CN203998096U - Graphite boat automatic loading and unloading sheet devices for tubular type PECVD - Google Patents

Graphite boat automatic loading and unloading sheet devices for tubular type PECVD Download PDF

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Publication number
CN203998096U
CN203998096U CN201420377882.9U CN201420377882U CN203998096U CN 203998096 U CN203998096 U CN 203998096U CN 201420377882 U CN201420377882 U CN 201420377882U CN 203998096 U CN203998096 U CN 203998096U
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CN
China
Prior art keywords
axis
rotational motion
servomotor
graphite boat
automatic loading
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CN201420377882.9U
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Chinese (zh)
Inventor
王俊朝
李军阳
刘兵吉
杜武明
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深圳丰盛装备股份有限公司
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Priority to CN201420377882.9U priority Critical patent/CN203998096U/en
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Publication of CN203998096U publication Critical patent/CN203998096U/en

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Abstract

The utility model relates to solar cell technical field of automation equipment, a kind of graphite boat automatic loading and unloading sheet devices for tubular type PECVD is provided, this device is for PECVD automation equipment, comprise for picking up the inserted sheet head assembly of silicon chip, drive inserted sheet head assembly along the Z axis rotational motion mechanism of Z axis rotation, drive Z axis rotational motion mechanism in the Z axis straight-line motion mechanism of vertical direction up-and-down movement, drive Z axis straight-line motion mechanism along the X-axis rotational motion mechanism of X axis rotation and be located at X-axis rotational motion mechanism top and can drive described X-axis rotational motion mechanism in front, after, left, the XY horizontal mobile mechanism moving right.In the utility model, like this, inserted sheet head assembly fast, precisely completes the automatic loading and unloading of silicon chip under above-mentioned each mechanism drives, and above-mentioned each mechanism structure is simple, in function, can substitute existing expensive six axle precision machinery people completely, greatly reduce the cost of manufacture of solar cell, be applicable to popularizing in an all-round way.

Description

Graphite boat automatic loading and unloading sheet devices for tubular type PECVD
Technical field
The utility model relates to solar cell technical field of automation equipment, more particularly, relates to a kind of graphite boat automatic loading and unloading sheet devices for tubular type PECVD.
Background technology
PECVD (Plasma Enhanced Chemical Vapor Deposition) plasma enhanced chemical vapor phase deposition is to utilize low temperature plasma to do energy source, silicon chip is placed on the negative electrode of glow discharge under infrabar, utilize glow discharge (or separately adding exothermic body) to make silicon chip be warmed up to predetermined temperature, then pass into appropriate reacting gas, gas, through not plump chemistry and a plasma reaction, forms solid film on silicon chip.
Graphite boat is as silicon chip carrier electrode, and silicon chip must be placed on graphite boat just can carry out coating process.In silicon solar cell manufacturing process, when carrying out silicon chip surface plated film, first uncoated silicon chip is inserted in graphite boat, the graphite boat that is loaded with silicon chip is placed in PECVD vacuum coating equipment (being called for short PECVD equipment) cavity, adopts suitable pecvd process to carry out plated film to silicon chip.After plated film finishes, from vacuum coating equipment cavity, take out graphite boat and then the silicon chip of plated film is taken off from graphite boat.At present in PECVD equipment, mainly adopt six axle precision machinery people to realize the automatic mounting unloading piece of graphite boat, and this mode gordian technique depend on robot producer, with high costs, be unfavorable for the all-round popularization of automated production.
Utility model content
The purpose of this utility model is to provide a kind of graphite boat automatic loading and unloading sheet devices for tubular type PECVD, is intended to solve in prior art to rely on the problem that six axle precision machinery people carry out automatic unloading piece, has reduced cost, applicable all-round popularization in an all-round way.
