CN108011541B - 驱动装置、压电电动机、机器人、部件输送装置及打印机 - Google Patents

驱动装置、压电电动机、机器人、部件输送装置及打印机 Download PDF

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Publication number
CN108011541B
CN108011541B CN201710843931.1A CN201710843931A CN108011541B CN 108011541 B CN108011541 B CN 108011541B CN 201710843931 A CN201710843931 A CN 201710843931A CN 108011541 B CN108011541 B CN 108011541B
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Prior art keywords
vibration
vibration mode
vibrators
rotor
driving
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Chinese (zh)
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CN108011541A (zh
Inventor
梶野喜一
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Seiko Epson Corp
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Seiko Epson Corp
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators
    • H02N2/002Driving devices, e.g. vibrators using only longitudinal or radial modes
    • H02N2/0025Driving devices, e.g. vibrators using only longitudinal or radial modes using combined longitudinal modes
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators
    • H02N2/003Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/101Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods
    • H02N2/142Small signal circuits; Means for controlling position or derived quantities, e.g. speed, torque, starting, stopping, reversing

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
CN201710843931.1A 2016-10-27 2017-09-18 驱动装置、压电电动机、机器人、部件输送装置及打印机 Active CN108011541B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-211052 2016-10-27
JP2016211052A JP2018074723A (ja) 2016-10-27 2016-10-27 駆動装置、圧電モーター、ロボット、電子部品搬送装置およびプリンター

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CN108011541A CN108011541A (zh) 2018-05-08
CN108011541B true CN108011541B (zh) 2021-11-12

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Country Link
US (1) US10811998B2 (enExample)
JP (1) JP2018074723A (enExample)
CN (1) CN108011541B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7205162B2 (ja) * 2018-10-30 2023-01-17 セイコーエプソン株式会社 圧電駆動装置、ロボットおよびプリンター
JP7205163B2 (ja) * 2018-10-30 2023-01-17 セイコーエプソン株式会社 圧電駆動装置の制御方法、圧電駆動装置、ロボットおよびプリンター
CN110492785A (zh) * 2019-08-09 2019-11-22 南京航空航天大学 一种十字梁旋转型超声电机及其控制方法
CN114079401A (zh) * 2020-08-17 2022-02-22 华为技术有限公司 驱动组件、马达及终端

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* Cited by examiner, † Cited by third party
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CN1913322A (zh) * 2006-08-28 2007-02-14 哈尔滨工业大学 换能器耦合双向直线超声波电机及其激励方法
CN101672972A (zh) * 2008-09-10 2010-03-17 索尼株式会社 透镜驱动器和图像拾取设备
CN102447415A (zh) * 2010-09-30 2012-05-09 株式会社尼康 压电促动器、透镜镜筒及摄像装置
JP2013183461A (ja) * 2012-02-29 2013-09-12 Nikon Corp 駆動装置、レンズ鏡筒及びカメラ

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* Cited by examiner, † Cited by third party
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JPH04145873A (ja) * 1990-10-02 1992-05-19 Olympus Optical Co Ltd 超音波モータ
JPH04178181A (ja) * 1990-11-09 1992-06-25 Olympus Optical Co Ltd 超音波モータ
JP2004260990A (ja) * 2003-02-06 2004-09-16 Seiko Epson Corp 駆動装置および稼動装置
JP2006352989A (ja) * 2005-06-15 2006-12-28 Olympus Corp 超音波モータの駆動装置及びその方法並びに超音波システム
CN102365815B (zh) * 2009-03-31 2015-09-23 株式会社尼康 压电致动器以及透镜镜筒
JP5212397B2 (ja) * 2010-02-12 2013-06-19 セイコーエプソン株式会社 圧電アクチュエータ
JP5791237B2 (ja) * 2010-06-14 2015-10-07 キヤノン株式会社 振動型駆動装置
JP6103840B2 (ja) * 2011-07-28 2017-03-29 キヤノン株式会社 補正光学装置及び撮像装置
JP5929138B2 (ja) * 2011-12-06 2016-06-01 セイコーエプソン株式会社 圧電モーターおよびロボット
JP6008077B2 (ja) * 2011-12-06 2016-10-19 セイコーエプソン株式会社 アクチュエータ―、ロボット、電子部品搬送装置及び電子部品検査装置
JP5929139B2 (ja) * 2011-12-06 2016-06-01 セイコーエプソン株式会社 アクチュエーター、ロボットハンド、ロボット、電子部品搬送装置、電子部品検査装置およびプリンター
JP6214193B2 (ja) * 2012-06-05 2017-10-18 キヤノン株式会社 振動波駆動装置、二次元駆動装置、画像振れ補正装置、交換レンズ、撮像装置、及び自動ステージ
JP2014075955A (ja) 2012-10-05 2014-04-24 Nikon Corp 駆動装置、ロボット装置及び露光装置
JP6053535B2 (ja) * 2013-01-25 2016-12-27 キヤノン株式会社 補正光学装置、画像振れ補正装置、及び撮像装置
JP6268999B2 (ja) * 2013-12-06 2018-01-31 セイコーエプソン株式会社 圧電モーター、ロボットハンド、ロボット、指アシスト装置、電子部品搬送装置、電子部品検査装置、送液ポンプ、印刷装置、電子時計、投影装置
JP6387686B2 (ja) * 2014-05-29 2018-09-12 セイコーエプソン株式会社 圧電アクチュエーター
JP2017073890A (ja) * 2015-10-07 2017-04-13 キヤノン株式会社 並進駆動装置、像ぶれ補正装置、レンズ鏡筒及び撮像装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1913322A (zh) * 2006-08-28 2007-02-14 哈尔滨工业大学 换能器耦合双向直线超声波电机及其激励方法
CN101672972A (zh) * 2008-09-10 2010-03-17 索尼株式会社 透镜驱动器和图像拾取设备
CN102447415A (zh) * 2010-09-30 2012-05-09 株式会社尼康 压电促动器、透镜镜筒及摄像装置
JP2013183461A (ja) * 2012-02-29 2013-09-12 Nikon Corp 駆動装置、レンズ鏡筒及びカメラ

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JP2018074723A (ja) 2018-05-10
CN108011541A (zh) 2018-05-08
US10811998B2 (en) 2020-10-20
US20180123483A1 (en) 2018-05-03

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