CN107240569A - 晶圆转向装置 - Google Patents

晶圆转向装置 Download PDF

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CN107240569A
CN107240569A CN201610283301.9A CN201610283301A CN107240569A CN 107240569 A CN107240569 A CN 107240569A CN 201610283301 A CN201610283301 A CN 201610283301A CN 107240569 A CN107240569 A CN 107240569A
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CN107240569B (zh
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林生海
高自强
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Scientech Corp
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Abstract

本发明公开一种晶圆转向装置，用以将晶圆的摆放方式由平放改变为直放。晶圆转向装置包括一壳体、一转向件和一晶圆载具。壳体包括一开口。转向件连接壳体，用以使壳体旋转，使得开口旋转至朝向一第一方向或一第二方向。晶圆载具位于壳体内，用以承载晶圆。在晶圆从外部以平放的方式放入壳体内部之前，转向件使壳体旋转，使得开口朝向第二方向。当晶圆以平放的方式放入壳体内部之后，转向件使壳体旋转，使得开口朝向第一方向，并且使晶圆承载于晶圆载具，且晶圆的摆放方式由平放改变为直放。

Description

晶圆转向装置
技术领域
本发明是关于一种晶圆转向装置，特别是一种将晶圆的摆放方式由平放改变为直放，并将晶圆从不同载具之间转换的晶圆转向装置。
背景技术
在半导体制程中，需要对晶圆进行多种加工制程。在不同制程中，用来承载晶圆的载具也会不用，并且晶圆的摆放方式也会不同。当晶圆在不同载具和不同的摆放方式之间转换时，会使用许多装置来让晶圆在二个不同载具之间安全得转换。若是需要将平放在平台或流水线机台上的晶圆300放置在直立摆放式的载具上时，如图1所示，会需要先使用机械臂400抬起平放的晶圆300，再将平放的晶圆300放入晶圆暂存盒500。当晶圆暂存盒500内放满晶圆300之后，如图2所示，可将晶圆暂存盒500旋转，使得晶圆暂存盒500的底部开口510朝向下方，以便顶升机构600沿着移动方向M移动而穿过底部开口510，而将晶圆暂存盒500内的晶圆300举起。接着，如图3所示，将晶圆移载机构700和晶圆暂存盒500对齐后，使用者可以让顶升机构600升高以穿过底部开口510并举起晶圆暂存盒500内的晶圆300，使得晶圆300进入晶圆移载机构700内，以便晶圆移载机构700的夹具710夹住晶圆300。最后，如图4所示，当夹具710夹住晶圆300后，夹具710可以沿着移动方向N移动至载具800的上方，并将直立的晶圆300放置在载具800上，如此一来，即可顺利完成载具之间的转换，并且也顺利得让晶圆300的摆放方式由平放改变为直放。
然而，在上述的转换载具和改变摆放方式的作业流程中，需要用到许多机台来协助移动晶圆和暂放晶圆，因此该些机台会占用较大的空间，并且作业流程时间也较长。因此，在制程机台空间要求越来越小，制程时间要求缩短的情况下，上述的作业流程就无法符合使用要求。
因此，有必要提供一种新的机台，其可以将晶圆的摆放方式由平放改变为直放，并将晶圆从不同载具之间转换，并且不会占用过多的空间和作业时间。
发明内容
本发明的主要目的是在提供一种晶圆转向装置，其可以将晶圆的摆放方式由平放改变为直放，并将晶圆从不同载具之间转换。
为达成上述的目的，本发明的晶圆转向装置包括一壳体、一转向件和一晶圆载具。壳体包括一开口。转向件连接壳体，用以使壳体旋转，使得开口旋转至朝向一第一方向或一第二方向。晶圆载具位于壳体内，用以承载晶圆。在晶圆从外部以平放的方式放入壳体内部之前，转向件使壳体旋转，使得开口朝向第二方向。当晶圆以平放的方式放入壳体内部之后，转向件使壳体旋转，使得开口朝向第一方向，并且使晶圆承载于晶圆载具，且晶圆的摆放方式由平放改变为直放。