For solving the problems of the technologies described above, the technical solution of the utility model is: a kind of graphite boat automatic loading and unloading sheet devices for tubular type PECVD is provided, be located on PECVD equipment, comprise for picking up the inserted sheet head assembly of silicon chip, drive described inserted sheet head assembly along the Z axis rotational motion mechanism of Z axis rotation, drive described Z axis rotational motion mechanism in the Z axis straight-line motion mechanism of vertical direction up-and-down movement, drive described Z axis straight-line motion mechanism along the X-axis rotational motion mechanism of X axis rotation and be located at described X-axis rotational motion mechanism top and can drive described X-axis rotational motion mechanism in front, after, left, the XY horizontal mobile mechanism moving right.
Particularly, described inserted sheet head assembly comprises the sucker that vacuum generator, the ventilation flue who is communicated with described vacuum generator outlet and a plurality of and described ventilation flue are communicated with.
Further, the cylinder manifold that described inserted sheet head assembly also comprises some adapter plates that be arranged in parallel and connects adapter plate described in each, described in each, on adapter plate, be equipped with described sucker, described cylinder manifold be provided with can be respectively to the gas-tpe fitting of the sucker air feed of each adapter plate, described in each, gas-tpe fitting is communicated with described ventilation flue.
Preferably, the sucker described in each on adapter plate is three, and three suckers are triangularly arranged.
Particularly, described Z axis rotational motion mechanism comprise the first servomotor, with the first retarder that the output shaft of described the first servomotor is connected, described inserted sheet head assembly is fixedly connected with the output shaft of described the first retarder.
Particularly, described Z axis straight-line motion mechanism comprise Z axis slide rail, the second servomotor, the Z axis screw mandrel being connected with the output shaft of described the second servomotor, the Z axis nut coordinating with described Z axis screw mandrel, with the Z axis slide block that described Z axis nut is connected, described Z axis slide block is slidedly arranged on described Z axis slide rail; Described the first retarder is fixed on described Z axis slide block.
Particularly, described X-axis rotational motion mechanism comprises the 3rd servomotor, the second retarder being connected with the output shaft of described the 3rd servomotor and the S. A. being connected with the output shaft of described the second retarder, and described Z axis slide rail is fixedly connected with described S. A..
Further, described X-axis rotational motion mechanism also comprises a framework, described framework comprises the biside plate being oppositely arranged and the top board that is connected in described biside plate top, the two ends of described S. A. rotate to be respectively fixed on described biside plate, and described top board is fixed on described XY horizontal mobile mechanism below.
Particularly, described XY horizontal mobile mechanism comprises the two Y-axis slide rails that are oppositely arranged, is located at the X-axis double sided slider bar on described two Y-axis slide rails, the 4th servomotor of being located at described X-axis double sided slider bar one end, the X-axis screw mandrel being connected with the output shaft of described the 4th servomotor, the X-axis nut coordinating with described X-axis screw mandrel, the X-axis slide block being connected with described X-axis nut, and described top board is fixed on below described X-axis slide block.
Particularly, wherein described in one, Y-axis slide rail is double sided slider bar, described XY horizontal mobile mechanism also comprises is located at the 5th servomotor of described double sided slider bar one end, the Y-axis screw mandrel being connected with the output shaft of described the 5th servomotor, the Y-axis nut coordinating with described Y-axis screw mandrel, the first Y-axis slide block being connected with described Y-axis nut, one end of described X-axis double sided slider bar is placed on described the first Y-axis slide block, described in another, Y-axis slide rail is provided with the second Y-axis slide block, and the other end of described X-axis double sided slider bar is placed on described the second Y-axis slide block.
In the utility model, inserted sheet head assembly is for absorption and the film releasing of silicon chip, and Z axis rotational motion mechanism, when Z axis straight-line motion mechanism and X-axis rotational motion mechanism are realized handling sheet on X-axis and Z axis both direction rotatablely move and Z-direction on straight-line motion, XY horizontal mobile mechanism is realized the translation on horizontal X axle and Y-axis both direction, like this, inserted sheet head assembly is quick under above-mentioned each mechanism drives, precisely complete the automatic loading and unloading of silicon chip, and above-mentioned each mechanism structure is simple, in function, can substitute existing six axle precision machinery people completely, on cost far below six axle precision machinery people, therefore, greatly reduce the cost of manufacture of solar cell, be applicable to popularizing in an all-round way.
