CN107535055B - Substrate working apparatus and method for measuring residual amount of viscous fluid in substrate working apparatus - Google Patents

Abstract

The substrate working device comprises: a scraper part (82) for scraping and flattening the viscous fluid (L) transferred to the transfer object (31); an imaging unit (43) that images a predetermined region including a portion where the viscous fluid (Lb) scraped into a block by the scraper unit (82) is present and a portion where the viscous fluid (Lb) is not present; and a control unit (9) that acquires the remaining amount of the viscous fluid (Lb) on the basis of at least one of the size of a portion where the viscous fluid (Lb) is present and the size of a portion where the viscous fluid (Lb) is not present in a captured image of the predetermined region captured by the imaging unit (43).

Description

Substrate working apparatus and method for measuring residual amount of viscous fluid in substrate working apparatus

Technical Field

The present invention relates to a substrate working apparatus and a method for measuring the residual amount of a viscous fluid in the substrate working apparatus, and more particularly to a substrate working apparatus including a squeegee portion and a method for measuring the residual amount of a viscous fluid in the substrate working apparatus.

Background

Conventionally, a substrate working apparatus including a squeegee portion is known. Such a substrate working apparatus is disclosed in, for example, Korean laid-open patent publication No. 10-2013-0023603.

In the korean laid-open patent publication No. 10-2013-0023603, there is disclosed a chip mounter (substrate working apparatus) as follows: the flux state detection device is provided with: a flux plate having an identification mark on an upper surface thereof; a flux container (scraper part) provided on the flux plate for retaining flux; and an imaging unit that images the identification mark from above with the flux in the flux container interposed therebetween. In the chip mounter, the remaining amount of the flux is recognized in stages based on the result of imaging by the imaging unit.

Documents of the prior art

Patent document

Patent document 1: korean laid-open patent No. 10-2013-0023603

Disclosure of Invention

Problems to be solved by the invention

However, in the chip mounter of the above-mentioned korean laid-open patent publication No. 10-2013-0023603, the remaining amount of the flux is recognized only in stages, and there is a problem that the remaining amount of the viscous fluid such as the flux cannot be measured accurately (quantitatively). Further, in the chip mounter of the above-mentioned korean laid-open patent publication No. 10-2013-0023603, since the identification mark is imaged through the solder, there is also a problem that it is difficult to measure the remaining amount in the colored solder (viscous fluid).

The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a substrate working apparatus and a method for measuring a residual amount of viscous fluid in the substrate working apparatus, which can accurately measure a residual amount of viscous fluid and can measure a residual amount even in a colored viscous fluid.

Means for solving the problems

A substrate working apparatus according to a first aspect of the present invention includes: a scraper part for scraping and flattening the viscous fluid transferred to the transfer object; an imaging unit that images a predetermined region including a portion where the viscous fluid scraped into a block by the scraper portion exists and a portion where the viscous fluid does not exist; and a control unit that obtains the remaining amount of the viscous fluid based on at least one of the size of a portion where the viscous fluid exists and the size of a portion where the viscous fluid does not exist in a captured image of a predetermined region captured by the imaging unit during formation of the viscous fluid in a lump form, wherein the squeegee unit has a frame shape capable of storing the viscous fluid, and the imaging unit is configured to image, from above, the predetermined region in the interior of the squeegee unit including the portion where the viscous fluid in a lump form exists and the portion where the viscous fluid does not exist in the interior of the frame shape having the viscous fluid stored therein.

In the substrate working apparatus according to the first aspect of the present invention, the control unit is provided as described above, and the remaining amount of the viscous fluid is acquired based on at least one of the size of the portion where the viscous fluid exists and the size of the portion where the viscous fluid does not exist in the captured image of the predetermined area captured by the imaging unit. Thus, the residual amount of the viscous fluid can be accurately (quantitatively) measured by utilizing the property that the size of the portion where the viscous fluid is present is in a block shape and the size of the portion where the viscous fluid is not present is related to the residual amount of the viscous fluid. Further, since a predetermined area including a portion where the viscous fluid is present in a block shape and a portion where the viscous fluid is not present is photographed, and the remaining amount is obtained based on a photographed image of the predetermined area, the remaining amount can be easily measured even for a colored viscous fluid, unlike a configuration in which an identification mark is photographed through a viscous fluid. The squeegee portion has a frame shape capable of storing the viscous fluid, and the imaging portion is configured to image, from above, a predetermined region in the interior of the squeegee portion including a portion in which the viscous fluid is present in a lump and a portion in which the viscous fluid is not present in the interior of the squeegee portion having the frame shape capable of storing the viscous fluid. This makes it possible to easily form the viscous fluid into a block shape by the blade portion having the frame shape. As a result, a portion where the viscous fluid is present in a block shape and a portion where the viscous fluid is not present can be easily formed and imaged by the imaging unit.

In the substrate working apparatus according to the first aspect, the control unit is preferably configured to acquire at least one of an area of a portion of the predetermined region where the viscous fluid exists and an area of a portion where the viscous fluid does not exist based on the captured image of the predetermined region, and to acquire the remaining amount of the viscous fluid based on the acquired at least one of the area of the portion where the viscous fluid exists and the area of the portion where the viscous fluid does not exist. With such a configuration, for example, unlike the case where the remaining amount of the viscous fluid is obtained based on the measurement result of the point by the optical sensor, since the remaining amount of the viscous fluid is obtained based on the area, even if there is a slight difference in the shape of the viscous fluid that is in a lump form by the scraping operation of the scraper portion, the remaining amount of the viscous fluid can be measured stably and accurately (quantitatively).

In this case, it is preferable that the control unit is configured to acquire a binarized image of the predetermined region by binarizing the captured image of the predetermined region, and acquire at least one of an area of a portion of the predetermined region where the viscous fluid is present and an area of a portion where the viscous fluid is not present, based on the acquired binarized image. With this configuration, at least one of the area of the portion where the viscous fluid exists and the area of the portion where the viscous fluid does not exist can be easily obtained.

In the substrate working apparatus according to the first aspect, it is preferable that the substrate working apparatus further includes a viscous fluid supply unit configured to supply a viscous fluid, and the control unit is configured to control the supply of the viscous fluid from the viscous fluid supply unit when it is determined that the obtained remaining amount of the viscous fluid is equal to or less than a predetermined threshold value. With this configuration, since the viscous fluid can be supplied based on the residual amount of the viscous fluid that is accurately measured, the viscous fluid can be supplied in an appropriate amount. As a result, unlike the case where the viscous fluid is additionally supplied in an amount exceeding the required amount in order to avoid the shortage of the viscous fluid, the increase in the amount of the viscous fluid to be used can be suppressed. Further, since the viscous fluid is automatically supplied, it is possible to suppress the occurrence of a defect that the viscous fluid is insufficient and the viscous fluid cannot be sufficiently transferred to the transfer target.

In the substrate working apparatus according to the first aspect, it is preferable that the substrate working apparatus further includes a mounting head that mounts the component on the substrate and is relatively movable with respect to the squeegee portion, and the imaging portion is configured to relatively move with respect to the squeegee portion together with the mounting head. With this configuration, since the mounting head and the imaging unit can be moved by the common moving mechanism, the apparatus configuration for measuring the remaining amount of the viscous fluid can be suppressed from being complicated.

