JP2017072769A - Light irradiation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a light irradiation device provided with an illuminometer, which is not complex mechanically and does not have an adverse effect on productivity when provided with a function of monitoring an illuminance decrease caused by deterioration of a light source or the like.SOLUTION: A stage 2 holding a target W on an upper side moves toward an X-direction by a transportation mechanism 3, and a work W receives light irradiation when passing through an effective irradiation range. An illuminometer is attached to a side surface of the stage 2 and moves together with the stage 2 to pass through the effective irradiation range. A measurement of the illuminometer 6 is sent to a controller, and light amount calculation means provided to the controller calculates an amount of light and stores in a memory part.SELECTED DRAWING: Figure 1

Description

  The invention of this application relates to an apparatus for irradiating an object with light.

Industrial use of light is progressing in various fields, and light is irradiated to an object for various purposes. In particular, optical processing technology that changes the properties of an object by light is actively used in manufacturing processes of various products.
For example, in the manufacturing process of liquid crystal displays, in recent years, a lot of light processing called photo-alignment has been adopted. Photo-alignment is a technique for obtaining an alignment film (film that becomes an alignment layer) by irradiating the film material for the alignment layer with light when an alignment layer for a liquid crystal display or an alignment layer for a viewing angle compensation film is obtained. It is.

In such a field of light processing, a predetermined area is irradiated with light, and an object of light processing (hereinafter referred to as a workpiece) is conveyed so as to pass through this area (hereinafter referred to as an irradiation area). Thus, a configuration for performing optical processing may be employed. Also in the field of photo-alignment, as shown in Patent Document 1, an apparatus employing this type of configuration is used.
FIG. 9 is a schematic view of this type of conventional light irradiation apparatus, FIG. 9 (1) is a schematic front view, and FIG. 9 (2) is a schematic side view. As shown in FIG. 9, the light irradiation apparatus includes a light irradiator 1 that irradiates light to an irradiation region, and a transport mechanism 3 that transports the workpiece W.

In FIG. 9, the irradiation area is a rectangular area having a width slightly wider than the width of the workpiece W. The light irradiator 1 includes a light source 11 and a mirror 12 so that light can be emitted with this square pattern. For example, a rod-shaped light source 11 that is long in the width direction and a long mirror 12 that covers the light source 11 from above are configured. The conveyance path by the conveyance mechanism 3 is set in a horizontal direction and set through the irradiation area.
The workpiece W is held on the stage 2, and the workpiece W is irradiated with light by moving while the stage 2 passes through the irradiation region. When performing photo-alignment, the light irradiator 1 has a structure in which the polarizing element 14 is held on the emission side of the light source 11, and light (polarized light) that has passed through the polarizing element 14 is irradiated onto the work W.

JP 2014-174287 A

  In the light irradiation apparatus that performs light processing as described above, it is necessary that a sufficient amount of light is given to the workpiece. If the amount of light is insufficient, the light processing is generally insufficient. Here, the light output of the light irradiation device often decreases gradually. This is often due to deterioration, but the light output performance may be slightly reduced from the initial state even if it is not a deterioration.

The light irradiation apparatus as described above is configured to deliver a predetermined amount of light to the workpiece by transporting the workpiece at a predetermined speed and passing through the irradiation region on the assumption that light irradiation is performed at a predetermined illuminance in the irradiation region. Give. Therefore, when the illuminance decreases from the planned value, it directly leads to a decrease in the amount of light, resulting in insufficient light processing.
For this reason, it is often performed to regularly measure illuminance and check whether sufficient irradiation intensity or irradiation amount is obtained. And when irradiation intensity or irradiation amount is falling beyond a limit, measures, such as exchange of a light source, are taken.
Conventionally, the illuminometer 6 required for checking the irradiation intensity and the irradiation amount is provided in the light irradiator 1 as shown in FIG. The position of the illuminometer 6 is a position that does not block light irradiation to the irradiation area.

In such a conventional light irradiation apparatus, the position at which the illuminance is measured is not a position where light is actually irradiated on the workpiece W (a position within the irradiation region). There is a problem that the decrease in irradiation dose is not monitored faithfully.
For example, in the field of light processing, processing is often performed using high energy of ultraviolet light, and a discharge lamp such as a high-pressure mercury lamp is often used as a rod-shaped light source. In the case of a rod-shaped discharge lamp, blackening or the like may occur near the electrodes at both ends over time, and the light output may decrease. Even if the light output is reduced at both ends, there are many cases where there is sufficient light output in other parts including the central part and it can be used sufficiently. That is, light irradiation is often performed with sufficient illuminance in the irradiation region.

Even in such a case, as shown in FIG. 9B, if the illuminometer 6 is installed at a position outside the irradiation area, the illuminometer 6 detects a decrease in illuminance. May be judged to have arrived. That is, an instruction to replace the light source 11 may be displayed even though it can still be used sufficiently.
Therefore, it is preferable that the illuminometer 6 is arranged as close to the irradiation area as possible. In this case, it is more preferable to place the illuminance meter 6 in the irradiation area and measure the illuminance in the irradiation area, but it cannot be positioned in the irradiation area during the processing of the workpiece W (when passing through the irradiation area). Eventually, the illuminance meter 6 is placed in the irradiation area between the processes while the light source 11 is kept on, or the illuminance is measured by passing through the irradiation area. This configuration is shown in Patent Document 1.