Accompanying drawing explanation
Fig. 1 is the structural representation of graphite boat automatic loading and unloading sheet devices in the utility model embodiment;
Fig. 2 is the front elevation of inserted sheet head assembly in the utility model embodiment;
Fig. 3 is the left view of Fig. 2;
Fig. 4 is the connection structure schematic diagram of Z axis rotational motion mechanism in the utility model embodiment, Z axis straight-line motion mechanism and X-axis rotational motion mechanism;
Fig. 5 is the birds-eye view of XY horizontal mobile mechanism in the utility model embodiment;
100-inserted sheet head assembly; 120-sucker; 130-adapter plate;
140-cylinder manifold; 150-gas-tpe fitting; 200-Z axle rotational motion mechanism;
210-the first servomotor; 220-the first retarder; 230-connecting panel;
300-Z axle straight-line motion mechanism; 310-Z axle slide rail; 320-the second servomotor;
330-support; 400-X axle rotational motion mechanism; 410-the 3rd servomotor;
420-the second retarder; 430-S. A.; 440-framework; 441-side plate;
442-top board; 500-XY horizontal mobile mechanism; 510-Y axle slide rail;
520-X axle double sided slider bar; 530-the 4th servomotor; 540-X axial filament bar;
550-X axle slide block; 560-the 5th servomotor; 570-Y axial filament bar;
580-the first Y-axis slide block; 590-the second Y-axis slide block.
The specific embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein is only in order to explain the utility model, and be not used in restriction the utility model.
With reference to Fig. 1, the graphite boat automatic loading and unloading sheet devices for tubular type PECVD that the utility model embodiment provides, it is located on PECVD equipment, is mainly used in taking, putting silicon chip on graphite boat.Described graphite boat automatic loading and unloading sheet devices comprises for picking up the inserted sheet head assembly 100 of silicon chip, the Z axis rotational motion mechanism 200 that drives inserted sheet head assembly 100 to rotate in horizontal surface, drive Z axis rotational motion mechanism 200 in the Z axis straight-line motion mechanism 300 of vertical direction up-and-down movement, drive Z axis straight-line motion mechanism 300 along the X-axis rotational motion mechanism 400 of X axis rotation and be located at X-axis rotational motion mechanism 400 tops and can drive X-axis rotational motion mechanism 400 in front, after, left, the XY horizontal mobile mechanism 500 moving right.In the present embodiment, inserted sheet head assembly 100 is for absorption and the film releasing of silicon chip, and Z axis rotational motion mechanism 200, when Z axis straight-line motion mechanism 300 and X-axis rotational motion mechanism 400 realized handling silicon chip on X-axis and Z axis both direction rotatablely move and Z-direction on straight-line motion, 500 of XY horizontal mobile mechanisms are realized the translation on horizontal X axle and Y-axis both direction, like this, inserted sheet head assembly 100 is quick under above-mentioned each mechanism drives, precisely complete the automatic loading and unloading of silicon chip, and above-mentioned each mechanism structure is simple, in function, can substitute existing six axle precision machinery people completely, on cost far below six axle precision machinery people, therefore, greatly reduce the cost of manufacture of solar cell, be applicable to popularizing in an all-round way.
In conjunction with Fig. 2, Fig. 3, inserted sheet head assembly 100 comprises vacuum generator (not shown), the ventilation flue's (not shown) and a plurality of sucker being communicated with ventilation flue 120 that are communicated with vacuum generator outlet.In the present embodiment, on vacuum generator, be also connected with vacuum pressure switch and vacuum control valve (not shown).Vacuum generator, vacuum pressure switch and vacuum control valve are installed on frame electric plates.During vacuum generator work, vacuum control valve is opened, and vacuum generator produces negative pressure by ventilation flue to a plurality of suckers 120, thereby makes sucker 120 have adsorption, for drawing silicon chip; When vacuum control valve is closed, vacuum generator stops sucker 120 to produce negative pressure, and sucker 120 suction disappear, for the unloading piece operation of silicon chip.
