CN107102480A - Light irradiation device - Google Patents
Light irradiation device Download PDFInfo
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- CN107102480A CN107102480A CN201610867790.2A CN201610867790A CN107102480A CN 107102480 A CN107102480 A CN 107102480A CN 201610867790 A CN201610867790 A CN 201610867790A CN 107102480 A CN107102480 A CN 107102480A
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- light
- workbench
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- illumination photometer
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- 238000005286 illumination Methods 0.000 claims abstract description 198
- 230000007246 mechanism Effects 0.000 claims abstract description 73
- 238000003860 storage Methods 0.000 claims abstract description 9
- 238000009434 installation Methods 0.000 claims description 10
- 230000008859 change Effects 0.000 claims description 7
- 230000001144 postural effect Effects 0.000 claims description 3
- 230000009467 reduction Effects 0.000 abstract description 10
- 230000006866 deterioration Effects 0.000 abstract description 6
- 238000012545 processing Methods 0.000 description 23
- 238000009826 distribution Methods 0.000 description 22
- 238000010586 diagram Methods 0.000 description 17
- 239000000203 mixture Substances 0.000 description 14
- 230000010287 polarization Effects 0.000 description 14
- 238000005375 photometry Methods 0.000 description 13
- 230000009471 action Effects 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 238000005259 measurement Methods 0.000 description 9
- 230000033001 locomotion Effects 0.000 description 8
- 238000010276 construction Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 208000003351 Melanosis Diseases 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- SZVJSHCCFOBDDC-UHFFFAOYSA-N iron(II,III) oxide Inorganic materials O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J2001/4247—Photometry, e.g. photographic exposure meter using electric radiation detectors for testing lamps or other light sources
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
The present invention provides a kind of light irradiation device, when with the function of being monitored to luminance reduction caused by deterioration as light source etc., does not become complicated in mechanism, and does not produce influence to productivity ratio.In upside, the workbench (2) of holding object (W), is moved in the X direction by carrying mechanism (3), and workpiece (W) receives light irradiation when by effective irradiation area.Illumination photometer is installed on the side (21) of workbench (2), integratedly moved with workbench (2) and by effective irradiation area.The measured value of illumination photometer (6) is conveyed to controller (7), and the light quantity computing unit (71) that controller (7) possesses is calculated light quantity and is stored in storage part (72).
Description
Technical field
Present invention is related to a kind of device towards object irradiation light.
Background technology
The utilization of light industrially is developing in various fields, is carried out with various purposes to object irradiation light.
Particularly, the technology handled by the light of the change of properties of just object, by extensive profit in the manufacturing process of various products
With.
For example, in the manufacturing process of liquid crystal display, in recent years, becoming more using the light processing for being referred to as light orientation.
Light orientation is following technology：When obtaining oriented layer, the oriented layer of visual field angle compensation film of liquid crystal display, by taking
Light irradiation is carried out to the membrane material of layer, alignment films (film for turning into oriented layer) are thus obtained.
In the field of such light processing, sometimes using following composition：In advance to the area illumination light that some sets,
The object (hereinafter referred to as workpiece) that light is handled in the region (hereinafter referred to as irradiation area) by way of to be removed
Fortune, thus carries out light processing.As Patent Document 1, also using employing this structure in the field of above-mentioned light orientation
Into device.
Fig. 9 is the skeleton diagram of this conventional light irradiation device, and Fig. 9 (1) is main view skeleton diagram, and Fig. 9 (2) is side view outline
Figure.As shown in Figure 9, light irradiation device possesses the carrying of the light illuminator 1 and carrying workpiece W to irradiation area irradiation light
Mechanism 3.
In fig .9, irradiation area is the slightly larger square region of width of the width than workpiece W.Light illuminator 1 is configured to, with
Can possess light source 11, mirror 12 in the way of the square pattern carries out light irradiation.For example, being configured to, possess width compared with
Long bar-shaped light source 11 and the mirror 12 for the strip that light source 11 is covered from upside.The transport road of carrying mechanism 3 turns into level side
To being set through irradiation area.
Workpiece W is maintained on workbench 2, and workbench 2 is moved while by irradiation area, thus to workpiece
W carries out light irradiation.In the case where carrying out light orientation, the construction of light illuminator 1 is to maintain polarization in the exiting side of light source 11
Element 14, makes the light (polarised light) for having passed through polarizer 14 be irradiated to workpiece W.
Patent document 1：Japanese Unexamined Patent Publication 2014-174287 publications
, it is necessary to assign enough light quantities to workpiece in the light irradiation device for carrying out light processing as described above, but light quantity
When not enough, in general light processing becomes insufficient.Here, the light source that light irradiation device possesses is that light output is gradually reduced
Situation it is more.The situation is that situation is more caused by deterioration, even if being not reaching to degradation, sometimes light output performance
Also reduce some from initial state.
Light irradiation device as described above, to carry out the situation of light irradiation before using defined illumination in irradiation area
Carry, workpiece is carried with defined speed and irradiation area is passed to, the light quantity of ormal weight is thus assigned to workpiece.By
This, when illumination is from predetermined value reduction, directly results in the reduction of light quantity, as light undertreatment.
Therefore, illumination is regularly often determined, and checks whether and can obtain enough exposure intensity or irradiation
Amount.Then, in the case where exposure intensity or exposure reduce more than limit, the measure such as swapped to light source is taken.
Illumination photometer 6 required for exposure intensity, the inspection of exposure, in the past, as shown in Fig. 9 (2), is arranged on illumination
In emitter 1.The position of illumination photometer 6 is the position for not blocking the light irradiation to irradiation area.