  There are two major problems when measuring the illuminance while placing the illuminometer in the irradiation area or passing the irradiation area between the processes as in Patent Document 1. One is that a special mechanism is separately required for the movement of the illuminometer, which is mechanically complicated. Another problem is that the step of measuring the illuminance between the processes is provided, which affects the productivity. In Patent Document 1, regarding the latter problem, the illuminance measurement is performed using the discharge time of the work after the end of processing, and therefore the tact time is not affected. However, the discharge of the workpiece in this type of apparatus is usually performed using a robot, and its operation speed is relatively fast. On the other hand, in Patent Document 1, the illuminance sensor is moved at the same speed as the work speed. In the case of processing with a large amount of irradiation light, the speed is slow, and the movement speed of the illuminance sensor is slow. In this case, there is a possibility that the movement of the illuminance sensor (illuminance measurement) may not be completed even after the discharge of the workpiece is completed, which affects the tact time.

  The invention of the present application has been made in consideration of the above-described circumstances, and is a light irradiation apparatus having a function of monitoring a decrease in illuminance caused by deterioration of a light source, etc. It is an object of the present invention to provide a light irradiation apparatus having a structure that does not affect productivity.

In order to solve the above-mentioned problem, the invention according to claim 1 of the present application is set in such a manner that a light irradiator that irradiates light to the irradiation region, a stage that holds the object on the upper side, and a state that passes through the irradiation region. A light irradiation device including a transport mechanism that transports an object by moving the stage along the transport path,
On the side surface of the stage, an illuminometer that measures the illuminance by light from the light irradiator is attached.
In order to solve the above-mentioned problem, the invention according to claim 2 is the configuration according to claim 1, wherein the light irradiator for irradiating the irradiation region with light, the stage on which the object is held on the upper side, and the irradiation region A light irradiation apparatus comprising a transport mechanism that transports an object by moving a stage along a transport path set in a state of passing through
The stage is equipped with an illuminometer that measures the illuminance by the light from the light illuminator, and the illuminometer mounting position does not shield the light from the light irradiator from the object and is not shielded by the object It has a configuration of being a position.
In order to solve the above-mentioned problem, the invention described in claim 3 has a configuration in which the illuminance meter is attached at a position passing through the irradiation area in the configuration of claim 1 or 2.
In order to solve the above problem, the invention according to claim 4 is the structure according to claim 1, 2 or 3, wherein a θ moving mechanism for rotating the stage about the vertical direction is provided. Have.
In order to solve the above problem, the invention according to claim 5 is the configuration according to claim 1, wherein the contour shape of the stage in plan view has at least one corner,
The illuminance meter is configured to be attached to each of two side surfaces adjacent to each other with a corner portion interposed therebetween.
In order to solve the above problem, the invention according to claim 6 is the configuration of claim 1, wherein the contour shape of the stage in plan view is a square,
The illuminance meter has a configuration in which at least one illuminance meter is attached to each side surface.
In order to solve the above-mentioned problem, the invention according to claim 7 is the configuration according to claim 6, wherein the illuminance meter is attached to each of side surfaces located on opposite sides of the rectangular contour shape. The meter has a configuration in which it is not located on the same straight line extending in the direction of the transport path, or a θ mechanism is provided that changes the posture by rotating the stage about the vertical direction.
In order to solve the above problem, the invention according to claim 8 is the configuration according to claim 1, wherein the contour shape of the stage in plan view is a shape having two sides facing each other.
The illuminance meter is attached to each of the side surfaces located on opposite sides, and each illuminance meter is not positioned on the same straight line extending in the direction of the transport path, or the stage is pivoted in the vertical direction. And a θ mechanism for changing the posture by rotating the motor.
In order to solve the above problem, the invention according to claim 9 includes an auxiliary movement mechanism that linearly moves the stage in a direction crossing the direction of the transport path in the configuration according to any one of the first to eighth aspects. It has the composition of being.
In order to solve the above-mentioned problem, the invention according to claim 10 is the light intensity calculation means for calculating the light intensity by integrating the measured values of the illuminometer in the configuration according to any one of claims 1 to 9. And a storage unit that stores the amount of light.

As described below, according to the invention described in claim 1 of this application, an illuminometer for monitoring the intensity or amount of light irradiation on the object is attached to the side surface of the stage. Illuminance measurement is performed under close conditions. For this reason, deterioration of the light source and the like are not erroneously determined. In addition, since it is not necessary to separately provide a mechanism for arranging an illuminometer in or near the irradiation region or passing the irradiation region or the vicinity thereof, the mechanism is simplified. In addition, since it is not necessary to measure the illuminance during the time when the object is discharged, the productivity is not affected.
According to the second aspect of the present invention, since the illuminance meter for monitoring the intensity or amount of light irradiation to the object is attached to the stage, the illuminance measurement is performed under conditions closer to the object. For this reason, deterioration of the light source and the like are not erroneously determined. In addition, since it is not necessary to separately provide a mechanism for arranging an illuminometer in or near the irradiation region or passing the irradiation region or the vicinity thereof, the mechanism is simplified. In addition, since it is not necessary to measure the illuminance during the time when the object is discharged, the productivity is not affected.
According to the invention described in claim 3, in addition to the above effect, the illuminance meter is attached at a position passing through the irradiation region, so that the illuminance measurement is performed under a condition closer to the object in this respect. For this reason, the possibility of erroneous determination is further reduced.
According to the invention described in claim 4, in addition to the above-described effect, the illuminance meter is also rotated because the θ moving mechanism for rotating the stage around the vertical direction is provided, and the The illuminometer can be positioned so as to pass through any position, and the illuminance can be measured at any position.
According to the invention of claim 5, in addition to the above effect, the illuminance meter is attached to each of the two side surfaces adjacent to each other with the corner portion interposed therebetween, so that the illuminance distribution is measured by measuring the illuminance at two locations. Can be obtained.
According to the invention described in claim 6, in addition to the above-described effect, the contour shape of the stage in plan view is a square, and at least one illuminance meter is attached to each side surface of the stage. The illuminance distribution can be obtained by measuring the illuminance at the place.
Further, according to the seventh aspect of the invention, in addition to the above effects, the illuminance distribution can be obtained by measuring the illuminance at four locations.
According to the invention described in claim 8, in addition to the above effect, the illuminance distribution can be obtained by measuring the illuminance at two places.
According to the ninth aspect of the invention, in addition to the above-described effect, the auxiliary movement mechanism that linearly moves the stage in the direction intersecting the direction of the conveyance path is provided, so that the illuminance is measured at an arbitrary position in this direction. can do.
According to the invention described in claim 10, in addition to the above effect, the amount of light obtained by integrating the measured values of the illuminometer is stored in the storage unit, so that the amount of light can be monitored.

