CN107102480B

CN107102480B - Light irradiation device

Info

Publication number: CN107102480B
Application number: CN201610867790.2A
Authority: CN
Inventors: 木村淳治
Original assignee: Ushio Denki KK
Current assignee: Ushio Denki KK
Priority date: 2015-10-08
Filing date: 2016-09-29
Publication date: 2021-05-04
Anticipated expiration: 2036-09-29
Also published as: JP6597149B2; JP2017072769A; CN107102480A

Abstract

The invention provides a light irradiation device, which does not complicate the mechanism and does not affect the productivity when having the function of monitoring the illumination reduction caused by the deterioration of the light source. A table (2) holding an object (W) on the upper side is moved in the X direction by a conveying mechanism (3), and the workpiece (W) receives light irradiation when passing through an effective irradiation area. An illuminometer is mounted on a side surface (21) of the table (2), and moves integrally with the table (2) to pass through an effective irradiation region. The measured value of the illuminometer (6) is transmitted to the controller (7), and a light amount calculation unit (71) provided in the controller (7) calculates the light amount and stores the calculated light amount in a storage unit (72).

Description

Light irradiation device

Technical Field

The present invention relates to an apparatus for irradiating light to an object.

Background

Industrial use of light is progressing in various fields, and light is irradiated to an object for various purposes. In particular, a technique of light treatment in which light is a property change of an object is widely used in a manufacturing process of various products.

For example, in the manufacturing process of liquid crystal displays, a photo process called photo alignment has been frequently used in recent years. Photo-orientation is a technique as follows: when an alignment layer for a liquid crystal display and an alignment layer for a viewing angle compensation film are obtained, an alignment film (film to be an alignment layer) is obtained by irradiating a film material for an alignment layer with light.

In the field of such optical processing, the following configuration may be adopted: light is irradiated in advance to a certain set region, and an object to be subjected to light processing (hereinafter, referred to as a workpiece) is conveyed so as to pass through the region (hereinafter, referred to as an irradiation region), thereby performing light processing. As shown in patent document 1, a device employing such a configuration is also used in the field of photo-alignment.

Fig. 9 is a schematic diagram of such a conventional light irradiation device, and fig. 9(1) is a schematic diagram of a front view, and fig. 9(2) is a schematic diagram of a side view. As shown in fig. 9, the light irradiation device includes a light irradiator 1 that irradiates light to an irradiation region and a conveying mechanism 3 that conveys a workpiece W.

In fig. 9, the irradiation region is a square region having a width slightly larger than the width of the workpiece W. The light irradiator 1 is configured to include a light source 11 and a mirror 12 so as to be capable of irradiating light in accordance with the square pattern. For example, the light source device includes a bar-shaped light source 11 that is long in the width direction, and a long mirror 12 that covers the light source 11 from above. The conveyance path of the conveyance mechanism 3 is set in the horizontal direction so as to penetrate the irradiation region.

The workpiece W is held on the table 2, and the table 2 is moved while passing through the irradiation region, thereby irradiating light to the workpiece W. In the case of performing light alignment, the light irradiator 1 is configured to hold the polarizer 14 on the emission side of the light source 11 and irradiate the workpiece W with light (polarized light) having passed through the polarizer 14.

Patent document 1: japanese patent laid-open publication No. 2014-174287

In the light irradiation device that performs the light processing as described above, it is necessary to provide a sufficient amount of light to the workpiece, but when the amount of light is insufficient, the light processing is generally insufficient. Here, the light irradiation device often includes a light source whose light output gradually decreases. In this case, the deterioration often causes the deterioration, but the light output performance may be slightly lowered from the initial state even if the deterioration is not reached.

In the light irradiation device as described above, on the premise that light is irradiated at a predetermined illuminance in the irradiation region, a predetermined amount of light is applied to the workpiece by conveying the workpiece at a predetermined speed and passing the workpiece through the irradiation region. Thus, if the illuminance is reduced from a predetermined value, the light amount is directly reduced, and the light processing is insufficient.

Therefore, it is often performed to measure the illuminance periodically and to check whether or not a sufficient irradiation intensity or irradiation dose can be obtained. When the irradiation intensity or the irradiation amount is reduced by the limit or more, measures such as exchanging the light source are taken.

Conventionally, an illuminometer 6 required for inspection of irradiation intensity and irradiation dose is provided in a light irradiator 1 as shown in fig. 9 (2). The position of the illuminometer 6 is a position not to block light irradiation to the irradiation region.

In such a conventional light irradiation device, the position at which the illuminance measurement is performed is not the position at which the workpiece W is actually irradiated with light (position within the irradiation region), and therefore there is a problem in that the actual irradiation intensity or the decrease in the irradiation amount with respect to the workpiece W is not faithfully monitored.

For example, in the field of light processing, processing is often performed using high energy of light in the ultraviolet region, and a discharge lamp such as a high-pressure mercury lamp is often used as a rod-shaped light source. In the rod-shaped discharge lamp, blackening or the like occurs near the electrodes at both ends with the passage of time, and the light output may decrease. Even if the light output is reduced at both ends, sufficient light output is present at the other portion including the central portion, and the light output can be used sufficiently in many cases. That is, light irradiation is often performed with sufficient illuminance in the irradiation region.

In such a case, as shown in fig. 9(2), when the illuminometer 6 is disposed at a position away from the irradiation region, the illuminometer 6 may detect the decrease in illuminance and determine that the replacement timing of the light source 11 has come. That is, although the light source may be used sufficiently, the indication that the light source 11 should be exchanged may be displayed.

Accordingly, the illuminometer 6 is preferably disposed as close as possible to the irradiation region. In this case, it is more preferable to measure the illuminance of the irradiation region by disposing the illuminometer 6 in the irradiation region, but since the illuminometer cannot be positioned in the irradiation region during the processing of the workpiece W (when passing through the irradiation region), as a result, the illuminance is measured by disposing the illuminometer 6 in the irradiation region or passing through the irradiation region at the interval of the processing while keeping the light source 11 turned on. This structure is shown in patent document 1.