In such conventional light irradiation device, the position of illumination photometry is carried out, is not progress illumination actual to workpiece W
The position (position in irradiation area) penetrated, therefore be not monitor the actual irradiation for workpiece W verily the problem of exist
The reduction of intensity or exposure.
For example, in the field of light processing, situation about being handled using the higher-energy of the light of ultraviolet region is more,
The situation of discharge lamp is more as high-pressure mercury-vapor lamp is used as bar-shaped light source.On bar-shaped discharge lamp, sometimes with
Time passes through produces melanism etc. near the electrode at two ends, and light output is reduced.Even in both ends light output reduction, including
There is enough light outputs in the other parts of central portion, situation about can also use enough is more.That is, with foot in irradiation area
The situation that enough illumination carries out light irradiation is more.
In this case, when still as shown in Fig. 9 (2), illumination photometer 6 is arranged at the position departed from from irradiation area
When putting, illumination photometer 6 can detect luminance reduction sometimes, and be judged as that the exchange period of light source 11 arrives.That is, although sometimes can also
It is enough sufficiently to use, but the instruction of the implication for the exchange that should enter line light source 11 can be shown.
Thus, illumination photometer 6 is preferably configured at the place close to irradiation area as far as possible.In this case, more preferably by illumination
Meter 6 is configured in irradiation area and the illumination to irradiation area is measured, but due to (passing through irradiation in workpiece W processing
During region) it can not be located in irradiation area, therefore as a result, keeping making the state that light source 11 is lighted, between processing
Gap makes illumination photometer 6 be configured at irradiation area or by irradiation area, and carries out illumination photometry.This composition such as institute of patent document 1
Show.
As described in Patent Document 1, be in the gap of processing illumination photometer be configured at irradiation area or by irradiation area simultaneously
And when carrying out illumination photometry, there are two larger problems.One problem is, in order that illumination photometer is moved and additionally needed special
Mechanism, becomes complicated in mechanism.Another problem is, due to being arranged on the step of gap of processing carries out illumination photometry, because
This can bring influence on productivity ratio.In patent document 1, the problem of for the latter, the discharge of the workpiece after being terminated using processing
Time carries out illumination photometry, therefore on production interval time without influence.However, the discharge of the workpiece in this device, generally
Carried out using robot, its responsiveness is than very fast.On the other hand, in patent document 1, with the speed identical with workpiece
Speed moves illuminance transducer, makes to slow in the case of the more processing of irradiate light quantity, the movement of illuminance transducer
Speed is also slack-off.In this case, even if the discharge of workpiece terminates, the movement (illumination photometry) of illuminance transducer is also possible to also
It is not over, influence can be produced on production interval time.
The content of the invention
Present invention considers situation as described above and carried out that its object is to provide a kind of light irradiation dress
Put, possess the function of being monitored to luminance reduction caused by deterioration as light source etc., the construction that the light irradiation device has is,
It will not become complicated in mechanism, and influence will not be produced on productivity ratio.
In order to solve above-mentioned problem, the invention that the technical scheme 1 of the application is recorded is a kind of light irradiation device, is possessed：Light
Irradiator, to irradiation area irradiation light；Workbench, in upside holding object；And carrying mechanism, along to pass through irradiated region
The transport road of the state setting in domain makes movable workbench and conveying object, consists of,
In the side of workbench, the illumination photometer being measured to the illumination of the light from light illuminator is installed.
In addition, in order to solve above-mentioned problem, the invention that technical scheme 2 is recorded is, in the composition of above-mentioned technical proposal 1,
Possess：Light illuminator, to irradiation area irradiation light；Workbench, in upside holding object；And carrying mechanism, along with logical
Crossing the transport road of the state setting of irradiation area makes movable workbench and conveying object, consists of,
The illumination photometer being measured to the illumination of the light from light illuminator, the installation of illumination photometer are installed on the table
Position is that the light from light illuminator is not blocked relative to object, and the light from light illuminator is not blocked by object
Position.
In addition, in order to solve above-mentioned problem, the invention that technical scheme 3 is recorded is configured to, in above-mentioned technical proposal 1 or 2
Composition in, above-mentioned illumination photometer is arranged on by the position of above-mentioned irradiation area.
In addition, in order to solve above-mentioned problem, the invention that technical scheme 4 is recorded is configured to, in above-mentioned technical proposal 1,2 or
In 3 composition, the θ travel mechanisms for making above-mentioned workbench be rotated by axle of above-below direction are provided with.
In addition, in order to solve above-mentioned problem, the invention that technical scheme 5 is recorded is configured to, in the composition of above-mentioned technical proposal 1
In, the contour shape of the vertical view of above-mentioned workbench has at least one corner,
Above-mentioned illumination photometer, which is respectively arranged in, clips corner and two adjacent sides.
In addition, in order to solve above-mentioned problem, the invention that technical scheme 6 is recorded is configured to, in the composition of above-mentioned technical proposal 1
In, the contour shape of the vertical view of above-mentioned workbench be it is square,
Above-mentioned illumination photometer is provided with least one on each side.
In addition, in order to solve above-mentioned problem, the invention that technical scheme 7 is recorded is configured to, in the composition of above-mentioned technical proposal 6
In, above-mentioned illumination is calculated as, the illumination photometer being respectively mounted on the side on relative side in above-mentioned square contour shape, no
In the same straight line that the side in above-mentioned transport road is upwardly extended or it is provided with and makes above-mentioned workbench using above-below direction as axle
Rotate and make the θ mechanisms of postural change.
