CN107923732B - 接近传感器 - Google Patents

接近传感器 Download PDF

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Publication number
CN107923732B
CN107923732B CN201780002803.2A CN201780002803A CN107923732B CN 107923732 B CN107923732 B CN 107923732B CN 201780002803 A CN201780002803 A CN 201780002803A CN 107923732 B CN107923732 B CN 107923732B
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CN
China
Prior art keywords
coil
coils
proximity sensor
distance
inspected
Prior art date
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Application number
CN201780002803.2A
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English (en)
Chinese (zh)
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CN107923732A (zh
Inventor
小泉昌之
和澄南
黄春梅
本间健次
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Omron Corp
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Omron Corp
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Publication of CN107923732A publication Critical patent/CN107923732A/zh
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Publication of CN107923732B publication Critical patent/CN107923732B/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
    • G01D5/2208—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the self-induction of the coils
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
    • G01D5/2208—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the self-induction of the coils
    • G01D5/2225—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the self-induction of the coils by a movable non-ferromagnetic conductive element
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
    • H03K17/945—Proximity switches
    • H03K17/95—Proximity switches using a magnetic detector
    • H03K17/952—Proximity switches using a magnetic detector using inductive coils
    • H03K17/9525—Proximity switches using a magnetic detector using inductive coils controlled by an oscillatory signal

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Geophysics And Detection Of Objects (AREA)
CN201780002803.2A 2016-01-20 2017-01-06 接近传感器 Active CN107923732B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2016008365A JP6458742B2 (ja) 2016-01-20 2016-01-20 近接センサ
JP2016-008365 2016-01-20
PCT/JP2017/000291 WO2017126341A1 (ja) 2016-01-20 2017-01-06 近接センサ

Publications (2)

Publication Number Publication Date
CN107923732A CN107923732A (zh) 2018-04-17
CN107923732B true CN107923732B (zh) 2020-02-07

Family

ID=59361553

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201780002803.2A Active CN107923732B (zh) 2016-01-20 2017-01-06 接近传感器

Country Status (5)

Country Link
US (1) US10488226B2 (enExample)
EP (1) EP3407009B1 (enExample)
JP (1) JP6458742B2 (enExample)
CN (1) CN107923732B (enExample)
WO (1) WO2017126341A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102538861B1 (ko) 2017-12-26 2023-06-01 가부시키가이샤 에바라 세이사꾸쇼 자성 소자 및 그것을 사용한 와전류식 센서
JP7179586B2 (ja) 2018-11-08 2022-11-29 株式会社荏原製作所 渦電流検出装置及び研磨装置
EP3654532B1 (en) * 2018-11-16 2022-05-18 Bently Nevada, LLC Proximity sensing system with component compatibility testing
DE102019209035A1 (de) * 2019-06-21 2020-12-24 Infineon Technologies Ag Erfassen einer diskreten positionsbeziehung zwischen einem magnetfeldgeber und einer magnetfeldsensoranordnung

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JPH053921Y2 (enExample) * 1989-02-09 1993-01-29
US5200704A (en) * 1991-02-28 1993-04-06 Westinghouse Electric Corp. System and method including a buried flexible sheet target impregnated with ferromagnetic particles and eddy current probe for determining proximity of a non-conductive underground structure
JPH0729466A (ja) 1993-07-13 1995-01-31 Omron Corp 近接スイッチ
JP3772151B2 (ja) * 1994-04-21 2006-05-10 オリンパス株式会社 挿入部位置検出装置
JPH11304405A (ja) 1998-04-22 1999-11-05 Mitsubishi Heavy Ind Ltd 位置検出装置及びそれを用いた位置検出方法
US6498478B2 (en) * 2000-08-14 2002-12-24 Radic Co., Ltd. Azimuth measuring method, azimuth measuring apparatus, position measuring method, and position measuring apparatus
EP1314964B1 (en) * 2001-06-29 2007-01-10 Matsushita Electric Works, Ltd. Position sensor
EP1516160A2 (de) * 2002-06-26 2005-03-23 Micro-Epsilon Messtechnik GmbH & Co. KG Sensorspule und wegmesssensor
DE10259223B3 (de) 2002-11-20 2004-02-12 Mehnert, Walter, Dr. Positionsdetektor
JP2007515618A (ja) * 2003-09-30 2007-06-14 エフエーファオ モトレンテクニーク ゲゼルシャフト ミット ベシュレンクテル ハフツング センサ装置
DE102004049753B3 (de) 2004-10-08 2006-04-13 Siemens Ag Verfahren und Anordnung zum Bestimmen des Abstandes einer in Richtung der Abstandsbestimmung profilierten, leitfähigen Oberfläche von einer sich relativ zu der Oberfläche bewegenden Funktionsfläche
US7233396B1 (en) * 2006-04-17 2007-06-19 Alphasniffer Llc Polarization based interferometric detector
JP2008002202A (ja) * 2006-06-23 2008-01-10 Toa Harbor Works Co Ltd 地中位置検出装置
US7782046B2 (en) * 2007-02-05 2010-08-24 General Electric Company Electromagnetic tracking method and system
JP2009109220A (ja) * 2007-10-26 2009-05-21 Aisan Ind Co Ltd 位置センサ
GB2472275A (en) 2009-07-31 2011-02-02 Oxford Rf Sensors Ltd Proximity sensor
US8508242B2 (en) * 2010-01-25 2013-08-13 Ksr Technologies Co. Inductive position sensor
CN101788259B (zh) 2010-03-04 2012-09-05 上海雷尼威尔测量技术有限公司 双丝差动型磁致伸缩位移传感器
EP2369291B1 (en) * 2010-03-10 2015-09-23 PolyResearch AG Sensor for height measurement
JP4852667B1 (ja) 2011-03-04 2012-01-11 株式会社マコメ研究所 近接センサ
DE102012214199A1 (de) 2012-08-09 2014-04-03 Bayerische Motoren Werke Aktiengesellschaft Vorrichtung und Verfahren zur Positionierung durch Triangulation
JP2014086954A (ja) 2012-10-25 2014-05-12 Panasonic Corp 非接触検出装置
US9562758B2 (en) 2013-04-15 2017-02-07 Stemco Kaiser Incorporated Distance measurement sensor based on magnetic signal triangulation
CN103673856A (zh) * 2013-12-20 2014-03-26 沈阳洪达信息科技有限公司 一种位置传感器
CA2944585A1 (en) * 2014-04-21 2015-10-29 Nucleus Scientific, Inc. Inductive position sensing in linear actuators

Also Published As

Publication number Publication date
EP3407009A4 (en) 2019-08-07
EP3407009A1 (en) 2018-11-28
JP6458742B2 (ja) 2019-01-30
CN107923732A (zh) 2018-04-17
WO2017126341A1 (ja) 2017-07-27
US10488226B2 (en) 2019-11-26
US20180231398A1 (en) 2018-08-16
JP2017129431A (ja) 2017-07-27
EP3407009B1 (en) 2024-08-21

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