Particularly, inserted sheet head assembly 100 also comprises some adapter plates that be arranged in parallel 130 and the cylinder manifold 140 that connects each adapter plate 130, on each adapter plate 130, be equipped with above-mentioned sucker 120, a plurality of gas-tpe fittings 150 on cylinder manifold 140, each gas-tpe fitting 150 is communicated with ventilation flue.The quantity of gas-tpe fitting 150 is corresponding with the quantity of adapter plate 130, and each gas-tpe fitting 150 is to sucker 120 air feed on corresponding adapter plate 130.In the present embodiment, the quantity of adapter plate 130 is 20, and like this, inserted sheet head assembly 100 can be drawn 20 silicon chips simultaneously, and efficiency is high.Certainly, also can be according to the actual quantity that need to set adapter plate 130 of picking up.
In the present embodiment, the sucker 120 on each adapter plate 130 is three, and three suckers 120 are triangularly arranged.Like this, when drawing silicon chip, the suction of three suckers 120 effectively guarantees that silicon chip is firmly drawn, and guarantees silicon chip to be certain to win surely and to put.
With reference to Fig. 4, Z axis rotational motion mechanism 200 comprises the first servomotor 210 and the first retarder 220.Wherein, the first servomotor 210 horizontal positioned, the output shaft (not shown) horizontal positioned of the first servomotor 210, the first retarder 220 is vertically placed, its input shaft is horizontally disposed with the output shaft of the first servomotor 210 and is connected, the output shaft of the first retarder 220 vertically place with Z axis in the same way, inserted sheet head assembly 100 is fixedly connected with the output shaft of the first retarder 220.Like this, during the first servomotor 210 work, by the first retarder 220, reduce after rotating speed, the output shaft of the first retarder 220 is as the S. A. of inserted sheet head assembly 100, and inserted sheet head assembly 100 rotates along Z axis under it drives.
Z axis straight-line motion mechanism 300 comprises Z axis slide rail 310, the second servomotor 320, the Z axis screw mandrel (not shown) being connected with the output shaft of the second servomotor 320, the Z axis nut (not shown) coordinating with Z axis screw mandrel, the Z axis slide block (not shown) being connected with Z axis nut, and Z axis slide block is slidedly arranged on Z axis slide rail 310.And the first retarder 220 of Z axis rotational motion mechanism 200 is fixed on Z axis slide block by connecting panel 230.In Fig. 4, can find out, the second servomotor 320 is vertical settings, the output shaft of the second servomotor 320 also arrange straight down with Z axis in the same way, Z axis slide rail 310 is along Z axis setting, during the second servomotor 320 work, its output shaft rotation drives Z axis screw mandrel to rotate, the Z axis nut coordinating with Z axis screw mandrel moves along Z axis screw mandrel, when moving, Z axis nut drive the Z axis slide block being fixedly connected with it to move up and down along Z axis slide rail 310, again because the first retarder 220 is fixed on Z axis slide block by connecting panel 230, therefore Z axis slide block drives connected Z axis rotational motion mechanism 200 to move up and down while moving up and down.