It is a perspective schematic diagram of a light irradiation apparatus of a first embodiment. It is a front schematic diagram of the light irradiation apparatus of a first embodiment. It is a side schematic diagram of the light irradiation apparatus of a first embodiment. It is the plane schematic shown about the principal part of each 2nd thru | or 4th embodiment. It is the plane schematic shown about the example which increases a measurement location in 4th embodiment. It is the plane schematic shown about the example which measures irradiation light quantity distribution in a different location in 3rd embodiment. It is the plane schematic shown about the structure for improving productivity in 3rd embodiment. It is the plane schematic which showed the attachment structure of the luminometer 6 in other embodiment. It is the schematic of the conventional light irradiation apparatus.

Next, modes for carrying out the invention of the present application (hereinafter referred to as embodiments) will be described. In the following description, a polarized light irradiation device for photo-alignment will be taken as an example of the light irradiation device. However, the present invention is not limited to the polarized light irradiation device for photo-alignment.
1 to 3 are schematic views of the light irradiation apparatus according to the first embodiment. FIG. 1 is a schematic perspective view, FIG. 2 is a schematic front view, and FIG. 3 is a schematic side view. The light irradiation apparatus shown in FIGS. 1 to 3 includes a light irradiator 1 that irradiates light to an irradiation region, a stage 2 on which an object W is held on the upper side, and a conveyance path set in a state of passing through the irradiation region. And a transport mechanism 3 that moves the stage 2 along the axis. In this embodiment, light irradiation is performed for light processing. Hereinafter, the object W is referred to as a workpiece.

First, the effective irradiation area and the conveyance path will be described.
When simply saying “irradiation region”, there are two meanings: a region that is widely irradiated with light and a region that is set as a region to be irradiated with light. The “effective irradiation area” means an area preset as an area where light is irradiated with an illuminance effective as light processing for the workpiece W, and is the latter meaning. In this embodiment, there is substantially no light irradiated outside the effective irradiation region on the irradiation surface, and the effective irradiation region coincides with a broad meaning irradiation region. Therefore, although it is not necessary to distinguish, in the following description, “irradiation area” is used to mean an effective irradiation area (setting area).
In this embodiment, the irradiation area is set as a rectangular area. For convenience, the long direction of the rectangle is called the Y direction, and the short direction is the X direction. The conveyance path is set so as to pass through the irradiation area, but in this embodiment, the direction of the conveyance path coincides with the X direction. That is, the irradiation area and the conveyance path intersect (orthogonal in the Y direction).

Assuming that the length in the Y direction of the workpiece W is “width”, the length in the Y direction of the irradiation region is sufficiently longer than the width of the workpiece W. For this reason, when the work W is transported along the transport path and passes through the irradiation region, the entire upper surface of the work W is irradiated with light.
In this embodiment, the workpiece W is a rectangular plate-shaped member. However, as will be described later, the stage 2 can be rotated around a rotation axis with the vertical direction as an axis. The size of the width varies. Therefore, the size of the irradiation region is set so that the length of the irradiation region in the Y direction is larger than the width of the workpiece W even when the width is widest.

The light irradiator 1 that irradiates light to such an irradiation region includes a light source 11, a mirror 12 that covers the back of the light source 11, a lamp house 13 that accommodates these, and the like. Since the irradiation area is rectangular as described above, a rod-shaped light source 11 having a light emitting part long in the Y direction is employed as the light source 11. Since the apparatus of this embodiment is an apparatus that irradiates ultraviolet rays, a rod-shaped discharge lamp such as a high-pressure mercury lamp or metal halide lamp that radiates ultraviolet rays is employed. The light source 11 is arranged in a state where the longitudinal direction coincides with the Y direction. In addition, as the light source 11, it is possible to use a plurality of ultraviolet light emitting elements composed of LEDs or LDs arranged in an array in the Y direction. The mirror 12 is also long in the Y direction. It is. The cross-sectional shape in the X direction of the reflecting surface of the mirror 12 is an elliptical arc or a parabola.

  This embodiment is a light irradiating apparatus for photo-alignment, and the light irradiator 1 irradiates the irradiation region with light polarized in a predetermined direction. Specifically, as shown in FIGS. 2 and 3, a polarizing element 14 is provided in the lamp house 13. As the polarizing element 14, a grid polarizing element is used in this embodiment. The grid polarization element is an element having a structure in which a fine stripe (line and space) grid is formed on a transparent substrate, and the spacing between the linear portions constituting the grid is set to about the wavelength of light to be polarized or to The element has a structure with a shorter distance.

  Since it is difficult to cover a wide irradiation area with one polarizing element 14, in this embodiment, a structure in which a plurality of polarizing elements 14 are arranged in the Y direction is used. That is, a polarizing element unit including a plurality of polarizing elements 14 arranged in the Y direction and a frame (not shown) that holds each polarizing element 14 is mounted in the lamp house 13. Each polarizing element 14 is located between the light source 11 and the irradiation region.