In this case, it is preferable that the imaging unit includes a substrate recognition imaging unit that images a substrate recognition mark for recognizing the substrate. With this configuration, since the substrate recognition imaging unit can be used as the imaging unit for measuring the remaining amount of the viscous fluid, the apparatus configuration for measuring the remaining amount of the viscous fluid can be further suppressed from being complicated.

In the substrate working apparatus according to the first aspect, it is preferable that the transfer target includes a component mounted on the substrate, the substrate working apparatus further includes a coating film forming plate that forms a coating film of the viscous fluid transferred to the component, the scraper portion is configured to move relative to the coating film forming plate to scrape and flatten the viscous fluid and form the coating film of the viscous fluid transferred to the component on the coating film forming plate, and the imaging portion is configured to image a predetermined region including a portion where the viscous fluid is present in a lump shape and a portion where the viscous fluid is not present on the coating film forming plate from above the coating film forming plate. With this configuration, in the configuration in which the coating film of the viscous fluid formed on the coating film forming plate is transferred to the element, the remaining amount of the viscous fluid can be accurately (quantitatively) and reliably measured.

In the substrate working apparatus according to the first aspect, it is preferable that the transfer target includes a substrate on which a component is mounted, the substrate working apparatus further includes a mask having a print pattern for transferring the viscous fluid to the substrate by printing, the squeegee portion is configured to move on the mask to scrape and flatten the viscous fluid and transfer the viscous fluid on the mask to the substrate via the print pattern, and the imaging portion is configured to image a predetermined region including a portion where the viscous fluid in a block shape exists and a portion where the viscous fluid does not exist on the mask from above the mask. With this configuration, in the configuration in which the viscous fluid on the mask such as solder is transferred onto the substrate via the print pattern, the remaining amount of the viscous fluid such as solder can be accurately (quantitatively) and reliably measured.

In the substrate working apparatus according to the first aspect, it is preferable that the substrate working apparatus further includes an illumination unit capable of irradiating the predetermined region with light, and the illumination unit is configured to be capable of changing at least one of an intensity of light irradiated to the predetermined region, an angle of light irradiated to the predetermined region, and a wavelength of light irradiated to the predetermined region, depending on a type of the viscous fluid. With this configuration, since the predetermined region can be imaged by appropriate illumination according to the type of the viscous fluid, it is possible to easily distinguish and distinguish between a portion where the viscous fluid in a lump is present and a portion where the viscous fluid is not present. As a result, the remaining amount of the viscous fluid can be measured more accurately.

A method for measuring a residual amount of a viscous fluid in a substrate working apparatus according to a second aspect of the present invention includes the steps of: scraping and leveling the viscous fluid transferred to the transfer object by a scraper part having a frame shape capable of storing the viscous fluid; a predetermined region of the inside of the blade portion including a portion where the viscous fluid that becomes a lump and a portion where the viscous fluid does not exist in the inside of the blade portion having a frame shape that retains the viscous fluid, which is scraped by the blade portion from above by the imaging portion during the formation of the viscous fluid that becomes a lump; and acquiring, by the control unit, the remaining amount of the viscous fluid based on at least one of the size of the portion where the viscous fluid exists and the size of the portion where the viscous fluid does not exist in the captured image of the predetermined region captured by the imaging unit.

In the method for measuring the residual amount of a viscous fluid in a substrate working apparatus according to a second aspect of the present invention, as described above, the following steps are provided: the remaining amount of the viscous fluid is acquired by the control unit based on at least one of the size of the portion where the viscous fluid exists and the size of the portion where the viscous fluid does not exist in the captured image of the predetermined region captured by the imaging unit. Accordingly, as in the case of the substrate working apparatus according to the first aspect, the remaining amount of the viscous fluid can be accurately measured, and the remaining amount can be measured even for a colored viscous fluid.

Effects of the invention

According to the present invention, as described above, it is possible to provide a substrate working apparatus and a method for measuring the remaining amount of viscous fluid in the substrate working apparatus, which can accurately measure the remaining amount of viscous fluid and can measure the remaining amount of viscous fluid even in the case of colored viscous fluid.

Drawings

Fig. 1 is a diagram showing an overall configuration of a substrate working apparatus according to a first embodiment of the present invention.

Fig. 2 is a side view showing the overall configuration of a transfer unit of a substrate working apparatus according to a first embodiment of the present invention.

Fig. 3 is a plan view of a transfer unit of the substrate working apparatus according to the first embodiment of the present invention.

Fig. 4 is a diagram for explaining a captured image of a predetermined area and a captured image of a predetermined area after binarization processing in the substrate working apparatus according to the first embodiment of the present invention.

Fig. 5 is a diagram showing a relationship between the remaining amount of the viscous fluid and the area ratio of the portion where the viscous fluid exists in the predetermined region in the substrate working apparatus according to the first embodiment of the present invention.

Fig. 6 is a diagram showing an example of a captured image of a predetermined area in the case where illumination is provided in the substrate working apparatus according to the first embodiment of the present invention.

Fig. 7 is a diagram showing an example of a captured image of a predetermined area in the case where the illumination is changed in the substrate working apparatus according to the first embodiment of the present invention.

Fig. 8 is a schematic diagram showing the wiping operation (a), the bulk fluid imaging operation (B), and the viscous fluid transfer operation (C) of the transfer unit.

Fig. 9 is a flowchart for explaining the automatic viscous fluid supply process of the substrate working apparatus according to the first embodiment of the present invention.

Fig. 10 is a diagram showing an overall configuration of a substrate working apparatus according to a second embodiment of the present invention.

Detailed Description

Hereinafter, embodiments embodying the present invention will be described based on the drawings.

[ first embodiment ]

(Structure of substrate working apparatus)

First, the configuration of a substrate working apparatus 100 according to a first embodiment of the present invention will be described with reference to fig. 1 to 8. In the first embodiment, an example in which the present invention is applied to a component mounting apparatus that mounts a component 31 on a substrate P will be described.

As shown in fig. 1, the substrate working apparatus 100 is a component mounting apparatus that conveys a substrate P from the X1 direction side to the X2 direction side by a pair of conveyors 2 and mounts a component 31 on the substrate P at a predetermined mounting working position M. The element 31 is an example of the "transfer target" according to the embodiment.

The substrate working apparatus 100 includes a base 1, a pair of conveyors 2, a component supply unit 3, a head unit 4, a support portion 5, a pair of rail portions 6, a component recognition camera 7, a transfer unit 8, and a control unit 9.

The pair of conveyors 2 is provided on the base 1 and configured to convey the substrate P in the X direction. The pair of conveyors 2 is configured to hold the substrate P being conveyed in a state of being stopped at the mounting work position M. The pair of conveyors 2 are arranged parallel to each other with a predetermined distance therebetween in the Y direction, and the distance therebetween in the Y direction can be adjusted in accordance with the size of the substrate P.

The component supply units 3 are disposed at a plurality of positions on both outer sides (Y1 side and Y2 side) of the pair of conveyors 2. In addition, a plurality of tape feeders 3a are mounted on the component supply unit 3.

The tape feeder 3a holds a reel (not shown) around which a tape holding a plurality of components 31 at predetermined intervals is wound. The tape feeder 3a is configured to feed the component 31 from the tip of the tape feeder 3a by rotating a reel and feeding the tape holding the component 31. Here, the element 31 is a concept of an electronic element such as an IC, a transistor, a capacitor, and a resistor.

