CN101117043A - Silk screen printing device and image recognition contrapositioning method - Google Patents
Silk screen printing device and image recognition contrapositioning method Download PDFInfo
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- CN101117043A CN101117043A CNA2007101369649A CN200710136964A CN101117043A CN 101117043 A CN101117043 A CN 101117043A CN A2007101369649 A CNA2007101369649 A CN A2007101369649A CN 200710136964 A CN200710136964 A CN 200710136964A CN 101117043 A CN101117043 A CN 101117043A
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- 238000007650 screen-printing Methods 0.000 title claims abstract description 16
- 238000000034 method Methods 0.000 title claims description 22
- 230000005484 gravity Effects 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims description 65
- 238000004364 calculation method Methods 0.000 claims description 14
- 238000005259 measurement Methods 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 230000003190 augmentative effect Effects 0.000 claims 1
- 238000012937 correction Methods 0.000 abstract description 4
- 238000001514 detection method Methods 0.000 abstract description 2
- 238000007639 printing Methods 0.000 description 20
- 239000003550 marker Substances 0.000 description 9
- 230000007246 mechanism Effects 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- 238000007689 inspection Methods 0.000 description 4
- 230000000007 visual effect Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 241000220317 Rosa Species 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000001915 proofreading effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000010023 transfer printing Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F15/00—Screen printers
- B41F15/14—Details
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F15/00—Screen printers
- B41F15/08—Machines
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F33/00—Indicating, counting, warning, control or safety devices
- B41F33/0036—Devices for scanning or checking the printed matter for quality control
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F33/00—Indicating, counting, warning, control or safety devices
- B41F33/0081—Devices for scanning register marks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F33/00—Indicating, counting, warning, control or safety devices
- B41F33/04—Tripping devices or stop-motions
- B41F33/14—Automatic control of tripping devices by feelers, photoelectric devices, pneumatic devices, or other detectors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F33/00—Indicating, counting, warning, control or safety devices
- B41F33/16—Programming systems for automatic control of sequence of operations
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Quality & Reliability (AREA)
- Screen Printers (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention provides a screen printing apparatus, which substitutes a contraposition mark by a base board pattern according to which the base board species has no the specific contraposition mark when contraposing the base board on the screen mask. The screen printing apparatus comprises: a first unit for respectively detecting one part of any pattern or the whole formed patterns on the screen mask and the base board; a second unit for detecting the respective gravity center of the pattern of the final contraposition target; a computation unit for computing the window center of the pattern detected by the first and second unit and the deviation of the respective gravity center of the pattern detected by the second unit by the image detection; and a correction unit for computing the correction coefficient based on the computed value from the computation unit and registering.
Description
Technical field
The present invention relates generally to silk-screen printing device, relates to image recognition especially to method for position.
Background technology
General screen process press has: mask, the scraper plate that move into the substrate conveyer belt, take out of the substrate conveyer belt, have the platform portion of elevating mechanism, pattern transferring is had as peristome, have the scraper head of flight elevater structure and horizontal direction travel mechanism and the control device of controlling these mechanisms.With substrate after move into translator unit and move in the auto levelizer, at the interim contraposition substrate of print station portion and fix, then, utilize video camera identification substrate and have mark with the both sides of the mask of circuit pattern corresponding opening portion, side-play amount to both sides is carried out the position revisal, and on mask, substrate is carried out contraposition, promoting print station then makes substrate contact with mask, by scraper plate while making the mask contact substrate fill the paste of solder(ing) paste etc. at the peristome of mask, platform portion then descends, transfer printing paste by separating base plate and mask and on substrate is then by taking out of substrate printing from device.
For with the mark of video camera identification aforesaid substrate and mask, both sides' side-play amount is carried out the position revisal and contraposition substrate on mask, and requirement teaching target pattern, high speed and carry out contraposition with high accuracy repeatedly simply, and use pattern match gimmick etc.As the gimmick of pattern match, patent documentation 1 disclosed method is arranged.
[patent documentation 1] Japanese Patent Publication 52-14112 communique
In patent documentation 1 disclosed method, the user must be predetermined window (window), and when using is not the arbitrary graphic pattern of the reference mark of being scheduled to and when carrying out contraposition, general method is with the datum mark as contraposition such as the center of gravity of the window of user decision or center or bight etc., but for the genuine position of original contraposition, produce skew, thereby become the low main cause of recognizing site precision, perhaps revisal stage holding time length, influence are produced.
