WO2019148522A1 - Tubular pecvd automatic loading and unloading device - Google Patents

Tubular pecvd automatic loading and unloading device Download PDF

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Publication number
WO2019148522A1
WO2019148522A1 PCT/CN2018/075727 CN2018075727W WO2019148522A1 WO 2019148522 A1 WO2019148522 A1 WO 2019148522A1 CN 2018075727 W CN2018075727 W CN 2018075727W WO 2019148522 A1 WO2019148522 A1 WO 2019148522A1
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Prior art keywords
cantilever
plate
driving
unloading
driving wheel
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PCT/CN2018/075727
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French (fr)
Chinese (zh)
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王俊朝
常红旺
李学文
李军阳
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深圳丰盛装备股份有限公司
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Priority to CN201820204662.4U priority Critical patent/CN207904364U/en
Priority to CN201820204662.4 priority
Application filed by 深圳丰盛装备股份有限公司 filed Critical 深圳丰盛装备股份有限公司
Publication of WO2019148522A1 publication Critical patent/WO2019148522A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/513Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Abstract

A tubular PECVD automatic loading and unloading device, comprising a cantilever structure (10), a grasping structure (20), a lifting structure (30), and two vertical profiles (40) which are parallel to each other. The cantilever structure (10) is separately provided on the two vertical profiles (40). The lifting structure (30) is used for driving the cantilever structures (10) to reciprocate on the vertical profiles (40). The cantilever structure (10) comprises a first cantilever (101) and a second cantilever (102). The middle part of the first cantilever (101) is mounted on the vertical profile (40). A first connecting plate (103) is slidably mounted on a lower surface of the first cantilever (101). The first connecting plate (103) reciprocates on the first cantilever (101). The second cantilever (102) is fixedly connected to the first connecting plate (103). A second connecting plate (104) is slidably mounted on a lower surface of the second cantilever (102). The second connecting plate (104) reciprocates on the second cantilever (102). The grasping structure (20) is fixedly mounted on the second connecting plate (104).

Description

一种管式PECVD自动上下料装置Pipe type PECVD automatic loading and unloading device 技术领域Technical field
本实用新型涉及太阳能电池设备技术领域,更具体的说,本实用新型涉及一种管式PECVD自动上下料装置。The utility model relates to the technical field of solar cell equipment, and more particularly to a tubular PECVD automatic loading and unloading device.
背景技术Background technique
PECVD(Plasma Enhanced Chemical Vapor Deposition)等离子体增强化学气象沉积是利用低温等离子体做能量源,硅片置于低气压下辉光放电的阴极上,利用辉光放电(或另加发热体)使硅片升温到预定的温度,然后通入适量的反应气体,气体经一秕化学和等离子体反应,在硅片上形成固态薄膜。PECVD (Plasma Enhanced Chemical Vapor Deposition) plasma enhanced chemical weather deposition is the use of low temperature plasma as the energy source, the silicon wafer is placed on the cathode of the glow discharge under low pressure, and the silicon is replaced by glow discharge (or additional heating element). The sheet is heated to a predetermined temperature, and then an appropriate amount of a reaction gas is introduced, and the gas is subjected to a chemical reaction and a plasma reaction to form a solid film on the silicon wafer.
随着PECVD设备技术的发展,降成本、大产能的要求越来越高,单管的产能也越来越大,石墨舟也越来越大,石墨舟重量也越来越大,对石墨舟的自动上下料提出了新的需求。With the development of PECVD equipment technology, the requirements for cost reduction and large capacity are getting higher and higher, the production capacity of single tube is getting bigger and bigger, the graphite boat is getting bigger and bigger, the weight of graphite boat is getting bigger and bigger, and the graphite boat is getting bigger. The automatic loading and unloading presents new demands.
实用新型内容Utility model content
为了克服现有技术的不足,本实用新型提供一种管式PECVD自动上下料装置,该管式PECVD自动上下料装置能够实现石墨舟的自动上下料运输,提高了对石墨舟的承载能力,缩短石墨舟的上下料时间。In order to overcome the deficiencies of the prior art, the utility model provides a tubular PECVD automatic loading and unloading device, which can realize the automatic loading and unloading transportation of the graphite boat, thereby improving the bearing capacity and shortening of the graphite boat. The loading and unloading time of the graphite boat.