The head unit 4 is disposed above the pair of conveyors 2 and the component supply unit 3, and includes a plurality of mounting heads 42 each including a suction nozzle 41 at a lower end thereof, and a board recognition camera 43. The substrate recognition camera 43 is an example of the "imaging unit" and the "imaging unit for substrate recognition" according to the present invention.

The suction nozzle 41 is configured to suck and hold the component 31 supplied from the tape feeder 3a by a negative pressure generated at a tip portion of the suction nozzle 41 by a negative pressure generator (not shown), and to mount (mount) the component on the substrate P.

The substrate recognition camera 43 is configured to capture an image of the reference mark F for recognizing the position of the substrate P. By imaging and recognizing the position of the reference mark F, the mounting position of the component 31 on the substrate P can be accurately obtained. The board recognition camera 43 is provided with a plurality of illumination units 43a (see fig. 2). The illumination unit 43a is configured to be able to irradiate the reference mark F and the predetermined area a (see fig. 3) with light when the reference mark F and the predetermined area a (described later) are imaged by the substrate recognition camera 43. The reference mark F is an example of the "substrate identification mark" according to the present invention.

The support 5 includes a motor 51. The support portion 5 is configured to move the head unit 4 in the X direction along the support portion 5 by driving the motor 51. In addition, both end portions of the support portion 5 are supported by a pair of rail portions 6.

The pair of guide rail portions 6 are fixed to the base 1. The guide rail portion 6 on the X1 side includes a motor 61. The rail portions 6 are configured such that the support portion 5 is moved in the Y direction orthogonal to the X direction along the pair of rail portions 6 by driving the motor 61. The head unit 4 is movable in the X direction along the support 5, and the support 5 is movable in the Y direction along the rail portion 6, so that the head unit 4 is movable in the XY direction.

The component recognition camera 7 is fixed on the upper surface of the base 1. The component recognition camera 7 is configured to take an image of the component 31 sucked by the suction nozzle 41 of the mounting head 42 from the lower side (both sides Z) in order to recognize the suction state (suction posture) of the component 31 before the component 31 is mounted. This makes it possible to obtain the suction state of the component 31 sucked by the suction nozzle 41 of the mounting head 42.

The transfer unit 8 is disposed on the Y2 side of the pair of conveyors 2, and is detachably attached to the substrate working apparatus 100. The transfer unit 8 is configured to form a coating film La of a viscous fluid L to be described later for transferring to the element 31.

As shown in fig. 2 and 3, the transfer unit 8 includes a viscous fluid supply section 81, a viscous fluid container 82, a coating film forming plate 83, and a plate drive mechanism 84. The viscous fluid container 82 is an example of the "scraper portion" of the present invention. In fig. 2 and 8, for the sake of easy understanding, both the mounting head 42 and the board recognition camera 43 are shown in the same drawing. Therefore, the positional relationship between both in fig. 2 and 8 does not necessarily correspond to the positional relationship between both in fig. 1.

The viscous fluid supply unit 81 is configured to supply the viscous fluid L to the viscous fluid container 82. The viscous fluid supply unit 81 includes a main body 81a, a piston 81b, a lid 81c, and a supply passage 81 d.

The body 81a has a hollow substantially cylindrical shape, and is configured to be able to retain therein a viscous fluid L (shown by hatching) such as flux or solder. The piston 81b is disposed inside the body 81a and is fitted to the inner surface of the body 81a so as to be slidable in the vertical direction (Z direction). The viscous fluid L is filled (retained) in the internal space of the body portion 81a defined by the body portion 81a and the piston portion 81 b. The lid portion 81c is disposed at the upper end of the body portion 81a, and closes the body portion 81 a. In addition, one end of the air hose H is connected to the lid portion 81c in order to supply gas (air) of a predetermined pressure into the main body portion 81 a. The other end of the air hose H is connected to the valve 91. The valve 91 is connected to a pneumatic source, not shown, and is configured to be capable of switching between an open state in which gas at a predetermined pressure is supplied into the main body 81a and a closed state in which gas is not supplied into the main body 81 a. The supply passage 81d is disposed at the lower end of the body 81a and connected to the side surface of the viscous fluid container 82.

The viscous fluid supply unit 81 is configured to supply gas of a predetermined pressure from the air hose H into the main body 81a through the lid 81c when the valve 91 is in the "open state" and move the piston 81b downward (in the Z2 direction), thereby feeding (supplying) the viscous fluid L filled in the main body 81a to the viscous fluid container 82 through the supply path 81 d. In addition, the viscous fluid supply unit 81 is configured such that, when the valve 91 is in the "closed state", the piston 81b does not move downward (in the direction Z2), and therefore the viscous fluid L filled in the main body 81a is not pressure-fed (supplied) to the viscous fluid container 82 via the supply path 81 d.

The viscous fluid container 82 has a hollow frame shape with an upper and lower opening, and is disposed on the coating film forming plate 83, so that the viscous fluid L from the viscous fluid supply unit 81 can be stored therein. The viscous fluid container 82 is fixed by a fixing mechanism, not shown, so as not to move. The viscous fluid container 82 is configured to be biased toward the coating film forming plate 83 by a biasing mechanism, not shown. Since the frame-shaped viscous fluid container 82 is opened at the upper portion, the substrate recognition camera 43 can photograph the internal space of the viscous fluid container 82 from above.

The coating film forming plate 83 has a substantially rectangular shape in plan view (as viewed from the Z direction), and is configured to be movable in the longitudinal direction (the driving direction in fig. 2 and 3) by a plate driving mechanism 84. In addition, in order to form the coating La of the viscous fluid L on the upper surface 83a of the coating forming plate 83, a coating forming portion 83b is provided which is recessed downward from the upper surface 83a by the film thickness t of the coating La.

In the viscous fluid container 82, the coating film forming plate 83 is moved in the driving direction by the plate driving mechanism 84 in a state where the viscous fluid L is stored therein, and the viscous fluid container 82 is moved relative to the coating film forming plate 83 to scrape and level the viscous fluid L (wiping). Thus, the viscous fluid container 82 is configured to form the coating La of the viscous fluid L transferred to the element 31 in the coating film forming portion 83b of the coating film forming plate 83.

The plate driving mechanism 84 can be a driving mechanism including, for example, a ball screw, a ball nut, a motor, and the like, and can move the coating film forming plate 83 in the driving direction.

The control unit 9 includes a CPU, and is configured to control the overall operation of the substrate working apparatus 100 based on the mounting operation of the head unit 4, the wiping operation of the transfer unit 8, which will be described later, the bulk fluid imaging operation, the viscous fluid transfer operation, and the like.

(obtaining of residual amount of viscous fluid)

Next, a method of acquiring the remaining amount of the viscous fluid L remaining in the viscous fluid container 82 will be described with reference to fig. 3 to 5.

When the sweeping operation is performed, the viscous fluid L in the viscous fluid container 82 rolls (rolls) to form a block (Lb) having a substantially cylindrical cross section. As shown in fig. 2 and 3, the substrate recognition camera 43 (see fig. 1) is configured to photograph a predetermined region a including a portion where the viscous fluid L (lb) scraped into a block by the viscous fluid container 82 of the transfer unit 8 exists and a portion where the viscous fluid L (lb) does not exist, in order to measure the remaining amount of the viscous fluid L remaining in the viscous fluid container 82.

