TWI666428B - Polarized light measuring device and polarized light irradiation device - Google Patents

Abstract

The invention provides a polarized light measuring device and a polarized light irradiation device. A polarized light measuring device according to an embodiment includes: a first polarizing element to which polarized light is incident; a rotating unit that moves the first polarizing element in a rotating direction; and a photoelectric conversion unit that outputs electricity corresponding to a light amount of the received light. A signal; and a moving part to move the first polarizing element between a first position and a second position, the first position is to make the polarized light enter the photoelectric conversion part through the first polarizing element The second position is such that the polarized light is directly incident on the photoelectric conversion section. The present invention can accurately measure the polarization direction and the light quantity of polarized light.

Description

Polarized light measuring device and polarized light irradiation device

The present invention relates to a polarized light measuring device and a polarized light irradiation device.

When performing an alignment process such as an alignment film of a liquid crystal display element or an alignment film of a viewing angle compensation film, the subject is irradiated with polarized light of a predetermined wavelength. This alignment processing method is called an optical alignment method. To perform a wide range of alignment processing, a long polarizing element is required, but it is difficult to manufacture a long polarizing element. Therefore, alignment processing is performed using a plurality of polarizing elements arranged in a linear arrangement. However, if a plurality of polarizing elements are used, the polarization direction of the polarized light irradiated to the object may be uneven due to mounting errors and the like. Therefore, a technique has been proposed that uses a polarizer called an analyzer to measure unevenness in the polarization direction of polarized light and adjusts the polarization direction based on the measurement results.

Here, in the case where the photo-alignment method is used, it is preferable to also measure the light amount of polarized light irradiated to the object. When measuring the amount of polarized light, if an analyzer is installed, the amount of polarized light cannot be accurately measured. Therefore, when measuring the polarization direction of polarized light, the worker attaches the analyzer to the detection unit, and when measuring the amount of polarized light, the worker removes the analyzer from the detection unit. However, if an operator installs and removes an analyzer, there is a concern that a measurement error due to a mounting error may occur when measuring the polarization direction of polarized light.

In addition, in order to measure the direction of polarized light, a technique has been proposed in which a plurality of types of analyzers having different directions in which a linear body extends (angle of transmission axis) are used. However, if a plurality of types of analyzers are used, the size or cost of the polarized light measuring device will increase. In addition, since the measurement accuracy of the polarization direction depends on the number of types of analyzers, there is a concern that measurement with high accuracy cannot be performed. Therefore, it is desired to develop a technology that can accurately measure the polarization direction and the amount of light of polarized light. [Prior Art Literature]

[Patent Literature] [Patent Literature 1] Japanese Patent Laid-Open No. 2014-10388 [Patent Literature 2] Japanese Patent Laid-Open No. 2007-127567

[Problems to be Solved by the Invention]

The problem to be solved by the present invention is to provide a polarized light measuring device and a polarized light irradiation device that can accurately measure the polarization direction and the amount of polarized light of polarized light. [Means for solving problems]

A polarized light measuring device of the present invention includes: a first polarizing element to which polarized light is incident; a rotating unit that moves the first polarizing element in a rotating direction; and a photoelectric conversion unit that outputs electricity corresponding to the amount of light received A signal; and a moving part to move the first polarizing element between a first position and a second position, the first position is to make the polarized light enter the photoelectric conversion part through the first polarizing element The second position is such that the polarized light is directly incident on the photoelectric conversion section. [Effect of the invention]

According to the embodiment of the present invention, it is possible to provide a polarized light measurement device and a polarized light irradiation device that can accurately measure a polarization direction and a light amount of polarized light.

The invention according to the embodiment is a polarized light measuring device, which includes: a first polarizing element to which polarized light is incident; a rotating unit that moves the first polarizing element in a rotating direction; a photoelectric conversion unit that outputs An electrical signal corresponding to the light amount of the received light; and a moving section that moves the first polarizing element between a first position and a second position, where the first position is to pass the polarized light through the first A polarizing element is incident on the photoelectric conversion portion, and the second position is such that the polarized light is directly incident on the photoelectric conversion portion. According to this polarized light measuring device, the polarized light direction and the amount of polarized light can be measured with high accuracy.

