fixture block and the second fixture block are metal
Belt fixture block.
7. station apparatus according to claim 1 of reforming, it is characterised in that：It is big that the station apparatus of reforming is installed on X-Y
On reason stone motion platform.
8. station apparatus according to claim 7 of reforming, it is characterised in that：The X-Y marbles motion platform includes X-axis
Moving cell and Y-axis moving cell, the X-axis moving cell include X-axis marble pedestal, X-axis the linear guide, X-axis connecting plate
With the X-axis linear motor of control X-axis connecting plate movement, X-axis the linear guide and X-axis linear motor are installed on X-axis marble pedestal
On, X-axis connecting plate is placed in X-axis the linear guide, and X-axis linear motor is drivingly connected with X-axis connecting plate, so as to which X-axis be controlled to connect
Plate is moved along X-axis the linear guide；
The Y-axis moving cell includes Y-axis marble pedestal, Y-axis the linear guide, Y-axis connecting plate and the connecting plate movement of control Y-axis
Y-axis linear motor, Y-axis the linear guide and Y-axis linear motor be installed on Y-axis marble pedestal, and Y-axis connecting plate is placed in Y-axis
In the linear guide, Y-axis linear motor is drivingly connected with Y-axis connecting plate, so as to which Y-axis connecting plate be controlled to be moved along Y-axis the linear guide；
The Y-axis marble pedestal is connected on X-axis connecting plate, and Y-axis the linear guide is in 90 degree of angles with X-axis the linear guide.
9. station apparatus according to claim 8 of reforming, it is characterised in that：X-axis is installed on the X-axis marble pedestal
Grating scale is equipped with Y-axis grating scale on Y-axis marble pedestal.
10. station apparatus according to claim 8 of reforming, it is characterised in that：Two are equipped on the X-axis marble pedestal
X-axis limiting buffer device, respectively positioned at the both ends of X-axis the linear guide；Two Y-axis limiting buffers are installed on Y-axis marble pedestal
Device, respectively positioned at the both ends of Y-axis the linear guide.
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| CN201810107325.8A CN108161261A (en) | 2018-02-02 | 2018-02-02 | It reforms station apparatus |
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