CN107251239B - 具有应变改性表面有源区域的iii价氮化物纳米线和其制造方法 - Google Patents

具有应变改性表面有源区域的iii价氮化物纳米线和其制造方法 Download PDF

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CN107251239B
CN107251239B CN201580050665.6A CN201580050665A CN107251239B CN 107251239 B CN107251239 B CN 107251239B CN 201580050665 A CN201580050665 A CN 201580050665A CN 107251239 B CN107251239 B CN 107251239B
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CN107251239A (zh
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琳达·罗马诺
王平
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    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
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    • H10H20/819Bodies characterised by their shape, e.g. curved or truncated substrates
    • H10H20/821Bodies characterised by their shape, e.g. curved or truncated substrates of the light-emitting regions, e.g. non-planar junctions
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    • H10H20/01Manufacture or treatment
    • H10H20/011Manufacture or treatment of bodies, e.g. forming semiconductor layers
    • H10H20/013Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials
    • H10H20/0133Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials with a substrate not being Group III-V materials
    • H10H20/01335Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials with a substrate not being Group III-V materials the light-emitting regions comprising nitride materials
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    • H10H20/013Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials
    • H10H20/0137Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials the light-emitting regions comprising nitride materials
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    • H10H20/01Manufacture or treatment
    • H10H20/036Manufacture or treatment of packages
    • H10H20/0363Manufacture or treatment of packages of optical field-shaping means
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    • H10H20/811Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
    • H10H20/812Bodies having quantum effect structures or superlattices, e.g. tunnel junctions within the light-emitting regions, e.g. having quantum confinement structures
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    • H10H20/813Bodies having a plurality of light-emitting regions, e.g. multi-junction LEDs or light-emitting devices having photoluminescent regions within the bodies
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    • H10H20/817Bodies characterised by the crystal structures or orientations, e.g. polycrystalline, amorphous or porous
    • H10H20/818Bodies characterised by the crystal structures or orientations, e.g. polycrystalline, amorphous or porous within the light-emitting regions
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    • H10H20/8215Bodies characterised by crystalline imperfections, e.g. dislocations; characterised by the distribution of dopants, e.g. delta-doping
    • HELECTRICITY
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    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/822Materials of the light-emitting regions
    • H10H20/824Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
    • H10H20/825Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
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CN201580050665.6A 2014-08-12 2015-08-07 具有应变改性表面有源区域的iii价氮化物纳米线和其制造方法 Expired - Fee Related CN107251239B (zh)

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US201462036363P 2014-08-12 2014-08-12
US62/036,363 2014-08-12
PCT/US2015/044245 WO2016025325A1 (en) 2014-08-12 2015-08-07 Iii-nitride nanowire led with strain modified surface active region and method of making thereof

