KR20190058410A - Polarization measuring process, polarization measuring apparatus, polarization measuring system and photo-alignment irradiation apparatus - Google Patents

Abstract

An object of the present invention is to measure a polarization property of polarization light at high definition. A method for measuring polarization comprises the steps of: obtaining a change curve (Q), which shows a periodic change of light quantity I when a detection polarizer (33) is rotated based on the light quantity I at each rotation angle (θ) obtained by detecting a light which sequentially penetrates a wire grid polarizer (16) and a detection-side polarizer (33) while rotating the detection polarizer (33); and obtaining the change curve (Q) based on the light quantity I at the rotation angle (θ) which includes the rotation angle θ = θa, one minimum point of the change curve (Q), and is included in a range (W) of the rotation angle (θ) where the light quantity I is equal to or less than a predetermined value, in specifying a polarization property of polarization light (F) penetrating the wire grid polarizer (16) based on the change curve (Q).

Description

TECHNICAL FIELD [0001] The present invention relates to a polarimetric measuring method, a polarimetric measuring apparatus, a polarimetric measuring system, and a photo-

The present invention relates to a technique for measuring polarized light.

BACKGROUND ART [0002] Conventionally, there is known a technique called optical alignment in which an alignment film or alignment layer (hereinafter, referred to as " photo alignment layer ") is oriented by irradiating polarized light to the liquid crystal display panel. Orientation of orientation films, and the like.

In general, an irradiation device used for photo-alignment is provided with a light source and a polarizer, and the light of the light source is passed through the polarizer to obtain polarized light. Recently, a rod-shaped lamp having a length corresponding to the width of a photo alignment film is used as a light source, and a plurality of polarizers are arranged in the longitudinal direction of the rod-shaped lamp so as to align the long-striped photo- Shaped light alignment film is aligned in the width direction of the strip-shaped light alignment film in the direction in which the irradiation area of the polarized light of the irradiation device extends, and the light alignment film is conveyed in the longitudinal direction to uniformly irradiate the light- (For example, refer to Patent Document 1).

As a factor of the polarized light which affects the quality of the light alignment, two extinction ratios and a deviation of the polarization axis distribution are known, and it is important that these are adjusted with high precision as the irradiation apparatus used for the photo alignment. As techniques for measuring the polarization characteristics of the extinction ratio and the polarization axis, various techniques have conventionally been proposed (see, for example, Patent Documents 2 to 4).

Japanese Patent Application Laid-Open No. 2004-163881 Japanese Patent Application Laid-Open No. 2004-226209 Japanese Patent Application Laid-Open No. 2005-227019 Japanese Patent Application Laid-Open No. 2007-127567

In order to obtain a liquid crystal alignment film of high quality by using optical alignment, it is necessary to irradiate a polarized light whose extinction ratio is high and whose polarization axis is adjusted with accuracy within an error of 0.1 [deg.]. In order to adjust the polarization axis to an accuracy within 0.1 °, an error of 0.01 ° or less is required as a measurement accuracy. However, in an irradiation apparatus using a discharge lamp as a light source, fluctuation (unstable) in the amount of light There has been no technique that can measure the polarization characteristics of the polarized light with the accuracy that satisfies this requirement.

In the conventional method, fluctuations occur in the amount of light, so that it is necessary to repeatedly perform the same measurement several times repeatedly to obtain an average, thereby increasing the repeat accuracy and time is required for measurement.

As a technique for measuring the polarization axis, a technique of measuring the polarization axis for each polarizer is proposed. This can be achieved by a conventional polarization measurement technique. However, in the above-described method, since the angle of light introduction into the polarimeter is shallow, the polarization characteristic of the light actually irradiated is measured in the photo alignment film on the stage where the polarized light having passed through the plurality of polarizers is irradiated .

SUMMARY OF THE INVENTION It is an object of the present invention to provide a polarization measurement method, a polarization measurement apparatus, a polarization measurement system, and a photo-alignment irradiation apparatus which can measure the polarization characteristics of the polarized light with high accuracy.

In order to attain the above object, the present invention provides a liquid crystal display device comprising: a liquid crystal display panel including a first polarizer, a second polarizer, and a second polarizer, A second step of determining a polarization characteristic of the polarized light transmitted through the first polarizer on the basis of the change curve obtained in the first step; Based on the amount of light at the rotation angle included in the range of the rotation angle that includes one minimum point of the change curve and the amount of light is equal to or smaller than a predetermined value in the first step, And a curve is obtained.

Further, the present invention is characterized in that, in the polarization measurement method, the light amount at the rotation angle included in the range of the rotation angle that includes one minimum point different from the first step and the light amount becomes a predetermined value or less A fourth step of determining the polarization characteristic of the polarized light transmitted through the first polarizer on the basis of the change curve obtained in the third step, And a fifth step of specifying a polarization characteristic of the polarized light transmitted through the first polarizer on the basis of the average of the polarization characteristics specified in each of the steps.

In the polarimetry measuring method of the present invention, the predetermined value is a light amount of about 20% of a maximum value of the light amount.

Further, the present invention is characterized in that in the polarization measurement method, the polarization axis of the polarized light transmitted through the first polarizer is specified based on the rotation angle corresponding to the maximum value of the light amount represented by the change curve, and / On the basis of a maximum value and a minimum value of the first polarizer or a light amount measured when the second polarizer rotates at a rotation angle of the polarization axis of the polarized light specified based on the change curve and a rotation angle orthogonal to the polarization axis, The extinction ratio of the polarized light having passed through the polarizing plate is specified.

In order to achieve the above object, the present invention also provides a liquid crystal display device comprising a first polarizer, a second polarizer, and a second polarizer, wherein, based on a light amount of light at each rotation angle obtained by sequentially detecting light transmitted through the first polarizer and the second polarizer while rotating the second polarizer, And a polarization characteristic specifying means for specifying a polarization characteristic of the polarized light transmitted through the first polarizer on the basis of the change curve , The change curve calculating means includes one minimum point of the change curve, and the change curve is calculated based on the light amount at the rotation angle included in the range of the rotation angle at which the light amount becomes the predetermined value or less And a polarized light measuring device for measuring a polarized light.

In order to achieve the above object, the present invention also provides a liquid crystal display device comprising a first polarizer for polarized light polarized by a first polarizer, a second polarizer for emitting a polarized light polarized by the first polarizer, And a polarization measuring device for specifying a polarization characteristic of the polarized light transmitted through the first polarizer on the basis of the detection result of the detection section, wherein the detection section introduces the light including the incident component, A diffusing means for diffusing the light transmitted through the second polarizer, a second aperture for passing a part of the light diffused by the diffusing means, and a second aperture for passing the light passing through the second aperture, Wherein the polarization measuring device is configured to measure the amount of light of the second polarizer based on the amount of light at each rotation angle of the second polarizer, And a polarization characteristic specifying unit that specifies a polarization characteristic of the polarized light transmitted through the first polarizer on the basis of the change curve, The curve calculating means obtains the change curve based on the light amount at the rotation angle included in the range of the rotation angle that includes one minimum point of the change curve and the light amount is equal to or smaller than a predetermined value And a polarizing beam splitter.