At this time, the substrate recognition camera 43 is configured to photograph, from above the coating film forming plate 83 and the viscous fluid L (lb) in a block shape, a predetermined region a including a portion where the viscous fluid L (lb) in a block shape exists and a portion where the viscous fluid L (lb) does not exist in the viscous fluid container 82 in a frame shape in which the viscous fluid L remains.

In the first embodiment, as shown in fig. 4 and 5, the controller 9 is configured to obtain the remaining amount of the viscous fluid L remaining in the viscous fluid container 82 based on the size of the portion C1 where the viscous fluid L (lb) is present and the size of the portion C2 where the viscous fluid L (lb) is not present in the captured image B1 of the predetermined area a captured by the substrate recognition camera 43.

Specifically, the controller 9 is configured to acquire the area of the portion C1 in which the viscous fluid L is present and the area of the portion C2 in which the viscous fluid L is not present in the predetermined region a based on the captured image B1 of the predetermined region a. The controller 9 is configured to acquire the remaining amount of the viscous fluid L based on the acquired area of the portion C1 where the viscous fluid L is present and the acquired area of the portion C2 where the viscous fluid L is not present in the predetermined region a.

In the first embodiment, the control unit 9 is configured to acquire the binarized image B2 of the predetermined region a by binarizing the captured image B1 of the predetermined region a, and acquire the area of the portion C1 where the viscous fluid L is present and the area of the portion C2 where the viscous fluid L is not present in the predetermined region a based on the acquired binarized image B2. These points will be described in detail below.

As shown in fig. 4, first, the control section 9 acquires a captured image B1 of the predetermined area a captured by the board recognition camera 43 (an image before binarization processing shown on the left side of fig. 4). At this time, since light is diffusely reflected by the viscous fluid l (lb) in the portion C1 where the viscous fluid l (lb) is present in the captured image B1 of the predetermined area a, a dark image is obtained. On the other hand, in the portion C2 where the viscous fluid l (lb) is not present, light is regularly reflected by the upper surface 83a of the metal coating film forming plate 83, and thus a bright image is obtained. Thereby, in the captured image B1 of the predetermined area a, the portion C1 in the captured image where the viscous fluid l (lb) is present and the portion C2 in the captured image where the viscous fluid l (lb) is not present can be distinguished and identified.

Then, the control unit 9 performs binarization processing for converting the acquired captured image B1 of the predetermined area a into an image of two gradations of white and black. Thereby, the captured image B1 of the predetermined area a is converted into a captured image (binarized image, binarized image shown on the right side of fig. 4) B2 of the predetermined area a, which indicates by black a portion C1 (darker image portion) of the predetermined area a where the viscous fluid l (lb) is present and indicates by white a portion C2 (lighter portion) of the predetermined area a where the viscous fluid l (lb) is not present.

Then, based on the acquired binarized image B2, the control unit 9 acquires the area of the portion C1 in the predetermined region a where the viscous fluid l (lb) is present (that is, the area of the black portion) and the area of the portion C2 in the predetermined region a where the viscous fluid l (lb) is not present (that is, the area of the white portion). Specifically, the area of the portion C1 in the predetermined region a in which the viscous fluid l (lb) is present is obtained based on the number of pixels of the black portion in the binarized image B2, and the area of the portion C2 in the predetermined region a in which the viscous fluid l (lb) is not present is obtained based on the number of pixels of the white portion in the binarized image B2.

Based on the area of the portion C1 in which the obtained viscous fluid l (lb) is present and the area of the portion C2 in which the viscous fluid l (lb) is not present, the area ratio (X%) of the portion C1 in which the viscous fluid l (lb) is present to the predetermined region a and the area ratio (Y) of the portion C2 in which the viscous fluid l (lb) is not present to the predetermined region a are obtained by the controller 9.

Here, as shown in fig. 5, there is a correlation between the area ratio of the portion C1 in the predetermined region a where the viscous fluid L (lb) exists and the remaining amount of the viscous fluid L inside the viscous fluid container 82. Therefore, by obtaining the area ratio of the portion C1 where the viscous fluid L (lb) exists in the predetermined region a as described above, the remaining amount of the viscous fluid L remaining in the viscous fluid container 82 can be obtained. Since there is also a correlation between the area ratio of the portion C2 where the viscous fluid L (lb) does not exist in the predetermined region a and the remaining amount of the viscous fluid L inside the viscous fluid container 82, the remaining amount of the viscous fluid L remaining in the viscous fluid container 82 can be obtained by obtaining the area ratio of the portion C2 where the viscous fluid L (lb) does not exist in the predetermined region a.

Thus, the control unit 9 is configured to acquire the remaining amount of the viscous fluid L remaining in the viscous fluid container 82 from the acquired area ratio of the portion where the viscous fluid L (lb) exists, based on the information on the correlation between the area ratio of the portion where the viscous fluid L (lb) exists and the remaining amount of the viscous fluid L remaining in the viscous fluid container 82 in the preset predetermined region a.

In the first embodiment, the control unit 9 is configured to determine whether or not the acquired remaining amount of the viscous fluid L is equal to or less than a predetermined threshold value Th (see fig. 5) for determining whether or not to supply the viscous fluid L. The predetermined threshold Th is set in advance by the user based on the graph shown in fig. 5.

The control unit 9 is configured to control the viscous fluid supply unit 81 to supply a predetermined amount of the viscous fluid L from the viscous fluid container 82 when determining that the remaining amount of the viscous fluid L is equal to or less than the predetermined threshold Th.

The control unit 9 is configured to perform control not to supply the viscous fluid L from the viscous fluid supply unit 81 to the viscous fluid container 82 when determining that the remaining amount of the viscous fluid L is larger than the predetermined threshold value Th.

(construction of Lighting part)

In the first embodiment, the illumination unit 43a (see fig. 2) is configured to be able to change the intensity of light to be irradiated to the predetermined area a, the angle of light to be irradiated to the predetermined area a, and the wavelength of light to be irradiated to the predetermined area a, in accordance with the type of the viscous fluid L.

Specifically, the illumination section 43a includes: an inner ring illumination unit which is arranged in a wheel shape around the lens of the substrate recognition camera 43 and which can irradiate visible light; an outer ring illumination section which is arranged in a wheel shape outside the inner ring illumination section and which can irradiate visible light; and an infrared illumination unit capable of irradiating infrared light. The illumination unit 43a is configured to be capable of independently emitting light from each of the inner ring illumination unit, the outer ring illumination unit, and the infrared illumination unit. The inner ring illumination unit, the outer ring illumination unit, and the infrared illumination unit are configured to be capable of irradiating light onto the predetermined area a at different angles from each other.

Accordingly, the illumination unit 43a is configured to be able to change the intensity of light and the angle of light irradiated to the predetermined area a by changing the number of illumination units that emit light among the inner ring illumination unit, the outer ring illumination unit, and the infrared illumination unit. The illumination unit 43a is configured to emit visible light by emitting only the inner ring illumination unit and/or the outer ring illumination unit, and to emit infrared light by emitting only the infrared illumination unit, thereby changing the wavelength of light emitted to the predetermined region a.

Fig. 6 shows an image of a predetermined area a (binary-processed image) when illumination by the illumination unit 43a is performed (when light is irradiated from three of the inner ring illumination unit, the outer ring illumination unit, and the infrared illumination unit). As shown in fig. 6, when solder is used as the viscous fluid, regardless of the amount of the remaining viscous fluid L, the portion where the viscous fluid L (lb) is present is indicated by black, and the portion where the viscous fluid L (lb) is not present is indicated by white, so that the two can be distinguished and identified.