In addition, in order to solve above-mentioned problem, the invention that technical scheme 8 is recorded is configured to, in the composition of above-mentioned technical proposal 1
In, the contour shape of the vertical view of above-mentioned workbench is the shape with two relative sides,
Above-mentioned illumination photometer is separately mounted on the side positioned at relative side, also, each illumination photometer is not located at and removed above-mentioned
In the same straight line that upwardly extends of side on fortune road, or it is provided with and makes above-mentioned workbench rotate by axle of above-below direction to make posture
The θ mechanisms of change.
In addition, in order to solve above-mentioned problem, the invention that technical scheme 9 is recorded is configured to, in above-mentioned technical proposal 1 to 8
During one is constituted, possesses the auxiliary movement moved linearly on the direction for making above-mentioned workbench intersect in the direction with above-mentioned transport road
Mechanism.
In addition, in order to solve above-mentioned problem, the invention that technical scheme 10 is recorded is configured to, in above-mentioned technical proposal 1 to 9
During one is constituted, possess the measured value of above-mentioned illumination photometer is carried out light quantity computing unit that is accumulative and calculating accumulative light quantity and
The storage part of the calculated light quantity of storage.
The effect of invention
As described below, the invention recorded according to the technical scheme 1 of the application, for the illumination to object
The illumination photometer that the intensity or amount penetrated are monitored is installed on the side of workbench, therefore enters under conditions of closer object
Row illumination photometry.Therefore, will not erroneous judgement light source deterioration etc..Shone furthermore, it is not necessary that being configured near irradiation area or its
Degree meter, or be provided for being passed to irradiation area or the mechanism near it in addition, therefore simplify in mechanism.In addition,
Illumination need not be measured in the period of the discharge of object, therefore influence will not be produced on productivity ratio.
In addition, the invention recorded according to technical scheme 2, is supervised for the intensity to the light irradiation to object or amount
Depending on illumination photometer be installed on workbench, therefore closer to carrying out illumination photometry under conditions of object.Therefore, will not erroneous judgement
Deterioration of light source etc..Furthermore, it is not necessary that configuring illumination photometer near irradiation area either its or being provided for leading to it in addition
Irradiation area or the mechanism near it are crossed, therefore is simplified in mechanism.Furthermore, it is not necessary that the period of the discharge in object
Illumination is measured, therefore influence will not be produced on productivity ratio.
In addition, the invention recorded according to technical scheme 3, except the effect above, because illumination photometer is installed on by irradiated region
The position in domain, therefore illumination photometry is carried out due to this point under conditions of further to object.Therefore, erroneous judgement
Possibility is further reduced.
In addition, according to technical scheme 4 record invention, except the effect above, be provided with make workbench using above-below direction as
The θ travel mechanisms of axle rotation, therefore illumination photometer also rotated, can be located at illumination photometer can be by appointing in irradiation area
The position of meaning position, can be measured in arbitrary position to illumination.
In addition, the invention recorded according to technical scheme 5, except the effect above, illumination photometer be respectively arranged in clip corner and
On two adjacent sides, Illumination Distribution is obtained therefore, it is possible to be measured to the illumination at two.
In addition, the invention recorded according to technical scheme 6, except the effect above, the contour shape of the vertical view of workbench is side
Shape, illumination photometer is provided with least one on each side of workbench, therefore, it is possible to be surveyed at three or everywhere to illumination
Determine and obtain Illumination Distribution.
In addition, according to technical scheme 7 record invention, except the effect above, illumination can be measured everywhere and
Obtain Illumination Distribution.
In addition, according to technical scheme 8 record invention, except the effect above, illumination can be measured at two and
Obtain Illumination Distribution.
In addition, the invention recorded according to technical scheme 9, except the effect above, with making workbench in the side with transport road
The auxiliary travel mechanism moved linearly on to the direction of intersection, surveys therefore, it is possible to the optional position in the direction to illumination
It is fixed.
In addition, the invention recorded according to technical scheme 10, except the effect above, the measured value of illumination photometer is carried out it is accumulative and
Obtained light quantity is stored in storage part, therefore, it is possible to carry out the monitoring of light quantity.
Brief description of the drawings
Fig. 1 is the perspective sketch of the light irradiation device of first embodiment.
Fig. 2 is the main view skeleton diagram of the light irradiation device of first embodiment.
Fig. 3 is the side view schematic of the light irradiation device of first embodiment.
Fig. 4 is the plane skeleton diagram being indicated to the major part of second to the 4th each embodiment.
Fig. 5 is the plane skeleton diagram that the example increased making to locate in the 4th embodiment is indicated.
Fig. 6 is that the example for being in the third embodiment measured irradiation light quantity distribution in diverse location is put to be indicated
Plane skeleton diagram.
Fig. 7 is to being used to carry the plane skeleton diagram that large-duty composition is indicated in the third embodiment.
Fig. 8 is the plane skeleton diagram of the installation constitution for the illumination photometer 6 for representing other embodiment.
Fig. 9 is the skeleton diagram of conventional light irradiation device.
The explanation of symbol
1 light illuminator
2 workbench
3 carrying mechanisms
4 auxiliary travel mechanisms
5 θ travel mechanisms
6 illumination photometers
7 controllers
71 light quantity computing units
Embodiment
Next, being illustrated to the form (hereinafter referred to as embodiment) for implementing the present application.Following
In explanation, as the example of light irradiation device, polarization light emitting apparatus for light orientation is enumerated.Wherein, the present application is not limited
In polarization light emitting apparatus for light orientation.
Fig. 1~Fig. 3 is the skeleton diagram of the light irradiation device of first embodiment, and Fig. 1 is perspective sketch, and Fig. 2 is main view
Skeleton diagram, Fig. 3 is side view schematic.Light irradiation device shown in Fig. 1~Fig. 3 possesses：Light illuminator 1, irradiates to irradiation area
Light；Workbench 2, in upside holding object W；And carrying mechanism 3, along the carrying to be set by the state of irradiation area
Road moves workbench 2.In the present embodiment, light irradiation is carried out in order to carry out light processing.Hereinafter, object W is referred to as
Workpiece.