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US (2) US9882086B2 (https=)
EP (1) EP3180806A4 (https=)
JP (1) JP6505208B2 (https=)
KR (1) KR20170066319A (https=)
CN (1) CN107251239B (https=)
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Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110039313A (ko) 2008-07-07 2011-04-15 글로 에이비 나노구조 led
US11502219B2 (en) * 2013-03-14 2022-11-15 The Royal Institution For The Advancement Of Learning/Mcgill University Methods and devices for solid state nanowire devices
WO2016022824A1 (en) 2014-08-08 2016-02-11 Glo Ab Pixilated display device based upon nanowire leds and method for making the same
WO2016025325A1 (en) 2014-08-12 2016-02-18 Glo Ab Iii-nitride nanowire led with strain modified surface active region and method of making thereof
WO2016049507A1 (en) 2014-09-26 2016-03-31 Glo Ab Monolithic image chip for near-to-eye display
DE102014117892A1 (de) * 2014-12-04 2016-06-09 Osram Opto Semiconductors Gmbh Optoelektronisches Bauelement sowie optoelektronisches Bauteil
KR101787435B1 (ko) 2016-02-29 2017-10-19 피에스아이 주식회사 나노 로드 제조방법
JP7154133B2 (ja) 2016-05-04 2022-10-17 ナノシス, インコーポレイテッド 異なる色のledを含むモノリシックマルチカラー直視型ディスプレイおよびそれを製造する方法
KR102335714B1 (ko) 2016-10-24 2021-12-06 글로 에이비 발광 다이오드, 디스플레이 소자 및 직시형 디스플레이 소자
CN107749437A (zh) * 2017-11-17 2018-03-02 广州市香港科大霍英东研究院 可挠性发光二极管制程及其结构
US11605668B2 (en) * 2018-05-21 2023-03-14 Intel Corporation Pixel architectures for low power micro light-emitting diode displays
CN109037401A (zh) * 2018-06-21 2018-12-18 中国工程物理研究院电子工程研究所 一种氮化镓基水平纳米柱壳核结构阵列led的制备方法
CN109616553B (zh) * 2018-11-22 2020-06-30 中南大学 一种新型纤锌矿GaAs核壳纳米线光电探测器的制备方法
US11302248B2 (en) 2019-01-29 2022-04-12 Osram Opto Semiconductors Gmbh U-led, u-led device, display and method for the same
US11271143B2 (en) 2019-01-29 2022-03-08 Osram Opto Semiconductors Gmbh μ-LED, μ-LED device, display and method for the same
DE112020000561A5 (de) 2019-01-29 2021-12-02 Osram Opto Semiconductors Gmbh Videowand, treiberschaltung, ansteuerungen und verfahren derselben
US11156759B2 (en) 2019-01-29 2021-10-26 Osram Opto Semiconductors Gmbh μ-LED, μ-LED device, display and method for the same
US11610868B2 (en) 2019-01-29 2023-03-21 Osram Opto Semiconductors Gmbh μ-LED, μ-LED device, display and method for the same
CN109860355A (zh) * 2019-02-02 2019-06-07 苏州汉骅半导体有限公司 深紫外led制备方法
WO2020165185A1 (de) 2019-02-11 2020-08-20 Osram Opto Semiconductors Gmbh Optoelektronisches bauelement, optoelektronische anordnung und verfahren
US11538852B2 (en) 2019-04-23 2022-12-27 Osram Opto Semiconductors Gmbh μ-LED, μ-LED device, display and method for the same
US12471413B2 (en) 2019-04-23 2025-11-11 Osram Opto Semiconductors Gmbh LED module, LED display module and method of manufacturing the same
WO2020229013A1 (de) 2019-05-13 2020-11-19 Osram Opto Semiconductors Gmbh Multi-chip trägerstruktur
KR102939949B1 (ko) 2019-05-23 2026-03-17 에이엠에스-오스람 인터내셔널 게엠베하 조명 조립체, 광 안내 조립체 및 방법
US10930747B2 (en) * 2019-06-04 2021-02-23 Nxp B.V. Semiconductor device with an encircled electrode
JP7336767B2 (ja) * 2019-10-03 2023-09-01 株式会社小糸製作所 半導体発光素子および半導体発光素子の製造方法
JP7594578B2 (ja) 2019-09-20 2024-12-04 エイエムエス-オスラム インターナショナル ゲーエムベーハー 光電子構造素子、半導体構造およびそれらに関する方法
KR102902635B1 (ko) 2020-02-04 2025-12-23 삼성전자주식회사 3차원 구조 반도체 발광소자 및 디스플레이 장치
US20230317871A1 (en) * 2022-03-30 2023-10-05 The Board Of Trustees Of The University Of Illinois Light emitting diode (led) structures for a microled device, and method for producing an array of led structures
CN116014043B (zh) * 2023-03-24 2023-06-02 江西兆驰半导体有限公司 深紫外发光二极管外延片及其制备方法、led

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120225526A1 (en) * 2007-10-04 2012-09-06 Stc.Unm NANOWIRE AND LARGER GaN BASED HEMTS