根据本发明的第一实施例，其中晶圆载具更包括多个载具凹槽，多个载具凹槽用以承载晶圆。
根据本发明的第一实施例，晶圆转向装置更包括多个晶圆夹持件，多个晶圆夹持件设于壳体内。
根据本发明的第一实施例，其中各个晶圆夹持件更包括多个夹持件凹槽，多个夹持件凹槽用以夹持晶圆。
根据本发明的第一实施例，晶圆转向装置更包括一晶圆限位件，晶圆限位件设于壳体内。
根据本发明的第一实施例，晶圆转向装置更包括多个载具固定件，多个载具固定件设于壳体内，并位于晶圆载具的旁边。
根据本发明的第一实施例，晶圆转向装置更包括一马达，马达连接转向件。
根据本发明的第一实施例，其中多个晶圆夹持件的数量为二。
根据本发明的第一实施例，其中多个载具固定件的数量为二。
以下结合附图和具体实施例对本发明进行详细描述，但不作为对本发明的限定。
附图说明
图1是先前技术的将晶圆放入晶圆暂存盒的示意图。
图2是先前技术的顶升机构和晶圆暂存盒的示意图。
图3是先前技术的顶升机构将晶圆移动至晶圆移载机构的示意图。
图4是先前技术的晶圆移载机构将晶圆移动至载具上的示意图。
图5是本发明的一实施例的开口朝向第一方向的晶圆转向装置的示意图。
图6是本发明的一实施例的载具固定件固定住晶圆载具的晶圆转向装置的示意图。
图7是本发明的一实施例的旋转后的晶圆夹持件的晶圆转向装置的示意图。
图8是本发明的一实施例的晶圆移动机构将晶圆放入开口朝向第二方向的晶圆转向装置的示意图。
图9是本发明的一实施例的晶圆位于晶圆转向装置内的示意图。
图10是本发明的一实施例的旋转后的晶圆限位件的晶圆转向装置的示意图。
图11是本发明的一实施例的容纳着晶圆且旋转至朝向第一方向的晶圆转向装置的示意图。
其中，附图标记
先前技术：
晶圆 300
机械臂 400
晶圆暂存盒 500
底部开口 510
顶升机构 600
晶圆移载机构 700
夹具 710
载具 800
移动方向 M、N
本发明：
晶圆转向装置 1
壳体 10
开口 11
转向件 20
晶圆载具 30
载具凹槽 31
晶圆夹持件 40
夹持件凹槽 41
晶圆限位件 50
载具固定件 60
马达 70
晶圆 100
晶圆移动机构 200
第一方向 A
第二方向 B
旋转方向 R1、R2、R3、R4、R5、R6
放置方向 P
具体实施方式
下面结合附图和具体实施例对本发明技术方案进行详细的描述，以更进一步了解本发明的目的、方案及功效，但并非作为本发明所附权利要求保护范围的限制。
以下请一并参考图5至图11关于依据本发明的一实施例的晶圆转向装置。图5是本发明的一实施例的开口朝向第一方向的晶圆转向装置的示意图；图6是本发明的一实施例的载具固定件固定住晶圆载具的晶圆转向装置的示意图；图7是本发明的一实施例的旋转后的晶圆夹持件的晶圆转向装置的示意图；图8是本发明的一实施例的晶圆移动机构将晶圆放入开口朝向第二方向的晶圆转向装置的示意图；图9是本发明的一实施例的晶圆位于晶圆转向装置内的示意图；图10是本发明的一实施例的旋转后的晶圆限位件的晶圆转向装置的示意图；图11是本发明的一实施例的容纳着晶圆且旋转至朝向第一方向的晶圆转向装置的示意图。
如图5和图8所示，在本发明的第一实施例之中，晶圆转向装置1用以将晶圆100的摆放方式由平放改变为直放，并将原本平放的晶圆100放置在晶圆载具30上。晶圆转向装置1包括一壳体10、一转向件20、一晶圆载具30、二个晶圆夹持件40、二个晶圆限位件50、二个载具固定件60和一马达70。
在本发明的第一实施例之中，壳体10包括一开口11，开口11用以供使用者放入或取出晶圆100。壳体10可以旋转，使得开口11朝向一第一方向A或一第二方向B。转向件20连接壳体10，转向件20用以使壳体10旋转，使得开口11旋转至朝向第一方向A或第二方向B。马达70连接转向件20，马达70用以提供扭力，使转向件20旋转，以使转向件20带动壳体10旋转。
在本发明的第一实施例之中，晶圆载具30设于壳体10内，晶圆载具30用以承载晶圆100。晶圆载具30包括多个载具凹槽31，多个载具凹槽31用以在晶圆100的侧面和底部固定住晶圆100，以稳定得承载晶圆100。
如图5至图8所示，在本发明的第一实施例之中，二个晶圆夹持件40设于壳体10内并位于晶圆载具30的上方，各个晶圆夹持件40包括多个夹持件凹槽41，多个夹持件凹槽41用以夹持晶圆100的侧面。二个晶圆夹持件40和壳体10枢接。当二个晶圆夹持件40分别沿着旋转方向R3、R4旋转时，各个晶圆夹持件40的夹持件凹槽41会由朝向开口11转变为朝向对方；此时，各个晶圆夹持件40的夹持件凹槽41可以稳定得夹持住晶圆100的侧面。然而，晶圆夹持件40的数量并不以两个为限，其可以照设计需求而改变。
