CN107365980B - A kind of graphite boat automatic loading and unloading piece equipment - Google Patents

A kind of graphite boat automatic loading and unloading piece equipment Download PDF

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Publication number
CN107365980B
CN107365980B CN201710555647.4A CN201710555647A CN107365980B CN 107365980 B CN107365980 B CN 107365980B CN 201710555647 A CN201710555647 A CN 201710555647A CN 107365980 B CN107365980 B CN 107365980B
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China
Prior art keywords
silicon wafer
fixed
box
motor
adjusting
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CN201710555647.4A
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Chinese (zh)
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CN107365980A (en
Inventor
王俊朝
李军阳
李学文
刘兵吉
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Shenzhen Han's photovoltaic equipment Co.,Ltd.
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SHENZHEN HAN'S PHOTOVOLTAIC TECHNOLOGY CO LTD
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/513Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets

Abstract

The invention discloses a kind of graphite boat automatic loading and unloading piece equipment, are related to solar battery technical field of automation equipment;Piece mechanism is loaded and unloaded including silicon chip charging-discharging machine structure and silicon wafer, silicon chip charging-discharging machine structure is located at the side of silicon wafer handling piece mechanism;Silicon chip charging-discharging machine structure includes magazine transmission device, magazine lifting device and silicon wafer transmission device, it includes transfer box device, XY stage apparatus, inserting piece device and graphite boat that silicon wafer, which loads and unloads piece mechanism, the beneficial effects of the present invention are: adapting to the automated production requirement of cell piece production firm, reduce labour cost, reduce production loss, the silicon chip film-coated efficiency of raising.

Description

A kind of graphite boat automatic loading and unloading piece equipment
Technical field
The present invention relates to solar battery technical field of automation equipment, more particularly, it relates to a kind of graphite Boat automatic loading and unloading piece equipment.
Background technique
PECVD (Plasma Enhanced Chemical Vapor Deposition) plasma enhanced chemical is meteorological Deposition is that energy source is done using low temperature plasma, and silicon wafer is placed under low pressure on the cathode of glow discharge, utilizes glow discharge (or separately plus heater) makes silicon wafer be warming up to scheduled temperature, then passes to suitable reaction gas, gas through a not plump chemistry and Plasma reaction forms solid film on silicon wafer.
For graphite boat as silicon chip carrier electrode, silicon wafer, which must be placed at, just can be carried out coating process on graphite boat.Silicon too In positive energy battery manufacturing process, when carrying out silicon chip surface plated film, uncoated silicon wafer is inserted into graphite boat first, will be carried There is the graphite boat of silicon wafer to be placed in PECVD vacuum coating equipment (abbreviation PECVD device) cavity, using suitable PECVD work Skill carries out plated film to silicon wafer;After plated film, graphite boat is taken out from vacuum coating equipment cavity then again by the silicon wafer of plated film It is taken off from graphite boat.Generally uncoated silicon wafer is inserted into graphite boat using six-joint robot in the prior art, but six Axis robot involves great expense, and improves the cost of the manufacturing.
Summary of the invention
For overcome the deficiencies in the prior art, the present invention provides kind of a graphite boat automatic loading and unloading piece equipment, which can be real The automatic loading and unloading of existing silicon wafer, reduces manufacturing cost, reduces production loss.
The technical solution adopted by the present invention to solve the technical problems is: a kind of graphite boat automatic loading and unloading piece equipment changes Be into place: including silicon chip charging-discharging machine structure and silicon wafer handling piece mechanism, the silicon chip charging-discharging machine structure is located at silicon wafer handling The side of piece mechanism;
The silicon chip charging-discharging machine structure includes magazine transmission device, magazine lifting device and silicon wafer transmission device, described Magazine transmission device include upper magazine transmission line and blanking box transmission line, the upper magazine transmission line is located at blanking box transmission line Top, the upper magazine transmission line are used to the silicon wafer bearing box equipped with non-plated film silicon wafer being sent to magazine lifting device, institute Blanking box transmission line is stated for receiving the silicon wafer bearing box of magazine lifting device transmission;The magazine lifting device is located at upper magazine The rear of transmission line and blanking box transmission line, magazine lifting device is for driving silicon wafer bearing box to move up and down;The silicon wafer passes Device is sent to be located at magazine lifting device rear, silicon wafer transmission device is used between magazine lifting device and silicon wafer handling piece mechanism Realize the transmission of silicon wafer;
Silicon wafer handling piece mechanism includes transfer box device, XY stage apparatus, inserting piece device and graphite boat, it is described in Turn box device and be located at silicon wafer transmission device rear, transfer box device is for placing silicon wafer to be sent;XY stage apparatus position Above the graphite boat, the inserting piece device is arranged on XY stage apparatus, which passes through XY stage apparatus It drives and moves, inserting piece device is used for the silicon chip extracting in transfer box device and is put into graphite boat, and will be in graphite boat Silicon chip extracting and be put into transfer box device.