On the other hand, when the flux is used as the viscous fluid, the two can be distinguished and recognized when the remaining amount of the viscous fluid L is small, but when the remaining amount of the viscous fluid L is large, the white color indicates the portion where the viscous fluid L (lb) is present, and thus it may be difficult to distinguish and recognize the two.

Fig. 7 shows a captured image of the predetermined area a (captured image after binarization processing) in the case where the illumination by the illumination unit 43a is changed (the case where light is irradiated from both the inner ring illumination unit and the infrared illumination unit). As shown in fig. 7, in the case of the illumination change by the illumination unit 43a, even if flux is used as the viscous fluid, regardless of the remaining amount of the viscous fluid L, the portion where the viscous fluid L (lb) is present is indicated by black, and the portion where the viscous fluid L (lb) is not present is indicated by white, so that the two can be distinguished and identified. In this way, the illumination unit 43a is configured to change the intensity of light irradiated to the predetermined area a, the angle of light irradiated to the predetermined area a, and the wavelength of light irradiated to the predetermined area a, in accordance with the type of the viscous fluid L.

(action associated with transfer Unit)

Next, referring to fig. 8, the wiping operation, the bulk fluid imaging operation, and the viscous fluid transfer operation will be described as operations related to the transfer unit.

As shown in fig. 8(a), before the viscous fluid L is transferred to the element 31, the coating film forming plate 83 is reciprocated in the driving direction by the plate driving mechanism 84, and the coating film forming portion 83b of the coating film forming plate 83 is filled with the viscous fluid L stored in the viscous fluid container 82. At the same time, the viscous fluid L is scraped off by the viscous fluid container 82. As a result, as shown in fig. 8(B), a coating film La of the viscous fluid L is formed in the coating film forming portion 83B of the coating film forming plate 83 at a thickness t suitable for the transfer of the viscous fluid L to the element 31. This wiping operation is performed each time the viscous fluid L is transferred to the element 31.

Further, as shown in fig. 8(B), since a rolling-in phenomenon called rolling of the viscous fluid L occurs in the viscous fluid container 82 during the wiping operation, the viscous fluid L (lb) in a block shape is formed in the inside of the viscous fluid container 82 after the wiping operation. During the formation of the viscous fluid l (lb) in a block shape, a predetermined region a (see fig. 3) including a portion where the viscous fluid l (lb) in a block shape is present and a portion where the viscous fluid l (lb) is not present is imaged by the substrate recognition camera 43 of the head unit 4. In this case, from the viewpoint of accurately measuring the remaining amount of the viscous fluid L in the viscous fluid container 82, it is preferable to perform imaging by the substrate recognition camera 43 before the shape of the viscous fluid L (lb) in a block shape is deformed. Thus, it is preferable that the substrate recognition camera 43 be kept on standby at a predetermined position for imaging the predetermined area a before the end of the sweeping operation.

Then, as shown in fig. 8(C), the mounting head 42 of the head unit 4 is moved up and down to transfer the film-coated viscous fluid l (la) formed on the coating film forming plate 83 to the component 31 sucked by the mounting head 42. Further, fig. 8 shows an example in which the wiping operation for forming the coating film La of the viscous fluid L transferred to the element 31 is performed in accordance with the viscous fluid transfer operation, but the wiping operation is not limited to this, and the wiping operation for imaging the viscous fluid L that is in a lump may be performed in accordance with the lump fluid imaging operation.

(treatment for automatic supply of viscous fluid)

Next, referring to fig. 9, the automatic viscous fluid supply process of the transfer unit 8 in the substrate working apparatus 100 will be described based on a flowchart. The operation of the substrate working apparatus 100 is performed by the control unit 9.

First, as shown in fig. 9, in step S1, the coating film forming plate 83 is moved by the plate driving mechanism 84, and the viscous fluid L is wiped by the viscous fluid container 82.

Then, in step S2, it is determined whether or not the timing is a timing at which the board recognition camera 43 captures the image of the predetermined area a. As the imaging timing, for example, a case where a sweep operation is performed a predetermined number of times from the last block fluid imaging operation, a case where a predetermined time has elapsed from the last block fluid imaging operation, a case where a viscous fluid supply operation in step S6 described later is performed, or the like can be cited.

If it is determined in step S2 that the timing is not the photographing timing, the flow proceeds to step S5, and the viscous fluid transfer operation is performed. After the viscous fluid transfer operation is performed, the component 31 sucked by the mounting head 42 is mounted on the substrate P.

If it is determined in step S2 that the shooting timing is present, the process proceeds to step S3.

Then, in step S3, the substrate recognition camera 43 takes an image of the predetermined area a including a portion where the viscous fluid l (lb) in a block shape exists and a portion where the viscous fluid l (lb) does not exist.

Then, in step S4, it is determined whether or not the remaining amount of the viscous fluid L is equal to or less than a predetermined threshold Th based on the captured image of the substrate recognition camera 43. When it is determined that the remaining amount of the viscous fluid L is not equal to or less than the predetermined threshold value Th, the supply (replenishment) of the viscous fluid L to the viscous fluid tank 82 is not necessary, and therefore the flow proceeds to step S5, and the viscous fluid transfer operation is performed without supplying the viscous fluid L to the viscous fluid tank 82.

In addition, when it is determined in step S4 that the remaining amount of the viscous fluid L is equal to or less than the predetermined threshold Th, the process proceeds to step S6, in consideration of the necessity of supplying (replenishing) the viscous fluid L to the viscous fluid container 82.

Then, in step S6, a viscous fluid supply operation is performed to supply a predetermined amount of the viscous fluid L from the viscous fluid supply unit 81 to the viscous fluid container 82. Thus, when the remaining amount of the viscous fluid L is equal to or less than the predetermined threshold Th, the viscous fluid L is automatically supplied (replenished) to the viscous fluid container 82.

When the remaining amount of the viscous fluid L is equal to or less than the predetermined threshold value Th, the coating film of the viscous fluid L may not be normally formed on the coating film forming plate 83 by the previous wiping operation, and therefore, the process returns to step S1 and the wiping operation is performed again. The above operation is performed in sequence for each component 31 sucked by the mounting head 42.

(Effect of the first embodiment)

In the first embodiment, the following effects can be obtained.

In the first embodiment, as described above, the controller 9 is provided, and the controller 9 acquires the remaining amount of the viscous fluid L based on the size of the portion C1 in which the viscous fluid L is present and the size of the portion C2 in which the viscous fluid L is not present in the captured image B1 of the predetermined area a captured by the substrate recognition camera 43. Accordingly, the remaining amount of the viscous fluid L can be accurately (quantitatively) measured by utilizing the property that the size of the portion C1 where the viscous fluid L (lb) is present in a block shape and the size of the portion C2 where the viscous fluid L is not present are related to the remaining amount of the viscous fluid L. Further, since the predetermined area a including the portion C1 where the viscous fluid L (lb) is present in a block shape and the portion C2 where the viscous fluid L is not present is photographed, and the remaining amount is obtained based on the photographed image B1 of the predetermined area a, the remaining amount can be easily measured even for a colored viscous fluid L, unlike the configuration in which the identification mark is photographed through the viscous fluid L.