As shown in FIG. 1, the stage 2 is a trapezoidal member, and in this embodiment, the contour shape is a square member in plan view. The stage 2 includes a plurality of support pins (not shown). Each support pin protrudes slightly from the upper surface of the stage 2. A part of each support pin is tubular, and performs suction for vacuum suction. The stage 2 is held while being vacuum-sucked on each support pin.
The stage 2 includes an alignment mechanism (not shown). The alignment mechanism is a mechanism that finely adjusts the position and posture of the workpiece W by reading a mark (not shown) provided on the workpiece W.

  In this embodiment, the transport mechanism 3 is a mechanism that employs a linear motor. Specifically, the transport mechanism 3 includes a linear guide 31 that extends parallel to the X direction, and a linear motor stator 32 that is arranged so that a magnet extends in the X direction. A moving table (hereinafter, referred to as an X-direction moving table) 33 provided with a mover driven with respect to the stator 32 is provided. The X-direction moving table 33 is moved by sequentially changing the polarity of each magnetic pole of the mover. Note that the X-direction moving table 33 has a groove that fits into the linear guide 31, and moves in the X direction while being guided by the linear guide 31 as the linear motor 32 operates. As the transport mechanism, a mechanism using a ball screw can be employed.

  In this embodiment, a mechanism (hereinafter referred to as an auxiliary movement mechanism) 4 that linearly moves the stage 2 in the Y direction, and a mechanism that rotates each stage 2 around an axis in the vertical direction (hereinafter referred to as a θ movement mechanism). 5 is provided. The auxiliary moving mechanism 4 also employs a linear motor type conveying mechanism.

  As shown in FIG. 1, the θ moving mechanism 5 is fixed on the Y-direction moving table 43, and the stage 2 is attached while being supported by the θ moving mechanism 5. The θ moving mechanism 5 includes a servo motor, and is a mechanism capable of rotating the stage 2 to a specified angle with respect to the reference direction and maintaining the posture. The reference direction is, for example, the X direction. By such a mechanism, the stage 2 is transported in the X direction and is movable in the Y direction and the θ direction.

The light irradiation device of such an embodiment includes an illuminometer 6 in order to monitor the intensity or amount of light irradiation on the workpiece W. In the description of the embodiments, the illuminance is the intensity of light irradiation and is irradiance (W / m ² ). The illuminometer measures the irradiance of the irradiated area. The irradiation amount is the amount of light energy in the irradiation region, and is “light amount”, strictly speaking, “integrated light amount”. Integrated light quantity (J / m ² ) = illuminance (W / m ² ) × irradiation time (sec).
A major feature of the apparatus of the embodiment is that the illuminometer 6 is attached to the stage 2. The fact that the illuminometer 6 is attached to the stage 6 has two meanings. One is to measure the illuminance at a position as close as possible to the workpiece W to be irradiated with light. As a result of moving together with the stage 2, the workpiece W is irradiated with light in the same manner under the circumstances where the workpiece W is irradiated with light. It means that illuminance is measured.

More specifically, in this embodiment, the illuminance meter 6 is attached to the side surface 21 of the stage 2. As described above, the stage 2 is a trapezoidal member having a square outline in plan view. If the state in which the direction of one side of the square is parallel or perpendicular to the X direction is a steady posture, in this embodiment, it is fixed to the side surface 21 along the X direction of the stage 2 in the steady posture.
An important point in attaching the illuminance meter 6 to the stage 2 is that the illuminance meter 6 is attached at a position where it passes through the irradiation region by the light irradiator 1.

  When irradiating light for light processing, the shape and arrangement of the light source 11 and the mirror 12 are adopted so that a high-illumination region that forms a rectangle simultaneously becomes a uniform region of illuminance from the viewpoint of ensuring the uniformity of processing. Is done. In this case, a uniform and high illuminance region is a region used for light processing, and this is an irradiation region.

  The irradiation area is sufficiently long with respect to the width of the workpiece (the length in the Y direction) when being conveyed in the Y direction. That is, the shape and arrangement of the light source 11 and the mirror 12 are determined so that the width of the irradiation area (length in the Y direction) is sufficiently longer than the width of the workpiece to be processed. Therefore, the irradiation area is wider than the width of the workpiece W in the Y direction and has a margin. In the embodiment, the illuminometer 6 is arranged at a position passing through the margin area. The irradiation region is sufficiently wide with respect to the width of the stage 2 to form a margin. By attaching the illuminance meter 6 to the side surface in the width direction of the stage 2, the illuminance meter 6 is in a state of passing through the irradiation region.

  The attachment of the illuminometer 6 to the position where the illuminometer 6 passes through the irradiation area in this way has the significance of measuring the illuminance at a position that is as similar as possible to the state of light irradiation actually received by the workpiece W. . Assuming that the initial mounting position of the illuminometer 6 is outside the irradiation area, as long as the illuminometer 6 is attached to the stage 2, the Y-direction movement or the θ movement is appropriately performed so that the irradiation area can be passed or irradiated. Since the measurement can be performed by passing through a place close to the region, the illuminance measurement can be performed in a situation much closer to the light irradiation to the workpiece 6 than when the light is applied to the lamp house 13 or the like.

  As the illuminance meter 6, a device using a Si photodiode or the like as a light receiving element is used. The illuminometer 6 is fixed in a posture in which the light receiving surface faces upward. As shown in FIG. 3, the light receiving surface of the illuminometer 6 has the same height as the upper surface of the workpiece placed on the stage 2. This point also has the significance of measuring the illuminance in the same state as the work as much as possible. In addition, about the attachment of the illuminance meter 6, the structure fixed to the side surface 21 of the stage 2 using the holder holding the illuminance meter 6 can be employ | adopted.