本实用新型解决其技术问题所采用的技术方案是:一种管式PECVD自动上下料装置,其改进之处在于:包括悬臂结构、手抓结构、升降结构以及相平行的两条竖向型材,且两条竖向型材上均设置有悬臂结构,所述的升降结构用于驱动悬臂结构在竖向型材上往复运动;The technical solution adopted by the utility model to solve the technical problem thereof is: a tubular PECVD automatic loading and unloading device, which is improved in that it comprises a cantilever structure, a hand grasping structure, a lifting structure and two parallel vertical profiles, And the two vertical profiles are provided with a cantilever structure, and the lifting structure is used for driving the cantilever structure to reciprocate on the vertical profile;
所述的悬臂结构包括第一悬臂和第二悬臂,所述第一悬臂的中部安装在竖向型材上,第一悬臂的下表面滑动安装有第一连接板,第一连接板在第一悬臂上往复运动;所述的第二悬臂与第一连接板固定连接,第二悬臂的下表面滑动安装有第二连接板,所述第二连接板在第二悬臂上往复运动;The cantilever structure includes a first cantilever and a second cantilever, a middle portion of the first cantilever is mounted on the vertical profile, a lower surface of the first cantilever is slidably mounted with a first connecting plate, and the first connecting plate is at the first cantilever Reciprocating motion; the second cantilever is fixedly connected to the first connecting plate, the lower surface of the second cantilever is slidably mounted with a second connecting plate, and the second connecting plate reciprocates on the second cantilever;
所述的手抓结构固定安装在第二连接板上,通过该手抓结构对石墨舟进行抓取。The grip structure is fixedly mounted on the second connecting plate, and the graphite boat is grasped by the grip structure.
在上述的结构中,所述的升降结构包括升降电机和传动杆;In the above structure, the lifting structure comprises a lifting motor and a transmission rod;
所述竖向型材的底部设置有主动端,且主动端内部设置有主动轮,所述升 降电机的电机轴与其中一个竖向型材的主动轮的一端相连接,所述的传动杆连接在两个竖向型材的主动轮之间;The bottom of the vertical profile is provided with an active end, and the driving end is internally provided with a driving wheel, and the motor shaft of the lifting motor is connected with one end of a driving wheel of one of the vertical profiles, and the transmission rod is connected to two Between the drive wheels of a vertical profile;
所述竖向型材的顶部设置有从动端,且从动端内部设置有从动轮,所述主动轮和从动轮之间套有升降皮带,且升降皮带上固定安装着一滑块连接板,所述的悬臂结构固定在滑块连接板上。The top of the vertical profile is provided with a driven end, and a driven wheel is disposed inside the driven end, a lifting belt is disposed between the driving wheel and the driven wheel, and a slider connecting plate is fixedly mounted on the lifting belt. The cantilever structure is fixed on the slider connecting plate.
在上述的结构中,所述的两条竖向型材之间还设置有上定位板和下定位板;In the above structure, the upper vertical positioning plate and the lower positioning plate are further disposed between the two vertical profiles;
所述的上定位板的一端固定安装在其中一条竖向型材的顶部,上定位板的另一端固定安装在另一条竖向型材的顶部;所述的下定位板的一端固定安装在其中一条竖向型材的底部,下定位板的另一端固定安装在另一条竖向型材的底部。One end of the upper positioning plate is fixedly mounted on the top of one of the vertical profiles, and the other end of the upper positioning plate is fixedly mounted on the top of the other vertical profile; one end of the lower positioning plate is fixedly mounted on one of the vertical members To the bottom of the profile, the other end of the lower locating plate is fixedly mounted to the bottom of the other vertical profile.
在上述的结构中,所述的悬臂结构还包括一模组连接板,该模组连接板与滑块连接板固定连接,且所述的第一悬臂固定安装在模组连接板上。In the above structure, the cantilever structure further includes a module connecting plate, the module connecting plate is fixedly connected with the slider connecting plate, and the first cantilever is fixedly mounted on the module connecting plate.
在上述的结构中,所述的悬臂结构还包括第一横向电机和第一横向传动轴,In the above structure, the cantilever structure further includes a first lateral motor and a first lateral drive shaft,
所述第一悬臂的一端设置有第一主动轮轴,第一横向电机与第一主动轮轴的一端固定连接,所述第一横向传动轴固定连接在两个第一悬臂的第一主动轮轴之间;One end of the first cantilever is provided with a first driving axle, the first transverse motor is fixedly connected with one end of the first driving axle, and the first lateral transmission shaft is fixedly connected between the first driving axles of the two first cantilevers ;
所述的第一悬臂内部设置有主动轮、从动轮以及传动皮带,第一主动轮轴固定在主动轮中心处,传动皮带套在主动轮和从动轮上,且所述的第一连接板固定安装在第一悬臂内部的传动皮带上。The first cantilever is internally provided with a driving wheel, a driven wheel and a transmission belt. The first driving wheel axle is fixed at the center of the driving wheel, the transmission belt is sleeved on the driving wheel and the driven wheel, and the first connecting plate is fixedly mounted. On the drive belt inside the first cantilever.