In order to achieve the above object, the present invention also provides a photo-alignment irradiating apparatus having a polarizer unit for irradiating polarized light to an alignment film on the surface of a work loaded on a stage, wherein the polarizer unit comprises a plurality of unit polarizers And unit detecting means for detecting a polarization characteristic of light at a position corresponding to the stage in which the polarized light having passed through the plurality of polarizers is irradiated in an overlapping manner .

Further, the present invention is characterized in that in the above-described photo-alignment irradiating device, the detecting means is provided with a detecting portion provided so as to be movable in the arrangement direction of the unit polarizer units. Further, the detecting section may be movable in the stage moving direction.

Further, the present invention provides the above-described photo-alignment irradiating apparatus, wherein the detecting means comprises: a detector having a polarizer for measurement, for detecting the amount of light transmitted through the polarizer for measurement while rotating the polarizer for measurement; And a polarization measurement device for specifying the polarization characteristic of light at the position corresponding to the stage based on the result, wherein the detection section is arranged at a position corresponding to the stage, and introduces light in which polarized light having passed through the plurality of polarizers is superimposed A diffusing means for diffusing the light transmitted through the polarizing element for measurement; and a light receiving sensor for receiving the light diffused by the diffusing means and detecting the light amount, Based on the amount of light at each rotation angle of the measuring polarizer, the phase of the phase when the measuring polarizer is rotated Periodic variation curve calculation to obtain the variation curve showing the variation of the quantity of light means and, based on the variation curve will be the irradiation light polarization characteristics in the stage corresponding position, it characterized in that it includes a polarization characteristic specifying means for specifying.

According to the present invention, on the basis of the light amount of light at each rotation angle obtained by sequentially detecting light transmitted through the first polarizer and the second polarizer while rotating the second polarizer, the period of the light amount when the second polarizer rotates A variation curve is obtained based on a light amount at a rotation angle included in a range of a rotation angle that includes one minimum point of a variation curve and a light amount becomes a predetermined value or less Respectively.

As a result, the change curve is obtained based on the detection value with a small noise component included in the detection value, compared with the detection value near the maximum point, so that the accuracy of the change curve is enhanced. By obtaining the polarization characteristic from this change curve, the polarization characteristic can be obtained with high accuracy.

* Also, only the amount of light in the vicinity of the minimum point needs to be measured, and high-precision measurement can be performed with a small number of times of measurement.

Further, according to the present invention, the polarizing characteristic of the light at the position corresponding to the stage where polarized light having passed through the plurality of polarizers is irradiated is detected.

This makes it possible to detect the polarization characteristic of the polarized light actually irradiated on the alignment film on the surface of the work disposed on the stage, and thus to measure the polarization characteristics of the actual irradiation light with high accuracy and without excess.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a diagram showing a configuration of a polarization measurement system according to a first embodiment of the present invention together with a photo-alignment device; Fig.
Fig. 2 is a view showing a configuration of a polarization measurement system together with a view seen from the plane of the optical alignment device; Fig.
3 is a schematic diagram showing a configuration of a detection unit;
4 is a schematic diagram of a change curve of the detection light.
5 is an explanatory diagram of a range of a rotation angle for detecting the amount of light of detection light;
6 is an explanatory diagram of a specific example of detection of the amount of detection light.
7 is a flow chart showing the measurement operation of the polarization measurement system;
8 is an external perspective view showing the configuration of the detection unit.
9 is a cross-sectional view of the detection unit.
10 is a diagram showing a configuration of a photo-alignment apparatus according to a second embodiment of the present invention.
11 is a graph showing the relationship between the irradiation position and the relative irradiation light amount.
12 is an explanatory view showing the relationship between the polarizer unit and the detection unit from the short axis side;
Fig. 13 is a view showing a configuration of a polarizer unit, and Fig. 13 (A) is a plan view and Fig. 13 (B) is a plan view.
14 is a schematic diagram showing a polarization axis adjusting device.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

≪ First Embodiment >

Fig. 1 is a schematic diagram showing the configuration of the polarization measurement system 1 according to the present embodiment together with the optical alignment device 2. Fig.

1, the photo-alignment device (photo-alignment irradiating device) 2 is an irradiating device for irradiating a photo alignment film of a plate-shaped or strip-shaped photo alignment object (work) (Detection means) 1 measures the polarization characteristic of the irradiation light of the photo-alignment device 2. [ As the polarization characteristics, the polarization axis and the extinction ratio of the polarized light are measured.

The optical alignment apparatus 2 is provided with a stage transporting platform 3, an illuminator mounting platform 4 and a work stage 5 on which the object to be aligned is placed.

The illuminator mounting platform 4 is mounted on the stage transporting platform 3 at an upper position spaced a predetermined distance from the stage transporting platform 3 and extends in a width direction (a direction perpendicular to the direct- , And both the columns are fixed to the stage transporting platform 3. The irradiator mounting bracket 4 incorporates an irradiator 6, and the irradiator 6 irradiates polarized light directly below. In order to separate the vibrations caused by the movement of the workpiece stage 5 and the vibrations caused by the cooling of the irradiator 6 instead of fixing the stage 4 to the stage carrier 3, Or may be provided separately from the mount 3. The stage transporting platform 3 and the irradiation installation mount 4 may have a dustproof structure.

A direct drive mechanism (not shown) for transferring the workpiece stage 5 so as to pass directly above the surface of the stage transporting support 3 along the direct-drive direction X is provided in the stage transporting carriage 3 have. In the optical alignment of the optical alignment object, the optical alignment object placed on the workpiece stage 5 is conveyed together with the workpiece stage 5 by the linear motion mechanism and passes directly below the projector 6, And the photo alignment film is aligned with the polarized light.

The irradiator 6 includes a lamp 7 as a light source, a reflector 8, and a polarizer unit 10, and directs the polarized light to be condensed downward.

The lamp 7 is a discharge lamp, and an ultraviolet lamp of an intrinsic type (bar shape) which is at least equal to the width of the object to be photo-aligned is used. The reflector 8 is a cylindrical concave reflector that is elliptical in cross section and extends along the longitudinal direction of the lamp 7 and condenses the light of the lamp 7 and irradiates the polarizer unit 10.

The polarizer unit 10 is disposed between the reflecting mirror 8 and the object to be photo-aligned, and polarizes the light to be irradiated onto the object to be photo-aligned. The polarized light is irradiated to the photo alignment film of the photo alignment subject, whereby the photo alignment film is oriented.

Fig. 2 is a view showing the polarization measuring system 1 together with the plan view of the optical alignment apparatus 2. Fig. In Fig. 2, only the polarizer unit 10 is shown in the illuminator mounting bracket 4 for easy understanding of the configuration of the polarizer unit 10. Fig.

