CN108161251A - Automatic loading and unloading system - Google Patents
Automatic loading and unloading system Download PDFInfo
- Publication number
- CN108161251A CN108161251A CN201810106810.3A CN201810106810A CN108161251A CN 108161251 A CN108161251 A CN 108161251A CN 201810106810 A CN201810106810 A CN 201810106810A CN 108161251 A CN108161251 A CN 108161251A
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- Prior art keywords
- steel loop
- unit
- carrier
- reforming
- magazine
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- 229910000831 Steel Inorganic materials 0.000 claims abstract description 124
- 239000010959 steel Substances 0.000 claims abstract description 124
- 238000002407 reforming Methods 0.000 claims abstract description 41
- 239000000463 material Substances 0.000 claims abstract description 28
- 230000003028 elevating effect Effects 0.000 claims abstract description 22
- 239000000203 mixture Substances 0.000 claims description 39
- 230000007246 mechanism Effects 0.000 claims description 23
- 230000001360 synchronised effect Effects 0.000 claims description 23
- 230000009471 action Effects 0.000 claims description 13
- 239000003638 chemical reducing agent Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000001179 sorption measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 12
- 238000010521 absorption reaction Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012946 outsourcing Methods 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
The present invention relates to automatic loading and unloading systems,For carrying the steel loop carrier of product,For placing the steel loop magazine of steel loop carrier,For delivering the Z axis elevating movement unit of steel loop magazine up and down motion,For gripping the feeding unit of steel loop carrier,For the Y-axis moving cell that feeding unit is driven to move along a straight line,For the station unit of reforming to the positioning centering of steel loop carrier,For rotating the delivery rotation material handling unit of steel loop carrier and microscope carrier unit,Steel loop magazine and station unit of reforming are located at the side of Y-axis moving cell and are in front and rear arrangement along the direction of motion of feeding unit,Steel loop magazine is from bottom to top equipped with the bearing groove that multilayer is used to place steel loop carrier,The feed inlet and outlet of steel loop magazine is right against the traffic direction of feeding unit,Microscope carrier unit is located at the opposite side of Y-axis moving cell,Rotation material handling unit, which is located at, reforms between station unit and microscope carrier unit.Automation is realized carries loading and unloading to product wafer, while promotes point-to-point precision when wafer is carried.
Description
Technical field
The present invention relates to a kind of automatic loading and unloading systems, belong to technical field of automation equipment.
Background technology
At present, the automatic loading and unloading system of wafer laser cutting equipment mainly using Three Degree Of Freedom wafer conveying robot into
Row wafer is carried, and existing Three Degree Of Freedom wafer conveying robot belongs to standard outsourcing piece, and device layout can be by Manipulator Transportation
The influence in space, equipment integral layout needs are carried out according to the carrying space of manipulator, cause device space utilization rate not high,
Manipulator price itself costly, is unfavorable for batch device cost control, is also unfavorable for mass production simultaneously.Carrying essence
In terms of degree, the architectural characteristic of Three Degree Of Freedom wafer conveying robot, point-to-point handling precision generally all in 200um or so, belongs to
Lower accuracy grade.In terms of motion control, device software control needs to be communicated and controlled with manipulator control unit, this
Sample can increase the control difficulty of device software entirety.
Invention content
The purpose of the present invention is overcoming the shortcomings of the prior art, a kind of automatic loading and unloading system is provided.
The purpose of the present invention is achieved through the following technical solutions：
Automatic loading and unloading system, feature are：Steel loop carrier for carrying product, the steel loop material for placing steel loop carrier
Box, for deliver the up and down motion of steel loop magazine Z axis elevating movement unit, for gripping the feeding unit of steel loop carrier, be used for
The Y-axis moving cell of driving feeding unit linear motion, for the positioning centering of steel loop carrier station unit of reforming, for revolving
Transhipment carries the rotation material handling unit of steel loop carrier and microscope carrier unit, and the steel loop magazine and station unit of reforming are located at Y-axis fortune
The side of moving cell and along feeding unit the direction of motion in front and rear arrangement, steel loop magazine is from bottom to top equipped with multilayer for placing
The bearing groove of steel loop carrier, the feed inlet and outlet of steel loop magazine are right against the traffic direction of feeding unit, and microscope carrier unit is located at Y-axis fortune
The opposite side of moving cell, rotation material handling unit, which is located at, reforms between station unit and microscope carrier unit.