在上述的结构中,所述的悬臂结构还包括第二横向电机以及第二横向传动轴;In the above structure, the cantilever structure further includes a second lateral motor and a second lateral transmission shaft;
所述第二悬臂的一端设置有第二主动轮轴,第二横向电机与第二主动轮轴的一端固定连接,所述第二横向传动轴固定连接在两个第二悬臂的第二主动轮轴之间;One end of the second cantilever is provided with a second driving axle, the second transverse motor is fixedly connected with one end of the second driving axle, and the second lateral transmission shaft is fixedly connected between the second driving axles of the two second cantilevers ;
所述的第二悬臂内部设置有主动轮、从动轮以及传动皮带,第二主动轮轴固定在主动轮中心处,传动皮带套在主动轮和从动轮上,且所述的第二连接板固定安装在第二悬臂内部的传动皮带上。The second cantilever is internally provided with a driving wheel, a driven wheel and a transmission belt. The second driving wheel axle is fixed at the center of the driving wheel, the transmission belt is sleeved on the driving wheel and the driven wheel, and the second connecting plate is fixedly mounted. On the drive belt inside the second cantilever.
在上述的结构中,所述的手抓结构包括旋转连接板、抓取板以及传感器压板;In the above structure, the hand grasping structure comprises a rotating connecting plate, a grabbing plate and a sensor pressing plate;
所述的旋转连接板与第二连接板固定连接,所述的抓取板位于旋转连接板 下方,传感器压板固定于抓取板上贯穿的通孔内。The rotating connecting plate is fixedly connected to the second connecting plate, the grabbing plate is located below the rotating connecting plate, and the sensor pressing plate is fixed in the through hole penetrating through the grabbing plate.
本实用新型的有益效果是:竖向型材即位于中间通道区内,可以缩短第一悬臂和第二悬臂的长度,增加了管式PECVD自动上下料装置的承载能力,提高了自动上下料是速度,从而缩短了石墨舟自动上下料的时间,提高生产效率。The utility model has the beneficial effects that the vertical profile is located in the intermediate passage region, which can shorten the length of the first cantilever and the second cantilever, increase the bearing capacity of the tubular PECVD automatic loading and unloading device, and improve the speed of automatic loading and unloading. Therefore, the time for the automatic loading and unloading of the graphite boat is shortened, and the production efficiency is improved.
附图说明DRAWINGS
图1为本实用新型的一种管式PECVD自动上下料装置的第一结构示意图。1 is a schematic view showing the first structure of a tubular PECVD automatic loading and unloading device according to the present invention.
图2为图1中A处的局部放大图。Figure 2 is a partial enlarged view of a portion A in Figure 1.
图3为本实用新型的一种管式PECVD自动上下料装置的第二结构示意图。3 is a second structural schematic view of a tubular PECVD automatic loading and unloading device according to the present invention.
图4为图3中B处的局部放大图。Figure 4 is a partial enlarged view of B in Figure 3.
图5为本实用新型的一种管式PECVD自动上下料装置的悬臂结构的示意图。FIG. 5 is a schematic view showing the cantilever structure of a tubular PECVD automatic loading and unloading device according to the present invention.
图6为本实用新型的一种管式PECVD自动上下料装置的竖向型材的结构示意图。6 is a schematic structural view of a vertical profile of a tubular PECVD automatic loading and unloading device according to the present invention.
图7为本实用新型的一种管式PECVD自动上下料装置的手抓结构的结构示意图。FIG. 7 is a schematic structural view of a hand grasping structure of a tubular PECVD automatic loading and unloading device according to the present invention.
具体实施方式Detailed ways
下面结合附图和实施例对本实用新型进一步说明。The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
以下将结合实施例和附图对本实用新型的构思、具体结构及产生的技术效果进行清楚、完整地描述,以充分地理解本实用新型的目的、特征和效果。显然,所描述的实施例只是本实用新型的一部分实施例,而不是全部实施例,基于本实用新型的实施例,本领域的技术人员在不付出创造性劳动的前提下所获得的其他实施例,均属于本实用新型保护的范围。另外,专利中涉及到的所有联接/连接关系,并非单指构件直接相接,而是指可根据具体实施情况,通过添加或减少联接辅件,来组成更优的联接结构。本实用新型创造中的各个技术特征,在不互相矛盾冲突的前提下可以交互组合。The concept, the specific structure and the technical effects of the present invention will be clearly and completely described in conjunction with the embodiments and the accompanying drawings in order to fully understand the purpose, features and effects of the present invention. It is apparent that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments, based on the embodiments of the present invention, other embodiments obtained by those skilled in the art without creative efforts, All belong to the scope of protection of the present invention. In addition, all the coupling/joining relationships involved in the patents are not directly connected to the components, but rather may constitute a better coupling structure by adding or reducing the coupling accessories according to the specific implementation. The various technical features in the creation of the utility model can be combined and combined without conflicting conflicts.