In such a configuration, the upper magazine transmission line and blanking box transmission line include conveyer frames, first motor And first feed belt;
First feed belt is rotatably installed on conveyer frames, and the first motor is fixed on the side of conveyer frames, First motor is used to place silicon wafer bearing box on first feed belt for driving the rotation of the first feed belt.
In such a configuration, the silicon chip charging-discharging machine structure further includes silicon wafer buffer storage, the silicon wafer buffer storage Setting is used to keep in the silicon wafer of silicon wafer transmission device transmission in magazine lifting device rear, silicon wafer buffer storage.
In such a configuration, the silicon wafer buffer storage includes caching box, the first fixing seat, telescopic rod and driving Device;
The telescopic rod is passed through in the first fixing seat, and the caching box is fixed on the top of the telescopic rod, the drive Dynamic device is for driving telescopic rod that caching box is driven to move back and forth;
The caching box includes the first transverse slat, the first vertical plate and the second vertical plate, and the top of the telescopic rod is solid It is scheduled on the first transverse slat;One end of first vertical plate and the second vertical plate is vertically fixed on the first transverse slat, and first Multiple partitions are provided on vertical plate and the opposite side of the second vertical plate, the gap of adjacent separator and the in the first vertical plate For being inserted into silicon wafer between the gap of adjacent separator in two vertical plates.
In such a configuration, the driving device includes servo motor, screw rod, feed screw nut, the second fixing seat, leads To bar and guide sleeve;
The bottom end of the screw rod is connected on the output shaft of servo motor, and it is solid that the top of screw rod is rotatably installed in described first In reservation;The feed screw nut is set on screw rod, and the feed screw nut is fixed in second fixing seat, described to watch Take motor for drive the second fixing seat reciprocating motion;The bottom end of the telescopic rod is fixed in the second fixing seat;
The top of the guide rod is fixed in first fixing seat, and the bottom end of guide rod is fixed on the servo On motor;The guide rod is passed through in guide sleeve, and the guide sleeve is fixed in the second fixing seat.
In such a configuration, the silicon wafer transmission device includes driving motor and drive belt, the driving motor band Dynamic drive belt rotation, the drive belt is for placing silicon wafer.
In such a configuration, the transfer box device includes the transfer that transfer rack and driving transfer rack move up and down Frame driving device;
The transfer rack includes the second transverse slat, third vertical plate and the 4th vertical plate, and third vertical plate and the 4th erect It is fixed on the second transverse slat to plate, and is provided with multiple convex blocks, third on third vertical plate and the opposite side of the 4th vertical plate In vertical plate in the gap of adjacent projections and the 4th vertical plate the gap of adjacent projections for being inserted into silicon wafer.
In such a configuration, the transfer rack driving device include the 4th motor, the first sliding rail, the first screw rod and First sliding block;
One end of first screw rod and the output axis connection of the 4th motor, first sliding block are arranged in the first screw rod On, and slided on the first sliding rail by the drive of the 4th motor, the transfer rack is fixed on first sliding block.
In such a configuration, the transfer box device further includes left and right adjusting device, cant board and fixed plate;Two First sliding rail of a transfer rack driving device is separately fixed on a cant board, and the top of two cant boards is separately fixed at The both ends of the fixed plate;
The left and right adjusting device include left and right adjusting motor, left and right adjusting frame, first movement block, the second sliding rail and Second sliding block, the left and right adjusting motor are fixed in fixed plate, and the upper end of the first movement block is connected to left and right adjusting electricity On the output shaft of machine, the lower end of first movement block passes through fixed plate and is fixed on the left and right adjusting top of the trellis, and described second Sliding rail is fixed on the bottom surface of fixed plate, and second sliding block is fixed on left and right adjusting frame and is slidably mounted on the second sliding rail On;
The transfer rack is located in left and right adjusting frame, and left and right adjusting frame passes through the driving of left and right adjusting motor, along left and right Direction adjusts the position of silicon wafer on transfer rack.
In such a configuration, the transfer box device further includes front-and-back adjusting device and support plate;
The front-and-back adjusting device includes that front and back adjusts motor, front and back adjusting bracket, the second movable block, third sliding rail and the Three sliding blocks, it is fixed on the supporting plate that the front and back adjusts motor, and the support plate is fixedly installed in the side of fixed plate;
The upper end of second movable block is connected to front and back and adjusts on the output shaft of motor, and the lower end of the second movable block is with before Adjusting bracket is fixedly connected afterwards, and the third sliding rail is fixed on the bottom surface of support plate, and the third sliding block is fixed on front and back adjusting bracket It goes up and is slidably mounted on third sliding rail;
The front and back adjusting bracket is located at the side of transfer rack, and front and back adjusting bracket adjusts the driving of motor by front and back, along preceding Rear direction adjusts the position of silicon wafer on transfer rack.