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3660446B2 (ja) * 1996-11-07 2005-06-15 日亜化学工業株式会社 窒化物半導体素子及びその製造方法
JP3282174B2 (ja) 1997-01-29 2002-05-13 日亜化学工業株式会社 窒化物半導体発光素子
JP4158519B2 (ja) * 2002-12-26 2008-10-01 住友電気工業株式会社 白色発光素子およびその製造方法
US7968359B2 (en) 2006-03-10 2011-06-28 Stc.Unm Thin-walled structures
US20140012224A1 (en) 2006-04-07 2014-01-09 The Regents Of The University Of California Targeted hollow gold nanostructures and methods of use
WO2008079076A1 (en) 2006-12-22 2008-07-03 Qunano Ab Led with upstanding nanowire structure and method of producing such
EP2102899B1 (en) 2007-01-12 2020-11-11 QuNano AB Nitride nanowires and method of producing such
JP2009105088A (ja) 2007-10-19 2009-05-14 Panasonic Electric Works Co Ltd 半導体発光素子およびそれを用いる照明装置ならびに半導体発光素子の製造方法
JP4856666B2 (ja) * 2008-03-26 2012-01-18 独立行政法人科学技術振興機構 発光ダイオード素子及びその製造方法
US8138493B2 (en) 2008-07-09 2012-03-20 Qunano Ab Optoelectronic semiconductor device
KR101549620B1 (ko) 2009-01-30 2015-09-02 삼성전자주식회사 pn 구조를 지닌 Zn 산화물 나노 와이어 및 그 제조 방법
KR20110064702A (ko) 2009-12-08 2011-06-15 삼성전자주식회사 요철 구조를 지닌 코어-쉘 나노 와이어 및 이를 이용한 열전 소자
US9112240B2 (en) 2010-01-04 2015-08-18 Nanotek Instruments, Inc. Lithium metal-sulfur and lithium ion-sulfur secondary batteries containing a nano-structured cathode and processes for producing same
US8138439B2 (en) 2010-02-11 2012-03-20 Eaton Corporation Limiter including a number of gas channels and electrical switching apparatus employing the same
CN102906834B (zh) 2010-04-02 2016-03-16 英特尔公司 电荷存储设备、其制备方法、其导电结构的制备方法、使用其的移动电子设备以及包含其的微电子设备
SG186312A1 (en) 2010-06-24 2013-02-28 Glo Ab Substrate with buffer layer for oriented nanowire growth
KR101691906B1 (ko) * 2010-09-14 2017-01-02 삼성전자주식회사 Ⅲ족 질화물 나노로드 발광 소자 제조방법
FR2975532B1 (fr) * 2011-05-18 2013-05-10 Commissariat Energie Atomique Connexion electrique en serie de nanofils emetteurs de lumiere
KR20120052651A (ko) * 2010-11-16 2012-05-24 삼성엘이디 주식회사 나노로드 발광소자
KR20120059064A (ko) 2010-11-30 2012-06-08 삼성엘이디 주식회사 발광소자 및 그 제조방법
US8350251B1 (en) * 2011-09-26 2013-01-08 Glo Ab Nanowire sized opto-electronic structure and method for manufacturing the same
TWI476953B (zh) * 2012-08-10 2015-03-11 Univ Nat Taiwan 半導體發光元件及其製作方法
EP2912699B1 (en) 2012-10-26 2019-12-18 Glo Ab Method for modifying selected portions of nanowire sized opto-electronic structure
JP6070257B2 (ja) * 2013-02-21 2017-02-01 株式会社リコー 13族窒化物結晶の製造方法、及び13族窒化物結晶の製造装置
WO2014197799A1 (en) 2013-06-07 2014-12-11 Glo-Usa, Inc. Multicolor led and method of fabricating thereof
US9281442B2 (en) * 2013-12-17 2016-03-08 Glo Ab III-nitride nanowire LED with strain modified surface active region and method of making thereof
WO2016022824A1 (en) * 2014-08-08 2016-02-11 Glo Ab Pixilated display device based upon nanowire leds and method for making the same
WO2016025325A1 (en) 2014-08-12 2016-02-18 Glo Ab Iii-nitride nanowire led with strain modified surface active region and method of making thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120225526A1 (en) * 2007-10-04 2012-09-06 Stc.Unm NANOWIRE AND LARGER GaN BASED HEMTS

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Geometry and composition comparisons between c-plane disc-like and m-plane core-shell InGaN/GaN quantum wells in a nitride nanorod;Che-Hao Liao et.al;《OPTICS EXPRESS》;20120627;第20卷(第14期);说明书第15859-15870段、附图1-4,7,9 *

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US10205054B2 (en) 2019-02-12
US20180145218A1 (en) 2018-05-24
EP3180806A4 (en) 2018-03-07
EP3180806A1 (en) 2017-06-21
CN107251239A (zh) 2017-10-13
JP2017525159A (ja) 2017-08-31
US20170236975A1 (en) 2017-08-17
JP6505208B2 (ja) 2019-04-24
WO2016025325A1 (en) 2016-02-18
WO2016025325A9 (en) 2017-03-23
KR20170066319A (ko) 2017-06-14
US9882086B2 (en) 2018-01-30

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