参照图1至图5所示,本实用新型揭示了一种管式PECVD自动上下料装置,在本实施例中,该管式PECVD自动上下料装置包括悬臂结构10、手抓结构20、升降结构30以及相平行的两条竖向型材40,且两条竖向型材40上均设置有悬臂结构10,所述的升降结构30用于驱动悬臂结构10在竖向型材40上往复运动;对于所述的悬臂结构10,如图2、图4所示,所述的悬臂结构10包括第一悬臂101和第二悬臂102,所述第一悬臂101的中部安装在竖向型材40上,通过这种结构的设计,由于第一悬臂101的中部安装在竖向型材40上,提高了第一悬臂101的刚性,避免由于石墨舟的重量过大导致第一悬臂101出现位置的偏移。 如如图1、图5所示,第一悬臂101的下表面滑动安装有第一连接板103,第一连接板103在第一悬臂101上往复运动;所述的第二悬臂102与第一连接板103固定连接,第二悬臂102的下表面滑动安装有第二连接板104,所述第二连接板104在第二悬臂102上往复运动;所述的手抓结构20固定安装在第二连接板104上,通过该手抓结构20对石墨舟进行抓取。因此,通过升降结构30的作用,驱动第一悬臂101和第二悬臂102在竖直方向往复运动,第二悬臂102可以在第一悬臂101的下方往复运动,手抓结构20可以在第二悬臂102下方往复运动,手抓结构20具有三个工作位,通过手抓结构20实现石墨舟上取料和放料。Referring to FIG. 1 to FIG. 5, the utility model discloses a tubular PECVD automatic loading and unloading device. In the embodiment, the tubular PECVD automatic loading and unloading device comprises a cantilever structure 10, a hand grasping structure 20, and a lifting structure. 30 and two parallel vertical profiles 40, and two vertical profiles 40 are provided with a cantilever structure 10 for driving the cantilever structure 10 to reciprocate on the vertical profile 40; The cantilever structure 10, as shown in FIG. 2 and FIG. 4, the cantilever structure 10 includes a first cantilever 101 and a second cantilever 102, and a middle portion of the first cantilever 101 is mounted on the vertical profile 40. The design of the structure, since the middle portion of the first cantilever 101 is mounted on the vertical profile 40, improves the rigidity of the first cantilever 101, avoiding the positional displacement of the first cantilever 101 due to the excessive weight of the graphite boat. As shown in FIG. 1 and FIG. 5, the lower surface of the first cantilever 101 is slidably mounted with a first connecting plate 103, and the first connecting plate 103 reciprocates on the first cantilever 101; the second cantilever 102 and the first The connecting plate 103 is fixedly connected, and the lower surface of the second cantilever 102 is slidably mounted with a second connecting plate 104, and the second connecting plate 104 reciprocates on the second cantilever 102; the grasping structure 20 is fixedly mounted in the second On the connecting plate 104, the graphite boat is grasped by the grip structure 20. Therefore, by the action of the lifting structure 30, the first cantilever 101 and the second cantilever 102 are driven to reciprocate in the vertical direction, the second cantilever 102 can reciprocate under the first cantilever 101, and the grasping structure 20 can be in the second cantilever Under the reciprocating motion of 102, the grip structure 20 has three working positions, and the picking and unloading of the graphite boat is realized by the grip structure 20.