In the first embodiment, the controller 9 is configured to acquire the area of the portion C1 in which the viscous fluid L is present and the area of the portion C2 in which the viscous fluid L is not present in the predetermined region a based on the captured image B1 of the predetermined region a, and acquire the remaining amount of the viscous fluid L based on the acquired area of the portion C1 in which the viscous fluid L is present and the acquired area of the portion C2 in which the viscous fluid L is not present. Thus, for example, unlike the case where the remaining amount of the viscous fluid is obtained based on the measurement result of the points by the optical sensor, the remaining amount of the viscous fluid L is obtained based on the area, and therefore, even if there is a slight difference in the shape of the viscous fluid L that is in a block shape each time the viscous fluid container 82 is scraped, the remaining amount of the viscous fluid L can be measured stably and accurately (quantitatively).

In the first embodiment, the control unit 9 is configured to acquire the binarized image B2 of the predetermined area a by binarizing the captured image B1 of the predetermined area a, and acquire the area of the portion C1 where the viscous fluid L is present and the area of the portion C2 where the viscous fluid L is not present in the predetermined area a based on the acquired binarized image B2. This makes it possible to easily obtain the area of the portion C1 where the viscous fluid L is present or the area of the portion C2 where the viscous fluid L is not present.

In the first embodiment, the control unit 9 is configured to control the supply of the viscous fluid L from the viscous fluid supply unit 81 when determining that the acquired remaining amount of the viscous fluid L is equal to or less than the predetermined threshold Th. Accordingly, since the viscous fluid L can be supplied based on the remaining amount of the viscous fluid L which is accurately measured, the viscous fluid L can be supplied in an appropriate amount. As a result, unlike the case where the viscous fluid L is supplied in excess of the required amount in order to avoid shortage of the viscous fluid L, an increase in the amount of the viscous fluid L used can be suppressed. Further, since the viscous fluid L is automatically supplied, it is possible to suppress the occurrence of a defect that the viscous fluid L is insufficient and the viscous fluid L cannot be sufficiently transferred to the element 31 as the transfer target.

In the first embodiment, the substrate recognition camera 43 is configured to move relative to the viscous fluid container 82 together with the mounting head 42. Accordingly, since the mounting head 42 and the substrate recognition camera 43 can be moved by the common moving mechanism, the device configuration for measuring the remaining amount of the viscous fluid L can be suppressed from being complicated.

In the first embodiment, the imaging unit for measuring the remaining amount of the viscous fluid L is the substrate recognition camera 43 that images the reference mark F for recognizing the substrate P. Accordingly, since the substrate recognition camera 43 is also used as an imaging unit for measuring the remaining amount of the viscous fluid L, the complexity of the apparatus configuration for measuring the remaining amount of the viscous fluid L can be further suppressed.

In the first embodiment, the substrate recognition camera 43 is configured to photograph the predetermined region a in the viscous fluid container 82 including the portion C1 where the viscous fluid L (lb) is present in a block shape and the portion C2 where the viscous fluid L is not present, in the viscous fluid container 82 having a frame shape in which the viscous fluid L is present. Thereby, the viscous fluid L can be easily formed into a block shape by the viscous fluid container 82 having a frame shape. As a result, the portion C1 where the viscous fluid L (lb) is present in a block shape and the portion C2 where the viscous fluid L is not present can be easily formed, and imaging can be performed by the substrate recognition camera 43.

In the first embodiment, the viscous fluid container 82 is configured to move relative to the coating film forming plate 83 to scrape and flatten the viscous fluid L, and to form the coating film La of the viscous fluid L transferred to the element 31 on the coating film forming plate 83. The substrate recognition camera 43 is configured to photograph, from above the coating film forming plate 83, a predetermined region a including a portion C1 where the viscous fluid L (lb) is present in a block shape and a portion C2 where the viscous fluid L is not present on the coating film forming plate 83. Thus, in the configuration in which the coating film La of the viscous fluid L formed on the coating film forming plate 83 is transferred to the element 31, the remaining amount of the viscous fluid L can be accurately (quantitatively) and reliably measured.

In the first embodiment, the illumination unit 43a is configured to be able to change the intensity of light emitted to the predetermined area a according to the type of the viscous fluid L. Thus, since the predetermined area a can be imaged by appropriate illumination according to the type of the viscous fluid L, the portion C1 where the viscous fluid L (lb) formed in a block shape is present and the portion C2 where the viscous fluid L is not present can be imaged so as to be easily distinguished and identified. As a result, the remaining amount of the viscous fluid L can be measured more accurately.

[ second embodiment ]

The following describes a configuration of a substrate working apparatus 200 according to a second embodiment of the present invention with reference to fig. 10.

In the second embodiment, an example in which the present invention is applied to a printing apparatus that prints solder on a substrate P will be described, unlike the first embodiment in which the present invention is applied to a component mounting apparatus that mounts a component 31 on a substrate P.

(Structure of substrate working apparatus)

As shown in fig. 10, the board working apparatus 200 according to the second embodiment is a printing apparatus including: a viscous fluid L made of solder is used as a printing (transfer) material, and the viscous fluid L is screen-printed on the surface of the substrate P using a mask M having an opening (not shown) formed in a predetermined printing pattern. The substrate P is an example of the "transfer target" according to the embodiment.

The substrate working apparatus 200 includes a base 101, a squeegee unit 102 including a squeegee portion 121, and a substrate table 103. The squeegee unit 102 and the substrate table 103 are disposed on the base 101. The squeegee unit 102 is configured to perform a printing operation by moving the squeegee portion 121 in the Y direction.

As shown in fig. 10, the substrate working apparatus 200 includes: a viscous fluid recognition camera 104 that photographs the viscous fluid L; and a control unit 105 for controlling the entire substrate working apparatus 200. The viscous fluid recognition camera 104 is an example of the "imaging unit" according to the present invention.

The mask M has a rectangular shape in plan view, and the outer peripheral portion thereof is attached to the frame 106. The substrate working apparatus 200 holds the frame 106 by a mask holding portion, not shown.

The squeegee unit 102 is disposed above the mask M. The squeegee unit 102 includes a squeegee section 121, a squeegee Y-axis drive mechanism 122, a squeegee Z-axis drive mechanism 123, a squeegee R-axis drive mechanism 124, and a viscous fluid supply section 125.

The squeegee section 121 has a sheet-like shape, and is configured to move in the Y direction to scrape and level the viscous fluid L, thereby transferring (printing) the viscous fluid L on the mask M onto the substrate P. At this time, the squeegee portion 121 is configured to move in the printing direction (Y direction) while applying a predetermined printing pressure (load) to the mask M from the upper side (Z1 direction side), and to perform transfer (printing) while rolling (rotating) the viscous fluid L.

The squeegee Y-axis drive mechanism 122 includes a Y-axis motor 122 a. The blade Y-axis drive mechanism 122 is configured to move the blade unit 102 (blade portion 121) in the Y direction along the Y-axis guide by driving the Y-axis motor 122 a. The blade Z-axis drive mechanism 123 is configured to move up and down the blade R-axis drive mechanism 124 and the blade portion 121 in the Z direction. The squeegee R shaft drive mechanism 124 is configured to rotate the squeegee portion 121 about the rotation axis center. The viscous fluid supply unit 125 is disposed above the mask M and has a function of supplying the viscous fluid L onto the upper surface of the mask M.