如图5、图9和图10所示，在本发明的第一实施例之中，二个晶圆限位件50设于壳体10内并位于晶圆载具30的上方。二个晶圆限位件50和壳体10枢接。当晶圆100位于壳体10之内，且二个晶圆限位件50分别沿着旋转方向R6、R7旋转时，二个晶圆限位件50可以限制晶圆100移动，以防止晶圆100从开口11滑出。然而，晶圆限位件50的数量并不以两个为限，其可以照设计需求而改变。
如图5和图6所示，在本发明的第一实施例之中，二个载具固定件60设于壳体10内，并位于晶圆载具30的旁边。二个载具固定件60可分别沿着旋转方向R1、R2旋转，以卡固住晶圆载具30的两侧，以达成使晶圆载具30保持稳固的功效。然而，载具固定件60的数量并不以两个为限，其可以照设计需求而改变。
在本发明的第一实施例之中，晶圆转向装置1和一外部的电脑电性连接。使用者可以操作电脑，以从远端控制晶圆转向装置1的各个可活动的元件，如转向件20、晶圆夹持件40、晶圆限位件50、载具固定件60和一马达70，以使上述的元件旋转。然而，利用电脑以从远端控制机台，是本领域的通常知识，且其并非本发明的重点，因此不多做赘述。
在半导体制程中，常会需要将流水线机台上的平放的晶圆100，改变为直放并且转移到晶圆载具30上，因此，使用者可以运用本发明的晶圆转向装置1来转移晶圆100。首先，如图5所示，使用者可以先将晶圆载具30放入朝向第一方向A的壳体10内。接着，如图6所示，使用者可以操作外部的电脑，以控制晶圆转向装置1的二个载具固定件60分别沿着旋转方向R1、R2旋转，以卡固住晶圆载具30的两侧，使得晶圆载具30保持稳固。接着，如图7所示，使用者可以操作外部的电脑，以控制晶圆转向装置1的二个晶圆夹持件40分别沿着旋转方向R3、R4旋转，使各个晶圆夹持件40的夹持件凹槽41由朝向开口11转变为朝向对方；藉此，各个晶圆夹持件40的夹持件凹槽41和晶圆载具30的载具凹槽31可以稳固得卡固住稍后放入的晶圆100的周围。接着，如图8和图9所示，使用者可以操作外部的电脑，控制马达70带动转向件20沿着旋转方向R5旋转，以使转向件20带动壳体10旋转至开口11朝向第二方向B；此时，使用者可以操作外部的电脑以控制一外部的晶圆移动机构200，让晶圆移动机构200抬起流水线机台上的平放的晶圆100，将平放的晶圆100从开口11放入壳体10内部，并将晶圆100和各个晶圆夹持件40的夹持件凹槽41以及晶圆载具30的载具凹槽31互相卡固，藉此，晶圆100可以稳固得位于壳体10内部。
如图9和图10所示，在本发明之中，当壳体10装满晶圆100之后，使用者可以操作外部的电脑，控制二个晶圆限位件50分别沿着旋转方向R6、R7旋转；此时，旋转后的二个晶圆限位件50可以限制晶圆100移动，以防止晶圆100从壳体10滑出。最后，如图5和图11所示，使用者可以操作外部的电脑，控制马达70带动转向件20沿着旋转方向R8旋转，以使转向件20带动壳体10旋转至开口11朝向第一方向A；藉此，晶圆100的摆放方式会从平放变成直放，且晶圆100会承载于晶圆载具30上。因此，使用者可以操作外部的电脑，控制二个晶圆限位件50和二个晶圆夹持件40恢复原状，使晶圆限位件50不再限制晶圆100移动，并且使晶圆夹持件40不再卡固晶圆100。如此一来，使用者即可将晶圆载具30以及位于晶圆载具30上的晶圆100，从壳体10内取出，让位于晶圆载具30上的直放的晶圆100进行其他的半导体制程。
藉由本发明的晶圆转向装置1的设计，可以让晶圆100从外部的机台移动到晶圆载具30上，并且将晶圆100的摆放方式由平放改变为直放。另外，本发明的晶圆转向装置1具有改变晶圆100的摆放方式以及将晶圆100摆放于晶圆载具30的功效，因此不需要使用传统的晶圆暂存盒、顶升机构和晶圆移载机构，就可以顺利得使平放的晶圆100以直放的方式承载于晶圆载具30，如此一来，可以省去传统的晶圆暂存盒、顶升机构和晶圆移载机构的占用空间，并且也可以减少使用传统的晶圆暂存盒、顶升机构和晶圆移载机构的作业时间。
当然，本发明还可有其它多种实施例，在不背离本发明精神及其实质的情况下，熟悉本领域的技术人员当可根据本发明作出各种相应的改变和变形，但这些相应的改变和变形都应属于本发明所附的权利要求的保护范围。