对于所述的升降结构30和竖向型材40,如图2、图4以及图6所示,本实用新型提供了一具体实施例,升降结构30包括升降电机301和传动杆302,所述竖向型材40的底部设置有主动端401,且主动端401内部设置有主动轮,所述升降电机301的电机轴与其中一个竖向型材40的主动轮的一端相连接,所述的传动杆302连接在两个竖向型材40的主动轮之间,因此升降电机301的转动,通过主动端401的传动,带动两个竖向型材40内部的主动轮旋转;所述竖向型材40的顶部设置有从动端402,且从动端402内部设置有从动轮,所述主动轮和从动轮之间套有升降皮带,且升降皮带上固定安装着一滑块连接板403,所述的悬臂结构10固定在滑块连接板403上;所述的悬臂结构10还包括一模组连接板105,该模组连接板105与滑块连接板403固定连接,且所述的第一悬臂101固定安装在模组连接板105上;因此,升降电机301的转动,转化为滑块连接板403的上下运动,从而带动悬臂结构10和手抓结构20在竖直方向往复运动。For the lifting structure 30 and the vertical profile 40, as shown in FIG. 2, FIG. 4 and FIG. 6, the present invention provides a specific embodiment. The lifting structure 30 includes a lifting motor 301 and a transmission rod 302. The driving end 401 is disposed at the bottom of the profile 40, and the driving wheel 401 is internally provided with a driving wheel. The motor shaft of the lifting motor 301 is connected to one end of the driving wheel of one of the vertical profiles 40, and the transmission rod 302 is connected. Connected between the driving wheels of the two vertical profiles 40, so that the rotation of the lifting motor 301, through the transmission of the driving end 401, drives the driving wheels inside the two vertical profiles 40; the top of the vertical profile 40 is set There is a driven end 402, and a driven wheel is disposed inside the driven end 402. A lifting belt is disposed between the driving wheel and the driven wheel, and a slider connecting plate 403 is fixedly mounted on the lifting belt, and the cantilever structure is 10 is fixed on the slider connecting plate 403; the cantilever structure 10 further includes a module connecting plate 105, the module connecting plate 105 is fixedly connected with the slider connecting plate 403, and the first cantilever 101 is fixedly mounted. On the module connection board 105; Here, the rotation of the lift motor 301, the slider into the connecting plate 403 up and down movement, thereby driving the boom 10 and the grasping structure 20 reciprocates in the vertical direction.
另外,如图1所示,所述的两条竖向型材40之间还设置有上定位板404和下定位板405;所述的上定位板404的一端固定安装在其中一条竖向型材40的顶部,上定位板404的另一端固定安装在另一条竖向型材40的顶部,所述传动杆302设置在下定位板405的下方位置;所述的下定位板405的一端固定安装在其中一条竖向型材40的底部,下定位板405的另一端固定安装在另一条竖向型材40的底部。In addition, as shown in FIG. 1 , an upper positioning plate 404 and a lower positioning plate 405 are further disposed between the two vertical profiles 40 . One end of the upper positioning plate 404 is fixedly mounted on one of the vertical profiles 40 . The top end of the upper positioning plate 404 is fixedly mounted on the top of the other vertical profile 40, and the transmission rod 302 is disposed at a lower position of the lower positioning plate 405; one end of the lower positioning plate 405 is fixedly mounted to one of the ends. The bottom of the vertical profile 40, the other end of the lower positioning plate 405 is fixedly mounted to the bottom of the other vertical profile 40.
对于所述的悬臂结构10,如图4、图5所示,在上述实施例的基础上,本发明提供了一具体实施例,所述的悬臂结构10还包括第一横向电机106和第一横向传动轴107,所述第一悬臂101的一端设置有第一主动轮轴108,第一横向 电机106与第一主动轮轴108的一端固定连接,所述第一横向传动轴107固定连接在两个第一悬臂101的第一主动轮轴108之间;所述的第一悬臂101内部设置有主动轮、从动轮以及传动皮带,第一主动轮轴108固定在主动轮中心处,传动皮带套在主动轮和从动轮上,且所述的第一连接板103固定安装在第一悬臂101内部的传动皮带上;因此,通过第一横向电机106的作用,带动第一悬臂101内部的主动轮转动,驱动传动皮带转动,转化为第一连接板103在第一悬臂101下表面的往复运动;同时,通过第一横向传动轴107的作用,带动另一个竖向型材40上的第一悬臂101内部的主动轮转动,从而使得两个第一悬臂101下方的第一连接板103同时运动。For the cantilever structure 10, as shown in FIG. 4 and FIG. 5, based on the above embodiments, the present invention provides a specific embodiment. The cantilever structure 10 further includes a first lateral motor 106 and a first a transverse drive shaft 107, one end of the first cantilever 101 is provided with a first drive axle 108, the first transverse motor 106 is fixedly connected with one end of the first drive axle 108, and the first transverse drive axle 107 is fixedly connected to two The first cantilever 101 is disposed between the first driving axle 108; the first cantilever 101 is internally provided with a driving wheel, a driven wheel and a transmission belt. The first driving axle 108 is fixed at the center of the driving wheel, and the transmission belt is sleeved on the driving wheel. And the driven wheel, and the first connecting plate 103 is fixedly mounted on the transmission belt inside the first cantilever 101; therefore, the driving of the driving wheel inside the first cantilever 101 is driven by the action of the first lateral motor 106 to drive The transmission belt rotates to be converted into a reciprocating motion of the first connecting plate 103 on the lower surface of the first cantilever 101; meanwhile, the first cantilever 1 on the other vertical profile 40 is driven by the action of the first lateral transmission shaft 107. 01 The inner driving wheel rotates, so that the first connecting plates 103 under the two first cantilevers 101 move simultaneously.