2, the polarizer unit 10 includes a plurality of unit polarizer units (first polarizers) 12 and a frame 14 for aligning these unit polarizer units 12 in a transversal array . The frame 14 is a plate-shaped frame for arranging the unit polarizers 12 in a contiguous arrangement. The unit polarizer unit 12 has a wire grid polarizer (polarizer) 16 formed in a substantially rectangular plate shape.

In the present embodiment, each unit polarizer unit 12 supports the wire grid polarizer 16 so that the wire direction is parallel to the linear direction X of the workpiece stage 5, and a direction orthogonal to the wire direction A, And the arrangement direction B of the wire grid polarizers 16 coincide with each other.

The wire grid polarizer 16 is a kind of linear polarizer. As described above, since the lamp 7 is rod-shaped, light of various angles is incident on the wire grid polarizer 16, and the wire grid polarizer 16 transmits linearly polarized light even when it is incident obliquely.

The wire grid polarizer 16 is supported on the unit polarizer unit 12 so that the direction of the polarization axis C1 can be finely adjusted by rotating the normal direction of the wire grid polarizer 16 in the plane with the normal direction as a rotation axis. The polarization axis C1 of the wire grid polarizer 16 is finely adjusted so that the polarization axis C1 of the wire grid polarizer 16 is aligned in a predetermined irradiation reference direction with respect to all the unit polarizer units 12, Aligned polarized light is obtained, and high-quality optical alignment is possible.

The polarization measurement system 1 includes a polarization measurement device 20 and a measurement unit 30 as shown in Fig. The measurement unit 30 has a detection unit 31 for detecting polarized light and the polarization measurement device 20 measures the polarization axis and the extinction ratio of the polarized light based on the detection result of the polarized light by the detection unit 31.

The measuring unit 30 has a linear guide 32 for guiding the detecting unit 31 along a straight line as shown in Fig. The linear guide 32 is connected to the side surface 5A on the traveling direction side of the workpiece stage 5 and is transported directly below the polarizer unit 10 or when the linear guide 32 is moved to the polarizer unit 10, Is placed on the stage transporting platform (3) so as to be located directly under the transporting platform (10). The detection unit 31 is moved or frequently moved along the linear guide 32 so as to be positioned just below the wire grid polarizer 16 to be fine-tuned, and the light is transmitted through the wire grid polarizer 16 The polarized light is detected by the detecting unit 31 and the polarization characteristics of the irradiated light are measured.

Fig. 3 is a schematic diagram showing the configuration of the detection unit 31. Fig.

The detection unit 31 includes a detection-side polarizer (a second polarizer, a measurement polarizer) 33 and a light-receiving sensor 34.

The detection-side polarizer 33 is a plate-shaped (disc-shaped linear polarizer for photo detection) having a polarization axis C2 and is also referred to as an analyzer. The linearly polarized polarized light F transmitted through the wire grid polarizer 16 is incident on the detection-side polarizer 33 to linearly polarize the polarized light F. As the detection-side polarizer 33, any polarizer may be used as long as it is a linear polarizer. For example, a wire grid polarizer may be used.

The light receiving sensor 34 receives the detection light G linearly polarized at the polarization axis C2 of the detection side polarizer 33 and outputs the detection signal 35 indicating the light amount I to the polarization measurement device 20. [

In the detection unit 31, the detection-side polarizer 33 is provided so as to be rotatable for at least one rotation with its normal direction S as a rotation axis. The rotation of the detection-side polarizer 33 is defined by the rotation angle [theta] from the reference position P0. In the present embodiment, the reference position P0 is set to a position where the direction of the polarization axis C2 coincides with the irradiation reference direction of the wire grid polarizer 16. That is, when the detection unit 31 is set in the linear guide 32 and the detection-side polarizer 33 is aligned with the reference position P0, the polarization axis C2 of the detection-side polarizer 33 is directed in the irradiation reference direction do.

The polarization measuring device 20 measures the polarization axis and the extinction ratio of the polarized light F based on the periodic change in the amount of the detection light G when the detection-side polarizer 33 makes one revolution. 2, the polarization measurement apparatus 20 includes a rotation drive control section 21, an input section 22, a change curve calculation section 23, a polarization characteristic specifying section 24, And a polarization characteristic output section 25, as shown in Fig. Further, the polarization measurement device 20 may be implemented by, for example, executing a computer-readable program for realizing the components shown in Fig. 2 on a personal computer.

The rotation drive control unit 21 controls the rotation of the detection side polarizer 33 of the detection unit 31. [ Specifically, the detecting section 31 includes a rotary actuator that rotates the detection-side polarizer 33, and the rotation drive control section 21 controls the rotary actuator to rotate the detection-side polarizer 33, thereby rotating the polarization axis C2 To the direction of the predetermined rotation angle [theta]. The rotation angle [theta] at this time is output to the change curve calculating section 23. [

The input unit 22 is a means for accepting input of the detection value of the light amount I of the detection light G. The detection signal 35 of the detection unit 31 is input to the input unit 22. [ The input unit 22 acquires the detection value of the light amount I of the detection light G from the detection signal 35 and outputs it to the change curve calculation unit 23. [

The change curve calculating unit 23 calculates the change amount of the detection light G based on the detected value of the light amount I of the detection light G, And a curve (Q) is calculated. 3, the radiation E of the lamp 7 is divided into a wire grid polarizer 16 and a detection-side polarizer 33, which are linearly polarized light, in the order of Is the light that is obtained by passing through.

Therefore, the change curve Q of the quantity of light I of the detection light G with the rotation of the detection-side polarizer 33 is ideally set so that the polarization axis C2 of the detection-side polarizer 33 (Maximum value) in the case of being parallel to the polarization axis C1 of the wire grid polarizer 16 (in this embodiment, the rotation angle? = 0 DEG, 180 DEG (maximum point)) and the polarization axis C2 is orthogonal to the polarization axis C1 In the present embodiment, an excitation waveform shown in the following Equation 1 with a period of π [rad] (= 180 °) which becomes the minimum light quantity Imin (minimum value) at a rotation angle θ = 90 ° and 270 ° (The so-called "Low of Malus").

Where? Is the amplitude,? Is the period,? Is the phase shift (the phase difference of the polarization axis C1 of the wire grid polarizer 16 with respect to the reference position P0), and? Is a bias component.

However, the inventors of the present invention obtained the following knowledge about the change curve (Q) through an experiment.

That is, because the light-directing device 2 uses the lamp 7, which is a discharge lamp, as the light source, due to various factors such as fluctuation of the lighting power of the power source device for lighting the lamp 7 and the cooling state of the lamp 7, The luminance of the light source fluctuates in a very short time period and fluctuation or instability occurs, which becomes a noise component of the light source luminance.

The light directing device 2 irradiates the polarized light F from the lamp 7 to the light receiving sensor 34 of the detecting portion 31 through the polarizer unit 10 in a wide range, The polarized light F passing through the other wire grid polarizers 16 adjacent to the wire grid polarizers 16 to be adjusted is also incident and detected.