As in patent document 1, there are two major problems in the case where the illuminance meter is disposed in the irradiation region or the illuminance is measured while passing through the irradiation region in the gap of the process. One problem is that a special mechanism is additionally required to move the illuminometer, and the mechanism becomes complicated. Another problem is that the step of measuring the illuminance is provided in the gap of the process, which affects the productivity. In patent document 1, the latter problem is not affected by the production interval time because the illuminance is measured by using the discharge time of the workpiece after the end of the processing. However, in such an apparatus, the workpiece is generally discharged by using a robot, and the operation speed is relatively high. On the other hand, in patent document 1, the illuminance sensor is moved at the same speed as the speed of the workpiece, and in the case of processing in which the amount of irradiation light is large, the speed is reduced, and the moving speed of the illuminance sensor is also reduced. In this case, even if the discharge of the workpiece is completed, the movement of the illuminance sensor (illuminance measurement) may not be completed yet, and the production interval time may be affected.

Disclosure of Invention

The present invention has been made in view of the above circumstances, and an object thereof is to provide a light irradiation device having a function of monitoring a decrease in illuminance due to deterioration of a light source or the like, the light irradiation device having a structure that is not mechanically complicated and does not affect productivity.

In order to solve the above problem, the invention described in claim 1 of the present application is a light irradiation device including: a light irradiator that irradiates light to an irradiation region; a table for holding an object on an upper side; and a conveying mechanism for conveying the object by moving the table along a conveying path set in a state of passing through the irradiation region,

an illuminometer for measuring the illuminance of light from the light irradiator is attached to a side surface of the table.

In order to solve the above problem, an invention according to claim 2 is a configuration according to claim 1, including: a light irradiator that irradiates light to an irradiation region; a table for holding an object on an upper side; and a conveying mechanism for conveying the object by moving the table along a conveying path set in a state of passing through the irradiation region,

an illuminometer for measuring illuminance of light from the light irradiator is attached to the table at a position where the light from the light irradiator is not blocked with respect to the object and the light from the light irradiator is not blocked with respect to the object.

In order to solve the above problem, the invention according to claim 3 is configured such that, in the configuration according to

claim

1 or 2, the illuminometer is attached to a position passing through the irradiation region.

In order to solve the above problem, the invention according to claim 4 is configured such that the structure according to

claim

1, 2 or 3 is provided with a θ movement mechanism for rotating the table about an axis in the vertical direction.

In order to solve the above problem, the invention according to claim 5 is configured such that, in the configuration according to claim 1, the contour shape of the table in a plan view has at least one corner,

the illuminometers are respectively mounted on two adjacent side surfaces with a corner portion therebetween.

In order to solve the above problem, the invention according to claim 6 is configured such that, in the configuration according to claim 1, the outline shape of the table in a plan view is a square shape,

at least one of the illuminometers is mounted on each side surface.

In order to solve the above problem, the invention according to claim 7 is configured such that, in the configuration according to claim 6, the illuminometers attached to the side surfaces of the sides facing each other in the square outline shape are not positioned on the same straight line extending in the direction of the conveyance path or provided with a θ mechanism for changing the posture by rotating the table about the vertical axis.

In order to solve the above problem, the invention according to claim 8 is configured such that, in the configuration according to claim 1, the contour shape of the table in a plan view is a shape having two sides facing each other,

the illuminometers are respectively mounted on side surfaces located on opposite sides, and each illuminometer is not located on the same straight line extending in the direction of the conveying path, or is provided with a theta mechanism which rotates the table about an axis in the vertical direction to change the posture.

In order to solve the above problem, the invention according to claim 9 is configured such that, in any one of the configurations according to claims 1 to 8, an auxiliary moving mechanism that linearly moves the table in a direction intersecting with a direction of the conveyance path is provided.

In order to solve the above problem, the invention according to claim 10 is configured such that, in any one of the configurations according to claims 1 to 9, the light amount calculation means for calculating an integrated light amount by integrating the measurement values of the illuminometer, and the storage unit for storing the calculated light amount are provided.

ADVANTAGEOUS EFFECTS OF INVENTION

As described below, according to the invention described in claim 1 of the present application, since the illuminometer for monitoring the intensity or amount of light irradiation to the object is attached to the side surface of the table, illuminance measurement is performed under a condition closer to the object. Therefore, the deterioration of the light source and the like are not judged by mistake. Further, it is not necessary to dispose an illuminometer in the irradiation region or the vicinity thereof, or to separately provide a mechanism for passing the illuminometer through the irradiation region or the vicinity thereof, and therefore, the mechanism is simplified. In addition, since it is not necessary to measure the intensity during the time period when the object is discharged, the productivity is not affected.

Further, according to the invention described in claim 2, since the illuminance meter for monitoring the intensity or amount of light irradiation to the object is attached to the table, illuminance measurement is performed under a condition closer to the object. Therefore, the deterioration of the light source and the like are not judged by mistake. Further, it is not necessary to dispose an illuminometer in the irradiation region or the vicinity thereof, or to separately provide a mechanism for passing the illuminometer through the irradiation region or the vicinity thereof, and therefore, the mechanism is simplified. In addition, since it is not necessary to measure the intensity during the time period when the object is discharged, the productivity is not affected.

In addition, according to the invention described in claim 3, in addition to the above-described effects, since the illuminance meter is attached at a position that passes through the irradiation region, the illuminance measurement is performed under a condition that the illuminance meter is closer to the object due to this. Therefore, the possibility of erroneous determination is further reduced.