Claims (9)

1.一种晶圆转向装置，其特征在于，用以将至少一晶圆的摆放方式由平放改变为直放，该晶圆转向装置包括：
一壳体，包括一开口；
一转向件，连接该壳体，该转向件用以使该壳体旋转，使得该开口旋转至朝向一第一方向或一第二方向；以及
一晶圆载具，位于该壳体内，用以承载该至少一晶圆；
其中在该至少一晶圆从外部以平放的方式，从该开口放入该壳体内部之前，该转向件使该壳体旋转，使得该开口旋转至朝向该第二方向；当该至少一晶圆以平放的方式，从该开口放入壳体内部之后，该转向件使该壳体旋转，使得该开口旋转至朝向该第一方向，并且使得该至少一晶圆承载于该晶圆载具，且该至少一晶圆的摆放方式由平放改变为直放。
2.如权利要求1所述的晶圆转向装置，其特征在于，该晶圆载具更包括多个载具凹槽，该多个载具凹槽用以承载该至少一晶圆。
3.如权利要求2所述的晶圆转向装置，其特征在于，更包括多个晶圆夹持件，该多个晶圆夹持件设于该壳体内。
4.如权利要求3所述的晶圆转向装置，其特征在于，各个晶圆夹持件更包括多个夹持件凹槽，该多个夹持件凹槽用以夹持该至少一晶圆。
5.如权利要求4所述的晶圆转向装置，其特征在于，更包括一晶圆限位件，该晶圆限位件设于该壳体内。
6.如权利要求5所述的晶圆转向装置，其特征在于，更包括多个载具固定件，该多个载具固定件设于该壳体内，并位于该晶圆载具的旁边。
7.如权利要求6所述的晶圆转向装置，其特征在于，更包括一马达，该马达连接该转向件。
8.如权利要求7所述的晶圆转向装置，其特征在于，该多个晶圆夹持件的数量为二。
9.如权利要求8所述的晶圆转向装置，其特征在于，该多个载具固定件的数量为二。
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