When the moving unit measures the polarization direction of the polarized light, the first polarizing element can be moved to the first position. When the moving part measures the light amount of the polarized light, the first polarizing element can be moved to the second position. In this way, the reproducibility can be significantly improved as compared with the case where the operator mounts and removes the first polarizing element.

In addition, the plurality of linear bodies provided in the first polarizing element may be made of silicon. In this way, since the extinction ratio can be increased, the polarization direction of the polarized light can be measured more accurately.

The invention according to the embodiment is a polarized light irradiation device including: a light source having a shape extending in a predetermined direction; a plurality of second polarizing elements arranged in a line extending in the direction of the light source; The light emitted from the light source is polarized light; and the polarized light measuring device is disposed on a side opposite to the light source side of the plurality of second polarizing elements. According to this polarized light irradiation device, the polarized light direction and the amount of polarized light can be measured with high accuracy. Therefore, productivity can be improved.

In addition, the plurality of linear bodies provided in the second polarizing element may include silicon. In this way, since the extinction ratio can be increased, the polarization direction of the polarized light can be measured more accurately.

Hereinafter, embodiments will be described with reference to the drawings. In each drawing, the same components are denoted by the same reference numerals, and detailed descriptions are appropriately omitted. The arrows X and Y in the figures indicate two directions that are orthogonal to each other. For example, the arrow X is set as the conveyance direction of the irradiated body 200. The irradiated body 200 may be, for example, an alignment film having a liquid crystal display element or a viewing angle compensation film. However, the irradiated body 200 is not limited to the exemplified one, and may be an irradiated body that is subjected to alignment processing using a photo-alignment method.

FIG. 1 is a schematic perspective view illustrating the polarized light measuring device 1 and the polarized light irradiation device 100 according to the embodiment. FIG. 2 is a schematic cross-sectional view illustrating a polarized light measuring device 1 according to the present embodiment. 2 is a cross-sectional view taken along the line A-A in FIG. 1. FIG. 3 is a schematic plan view illustrating the polarizing section 102.

As shown in FIG. 1, the polarized light irradiation device 100 according to the present embodiment includes an irradiating unit 101, a polarizing unit 102, a transport unit 103, a polarized light measuring device 1, and a control unit 104.

First, the polarized light measuring device 1 according to this embodiment will be exemplified. As shown in FIGS. 1 and 2, the polarized light measuring device 1 is provided with a polarizing section 2, a detecting section 3, a moving section 4, and a control section 5.

The polarizing section 2 includes a polarizing element 20 (corresponding to an example of a first polarizing element), a holding section 21, and a moving section 22. The polarized light Lp described below is incident on the polarizing element 20. The polarizing element 20 is used when measuring the polarization direction of the polarized light Lp. The polarizing element 20 is sometimes called an analyzer. The polarizing element 20 transmits only the component of the polarized light Lp that vibrates in a predetermined direction, and becomes the polarized light Lpp. The polarizing element 20 may be a wire grid type polarizing element. The polarizing element 20 may be provided with, for example, a substrate, made of quartz, or the like, and a plurality of linear and linear bodies provided on the substrate in parallel with each other. In this case, a plurality of linear bodies are provided at equal intervals. The pitch size of the linear body can be set to the wavelength of the incident light or less. The pitch size of the linear body is preferably set to 1/3 or less of the wavelength of the incident light.

The material of the linear body may be, for example, a metal such as chrome or an aluminum alloy. Although the linear body is generally formed of a conductive material, the linear body may be formed of an insulating material or a semiconductor material. For example, the linear body may be formed of a material containing titanium, such as titanium oxide, or a material containing silicon. As described later, light from the light source 101 a is irradiated with light having a wavelength in a wavelength region of ultraviolet rays (for example, a wavelength region of 200 nm to 400 nm). Therefore, if the linear body is formed of a material containing silicon, the extinction ratio can be increased. That is, if a linear body is formed of a material containing silicon, detection accuracy can be improved.