The variation curve Q obtained from the detection result of the detection section 31 is deformed from the ideal cosine function (the above equation (1)) due to the noise component of these light source luminances and the incident angle of the polarized light F, (N ≥ 2) shown in the following equation (2).

According to the above knowledge, it is best to obtain the n-wavenamer waveform based on the detection value of the light amount of the detection light G as the change curve Q. However, There is a problem that it is necessary.

Since the extinction ratio divides the maximum light amount Imax by the minimum light amount Imin, the noise component occupying the minimum light amount Imin greatly affects the value of the extinction ratio as the minimum light amount Imin becomes smaller. However, Q) is obtained, the repetition accuracy of the minimum light amount Imin is poor, so that the extinction ratio can not be obtained accurately.

Therefore, the number of measurement points for obtaining one change curve Q or a plurality of times of measurement may be repeated to obtain a plurality of change curves Q and averaged so as to obtain a desired accuracy. However, There arises a problem that measurement takes time.

As a method for solving this problem, a light receiving sensor provided separately from the detecting section 31 is prepared so that the noise component of the light source luminance can be removed from the detecting signal 35 of the detecting section 31, It is conceivable to perform processing for detecting the light amount I of the detection light G for reference and removing the noise component from the detection signal 35 of the detection section 31 based on the detection result for reference.

However, in the polarization measurement, generally, the polarization state is changed even when light passes through an optical element such as a mirror or a prism. Therefore, the detection light G incident on the detection unit 31 is branched I can not. As a result, the detection light G received by the light receiving sensor, which is provided separately from the detection unit 31, is changed, and the noise component is not accurately removed.

The amount of light I of the detection light G detected by the light receiving sensor 34 of the detection unit 31 is changed in accordance with the rotation of the detection side polarizer 33 and the amount of noise component of the light source luminance is changed It is necessary to perform processing to reflect the rotation angle [theta] of the detection-side polarizer 33 with respect to the detection value of the light-receiving sensor which is installed separately. Further, when comparing the light receiving sensor 34 provided in the detecting section 31 with the light receiving sensor provided separately, it is also necessary to correct the difference in the light receiving characteristics due to the noise due to the aging of the sensor sensitivity and the temperature characteristic .

As described above, the measurement method using a separately installed light-receiving sensor includes many problems that must be solved in order to realize high-precision measurement.

Therefore, in the present embodiment, the detection value of the light quantity I used for the curve fitting of the change curve Q is set in a range in the vicinity of the minimum point at which the light quantity I of the detection light G is minimum W), it is possible to calculate the change curve Q having a high repeatability at a small measurement point, while being measured by one light-receiving sensor 34.

More specifically, if the ratio of the noise component of the light source luminance to the light quantity I of the detection light G is substantially constant, the magnitude of the noise component becomes large in proportion to the light quantity I of the detection light G, 4, the size of the noise component becomes smaller in the vicinity of the minimum light amount Imin (minimum point) as compared with the vicinity of the maximum light amount Imax (maximum point). In other words, in the vicinity of the minimum light amount Imin, the variation width of the light amount I due to the influence of the noise component of the light source luminance is smaller than that in the vicinity of the maximum light amount Imax.

Therefore, the change curve (Q) is obtained by curve fitting using the detected value of the light quantity I in the vicinity of the minimum light quantity Imin with a small influence of the noise component, so that the noise component due to the influence of the fluctuation of the light source luminance, The curve Q is obtained. Since the influence of the noise component of the light source luminance is suppressed, the repetition accuracy is enhanced, and a change curve Q having high reliability is obtained even in one measurement.

The inventors have found that if the range W of the rotation angle? At which the light quantity I of the detection light G is 20% or less of the maximum light quantity Imax is within the range of the minimum light quantity Imin, The influence of the noise component of the light source luminance is suppressed based on the light amount I of the detection light G measured at the rotation angle [theta] in the light source 1, and a change curve Q with high repetition accuracy is obtained . Further, the inventors of the present invention have obtained knowledge that the range (W) falls within the range of ± 20 ° around the rotation angle θa at which the minimum light amount Imin is obtained.

Based on these knowledge, in this embodiment, as shown in Fig. 5, detection is performed at four rotational angles? (? =? A ± 10 °,? A ± 20 °) The light amount I of the light G is detected and the change curve Q is obtained by curve fitting based on the light amount I at each rotation angle?

A significant difference can be generated between the detection values of the light quantity I of the detection light G by shifting the rotation angle [theta] for detecting the light quantity I of the detection light G by about 10 DEG, The change curve Q can be reliably obtained without being buried in the noise component of the light source luminance.

Further, the rotation angle [theta] for measuring the light amount I of the detection light G is not limited to four, but it may be at least three or more if it is within the range W. [

The variation curve calculating section 23 calculates the curve waveform shown in the equation (1) based on the detection value of the light quantity I of the detection light G at the rotation angle? Included in the range W, (Hereinafter also referred to as " regression "), and outputs it to the polarization characteristic specifying section 24. [

When the polarization direction of the polarized light F deviates from the reference position P0, that is, when the direction of the polarization axis C1 of the wire grid polarizer 16 deviates from the arrangement direction B which is the direction of the reference position P0 , The deviation appears as a phase shift? (≫ 0) in the change curve Q as indicated by the imaginary line in Fig.

The polarization characteristic specifying section 24 determines the polarization direction of the polarized light F (that is, the direction of the polarization axis C1 of the wire grid polarizer 16) based on the change curve Q obtained by the change curve calculating section 23. [ And the extinction ratio to output to the polarization characteristic output unit 25. [

4, the polarization characteristic specifying unit 24 determines the polarization direction of the detection light G by the rotation angle? (Maximum point) at which the maximum light amount Imax of the detection light G is obtained, And determines the extinction ratio based on the ratio of the maximum light amount Imax of the change curve Q to the minimum light amount Imin (= maximum light amount Imax / minimum light amount Imin). The maximum light amount Imax in the change curve Q is obtained by substituting the rotation angle? =? (Maximum point) for the change curve Q and the minimum light amount Imin is obtained by multiplying the rotation angle? = 90 占 + .

The polarization characteristic output section 25 outputs the polarization characteristics (polarization axis and extinction ratio) specified by the polarization characteristic specifying section 24. [ The form of this output is arbitrary as long as the user can use the polarization characteristic, for example, display, output to another electronic device, recording on a recording medium, and the like.

Here, the rotation angle [theta] a (minimum point) at which the minimum light amount Imin is obtained is set so that the phase is 180 [deg.] During one rotation of the detection-side polarizer 33 In the present embodiment, the change curve calculating section 23 calculates the rotation angle of the four points within the range W for each of the two rotation angles? =? A and? A + 180 degrees, The light amount I of the detection light G is measured at the angle? To obtain two change curves Q and the polarization characteristic specifying unit 24 obtains the polarization axis and the extinction ratio for each of the two change curves Q , And their average values are determined, thereby increasing the measurement accuracy of the polarization axis and the extinction ratio.