As shown in FIG. 3, the light irradiation apparatus of the embodiment includes a controller 7 that controls each part of the apparatus. In addition to controlling the operation of the transport mechanism 3, the controller 7 also controls the lighting power source 11 of the light source 11. As shown in FIG. 3, the illuminometer 6 is connected to the controller 7, and the measurement signal of the illuminometer 6 is input to the controller 7.
The controller 7 is equipped with a light amount calculating means 71 for calculating the integrated light amount based on the output value of the illuminometer 6. The light quantity calculation means 71 is a part (software) of a sequence program provided in the controller 7, but may be realized by hardware. The light amount calculation means 71 calculates the integrated light amount according to the measurement value of the illuminometer 6 for each processing (one reciprocation of the stage 2), and stores it in a storage unit (memory or the like) 72 provided in the controller 7. It is configured as follows. The apparatus includes a display (not shown) that displays data stored in the storage unit 72, and the accumulated light amount data can be appropriately displayed on the display as history data.

On the other hand, apart from the illuminometer 6, the apparatus includes a light measurement unit 8. The light measurement unit 8 is in a standby position away from the irradiation area during normal processing, and is used in the irradiation area during maintenance or the like. The light measurement unit 8 has a function of measuring the direction of the polarization axis of the polarized light to be irradiated in addition to the illuminance in the irradiation region.
As shown in FIG. 1, the light measurement unit 8 is mounted on the transport mechanism 3 and normally stands by at a standby position set at an end portion on one side in the X direction. The standby position is set, for example, outside the load position (on the side far from the irradiation area).

The optical measurement unit 8 includes an X-direction moving table 81 mounted on the linear guide 31 and the stator 32, a Y-direction moving mechanism 82 and a Y-direction moving table 83 mounted on the X-direction moving table 81, A master illuminometer 84 fixed on the direction moving table 83 and a polarization measuring device 85 fixed on the Y direction moving table 83 are also included.
Similarly, the Y-direction moving mechanism 82 is a mechanism for moving the Y-direction moving base 83 in the Y direction, and may be a linear motor type or a ball screw.

Similarly, the master illuminometer 84 incorporates a photoelectric conversion element such as a Si photodiode as a light receiving element. The height of the light receiving surface is the same as the surface of the workpiece W held on the stage 2, similarly to the illuminometer 6 provided on the stage 2.
The polarization measuring device 85 is a measuring device for monitoring the direction of polarized light irradiated to the irradiation region. The polarimeter is a measuring device that includes a light receiving element, an analyzer disposed on the incident side of the light receiving element, and a rotation mechanism that rotates the analyzer around an optical axis (in this example, the vertical direction). The analyzer is a kind of polarizing element, and is an optical component that is more than a plate that selectively transmits linearly polarized light in a specific direction.
The analyzer has a plate surface arranged perpendicular to the optical axis and is rotated in the rotation direction. The irradiated region is irradiated with polarized light polarized by the polarizing element 14 in the light irradiator 1. When checking the direction of the polarization axis of this polarized light, the polarimeter 85 is positioned in the irradiation region and the analyzer is rotated. Due to the rotation of the analyzer, the output of the light receiving element changes periodically. The rotation angle when the output becomes the highest indicates the direction of the polarization axis of the irradiated polarized light.

The operation of the light irradiation apparatus according to the embodiment having the above-described configuration will be described below.
It is transported to a position within the operating range of a robot (not shown) by a lot transport mechanism such as AGV (Auto Guided Vehicle) or a single wafer transport mechanism such as an air conditioner bearer. In the light irradiator 1, the light source 11 is turned on in advance, and the irradiation region is irradiated with light. In the initial state of operation, the stage 2 is at the load position, and a single workpiece W is placed on the stage 2 by a robot (not shown). Then, an alignment mechanism (not shown) is operated so that the workpiece W assumes a predetermined posture with respect to a reference direction (for example, the X direction). Further, the auxiliary movement mechanism 4 operates as necessary to position the workpiece W at a predetermined position in the Y direction.

In this state, the transport mechanism 3 operates to move the stage 2 in the X direction and pass through the irradiation region. As a result, the workpiece W is irradiated with light. In this embodiment, the light is polarized light by the polarizing element 14 and is irradiated with light polarized in a predetermined direction.
The transport mechanism 3 reverses at a predetermined reverse position after the work W on the stage 2 has completely passed through the irradiation region. “Completely passing” means that the edge of the work W in the X direction rearward has passed through the irradiation region. The reversal position is a position where the illuminance is substantially zero (position outside the irradiation region) in the illuminance distribution shown in FIG. 2, and is a position where the illuminance is zero at any location on the workpiece W.
The transport mechanism 3 reverses the stage 2 at the reverse position, and then moves it in the reverse direction in the X direction to return it to the load position. In this embodiment, the work W is irradiated with light (polarized light) even in this return path. Thereafter, the robot (not shown) removes the workpiece W from the stage 2 that has returned to the loading position, and places the next workpiece W on the stage 2.

  In this embodiment, since the rotation in the θ direction is to place the workpiece W in a predetermined posture with respect to the posture of the polarizing element 14 (the direction of the polarization axis of the polarized light to be irradiated), the lot (product type). May vary. In this case, after the processing of a certain lot is completed, the setting information in the controller 7 is changed. As a result, for each workpiece W of the next lot, the θ moving mechanism 5 operates appropriately and is conveyed at a different rotation angle and irradiated with polarized light.