Summary of the invention
The object of the present invention is to provide a kind of silk-screen printing device or image recognition to method for position, make that the user can operate and obtain high aligning accuracy simply for the superfine pattern printing of the installation of the electronic unit that is used for 0.4mm spacing CSP, 0603 chip element and 0402 chip element representative.
The invention is characterized in and have such unit, this unit is measured the center of searching object window of user decision and the side-play amount at arbitrary graphic pattern center automatically, log on as the revisal amount, and when contraposition is calculated, add the revisal amount, calculate the contraposition actuating quantity and carry out contraposition.
For the various patterns in the contraposition that is used in substrate, there is no need to require the proficiency of position revisal and can tackle simply, and improve the printing aligning accuracy.
Description of drawings
Fig. 1 shows the figure of an example of silk-screen printing device.
Fig. 2 is with center of gravity or the center method as the datum mark of contraposition.
Fig. 3 is with the method for bight as the datum mark of contraposition.
Fig. 4 is about the order of the contraposition of reality.
Fig. 5 shows the figure of artificial model's a example.
Fig. 6 shows the figure of an example of relevant reflection.
Fig. 7 shows result's the figure of an example of the arbitrary graphic pattern of retrieval substrate.
Fig. 8 shows the figure of an example of the handling process in the correlation value calculation part～position coordinates calculating section.
Fig. 9 shows the figure about an example of the inspection size revisal after the label size measurement.
Figure 10 shows the figure about an example of the inspection size revisal after the label size measurement.
Figure 11 shows the figure of an example of the handling process in size calculating section～size revisal part.
Figure 12 is to be the pattern match of benchmark model with H shape figure.
Figure 13 is to be the pattern match (another algorithm) of benchmark model with H shape figure.
The specific embodiment
In Fig. 1, describe the structure of the silk-screen printing device among the present invention in detail.The structure of top view silk-screen printing device has been shown in Fig. 1 (a), in (b), system construction drawing has been shown.The structure that silk-screen printing device is observed in the side has been shown in Fig. 2 (a), the state in the printing under the structure of observing silk-screen printing device from the side has been shown in (b).
The structure that adopts is, is provided with the chase holder in not shown main body frame, and the chase holder is provided with has pasted the mask 20 (being also referred to as screen mask sometimes) that printed patterns has been had, covered silk screen as peristome.Above mask 20, dispose scraper head 2, scraper plate 3 is installed on scraper head 2.Scraper head 2 can move in the horizontal direction by scraper plate travel mechanism 6, and scraper plate 3 can move up at upper and lower by flight elevater structure 4.Below mask 20, relatively be provided with mounting and keep print station 10 as the substrate 5 of printing object thing with mask 20.This print station 10 comprises: move in the horizontal direction substrate 5 and carry out with the XY θ platform 11 of the contraposition of mask 20 and be used for receiving substrates 5 and making substrate 5 come close to or in contact with the platform elevating mechanism 12 of mask face from moving into substrate conveyer belt 25.On print station 10, be provided with and receive receive substrate conveyer belt 26, on print station 10, receive by moving into the substrate 5 that substrate conveyer belt 25 is moved into, and after printing finishes, substrate 5 is discharged to and takes out of substrate conveyer belt 27.
The function that in full-automatic silk-screen printing device, possesses the contraposition of carrying out mask 20 and substrate 5 automatically.That is, utilize ccd video camera 15 to take the mark that is used for contraposition that is separately positioned on mask 20 and the substrate 5, carry out obtaining position offset after image is handled, drive XY θ platform 11 and make this side-play amount of revisal and carry out contraposition.That is, the structure of ccd video camera 15 employings is to have video camera to make it possible to roughly take simultaneously substrate-side and screen mask side in upper and lower settings.
In addition, comprise that printing control unit that processing drives usefulness from each several part is divided or printing machine control section 30 that the image of the picture signal of ccd video camera 15 is moved into part 37 etc. is arranged on the inside of printing machine body frame, be used to control with the data of the replacement of data or the change of printing condition etc. and move into part 50, be used to monitor printed state etc. or the display part 40 of the identification marking that obtains is configured in the outside of printing element main body 1.
The following describes the action of printing element of the present invention.