In addition, in the present embodiment, in each of the above-mentioned ranges W for each of the two rotation angles? =? A and? A + 180 占 the light quantity I of the detection light G at four rotation angles? The measurement of the quantity of light I is repeated plural times (for example, 10 times) at the same rotation angle?

As a result, as shown in Fig. 6, detection values of M (M? 2) light amounts I are obtained at the same rotation angle?. When the change curve calculating section 23 finds the change curve Q from these detected values, it selects N (M? N? 1) detected values at each rotation angle? The average value of the detection values is obtained, and the change curve (Q) is obtained based on the average value. Since the number of combinations when selecting N among the M detected values is MCn, the change curve calculating section 23 finds the change curve Q for each combination of MCn. Then, the polarization characteristic specifying section 24 obtains the polarization axis and the extinction ratio for each of the MCn change curves Q, and obtains the average value of each polarization axis and each extinction ratio. Thereby, the polarization axis and the extinction ratio can be obtained with higher accuracy.

Fig. 7 is a flow chart showing the measurement operation of the polarization measurement system 1. Fig.

7, the polarization measurement device 20 controls the rotation of the detection-side polarizer 33 of the detection section 31 to adjust the rotation angle? To the measurement point (step S1). In this embodiment, the measurement point of the rotation angle? Is eight points in total of? =? A ± 20 °,? A ± 10 °,? A + 180 ° ± 20 °, and θa + 180 ° ± 10 °, as shown in FIG. The rotation angle [theta] a is an angle (minimum point) at which the minimum light amount Imin is obtained, and is defined by [theta] a = 90 [deg.] + [Gamma] as shown in Fig. In this embodiment, in an ideal state in which there is no deviation in the polarization axis C1,? = 0. Therefore, in step S1, the polarization measuring device 20 determines the measurement point of the rotation angle? By setting? A = 90 degrees.

Subsequently, the polarization measuring device 20 intermittently introduces the detection signal 35 of the light amount I of the detection light G over M times to acquire the detection values of the M light amounts I (step S2).

The polarization measuring device 20 repeatedly executes the above-described steps S1 and S2 until obtaining the detection values of the M light amounts I at all measurement points of the rotation angle [theta] (step S3: YES).

The polarization measuring device 20 obtains the change curve Q by using the detection value of the light amount I near the minimum light amount Imin (near the minimum point), so that the rotation angle? =? A ± 20 °, (Step S4) by the curve fitting on the basis of the detected value of the quantity of light I in equation (1). More specifically, the polarization measurement device 20 selects N (M? N? 1) detection values for each of these rotation angles?, Obtains an average value of these N detection values, theta], and the change curve Q is obtained by curve fitting. As described above, MCn change curves Q are obtained. Subsequently, the polarization measuring device 20 obtains the polarization axis and the extinction ratio for each of the MCn change curves Q, and obtains the average value of the polarization axes and the extinction ratios (step S5).

The polarization measurement device 20 calculates the change amount of the change amount of the light quantity I by the curve fitting based on the detected value of the light quantity I at four points of the rotation angle? =? A + 180 占 20 占 and? A + 180 占 10 占 similarly to the steps S4 and S5. The curve Q is obtained (step S6), and the polarization axis and the extinction ratio are specified based on the change curve Q (step S7).

Then, the polarization measuring device 20 specifies the polarization axis and the extinction ratio of the polarized light by obtaining the average value of the polarization axis and the extinction ratio obtained in step S5 and step S7 (step S8).

Thereby, the polarization axis and the extinction ratio of the polarized light can be obtained with high accuracy.

In this measurement, the polarization measuring apparatus 20 specifies the rotation angle? =? A at which the minimum light amount Imin is obtained, the rotation angle? =? At which the maximum light amount Imax is obtained, based on the change curve Q, The detection side polarizer 33 of the detection side light source 31 may be rotated to actually detect the light amount I of the detection light G at each rotation angle θ and determine the extinction ratio based on the detection value.

When the desired accuracy is obtained without performing the processing of steps S6 to S8 in the above polarized light measurement, the polarization axis and extinction ratio specified in step S5 are measured without performing the processing of steps S6 to S8 It may be a result. It is also possible that a user such as an operator can select whether or not to carry out the processing in steps S6 to S8.

Next, the measurement of the polarized light of the photo-alignment apparatus 2 using the polarization measurement system 1 will be described.

First, the operator installs the measurement unit 30 in the photo-alignment apparatus 2. [ The linear guide 32 is arranged so that the guiding direction of the linear guide 32 is parallel to the arrangement direction B of the wire grid polarizer 16 and is located directly below the polarizer unit 10 Install it. Subsequently, the operator guides the detection unit 31 by the linear guide 32 and directly below the wire grid polarizer 16 to be measured. Using the polarization measurement system 1, the wire grid polarizer 16 16, and measures the polarization axis C1 and the extinction ratio of the wire grid polarizer 16. The polarized light F emitted from the light- The operator adjusts the direction of the polarization axis C1 to a predetermined direction (the arrangement direction B in this embodiment) by finely adjusting the rotation of the wire grid polarizer 16 as necessary based on the measurement result of the polarization axis C1.

The worker performs the measurement of the polarized light F for all the wire grid polarizers 16 provided in the polarizer unit 10 and the operation for aligning the direction of the polarization axis C1 to the arrangement direction B based on the measurement result, The directions of the polarization axes C1 of all the wire grid polarizers 16 are aligned in the arrangement direction B. [

As described above, according to the polarimetric measurement system 1, a change curve Q having high repeatability and high reliability can be obtained without performing the same measurement a plurality of times. From the change curve Q to the direction of the polarization axis C1 Is specified with high accuracy. Therefore, when finely adjusting the individual wire grid polarizers 16, the number of times of measurement of the polarized light F can be reduced, and the direction of the polarization axis C1 can be adjusted with high precision while finishing the fine adjustment work in a short time.

In the photo-alignment apparatus 2, the radiation E of various angles emitted from the rod-shaped lamp 7 is incident on the wire grid polarizer 16, and is linearly polarized in the wire grid polarizer 16 It is released.

On the other hand, a detection unit using a Glan Thompson polarizing prism as the detection-side polarizer 33 is known. However, in the detection section using the Glan-Thompson polarizing prism, the extinction ratio of the Glan-Thomson polarizing prism changes largely in accordance with the incidence angle, so that the incidence angle incident on the detection section needs to be minimized.

Therefore, in the conventional detecting section, only a very limited range of angular components can be detected from among the polarized light F including various angular components output from the wire grid polarizer 16, and the polarized light F can be accurately measured none.

Therefore, in the present embodiment, even when the polarized light F including various angular components is used, the range of a wide angle component can be detected and the polarization characteristic can be measured by using the detection section 31 having the configuration described below.

Fig. 8 is an external perspective view showing the configuration of the detection unit 31, and Fig. 9 is a sectional view of the detection unit 31. Fig.