Further, above-mentioned automatic loading and unloading system, wherein, the steel loop carrier includes to fix the transparent of product
UV films and steel loop, transparent UV films are placed on steel loop.
Further, above-mentioned automatic loading and unloading system, wherein, the steel loop magazine is from bottom to top equipped with several layers and supplies steel loop
The slot that carrier individually passes in and out, interfloor distance 5mm.
Further, above-mentioned automatic loading and unloading system, wherein, the thickness of the steel loop is 1mm.
Further, above-mentioned automatic loading and unloading system, wherein, it is described reform station unit include driving wheel, driven wheel,
Synchronous belt, the first fixture block, the second fixture block, left skateboard, right slide plate, left blend stop of reforming, reform right blend stop and substrate, driving wheel and
Driven wheel is freely and rotatably supported on substrate, and synchronous belt is placed on driving wheel and driven wheel, the side of synchronous belt installation the
One fixture block, the opposite side of synchronous belt install the second fixture block, are corresponded on the first fixture block and the second fixture block and install right slide plate and left skateboard,
Reform left blend stop and right blend stop of reforming are correspondingly provided on left skateboard and right slide plate, left blend stop of reforming is with right blend stop of reforming in parallel cloth
It puts, synchronous belt drives the first fixture block and the second fixture block to take exercises the opposite linear motion in direction, and left skateboard is made to be transported with right slide plate
The opposite linear motion in dynamic direction, drive reform left blend stop and right blend stop of reforming it is opposite simultaneously or backwards to moving, generate be closed or
Expansion action positions steel loop carrier and feels relieved.
Further, above-mentioned automatic loading and unloading system, wherein, it is flat that reform left blend stop and the right blend stop of reforming are placed in two
It, can be along its linear slide in the linear guide of row arrangement.
Further, above-mentioned automatic loading and unloading system, wherein, the input shaft of servo motor and speed reducer is sequentially connected,
The output shaft of speed reducer is drivingly connected with driving wheel.
Further, above-mentioned automatic loading and unloading system, wherein, the rotation material handling unit includes sucker, sucker lifts
Mechanism and sucker rotating mechanism, sucker are placed on sucker elevating mechanism, and sucker elevating mechanism is installed on sucker rotating mechanism.
Further, above-mentioned automatic loading and unloading system, wherein, four have circumferentially been evenly spaced on the sucker
Suction nozzle.
Further, above-mentioned automatic loading and unloading system, wherein, vacuum absorption holes are distributed on the microscope carrier unit.
The present invention has significant advantages and beneficial effects compared with prior art, embodies in the following areas：
Present invention design is unique, structure novel, and automation is realized carries loading and unloading, while promote wafer and remove to product wafer
Point-to-point precision during fortune, 20um is promoted to by handling precision；It is effectively combined with whole set equipment space in addition, solving wafer carrying
The problem of, space availability ratio is improved, in the case where ensureing higher handling efficiency, efficiently uses equipment overall space so that whole
Body layout is more compact；It is about the 1/3 of existing haulage equipment that it, which manufactures cost, greatly reduces cost；Intelligence carries out up and down
Material control and abnormal alarm processing, work are more stable.
Description of the drawings
Fig. 1：The structure diagram of present system；
Fig. 2：The structure diagram of steel loop carrier；
Fig. 3：The structure diagram of steel loop magazine；
Fig. 4：The connection diagram of steel loop magazine and Z axis elevating movement unit；
Fig. 5：The connection diagram of feeding unit and Y-axis moving cell；
Fig. 6：It reforms the structure schematic diagram of station unit；
Fig. 7：It reforms the positive structure schematic of station unit；
Fig. 8：Rotate the structure diagram of material handling unit；
Fig. 9：The structure diagram of microscope carrier unit；
Figure 10：The schematic diagram of one working condition of present system；
Figure 11：The schematic diagram of another working condition of present system.
Specific embodiment
For a clearer understanding of the technical characteristics, objects and effects of the present invention, specific implementation is now described in detail
Scheme.