First, effective irradiation area and transport road are illustrated.
In the case where being only called " irradiation area ", there is a situation where to broadly refer to region and the conduct that light is irradiated
Should irradiation light region and the situation in region the two implications for setting.The implication of " effective irradiation area " is to be set in advance
It is set to the region by the region of the illuminated light of effective illumination as the light processing for workpiece W, is above-mentioned two implication
The implication of middle the latter.In the present embodiment, the light to effective irradiation area external exposure is practically without in shadow surface, effectively
Irradiation area is consistent with the irradiation area of broad sense.Thus, it is not necessary to distinguished, in the following description, " irradiated region
Domain " is used according to the implication of effective irradiation area (setting regions).
In the present embodiment, irradiation area is set to rectangular region.For convenience, by rectangular long side side
To referred to as Y-direction, short side direction is referred to as X-direction.Transport road by the state of irradiation area to be set, but in present embodiment
In, the direction of transport road is consistent with X-direction.That is, irradiation area intersects (orthogonal in the Y direction) with transport road.
On workpiece W, when using the length of Y-direction as " width ", the length of the Y-direction of irradiation area, with workpiece W's
Width is in a ratio of long enough.Therefore, it is whole above workpiece W when workpiece W is carried along transport road and by irradiation area
Face is irradiated by light.
In addition, in the present embodiment, workpiece W turns into square plate-shaped member, but as described later, workbench 2 can enclose
Around the rotary shaft rotation using above-below direction as axle, therefore by rotation, the size of workpiece W width changes.Thus, irradiated region
The size in domain is set to, in the case that width is maximum, the width of the length of the Y-direction of irradiation area also than workpiece W
Greatly.
The light illuminator 1 of light irradiation is carried out to such irradiation area, the mirror by light source 11, the behind for covering light source 11
12 and to these lampshades 13 housed etc. constitute.As described above, irradiation area is rectangle, therefore light source 11 is adopted
With the bar-shaped light source with illuminating part longer in the Y direction.The device of present embodiment is the device of irradiation ultraviolet radiation, because
This is using discharge lamp bar-shaped as the radiation high-pressure mercury-vapor lamp of ultraviolet, metal halide lamp.Light source 11 is configured as length
The edge direction state consistent with Y-direction.In addition, as light source 11, can use multiple ultraviolets being made up of LED, LD etc.
Light-emitting component is configured to the light source of array-like in the Y direction.
Mirror 12 is also longer in the Y direction, is so-called channel-shaped mirror.Cross sectional shape in the X-direction of the reflecting surface of mirror 12,
As oval circular arc or parabola.
Present embodiment turns into the light irradiation device of light orientation, the light that light illuminator 1 will have been polarized to defined direction
Irradiated to irradiation area.Specifically, as shown in FIG. 2 and 3, polarizer 14 is provided with lampshade 13.As
Polarizer 14, in the present embodiment using grid polarizer.Grid polarizer, be formed with the transparent substrate it is micro-
The element of the construction of the grid of small striped (line and space) shape, and be each wire portion for making composition grid separation spacing turn into institute
The element of the wavelength degree of the light of polarization or the construction of the distance shorter than its.
It is difficult to by a polarizer 14 come the big irradiation area of cover width, therefore in the present embodiment, uses
Multiple polarizers 14 are arranged and the construction of blocking along Y-direction.That is, multiple polarizers 14 for being arranged along Y-direction and
The polarizer unit that framework (not shown) by maintaining each polarizer 14 etc. is formed is equipped in lampshade 13.Each polarization member
Part 14 is located between light source 11 and irradiation area.
As shown in Figure 1, workbench 2 is the part of mesa-shaped, in the present embodiment as the contour shape in vertical view
For square part.Workbench 2 possesses multiple supporting pins (not shown).Each supporting pin is somewhat protruded above workbench 2.Respectively
A part in supporting pin is tubulose, carries out the air-breathing for vacuum suction.Workbench 2 is enterprising vacuum adsorbed in each supporting pin
And kept.
In addition, workbench 2 possesses aligning guide (not shown).Aligning guide is to read to set on the workpiecew not shown
Mark and mechanism that position, posture to workpiece W are finely adjusted.
In the present embodiment, carrying mechanism 3 turns into the mechanism for employing line motor.Specifically, carrying mechanism 3 has
The line motor that the standby rectilinear guide 31 extended parallel to X-direction and magnetite are configured in the way of extending in X direction
Fixture 32.Then, mobile station (hereinafter referred to as X-direction mobile station) 33 is provided with, the mobile station 33 is provided with relative to fixation
The powered movable piece of part 32.The polarity of each magnetic pole for being moved through making movable piece of X-direction mobile station 33 changes to enter successively
OK.In addition, X-direction mobile station 33 has the groove chimeric with rectilinear guide 31, with the action of line motor 32, drawn by straight line
Guiding element 31 is guided and moved in the X direction.In addition, being used as carrying mechanism, additionally it is possible to using the mechanism for being applicable ball-screw.
In addition, in the present embodiment, being provided with the mechanism for making workbench 2 be moved linearly along Y-direction (hereinafter referred to as auxiliary
Help travel mechanism) 4 and make each workbench 2 around above-below direction axle rotate mechanism (hereinafter referred to as θ travel mechanisms) 5.
On auxiliary travel mechanism 4, also using the carrying mechanism of line motor mode.