In such an operation, the illuminometer 6 moves integrally with the stage 2 and passes through the irradiation region. For this reason, the illuminometer 6 is irradiated with light in the same manner as the workpiece W on the stage 2, and the measurement value is output to the controller 7. The light amount calculation means 71 mounted on the controller 7 integrates the output value of the illuminometer 6 and calculates the integrated light amount. The light amount calculation means 71 calculates the integrated light amount according to the measurement value of the illuminometer 6 for each processing (one reciprocation of the stage 2), and stores it in a storage unit (memory or the like) 72 provided in the controller 7. .
Then, an operator who monitors the operation of the apparatus periodically displays the history data in the storage unit 72 on the display and checks whether the integrated light quantity is within a specified range. If the integrated light quantity is below the specified value, it is determined that the light quantity is insufficient, and appropriate measures such as replacement of the light source 11 are performed.

In the light irradiation apparatus according to the embodiment related to the above operation, the illuminance meter 6 for monitoring the amount of light applied to the work W is attached to the side surface of the stage 2, so that the illuminance measurement is performed under conditions closer to the work W. For this reason, deterioration of the light source 11 and the like are not erroneously determined. In this embodiment, since the illuminance meter 6 is attached at a position that passes through the irradiation region, the illuminance measurement is performed under a condition closer to the workpiece W in this respect. For this reason, the possibility of erroneous determination is further reduced.
Furthermore, there is no need to separately provide a mechanism for disposing the illuminometer 6 in the irradiation area or a mechanism for moving the illuminometer 6 so as to pass through the irradiation area. Further, since it is not necessary to measure the illuminance during the time period for discharging the workpiece W, the productivity is not affected.

  In the operation of the apparatus, the light measurement unit 8 is used for maintenance of the apparatus after repeating the process a certain number of times. That is, with the stage 2 retracted to the opposite side, the X-direction moving table 81 is moved in the X direction, and for example, the polarization measuring device 85 of the light measuring unit 8 is arranged in the irradiation region to measure the polarized light. To do. Then, from the measurement result, it is confirmed whether the direction of the polarization axis of the polarized light is in a desired direction.

  The master illuminometer 84 is used for checking the performance of the illuminometer 6. That is, the master illuminance meter 84 is arranged at the same Y direction position as the illuminance meter 6, the illuminance is measured while passing through the X direction at the set passing speed, the light amount is calculated, and the difference from the light amount by the illuminance meter 6 is checked . If the difference is large, the illuminometer 6 is calibrated. That is, the master illuminometer 84 can be used for calibration of each illuminometer 6. Since the illuminometer 6 frequently passes through the irradiation region and receives light irradiation, the characteristics are likely to change. For this reason, calibration is appropriately performed using the master illuminometer 84.

Next, the second to fourth embodiments will be described. FIG. 4 is a schematic plan view showing the main part of each of the second to fourth embodiments. In each of the second to fourth embodiments, the number of illuminance meters 6 to be attached and the attachment positions are different from those in the first embodiment.
That is, in the second embodiment shown in FIG. 4A, the illuminometer 6 is attached to each of two side surfaces adjacent to each other with one corner portion sandwiched in the square stage 2 in plan view. In the third embodiment shown in FIG. 4B, the illuminance meter 6 is attached to each of the four side surfaces of the square stage 2 in plan view.

  In the fourth embodiment shown in FIG. 4 (3), the illuminance meter 6 is attached to the four side surfaces as in the third embodiment, but the illuminance meter is attached to the side surfaces located on the two opposite sides. The position 6 is different from the third embodiment. That is, in the third embodiment, the illuminance meters 6 located on the two opposite sides have the same position in the extending direction of the sides. For example, if each side of the stage 2 is along the X direction and the Y direction described above, as shown in FIG. 4B, in the third embodiment, two sides located on the side along the Y direction are used. The illuminometer 6 is located at the same position when viewed in the Y direction. On the other hand, in the fourth embodiment shown in FIG. 4 (3), the two illuminance meters 6 located on the sides along the Y direction are located at positions shifted from each other in the Y direction.

  Compared with the first embodiment, the light irradiation devices of the second to fourth embodiments can measure illuminance at a plurality of locations in the Y direction, that is, the length direction of the irradiation region, that is, the illuminance distribution is measured. It has the meaning of being able to do it. This significance means that each illuminance meter 6 moves integrally with the stage 2 and passes through the irradiation region, so that it is possible to measure the irradiation light amount, that is, the irradiation light amount distribution, at a plurality of positions different in the Y direction. Will bring.

The significance of the illuminance distribution measurement and the significance of the irradiation light amount distribution measurement will be described in more detail.
As described above, the Y direction is the length direction of an irradiation region that is long in a certain direction, and the shape and arrangement of the light source 11 and the mirror 12 are selected so that light irradiation is sufficiently uniform in the direction. . If the illuminance in the Y direction becomes non-uniform, it directly becomes non-uniform in the amount of irradiation light in the Y direction, which can be a problem. Usually, the specifications of the illuminance uniformity in the Y direction are also determined in advance such as ± several percent, and the operation of the apparatus is started in a state where it is confirmed that it is within the range.

  However, for some reason, the illuminance distribution in the Y direction can be non-uniform. The blackening of the end when using the rod-shaped discharge lamp described above is also one factor. In addition, when a plurality of light sources are arranged in the Y direction, a decrease in output from any one of the light sources also causes unevenness in the illuminance distribution in the Y direction. If the illuminance distribution in the Y direction becomes non-uniform, it directly leads to non-uniformity in the amount of irradiation light received by the workpiece W, so it is necessary to monitor whether the non-uniformity is within an allowable range. For this monitoring, it is necessary to measure the illuminance at at least two locations in the Y direction. The light irradiation apparatuses according to the second to fourth embodiments described above have the significance that in addition to being able to monitor the light amount in a state closer to the workpiece W, it is possible to monitor the uneven illuminance distribution in this way.