The beneficial effects of the present invention are: realizing and Tubular PECVD device is mating dismantles to silicon wafer, cell piece is adapted to The automated production requirement of production firm, reduces labour cost, reduces production loss, the silicon chip film-coated efficiency of raising.
Detailed description of the invention
Fig. 1 is the schematic perspective view of graphite boat automatic loading and unloading piece of the invention.
Fig. 2 is the schematic perspective view of silicon chip charging-discharging machine structure of the invention.
Fig. 3 is silicon chip charging-discharging machine structure schematic diagram of internal structure of the invention.
Fig. 4 is the schematic perspective view of upper magazine transmission line of the invention.
Fig. 5, Fig. 6 are the schematic perspective view of silicon wafer transmission device and silicon wafer cache mechanism of the invention.
Fig. 7 is the schematic perspective view of silicon wafer cache mechanism of the invention.
Fig. 8 is the structural schematic diagram of the caching box of silicon wafer cache mechanism of the invention.
Fig. 9 is the schematic perspective view that silicon wafer of the present invention loads and unloads piece mechanism.
Figure 10, Figure 11 are the schematic perspective view of transfer box device of the invention.
Figure 12 is the schematic perspective view of the transfer rack of transfer box device of the invention of the invention.
Figure 13 is the schematic perspective view of the right-left adjusting device of transfer box device of the invention.
Figure 14 is the schematic perspective view of the front-rear adjusting device of transfer box device of the invention.
Figure 15 is the schematic perspective view of XY stage apparatus of the invention.
Figure 16 is the schematic perspective view of inserting piece device of the invention.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
It is carried out below with reference to technical effect of the embodiment and attached drawing to design of the invention, specific structure and generation clear Chu is fully described by, to be completely understood by the purpose of the present invention, feature and effect.Obviously, described embodiment is this hair Bright a part of the embodiment, rather than whole embodiments, based on the embodiment of the present invention, those skilled in the art are not being paid Other embodiments obtained, belong to the scope of protection of the invention under the premise of creative work.In addition, being related in patent All connection/connection relationships, not singly refer to that component directly connects, and refer to can according to specific implementation situation, by addition or Couple auxiliary is reduced, to form more preferably coupling structure.Each technical characteristic in the invention, in not conflicting conflict Under the premise of can be with combination of interactions.
Shown in referring to Fig.1, present invention discloses a kind of graphite boat automatic loading and unloading piece equipment, the silicon wafer realized by the equipment Automated handling, specifically, graphite boat automatic loading and unloading piece equipment include silicon chip charging-discharging machine structure 100 and silicon wafer handling piece mechanism 200, silicon chip charging-discharging machine structure 100 is located at the side of silicon wafer handling piece mechanism 200;For the silicon chip charging-discharging machine structure 100, As shown in Figure 2 and Figure 3, the silicon chip charging-discharging machine structure 100 includes magazine transmission device 10, magazine lifting device 20 and silicon wafer Transmission device 30, the magazine transmission device 10 include upper magazine transmission line 101 and blanking box transmission line 102, the feeding Box transmission line 101 is located at 102 top of blanking box transmission line, and the upper magazine transmission line 101 will be for that will be equipped with non-plated film silicon wafer Silicon wafer bearing box is sent on magazine lifting device 20, and the blanking box transmission line 102 is for receiving the biography of magazine lifting device 20 The silicon wafer bearing box sent;The magazine lifting device 20 is located at the rear of upper magazine transmission line 101 and blanking box transmission line 102, Magazine lifting device 20 is for driving silicon wafer bearing box 201 to move up and down;The silicon wafer transmission device 30 is located at magazine lifting dress 20 rears are set, silicon wafer transmission device 30 is used to realize silicon wafer between magazine lifting device 20 and silicon wafer handling piece mechanism 200 Transmission.
For the magazine transmission device 10, as shown in figure 3, in the present embodiment, silicon chip charging-discharging machine structure 100 includes Two magazine transmission devices 10 side by side, one of magazine transmission device 10 is for transmitting uncoated silicon wafer, another magazine For transmission device 10 then for transmitting the silicon wafer of plated film completion, structure is identical, therefore does not only plate to being used for transmission in the present embodiment The structure of the magazine transmission device 10 of the silicon wafer of film is illustrated.For the magazine transmission device 10, magazine transmission device The structure of 10 upper magazine transmission line 101 and blanking box transmission line 102 is essentially identical, in the present embodiment, to upper magazine transmission line For 101 structure as being described in detail, the upper magazine transmission line 101 includes conveyer frames 1011, first motor 1012 and first Feed belt 1013, first feed belt 1013 are rotatably installed on conveyer frames 1011, and the first motor 1012 is fixed On the side of conveyer frames 1011, first motor 1012 is for driving the rotation of the first feed belt 1013, the first transmission skin For placing silicon wafer bearing box 201 on band 1013.Before equipment work, uncoated silicon wafer is placed in silicon wafer bearing box 201, Multiple silicon wafer bearing boxes 201 being placed on the first feed belt 1013 side by side, by the drive of the first feed belt 1013 into Row transmission.Blanking box transmission line 102 is located at the lower section of upper magazine transmission line 101, when silicon wafer transmission device 30 is by silicon wafer bearing box After silicon wafer transmission on 201, empty silicon wafer bearing box 201 passes through the effect of magazine lifting device 20, is sent to blanking box transmission On line 102, first driving belt of the first feed belt 1013 of blanking box transmission line 102 relative to upper magazine transmission line 101 Opposite direction rotation, drives empty magazine to be back to home position.