Printed the substrate 5 of solder(ing) paste and supplied with reception substrate conveyer belt 26, and be fixed on the preposition on the print station 10 by moving into substrate conveyer belt 25.After substrate is fixing, ccd video camera 15 is moved to the base plate mark position that login is in advance set.Then 15 pairs of ccd video cameras are arranged on the mark (not shown) that the location recognition on substrate 5 and the mask 20 uses and take, and are sent to printing machine control section 30.Image in control section is moved in the part 37, obtains the position offset of mask 20 and substrate 5 according to view data.Printing machine control section 30 moves the XY θ platform 11 of print station 10 according to this result, and contraposition is revised in the position of 20 pairs of substrates 5 of mask relatively.After contraposition was finished, ccd video camera 15 made a concession scheduled volumes, until the position that does not interfere with each other with print station 10.After video camera was made a concession and finished, print station 10 (back is also referred to as the printing microscope carrier sometimes) rose, and substrate 5 is contacted with mask 20.Then, scraper plate 3 drops on mask 20 surfaces by scraper plate lifting tube 4, and the solder(ing) paste that moves, supplies on the mask 20 by scraper head 2 is filled into the opening portion of mask 20, and is transferred on the substrate 5.Scraper plate 2 rises after streaking certain distance in the horizontal direction.Then, print station 10 descends, and mask 20 separates with substrate 5, and the solder(ing) paste that is filled into the opening portion of mask 20 is transferred to substrate 5.Then, substrate 5 processes of having printed solder(ing) paste are taken out of substrate conveyer belt 27 and are sent to subsequent processing.
And, substrate 5 and mask 20 2 mark that the contraposition at relative same position is used is set more than the position, each mark for both sides, utilization has the special ccd video camera 15 in 2 visuals field of above-below direction, observe the mark of discerning mask 20 by direction from bottom to up, observe the mark of discerning substrate 5 by direction from top to bottom, read all position coordinateses of mark of predetermined position, the side-play amount of position calculation revisal substrate 5 relative masks 20, by XY θ platform 11 relative mask 20 moving substrates 5, carry out contraposition.
Below, use Fig. 3 that the order of the contraposition of reality is described.The situation that is 2 positions to making the object pattern in this figure, discerns contraposition describes, but according to the kind or the target aligning accuracy of substrate, equally also can tackle more than the position even the object pattern becomes 2.In addition, the result who takes substrate 5 and take mask 20 has been shown among Fig. 3.On substrate 5, show the pattern 61 of a plurality of the area of application, the 1st pattern of windows 60 (zone shown in the solid line also only is called window later on sometimes) and central point 62 (intersection point of the line that dotted line is represented), the 2nd pattern of windows 63 (zone shown in the chain-dotted line) and the central point of handling 64 (intersection point of the line that solid line is represented) thereof.In addition, in mask 20, illustrated, the 3rd pattern of windows 70 (in the zone that is shown in dotted line after also only be called sometimes motion) and central point 72 (intersection point of the line that dotted line is represented) thereof, be arranged on a plurality of patterns of openings the 71, the 4th pattern of windows 73 (zone shown in the chain-dotted line) and central point 74 (intersection point of the line that solid line is represented) thereof on the mask.
At first, the video camera of taking substrate-side is called the 1st video camera, the video camera of taking the mask side is called the 2nd video camera.For the mask images that the substrate image and the 2nd video camera of the shooting of the 1st video camera are taken, specify the 1st window area and the 3rd window area respectively.Because substrate image and mask images can detect accurately, therefore as contraposition object with distinctive pattern.Promptly, when specifying the 1st or the 3rd window area of substrate image and mask images, comprise on every side background, login, make that the pattern in the search window port area of appointment does not exist more than the position at 2 in the same visual field of shooting video camera as the real image model.
Unit the 1st determines the center of window for the pattern of the real image model of logining in advance, by the position of calculating the correlation maximum in the full visual field of shooting video camera.That is, obtain the central point 72 of the window 70 of the central point 62 of window 60 of substrate-side and mask side in the present embodiment.Because mask 20 is temporarily fixed at when the change of production kind or cleaning arbitrarily on the position, so take according to the camera coordinates of login in advance.Like this, the 3rd pattern on the mask 20 is used as the real image model of logining in advance, mate by the normalization relational pattern and detect inside, the full visual field of video camera, can calculate the 3rd pattern position on the mask surface automatically.Like this, for the 1st pattern and the 3rd pattern, by Unit the 1st about the video camera 1 of the video camera 2 of mask side and substrate-side, calculate the result for retrieval of the 1st pattern of windows 60 and the 3rd pattern of windows 70.