The holding portion 21 includes a main body portion 21a and a holding claw 21b. The main body portion 21a has a plate shape. The body portion 21a is provided with a hole 21a1 penetrating in the thickness direction. The holding claw 21b is provided on the peripheral edge of the hole 21a. The holding claw 21 b holds the peripheral edge of the polarizing element 20. The polarizing element 20 is provided on the main body portion 21a so as to block the hole 21a, and is held by the holding claw 21b. Therefore, the light transmitted through the polarizing element 20 can enter the detection section 3 through the hole 21a1.

The moving portion 22 holds the holding portion 21 and moves the holding portion 21 in a predetermined direction. Since the polarizing element 20 is provided in the holding portion 21, the polarizing element 20 can be moved by moving the holding portion 21. The moving unit 22 may be, for example, a driving device such as a guide, a servo motor or an air cylinder for moving the holding unit 21 in a predetermined direction, and a position detecting unit 21 Position detector, etc.

When measuring the amount of polarized light, the moving unit 22 moves the holding unit 21 (the polarizing element 20) so that there is no object that hinders the incidence of light on the photoelectric conversion unit 30. When measuring the polarization direction of polarized light, the moving unit 22 moves the holding unit 21 (polarizing element 20) so that the polarizing element 20 is positioned on the photoelectric conversion unit 30. At this time, the center of the polarizing element 20 is overlapped with the position of the axis R from the light source 101 a toward the photoelectric conversion unit 30. That is, the moving unit 22 causes the polarizing element 20 to enter the polarized light Lp at the first position of the polarizing element 20 of the photoelectric conversion unit 30 via the polarizing element 20 and the polarized light Lp directly to the second position of the polarizing element 20 of the photoelectric conversion unit 30 Move between positions. In this case, the moving unit 22 moves the polarizing element 20 to the first position when measuring the polarization direction of the polarized light Lp. The moving unit 22 moves the polarizing element 20 to the second position when measuring the light amount of the polarized light Lp.

The detection section 3 includes a photoelectric conversion section 30 and a rotation section 31. The photoelectric conversion section 30 is provided below the holding section 21 (the polarizing element 20) (opposite the light source 101 a side). The photoelectric conversion unit 30 outputs an electric signal corresponding to the light amount of the received light. The photoelectric conversion unit 30 may be provided with a photoelectric conversion element such as a photodiode.

The rotating portion 31 moves the polarizing element 20 in a rotating direction around an axis R from the light source 101 a toward the photoelectric conversion portion 30. When measuring the polarization direction of the polarized light Lp, the center of the polarizing element 20 overlaps the position of the axis R. Therefore, the rotating portion 31 can rotate the polarizing element 20 around the central axis of the polarizing element 20. Therefore, the direction in which the linear body provided in the polarizing element 20 extends can be changed.

The rotating portion 31 includes a mounting portion 31a and a base portion 31b. A photoelectric conversion unit 30 is provided inside the mounting portion 31a. The light receiving surface of the photoelectric conversion unit 30 is exposed on one end surface of the mounting portion 31a. A polarizing section 2 is provided on the mounting section 31a. For example, the photoelectric conversion portion 30 may be provided at the center portion of the mounting portion 31a, and the moving portion 22 may be provided at the peripheral portion of the mounting portion 31a.

A mounting portion 31a is provided at one end portion of the base portion 31b. The other end portion of the base portion 31 b is attached to the moving portion 40. The base portion 31b moves the mounting portion 31a around the axis R in the rotation direction. The base portion 31b can be provided with, for example, a driving device such as a table, a servo motor, and a position detector such as an encoder.