For the silicon wafer transmission device 30, the invention proposes a specific embodiments, as shown in Figure 5, Figure 6, silicon wafer Transmission device 30 includes driving motor 301 and drive belt 302, and the driving motor 301 drives drive belt 302 to rotate, institute Drive belt 302 is stated for placing silicon wafer 303.In addition, silicon chip charging-discharging machine structure 100 further includes silicon wafer buffer storage 40, the silicon The setting of piece buffer storage 40 is at 20 rear of magazine lifting device, and silicon wafer buffer storage 40 is for keeping in the transmission of silicon wafer transmission device 30 Silicon wafer, specifically, as shown in Figure 7, Figure 8, the silicon wafer buffer storage 40 include caching box 401, the first fixing seat 402, Telescopic rod 403 and driving device;The telescopic rod 403 is passed through in the first fixing seat 402, and the caching box 401 is fixed on institute On the top for stating telescopic rod 403, the driving device is for driving telescopic rod 403 that caching box 401 is driven to move back and forth;Described Caching box 401 includes the first transverse slat 4011, the first vertical plate 4012 and the second vertical plate 4013, the top of the telescopic rod 403 End is fixed on the first transverse slat 4011;One end of first vertical plate 4012 and the second vertical plate 4013 is vertically fixed on On one transverse slat 4011, and multiple partitions are provided on the first vertical plate 4012 and the opposite side of the second vertical plate 4013 4014, in the first vertical plate 4012 in the gap of adjacent separator 4014 and the second vertical plate 4013 adjacent separator 4014 gap it Between for being inserted into silicon wafer.
Further, the driving device includes servo motor 404, screw rod 405, feed screw nut 406, the second fixing seat 407, guide rod 408 and guide sleeve 409;The bottom end of the screw rod 405 is connected on the output shaft of servo motor 404, screw rod 405 Top be rotatably installed in first fixing seat 402;The feed screw nut 406 is set on screw rod 405, and the screw rod Nut 406 is fixed in second fixing seat 407, and the servo motor 404 is for driving the second fixing seat 407 back and forth fortune It is dynamic;The bottom end of the telescopic rod 403 is fixed in the second fixing seat 407;The top of the guide rod 408 is fixed on described the In one fixing seat 402, the bottom end of guide rod 408 is fixed on the servo motor 404;The guide rod 408 pass through in Guide sleeve 409, and the guide sleeve 409 is fixed in the second fixing seat 407.In addition, the driving device further includes shaft coupling 410 It is rotatably installed in third fixing seat 411 with the bottom end of third fixing seat 411, the screw rod 405, the shaft coupling 410 is used It is attached in by the output shaft of servo motor 404 and the bottom end of screw rod 405, first fixing seat 402 and third fixing seat It is provided with an optoelectronic switch 412 on 411, it is corresponding on the upper and lower surfaces of second fixing seat 407 to be fixedly installed with one Shielding plate 413 realizes the limitation to 401 movement travel of caching box by the cooperation of optoelectronic switch 412 and shielding plate 413.It is described The cache mechanism of silicon wafer loading and unloading further includes linear bearing 414 and mounting plate 415, and the telescopic rod 403 is from linear bearing 414 In pass through, and linear bearing 414 is fixed in first fixing seat 402;First fixing seat 402 is fixed on the mounting plate On 415, the telescopic rod 403 is passed through in mounting plate 415, and the driving device is located at 415 lower section of mounting plate.