Below, set the window that is used to detect the 2nd pattern of windows 63 and the 4th pattern of windows 73 by Unit the 2nd, the 2nd pattern of windows 63 and the 4th pattern of windows 73 are the patterns of wishing final contraposition.About each video camera 1 and video camera 2, set the window that is used for the 2nd pattern of windows 63 and the 4th pattern of windows 73.The window that is used for the 2nd pattern of windows 63 and the 4th pattern of windows 73 is the pattern window that is used for the position of centre of gravity of the shape size of measuring object pattern and calculating object pattern itself.Unit the 2nd detects by the position of calculating the correlation maximum by the arbitrary graphic pattern centre coordinate in the zone of calculating above-mentioned pattern window appointment and the correlation of pre-prepd a plurality of dictionary models.Promptly obtain the central point 74 of central point the 64, the 4th pattern of windows 73 of the 2nd pattern of windows 63 among Fig. 3.
And Unit the 2nd has: even if there be N the correlation value calculation part of also calculating the correlation of pre-prepd dictionary model and arbitrary graphic pattern in similar pattern; The correlation of partly obtaining based on above-mentioned correlation value calculation, the shape inference section of inferring the shape of model; And store setting as a plurality of interim reference patterns, and, compare the unit that the mark of the combination of difference minimum is logined as reference pattern with the distance between the target reference pattern by the pattern position coordinate Calculation.
Below, by computing unit according to the central point 62 of the 1st pattern of windows 60 and central point 64 calculation deviations of the 2nd pattern of windows 63.Similarly, use the central point of the 3rd pattern of windows 70 and central point 74 calculation deviations of the 4th pattern of windows 73.
Below, login each compensating value of relative XY θ by correcting unit.
Calculate each the controlled quentity controlled variable of XY θ of relative substrate 5 below by bit cell, make the print station 10 that is equipped with substrate 5 on XY θ direction, only move the controlled quentity controlled variable of trying to achieve, carry out the contraposition of mask 20 and substrate 5.
Below, use accompanying drawing to describe about the model that carries out pattern match that illustrates previously etc.
Fig. 4 shows an example of pre-prepd dictionary model.Adopted circle herein, the dictionary model of square, equilateral triangle, but also can adopt rhombus, rectangle, the different shape of three liters of buckets (three Of-Materials) apperance etc.
In the past, actual user selected to use the pattern form that is fit to produce substrate from the dictionary model that is called the artificial model, carried out the model login.And, cooperate pattern appearance and size and move into, thereby guarantee the precision of template matches.
Fig. 5 shows when existing under the situation of similar pattern around arbitrary graphic pattern, has carried out an example of the relevant reflection of template matches.The position that the correlation peak-peak is shown among the figure becomes the 1st candidate that retrieval is used.Second peak value is the 2nd candidate, and similarly the 3rd peak value is the 3rd candidate.This sentences once relevant reflection and is example, but uses the known technology of 2 correlations values also can obtain same result.Ask the 3rd candidate in this embodiment, but the appointment of candidate number can be arbitrarily always.
According to the result for retrieval of Fig. 5, even if having similar pattern, can select about 3 candidates in the window arbitrarily.Yet owing to do not specify and be applicable to the relative dictionary of mark shape of producing substrate in the artificial model, only so difficulty judges which is correct mark in the middle of 3 candidates.
Fig. 6 shows the example that 2 positions in substrate 5 have disposed the pattern that is used to discern.Figure 6 illustrates state according to result for retrieval selected candidate mark in each window of Fig. 3.Because the pattern that is used to discern is 2 positions, window area also becomes 2 positions, and the result that mark has been retrieved pattern of windows W1 inside is, selected 3 mark candidate M11, the result that M12 and M13, mark have retrieved pattern of windows W2 inside is, selected 3 mark candidates M21, M22 and M23.
But, figure 6 illustrates the mark result for retrieval in the substrate 5, but in not shown mask 20 1 sides also corresponding to the pattern that is used to discern (window area) at 2 positions of substrate 5 and be provided with same mark.