The moving section 4 moves the polarizing section 2 and the detecting section 3. The moving section 4 includes a first moving section 40 and a second moving section 41. A mounting portion 31 a is attached to the first moving portion 40. Therefore, the first moving section 40 can move the polarizing section 2 and the detecting section 3 in the Y direction. A first moving portion 40 is attached to the second moving portion 41. Therefore, the second moving section 41 can move the polarizing section 2 and the detecting section 3 in the X direction. The first moving unit 40 and the second moving unit 41 can be, for example, a single-axis robot (robot) or the like provided with a position detector. However, the configuration of the moving section 4 is not limited to those illustrated. The moving unit 4 is only required to move the polarizing unit 2 and the detecting unit 3 in a predetermined plane (for example, in a horizontal plane), and the position of the moved polarizing unit 2 and the detecting unit 3 can be obtained.

The control unit 5 controls operations of each element provided in the polarized light measuring device 1. For example, the control unit 5 controls the moving unit 4 (the first moving unit 40 and the second moving unit 41) to move the polarizing unit 2 and the detecting unit 3 to desired positions. The control unit 5 controls the base 31 b so that the polarizing element 20 is rotated and moved by a predetermined angle around the central axis of the polarizing element 20. The control unit 5 controls the moving unit 22 to move the holding unit 21 (polarizing element 20). The control unit 5 measures the polarized light Lp based on a command from the control unit 104. For example, the control unit 5 calculates the polarization direction of the polarized light Lp based on the output from the photoelectric conversion unit 30 and the rotation position information from the base 31 b. The control unit 5 calculates the light amount of the polarized light Lp based on the output from the photoelectric conversion unit 30. The calculated polarization direction of the polarized light Lp and the light amount of the polarized light Lp may be output to a display device (not shown) or the like, or may be output to the control unit 104. The details of the measurement of the polarized light Lp will be described later. The control unit 5 may be provided integrally with the control unit 104 described later, and the control unit 104 may also function as the control unit 5.

Next, returning to FIG. 1, the polarized light irradiation device 100 according to the present embodiment will be exemplified. The irradiation unit 101 includes a light source 101 a and a reflector 101 b. The light source 101a irradiates light having a wavelength in a wavelength region of ultraviolet rays. The light irradiated from the light source 101a is so-called non-polarized light having various vibration direction components. The light source 101 a may be, for example, a long arc high pressure mercury lamp that radiates ultraviolet rays with a wavelength of about 256 nm. The light source 101a may be, for example, a linear light source such as a long-arc metal halide lamp or a fluorescent lamp. The light source 101a may be, for example, a plurality of light emitting elements (for example, light emitting diodes, laser diodes, organic light emitting diodes, etc.), such as light emitting diodes (e.g., light emitting diodes, laser diodes, organic light emitting diodes), or short arcs, which are linearly arranged. ) Point light source like mercury lamp. The light source 101a may have a form extending linearly in a predetermined direction. The light source 101 a may be provided to extend in a direction (Y direction) orthogonal to the direction (X direction) in which the irradiated body 200 is conveyed.

The reflector 101b has a channel shape which is opened on one side. The cross-sectional shape of the reflector 101b may be a part of an ellipse. The inner surface of the reflector 101b is a mirror. A light source 101a is provided inside the reflector 101b. The light source 101a is arranged along the longitudinal direction of the reflector 101b. The reflector 101 b reflects light incident from the light source 101 a toward the inner surface of the reflector 101 b and enters the polarizing section 102.

As shown in FIG. 3, the polarizing section 102 includes a polarizing element 102 a (corresponding to an example of a second polarizing element), a holding member 102 b, and a holding member 102 c. The polarizing element 102a causes the light irradiated from the light source 101a to be polarized light Lp having a specific polarization direction.

The polarizing element 102 a can have, for example, the same configuration as the polarizing element 20.

The holding member 102b has a frame shape and holds the peripheral edge of the polarizing element 102a. The substrate of the polarizing element 102a is formed of quartz or the like, and therefore, the ends of the polarizing element 102a and the like are easily damaged. Therefore, the holding member 102b is provided to protect the polarizing element 102a. In addition, when it is difficult to generate a defect or the like of the polarizing element 102a, it is not necessary to provide the holding member 102b.