During silicon wafer transmission device 30 transmits silicon wafer, if the transmission speed of silicon wafer is fast, and silicon wafer loads and unloads piece machine In the case that structure 200 is already filled with, then the operation of silicon wafer buffer storage 40 is triggered, magnetite drives caching box by servo motor 404 401 move upwards, and silicon wafer is sent in caching box 401, are inserted into the gap of adjacent separator 4014 and the in the first vertical plate 4012 In two vertical plates 4013 in the gap of adjacent separator 4014, caching box 401 is by the driving of servo motor 404 according between fixed Away from rising, after a piece of silicon wafer is sent in caching box 401 instantly, caching box 401 rises again according to fixed spacing, passes through this Kind mode, by silicon wafer being collected into caching box 401 successively, until silicon wafer handling piece mechanism 200 restarts to collect silicon wafer, it should Cache mechanism then stops collecting silicon wafer.When being cached with silicon wafer in caching box 401, there are no silicon wafer transmission on magazine transmission device 10 Come over, at the same front silicon wafer handling piece mechanism 200 it is less than in the case where, then triggering go caching to act, caching box 401 is pressed at this time Decline according to fixed spacing, by the control to servo motor 404 and silicon wafer conveying mechanism, by the silicon wafer in caching box 401 by One is put on the drive belt 302 of silicon wafer transmission device 30.Such silicon wafer buffer storage 40 of the invention, is efficiently utilized silicon Piece transmission device 30 transports silicon wafer, will not improve whole because of the operation for temporarily ceasing and influencing integral device of front and back process The operational efficiency of machine improves the production capacity of equipment.
As shown in figure 9, piece mechanism 200 is loaded and unloaded for the silicon wafer, it is described the invention proposes a specific embodiment Silicon wafer load and unload piece mechanism 200 include transfer box device 50, XY stage apparatus 60, inserting piece device 70 and graphite boat 80, it is described in Turn box device 50 and be located at 30 rear of silicon wafer transmission device, transfer box device 50 is for placing silicon wafer to be sent;The XY platform Device 60 is located at 80 top of graphite boat, and the inserting piece device 70 is arranged on XY stage apparatus 60, the inserting piece device 70 By the drive campaign of XY stage apparatus 60, inserting piece device 70 is used for the silicon chip extracting in transfer box device 50 and is put into stone In black boat 80, and by the silicon chip extracting in graphite boat 80 and it is put into transfer box device 50.
Specifically, as shown in Figure 10, Figure 11 and Figure 12, the transfer is box-packed for the transfer box device 50 Setting 50 includes transfer rack 501 and the transfer rack driving devices that drive transfer rack 501 to move up and down, in the present embodiment, relay box Device 50 includes that there are two transfer rack 501 and two transfer rack driving devices, and one of transfer rack 501 is for receiving through silicon wafer The non-plated film silicon wafer that transmission device 30 transmits, another transfer rack 501 is then for receiving the plated film transmitted through inserting piece device 70 The structure of silicon wafer, two transfer racks 501 is identical, and the structure of two transfer rack driving devices is also identical, therefore the present invention is only to it In the structure of a transfer rack 501 and transfer rack driving device be described in detail.As shown in figure 12, the transfer rack 501 Including the second transverse slat 5011, third vertical plate 5012 and the 4th vertical plate 5013, third vertical plate 5012 and the 4th vertical plate 5013 are fixed on the second transverse slat 5011, and are provided on third vertical plate 5012 and the opposite side of the 4th vertical plate 5013 more A convex block, in third vertical plate 5012 in the gap of adjacent projections and the 4th vertical plate 5013 gap of adjacent projections for being inserted into Silicon wafer 303.The transfer rack driving device is sliding including the 4th motor 503, the first sliding rail 504, the first screw rod 505 and first Block 506;The output axis connection of one end of first screw rod 505 and the 4th motor 503, the setting of the first sliding block 506 is the It on one screw rod 505, and is slided on the first sliding rail 504 by the drive of the 4th motor 503, the transfer rack 501 is fixed on On first sliding block 506.
Further, the transfer box device 50 further includes left and right adjusting device 507, cant board 508 and fixed plate 509;First sliding rail 504 of two transfer rack driving devices is separately fixed on a cant board 508, and two cant boards 508 Top be separately fixed at the both ends of the fixed plate 509;As shown in Figure 10, Figure 13, the left and right adjusting device 507 includes Left and right adjusting motor 5071, left and right adjusting frame 5072, first movement block 5073, the second sliding rail 5074 and the second sliding block 5075, The left and right adjusting motor 5071 is fixed in fixed plate 509, and the upper end of the first movement block 5073 is connected to left and right adjusting On the output shaft of motor 5071, the lower end of first movement block 5073 passes through fixed plate 509 and is fixed on the left and right adjusting frame 5072 tops, second sliding rail 5074 are fixed on the bottom surface of fixed plate 509, and second sliding block 5075 is fixed on left and right and adjusts On section frame 5072 and it is slidably mounted on the second sliding rail 5074;The transfer rack 501 is located in left and right adjusting frame 5072, in the middle When being placed with silicon wafer on pivoted frame 501, passed through by the position that detection device detects silicon wafer when deviation occurs in the position of silicon wafer The effect of left and right adjusting motor 5071 drives two left and right adjusting framves 5072 to move, and adjusts silicon on transfer rack 501 in left-right direction The position of piece.