进一步的,所述的悬臂结构10还包括第二横向电机109以及第二横向传动轴110;所述第二悬臂102的一端设置有第二主动轮轴111,第二横向电机109与第二主动轮轴111的一端固定连接,所述第二横向传动轴110固定连接在两个第二悬臂102的第二主动轮轴111之间;所述的第二悬臂102内部设置有主动轮、从动轮以及传动皮带,第二主动轮轴111固定在主动轮中心处,传动皮带套在主动轮和从动轮上,且所述的第二连接板104固定安装在第二悬臂102内部的传动皮带上。同样的,通过第二横向电机109的作用,带动第二悬臂102内部的主动轮转动,驱动传动皮带转动,转化为第二连接板104在第二悬臂102的下表面的往复运动,通过第二横向传动轴110的作用,带动另一个竖向型材40上的第二悬臂102内部的主动轮转动,从而使得两个第二悬臂102下方的第二连接板104同时运动,使得两个手抓结构20同时运动。Further, the cantilever structure 10 further includes a second lateral motor 109 and a second lateral transmission shaft 110; one end of the second cantilever 102 is provided with a second driving axle 111, a second lateral motor 109 and a second driving axle One end of the 111 is fixedly connected, and the second lateral transmission shaft 110 is fixedly connected between the second driving axles 111 of the two second cantilevers 102; the second cantilever 102 is internally provided with a driving wheel, a driven wheel and a transmission belt. The second driving axle 111 is fixed at the center of the driving wheel, the transmission belt is sleeved on the driving wheel and the driven wheel, and the second connecting plate 104 is fixedly mounted on the transmission belt inside the second cantilever 102. Similarly, the driving of the driving wheel inside the second cantilever 102 is driven by the action of the second lateral motor 109 to drive the driving belt to rotate, which is converted into the reciprocating motion of the second connecting plate 104 on the lower surface of the second cantilever 102, through the second The action of the transverse drive shaft 110 drives the driving wheel inside the second cantilever 102 on the other vertical profile 40 to rotate, so that the second connecting plates 104 under the two second cantilevers 102 move simultaneously, so that the two grasping structures 20 simultaneous exercise.
如图7所示,对于所述的手抓结构20,本实用新型提供了一具体实施例,手抓结构20包括旋转连接板201、抓取板202以及传感器压板203;所述的旋转连接板201与第二连接板104固定连接,所述的抓取板202位于旋转连接板201下方,传感器压板203固定于抓取板202上贯穿的通孔内,传感器压板203下方设置有传感器,通过该传感器对石墨舟的位置进行感应,并通过抓取板202对石墨舟进行抓取。As shown in FIG. 7, for the hand grasping structure 20, the present invention provides a specific embodiment, the hand grasping structure 20 includes a rotating connecting plate 201, a grabbing plate 202, and a sensor pressing plate 203; the rotating connecting plate The fixing plate 201 is fixedly connected to the second connecting plate 104. The grabbing plate 202 is located below the rotating connecting plate 201. The sensor pressing plate 203 is fixed in the through hole penetrating through the grabbing plate 202. The sensor pressing plate 203 is provided with a sensor. The sensor senses the position of the graphite boat and grabs the graphite boat through the gripping plate 202.
本实用新型的此种管式PECVD自动上下料装置,具有三个工作区域,分别为出舟区、中间通道区以及推舟区,当第一悬臂101和第二悬臂102处于图2中所示的状态时,手抓结构20则位于中间通道区,所述的竖向型材40即位于中间通道区内,可以缩短第一悬臂101和第二悬臂102的长度,增加了管式PECVD 自动上下料装置的承载能力,提高了自动上下料是速度,从而缩短了石墨舟自动上下料的时间,提高生产效率;第二悬臂102在第一悬臂101上前后伸缩,手抓结构20在第二悬臂102上前后伸缩,当第二悬臂102向前运动(即图2中靠左边的方向)时,手抓结构20到达出舟区,进行石墨舟的抓取;当第二悬臂102和手抓结构20向后运动(即图2中靠右边的方向)时,手抓结构20达到推舟区,将石墨舟放在推舟区,此后手抓结构20回到中间通道区,等待下一次的循环,重复上述的过程,完成石墨舟的自动上下料;当然,在上述上下料的过程中,需通过升降结构30的配合,实现手抓结构20的升降运动。The tubular PECVD automatic loading and unloading device of the utility model has three working areas, namely a boating zone, an intermediate channel zone and a pushing boat zone, when the first cantilever 101 and the second cantilever 102 are in FIG. In the state of the hand, the grasping structure 20 is located in the intermediate passage region, and the vertical profile 40 is located in the intermediate passage region, which can shorten the length of the first cantilever 101 and the second cantilever 102, and increase the tubular PECVD automatic loading and unloading. The carrying capacity of the device improves the automatic loading and unloading speed, thereby shortening the time for the automatic loading and unloading of the graphite boat and improving the production efficiency; the second cantilever 102 is telescopically stretched back and forth on the first cantilever 101, and the grasping structure 20 is in the second cantilever 102. When the second cantilever 102 moves forward (ie, in the left direction in FIG. 2), the grasping structure 20 reaches the boating area to perform the grasping of the graphite boat; when the second cantilever 102 and the grasping structure 20 When moving backward (ie, in the direction to the right in Figure 2), the grasping structure 20 reaches the push boat area, and the graphite boat is placed in the push boat area, after which the grip structure 20 returns to the middle passage area, waiting for the next cycle. Repeat the above process and finish Automatic loading and unloading the graphite boat; of course, in the process of loading and unloading in the above-described need by fitting the lifting structure 30, 20 to achieve a lifting movement of the clutch structure.