Further, according to the invention described in claim 4, in addition to the above-described effects, since the θ movement mechanism that rotates the table about the vertical direction is provided, the illuminometer is also rotated, and the illuminometer can be positioned at a position that can pass through an arbitrary position in the irradiation region, and illuminance can be measured at the arbitrary position.

Further, according to the invention described in claim 5, in addition to the above-described effects, since the illuminometers are respectively attached to the two side surfaces adjacent to each other with the corner portion interposed therebetween, illuminance at two locations can be measured to obtain an illuminance distribution.

In addition, according to the invention described in claim 6, in addition to the above-described effects, since the outline shape of the table in a plan view is a square shape and at least one illuminometer is attached to each side surface of the table, illuminance can be measured at three or four positions to obtain an illuminance distribution.

In addition, according to the invention described in claim 7, in addition to the above-described effects, the illuminance distribution can be obtained by measuring the illuminance at four places.

In addition, according to the invention described in claim 8, in addition to the above-described effects, the illuminance distribution can be obtained by measuring the illuminance at two places.

Further, according to the invention described in claim 9, in addition to the above-described effects, since the auxiliary moving mechanism that linearly moves the table in the direction intersecting the direction of the conveyance path is provided, the measurement of the contrast can be performed at an arbitrary position in the direction.

Further, according to the invention described in claim 10, in addition to the above-described effects, since the light amount obtained by integrating the measurement values of the photometer is stored in the storage unit, the light amount can be monitored.

Drawings

Fig. 1 is a schematic perspective view of a light irradiation device according to a first embodiment.

Fig. 2 is a schematic front view of the light irradiation device according to the first embodiment.

Fig. 3 is a schematic side view of the light irradiation device according to the first embodiment.

Fig. 4 is a schematic plan view showing a main part of each of the second to fourth embodiments.

Fig. 5 is a schematic plan view showing an example in which the number of measurement positions is increased in the fourth embodiment.

Fig. 6 is a schematic plan view showing an example of measuring the distribution of the amount of irradiation light at different positions in the third embodiment.

Fig. 7 is a schematic plan view showing a structure for improving productivity in the third embodiment.

Fig. 8 is a schematic plan view showing a mounting structure of the illuminometer 6 according to another embodiment.

Fig. 9 is a schematic diagram of a conventional light irradiation device.

Description of the symbols

1 light irradiator

2 working table

3 carrying mechanism

4 auxiliary moving mechanism

5 theta moving mechanism

6 illuminometer

7 controller

71 light quantity calculating unit

Detailed Description

Next, an embodiment (hereinafter, referred to as an embodiment) for carrying out the invention of the present application will be described. In the following description, a polarized light irradiation device for light alignment is given as an example of the light irradiation device. The present invention is not limited to the polarized light irradiation device for light alignment.

Fig. 1 to 3 are schematic views of a light irradiation device according to a first embodiment, fig. 1 being a schematic perspective view, fig. 2 being a schematic front view, and fig. 3 being a schematic side view. The light irradiation device shown in fig. 1 to 3 includes: a light irradiator 1 that irradiates light to an irradiation region; a table 2 for holding an object W on an upper side; and a conveying mechanism 3 for moving the table 2 along a conveying path set in a state of passing through the irradiation region. In the present embodiment, light irradiation is performed for the light treatment. Hereinafter, the object W is referred to as a workpiece.

First, the effective irradiation region and the conveyance path will be described.

When the light source is simply referred to as an "irradiation region", there are two meanings, that is, a case of widely referring to a region to which light is irradiated and a case of setting a region as a region to which light should be irradiated. The "effective irradiation region" means a region which is set in advance as a region to which light is irradiated with illuminance effective for the light treatment of the workpiece W, and means the latter of the two meanings. In the present embodiment, there is substantially no light irradiated outside the effective irradiation region on the irradiation surface, and the effective irradiation region coincides with a broad irradiation region. Therefore, it is not necessary to distinguish between the regions, and in the following description, "irradiation region" is used as meaning an effective irradiation region (set region).

In the present embodiment, the irradiation region is set to be a rectangular region. For convenience, the longitudinal direction of the rectangle is referred to as the Y direction, and the short direction is referred to as the X direction. The conveyance path is set in a state of passing through the irradiation region, but in the present embodiment, the direction of the conveyance path coincides with the X direction. That is, the irradiation region intersects the conveyance path (is orthogonal to the Y direction).

When the length of the workpiece W in the Y direction is defined as "width", the length of the irradiation region in the Y direction is sufficiently longer than the width of the workpiece W. Therefore, when the workpiece W is conveyed along the conveyance path and passes through the irradiation region, the entire upper surface of the workpiece W is irradiated with light.

In the present embodiment, the workpiece W is a square plate-like member, but the table 2 is rotatable about a rotation axis whose axis is the vertical direction as described later, and therefore the size of the width of the workpiece W varies by the rotation. Thus, the size of the irradiation region is set so that the length of the irradiation region in the Y direction is larger than the width of the workpiece W even when the width is the largest.

The light irradiator 1 for irradiating such an irradiation region with light is constituted by a light source 11, a mirror 12 for covering the back of the light source 11, a lamp housing 13 for housing these, and the like. As described above, since the irradiation region is rectangular, the light source 11 is a rod-shaped light source having a light emitting portion that is long in the Y direction. Since the device of the present embodiment is a device for irradiating ultraviolet rays, a rod-shaped discharge lamp such as a high-pressure mercury lamp or a metal halide lamp that emits ultraviolet rays is used. The light source 11 is arranged in a state where the longitudinal direction coincides with the Y direction. As the light source 11, a light source in which a plurality of ultraviolet light emitting elements including LEDs, LDs, and the like are arranged in an array in the Y direction can be used.

The mirror 12 is also a so-called groove mirror that is long in the Y direction. The cross-sectional shape of the reflecting surface of the mirror 12 in the X direction is an elliptic arc or a parabola.