Such measurement of the illuminance distribution in the Y direction can be further enhanced by appropriately using the auxiliary movement mechanism 4 and the θ movement mechanism 5. This point will be described by taking the fourth embodiment as an example. FIG. 5 is a schematic plan view illustrating an example in which the number of measurement points is increased in the fourth embodiment.
In the apparatus according to the embodiment, as described above, light irradiation is performed on the workpiece W in the forward path and the return path. At this time, the auxiliary movement mechanism 4 is operated at the reverse position so that light irradiation is performed at different positions in the Y direction on the forward path and the return path. That is, the stage 2 is slightly shifted in the Y direction at the reverse position. The shift amount is a distance (for example, half) less than the separation interval seen in the Y direction of the adjacent illuminometers 6. Then, the return path is conveyed at the shifted position. If it does in this way, the measurement position of the irradiation light quantity in a Y direction will double, and will be eight places in this example. That is, the workpiece W can be processed while monitoring the irradiation light amount distribution at eight locations. Although the description is omitted, the second embodiment and the third embodiment are also similar in that the number of measurement points can be doubled by using the auxiliary movement mechanism 4.

Thus, the irradiation light amount distribution can be measured at different locations using the θ moving mechanism 5. This point will be described by taking the third embodiment as an example. FIG. 6 is a schematic plan view illustrating an example in which the irradiation light amount distribution is measured at different locations in the third embodiment.
FIG. 6 shows a state in which the workpiece W is conveyed in a state where the stage 2 is rotated by α from the reference direction (X direction) in the third embodiment. A certain work W is processed while transporting the work W with one side of the stage 2 facing in the X direction, and another work W is processed while transporting the work W while being rotated by α. Suppose. In this case, when θ = 0 °, there are substantially three measurement points in the Y direction, but when rotated by α, there are four measurement points. Irradiation light quantity measurement locations are different between θ = 0 ° and θ = α. Therefore, when the measurement results at θ = 0 ° and the measurement results at θ = α are combined, a total of 7 irradiation light intensity distributions can be obtained. become. As described above, by using the θ moving mechanism 5, it is possible to measure the irradiation light amount distribution at different locations or increase the number of measurement locations. Although explanation is omitted, this point is the same in the second embodiment and the fourth embodiment.

  In the third embodiment, when one side of the stage 2 assumes a posture along the X direction, the pair of illuminometers 6 located on the side along the Y direction are located at the same position in the Y direction. Therefore, when one side of the stage 2 is in the posture along the X direction (θ = 0 °), there are three measurement points. That is, it can be said that it is useless to install the two illuminance meters 6 on the side along the Y direction. However, depending on usage, it can contribute to increasing productivity. This point will be described with reference to FIG. FIG. 7 is a schematic plan view illustrating a configuration for increasing productivity in the third embodiment.

  In FIG. 7, of the two illuminance meters 61 and 62 located on the side along the Y direction, the one located on the left side of the paper is the first illuminance meter 61, and the one located on the right side is the second illuminance meter 62. To do. Stage 2 proceeds in the X direction from the left to the right on the forward path and proceeds from the right to the left on the return path. In this case, the measurement data of the second illuminometer 62 is integrated in the forward path to obtain the integrated light quantity, and the data of the first illuminance meter 61 is integrated to obtain the integrated light quantity in the return path, and both are added together to obtain the total at the position in the Y direction. The integrated light quantity data can be obtained. In this way, in the forward path, the speed can be increased to reach the reversal position when the edge of the workpiece W in the X direction rearward (the left edge in this example) has passed the irradiation region. The speed at which the workpiece W passes through the irradiation area is a predetermined speed that is slow in relation to the necessary amount of irradiation light, but the speed can be increased after the second illuminometer 62 has passed the irradiation area. Further, on the return path, after the edge of the workpiece W in the X direction rearward (the right edge in this example) passes the irradiation region, the speed can be increased to reach the load position. In this way, the tact time is shortened and the productivity is improved. A sequence program mounted on the controller 7 is programmed so that such an operation is performed.

Regarding the attachment of the illuminometer 6, there may be other ones than the first to fourth embodiments. This point will be described with reference to FIG. FIG. 8 is a schematic plan view showing the mounting structure of the illuminometer 6 in another embodiment.
First, in FIG. 8A, the illuminance meter 6 is attached to each of the side surfaces located on the two opposite sides of the stage 2 along the X direction. Also in this case, it is possible to measure the illuminance distribution and the irradiation light amount distribution in the Y direction, and in particular, it is possible to monitor the decrease in illuminance due to blackening or the like at both ends of the rod-shaped light source 11.

In FIG. 8B, a plurality of illuminometers 6 are attached to the side surface located on one side of the stage 2 along the Y direction. Also in this case, the illuminance distribution and the irradiation light amount distribution in the Y direction can be measured. The measurement position can be changed as appropriate by using the auxiliary movement mechanism 4 and the θ movement mechanism 5 as appropriate.
Further, FIG. 8 (3) shows an example in which a plurality of illuminometers 6 are attached to the side surface located on one side of the stage 2 along the X direction. In this case, if the side is fixed along the X direction, it is substantially the same as in the first embodiment and there is no significance in making it plural, but in the θ direction as shown by a broken line in FIG. If a rotating mechanism is provided, the amount of irradiation light can be measured at a plurality of locations in the Y direction.