以上是对本实用新型的较佳实施进行了具体说明,但本实用新型创造并不限于所述实施例,熟悉本领域的技术人员在不违背本实用新型精神的前提下还可做出种种的等同变形或替换,这些等同的变形或替换均包含在本申请权利要求所限定的范围内。The above is a detailed description of the preferred embodiment of the present invention, but the present invention is not limited to the embodiments, and those skilled in the art can make various equivalents without departing from the spirit of the present invention. Modifications or substitutions are intended to be included within the scope of the appended claims.

Claims (7)

  1. 一种管式PECVD自动上下料装置,其特征在于:包括悬臂结构、手抓结构、升降结构以及相平行的两条竖向型材,且两条竖向型材上均设置有悬臂结构,所述的升降结构用于驱动悬臂结构在竖向型材上往复运动;A tubular PECVD automatic loading and unloading device, comprising: a cantilever structure, a hand grasping structure, a lifting structure and two parallel vertical profiles, and two vertical profiles are provided with a cantilever structure, The lifting structure is used for driving the cantilever structure to reciprocate on the vertical profile;
    所述的悬臂结构包括第一悬臂和第二悬臂,所述第一悬臂的中部安装在竖向型材上,第一悬臂的下表面滑动安装有第一连接板,第一连接板在第一悬臂上往复运动;所述的第二悬臂与第一连接板固定连接,第二悬臂的下表面滑动安装有第二连接板,所述第二连接板在第二悬臂上往复运动;The cantilever structure includes a first cantilever and a second cantilever, a middle portion of the first cantilever is mounted on the vertical profile, a lower surface of the first cantilever is slidably mounted with a first connecting plate, and the first connecting plate is at the first cantilever Reciprocating motion; the second cantilever is fixedly connected to the first connecting plate, the lower surface of the second cantilever is slidably mounted with a second connecting plate, and the second connecting plate reciprocates on the second cantilever;
    所述的手抓结构固定安装在第二连接板上,通过该手抓结构对石墨舟进行抓取。The grip structure is fixedly mounted on the second connecting plate, and the graphite boat is grasped by the grip structure.
  2. 根据权利要求1所述的一种管式PECVD自动上下料装置,其特征在于:所述的升降结构包括升降电机和传动杆;A tubular PECVD automatic loading and unloading device according to claim 1, wherein the lifting structure comprises a lifting motor and a transmission rod;
    所述竖向型材的底部设置有主动端,且主动端内部设置有主动轮,所述升降电机的电机轴与其中一个竖向型材的主动轮的一端相连接,所述的传动杆连接在两个竖向型材的主动轮之间;The bottom of the vertical profile is provided with an active end, and the driving end is internally provided with a driving wheel, and the motor shaft of the lifting motor is connected with one end of a driving wheel of one of the vertical profiles, and the transmission rod is connected to two Between the drive wheels of a vertical profile;
    所述竖向型材的顶部设置有从动端,且从动端内部设置有从动轮,所述主动轮和从动轮之间套有升降皮带,且升降皮带上固定安装着一滑块连接板,所述的悬臂结构固定在滑块连接板上。The top of the vertical profile is provided with a driven end, and a driven wheel is disposed inside the driven end, a lifting belt is disposed between the driving wheel and the driven wheel, and a slider connecting plate is fixedly mounted on the lifting belt. The cantilever structure is fixed on the slider connecting plate.