In the present embodiment, X-axis rotational motion mechanism 400 comprises the 3rd servomotor 410, the second retarder 420 and a S. A. 430.The 3rd servomotor 410 vertically arranges, the output shaft of the 3rd servomotor 410 vertically arranges and is connected with the input shaft of the second retarder 420, and the output shaft of the second retarder 420 be horizontally disposed with X-axis in the same way, S. A. 430 is connected with the output shaft of the second retarder 420, like this, S. A. 430 rotates along X axis under can driving at the output shaft of the second retarder 420.In the present embodiment, the Z axis slide rail 310 in Z axis straight-line motion mechanism 300 is shaped on a support 330, and support 330 is fixedly connected with S. A. 430.Like this, when S. A. 430 rotates, the same Z axis straight-line motion mechanism 300 that drives rotatablely moves as X axis with it, again because inserted sheet head assembly 100 is fixed on Z axis straight-line motion mechanism 300 by Z axis rotational motion mechanism 200, therefore the rotation of S. A. 430 drives Z axis rotational motion mechanism 200 and inserted sheet head assembly 100 to rotatablely move as X axis simultaneously.
Referring again to Fig. 4, X-axis rotational motion mechanism 400 also comprises a framework 440, framework 440 is reverse U shape, it comprises the biside plate 441 being oppositely arranged and the top board 442 that is connected in biside plate 441 tops, the two ends of S. A. 430 rotate to be respectively fixed on biside plate 441, and 441 pairs of S. A.s 430 of biside plate play the effect of fixed pedestal.Top board 442 is fixed on XY horizontal mobile mechanism 500 belows.Like this, XY horizontal mobile mechanism 500 is made parallel motion drive top board 442 and is driven X-axis rotational motion mechanism 400.
Particularly, with reference to Fig. 1 and Fig. 5, XY horizontal mobile mechanism 500 comprises the two Y-axis slide rails 510 that are oppositely arranged, and wherein a Y-axis slide rail 510 is double sided slider bar, and another Y-axis slide rail 510 is single slide rail.XY horizontal mobile mechanism 500 also comprises the X-axis double sided slider bar 520 being located on two Y-axis slide rails 510, the 4th servomotor 530 of being located at X-axis double sided slider bar 520 one end, the X-axis screw mandrel 540 being connected with the output shaft of the 4th servomotor 530, the X-axis nut (not shown) coordinating with X-axis screw mandrel 540, the X-axis slide block 550 being connected with X-axis nut, and top board 442 is fixed on X-axis slide block 550 belows.During the 4th servomotor 530 work, its output shaft drives X-axis screw mandrel 540 to rotate, the X-axis nut coordinating with X-axis screw mandrel 540 moves along X-axis screw mandrel 540, the mobile of X-axis nut drives connected X-axis slide block 550 to move along X-axis double sided slider bar 520, like this, top board 442 and framework 440 and whole X-axis rotational motion mechanism 400 are done to move along X axis.
XY horizontal mobile mechanism 500 also comprises is located at the 5th servomotor 560 of Y-axis double sided slider bar one end, the Y-axis screw mandrel 570 being connected with the output shaft of the 5th servomotor 560, the Y-axis nut (not shown) coordinating with Y-axis screw mandrel 570, the first Y-axis slide block 580 being connected with Y-axis nut, one end of X-axis double sided slider bar 520 is placed on the first Y-axis slide block 580, Y-axis list slide rail is provided with the second Y-axis slide block 590, and the other end of X-axis double sided slider bar 520 is placed on the second Y-axis slide block 590.During the 5th servomotor 560 work, its output shaft drives Y-axis screw mandrel 570 to rotate, the Y-axis nut coordinating with Y-axis screw mandrel 570 moves along Y-axis screw mandrel 570, the mobile of Y-axis nut drives connected the first Y-axis slide block 580 to move along Y-axis double sided slider bar, simultaneously, the second Y-axis slide block 590 slides on Y-axis list slide rail, in the time of the first Y-axis slide block 580 and the second Y-axis slide block 590, motion drives X-axis double sided slider bar 520 to move up in Y-axis, thereby finally drives X-axis slide block 550, connected framework 440 and whole X-axis rotational motion mechanism 400 to do to move along Y-axis.
Due on PECVD equipment, graphite boat position is predefined, for guaranteeing that sucker 120 loads and unloads sheet operation can insert graphite boat accurately under above-mentioned each mechanism drives in, in the present embodiment, on each slide rail, be equipped with location sensitive switch, thereby the condition of can exactly everybody being shifted one's love is fed back to control each servomotor and whether is worked on.