Then, as shown in Figure 1, θ travel mechanisms 5 are fixed with mobile station 43 in the Y direction, to pass through the θ moving machines
The state of the axle of structure 5 support is provided with workbench 2.θ travel mechanisms 5 are following mechanism：Including servo motor, make workbench 2 relative
Rotated in reference direction towards specified angle, and its posture can be kept.Reference direction is, for example, X-direction.By such
Mechanism, workbench 2 can be carried in the X direction, and can in the Y direction and θ side is moved up.
The light irradiation device of such embodiment, in order to monitor the light irradiation of intensity or amount to(for) workpiece W, and has
Standby illumination photometer 6.In the explanation of embodiment, illumination refers to the intensity of light irradiation and is radiation illumination (W/m2).Illumination photometer pair
The radiation illumination of irradiation area is measured.In addition, exposure is the light energy amount in irradiation area, " light quantity " is strictly speaking
" accumulative light quantity ".Accumulative light quantity (J/m2)=illumination (W/m2) × irradiation time (sec).
The larger characteristic point of the device of embodiment is that illumination photometer 6 is arranged on workbench 2.Illumination photometer 6 is arranged on work
On platform 6, there are two implications.One implication is that illumination is determined on the close workpiece W being irradiated by light position as far as possible, and with
Workbench 2 is integratedly moved, as a result, under the situation that workpiece W is irradiated by light, and is similarly irradiated by light and is determined illumination.
Further illustrate, in the present embodiment, illumination photometer 6 is arranged on the side 21 of workbench 2.As described above,
Workbench 2 is the part that the contour shape overlooked is square mesa-shaped.When the direction direction on square one side is parallel with X-direction
Or the state in vertical direction as firm position after dismount when, in the present embodiment, be fixed on the edge of the workbench 2 of firm position after dismount
On the side 21 of X-direction.
Focus in installation of the illumination photometer 6 to workbench 2, illumination photometer 6 is installed on the irradiated region by light illuminator 1
The position in domain.
When carrying out light irradiation to carry out light processing, from the viewpoint of the uniformity for ensuring processing, with as length
The higher region of square illumination turns into the mode in the region of uniform-illumination simultaneously, using light source 11, the shape of mirror 12, configuration.
In this case, the region of uniform and higher illuminance is the region for being used in light processing, here it is irradiation area.
Irradiation area is, is sufficiently long area relative to the width (length of Y-direction) of workpiece when being carried along Y-direction
Domain.That is, with the width (length of Y-direction) of the width relative to workpiece to be processed, irradiation area for sufficiently long mode, certainly
Determine light source 11, the shape of mirror 12, configuration.Thus, width of the irradiation area in the Y direction than workpiece W is wider, there is allowance.
In embodiments, illumination photometer 6 is configured in the position in the region by the allowance.In addition, irradiation area is, its width is relative
Turn into sufficiently wide in the width of workbench 2, and form allowance.Illumination is installed by the side of the width in workbench 2
Meter 6, thus illumination photometer 6 is as the state by irradiation area.
In this way, be in the meaning that illumination photometer 6 is installed illumination photometer 6 by the position of irradiation area and had, with actually
The position that the state of light irradiation suffered by workpiece W turns into identical state as far as possible is measured to illumination.Even if in addition, illumination
The initial makeup location of meter 6 is outside irradiation area, as long as being installed on workbench 2, then by suitably carry out Y-direction movement or
θ movements are passed in irradiation area or by close to the place of irradiation area, can also be measured, thus with peace
Compared loaded on the grade of lampshade 13, illumination photometry can be carried out under the situation close to a greater degree with the light irradiation for workpiece 6.
As illumination photometer 6, the illumination photometer that Si photodiodes etc. are used as to photo detector is used.Illumination photometer 6 is with light
Posture facing to top is fixed.As shown in Figure 3, the smooth surface of illumination photometer 6, with workpiece of the placing on workbench 2
Turn into identical height above.This point also has the meaning that illumination photometry is carried out in the state of as identical with workpiece as possible.Separately
Outside, the installation on illumination photometer 6, the side 21 that workbench 2 can be fixed on to the support that illumination photometer 6 is kept using being applicable
Construction.
As shown in Figure 3, the light irradiation device of embodiment possesses the controller being controlled to each several part of device
7.Controller 7 is also controlled in addition to being controlled to the action of carrying mechanism 3 to the power supply 11 of lighting of light source 11.Such as
As shown in Figure 3, illumination photometer 6 is connected with controller 7, and the measure signal of illumination photometer 6 is inputted to controller 7.
It is provided with according to the output valve of illumination photometer 6 to calculate the light quantity computing unit 71 of accumulative light quantity in controller 7.Light quantity
A part (software) for the sequential procedure that computing unit 71 is possessed by controller 7, but also realized sometimes through hardware.Light quantity
Computing unit 71 is configured to, whenever carrying out single treatment (the once reciprocating motion of workbench 2), just according to the measure of illumination photometer 6
Value calculates accumulative light quantity, and stores the storage part (memory etc.) 72 possessed to controller 7.Device possesses to storage part 72
The display (not shown) that the data stored are shown, add up light quantity data can by as history data suitably
It is shown in display.
On the other hand, in addition to illumination photometer 6, device is also equipped with light measurement unit 8.Light measurement unit 8 is generally to locate
During reason, in from the remote position of readiness of irradiation area, it is configured at irradiation area in maintenance etc. and uses.Light measurement unit 8
In addition to the function being measured to the illumination of irradiation area, the direction of the polarization axle also with the polarised light to being irradiated is entered
The function that row is determined.
As shown in Figure 1, light measurement unit 8 is mounted on carrying mechanism 3, generally in the side side for being set in X-direction
End position of readiness carry out it is standby.Position of readiness is for example set in the outside of " loaded " position (away from irradiation area one
Side).