  3. 根据权利要求2所述的一种管式PECVD自动上下料装置,其特征在于:所述的两条竖向型材之间还设置有上定位板和下定位板;The tubular PECVD automatic loading and unloading device according to claim 2, wherein: the upper vertical positioning plate and the lower positioning plate are further disposed between the two vertical profiles;
    所述的上定位板的一端固定安装在其中一条竖向型材的顶部,上定位板的另一端固定安装在另一条竖向型材的顶部;所述的下定位板的一端固定安装在其中一条竖向型材的底部,下定位板的另一端固定安装在另一条竖向型材的底部。One end of the upper positioning plate is fixedly mounted on the top of one of the vertical profiles, and the other end of the upper positioning plate is fixedly mounted on the top of the other vertical profile; one end of the lower positioning plate is fixedly mounted on one of the vertical members To the bottom of the profile, the other end of the lower locating plate is fixedly mounted to the bottom of the other vertical profile.
  4. 根据权利要求2所述的一种管式PECVD自动上下料装置,其特征在于:所述的悬臂结构还包括一模组连接板,该模组连接板与滑块连接板固定连接,且所述的第一悬臂固定安装在模组连接板上。The tubular PECVD automatic loading and unloading device according to claim 2, wherein the cantilever structure further comprises a module connecting plate, the module connecting plate is fixedly connected with the slider connecting plate, and the The first cantilever is fixedly mounted on the module connection plate.
  5. 根据权利要求1所述的一种管式PECVD自动上下料装置,其特征在于:所述的悬臂结构还包括第一横向电机和第一横向传动轴,A tubular PECVD automatic loading and unloading device according to claim 1, wherein the cantilever structure further comprises a first transverse motor and a first lateral transmission shaft,
    所述第一悬臂的一端设置有第一主动轮轴,第一横向电机与第一主动轮轴的一端固定连接,所述第一横向传动轴固定连接在两个第一悬臂的第一主动轮轴之间;One end of the first cantilever is provided with a first driving axle, the first transverse motor is fixedly connected with one end of the first driving axle, and the first lateral transmission shaft is fixedly connected between the first driving axles of the two first cantilevers ;
    所述的第一悬臂内部设置有主动轮、从动轮以及传动皮带,第一主动轮轴固定在主动轮中心处,传动皮带套在主动轮和从动轮上,且所述的第一连接板固定安装在第一悬臂内部的传动皮带上。The first cantilever is internally provided with a driving wheel, a driven wheel and a transmission belt. The first driving wheel axle is fixed at the center of the driving wheel, the transmission belt is sleeved on the driving wheel and the driven wheel, and the first connecting plate is fixedly mounted. On the drive belt inside the first cantilever.
  6. 根据权利要求5所述的一种管式PECVD自动上下料装置,其特征在于:所述的悬臂结构还包括第二横向电机以及第二横向传动轴;The tubular PECVD automatic loading and unloading device according to claim 5, wherein the cantilever structure further comprises a second lateral motor and a second lateral transmission shaft;
    所述第二悬臂的一端设置有第二主动轮轴,第二横向电机与第二主动轮轴的一端固定连接,所述第二横向传动轴固定连接在两个第二悬臂的第二主动轮轴之间;One end of the second cantilever is provided with a second driving axle, the second transverse motor is fixedly connected with one end of the second driving axle, and the second lateral transmission shaft is fixedly connected between the second driving axles of the two second cantilevers ;
    所述的第二悬臂内部设置有主动轮、从动轮以及传动皮带,第二主动轮轴固定在主动轮中心处,传动皮带套在主动轮和从动轮上,且所述的第二连接板固定安装在第二悬臂内部的传动皮带上。The second cantilever is internally provided with a driving wheel, a driven wheel and a transmission belt. The second driving wheel axle is fixed at the center of the driving wheel, the transmission belt is sleeved on the driving wheel and the driven wheel, and the second connecting plate is fixedly mounted. On the drive belt inside the second cantilever.
  7. 根据权利要求1所述的一种管式PECVD自动上下料装置,其特征在于:所述的手抓结构包括旋转连接板、抓取板以及传感器压板;The tubular PECVD automatic loading and unloading device according to claim 1, wherein the hand grasping structure comprises a rotating connecting plate, a grabbing plate and a sensor pressing plate;
    所述的旋转连接板与第二连接板固定连接,所述的抓取板位于旋转连接板下方,传感器压板固定于抓取板上贯穿的通孔内。The rotating connecting plate is fixedly connected to the second connecting plate, the grabbing plate is located below the rotating connecting plate, and the sensor pressing plate is fixed in the through hole penetrating through the grabbing plate.
PCT/CN2018/075727 2018-02-02 2018-02-08 Tubular pecvd automatic loading and unloading device WO2019148522A1 (en)

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CN203998096U (en) * 2014-07-09 2014-12-10 深圳丰盛装备股份有限公司 Graphite boat automatic loading and unloading sheet devices for tubular type PECVD
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