The pattern that is used for location recognition of mask 20 1 sides usually uses at through hole or etches partially (half-etching) or at through hole or the contrast when etching partially the part additional identification and filled the Off ィ デ ュ one シ ヤ Le mark of resin.And, usually do not have similar pattern at the periphery of the pattern that is used for location recognition of mask 20 1 sides.Even if therefore also can easily judge the essential factor that errorless identification is arranged for unskilled user.
Therefore, when the periphery of the pattern that is used for location recognition in mask 20 does not exist under the situation of similar pattern, use Fig. 4 and method illustrated in fig. 5, further by possessing the condition of matching rate, matching rate can be had the pattern that is used for location recognition that is judged as the mask of being asked 20 more than or equal to predetermined value and the highest pattern of correlation more than or equal to predetermined value.
At this moment, the centre coordinate relation of pattern of windows w1 and pattern of windows w2 has carried out setting input as given data to printing equipment in advance, so calculate the centre coordinate of the pattern that is used for location recognition of each window of obtaining according to the coordinate indexing result by the position coordinates calculating section, thereby can in position coordinate Calculation part, calculation calculate the pattern M1 that is used for location recognition of mask 20 (at this figure middle finger M11, M12 and M13) and M2 (at this figure middle finger M21, M22 and M23) apart from ML.
The size L that puts down in writing among Fig. 6 is a distance between the mark of M11 and M21, but since the design load of size L with above-mentioned identical, so can be apart from ML as the selected reference value apart from ML.
The handling process of correlation value calculation part～position coordinates calculating section has been shown among Fig. 7.In this handling process, at first set the numbering (step 701) of window.Retrieve the candidate (step 702) of n mark in this window.Then, be n+1 mark with n token-replacement.(n=3 herein is as the marker number of maximum: step 703) to investigate n+1 and whether be maximum marker number.If not the marker number of maximum, then return step 702 retrieval candidate.If maximum marker number judges then whether the retrieval window number is maximum (2 is maximum in the present embodiment) (step 705).Then on window number, add 1 (step 706) and return step 701 if not maximum.If window number is a maximum, then respectively for the combination of mark, obtain distance (step 707) between mark.Then, by the position coordinates calculating section obtain in the combination of mark, the L size near the mark of ML, logs on as reference pattern (step 708).And, in Fig. 6, owing in a search domain, be provided with 3 marks, in Fig. 7, obtain (the L11～L33) of distance between each mark.
And, when the pattern that is used for discerning in mask one side does not use Off ィ デ ュ one シ ヤ Le mark,, can not will be used as the selected reference value apart from ML owing to have similar pattern at the periphery of the pattern that is used to discern.In this case, alternative distances ML, calculate according to the mark coordinate of importing printing equipment in advance and substrate size and to obtain selected reference value L and use.
Use Fig. 8～Figure 11 that silk-screen printing device is described below, this silk-screen printing device is characterised in that to have: the correlation that calculates the correlation value calculation part of the correlation of pre-prepd dictionary model and arbitrary graphic pattern, partly obtains based on above-mentioned correlation value calculation, the shape inference section of inferring mould shapes and the size of arbitrary graphic pattern carried out the size calculating section that image measurement calculates.
Illustrated among Fig. 8 about the inspection size revisal after the label size measurement, the situation of Lx=Lx1.As this figure, after the size computing of mark, as an example, send move from printing machine control section 30 to print station 10 and make the distance of mark for directions X movement indicia appearance and size amount.Read the marker edge coordinate below, according to the marker edge coordinate before the moving of storage in advance before moving and the marker edge coordinate after moving calculate the mark amount of movement.When the mark directions X appearance and size (Lx) of dimensional measurement and marker edge amount of movement (Lx1) when equating, judge that the label size of dimensional measurement is correct.
Illustrated among Fig. 9 about the inspection size revisal after the label size measurement, the situation of Lx＜Lx1.As this figure,, judge that the label size of dimensional measurement is incorrect when the mark directions X appearance and size (Lx) of dimensional measurement during less than marker edge amount of movement (Lx1).At this moment, repeatable operation is correct until the label size of judging dimensional measurement as shown in Figure 8.
Figure 10 shows the handling process of size calculating section and size revisal part.In Figure 10, measure the appearance and size of the mark Mwn in substrate-side and the mask side window W separately at first respectively, obtain the side-play amount of the mark of mask side and substrate-side.After this side-play amount has been carried out computing about X-direction, similarly also carry out computing about Y direction.If side-play amount is arranged then this side-play amount of revisal by calculating.