In the present embodiment, the automatic mounting unloading piece process of utilizing said apparatus to carry out graphite boat is:
S1:XY horizontal mobile mechanism 500 moves along X axis and Y-axis in the horizontal direction, by driving X-axis rotational motion mechanism 400 and Z axis straight-line motion mechanism 300 to drive inserted sheet head assembly 100 to move in the horizontal direction, inserted sheet head assembly 100 is moved on graphite boat;
Z axis slide block in S2:Z axle straight-line motion mechanism 300 moves down and drives Z axis rotational motion mechanism 200 and inserted sheet head assembly 100 to move down, and now each adapter plate 130 in inserted sheet head assembly 100 is inserted in graphite boat;
S. A. 430 in S3:X axle rotational motion mechanism 400 turns an angle under the second retarder 420 drives, Z axis straight-line motion mechanism 300, Z axis rotational motion mechanism 200 and inserted sheet head assembly 100 turn an angle with S. A. 430, now on inserted sheet head assembly 100 silicon chip in three suckers on each adapter plate 130 120 and graphite boat over against;
The 4th servomotor 530 work in S4:XY horizontal mobile mechanism 500, X-axis slide block 550 moves along X-axis double sided slider bar 520, by driving top board 442, framework 440 and whole X-axis rotational motion mechanism 400 to move along X axis, now on inserted sheet head assembly 100, on each adapter plate 130, three suckers 120 are fitted with the silicon chip in graphite boat, and carry out vacuum and inhale sheet operation;
S. A. 430 in S5:X axle rotational motion mechanism 400 again turns an angle under the second retarder 420 drives, the 3rd servomotor 410 work in XY horizontal mobile mechanism 500 simultaneously drive X-axis double sided slider bar 520 and inserted sheet head assembly 100 to carry out Y-axis displacement difference benefit, realize silicon chip center centering;
Z axis slide block in S6:Z axle straight-line motion mechanism 300 moves up and drives Z axis rotational motion mechanism 200 and the inserted sheet head assembly 100 disengaging graphite boat that moves up;
S7:X axle rotational motion mechanism 400 drives inserted sheet head assemblies 100 rotate to an angle (90 degree), utilizing XY horizontal mobile mechanism 500 to carry out level attitude moves, and Z axis rotational motion mechanism 200 also drives inserted sheet head assembly 100 to rotate to an angle (90 or 270 degree), makes the sucker 120 of inserted sheet head assembly 100 move to unloading piece position;
Z axis slide block in S8:Z axle straight-line motion mechanism 300 moves down and drives sucker 120 to enter in transfer box, and carries out the operation of vacuum unloading piece; After This move completes, the transfer box that is placed with silicon chip upward movement under other kinematic mechanism effect in PECVD, now inserted sheet head assembly 100 is return by Z axis straight-line motion mechanism 300 upward movements;
S9: the X-axis slide block of inserted sheet head assembly 100 in XY horizontal mobile mechanism 500 550 band action X-axis straight-line motions, and under Z axis rotational motion mechanism 200 drives, rotate a certain angle (180 degree) arrive transfer box the place ahead of load, gets sheet position;
S10: inserted sheet head assembly 100 moves downward and enters transfer box under Z axis straight-line motion mechanism 300 drives, transfer box moves downward along Z axis under other kinematic mechanism effect, carry out vacuum and inhale sheet operation, after suction sheet completes, under Z axis straight-line motion mechanism 300 drives, exit;
S11: inserted sheet head assembly 100 is made parallel motion under XY horizontal mobile mechanism 500 drives, and rotate a certain angle under X-axis rotational motion mechanism 400 and 200 drives of Z axis rotational motion mechanism, to be installed graphite boat top arrived;
S12: inserted sheet head assembly 100 moves downward and enters in to be installed graphite boat under 300 effects of Z axis straight-line motion mechanism, and as X axis, move with graphite boat and fit under the X-axis slide block 550 of XY horizontal mobile mechanism 500 drives;
S13: inserted sheet head assembly 100 rotates to an angle along X axis under 400 effects of X-axis rotational motion mechanism, under driving, XY horizontal mobile mechanism 500 carries out Y-axis alternate position spike benefit simultaneously, make the sucker 120 of inserted sheet head assembly 100 move to unloading piece position, and carry out the operation of vacuum unloading piece;
S14: inserted sheet head assembly 100 rotates a certain angle along X-axis under 400 effects of X-axis rotational motion mechanism, and upward movement exits under Z axis straight-line motion mechanism 300 drives;
S15: inserted sheet head assembly 100 carries out the next one and gets sheet operation, and next circulation starts, and repeats above-mentioned S1 to S14 step.