A semicircular concave portion 102b1 is provided in a central portion of one end surface of the holding member 102b. A rectangular concave portion 102b2 is provided on an end surface of the holding member 102b opposite to the end surface on which the concave portion 102b1 is provided. The recessed portion 102b2 is provided at a position deviated from the central portion (for example, near the corner of the holding member 102b). It is difficult to manufacture a long polarizing element 102a. Therefore, a plurality of sets of the polarizing element 102a and the holding member 102b are arranged in a direction (Y direction) in which the light source 101a extends. In addition, a predetermined gap is provided between the plurality of holding members 102 b so that the inclination adjustment (unevenness adjustment of the polarization direction) described below can be performed.

The holding member 102c holds a plurality of holding members 102b inside the frame portion 102c1. The holding member 102c includes a frame portion 102c1, a support portion 102c2, an elastic portion 102c3, and an adjustment portion 102c4. The support part 102c2, the elastic part 102c3, and the adjustment part 102c4 are each provided in one set with respect to each of the several holding members 102b. The frame portion 102c1 has a frame shape. The frame portion 102c1 extends in a direction (Y direction) in which the light source 101a extends.

The support portion 102c2 has a cylindrical shape and is in contact with the recessed portion 102b1. The elastic portion 102c3 presses the holding member 102b against the support portion 102c2 by an elastic force. The elastic portion 102c3 includes a base portion 102c3a and a coil spring 102c3b. The base portion 102c3a is provided on the holding member 102c. The base portion 102c3a is provided at a position opposed to the recessed portion 102b2. The coil spring 102c3b is provided between the base portion 102c3a and the recessed portion 102b1.

The adjustment portion 102c4 is provided separately from the elastic portion 102c3. The adjustment portion 102c4 may be provided, for example, at a position that is linearly symmetric with the elastic portion 102c3 with respect to the center line 102b3 of the holding member 102b. The adjustment portion 102c4 includes a base portion 102c4a and a protruding portion 102c4b. The base portion 102c4a is provided on the holding member 102c.

The protruding portion 102c4b is provided on the base portion 102c4a. The protruding portion 102c4b protrudes from the base portion 102c4a. The tip of the protruding portion 102c4b is in contact with the holding member 102b. The protruding portion 102c4b may change the protruding length D from the base portion 102c4a. The protruding portion 102 c 4 b may be a mechanism having a stepwise protrusion or a screw mechanism, for example, and the protrusion length D may be changed based on the measurement result of the polarized light measuring device 1. In this case, if the protruding portion 102c4b having the screw mechanism is provided, since continuous adjustment can be performed, it is easier to perform fine adjustment than the protruding portion protruding stepwise. In addition, the protrusion length D can be changed by the operator operating the protrusion portion 102c4b, or the protrusion length D can be changed by driving the protrusion portion 102c4b by a driving mechanism provided on the protrusion portion 102c4b.

One holding member 102b is supported at three points by a set of support portions 102c2, elastic portions 102c3, and adjustment portions 102c4. As shown in FIG. 3, if the protruding length D of the protruding portion 102c4b is changed, the holding member 102b and the polarizing element 102a can be moved in the rotation direction using the supporting portion 102c2 as a fulcrum. When the polarizing element 102a is moved in the rotation direction, the direction in which the linear body provided on the polarizing element 102a extends can be changed. Therefore, by changing the protrusion length D based on the measurement result of the polarized light measuring device 1, unevenness in the polarization direction can be adjusted for each of the plurality of polarizing elements 102 a.

The conveyance part 103 conveys the to-be-irradiated body 200 to the direction (X direction) orthogonal to the direction in which the light source 101a extended. The transporting unit 103 transports the irradiated body 200 so that the irradiated body 200 passes below the side of the light source 101 a on which the polarizing unit 102 is provided. The transfer unit 103 may be provided with a holding device that holds the irradiated body 200, and a transfer device such as a single-axis robot.