In the present embodiment, the light irradiation device for light alignment is configured such that the light irradiator 1 irradiates light polarized in a predetermined direction to an irradiation region. Specifically, as shown in fig. 2 and 3, the polarizing element 14 is provided in the globe 13. As the polarizing element 14, a grid polarizing element is used in the present embodiment. The grid polarizer has a structure in which a grid in the form of minute stripes (lines and spaces) is formed on a transparent substrate, and the separation interval between the linear portions constituting the grid is set to be about the wavelength of polarized light or shorter than the wavelength.

Since it is difficult to cover a wide irradiation region with one polarizer 14, the present embodiment employs a structure in which a plurality of polarizers 14 are arranged in the Y direction and unitized. That is, a plurality of polarizing elements 14 arranged in the Y direction, and a polarizing element unit formed of a frame, not shown, holding the polarizing elements 14 are mounted in the globe 13. Each polarizing element 14 is located between the light source 11 and the illumination area.

As shown in fig. 1, the table 2 is a table-like member, and in the present embodiment, is a member having a square outline shape in a plan view. The table 2 includes a plurality of support pins, not shown. Each support pin slightly protrudes from the upper surface of the table 2. A part of each support pin is tubular and performs suction for vacuum suction. The table 2 is held by vacuum suction on the respective support pins.

The table 2 is provided with an alignment mechanism, not shown. The alignment mechanism is a mechanism for reading a not-shown mark provided on the workpiece W and finely adjusting the position and posture of the workpiece W.

In the present embodiment, the conveyance mechanism 3 is a mechanism using a linear motor. Specifically, the conveying mechanism 3 includes a linear guide 31 extending parallel to the X direction, and a stator 32 of a linear motor in which magnets are arranged so as to extend in the X direction. Then, a moving stage (hereinafter, referred to as an X-direction moving stage) 33 is provided, and the moving stage 33 is provided with a movable element that is driven with respect to the fixed element 32. The X-direction moving stage 33 is moved by sequentially changing the polarity of each magnetic pole of the movable element. The X-direction moving stage 33 has a groove fitted to the linear guide 31, and is guided by the linear guide 31 and moves in the X direction in accordance with the operation of the linear motor 32. Further, as the conveying mechanism, a mechanism to which a ball screw is applied can be adopted.

In the present embodiment, a mechanism (hereinafter, referred to as an auxiliary movement mechanism) 4 that linearly moves the tables 2 in the Y direction and a mechanism (hereinafter, referred to as a θ movement mechanism) 5 that rotates each table 2 about an axis in the vertical direction are provided. The auxiliary moving mechanism 4 is also a linear motor type conveying mechanism.

Then, as shown in fig. 1, the θ movement mechanism 5 is fixed to the Y-direction movement table 43, and the table 2 is attached in a state of being pivotally supported by the θ movement mechanism 5. The θ movement mechanism 5 is a mechanism including: the table 2 is provided with a servo motor, and can rotate by a predetermined angle with respect to a reference direction and maintain its posture. The reference direction is, for example, the X direction. By such a mechanism, the table 2 can be transported in the X direction and can be moved in the Y direction and the θ direction.

The light irradiation device of the above-described embodiment includes an illuminometer 6 for monitoring the intensity or amount of light irradiation to the workpiece W. In the description of the embodiments, the illuminance refers to the intensity of light irradiation and is the radiant illuminance (W/m)²). The illuminometer measures the illuminance of the radiation in the irradiation region. The irradiation amount is the amount of light energy in the irradiation region, and the "light amount" is strictly "the integrated light amount". Cumulative light quantity (J/m)²) Illuminance (W/m)²) X irradiation time (sec).

The major feature of the device of the embodiment is that the illuminometer 6 is mounted on the table 2. The illuminometer 6 is mounted on a table 6, which has two implications. One meaning is that the illuminance is measured at a position as close as possible to the workpiece W to which the light is irradiated, and the workpiece W is moved integrally with the table 2, and as a result, the workpiece W is irradiated with the light in the same manner and the illuminance is measured.

More specifically, in the present embodiment, the illuminometer 6 is attached to the side surface 21 of the table 2. As described above, the table 2 is a table-like member having a square outline shape in plan view. When the stable posture is set in a state where one side of the square is oriented in a direction parallel or perpendicular to the X direction, the side surface 21 of the table 2 in the stable posture along the X direction is fixed in the present embodiment.

The mounting of the illuminometer 6 to the table 2 is important in that the illuminometer 6 is mounted at a position of an irradiation region passing through the light irradiator 1.

When light irradiation is performed for the purpose of performing light treatment, the shape and arrangement of the light source 11 and the mirror 12 are adopted so that a rectangular area with high illuminance is formed and an area with uniform illuminance is formed, from the viewpoint of ensuring uniformity of treatment. In this case, the area of uniform and high illuminance is the area used for the photo processing, which is the irradiation area.

The irradiation region is a region sufficiently long with respect to the width (length in the Y direction) of the workpiece when conveyed in the Y direction. In other words, the shape and arrangement of the light source 11 and the mirror 12 are determined so as to be sufficiently long with respect to the width of the workpiece to be processed and the width of the irradiation region (length in the Y direction). Thus, the irradiation region is wider than the width of the workpiece W in the Y direction, and a margin exists. In the embodiment, the illuminometer 6 is arranged at a position of the region that passes through the margin. The irradiation region is wide enough to be wide enough relative to the width of the table 2. By attaching the illuminometer 6 to the side surface of the table 2 in the width direction, the illuminometer 6 passes through the irradiation region.

In this manner, the fact that the illuminometer 6 is attached to the position where the illuminometer 6 passes through the irradiation region means that the illuminance is measured at the position where the state of the workpiece W that is actually irradiated with light is as the same as possible. Even if the initial installation position of the illuminance meter 6 is outside the irradiation region, the illuminance meter can be measured by being installed on the table 2 by appropriately performing the Y-direction movement or the θ movement so as to pass through the irradiation region or a place close to the irradiation region, and therefore, the illuminance can be measured in a state close to the light irradiation on the workpiece 6 to a greater extent than when installed on the globe 13 or the like.