FIG. 8 (4) shows an example in which the illuminometer 6 is attached in the stage 2. The stage 2 has a recess for attaching the illuminometer 6, and the illuminometer 6 is attached in a state where the recess is dropped. Similarly, the light receiving surface of the illuminance meter 6 is preferably the same height as the upper surface of the workpiece W placed on the stage 2. In the example shown in FIG. 8 (4), the illuminometer 6 is outside the placement position of the workpiece W in plan view, although it is in the stage 2. That is, when the workpiece W is placed on the stage 2, the workpiece W does not block the illuminometer 6 with respect to the light from the light irradiator 1, and the illuminometer 6 does not block the workpiece W. In this case, it is more preferable to provide a plurality of illuminometers 6 in the Y direction because the irradiation light amount distribution can be measured. In addition, it is preferable that the arrangement position of the illuminance meter 6 in the stage 2 is a position that passes through the irradiation region because the illuminance is measured in a state closer to the workpiece W.
In addition, even if the illuminance meter 6 is located at a position away from the stage 2, it may be said that it is “attached to the stage”. For example, even if the arm is fixed to the side of the stage 2 at one end and the illuminance meter 6 is fixed to the other end and held by the arm, it can be said that the illuminance meter 6 is attached to the stage 2.
The illuminometer 6 can be a measuring instrument (spectrometer) that measures spectral irradiance.

In each of the embodiments described above, the stage 2 has a square outline in plan view, but is not necessarily limited to a square when the present invention is implemented. It may be a triangle, pentagon, or circle. In the case of a circle, a configuration in which two illuminometers 6 are attached to the side surface at intervals of 180 ° with respect to the center of the circle, or four illuminometers 6 are attached at intervals of 90 °.
In addition, although the light irradiation apparatus of said each embodiment was a polarized light irradiation apparatus for photo-alignment, this invention can also be comprised as another light irradiation apparatus. For example, it can be configured as a device that irradiates light to the workpiece W for light processing such as curing of a photocurable resin. Moreover, it can also be comprised as an apparatus which irradiates light for uses other than optical processing like the external appearance inspection of a product, and various analysis.

  In each embodiment described above, as disclosed in JP 2014-174352 A, two stages are arranged on both sides in the X direction across the irradiation region, and the work W is held and held alternately. It is also possible to employ a configuration in which each workpiece W is irradiated with light by passing through the irradiation region. In this case, the illuminance meter may be attached to only one stage or both. When both are mounted, if the illuminance meter attached to one stage and the Y-direction position are different from the Y-direction position of the illuminance meter attached to the other stage, the illuminance or light quantity distribution is the same as described above. Is preferable.

In addition, although the irradiation area | region thru | or the irradiation area was made into the rectangle whose Y direction is a elongate direction, this is not an essential condition, The rectangle whose X direction (conveyance direction) is a elongate direction may be sufficient, and it is square. Also good.
The auxiliary movement mechanism 4 has the significance of disposing the illuminometer 6 at an arbitrary position in the Y direction. For this purpose, the movement direction by the auxiliary movement mechanism 4 need only be a direction that intersects the X direction, and is not necessarily limited. It is not necessary to be in the Y direction (direction perpendicular to the X direction).

  Moreover, about the light source, although the example which arrange | positions the rod-shaped light source 11 along the Y direction was demonstrated, this is an example which arrange | positions a long light emission part along the Y direction. In addition, the point light sources may be arranged in a straight line to be equivalent to a rod-shaped light source (linear light-emitting portion). Further, even when rod-shaped light sources are arranged along the X direction, if a large number of such light sources are arranged in the Y direction, it can be considered that point light sources are arranged in the Y direction. it can.

DESCRIPTION OF SYMBOLS 1 Light irradiator 2 Stage 3 Conveyance mechanism 4 Auxiliary movement mechanism 5 θ movement mechanism 6 Illuminometer 7 Controller 71 Light quantity calculation means

Claims (10)

A light irradiator that irradiates light to the irradiation area, a stage on which the object is held on the upper side, and a conveyance mechanism that conveys the object by moving the stage along a conveyance path set in a state of passing through the irradiation area A light irradiation device comprising:
An illuminometer for measuring illuminance by light from a light irradiator is attached to a side surface of the stage. A light irradiator that irradiates light to the irradiation area, a stage on which the object is held on the upper side, and a conveyance mechanism that conveys the object by moving the stage along a conveyance path set in a state of passing through the irradiation area A light irradiation device comprising:
The stage is equipped with an illuminometer that measures the illuminance by the light from the light illuminator, and the illuminometer mounting position does not shield the light from the light irradiator from the object and is not shielded by the object A light irradiation device characterized by being a position.   The light irradiation apparatus according to claim 1, wherein the illuminance meter is attached to a position that passes through the irradiation area.   The light irradiation apparatus according to claim 1, wherein a θ moving mechanism for rotating the stage about the vertical direction is provided. The contour shape of the stage in plan view has at least one corner,
The light irradiation apparatus according to claim 1, wherein the illuminance meter is attached to each of two side surfaces adjacent to each other with a corner portion interposed therebetween. The outline shape of the stage in plan view is a square,
The light irradiation apparatus according to claim 1, wherein at least one illuminance meter is attached to each side surface.   The illuminometers are not located on the same straight line extending in the direction of the transport path, or the illuminometers are moved up and down on the stage. The light irradiation apparatus according to claim 6, further comprising a θ mechanism that changes a posture by rotating about a direction as an axis. The contour shape of the stage in plan view is a shape having two sides facing each other,
The illuminance meter is attached to each of the side surfaces located on opposite sides, and each illuminance meter is not positioned on the same straight line extending in the direction of the transport path, or the stage is pivoted in the vertical direction. The light irradiation apparatus according to claim 1, further comprising: a θ mechanism that is rotated to change a posture.   The light irradiation apparatus according to claim 1, further comprising an auxiliary movement mechanism that linearly moves the stage in a direction intersecting the direction of the conveyance path. 10. The light according to claim 1, further comprising: a light amount calculation unit that calculates the integrated light amount by integrating the measurement values of the illuminometer; and a storage unit that stores the calculated light amount. Irradiation device.

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