On the basis of the above embodiments, the transfer box device 50 further includes front-and-back adjusting device 510 and support plate 511, as shown in Figure 11, Figure 14, the front-and-back adjusting device 510 includes that front and back adjusts motor 5101, front and back adjusting bracket 5102, the Two movable blocks 5103, third sliding rail 5104 and third sliding block 5105, the front and back adjust motor 5101 and are fixed on support plate 511 On, and the support plate 511 is fixedly installed in the side of fixed plate 509;Before the upper end of second movable block 5103 is connected to On the output shaft for adjusting motor 5101 afterwards, the lower end of the second movable block 5103 is fixedly connected with front and back adjusting bracket 5102, and described the Three sliding rails 5104 are fixed on the bottom surface of support plate 511, and the third sliding block 5105 is fixed on front and back adjusting bracket 5102 and slides It is installed on third sliding rail 5104;The front and back adjusting bracket 5102 is located at the side of transfer rack 501;Transfer rack 501 passes through the 4th The driving of motor 503 is slided on the first sliding rail 504, to receive the non-plated film silicon wafer of the transmission of silicon wafer transmission device 30, simultaneously The silicon wafer that plated film is completed can also be transmitted on silicon wafer transmission device 30;Front and back adjusting bracket 5102 adjusts motor by front and back 5101 driving adjusts the position of silicon wafer on transfer rack 501 along the longitudinal direction.
For the XY stage apparatus 60, as shown in figure 15, the invention proposes a specific embodiment, XY stage apparatus 60 include X-axis motor 601, X-axis slide rail 602, X-axis screw rod 603, X-axis sliding panel 604, X-axis slide block 605, y-axis motor 606, Y-axis Screw rod 607 and Y-axis sliding rail 608, wherein X-axis slide block 605 is slidably arranged in X-axis slide rail 602, X-axis slide rail 602 and X-axis electricity Machine 601 is fixed on X-axis sliding panel 604, and one end of X-axis screw rod 603 is connected on the output shaft of X-axis motor 601, X-axis slide block Feed screw nut 406 compatible with X-axis screw rod 603 is provided on 605, the inserting piece device 70 is fixed on X-axis slide block 605 On, therefore, drive X-axis slide block 605 to slide in X-axis slide rail 602 by the rotation of X-axis motor 601, to make inserting piece device 70 It is moved in X-direction;Further, the both ends of X-axis sliding shoe are slidably mounted on Y-axis sliding rail 608, likewise, Y-axis screw rod 607 one end is connected on y-axis motor 606, and silk compatible with Y-axis sliding rail 608 is provided on the bottom surface of X-axis sliding panel 604 Stem nut 406 drives X-axis sliding panel 604 to move in Y direction, to make inserting piece device 70 by the driving of y-axis motor 606 It is moved in Y direction.
For the inserting piece device 70, as shown in figure 16, the invention proposes a specific embodiment, the inserted sheet Device 70 include Z axis fixing seat 701, rotating seat 702, Z axis motor 703, the first rotating electric machine 704, the second rotating electric machine 705, Motor cabinet 706 and vacuum chuck 707, the Z axis fixing seat 701 are fixed in above-mentioned X-axis slide block 605, the first electric rotating Machine 704 is fixed on Z axis fixing seat 701, and rotating seat 702 is fixed on the motor shaft of the first rotating electric machine 704, and rotary shaft passes through the The drive of one rotating electric machine 704 and rotate;The Z axis motor 703 is fixed on rotating seat 702, and the motor cabinet 706 is sliding Dynamic to be set in rotary shaft, motor cabinet 706 is moved on rotating seat 702 by the driving of Z axis motor 703;Second rotation Rotating motor 705 is fixed on motor cabinet 706, and the vacuum chuck 707 is fixed on the motor shaft of the second rotating electric machine 705, Vacuum chuck 707 is rotated by the drive of the second rotating electric machine 705, and the vacuum chuck 707 is for adsorbing silicon wafer.