The substrate stage 103 is disposed at a position below the mask M (position on the Z2 side), and is configured to be capable of reciprocating on the base 101 in the Y direction. The substrate table 103 performs an operation of conveying and holding the substrate P to a predetermined printing position and an operation of carrying out the printed substrate P.

The substrate table 103 includes a pair of conveyors 131, a clamping member (clamping plate) 132, a Y-axis moving mechanism 133, a Z-axis moving mechanism 134, and an X-axis moving mechanism and an R-axis moving mechanism (not shown).

The pair of conveyors 131 has the following functions: the substrate P is carried in from the upstream side apparatus, the substrate P is carried to a predetermined printing position, and the substrate P after printing is carried out to the downstream side apparatus. The pair of conveyors 131 are arranged in parallel with each other at a predetermined distance in the Y direction. The pair of conveyors 131 is provided to extend in the conveyance direction (X direction) of the substrate P. The pair of conveyors 131 is configured to be able to adjust the distance in the Y direction in accordance with the width (Y-direction dimension) of the substrate P to be conveyed.

The clamping members 132 are provided in a pair adjacent to the upper sides of the pair of conveyors 131, and are configured to clamp (clamp) the side end surfaces of the substrate P from both sides to fix (hold).

The Y-axis moving mechanism 133 includes a Y-axis motor 133 a. The Y-axis moving mechanism 133 is configured to move the substrate table 103 in the Y direction along the Y-axis guide by driving a Y-axis motor 133 a.

The Z-axis moving mechanism 134 includes a Z-axis table 134 a. The Z-axis moving mechanism 134 is configured to move (move up and down) the Z-axis table 134a in the Z direction by driving a Z-axis motor (not shown). The Z-axis table 134a is provided with a substrate lifting unit 135 and a pair of carriage members 103b, and a conveyor 131 and a clamping member 132 are provided at the upper portions of the carriage members 103 b.

The substrate lifting unit 135 is disposed at a position in the Y direction between the pair of conveyors 131, and moves (lifts) the support plate 135a in the Z direction. A support pin, not shown, is disposed on the support plate 135 a. The substrate lifting unit 135 is configured to support the substrate P by the support pins.

The X-axis moving mechanism (not shown) has a function of moving the substrate P in the X direction, and the R-axis moving mechanism (not shown) has a function of rotating the substrate P in the horizontal plane (XY plane). In a state where the relative position (position and inclination in the horizontal plane) of the substrate P with respect to the mask M is accurately positioned by these X-axis moving mechanism, Y-axis moving mechanism 133, and R-axis moving mechanism, the substrate P is brought into contact with the lower surface of the mask M by the Z-axis moving mechanism 134.

The viscous fluid recognition camera 104 is configured to be movable relative to the mask M. The viscous fluid recognition camera 104 may be relatively moved with respect to the mask M by a movement mechanism common to the movement mechanism of the squeegee unit 102, or may be relatively moved with respect to the mask M by a dedicated movement mechanism.

Here, in the second embodiment, the viscous fluid recognition camera 104 is configured to photograph a predetermined region including a portion where the viscous fluid L is scraped into a block shape by the squeegee portion 121 of the squeegee unit 102 and a portion where the viscous fluid L is not present, in order to measure the remaining amount of the viscous fluid L on the mask M. At this time, the viscous fluid recognition camera 104 is configured to photograph a predetermined region including a portion where the viscous fluid L is present in a block shape and a portion where the viscous fluid L is not present on the mask, based on the information of the mask M.

In this case, as in the first embodiment, light is diffusely reflected by the viscous fluid L in a portion where the viscous fluid L is present in the captured image of the predetermined area, and thus a dark image is obtained. On the other hand, in a portion where the viscous fluid L is not present, light is regularly reflected by the upper surface of the mask M, and thus a brighter image is obtained. Thereby, a portion in the captured image where the viscous fluid L is present and a portion in the captured image where the viscous fluid L is not present can be distinguished and recognized.

Further, as in the first embodiment, the control unit 105 is configured to acquire a captured image of a predetermined area captured by the viscous fluid recognition camera 4 and acquire the remaining amount of the viscous fluid L based on the acquired captured image of the predetermined area. That is, the binary processing is performed on the captured image of the predetermined region, the area ratio of the portion where the viscous fluid L is present is obtained from the captured image after the binary processing, and the remaining amount of the viscous fluid L on the mask M is obtained from the obtained area ratio of the portion where the viscous fluid L is present.

The control unit 105 is configured to determine whether or not the obtained remaining amount of the viscous fluid L is equal to or less than a predetermined threshold value for determining whether or not to supply the viscous fluid L, and to perform control to supply a predetermined amount of the viscous fluid L from the viscous fluid supply unit 125 to the mask M when the obtained remaining amount of the viscous fluid L is determined to be equal to or less than the predetermined threshold value.

The other structure of the second embodiment is the same as that of the first embodiment.

In the second embodiment, the following effects can be obtained.

(Effect of the second embodiment)

In the second embodiment, as described above, the control unit 105 is provided, and the control unit 105 acquires the remaining amount of the viscous fluid L based on the size of the portion where the viscous fluid L is present and the size of the portion where the viscous fluid L is not present in the captured image of the predetermined region captured by the viscous fluid recognition camera 104. Thus, as in the first embodiment, the remaining amount of the viscous fluid L can be accurately (quantitatively) measured, and the remaining amount can be easily measured even for a colored viscous fluid L.

In the second embodiment, the squeegee section 121 is configured to move over the mask M to scrape and flatten the viscous fluid L and to transfer the viscous fluid L on the mask M to the substrate via the print pattern. The viscous fluid recognition camera 104 is configured to photograph a predetermined region including a portion of the mask M where the viscous fluid L is present in a block shape and a portion where the viscous fluid L is not present, from above the mask M. Thus, in the configuration in which the viscous fluid L on the mask M such as solder is transferred onto the substrate P via the print pattern, the remaining amount of the viscous fluid L such as solder can be accurately (quantitatively) and reliably measured.

Other effects of the second embodiment are the same as those of the first embodiment.

[ modified examples ]

The embodiments disclosed herein are merely examples in all respects, and should not be construed as limiting the scope of the invention. The scope of the present invention is defined by the claims, not by the description of the above embodiments, and includes all modifications (variations) within the same meaning and scope as the claims.

For example, in the first and second embodiments, the size of the portion where the viscous fluid exists and the size of the portion where the viscous fluid does not exist are described as examples in which the respective areas are used. In the present invention, as the size of the portion where the viscous fluid exists and the size of the portion where the viscous fluid does not exist, a size other than the area may be used. For example, the length in the direction orthogonal to the width direction (the direction in which the portion where the viscous fluid L exists extends) in the captured image shown in fig. 4 may be used.

In the first and second embodiments, the example in which the remaining amount of the viscous fluid is obtained based on both the size of the portion where the viscous fluid exists and the size of the portion where the viscous fluid does not exist is shown, but the present invention is not limited to this. In the present invention, the remaining amount of the viscous fluid may be obtained based on at least one of the size of the portion where the viscous fluid exists and the size of the portion where the viscous fluid does not exist.

In the first and second embodiments, the example in which the size of the portion where the viscous fluid exists and the size of the portion where the viscous fluid does not exist are obtained by performing the binarization processing on the captured image of the predetermined region is described, but the present invention is not limited to this. In the present invention, the size of the portion where the viscous fluid exists and the size of the portion where the viscous fluid does not exist may be obtained without performing binarization processing on the captured image of the predetermined region.