The control unit 104 controls operations of the irradiation unit 101 and the transport unit 103. For example, the control unit 104 controls the light source 101a to emit light L having a wavelength in the wavelength range of ultraviolet rays from the light source 101a. The control unit 104 controls the transport unit 103 so that the transport unit 103 transports the irradiated body 200 so that the irradiated body 200 passes below the side of the light source 101 a on which the polarizing unit 102 is provided. In addition, the control unit 104 may control the driving mechanism provided in the protruding portion 102 c 4 b based on the measurement result of the polarized light measuring device 1, and perform unevenness adjustment of the polarization direction for each of the plurality of polarizing elements 102 a.

Next, the function of the polarized light measuring device 1 and the function of the polarized light irradiation device 100 will be exemplified. FIG. 4 is a schematic perspective view illustrating the polarized light Lp generated by the polarized light irradiation device 100 and the polarized light direction measured by the polarized light measurement device 1. The control unit 104 controls the light source 101a, and emits light L having a wavelength in a wavelength range of ultraviolet rays from the light source 101a. The light L emitted from the light source 101a is directly emitted from the opening of the reflector 101b, or is reflected on the inner surface of the reflector 101b and is emitted from the opening of the reflector 101b. The light L emitted from the opening of the reflector 101 b includes components that vibrate in various directions, for example, in the B direction or the C direction.

The light L enters the polarizing element 102a and passes through the polarizing element 102a to become polarized light Lp.

As described above, the polarizing element 102a is provided with a plurality of linear bodies extending in a predetermined direction. Therefore, the polarizing element 102 a transmits only the components of the component of the light L that vibrate in a direction orthogonal to the direction in which the linear body extends. Therefore, when the light L passes through the polarizing element 102a, it becomes polarized light Lp having only a component that vibrates in a predetermined direction (for example, the C direction).

The polarized light irradiation device 100 generates polarized light Lp in the above manner.

When the alignment process is performed on the object 200, the polarized light Lp is irradiated to the object 200. However, the polarization direction of the polarized light Lp cannot be measured when the irradiated body 200 is disposed. Therefore, when the polarization direction of the polarized light Lp is measured, the irradiated body 200 is not disposed, and the polarized light Lp is incident on the polarized light. The polarizing element 20 of the light measuring device 1.

The control unit 5 controls the moving unit 22 to move the holding unit 21 (the polarizing element 20) so that the polarizing element 20 is positioned on the photoelectric conversion unit 30.

The polarized light Lp passes through the polarizing element 20 and becomes polarized light Lpp.

The polarized light Lpp is incident on the photoelectric conversion section 30 so that the photoelectric conversion section 30 outputs an electric signal corresponding to the light amount of the received light.

In addition, the control unit 5 controls the rotation unit 31 (base portion 31b) to move the polarizing element 20 in the rotation direction, and changes the direction in which the linear body provided on the polarizing element 20 extends.

If the direction in which the linear body extends changes, the illuminance of the polarized light Lpp changes according to the polarization direction of the polarized light Lp. For example, when the rotation angle θ is 0 °, -20 °, or 90 °, the illuminance of the polarized light Lpp is different, and the values of the electrical signals output from the photoelectric conversion unit 30 become different values.

Therefore, if the rotation angle θ when the value of the electrical signal output from the photoelectric conversion unit 30 becomes the maximum or minimum is obtained, the polarized light Lp can be obtained from the relationship between the rotation angle θ obtained in advance and the polarization direction of the polarized light Lp Direction of polarized light.

For example, the case where the rotation angle θ is 90 ° is set to the X direction, and the case where the rotation angle θ is 0 ° is set to the Y direction. When the rotation angle θ is 0 °, the electrical signal output from the photoelectric conversion unit 30 is When the value becomes maximum, the polarization direction of the polarized light Lp becomes the Y direction. In addition, when the value of the electric signal output from the photoelectric conversion unit 30 is minimized when the rotation angle θ is 0 °, the polarization direction of the polarized light Lp is the X direction.