As shown in these drawings, the detecting section 31 includes a base mount 70 in the form of a rectangular plate, on which a light receiving sensor unit 71, a detecting-side polarizer 33, a rotating stage 72 , And a detection light adjusting unit 73 (Fig. 9).

The light-receiving sensor unit 71 includes a photoelectrically-multiplying tube 74 which is an example of the light-receiving sensor 34 and a photodetector 74 for controlling the temperature of the photoelectrically-multiplying tube 74 Cooled base 75 for reducing noise and a detection signal 35 (Fig. 3) of the opto-electronic expansion tube 74 is introduced to the polarization measurement device 20. [

The base mount 70 is engaged with the linear guide 32 and linearly guided by the linear guide 32. [ The reference position P0 and the polarization axis C2 of the detection-side polarizer 33 are directed to the irradiation reference direction by setting a predetermined one side of the base mount 70 in accordance with the longitudinal direction of the linear guide 32. [ Further, if the predetermined one side of the base mount 70 can be fitted to the irradiation reference direction, the linear guide 32 does not necessarily have to be used.

The detection-side polarizer 33 is disposed directly above the detection surface 74A of the opto-electronic expansion tube 74 and is provided with an aperture 76A having a predetermined diameter, and an incident side of the detection light G is covered have. This aperture unit 76 limits the incident light to the detection-side polarizer 33. In this detection unit 31, the wire grid polarizer 16 transmits the light of the incident light to generate the polarized light F The aperture 76A is formed such that the incident angle Y passes through the polarized light F in the range of 0 DEG to 70 DEG in order to introduce the polarized light F by the components of the incident light.

The range of the incident angle Y is determined based on the shape and arrangement relationship of each of the detecting section 31, the wire grid polarizer 16 and the lamp 7, (F) is introduced.

The detection light adjustment unit 73 is a tubular member disposed between the detection-side polarizer 33 and the detection surface 74A of the optoelectronic multipole tube 74. The detection light adjustment unit 73 includes a cylindrical body 77, The detection light G that has passed through the detection-side polarizer 33 is introduced from the upper surface of the cylindrical body 77 and mixed therein to be guided from the lower surface to the photomultiplier tube 74.

Specifically, on the upper surface of the cylindrical body 77 of the detection light adjustment unit 73, an opening 78A for passing the detection light G in the range up to the incident angle Y at which the aperture 76 is introduced A formed aperture 78 is provided.

A diffusion unit 79 for diffusing the transmitted light is provided in the cylindrical body 77 just below the aperture 78 in order to secure a wide angle of incidence of the light and also to solve the polarized state of the introduced light beam, Is installed. The diffusion unit 79 has two diffusion plates 79A and 79B arranged at a predetermined interval and mixes and outputs detection light G of various incident angles Y. For example, a frosted synthetic quartz plate is used as the diffusion plates 79A and 79B.

A plate member 80 having a pinhole 80A for limiting the amount of incident light to the opto-electronic expansion pipe 74 is provided on the lower surface of the cylindrical body 77. Light passing through the pinhole 80A is guided to the opto- 74 on the detection surface 74A.

A wavelength limiting filter 81 is provided between the pinhole 80A and the detection surface 74A of the optoelectronic multipole tube 74 to cut light having a wavelength other than the optical alignment action wavelength. ) Is guided to the photo multiplier tube 74. The photoelectrically-multiplying tube 74,

As described above, the detection unit 31 is configured to introduce the polarized light F to a range of a relatively large incident angle Y, to diffuse the polarized light F therein, and to detect the amount of light by the opto-electronic expansion tube 74, Even in the case of the polarized light F including various angular components such as the polarized light F obtained by passing the radiation E of the polarizing plate 7 through the wire grid polarizer 16, Can be measured.

As described above, according to the present embodiment, the detection light G transmitted through the wire grid polarizer 16 and the detection-side polarizer 33 in order is detected while rotating the detection-side polarizer 33, side polarizer 33 on the basis of the amount of light I at the maximum value of the amount of light I at the time of the detection-side polarizer 33, the variation curve Q indicating the periodic variation of the quantity of light I when the detection- (W) included in the range W of the rotation angle (?) That includes the rotation angle? =? A, and the light amount I is not more than a predetermined value (about 20% or less of the maximum light amount Imax in this embodiment) the change curve Q is obtained on the basis of the light quantity I at? =? a ± 20 ° and? a ± 10 °.

As a result, the change curve is obtained based on the detection value having a small noise component contained in the detection value, compared with the detection value of the light amount I near the maximum light amount Imax as the maximum point, so that the accuracy of the change curve is enhanced. By obtaining the polarization characteristic from this change curve, the polarization characteristic can be obtained with high accuracy.

Since only the amount of light I near the minimum light amount Imin, which is the minimum point, needs to be measured, high-precision measurement can be performed with a small number of times of measurement.

According to the present embodiment, the range W of the rotation angle [theta] including the rotation angle [theta] = [theta] a + 180 [deg.] Which is one minimum point different from the above- A variation curve Q is obtained on the basis of the light quantity I at a rotation angle? =? A + 180 占 20 占 and? A + 180 占 10 占 included in the polarization beam F and polarization of the polarized light F And specifies the polarization characteristic of the polarized light F based on an average of the polarization curve from the variation curve Q corresponding to the range W including the rotation angle? .

Thus, when high-precision measurement is required, the polarization characteristics of the polarized light F can be obtained with higher accuracy.

Further, in the present embodiment, the range W is set to a range in which the light quantity I of the detection light G is in the range of about 20% of the maximum light quantity Imax, so that the influence of the noise component is suppressed, (Q) is obtained.

According to the present embodiment, the detection unit 31 includes an aperture 76 that introduces the polarized light F including the incident component and enters the detection-side polarizer 33, and an aperture 76 that transmits the detection-side polarizer 33 A diffusing unit 79 for diffusing one light and a photoelectrically-multiplying tube 74 as a light-receiving sensor for receiving the light diffused by the diffusing unit 79 and detecting the quantity of light I are provided.

As a result, even the polarized light F including various angular components, such as the polarized light F obtained by passing the radiation E of the rod-shaped lamp 7 through the wire grid polarizer 16, It is possible to measure the polarization characteristic by detecting the range.

≪ Second Embodiment >

Next, a second embodiment of the present invention will be described with reference to Figs. 10 to 14. Fig.

In the first embodiment described above, the polarization axis C1 is measured for each wire grid polarizer 16. In the second embodiment, the polarization direction of the polarized light is measured at each location (measurement point) of the object to be photo-aligned. In the second embodiment, the same reference numerals are given to the same parts as in the first embodiment, and a description thereof is omitted.

10 is a diagram showing a configuration of the optical alignment apparatus 100 according to the second embodiment.