As the illuminometer 6, an illuminometer using an Si photodiode or the like as a light receiving element is used. The illuminance meter 6 is fixed in a posture in which the light receiving surface faces upward. As shown in fig. 3, the light receiving surface of the illuminometer 6 is at the same height as the upper surface of the workpiece placed on the table 2. This also means that the illuminance is measured in the same state as the workpiece as much as possible. Further, the light meter 6 may be attached by fixing a holder, which holds the light meter 6, to the side surface 21 of the table 2.

As shown in fig. 3, the light irradiation device according to the embodiment includes a controller 7 that controls each part of the device. The controller 7 controls the operation of the conveyance mechanism 3, and also controls the lighting power supply 11 of the light source 11. As shown in fig. 3, the illuminometer 6 is connected to the controller 7, and a measurement signal of the illuminometer 6 is input to the controller 7.

A light amount calculation unit 71 that calculates an integrated light amount from the output value of the illuminometer 6 is installed in the controller 7. The light amount calculation unit 71 is a part (software) of a sequence program provided in the controller 7, but may be realized by hardware. The light amount calculating unit 71 is configured to calculate an integrated light amount from the measurement value of the illuminometer 6 every time a process (one reciprocation of the table 2) is performed, and store the integrated light amount in a storage unit (such as a memory) 72 provided in the controller 7. The apparatus includes a display, not shown, for displaying the data stored in the storage unit 72, and the data of the integrated light amount can be appropriately displayed on the display as history data.

On the other hand, the device includes a light measurement unit 8 in addition to the illuminometer 6. The light measurement unit 8 is located at a standby position away from the irradiation region during normal processing, and is disposed in the irradiation region for use during maintenance or the like. The light measurement unit 8 has a function of measuring the direction of the polarization axis of the polarized light to be irradiated, in addition to a function of measuring the illuminance of the irradiated region.

As shown in fig. 1, the light measurement unit 8 is mounted on the conveyance mechanism 3 and normally stands by at a standby position set at one end in the X direction. The standby position is set, for example, outside the loading position (on the side away from the irradiation region).

The light measurement unit 8 includes an X-direction moving stage 81 mounted on the linear guide 31 and the fixing member 32, a Y-direction moving mechanism 82 and a Y-direction moving stage 83 mounted on the X-direction moving stage 81, a main illuminance meter 84 fixed to the Y-direction moving stage 83, a polarized light measurement device 85 fixed to the Y-direction moving stage 83, and the like.

The Y-direction moving mechanism 82 is a mechanism for moving the Y-direction moving table 83 in the Y-direction, and may be a linear motor type mechanism or a mechanism using a ball screw.

Similarly, the main illuminometer 84 incorporates a photoelectric conversion element such as an Si photodiode as a light receiving element. The height of the light receiving surface is the same as the height of the surface of the workpiece W held by the table 2, as in the illuminometer 6 provided on the table 2.

The polarized light meter 85 is a meter for monitoring the direction of the polarized light irradiated to the irradiation region. The polarization measuring device is a measuring device such as a local light receiving element, an analyzer disposed on the incident side of the light receiving element, and a rotating mechanism for rotating the analyzer around an optical axis (in this example, in the vertical direction). The analyzer is a polarizing element, and is a plate-shaped optical member that selectively passes linearly polarized light in a specific direction.

The plate surface of the analyzer is disposed perpendicular to the optical axis and rotated in the rotation direction. The polarized light polarized by the polarizing element 14 in the light irradiator 1 is irradiated on the irradiation region. When the orientation of the polarization axis of the polarized light is examined, the polarization analyzer 85 is positioned within the irradiation region and the analyzer is rotated. The rotation of the analyzer causes the output of the light receiving element to vary periodically. The rotation angle at which the output is highest indicates the orientation of the polarization axis of the polarized light to be irradiated.

The operation of the light irradiation device according to the embodiment having the above-described configuration will be described below.

The sheet is conveyed to a position within the operation range of a robot (not shown) by a batch conveying mechanism such as an AGV (automated Guided Vehicle) or a sheet-processing conveying mechanism such as a pneumatic conveyor. The light irradiator 1 lights the light source 11 in advance to irradiate the irradiation region with light. In the initial state of operation, the table 2 is at the loading position, and one workpiece W is loaded on the table 2 by a robot not shown. Then, an alignment mechanism (not shown) is operated to set the workpiece W in a predetermined posture with respect to a reference direction (for example, X direction). The auxiliary moving mechanism 4 is operated as necessary to position the workpiece W at a predetermined position in the Y direction.

In this state, the conveyance mechanism 3 is operated to move the table 2 in the X direction so as to pass through the irradiation region. As a result, the workpiece W is irradiated with light. In the present embodiment, the light is polarized by the polarizer 14, and the polarized light is irradiated in a predetermined direction.

The conveying mechanism 3 is configured to rotate the workpiece W on the table 2 in a reverse direction at a predetermined reverse position after the workpiece W completely passes through the irradiation region. "complete pass" means that the edge of the workpiece W at the rear in the X direction completely passes through the irradiation region. The inversion position is a position where the illuminance is substantially zero (a position outside the irradiation region) in the illuminance distribution shown in fig. 2, and is a position where the illuminance is zero at any position of the workpiece W.

The conveying mechanism 3 reverses the table 2 at the reverse position, and then moves the table in the reverse direction in the X direction to return to the loading position. In the present embodiment, light (polarized light) is also irradiated to the workpiece W in this circuit. Then, the robot, not shown, removes the workpiece W from the table 2 returned to the loading position, and places the next workpiece W on the table 2.