These are only preferred embodiment of the present utility model, not in order to limit the utility model, all any modifications of doing within spirit of the present utility model and principle, be equal to and replace and improvement etc., within all should being included in protection domain of the present utility model.

Claims (10)

1. the graphite boat automatic loading and unloading sheet devices for tubular type PECVD, be located on PECVD equipment, it is characterized in that: comprise for picking up the inserted sheet head assembly of silicon chip, drive described inserted sheet head assembly along the Z axis rotational motion mechanism of Z axis rotation, drive described Z axis rotational motion mechanism in the Z axis straight-line motion mechanism of vertical direction up-and-down movement, drive described Z axis straight-line motion mechanism along the X-axis rotational motion mechanism of X axis rotation and be located at described X-axis rotational motion mechanism top and can drive described X-axis rotational motion mechanism in front, after, left, the XY horizontal mobile mechanism moving right.
2. the graphite boat automatic loading and unloading sheet devices for tubular type PECVD as claimed in claim 1, is characterized in that: described inserted sheet head assembly comprises the sucker that vacuum generator, the ventilation flue who is communicated with described vacuum generator outlet and a plurality of and described ventilation flue are communicated with.
3. the graphite boat automatic loading and unloading sheet devices for tubular type PECVD as claimed in claim 2, it is characterized in that: the cylinder manifold that described inserted sheet head assembly also comprises some adapter plates that be arranged in parallel and connects adapter plate described in each, described in each, on adapter plate, be equipped with described sucker, described cylinder manifold be provided with can be respectively to the gas-tpe fitting of the sucker air feed of each adapter plate, described in each, gas-tpe fitting is communicated with described ventilation flue.
4. the graphite boat automatic loading and unloading sheet devices for tubular type PECVD as claimed in claim 3, it is characterized in that: the sucker described in each on adapter plate is three, and three suckers is triangularly arranged.
5. the graphite boat automatic loading and unloading sheet devices for tubular type PECVD as claimed in claim 1, it is characterized in that: described Z axis rotational motion mechanism comprise the first servomotor, with the first retarder that the output shaft of described the first servomotor is connected, described inserted sheet head assembly is fixedly connected with the output shaft of described the first retarder.
6. the graphite boat automatic loading and unloading sheet devices for tubular type PECVD as claimed in claim 5, it is characterized in that: described Z axis straight-line motion mechanism comprise Z axis slide rail, the second servomotor, the Z axis screw mandrel being connected with the output shaft of described the second servomotor, the Z axis nut coordinating with described Z axis screw mandrel, with the Z axis slide block that described Z axis nut is connected, described Z axis slide block is slidedly arranged on described Z axis slide rail; Described the first retarder is fixed on described Z axis slide block.
7. the graphite boat automatic loading and unloading sheet devices for tubular type PECVD as claimed in claim 6, it is characterized in that: described X-axis rotational motion mechanism comprises the 3rd servomotor, the second retarder being connected with the output shaft of described the 3rd servomotor and the S. A. being connected with the output shaft of described the second retarder, and described Z axis slide rail is fixedly connected with described S. A..