In the measurement of the polarization direction of the polarized light Lp, it is sufficient to perform the measurement only before and after the maximum value or the minimum value of the electric signal output from the photoelectric conversion unit 30. As described above, the control unit 5 calculates the polarization direction of the polarized light Lp based on the output from the photoelectric conversion unit 30 and the rotation position information from the rotation unit 31 (base portion 31b).

The measurement of the polarization direction of the polarized light Lp is performed at a plurality of arbitrary positions along the direction (Y direction) in which the plurality of polarizing elements 102 a are arranged. The control unit 5 controls the moving unit 4 to move the polarizing unit 2 and the detecting unit 3 to arbitrary positions in a direction in which the plurality of polarizing elements 102 a are arranged, and measures the polarization direction of the polarized light Lp. The moving range is preferably at least the effective irradiation range of the irradiation section 101. When the polarization direction of the polarized light Lp is measured at a plurality of positions, the polarization direction of the polarized light Lp at a plurality of positions, that is, the unevenness of the polarization direction of the polarized light Lp can be determined.

When measuring the light amount of the polarized light Lp generated by the polarized light irradiation device 100, the control unit 5 controls the moving unit 22 to move the holding unit 21 (polarizing element 20) so that the polarized light Lp directly enters the photoelectric conversion unit 30. . Since the photoelectric conversion unit 30 outputs an electric signal corresponding to the light amount of the received light, the light amount of the polarized light Lp can be obtained based on the value of the output electric signal. That is, the control unit 5 calculates the light amount of the polarized light based on the output from the photoelectric conversion unit 30.

The obtained unevenness in the polarization direction of the polarized light Lp or the light amount of the polarized light Lp is transmitted from the control unit 5 to the control unit 104 as a measurement result of the polarized light Lp.

When the unevenness in the polarization direction of the polarized light Lp exceeds a predetermined range, the inclination of the polarizing element 102 a located directly above or near the position where the unevenness in the polarization direction is large is adjusted. In this case, the inclination of the polarizing element 102a can be adjusted by the operator by operating the protruding portion 102c4b based on the information output from the control unit 5 or the control unit 104 to the display device or the like. In addition, the inclination of the polarizing element 102a can also be adjusted by the control unit 104 controlling the driving mechanism that drives the protruding portion 102c4b.

After the inclination of the polarizing element 102a is adjusted, the polarization direction of the polarized light Lpp is measured again at a plurality of positions. The procedure is repeated until the unevenness in the polarization direction of the polarized light Lp is within a predetermined range.

When the unevenness in the polarization direction of the polarized light Lp is within a predetermined range, the alignment processing of the illuminated object 200 is performed. When performing the alignment process of the irradiation target body 200, the control part 5 controls the moving part 4 and makes the polarizing part 2 and the detection part 3 retreat outside the conveyance area of the irradiation target body 200. In this way, interference between the object to be irradiated 200 and the polarizing section 2 and the detecting section 3 can be avoided.

Next, the control unit 104 controls the light source 101a, and the light L having a wavelength in a wavelength range of ultraviolet rays is emitted from the light source 101a. In addition, the control unit 104 controls the conveyance unit 103 so that the irradiated body 200 passes below the side of the light source 101 a on which the polarizing unit 102 is provided. The light L emitted from the light source 101a enters the polarizing element 102a and passes through the polarizing element 102a to become polarized light Lp. The polarized light Lp is incident on the object to be irradiated 200, and an alignment process is performed by the polarized light Lp. In addition, the object to be irradiated 200 is caused to pass through the entire area of the object to be irradiated 200 by passing the object 200 below the side of the light source 101 a on which the polarizing section 102 is provided.