In the present embodiment, the rotation in the θ direction is a rotation in which the workpiece W is set to a predetermined posture with respect to the posture of the polarizer 14 (the orientation of the polarization axis of the polarized light to be irradiated), and therefore, the rotation may be different depending on the lot (type). In this case, the setting information in the controller 7 is changed after the processing of a certain batch is completed. As a result, the θ movement mechanism 5 is appropriately operated for each workpiece W of the next batch, and the workpiece W is transported at a different rotation angle and irradiated with polarized light.

In such an operation, the illuminometer 6 moves integrally with the table 2 and passes through the irradiation region. Therefore, the illuminometer 6 receives light irradiation similarly to the workpiece W on the table 2, and the measured value is output to the controller 7. The light amount calculation unit 71 mounted on the controller 7 calculates an integrated light amount by integrating the output value of the photometer 6. The light amount calculation unit 71 calculates an integrated light amount from the measurement value of the illuminometer 6 every time processing (one reciprocation of the table 2) is performed, and stores the integrated light amount in a storage unit (such as a memory) 72 provided in the controller 7.

Then, the operator who monitors the operation of the apparatus periodically displays the history data of the storage unit 72 on the display, and checks whether the integrated light amount is within a predetermined range. If the integrated light quantity is lower than the predetermined value, it is determined that the light quantity is insufficient, and appropriate measures such as switching of the light source 11 are performed.

In the light irradiation device of the above-described operation embodiment, the illuminance meter 6 for monitoring the amount of light irradiated to the workpiece W is attached to the side surface of the table 2, and therefore illuminance measurement is performed under a condition closer to the workpiece W. Therefore, deterioration of the light source 11 and the like are not erroneously determined. In the present embodiment, the illuminance meter 6 is attached to a position that passes through the irradiation region, and therefore, the illuminance can be measured closer to the workpiece W. Therefore, the possibility of erroneous determination is further reduced.

Further, since it is not necessary to separately provide a mechanism for arranging the illuminometer 6 in the irradiation region and a mechanism for moving the illuminometer so as to pass through the irradiation region, the mechanism can be simplified. Further, since it is not necessary to measure the illuminance during the time period when the workpiece W is discharged, the productivity is not affected.

In the operation of the above-described device, the light measurement unit 8 is used for maintenance of the device after the process is repeated a certain number of times. That is, in a state where the table 2 is retracted to the opposite side, the X-direction moving stage 81 is moved in the X direction, and the polarized light is measured by disposing, for example, the polarized light measuring device 85 in the light measuring unit 8 within the irradiation region. Then, it was confirmed from the measurement result whether or not the polarization axis of the polarized light was oriented in a desired direction.

The main illuminometer 84 is used for performance inspection of the illuminometer 6 and the like. That is, after the main illuminometer 84 is disposed at the same Y-direction position as the illuminometer 6, it is passed through at a set passing speed in the X-direction and the illuminance is measured, and the amount of light is calculated and the difference from the amount of light of the illuminometer 6 is detected. If the difference is large, the illuminometer 6 is corrected. That is, the main illuminometer 84 can be used for calibration of each illuminometer 6. The illuminometer 6 frequently receives light irradiation through the irradiation region, and thus the characteristics are likely to change. Therefore, the main illuminance meter 84 is used to perform correction appropriately.

Next, the second to fourth embodiments will be explained. Fig. 4 is a schematic plan view showing a main part of each of the second to fourth embodiments. In each of the second to fourth embodiments, the number of illuminometers 6 to be mounted and the mounting positions are different from those in the first embodiment.

That is, in the second embodiment shown in fig. 4(1), on the table 2 which is rectangular in plan view, the illuminometers 6 are attached to two side surfaces which are adjacent to each other with one corner portion therebetween. In the third embodiment shown in fig. 4(2), illuminometers 6 are attached to the four side surfaces of the table 2, which is rectangular in plan view.

In the fourth embodiment shown in fig. 4(3), the illuminometers 6 are attached to four side surfaces as in the third embodiment, but the positions of the illuminometers 6 attached to the side surfaces located on the two opposite sides are different from the third embodiment. That is, in the third embodiment, the positions of the illuminometers 6 located on the two opposing sides in the extending direction of the sides are the same. For example, when each edge of the table 2 is along the X direction and the Y direction, as shown in fig. 4(2), in the third embodiment, the two illuminometers 6 located along the edge in the Y direction are located at the same position when viewed from the Y direction. On the other hand, in the fourth embodiment shown in fig. 4(3), the two illuminometers 6 located on the sides along the Y direction are located at positions shifted from each other in the Y direction.

The light irradiation devices according to the second to fourth embodiments have a meaning that illuminance can be measured at a plurality of positions in the Y direction, that is, in the longitudinal direction of the irradiation region, that is, a meaning that illuminance distribution can be measured, as compared with the first embodiment. This means that the illuminometers 6 move integrally with the table 2 and pass through the irradiation region, and therefore the amount of irradiation light, that is, the distribution of the amount of irradiation light, can be measured at a plurality of different positions in the Y direction.

The meaning of the illuminance distribution measurement and the meaning of the irradiation light amount distribution measurement will be described in more detail.

As described above, the Y direction is the longitudinal direction of the irradiation region which is long in a certain direction, and the shape and arrangement of the light source 11 and the mirror 12 are selected so that the light irradiation is performed sufficiently uniformly in the direction. When the illuminance in the Y direction becomes uneven, this directly causes unevenness in the amount of irradiation light in the Y direction, and thus becomes a problem. In general, the illuminance uniformity in the Y direction is also specified to be ± several percent, and the operation of the apparatus is started in a state where it is confirmed that the illuminance uniformity is within the range.