The optical alignment apparatus 100 is provided with a polarization measurement system 1. In the optical alignment apparatus 100, for the purpose of enhancing the uniformity of the irradiation light, and in the processing of the object to be subjected to light (during irradiation) The wire grid polarizer 16 is disposed at a predetermined distance from the alignment film on the surface of the object to be photo-aligned as shown in Fig. The optical alignment apparatus 100 is formed in the same manner as the optical alignment apparatus 1 of the first embodiment except for the configuration including the polarization measurement system 1 and the distance between the wire grid polarizer 16 and the orientation film.

As described above, the radiation beam E of various angles radiated from the rod-shaped lamp 7 is incident on the wire grid polarizer 16, linearly polarized by the wire grid polarizer 16, F). The polarized light F includes various angular components.

As described above, since the wire grid polarizer 16 is disposed at a predetermined distance from the orientation film on the surface of the object to be photo-aligned, and the polarized light F includes various angular components, a plurality of wire grid polarizers The polarized light F having passed through the polarizing plate 16 is superimposed and irradiated. The polarization characteristic of the polarized light F is not uniform due to the influence of the characteristic deviation due to the position of the passing polarizer or the influence of the incident angle but the polarized light F having various polarization characteristics is irradiated onto the object to be photo- do.

For example, in the present embodiment, when the irradiation distribution in the longitudinal direction of the lamp 7 immediately below the irradiator 6 is divided for each of the wire grid polarizers 16 (n-3 to n + 1) And the irradiation light quantity at a certain irradiation position (0 mm) is influenced by three portions on both sides. As shown in FIG. 11, even under the center of the wire grid polarizer 16, for example, the amount of light passing through the wire grid polarizer 16 immediately above it passes through the surrounding wire grid polarizer 16 Which is the sum of one light amount.

Structural members such as the polarizer unit fixing table 9 for fixing the frame 14 and the frame 14 are formed as a light shielding member by being formed by a light shielding member or covered by a light shielding member . However, the reflection on the structural member such as the frame 14 and the polarizer unit fixing table 9 can not be completely prevented, and as shown in Fig. 12, the reflected light H reflected by the structural member also becomes scattered light, 5). ≪ / RTI > The polarization characteristic of the polarized light F is also changed by the reflection. Incidentally, the reflected light H includes light reflected by the wire grid polarizer 16 after being reflected by the alignment film on the surface of the object A.

The polarized light F of the wire grid polarizers 16 other than the measurement target can be detected when the polarization axis C1 is measured for each of the wire grid polarizers 16 by narrowing the angle of introduction of the detection light of the detection unit 31, Or the reflected light H can not be measured. As a result, it can not be said that the polarization characteristic of the irradiation light actually irradiated to the object to be photo-aligned is accurately measured.

Therefore, in the present embodiment, by using the detection unit 31 that introduces the polarized light F to the range of a relatively large incident angle Y and diffuses the polarized light F inside, and detects the amount of light in the photomultiplier tube 74, (Polarization direction, extinction ratio) of the polarized light F (irradiation light) actually irradiated to the object to be photo-aligned can be measured.

The detection light G received by the detection part 31 is light obtained by sequentially passing through the wire grid polarizer 16 and the detection side polarizer 33 in which the radiation E of the lamp 7 is a linear polarizer, The polarized light of the plurality of wire grid polarizers 16 is superimposed light. That is, the phase shift? Is obtained as the phase difference in the polarization direction of the polarized light F with respect to the reference position P0. Since the polarized light and the extinction ratio of the polarized light are distributed because the polarized light and the reflected light of the plurality of wire grid polarizers 16 are included in the detection light G, the polarization direction and the extinction ratio of the polarized light are obtained based on the peak value of the distribution .

Since the wire grid polarizer 16 is formed using a material such as glass and is relatively fragile optical element, the wire grid polarizer 16 is held on the frame 14 through a cushioning material (not shown). 13, the upper and lower ends of the unit polarizer unit 12 are fixed to the frame 14 by screws (fixing means) 19, and the wire grid polarizers 16, So that it is fixedly arranged on the frame 14. The wire grid polarizer 16 may be displaced due to aged deterioration of the buffer material holding the wire grid polarizer 16 and vibration of the optical alignment apparatus 100. As a result, the polarization direction of the polarized light is shifted Throw away.

When an object such as outgas is mixed with or adhered to the wire grid polarizer 16, the wire grid polarizer 16 may cause outgas from the orientation film during processing (irradiation) of the object to be photo- The polarization characteristics of the polarized light are changed.

In the photo-alignment apparatus 100 of the present embodiment, the polarization measurement system 1 does not always measure the polarization characteristic, but after a predetermined period in which polarization characteristics are changed by aged deterioration or out-gassing, for example, And the polarization characteristic is measured later.

Next, the measurement of the polarized light of the photo-alignment apparatus 100 will be described with reference to Fig.

Fig. 14 is a schematic diagram showing the polarization axis adjusting device D. Fig.

The polarization axis adjusting device D is a device that includes a polarization measuring system 1A and a spot light source 7A and adjusts the direction of the polarization axis C1 of the wire grid polarizer 16. [ The polarimetric measurement system 1A has a polarization measurement system 1 except that an opening (not shown) of the detection unit 31A is formed to be narrower than an aperture 76A of the detection unit 31 of the polarization measurement system 1. [ . In Fig. 14, the same parts as those of the optical alignment device 100 are denoted by the same reference numerals, and a description thereof will be omitted.

The operator first places the polarizer unit 10 in the separately installed polarizing axis adjusting device D. Subsequently, the operator places the detection portion 31A of the polarization axis adjustment device D directly below the wire grid polarizer 16 to be measured, and sets the spot light source 7A directly above the wire grid polarizer 16 to be measured . The operator uses the polarization measurement system 1A to detect the polarized light F emitted from the wire grid polarizer 16 and measure the polarization axis C1 and the extinction ratio of the wire grid polarizer 16. [ The operator adjusts the direction of the polarization axis C1 to a predetermined direction (irradiation reference direction in this embodiment) by fine-adjusting the rotation of the wire grid polarizer 16 as necessary based on the measurement result of the polarization axis C1.

The operator performs the measurement of the polarized light F on all the wire grid polarizers 16 of the polarizer unit 10 and the operation of matching the direction of the polarization axis C1 with the irradiation reference direction based on the measurement result, The direction of the polarization axis C1 of all the wire grid polarizers 16 is aligned in the irradiation reference direction.

Next, the operator sets the adjusted polarizer unit 10 in the optical alignment apparatus 100 and instructs the polarization measurement system 1 to start the measurement of the polarization characteristics (polarization direction, extinction ratio). The polarization characteristics are measured at a plurality of measurement points in the arrangement direction B of the wire grid polarizer 16, but the measurement points are set by the operator and stored in the polarization measurement system 1. [

The polarimetry measurement system 1 guides the detection unit 31 to the predetermined measurement point by the linear guide 32 and detects the polarized light F emitted from the wire grid polarizer 16 and outputs the polarized light F And the extinction ratio are measured. The polarimetric measurement system 1 measures the polarized light F at all measurement points and outputs a result of the measurement and the acceptability judgment to the polarization characteristic output section 25. [ The acceptability determination value is also set by the operator and stored in the polarization measurement system 1. [

As described above, according to the photo-alignment apparatus 100, since the polarized light actually irradiated to the object to be photo-aligned is measured, the polarization direction of the polarized light is specified with high accuracy. In the optical alignment apparatus 100, the polarization characteristic irradiated on the optical alignment object is indicative of the performance of the optical alignment apparatus 100 and is also a factor for determining the goodness and badness of the alignment film to be aligned by the polarized light, It is very important to understand.