Light measurement unit 8 include be mounted on rectilinear guide 31 and fixture 32 X-direction mobile station 81, be mounted in
The main photograph in Y-direction travel mechanism 82 and Y-direction mobile station 83, fixed mobile station 83 in the Y direction in X-direction mobile station 81
Refractive index measured by the polarised light device 85 on degree meter 84 and same fixed mobile station 83 in the Y direction etc..
Y-direction travel mechanism 82 is equally the mechanism for making Y-direction mobile station 83 be moved along Y-direction, can be line motor
The mechanism of mode or the mechanism using ball-screw.
Main illumination photometer 84 is similarly, using the components of photo-electric conversion such as Si photodiodes as photo detector and it is built-in.Light
The height in face and the illumination photometer 6 for being arranged at workbench 2 are same, and the surface with the workpiece W that workbench 2 is kept is identical height.
Refractive index measured by the polarised light device 85 is the analyzer monitored for the direction of the polarised light to being irradiated to irradiation area.Partially
The photo-detector that shakes be local photo detector, configuration photo detector light incident side analyzer and make analyzer surround optical axis
The analyzer of the rotating mechanism of (being in this embodiment above-below direction) rotation etc..Analyzer is a kind of polarizer, is to make some special
Determine the rectilinearly polarized light in direction optionally through tabular optical component.
The plate face of analyzer is configured to vertical with optical axis, and is rotated to direction of rotation.Pass through the polarization member in light illuminator 1
Part 14 and polarize polarizing light irradiation in irradiation area.In the case where checking the direction of the polarization axle of the polarised light,
Refractive index measured by the polarised light device 85 is located in irradiation area, rotate analyzer.Pass through the rotation of analyzer, the output week of photo detector
Change to phase property.Anglec of rotation during highest is output into, the direction of the polarization axle of irradiated polarised light is represented.
Hereinafter, the action to the light irradiation device of the embodiment with above-mentioned composition is illustrated.
Pass through AGV (Auto Guided Vehicle：Automatic guided vehicle) such batch of carrying mechanism or air conveyer
Individual such processing carrying mechanism, is transported to the position in the actuating range of robot (not shown).Light illuminator 1 makes in advance
Light source 11 is lighted, and light irradiation is carried out to irradiation area.Under the original state of action, workbench 2 is in " loaded " position, by not
The robot of diagram is by a workpiece W placing to workbench 2.Then, aligning guide action (not shown), relative to benchmark side
Workpiece W is set to turn into defined posture to (such as X-direction).In addition, auxiliary travel mechanism 4 acts as needed, make workpiece W
In the assigned position of Y-direction.
In this condition, carrying mechanism 3 is acted, and workbench 2 is moved in X direction, is passed to irradiation area.As a result,
Light irradiation is carried out to workpiece W.In the present embodiment, light turns into the light after polarised light, polarization by polarizer 14 towards rule
Fixed direction irradiation.
Carrying mechanism 3 is that the workpiece W on workbench 2 has passed through after irradiation area completely, makes it in defined reversion
Position is inverted." passing through completely " refers to, the edge at workpiece W X-direction rear passes through irradiation area completely.In addition, backward position
For, in the Illumination Distribution shown in Fig. 2, be illumination it is actual be zero position (position outside irradiation area), be workpiece W which
Individual position illumination all turns into zero position.
Carrying mechanism 3 makes workbench 2 after backward position has been inverted, and it is moved backward and is returned in X direction
" loaded " position.In the present embodiment, also to workpiece W irradiation lights (polarised light) in the loop.Then, robot (not shown)
Workpiece W is removed from the workbench 2 for returning to " loaded " position, by next workpiece W placings to workbench 2.
In addition, in the present embodiment, θ directions are rotated to be, relative to the posture (polarization irradiated of polarizer 14
The direction of the polarization axle of light) workpiece W is turned into defined posture, therefore sometimes according to batch (kind) as different rotations.
In this case, after the processing of certain batch terminates, the set information in alteration control unit 7.As a result, for each work of next group
Part W, θ travel mechanisms 5 suitably act, and are carried in the state as the different anglecs of rotation and irradiate polarised light.
In such action, illumination photometer 6 is integratedly moved with workbench 2, and passes through irradiation area.Therefore, illumination photometer 6
Receive light irradiation in the same manner as the workpiece W on workbench 2, measured value is exported to controller 7.It is installed on the quantometer of controller 7
Unit 71 is calculated to be integrated the output valve of illumination photometer 6 and calculate accumulative light quantity.Light quantity computing unit 71 is often once to be located
Reason (the once reciprocating motion of workbench 2) just calculates accumulative light quantity according to the measured value of illumination photometer 6, and is stored in controller 7
The storage part (memory etc.) 72 possessed.
Then, the history data of storage part 72, is regularly shown in aobvious by the operator that the action to device is monitored
Show device, and check whether accumulative light quantity is in defined scope.If accumulative light amount ratio setting reduction, is judged as light quantity not
Foot, implements the adequate measures such as the exchange of light source 11.
In the light irradiation device of the embodiment of above-mentioned action, for what is monitored to the irradiate light quantity to workpiece W
Illumination photometer 6 is arranged on the side of workbench 2, therefore carries out illumination photometry under conditions of closer workpiece W.Therefore, it will not miss
Judge deterioration of light source 11 etc..In addition, in the present embodiment, illumination photometer 6 is installed on the position by irradiation area, therefore root
Illumination photometry can be carried out according to this point under conditions of closer workpiece W.Therefore, the possibility of erroneous judgement is further reduced.