As shown in Figure 1, automatic loading and unloading system, for carrying the steel loop carrier 1 of product, the steel for placing steel loop carrier
Ring magazine 2, for deliver steel loop magazine up and down motion Z axis elevating movement unit 3, the feeding unit for gripping steel loop carrier
4th, Y-axis moving cell 5, the station unit of reforming for feeling relieved to the positioning of steel loop carrier for feeding unit to be driven to move along a straight line
6th, the rotation material handling unit 7 of steel loop carrier and microscope carrier unit 8 are delivered for rotating, steel loop magazine 2 and station unit 6 of reforming
It is in front and rear arrangement, Y-axis moving cell 5 and feeding unit 4 in the side of Y-axis moving cell 5 and along the direction of motion of feeding unit 4
It is drivingly connected, drives its linear motion, steel loop magazine 2 is from bottom to top equipped with the bearing groove that multilayer is used to place steel loop carrier, steel
The feed inlet and outlet of ring magazine 2 is right against the traffic direction of feeding unit 4, and microscope carrier unit 8 is located at the opposite side of Y-axis moving cell 5,
Rotation material handling unit 7, which is located at, reforms between station unit 6 and microscope carrier unit 8.
As shown in Fig. 2, steel loop carrier 1 includes to fix the transparent UV films 102 of product 101 and steel loop 103, transparent UV
Film 102 is placed on steel loop 103；The thickness of steel loop 103 is 1mm.Processed product is fixed by transparent UV films 102 with steel loop 103,
Carrier when carrying and process as product.
As shown in figure 3, steel loop magazine 2 is from bottom to top equipped with the several layers of slot 201 individually passed in and out for steel loop carrier 1, steel loop
Carrier is placed in 25 layers of steel loop magazine, can individually be passed in and out per a piece of steel loop carrier, per spacing from level to level from for 5mm.It is to be added
Work steel loop carrier is removed one by one from top to bottom from steel loop magazine 2, then on and under be sent back to one by one.25 steel loop carriers
After processing, operator only needs to change another steel loop magazine, is again introduced into entire roboticized work.
As shown in figure 4, steel loop magazine 2 is installed on Z axis elevating movement unit 3, Z axis elevating movement unit 3 drives steel loop
Magazine 2 moves up and down.The main function of Z axis elevating movement unit 3 is that steel loop magazine 2 is driven to move up and down, and be according to
The interlamellar spacing of magazine 5mm carries out lifting action, and cooperation feeding unit 4 carries steel loop carrier.
As shown in figure 5, feeding unit 4 is placed on Y-axis moving cell 5, feeding unit 4 grips steel loop from steel loop magazine 2
Carrier 1, Y-axis moving cell 5 drive feeding unit 4 to move along a straight line, steel loop carrier 1 is transported to reform on station unit 6 or
The steel loop carrier that processing has been completed on station unit 6 of reforming is returned into steel loop magazine 2.Feeding unit 4 does straight line fortune first
It is dynamic, into steel loop magazine 2, action is then clamped, steel loop carrier from steel loop magazine 2 is taken out, is then transported to finger again
Fixed reforms on station unit 6；It is to send the steel loop carrier reformed on station unit 6 back to steel loop magazine 2 again on the contrary, during the material returned
In.
As shown in Figure 6, Figure 7, station unit 6 of reforming includes driving wheel 603, driven wheel 604, synchronous belt 606, the first fixture block
607th, the second fixture block 608, left skateboard 610, right slide plate 609, left blend stop 612 of reforming, reform right blend stop 611 and substrate 605, it is main
Driving wheel 603 and driven wheel 604 are freely and rotatably supported on substrate 605, and synchronous belt 606 is placed on driving wheel 603 and driven wheel
On 604, the first fixture block 607 is installed in the side of synchronous belt 606, and the opposite side of synchronous belt 606 installs the second fixture block 608, the first folder
Corresponding on 607 and second fixture block 608 of block to install right slide plate 609 and left skateboard 610, left skateboard 610 is corresponding on right slide plate 609 to be set
It reforms and left blend stop 612 and reforms right blend stop 611, reform left blend stop 612 and right blend stop 611 of reforming are in parallel arrangement, a left side of reforming
Blend stop 612 and right blend stop 611 of reforming are placed in the linear guide 613 of two parallel arrangements, can be along its linear slide；Servo motor
601 are sequentially connected with the input shaft of speed reducer 602, and output shaft and the driving wheel 603 of speed reducer 602 are drivingly connected, servo motor
601 work operate synchronous belt 606, and synchronous belt 606 drives the first fixture block 607 and the second fixture block 608 direction of taking exercises opposite
Linear motion makes left skateboard 610 and right slide plate 609 take exercises the opposite linear motion in direction, drives and reform left blend stop 612 with returning
Just right blend stop 611 is opposite simultaneously or backwards to moving, and generation is closed or expansion action positions steel loop carrier 1 and feels relieved.