If the polarizing characteristic satisfies the criterion at all measurement points, the measurement is terminated. If at least one of the polarization characteristics is not satisfied, the direction of the polarization axis C1 of the wire grid polarizer 16 in the polarization axis adjusting device D is Or the polarizer unit 10 is maintained. Since the wire grid polarizer 16 is fixed to the frame 14 by the screws 19 after adjustment, the polarization axis C1 of the wire grid polarizer 16, for example, from the polarization axis adjusting device D to the optical alignment device 100, There is no change in the direction of.

As described above, according to the present embodiment, it is possible to measure the polarization direction of the light at the position corresponding to the workpiece stage 5 in which the polarized light having passed through the plurality of wire grid polarizers 16 aligned in the transverse arrangement is superimposed and irradiated And a system (1). With this configuration, since the polarization characteristic of the polarized light actually irradiated onto the alignment film on the surface of the object to be photo-aligned arranged on the workpiece stage 5 can be detected, the polarization direction can be measured with high accuracy.

According to the present embodiment, the polarization measuring system 1 is provided with the detection unit 31 provided so as to be movable in the arrangement direction of the unit polarizer unit 12. [ With this configuration, since the polarization characteristics of the respective measurement points can be measured in the arrangement direction of the unit polarizer unit 12, the intervals of the measurement points can be reduced to acquire the polarization characteristics for each place irradiated on the photo- .

According to the present embodiment, the detection unit 31 includes an aperture 76 that introduces the polarized light F including the incident component and enters the detection-side polarizer 33, and an aperture 76 that transmits the detection-side polarizer 33 A diffusing unit 79 for diffusing one light and a photoelectrically-multiplying tube 74 as a light-receiving sensor for receiving the light diffused by the diffusing unit 79 and detecting the quantity of light I are provided.

As a result, even the polarized light F including various angular components, such as the polarized light F obtained by passing the radiation E of the rod-shaped lamp 7 through the wire grid polarizer 16, It is possible to measure the polarization characteristic by detecting the range.

It should be noted that the above-described embodiments are merely illustrative of one embodiment of the present invention, and can be arbitrarily modified and applied without departing from the spirit of the present invention.

For example, in the above-described embodiment, the lamp 7, which is a discharge lamp, is exemplified as the light source of the polarized light to be measured by the polarization measurement system 1. However, the light source is not limited to this and is arbitrary. That is, the present invention can be used for the measurement of linearly polarized polarized light obtained by light of an arbitrary light source transmitted through a polarizer. Further, the light source does not necessarily have to be a linear light source.

For example, in the above-described embodiment, the wire grid polarizer 16 is exemplified as an example of the polarizer for obtaining the polarized light of the measurement object, but the polarizer is not limited thereto. That is, the polarizer may be any polarizer that can obtain linearly polarized polarized light.

For example, in the above-described embodiment, the configuration in which the polarization measuring device 20 measures both the polarization axis (or the polarization direction) of the polarized light and the extinction ratio is exemplified, but only one of them may be measured. In addition to the polarization axis (or polarization direction) and / or the extinction ratio of the polarized light, the polarization measurement device 20 may also measure other characteristics such as light intensity.

For example, in the above-described embodiment, the detection signal 35 of the detection unit 31 is input to the polarization measurement apparatus 20, whereby the polarization measurement apparatus 20 acquires the light amount of the detection light G But is not limited thereto. That is, the recording data in which the correspondence between the rotation angle [theta] and the light quantity of the detection light G is recorded may be acquired from another electronic apparatus or a recording medium (for example, a semiconductor memory or the like).

In the above-described embodiment, the detection section 31 is provided so as to be movable in the arrangement direction B of the unit polarizer unit 12, but the present invention is not limited thereto. For example, the detection section 31 may be moved in the stage moving direction May also be movable.

1, 100, 200: Polarization measurement system (detection means)
2: photo-alignment device (photo-alignment irradiation device)
5: Work stage (stage)
6: Irradiation
7: Lamp
8: reflector
10: Polarizer unit
12: unit polarizer unit
16: wire grid polarizer (first polarizer, polarizer)
20: Polarization measuring device
23: Change Curve Calculator
24: polarization characteristic specifying unit
30: Measuring unit
31:
32: Linear guide
33: Detection side polarizer (second polarizer, measurement polarizer)
34: Light receiving sensor
73: detection light adjustment unit
76: Aperture
79: diffusion unit (diffusion means)
A: Wire direction
B: Array direction
E: Synchrotron
F: polarized light
G: Detection light
Q: Change curve
T: photo-alignment object (workpiece)
W: Range
Y: Incidence angle
θ: rotation angle
θa, θa + 180 °: rotation angle of the minimum point
θa + 90 °, θa + 270 °: rotation angle of the maximum point
C1: polarization axis
P0: Reference position

Claims (3)

An optical alignment illuminator comprising a polarizer unit for irradiating polarized light to an alignment film on a surface of a work loaded on a stage,
Wherein the polarizer unit comprises a plurality of unit polarizer units arranged in a transversal array, each of the unit polarizer units includes a polarizer, and polarized light of the light at a position corresponding to the stage in which the polarized light having passed through the plurality of polarizers is irradiated in an overlapping manner And a detection means for detecting a characteristic of the light emitted from the light source. The apparatus according to claim 1, wherein the detection means comprises a detection unit provided so as to be movable in an arrangement direction of the unit polarizer units. 3. The apparatus according to claim 1 or 2,
A detecting unit that has a polarizer for measurement and detects the amount of light transmitted through the polarizer for measurement while rotating the polarizer for measurement;
And a polarization measuring device for specifying a polarization characteristic of light at the position corresponding to the stage based on the detection result of the detection section,
Wherein:
An aperture which is disposed at a position corresponding to the stage and which introduces light in which the polarized light having passed through the plurality of polarizers is introduced to enter the polarizer for measurement,
Diffusing means for diffusing the light transmitted through the measuring polarizer,
And a light receiving sensor for receiving the light diffused by the diffusion means and detecting the amount of light,
The polarimetric measurement apparatus includes:
Change curve calculating means for obtaining a change curve indicating a periodic change in the amount of light when the measuring polarizer is rotated based on the light amount of light at each rotation angle of the measurement polarizer,
And polarization characteristic specifying means for specifying the polarization characteristic of the irradiation light at the position corresponding to the stage based on the change curve.

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