By above-mentioned structure, we carry out specifically the course of work of 80 automatic loading and unloading piece of graphite boat of the invention Bright, process is as follows:
A, it is put into silicon wafer bearing box 201 on upward magazine transmission line 101, has been put into silicon wafer bearing box 201 uncoated Silicon wafer, upper magazine transmission line 101 drive silicon wafer bearing box 201 to move;
B, silicon wafer bearing box 201 moves on magazine lifting device 20, and magazine lifting device 20 drives silicon wafer bearing box 201 It moves downward, silicon wafer transmission device 30 then successively takes out silicon wafer out of silicon wafer bearing box 201, in the process, can pass through Silicon wafer buffer storage 40 caches silicon wafer, and the workflow of silicon wafer buffer storage 40 is having been described above, herein no longer It repeats;
C, empty silicon wafer bearing box 201 is transmitted by blanking box transmission line 102, is manually taken away;
D, uncoated silicon wafer is sent in a transfer rack 501 of transfer box device 50 by silicon wafer transmission device 30, together Sample, the specific workflow of transfer box device 50 is having been described above, and also repeats no more herein;
E, XY stage apparatus 60 drives inserting piece device 70 to move, and inserting piece device 70 can be moved along multiple directions, inserted sheet dress The vacuum chuck 707 set on 70 removes uncoated silicon wafer out of transfer box device 50, and is put into graphite boat 80;Meanwhile Vacuum chuck 707 on inserting piece device 70 can take out the silicon wafer of plated film out of graphite boat 80, and be put into transfer box device 50 Transfer rack 501 on;
F, silicon wafer transmission device 30 successively takes out the silicon wafer on 501 device of transfer rack, can pass through silicon in the process Piece buffer storage 40 caches silicon wafer, and the workflow of silicon wafer buffer storage 40 is having been described above, no longer superfluous herein It states;
G, another magazine elevating mechanism drives empty silicon wafer bearing box 201 to move upwards, successively by silicon wafer transmission device Silicon wafer on 30 is collected in silicon wafer bearing box 201;Hereafter, it by the effect of the first feed belt 1013, drives and plated film is housed Silicon wafer silicon wafer bearing box 201 move, manually take the silicon wafer bearing box 201 equipped with plated film silicon wafer away.
80 automatic loading and unloading piece equipment of such graphite boat of the invention, realize with Tubular PECVD device it is mating to silicon wafer into Row disassembly adapts to the automated production requirement of cell piece production firm, reduces labour cost, reduces production loss, improve Silicon chip film-coated efficiency.
It is to be illustrated to preferable implementation of the invention, but the invention is not limited to the implementation above Example, those skilled in the art can also make various equivalent variations on the premise of without prejudice to spirit of the invention or replace It changes, these equivalent deformations or replacement are all included in the scope defined by the claims of the present application.

Claims (9)

1. a kind of graphite boat automatic loading and unloading piece equipment, it is characterised in that: piece mechanism is loaded and unloaded including silicon chip charging-discharging machine structure and silicon wafer, The silicon chip charging-discharging machine structure is located at the side of silicon wafer handling piece mechanism;
The silicon chip charging-discharging machine structure includes magazine transmission device, magazine lifting device and silicon wafer transmission device, the material Box transmission device includes upper magazine transmission line and blanking box transmission line, and the upper magazine transmission line is located on blanking box transmission line Side, the upper magazine transmission line is used to the silicon wafer bearing box equipped with non-plated film silicon wafer being sent to magazine lifting device, described Blanking box transmission line is used to receive the silicon wafer bearing box of magazine lifting device transmission;The magazine lifting device is located at upper magazine biography The rear of line sending and blanking box transmission line, magazine lifting device is for driving silicon wafer bearing box to move up and down;The silicon wafer transmission Device is located at magazine lifting device rear, and silicon wafer transmission device is used for real between magazine lifting device and silicon wafer handling piece mechanism The transmission of existing silicon wafer;
Silicon wafer handling piece mechanism includes transfer box device, XY stage apparatus, inserting piece device and graphite boat, the relay box Device is located at silicon wafer transmission device rear, and transfer box device is for placing silicon wafer to be sent;The XY stage apparatus is located at institute It states above graphite boat, the inserting piece device is arranged on XY stage apparatus, which passes through the drive of XY stage apparatus And move, inserting piece device is used to by the silicon chip extracting in transfer box device and be put into graphite boat, and by the silicon in graphite boat Piece is removed and placed in transfer box device;
The transfer box device includes the transfer rack driving device that transfer rack and driving transfer rack move up and down;In described Pivoted frame includes the second transverse slat, third vertical plate and the 4th vertical plate, and third vertical plate and the 4th vertical plate are fixed on the second cross On plate, and multiple convex blocks, adjacent projections in third vertical plate are provided on third vertical plate and the opposite side of the 4th vertical plate Gap and the 4th vertical plate on adjacent projections gap for being inserted into silicon wafer.
2. a kind of graphite boat automatic loading and unloading piece equipment according to claim 1, it is characterised in that: the upper magazine transmission Line and blanking box transmission line include conveyer frames, first motor and the first feed belt;
First feed belt is rotatably installed on conveyer frames, and the first motor is fixed on the side of conveyer frames, and first Motor is used to place silicon wafer bearing box on first feed belt for driving the rotation of the first feed belt.
3. a kind of graphite boat automatic loading and unloading piece equipment according to claim 1, it is characterised in that: the silicon wafer loading and unloading Mechanism further includes silicon wafer buffer storage, which is arranged at magazine lifting device rear, and silicon wafer buffer storage is used for The silicon wafer of temporary silicon wafer transmission device transmission.