Servo motor 601 and speed reducer 602 are direct-connected, and driving wheel 603 and speed reducer 602 are direct-connected, the rotation of servo motor 601
Movement passes to driving wheel 603, then follower 604 is driven to rotate by synchronous belt 606.First folder is installed on synchronous belt 606
607 and second fixture block 608 of block, the first fixture block 607 and the second fixture block 608 are tightly held tightly with synchronous belt 606, are done together with synchronous belt
Straight reciprocating motion.First fixture block 607 and the second fixture block 608 are mounted on the both sides of synchronous belt 606, and synchronous belt both sides are then to do directly
Line moves, and just moves in a straight line the first fixture block 607 and the second fixture block 608.Due to the first fixture block 607 and the second fixture block 608
606 both sides of synchronous belt rather than homonymy are separately mounted to, therefore, the direction of motion of the first fixture block 607 and the second fixture block 608 is just
It is good on the contrary, when and it is close, when and it is separate.First fixture block 607 and the second fixture block 608 be divided into not with the right side in the linear guide
Slide plate 609 is connect with left skateboard 610, and left and right slide plate is divided into not to be connect with left and right blend stop of reforming, and allows for left blend stop of reforming in this way
612 move in opposite directions or backwards simultaneously with right blend stop 611 of reforming, and the final effect for generating closure or opening is realized to steel loop carrier 1
Centering action.
Purpose using speed reducer 602 is to increase the torque of servo motor 601, that is, the driving of increase belt driving wheel
Power, so as to finally increase the thrust of reform left blend stop 612 and right blend stop 611 of reforming so that steel loop carrier movement is more smooth.
Feeding unit 4 is carried the steel loop carrier 1 to come and reformed by station unit 6 of reforming, and steel loop carrier is carried out certainly
Dynamic positioning and centering action.Because when steel loop carrier 1 is carried out until station of reforming by feeding unit 4 from steel loop magazine 2
When, whole process steel loop carrier is translated, and is the guiding mechanism of no any auxiliary to constrain, then for stream of action later
Journey, the sucker 701 of rotation material handling unit 7 go absorption steel loop carrier surrounding vertically downward, are to have certain wind by the promotion of steel loop carrier
Danger.If the position degree of steel loop carrier has error, just it is likely to result in sucker 701 and is adsorbed onto steel loop carrier afterwards vertically downward
Edge even without being adsorbed onto on steel loop carrier, can all lead to vacuum breaker phenomenon so that product cannot be firmly sucked and
It is promoted.Therefore, by station unit 6 of reforming, from the variation of station, that is, reform left blend stop 612 and right blend stop 611 of reforming close
It closes, just easily steel loop carrier is positioned and felt relieved, place mat is carried out for action in next step.
As shown in figure 8, rotation material handling unit 7 includes sucker 701, sucker elevating mechanism 702 and sucker rotating mechanism
703, sucker 701 is placed on sucker elevating mechanism 702, and sucker elevating mechanism 702 is installed on sucker rotating mechanism 703, sucker
Four suction nozzles are circumferentially evenly spaced on 701, for adsorbing steel loop carrier 1.
The effect of rotation material handling unit 7 is that station unit 6 of reforming has been completed to the steel loop carrier of positioning centering, passes through sucker
The 180 degree spinning movement of 701 absorption action, the enhancing action of sucker elevating mechanism 702 and sucker rotating mechanism 703, will
Product is placed on microscope carrier unit 8 and is processed on steel loop carrier；On the contrary, the steel loop carrier processed is from microscope carrier unit 8
Above by absorption action, enhancing action and after rotating 180 degree, steel loop carrier is placed at station unit 6 of reforming, realizes one
Secondary material exchanges.4 suction nozzles are evenly equipped on sucker 701, the pull of vacuum of sucker passes through vacuum electromagnetic from vacuum solenoid
The control of valve keeps the break-make of vacuum, so as to adsorb and place product.Sucker elevating mechanism 702 is lifting cylinder, will
The steel loop carrier adsorbed does a promotion or lowering action, leaves original station, prepares for rotation in next step；Sucker rotates
Mechanism 703 by the rotary motion of servo motor, realizes the carrying and exchange of material.