However, the illuminance distribution in the Y direction may become uneven for some reason. The blackening of the end portion in the case of using the rod-shaped discharge lamp described above is also one cause. Further, when a plurality of light sources are arranged in the Y direction, a decrease in the output of any one light source also causes nonuniformity in the illuminance distribution in the Y direction. If the illuminance distribution in the Y direction becomes uneven, the amount of irradiation light received by the workpiece W is directly made uneven, and it is necessary to monitor whether or not the unevenness is within an allowable range. In order to perform this monitoring, it is necessary to measure the illuminance at least two positions in the Y direction. The light irradiation devices according to the second to fourth embodiments described above have a meaning that, in addition to being able to monitor the amount of light in a state closer to the workpiece W, it is also possible to monitor the unevenness of the illuminance distribution as follows.

The significance of such measurement of the Y-direction illuminance distribution can be further improved by appropriately using the auxiliary movement mechanism 4 and the θ movement mechanism 5. This point will be described with reference to the fourth embodiment as an example. Fig. 5 is a schematic plan view showing an example in which the number of measurement positions is increased in the fourth embodiment.

In the apparatus according to the embodiment, as described above, the light irradiation is performed on the outward path and the return path with respect to the workpiece W. At this time, the auxiliary moving mechanism 4 is operated at the reverse position so that light is irradiated at different positions in the Y direction on the forward path and the backward path. That is, the table 2 is slightly shifted in the Y direction at the reverse position. The offset amount is a distance (for example, half) smaller than the separation interval of the adjacent illuminometers 6 as viewed in the Y direction. Then, the circuit is transported at the shifted position. Thus, the measurement position of the irradiation light amount in the Y direction is doubled, and eight positions are obtained in this example. That is, the irradiation light amount distribution can be monitored at eight positions and the workpiece W can be processed. Although the description is omitted, the same applies to the second and third embodiments in that the measurement position is multiplied by using the auxiliary moving mechanism 4.

The irradiation light amount distribution can be measured at different positions in this manner, and can be performed by using the θ movement mechanism 5. This point will be explained by taking the third embodiment as an example. Fig. 6 is a schematic plan view showing an example of measuring the distribution of the irradiation light amount at different positions in the third embodiment.

Fig. 6 shows a state in which the workpiece W is conveyed while the table 2 is rotated by α from the reference direction (X direction) in the third embodiment. The following is assumed: one side of the table 2 is oriented in the X direction with respect to one workpiece W, and the workpiece W is conveyed and processed, and the other workpiece W is conveyed and processed while the table 2 is rotated by α. In this case, when θ is 0 °, the measurement position in the Y direction is actually 3 points, but when α is rotated, the measurement position is 4 points. Since the irradiation light amount measurement positions differ for θ 0 ° and θ α, the total of the measurement results obtained when θ 0 ° and α is summed up yields an irradiation light amount distribution at 7 points. In this way, by using the θ movement mechanism 5, the irradiation light amount distribution can be measured at different positions, or the measurement position can be increased. Although the description is omitted, the same applies to the second and fourth embodiments.

In the third embodiment, when one side of the table 2 is oriented in the X direction, the pair of illuminometers 6 located on the side along the Y direction are located at the same position in the Y direction. Therefore, when one side of the table 2 is in an attitude along the X direction (θ is 0 °), the measurement position is 3 positions. That is, it is not necessary to provide two illuminometers 6 on the side along the Y direction. However, depending on the method of use, a contribution is made to improving productivity. This point will be described with reference to fig. 7. Fig. 7 is a schematic plan view showing a structure for improving productivity in the third embodiment.

In fig. 7, of the two

illuminometers

61, 62 located on the sides along the Y direction, the illuminometer located on the left side on the paper surface is referred to as the first illuminometer 61, and the illuminometer located on the right side is referred to as the second illuminometer 62. The table 2 advances from left to right in the X direction on the outward path and from right to left on the return path. In this case, the measurement data of the second illuminometer 62 is integrated on the way as an integrated light amount, the data of the first illuminometer 61 is integrated on the way as an integrated light amount, and the both are added up as data of the integrated light amount of the whole Y-direction position. Then, on the outward path, the speed is increased at a stage where the rear edge (in this example, the left edge) of the workpiece W in the X direction passes through the irradiation region, and the workpiece W reaches the inversion position. The speed at which the workpiece W passes through the irradiation region becomes a predetermined slow speed in relation to an increase in the required irradiation light amount, and the speed can be increased after the second illuminometer 62 has passed through the irradiation region. Further, on the circuit, after the rear edge (in this example, the right edge) in the X direction of the workpiece W passes through the irradiation region, the speed can be increased and the workpiece W can reach the loading position. Thus, the production interval time is shortened, and the productivity is improved. In order to perform such an operation, the sequence program installed in the controller 7 is programmed.

The illuminometer 6 can be mounted in addition to the first to fourth embodiments. This point will be described with reference to fig. 8. Fig. 8 is a schematic plan view showing a mounting structure of the illuminometer 6 according to another embodiment.

First, in fig. 8(1), illuminometers 6 are attached to side surfaces on both sides of the table 2 facing each other in the X direction. In this case, the illuminance distribution and the irradiation light amount distribution in the Y direction can be measured, and particularly, a decrease in illuminance due to blackening or the like at both ends of the rod-shaped light source 11 can be detected.

In fig. 8(2), a plurality of illuminometers 6 are attached to a side surface of the table 2 located along the Y direction. In this case, the illuminance distribution and the irradiation light amount distribution in the Y direction can also be measured. Then, by appropriately using the auxiliary movement mechanism 4 and the θ movement mechanism 5, the measurement position can be appropriately changed.

Fig. 8(3) shows an example in which a plurality of illuminometers 6 are attached to a side surface located on one side of the table 2 along the X direction. In this case, when the side is fixed in a state of being held along the X direction, it does not mean a plurality of sides, as in the first embodiment, but if a mechanism for rotating the side in the θ direction is provided as indicated by a broken line in fig. 8(3), the amount of light irradiated can be measured at a plurality of positions in the Y direction.