4. a kind of graphite boat automatic loading and unloading piece equipment according to claim 3, it is characterised in that: the silicon wafer caches dress It sets including caching box, the first fixing seat, telescopic rod and driving device;
The telescopic rod is passed through in the first fixing seat, and the caching box is fixed on the top of the telescopic rod, the driving dress It sets for driving telescopic rod that caching box is driven to move back and forth;
The caching box includes the first transverse slat, the first vertical plate and the second vertical plate, and the top of the telescopic rod is fixed on On first transverse slat;One end of first vertical plate and the second vertical plate is vertically fixed on the first transverse slat, and first is vertical Multiple partitions are provided on plate and the opposite side of the second vertical plate, the gap of adjacent separator and second perpendicular in the first vertical plate To on plate for being inserted into silicon wafer between the gap of adjacent separator.
5. a kind of graphite boat automatic loading and unloading piece equipment according to claim 4, it is characterised in that: the driving device packet Include servo motor, screw rod, feed screw nut, the second fixing seat, guide rod and guide sleeve;
The bottom end of the screw rod is connected on the output shaft of servo motor, and the top of screw rod is rotatably installed in first fixing seat On;The feed screw nut is set on screw rod, and the feed screw nut is fixed in second fixing seat, the servo electricity Machine is for driving the second fixing seat to move back and forth;The bottom end of the telescopic rod is fixed in the second fixing seat;
The top of the guide rod is fixed in first fixing seat, and the bottom end of guide rod is fixed on the servo motor On;The guide rod is passed through in guide sleeve, and the guide sleeve is fixed in the second fixing seat.
6. a kind of graphite boat automatic loading and unloading piece equipment according to claim 1, it is characterised in that: the silicon wafer transmission device Including driving motor and drive belt, the driving motor drives drive belt rotation, and the drive belt is for placing silicon wafer.
7. a kind of graphite boat automatic loading and unloading piece equipment according to claim 1, it is characterised in that: the transfer rack driving Device includes the 4th motor, the first sliding rail, the first screw rod and the first sliding block;
One end of first screw rod and the output axis connection of the 4th motor, first sliding block are arranged on the first screw rod, and It is slided on the first sliding rail by the drive of the 4th motor, the transfer rack is fixed on first sliding block.
8. a kind of graphite boat automatic loading and unloading piece equipment according to claim 7, it is characterised in that: the transfer box device It further include left and right adjusting device, cant board and fixed plate;First sliding rail of two transfer rack driving devices is separately fixed at one On a cant board, and the top of two cant boards is separately fixed at the both ends of the fixed plate;
The left and right adjusting device includes left and right adjusting motor, left and right adjusting frame, first movement block, the second sliding rail and second Sliding block, the left and right adjusting motor are fixed in fixed plate, and the upper end of the first movement block is connected to left and right adjusting motor On output shaft, the lower end of first movement block passes through fixed plate and is fixed on the left and right adjusting top of the trellis, second sliding rail It is fixed on the bottom surface of fixed plate, second sliding block is fixed on left and right adjusting frame and is slidably mounted on the second sliding rail;
The transfer rack is located in left and right adjusting frame, and left and right adjusting frame passes through the driving of left and right adjusting motor, in left-right direction Adjust the position of silicon wafer on transfer rack.
9. a kind of graphite boat automatic loading and unloading piece equipment according to claim 7, it is characterised in that: the transfer box device It further include front-and-back adjusting device and support plate;
The front-and-back adjusting device includes that front and back adjusting motor, front and back adjusting bracket, the second movable block, third sliding rail and third are sliding Block, it is fixed on the supporting plate that the front and back adjusts motor, and the support plate is fixedly installed in the side of fixed plate;
The upper end of second movable block is connected to front and back and adjusts on the output shaft of motor, the lower end of the second movable block and front and back tune Section frame is fixedly connected, and the third sliding rail is fixed on the bottom surface of support plate, and the third sliding block is fixed on the adjusting bracket of front and back simultaneously It is slidably mounted on third sliding rail;
The front and back adjusting bracket is located at the side of transfer rack, and front and back adjusting bracket adjusts the driving of motor by front and back, along front and back To the position for adjusting silicon wafer on transfer rack.
CN201710555647.4A 2017-07-10 2017-07-10 A kind of graphite boat automatic loading and unloading piece equipment Active CN107365980B (en)

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CN201710555647.4A CN107365980B (en) 2017-07-10 2017-07-10 A kind of graphite boat automatic loading and unloading piece equipment
PCT/CN2018/073040 WO2019010944A1 (en) 2017-07-10 2018-01-17 Automatic chip assembly and disassembly apparatus for graphite boat

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CN107365980B (en) * 2017-07-10 2019-01-11 深圳丰盛装备股份有限公司 A kind of graphite boat automatic loading and unloading piece equipment
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