8. the graphite boat automatic loading and unloading sheet devices for tubular type PECVD as claimed in claim 7, it is characterized in that: described X-axis rotational motion mechanism also comprises a framework, described framework comprises the biside plate being oppositely arranged and the top board that is connected in described biside plate top, the two ends of described S. A. rotate to be respectively fixed on described biside plate, and described top board is fixed on described XY horizontal mobile mechanism below.
9. the graphite boat automatic loading and unloading sheet devices for tubular type PECVD as claimed in claim 8, it is characterized in that: described XY horizontal mobile mechanism comprises the two Y-axis slide rails that are oppositely arranged, is located at the X-axis double sided slider bar on described two Y-axis slide rails, the 4th servomotor of being located at described X-axis double sided slider bar one end, the X-axis screw mandrel being connected with the output shaft of described the 4th servomotor, the X-axis nut coordinating with described X-axis screw mandrel, the X-axis slide block being connected with described X-axis nut, and described top board is fixed on below described X-axis slide block.
10. the graphite boat automatic loading and unloading sheet devices for tubular type PECVD as claimed in claim 9, it is characterized in that: wherein described in one, Y-axis slide rail is double sided slider bar, described XY horizontal mobile mechanism also comprises the 5th servomotor of being located at described double sided slider bar one end, the Y-axis screw mandrel being connected with the output shaft of described the 5th servomotor, the Y-axis nut coordinating with described Y-axis screw mandrel, the the first Y-axis slide block being connected with described Y-axis nut, one end of described X-axis double sided slider bar is placed on described the first Y-axis slide block, described in another, Y-axis slide rail is provided with the second Y-axis slide block, the other end of described X-axis double sided slider bar is placed on described the second Y-axis slide block.
CN201420377882.9U 2014-07-09 2014-07-09 Graphite boat automatic loading and unloading sheet devices for tubular type PECVD CN203998096U (en)

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Cited By (6)

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CN104627665A (en) * 2015-02-04 2015-05-20 吴中经济技术开发区越溪斯特拉机械厂 Feeder
CN105883373A (en) * 2016-05-31 2016-08-24 苏州卓诚钛设备有限公司 Transverse loading mechanism
CN106206398A (en) * 2016-08-24 2016-12-07 屠明州 A kind of silicon chip translation placement mechanism
CN107365980A (en) * 2017-07-10 2017-11-21 深圳丰盛装备股份有限公司 A kind of graphite boat automatic loading and unloading piece equipment
CN108313712A (en) * 2017-12-26 2018-07-24 桐乡市杰乐进出口有限公司 A kind of feed device for ball
WO2019148522A1 (en) * 2018-02-02 2019-08-08 深圳丰盛装备股份有限公司 Tubular pecvd automatic loading and unloading device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104627665A (en) * 2015-02-04 2015-05-20 吴中经济技术开发区越溪斯特拉机械厂 Feeder
CN105883373A (en) * 2016-05-31 2016-08-24 苏州卓诚钛设备有限公司 Transverse loading mechanism
CN105883373B (en) * 2016-05-31 2018-06-08 苏州卓诚钛设备有限公司 A kind of aburton mechanism
CN106206398A (en) * 2016-08-24 2016-12-07 屠明州 A kind of silicon chip translation placement mechanism
CN107365980A (en) * 2017-07-10 2017-11-21 深圳丰盛装备股份有限公司 A kind of graphite boat automatic loading and unloading piece equipment
CN107365980B (en) * 2017-07-10 2019-01-11 深圳丰盛装备股份有限公司 A kind of graphite boat automatic loading and unloading piece equipment
CN108313712A (en) * 2017-12-26 2018-07-24 桐乡市杰乐进出口有限公司 A kind of feed device for ball
WO2019148522A1 (en) * 2018-02-02 2019-08-08 深圳丰盛装备股份有限公司 Tubular pecvd automatic loading and unloading device

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