According to this embodiment, when the measurement of the polarization direction of the polarized light Lp and the measurement of the amount of light of the polarized light Lp are switched, the polarizing element 20 is moved using the moving portion 22, and therefore, the polarizing element 20 is mounted and removed with the operator Compared with the case, the reproducibility can be improved significantly. Therefore, the polarization direction of the polarized light Lp and the light amount of the polarized light Lp can be measured with high accuracy. In addition, since the polarized light measurement device 1 can be built in the polarized light irradiation device 100, the polarized light measurement device 1 can also be mounted on an existing polarized light irradiation device.

As mentioned above, although several embodiment of this invention was illustrated, these embodiment is proposed as an example, and it does not intend to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the spirit of the invention. These embodiments or modifications thereof are included in the scope or spirit of the invention, and are included in the invention described in the claims and the equivalent scope thereof. The above-mentioned embodiments can be implemented in combination with each other.

1‧‧‧ polarized light measuring device

2.102‧‧‧Polarization Department

3‧‧‧Testing Department

4, 22‧‧‧ Mobile Department

5.104‧‧‧Control Department

20, 102a‧‧‧polarizing element

21‧‧‧holding department

21a‧‧‧Main body

21a1‧‧‧hole

21b‧‧‧holding claw

30‧‧‧Photoelectric Conversion Department

31‧‧‧Rotating part

31a‧‧‧Mounting Department

31b, 102c3a, 102c4a‧‧‧base

40‧‧‧First mobile unit

41‧‧‧Second Mobile Division

100‧‧‧ polarized light irradiation device

101‧‧‧Irradiation Department

101a‧‧‧light source

101b‧‧‧ reflector

102b, 102c‧‧‧ holding parts

102b1, 102b2 ‧‧‧ recess

102b3‧‧‧ Centerline

102c1‧‧‧Frame

102c2‧‧‧ support

102c3‧‧‧Elastic section

102c3b‧‧‧ Coil spring

102c4‧‧‧ Adjustment Department

102c4b‧‧‧ protrusion

103‧‧‧Transportation Department

200‧‧‧irradiated body

Directions B, C‧‧‧

D‧‧‧ protruding length

L‧‧‧light

Lp, Lpp‧‧‧polarized light

R‧‧‧axis

FIG. 1 is a schematic perspective view illustrating the polarized light measuring device 1 and the polarized light irradiation device 100 according to the embodiment. FIG. 2 is a schematic cross-sectional view illustrating a polarized light measuring device 1 according to the present embodiment. FIG. 3 is a schematic plan view illustrating the polarizing section 102. FIG. 4 is a schematic perspective view illustrating the polarized light Lp generated by the polarized light irradiation device 100 and the polarized light direction measured by the polarized light measurement device 1.

no

Claims (4)

A polarized light measuring device for a polarized light irradiation device, comprising: a first polarizing element to which polarized light is incident; a rotating part to move the first polarizing element in a rotating direction; a photoelectric conversion part, an output and an An electrical signal corresponding to the light amount of the received light; and a moving section that moves the first polarizing element between a first position and a second position, where the first position is to pass the polarized light through the first A polarizing element is incident on the photoelectric conversion portion, and the second position is such that the polarized light is directly incident on the photoelectric conversion portion, and the moving portion causes the first A polarizing element is moved to the first position, and when the light amount of the polarized light is measured, the first polarizing element is moved to the second position. The polarized light measuring device for a polarized light irradiation device according to claim 1, wherein the first polarizing element is provided with a plurality of linear bodies, and the plurality of linear bodies contain silicon. A polarized light irradiating device, comprising: a light source having a shape extending in a predetermined direction; a plurality of second polarizing elements arranged in a direction extending along the light source; and making light emitted from the light source to be polarized light And the polarized light measuring device for a polarized light irradiation device according to claim 1 or 2, the polarized light measuring device for the polarized light irradiation device is provided in the same manner as the plurality of second polarizing elements. Opposite the light source side. The polarized light irradiation device according to claim 3, wherein the second polarizing element is provided with a plurality of linear bodies, and the plurality of linear bodies contain silicon.