In addition, in the first embodiment described above, an example is shown in which the remaining amount of the viscous fluid L remaining in the viscous fluid container 82 is obtained based on the correlation information between the area ratio of the portion in the predetermined region a where the viscous fluid L (lb) exists and the remaining amount of the viscous fluid L remaining in the viscous fluid container 82, but the present invention is not limited to this. In the present invention, the information on the correlation between the remaining amount of the viscous fluid L remaining in the viscous fluid container 82 and at least one of the area ratio of the portion of the predetermined region a where the viscous fluid L (lb) is not present, the area of the portion of the predetermined region a where the viscous fluid L (lb) is present, and the area of the portion of the predetermined region a where the viscous fluid L (lb) is not present, and the remaining amount of the viscous fluid L remaining in the viscous fluid container 82 may be obtained in advance based on the correlation information.

In the first embodiment, the substrate recognition camera 43 is used as the imaging unit of the present invention, but the present invention is not limited to this. In the present invention, the imaging unit of the present invention may be provided separately from the board recognition camera 43.

In the first embodiment, the viscous fluid container 82 having a frame shape is used as the scraper portion of the present invention, but the present invention is not limited to this. In the present invention, a blade portion having a shape other than a frame shape may be used as the blade portion of the present invention. For example, a blade portion having a sheet-like shape similar to the blade portion 121 of the second embodiment may be used.

In the first embodiment, the viscous fluid container 82 is fixed and the coating film forming plate 83 is moved, and the viscous fluid container 82 is moved relative to the coating film forming plate 83 to scrape and level the viscous fluid L. In the present invention, the viscous fluid container 82 may be moved by fixing the coating film forming plate 83 and moving the viscous fluid container 82 relative to the coating film forming plate 83 to scrape and level the viscous fluid L.

In the first embodiment, for convenience of description, the process of the control unit is described using a flow-driven process in which processes are sequentially performed following a process flow, and for example, the process operation of the control unit may be performed by an event-driven (event-driven) process in which processes are performed in units of events. In this case, the event may be performed by a complete event-driven type, or may be performed by combining event-driven and flow-driven types.

Description of the reference numerals

9 control part

31 element (transfer object)

42 mounting head

43 base plate recognition camera (shooting part)

43a illumination unit

81. 125 viscous fluid supply part

82 viscous fluid container (scraper plate part)

83 coating film forming plate

100. 200 substrate working device

104 viscous fluid identification camera (shooting part)

105 control part

121 scraping plate part

A predetermined area

B1 captured image of predetermined area

B2 binary image

C1 part with viscous fluid

C2 portion without viscous fluid

F reference mark (substrate identification mark)

L viscous fluid

M mask

P substrate (transfer object)

Th predetermined threshold

Claims (9)

1. A substrate working apparatus includes:

a scraper part for scraping and flattening the viscous fluid transferred to the transfer object;

an imaging unit that images a predetermined region including a portion where the viscous fluid scraped into a block by the scraper portion exists and a portion where the viscous fluid does not exist; and

a control unit that obtains a remaining amount of the viscous fluid based on a size of a portion where the viscous fluid exists and a size of a portion where the viscous fluid does not exist in a captured image of the predetermined region captured by the capturing unit during formation of the block-shaped viscous fluid,

the scraper portion has a frame shape capable of retaining the viscous fluid,

the imaging unit is configured to image, from above, a predetermined region in the interior of the blade portion including a portion in which the viscous fluid is present in a block shape and a portion in which the viscous fluid is not present in the interior of the blade portion having the frame shape in which the viscous fluid is stored,

the control section obtains the remaining amount of the viscous fluid based on an area ratio of a portion where the viscous fluid exists with respect to the predetermined region or an area ratio of a portion where the viscous fluid does not exist with respect to the predetermined region.

2. The substrate handling device of claim 1,

the control unit is configured to acquire a binarized image of the predetermined region by binarizing the captured image of the predetermined region, and acquire an area ratio of a portion where the viscous fluid is present with respect to the predetermined region or an area ratio of a portion where the viscous fluid is not present with respect to the predetermined region based on the acquired binarized image.

3. The substrate handling device of claim 1,

the substrate working apparatus further includes a viscous fluid supply unit for supplying the viscous fluid,

the control unit is configured to control the supply of the viscous fluid from the viscous fluid supply unit when it is determined that the acquired remaining amount of the viscous fluid is equal to or less than a predetermined threshold value.

4. The substrate handling device of claim 1,

the substrate working apparatus further includes a mounting head which mounts a component on a substrate and is movable relative to the squeegee portion,

the imaging unit is configured to move relative to the squeegee unit together with the mounting head.

5. The substrate handling device of claim 4,

the imaging unit includes a substrate recognition imaging unit that images a substrate recognition mark for recognizing the substrate.

6. The substrate handling device of claim 1,

the transfer object includes an element mounted on a substrate,

the substrate working apparatus further includes a coating film forming plate that forms a coating film of the viscous fluid transferred to the element,

the blade portion is configured to move relative to the coating film forming plate to scrape and flatten a viscous fluid and form a coating film of the viscous fluid transferred to the element on the coating film forming plate,

the imaging unit is configured to image the predetermined region including a portion where the viscous fluid is present and a portion where the viscous fluid is not present on the coating film forming plate, the portion being formed in a block shape, from above the coating film forming plate.

7. The substrate handling device of claim 1,

the transfer object includes a substrate on which an element is mounted,

the substrate working apparatus further includes a mask having a print pattern for transferring the viscous fluid to the substrate by printing,

the squeegee section is configured to move over the mask to scrape and flatten a viscous fluid and transfer the viscous fluid on the mask to the substrate via the print pattern,

the imaging unit is configured to image the predetermined region including a portion of the mask where the viscous fluid is present and a portion of the mask where the viscous fluid is not present, the portion being formed in a block shape, from above the mask.

8. The substrate handling device of claim 1,

the substrate working apparatus further includes an illumination unit capable of irradiating the predetermined region with light,

the illumination unit is configured to be capable of changing at least one of an intensity of light irradiated to the predetermined region, an angle of light irradiated to the predetermined region, and a wavelength of light irradiated to the predetermined region, depending on a type of the viscous fluid.

9. A method for measuring the residual amount of a viscous fluid in a substrate processing apparatus, comprising the steps of:

scraping and leveling the viscous fluid transferred to the transfer object by a scraper part having a frame shape capable of storing the viscous fluid;

a predetermined region of the inside of the squeegee section including a portion where the viscous fluid that becomes a lump and a portion where the viscous fluid does not exist in the inside of the squeegee section having the frame shape that retains the viscous fluid, which is scraped by the squeegee section, is photographed from above by a photographing section during the formation of the viscous fluid that becomes a lump; and

acquiring, by a control unit, a remaining amount of the viscous fluid based on a size of a portion where the viscous fluid exists and a size of a portion where the viscous fluid does not exist in the captured image of the predetermined area captured by the capturing unit,

in the step of obtaining the remaining amount of the viscous fluid by the control unit, the remaining amount of the viscous fluid is obtained by the control unit based on an area ratio of a portion where the viscous fluid exists to the predetermined region or an area ratio of a portion where the viscous fluid does not exist to the predetermined region.

Images