Also, need not be provided in addition irradiation area configure illumination photometer 6 mechanism, make it with by irradiation area
The mechanism that moves of mode, therefore, it is possible to simplify in mechanism.Furthermore, it is not necessary that illumination is determined in the workpiece W periods discharged,
Therefore will not also influence be produced on productivity ratio.
In the action of said apparatus, the maintenance of the device after the processing of a certain degree of number of times has been repeated
When, use light measurement unit 8.That is, in the state of workbench 2 is kept out of the way to opposite side, X-direction mobile station 81 is made in X direction
It is mobile, such as refractive index measured by the polarised light device 85 in light measurement unit 8 is configured in irradiation area and polarised light is determined.Then, root
Whether result according to surveying and determination, confirm the direction of polarization axle of polarised light towards desired direction.
In addition, main illumination photometer 84 is used for performance checking of illumination photometer 6 etc..That is, it is configured to and illumination by main illumination photometer 84
After counting on 6 identical Y-direction positions, make it in X direction be set by speed by and determine illumination, light quantity is carried out
Calculate and detect the difference between the light quantity of illumination photometer 6.If differed greatly, the calibration of illumination photometer 6 is carried out.That is, it is main to shine
Degree meter 84 can act as the calibration use for each illumination photometer 6.Illumination photometer 6 travels frequently over irradiation area and receives light irradiation, therefore special
Property is easily varied.Therefore, calibration is suitably carried out using main illumination photometer 84.
Next, being illustrated to second to the 4th each embodiment.Fig. 4 is the master to second to the 4th each embodiment
The plane skeleton diagram to be partly indicated.In second to the 4th each embodiment, the quantity for the illumination photometer 6 installed and
Installation site is different from first embodiment.
That is, it is on square workbench 2, to clip an angle overlooking in the second embodiment shown in Fig. 4 (1)
Portion and be separately installed with illumination photometer 6 on two adjacent sides.In addition, in the 3rd embodiment shown in Fig. 4 (2), bowing
It is considered as on four sides of square workbench 2 and is separately installed with illumination photometer 6.
It is same with the 3rd embodiment in the 4th embodiment shown in Fig. 4 (3), photograph is installed on four sides
Degree meter 6, but the position for the illumination photometer 6 installed on the side positioned at two relative sides is different from the 3rd embodiment.That is,
In the third embodiment, positioned at each illumination photometer 6 on two relative sides, the position on the bearing of trend on the side is identical.Example
Such as, when each edge of workbench 2 above-mentioned X-direction, Y-direction, as shown in Fig. 4 (2), in the third embodiment, position
Two illumination photometers 6 in side along the Y direction, it is at same location when from Y-direction.On the other hand, in Fig. 4 (3)
In the 4th shown embodiment, two illumination photometers 6 positioned at side along the Y direction, in the Y direction positioned at the position mutually staggered
Put.
The light irradiation device of these the second to the 4th embodiments, when compared with first embodiment, with Y side
On to the length direction of i.e. irradiation area can multiple position finding illumination meaning, can determine the meaning of Illumination Distribution
Justice.The meaning that the meaning is produced is, each illumination photometer 6 and workbench 2 integratedly move and by irradiation area, therefore, it is possible to carry out
The irradiate light quantity of different multiple positions of Y-direction, the i.e. measure of irradiate light quantity distribution.
The meaning of meaning, irradiate light quantity measure of spread to illumination measure of spread is illustrated in more detail.
As described above, Y-direction refers to, the length direction of longer irradiation area, light source 11, mirror 12 in a certain direction
Shape, configuration are selected in the way of sufficiently uniformly carrying out light irradiation in this direction.When the illumination in Y-direction becomes uneven
When, this inequality for directly resulting in the irradiate light quantity in Y-direction is homogenized, therefore can turn into problem.Generally, on the photograph in Y-direction
Uniformity is spent, is also that specification is predetermined in the way of ± a few percent, and in the state of confirming into the scope, start
The operating of device.
However, for some reason, the Illumination Distribution of Y-direction can become uneven.Above-mentioned has used bar-shaped electric discharge
The melanism of end in the case of lamp, is also a reason.In addition, in the case of being configured with multiple light sources in the Y direction, it is any
The reason for inequality that the output reduction of individual light source also turns into the Illumination Distribution of Y-direction is homogenized.When the Illumination Distribution of Y-direction becomes not
When uniform, the inequality for directly resulting in the irradiate light quantity that workpiece W is subject to is homogenized, it is necessary to monitor that whether the inequality is homogenized in allowed band
It is interior.In order to carry out the monitoring, it is necessary in the Y direction at least two at determine illumination.The illumination of above-mentioned second to the 4th embodiment
The meaning that injection device has is, except that can carry out light quantity monitoring in the state of closer workpiece W, additionally it is possible to compare as follows
Degree skewness, which is homogenized, to be monitored.
The measure of such Y-direction Illumination Distribution, can by the way that auxiliary travel mechanism 4, θ travel mechanisms 5 is suitably used
Further improve its meaning.On this point, enumerate the 4th embodiment as an example and illustrate.Fig. 5 is to
The plane skeleton diagram that the example more than becoming that makes to locate in four embodiments is indicated.
In the device of embodiment, as described above, carrying out the light irradiation for workpiece W on outlet and loop.Now,
In the way of carrying out light irradiation by position different in the Y direction on outlet and loop, make auxiliary travel mechanism 4 in backward position
Action.That is, workbench 2 is made to be offset slightly towards Y-direction in backward position.Offset is less than adjacent illumination photometer 6 in the Y direction
The distance (such as half) of the separation spacing of upper observation.Then, the carrying in loop is carried out on the position of skew.Then, Y-direction
On locating for irradiate light quantity double, the example turn into eight at.That is, the prison of light quantity distribution can be irradiated at eight
Depending on and carry out workpiece W processing.Although omitting the description, in second embodiment, the 3rd embodiment, by using auxiliary
Travel mechanism 4 is helped to make to locate and doubles this point also identical.