Use Figure 11 explanation to be provided with the example of the situation of a plurality of marks.
Even if there be N similar pattern as mentioned above in the 2nd pattern in window area, also can automatically detect, but also can from a plurality of candidates, select suitable object pattern according to the high order of correlation, automatic detection from No. 1 to N number, decision at random is pattern 2.
The image that also uses video camera 1 and video camera 2 to take for substrate-side and mask side similarly, set the 1st pattern and the 2nd pattern respectively about each, thereby in producing running, use video camera to take the precalculated position of the substrate of moving into, the pattern center, the following calculating formula of utilization that detect for Unit the 1st calculate (Δ Xn, Δ Yn), then (Δ Xn, Δ Yn) is added in respectively and obtains the registration target point on the 1st pattern position coordinate, then this impact point is carried out bit motion.And, in the explanation in front substrate-side is illustrated as different patterns with the mask side, but herein with the 1st, 3 pattern of windows of front as the 1st pattern, the 2nd, 4 pattern of windows describes as the 2nd pattern.
Mark 1 (the 1st pattern) (X11, Y11)
Mark 1 (the 2nd pattern) (X12, Y12)
Mark 1 (deviation of the 1st pattern and the 2nd pattern)
(ΔX1，ΔY1)＝(X11，Y11)-(X12，Y12)
Mark 2 (the 1st pattern) (X21, Y21)
Mark 2 (the 2nd pattern) (X22, Y22)
Mark 2 (deviation of the 1st pattern and the 2nd pattern)
(ΔX2，ΔY2)＝(X21，Y21)-(X22，Y22)
Mark 3 (the 1st pattern) (X31, Y31)
Mark 3 (the 2nd pattern) (X32, Y32)
Mark 3 (deviation of the 1st pattern and the 2nd pattern)
(ΔX3，ΔY3)＝(X31，Y31)-(X32，Y32)
Mark 4 (the 1st pattern) (X41, Y41)
Mark 4 (the 2nd pattern) (X42, Y42)
Mark 4 (deviation of the 1st pattern and the 2nd pattern)
(ΔX4，ΔY4)＝(X41，Y41)-(X42，Y42)
And the setting of pattern window is near the 2nd pattern profile in the diagram, but this is the difference according to operator's proficiency, the necessary condition on the pure operating sequence, and in fact pattern window is regarded in the zone in the retrieval window that Unit the 1st can be implemented as.In this case, Unit the 1st implement to detect the centre coordinate 65 of search window port area and at 75 o'clock, simultaneously the barycentric coodinates of the object pattern itself in the check pattern window serially.
When search the 2nd pattern in pattern window, under the situation that does not have suitable candidate, can search for by mobile camera automatically, the automatic search function of seeking mark, but video camera moves and need spended time, discerning contraposition so just needs the more time.
Therefore, as shown in figure 12 by using, in the following order, can not need skilled operation, simply correctly carry out the contraposition of pattern the pattern match of H figure as benchmark model.This forms for roughly symmetrical for the electrode pattern on being formed on real estate is effective.
(1) after predetermined window is extracted image, change the ratio of convex-concave size, the reference pattern of the predetermined matching rate of search acquisition=＞the H graphic retrieve
(2) rate of change of convex-concave size makes the area A 1 and the A2 of the protuberance that directions X line amount and Y direction line amount by Figure 12 constitute change (area A 3 of recess also changes).
Automatically search rule is equivalent to obtain the H figure of the difference of A1 and A2 for maximum.
The H figure is the figure with shape of A1＞A2＞A3 and Ya+Yb+Yc＞Yb.And for convenience of explanation, the electrode pattern that cuts out adopts rectangle (rectangle), but adopts circular pattern in the production of reality also morely, also can tackle this situation.
(3) the most at last the intersection point of the center line of the center line of recess and H figure as the contraposition reference point.
Below, figure 13 illustrates the algorithm of obtaining contraposition reference point in fact automatically.
In Figure 13, (1) takes the image of substrate or mask.Then (2) cut image by the predetermined window size.(3) make image 2 values that cut.(4) image is thereafter handled in counter-rotating.(5) obtain the center line of recess of image and the center line of H shape pattern, with it as the contraposition reference point.
But, the camera coordinate system of printing equipment is used for the meticulous glass dry plate of directly describing (photomask) of superelevation of semiconductor manufacturing, proofread and correct the absolute precision of mechanical drive system, so fully trust according to the precision of command value when the position mobile camera arbitrarily.And even if the known technology of the full cut-off ring servo-drive system of use linear motor etc. etc., the distance that video camera moves also is the precision of fully trusting.