Fig. 8(4) shows an example in which the illuminance meter 6 is mounted in the table 2. The table 2 has a recess for mounting the light meter 6, and the light meter 6 is mounted in the recess. Similarly, the light receiving surface of the illuminometer 6 is preferably at the same height as the upper surface of the workpiece W placed on the table 2. In the example shown in fig. 8(4), the illuminometer 6 is located outside the position where the workpiece W is placed in the table 2 in a plan view. That is, when the work W is placed on the table 2, the illuminometer 6 is in a state of not shielding the work W from the light irradiator 1, and the illuminometer 6 is in a state of not shielding the work W. In this case, it is more preferable to provide a plurality of illuminometers 6 in the Y direction because the distribution of the amount of irradiated light can be measured. Further, it is preferable that the illuminance meter 6 in the table 2 be disposed at a position that passes through the irradiation region, because the illuminance is measured in a state closer to the workpiece W.

In addition, even if the illuminometer 6 is located at a position separated from the table 2, it may be referred to as "attached to the table". For example, in a structure in which the light meter 6 is fixed to the side surface of the table 2 fixed to one end of the arm and is held by the arm at the other end, the light meter 6 may be said to be attached to the table 2.

The illuminometer 6 may be a measuring instrument (spectroscope) for measuring the intensity of the emitted light.

In the above embodiments, the outline shape of the table 2 in a plan view is a square shape, but the present invention is not necessarily limited to the square shape. But also triangular, pentagonal, circular, etc. In the case of a circle, it is assumed that two illuminometers 6 are attached to the side surface at 180 ° intervals with respect to the center of the circle, or four illuminometers 6 are attached at 90 ° intervals.

Further, the light irradiation device according to each of the above embodiments is a polarized light irradiation device for light alignment, but the present invention may be configured as another light irradiation device. For example, the apparatus may be configured to irradiate the workpiece W with light for performing a light treatment such as curing of a photocurable resin. Further, the device may be configured to irradiate light for applications other than optical processing such as appearance inspection and various analyses of products.

In each of the above embodiments, a configuration as disclosed in japanese patent application laid-open No. 2014-174352 may be adopted: the two tables are arranged on both sides in the X direction with the irradiation region therebetween, and the work W is held and alternately passed through the irradiation region, thereby irradiating each work W with light. In this case, the illuminometers may be attached to one table or may be attached to two tables. In the case of mounting the two light sources, it is preferable to make the Y-direction position of the illuminometer attached to one table and the Y-direction position of the illuminometer attached to the other table different from each other, because the distribution of illuminance or light quantity can be obtained in the same manner as in the above case.

The irradiation region is a rectangle whose Y direction is the longitudinal direction, but this is not an essential condition, and may be a rectangle whose X direction (conveyance direction) is the longitudinal direction, or a square.

The auxiliary moving mechanism 4 has a meaning that the illuminometer 6 is arranged at an arbitrary position in the Y direction, but for this reason, the direction of movement of the auxiliary moving mechanism 4 is only required to be a direction intersecting the X direction, and does not necessarily need to be the Y direction (a direction perpendicular to the X direction).

In addition, although the description has been given of an example in which the rod-shaped light sources 11 are arranged along the Y direction, this is an example in which the long light emitting sections are arranged along the Y direction. In addition, the point light sources may be arranged in a linear shape and may be equivalent to a rod-shaped light source (linear light emitting section). In addition, when the rod-shaped light sources are arranged in the X direction, if a plurality of such light sources are arranged in the Y direction, it can be considered that point light sources are arranged in the Y direction, and therefore, the same function can be achieved.

Claims

1. A light irradiation device is provided with: a light irradiator that irradiates light to an irradiation region; a table for holding an object on an upper side; and a conveying mechanism for conveying the object by moving the table along a conveying path set in a state of passing through the irradiation region,

an illuminometer for measuring the illuminance of light from the light irradiator is mounted on the side surface of the table,

the contour shape of the table in plan view has at least one corner,

2. A light irradiation device is provided with: a light irradiator that irradiates light to an irradiation region; a table for holding an object on an upper side; and a conveying mechanism for conveying the object by moving the table along a conveying path set in a state of passing through the irradiation region,

the outline shape of the working table in a plan view is square,

at least one of the illuminometers is mounted on each side surface.

3. A light irradiation apparatus as set forth in claim 1 or 2,

the illuminometer is installed at a position passing through the irradiation region.

4. A light irradiation apparatus as set forth in claim 1 or 2,

a theta movement mechanism is provided for rotating the table about an axis in the vertical direction.

5. The light irradiation apparatus according to claim 2,

among the illuminometers, illuminometers attached to side surfaces of the sides facing each other in the square outline shape are not positioned on the same straight line extending in the direction of the conveyance path, or a θ movement mechanism is provided that changes the posture by rotating the table about an axis in the vertical direction.

6. A light irradiation apparatus as set forth in claim 1 or 2,

the apparatus includes an auxiliary moving mechanism for linearly moving the table in a direction intersecting with the direction of the conveying path.

7. A light irradiation apparatus as set forth in claim 1 or 2,

the illumination device includes a light amount calculation unit that calculates an integrated light amount by integrating measurement values of the illuminometer, and a storage unit that stores the calculated light amount.

8. A light irradiation device is provided with: a light irradiator that irradiates light to an irradiation region; a table for holding an object on an upper side; and a conveying mechanism for conveying the object by moving the table along a conveying path set in a state of passing through the irradiation region,

the outline shape of the table in plan view is a shape having two opposite sides,

the illuminometers are respectively mounted on side surfaces located on opposite sides, and each illuminometer is not located on the same straight line extending in the direction of the conveying path, or a theta movement mechanism for changing the posture by rotating the table about an axis in the vertical direction is provided.