As shown in figure 9, vacuum absorption holes 801 are distributed on microscope carrier unit 8, for adsorbing steel loop carrier 1.Microscope carrier unit 8
Fixed station when work top and product when being processed as product are carried.When the product of steel loop carrier is transported by rotation
After material unit 7 is transported to the station of microscope carrier unit 8, entire automatic loading/unloading flow terminates, and proceeds immediately to processing cutting flow.
On the contrary, and feed back carry starting point, steel loop carrier is sent back in steel loop magazine by loading and unloading system.
What is carried is steel loop carrier and product wafer thereon, Z axis elevating movement unit 3, Y-axis moving cell 5 and
Station unit 6 of reforming is driven using servo motor, and rotation material handling unit 7 uses servo motor and vacuum cup, whole system
Precision can control within 20um.
Specific workflow is：Z axis elevating movement unit 3 moves up and down steel loop magazine 2 to suitable position, convenient for feeding
The dop of unit 4 is gripped, and Y-axis moving cell 5 drives feeding unit 4 by the steel loop carrier of steel loop magazine 2 inside magazine
It pulls out, as shown in Figure 1.At this point, reforming for station unit 6 of reforming and reforms right blend stop 611 in opened condition at left blend stop 612, by
Loading and unloading are shared with feeding unit 4 in rotation material handling unit 7 and carry space, so in 0 degree of station of diagram.
And then, steel loop carrier is sent to station unit 6 of reforming and positioned by feeding unit 4, as shown in Figure 10 so that steel
Ring carrier positions position and centering is accurate.At this point, rotation material handling unit 7 is still in 0 degree of station position of diagram.
Then, the sucker 701 of rotation material handling unit 7 and the collective effect of sucker elevating mechanism 702 drop to steel loop carrier
Position, into vacuum adsorbed, posterior sucker 701 rise, completing sucker rise and fall by sucker elevating mechanism 702 acts,
So that steel loop carrier is detached from original station, as shown in figure 11, at this point, sucker rotating mechanism 703 is rotated by 90 ° first, steel has been adsorbed
After ring carrier, first rise, then rotate 180 degree, then decline again, finally steel loop carrier is placed on microscope carrier unit 8, complete whole
A loading and unloading flow.
Meanwhile if there is the product that processes on microscope carrier unit 8,180 degree rotation is carried out by rotating material handling unit 7,1 second
The time of clock will be placed on after the rotation of steel loop carrier and reform on station unit 6, then retract magazine by feeding unit 4 again, complete
Into material returned action.Entire loading and unloading system execution is highly stable, and efficiency is very high.The time fed by actually detected single
At 5 seconds or so, the material returned time at 4 seconds or so, completed a material and exchanges less than 10 seconds.
In conclusion present invention design is unique, structure novel, automation is realized carries loading and unloading to product wafer, simultaneously
Point-to-point precision problem when wafer is carried is promoted, handling precision is promoted to 20um.It is set in addition, solving wafer carrying with complete machine
The problem of standby space effectively combines, improves space availability ratio, and in the case where ensureing higher handling efficiency, it is whole to efficiently use equipment
Body space so that integral layout is more compact.Meanwhile it is about the 1/3 of existing haulage equipment to manufacture cost, is effectively reduced into
This.Intelligence carries out loading and unloading control and abnormal alarm processing, work are more stablized.
It should be noted that：The foregoing is merely the preferred embodiment of the present invention, are not limited to the power of the present invention
Sharp range；Description above simultaneously, should can understand and implement for the special personage of correlative technology field, thus it is other without departing from
The equivalent change or modification completed under disclosed spirit, should be included in claim.
Claims (10)
1. automatic loading and unloading system, it is characterised in that：For carrying the steel loop carrier of product, the steel loop for placing steel loop carrier
Magazine, for deliver steel loop magazine up and down motion Z axis elevating movement unit, for grip the feeding unit of steel loop carrier, use
In driving feeding unit linear motion Y-axis moving cell, for steel loop carrier positioning centering station unit of reforming, be used for
The rotation delivery rotation material handling unit of steel loop carrier and microscope carrier unit, the steel loop magazine and station unit of reforming are located at Y-axis
The side of moving cell and along feeding unit the direction of motion in front and rear arrangement, steel loop magazine is from bottom to top equipped with multilayer for putting
The bearing groove of steel loop carrier is put, the feed inlet and outlet of steel loop magazine is right against the traffic direction of feeding unit, and microscope carrier unit is located at Y-axis
The opposite side of moving cell, rotation material handling unit, which is located at, reforms between station unit and microscope carrier unit.
