CN107850797A - 处理装置 - Google Patents
处理装置 Download PDFInfo
- Publication number
- CN107850797A CN107850797A CN201780001995.5A CN201780001995A CN107850797A CN 107850797 A CN107850797 A CN 107850797A CN 201780001995 A CN201780001995 A CN 201780001995A CN 107850797 A CN107850797 A CN 107850797A
- Authority
- CN
- China
- Prior art keywords
- mounting table
- casing
- turntable
- process object
- configuration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000007246 mechanism Effects 0.000 claims abstract description 90
- 238000000034 method Methods 0.000 claims abstract description 88
- 230000008569 process Effects 0.000 claims abstract description 88
- 230000000630 rising effect Effects 0.000 claims abstract 2
- 238000007689 inspection Methods 0.000 claims description 74
- 230000003028 elevating effect Effects 0.000 claims description 18
- 230000007423 decrease Effects 0.000 claims description 10
- 241000406668 Loxodonta cyclotis Species 0.000 claims description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 104
- 238000004519 manufacturing process Methods 0.000 description 9
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 5
- 230000014759 maintenance of location Effects 0.000 description 5
- 230000003321 amplification Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000002463 transducing effect Effects 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016-088134 | 2016-04-26 | ||
| JP2016088134 | 2016-04-26 | ||
| JP2016145137A JP2017198959A (ja) | 2016-04-26 | 2016-07-25 | 処理装置 |
| JP2016-145137 | 2016-07-25 | ||
| PCT/JP2017/009138 WO2017187803A1 (ja) | 2016-04-26 | 2017-03-08 | 処理装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107850797A true CN107850797A (zh) | 2018-03-27 |
Family
ID=60239273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201780001995.5A Withdrawn CN107850797A (zh) | 2016-04-26 | 2017-03-08 | 处理装置 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2017198959A (ja) |
| CN (1) | CN107850797A (ja) |
| TW (1) | TW201738990A (ja) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019053162A (ja) * | 2017-09-14 | 2019-04-04 | 日本電産サンキョー株式会社 | 検査装置 |
| JP2019053161A (ja) * | 2017-09-14 | 2019-04-04 | 日本電産サンキョー株式会社 | 検査装置 |
| CN109580621B (zh) * | 2018-12-05 | 2021-09-03 | 贵州大学 | 一种可升降式烟叶采集箱 |
| US20230017599A1 (en) * | 2019-12-24 | 2023-01-19 | Hitachi High-Tech Corporation | Substrate Inspection Device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1485558A (zh) * | 2002-09-24 | 2004-03-31 | 协真工程株式会社 | 加工装置的门开闭装置 |
| JP2009058630A (ja) * | 2007-08-30 | 2009-03-19 | Ulvac Japan Ltd | 光照射装置 |
| CN101945727A (zh) * | 2008-02-20 | 2011-01-12 | 平田机工株式会社 | 生产装置 |
| CN104102029A (zh) * | 2013-04-01 | 2014-10-15 | 日本麦可罗尼克斯股份有限公司 | 液晶面板检查装置 |
| CN104220924A (zh) * | 2013-04-11 | 2014-12-17 | 韩东熙 | 面板附着装置 |
-
2016
- 2016-07-25 JP JP2016145137A patent/JP2017198959A/ja not_active Withdrawn
-
2017
- 2017-03-08 CN CN201780001995.5A patent/CN107850797A/zh not_active Withdrawn
- 2017-03-30 TW TW106110762A patent/TW201738990A/zh unknown
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1485558A (zh) * | 2002-09-24 | 2004-03-31 | 协真工程株式会社 | 加工装置的门开闭装置 |
| JP2009058630A (ja) * | 2007-08-30 | 2009-03-19 | Ulvac Japan Ltd | 光照射装置 |
| CN101945727A (zh) * | 2008-02-20 | 2011-01-12 | 平田机工株式会社 | 生产装置 |
| CN104102029A (zh) * | 2013-04-01 | 2014-10-15 | 日本麦可罗尼克斯股份有限公司 | 液晶面板检查装置 |
| CN104220924A (zh) * | 2013-04-11 | 2014-12-17 | 韩东熙 | 面板附着装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2017198959A (ja) | 2017-11-02 |
| TW201738990A (zh) | 2017-11-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20180327 |