Therefore, by using above-mentioned technique known etc., can judge whether the size of images that video camera reads is correct.And, also can be applicable in the correction and Self-Test Diagnostics of resolution of video camera.
And, if utilize of the present invention to method for position, then check and judge whether the mark position of producing the label size that reads before the contraposition in the running and print station having been carried out after contraposition is moved is correct, measure label size simultaneously, so can carry out from dynamic(al) correction according to the fault of camera diagnosis of the printing equipment of normal conditions.
Therefore, of the present invention to method for position by utilizing, device and to the precision not normal Self-Test Diagnostics that carries out whether, also can automatically proofreading and correct often aborning can not stop.
As mentioned above, in the present invention,, also mark can be logged on as reference pattern for arbitrary graphic pattern, not only not assigned tags shape or label size.
In addition, under the situation that skilled operators reduces, unskilled user also can simply easily operate, and can guarantee that the shortening of reference mark login time is correct, and the high-effective and labour-saving that high-density installation is produced contributes.
Apparently, the present invention is also applicable to the contraposition of not using substrate mask, in the lift-launch machine etc.
And, by utilizing the present invention, can make the reference mark login method topsy-turvy between each device in the SMT line unified general, can realize the summary generalization of the method for operating of each device.
Claims (2)
1. silk-screen printing device, to be formed at 2 arbitrary graphic pattern opening portions more than the position on the screen mask as registration target, use the above arbitrary graphic pattern in 2 positions of substrate surface, handle the aforesaid substrate contraposition on screen mask based on image, and on substrate surface, apply paste via screen mask, it is characterized in that comprising:
Unit the 1st, it detects respectively by part or all the 3rd pattern that constitutes that is formed at the above-mentioned pattern openings part on the screen mask and by part or all the 1st pattern that constitutes of the arbitrary graphic pattern of substrate surface;
Unit the 2nd, it detects respectively as each center of gravity of the 2nd and the 4th pattern of the final registration target respectively relative with the above-mentioned the 1st or the 3rd pattern;
Computing unit, it calculates each each the deviation of center of gravity of window center and the 2nd and the 4th pattern that is detected by above-mentioned Unit the 2nd of the 1st and the 3rd pattern that detected by Unit the above-mentioned the 1st and the 2nd by image measurement; And
Correcting unit, its based on the result of calculation of aforementioned calculation unit and calculate relative XY θ platform each augmenting factor and login;
This silk-screen printing device also has bit cell, this bit cell in production run after detecting the center of the 1st～the 4th pattern by Unit the 1st and the 2nd, when carrying out the calculating of XY θ platform contraposition amount, add the compensating value of above-mentioned correcting unit login, calculate XY θ platform each controlled quentity controlled variable and carry out contraposition.
2. an image recognition as registration target with by registration target, is wherein mated 2 a plurality of rectangle patterns more than the position and is detected the registration target position and by the registration target position, carry out contraposition method for position by the pattern form based on H shape graphical model.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006212731 | 2006-08-04 | ||
| JP2006-212731 | 2006-08-04 | ||
| JP2006212731A JP2008036918A (en) | 2006-08-04 | 2006-08-04 | Screen printing equipment, and method for image recognition and alignment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101117043A true CN101117043A (en) | 2008-02-06 |
| CN101117043B CN101117043B (en) | 2011-07-27 |
Family
ID=39053371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007101369649A Expired - Fee Related CN101117043B (en) | 2006-08-04 | 2007-07-26 | Silk screen printing device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2008036918A (en) |
| KR (1) | KR100857257B1 (en) |
| CN (1) | CN101117043B (en) |
| TW (1) | TW200821156A (en) |
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- 2007-07-26 CN CN2007101369649A patent/CN101117043B/en not_active Expired - Fee Related
- 2007-07-31 KR KR1020070076773A patent/KR100857257B1/en not_active IP Right Cessation
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2008036918A (en) | 2008-02-21 |
| TWI318928B (en) | 2010-01-01 |
| CN101117043B (en) | 2011-07-27 |
| KR20080012764A (en) | 2008-02-12 |
| TW200821156A (en) | 2008-05-16 |
| KR100857257B1 (en) | 2008-09-05 |
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