2. automatic loading and unloading system according to claim 1, it is characterised in that：The steel loop carrier is included for fixed production
The transparent UV films and steel loop of product, transparent UV films are placed on steel loop.
3. automatic loading and unloading system according to claim 2, it is characterised in that：The steel loop magazine is from bottom to top equipped with number
The slot that layer is individually passed in and out for steel loop carrier, interfloor distance 5mm.
4. automatic loading and unloading system according to claim 2, it is characterised in that：The thickness of the steel loop is 1mm.
5. automatic loading and unloading system according to claim 1, it is characterised in that：The station unit of reforming includes actively
Wheel, driven wheel, synchronous belt, the first fixture block, the second fixture block, left skateboard, right slide plate, left blend stop of reforming, reform right blend stop and base
Plate, driving wheel and driven wheel are freely and rotatably supported on substrate, and synchronous belt is placed on driving wheel and driven wheel, synchronous belt
The first fixture block is installed in side, and the opposite side of synchronous belt installs the second fixture block, corresponded on the first fixture block and the second fixture block and install right cunning
Reform left blend stop and right blend stop of reforming are correspondingly provided on plate and left skateboard, left skateboard and right slide plate, reform left blend stop and the right side of reforming
For blend stop in parallel arrangement, synchronous belt drives the first fixture block and the second fixture block to take exercises the opposite linear motion in direction, makes left skateboard
Take exercises the opposite linear motion in direction with right slide plate, drive reform left blend stop and right blend stop of reforming it is opposite simultaneously or backwards to transporting
It is dynamic, it generates closure or expansion action and centering is positioned to steel loop carrier.
6. automatic loading and unloading system according to claim 5, it is characterised in that：Left blend stop and the right blend stop of reforming of reforming
It is placed in the linear guide of two parallel arrangements, it can be along its linear slide.
7. automatic loading and unloading system according to claim 5, it is characterised in that：The input shaft of servo motor and speed reducer passes
Dynamic connection, output shaft and the driving wheel of speed reducer are drivingly connected.
8. automatic loading and unloading system according to claim 1, it is characterised in that：It is described rotation material handling unit include sucker,
Sucker elevating mechanism and sucker rotating mechanism, sucker are placed on sucker elevating mechanism, and sucker elevating mechanism is installed on sucker rotation
On rotation mechanism.
9. automatic loading and unloading system according to claim 8, it is characterised in that：Circumferentially uniform intervals divide on the sucker
It is furnished with four suction nozzles.
10. automatic loading and unloading system according to claim 1, it is characterised in that：Vacuum is distributed on the microscope carrier unit
Adsorption hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810106810.3A CN108161251A (en) | 2018-02-02 | 2018-02-02 | Automatic loading and unloading system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810106810.3A CN108161251A (en) | 2018-02-02 | 2018-02-02 | Automatic loading and unloading system |
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| CN108161251A true CN108161251A (en) | 2018-06-15 |
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| CN201810106810.3A Pending CN108161251A (en) | 2018-02-02 | 2018-02-02 | Automatic loading and unloading system |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110342233A (en) * | 2019-07-05 | 2019-10-18 | 苏州德龙激光股份有限公司 | Charging tray automatic loading/unloading equipment is not shut down |
| CN112420578A (en) * | 2021-01-22 | 2021-02-26 | 山东元旭光电股份有限公司 | Automatic wafer unloading is with getting puts device |
| CN114368617A (en) * | 2022-01-25 | 2022-04-19 | 深圳市华腾半导体设备有限公司 | Automatic loading and unloading device |
| CN115384847A (en) * | 2022-08-27 | 2022-11-25 | 郑州轨道交通信息技术研究院 | Loading and unloading device and method of automatic wafer film sticking machine |
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| KR20120046957A (en) * | 2010-11-03 | 2012-05-11 | (주)큐엠씨 | Laser processing device and laser processing method using the same |
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