So it is distributed in different position finding irradiate light quantities, additionally it is possible to carried out using θ travel mechanisms 5.On this
Point, is illustrated by taking the 3rd embodiment as an example.Fig. 6 is in the third embodiment in different position finding irradiation lights
The plane skeleton diagram that the example of amount distribution is indicated.
The state that Fig. 6 is represented is, have rotated α's making workbench 2 from reference direction (X-direction) in the third embodiment
Workpiece W is carried under state.It is assumed that following situation：For some workpiece W, one side as workbench 2 is towards X-direction
State and workpiece W is carried and handled, for other workpiece W, to work in the state of the rotation alpha of workbench 2 is made
Part W is carried and handled.In this case, in the case of θ=0 °, locating for Y-direction is actually 3
Place, but when rotation alpha, locates as at 4.In θ=0 ° and during θ=α, irradiate light quantity locate it is respectively different, therefore
When measurement result when measurement result when by θ=0 ° is with θ=α carries out summation, the irradiate light quantity distribution at total 7 is obtained.
In this way, by using θ travel mechanisms 5, in different position finding irradiate light quantity distributions or the increase that locates can be made.
Although omitting the description, this point in second embodiment, the 4th embodiment similarly.
In addition, in the third embodiment, on one side as workbench 2 during posture along the X direction, positioned at along Y
A pair of illumination photometers 6 on the side in direction, it is at same location in the Y direction.Therefore, on one side of workbench 2 along the X direction
In the case of posture (θ=0 °), locate as at 3.I.e., it is possible to which need not be set on side along the Y direction by saying by two
Illumination photometer 6.However, according to the difference of application method, being contributed to improving productivity ratio.On this point, said using Fig. 7
It is bright.Fig. 7 is for being used to carry the plane skeleton diagram that large-duty composition is indicated in the third embodiment.
In the figure 7, by the two of side along the Y direction illumination photometers 61,62, on paper positioned at the illumination in left side
Meter is set to the first illumination photometer 61, and the illumination photometer positioned at right side is set into the second illumination photometer 62.Workbench 2 is on outlet along X side
To advancing from left to right, advance from right to left on loop.In this case, survey that can be on outlet to the second illumination photometer 62
Fixed number is used as accumulative light quantity according to carrying out accumulative, and the data to the first illumination photometer 61 on loop carry out accumulative and are used as accumulative light
Amount, using both total and data of overall accumulative light quantity as the Y-direction position.Then, on outlet, in workpiece W X
The edge (being in this embodiment the edge in left side) at direction rear have passed through the stage of irradiation area, accelerates speed and reaches reversion
Position.Workpiece W by the speed of irradiation area, according to the required increased relation of irradiate light quantity as slower regulation
Speed, can accelerate speed after the second illumination photometer 62 have passed through irradiation area.In addition, on loop, workpiece W's
The edge (being in this embodiment the edge on right side) at X-direction rear be have passed through after irradiation area, and speed can be made to accelerate and reach
" loaded " position.Then, production interval time is shortened, and productivity ratio is improved.In the way of carrying out such act, to the institute of controller 7
The sequential procedure of installation is programmed.
On the installation of illumination photometer 6, the installation beyond above-mentioned first to fourth embodiment can be carried out.On this
Point, is illustrated using Fig. 8.Fig. 8 is the plane skeleton diagram for the installation constitution for representing the illumination photometer 6 in other embodiment.
First, in Fig. 8 (1), it is respectively mounted on the side on the two relative sides positioned at workbench 2 along the X direction
There is illumination photometer 6.In this case, Illumination Distribution, the measure of irradiate light quantity distribution in Y-direction, particularly, energy can also be carried out
Enough detect the luminance reduction as caused by bar-shaped melanism of two ends of light source 11 etc..
In addition, in Fig. 8 (2), multiple illumination are provided with the side positioned at one side of workbench 2 along the Y direction
Meter 6.In this case, Illumination Distribution, the measure of irradiate light quantity distribution in Y-direction can also be carried out.Then, by suitably
Using auxiliary travel mechanism 4, θ travel mechanisms 5, located thus, it is possible to suitably change.
In addition, in Fig. 8 (3), expression is provided with multiple on the side positioned at one side of workbench 2 along the X direction
The example of illumination photometer 6.In this case, when the state that the side remains along X-direction is fixed, with first embodiment actually
It is identical, therefore turn into multiple meanings, but as being illustrated by the broken lines in Fig. 8 (3), if having makes it along θ side
To the mechanism of rotation, then the irradiate light quantity that can carry out multiple positions of Y-direction is determined.
In addition, in Fig. 8 (4), representing to be mounted with the example of illumination photometer 6 in workbench 2.Workbench 2, which has, to be used to pacify
The recess of illumination photometer 6 is filled, illumination photometer 6 is installed with the state for being absorbed in the recess.Equally, the smooth surface of illumination photometer 6 preferably with placing
It is identical height above workpiece W on workbench 2.In addition, in the example shown in Fig. 8 (4), although in workbench 2,
But the outside of the placing position in workpiece W when overlooking of illumination photometer 6.That is, on workbench 2 during placing workpiece W, be for
Light from light illuminator 1, workpiece W do not block the state of illumination photometer 6, and illumination photometer 6 turns into the state for not blocking workpiece W.At this
In the case of, when equally setting multiple illumination photometers 6 in the Y direction, irradiate light quantity distribution can be determined, therefore more preferably.In addition,
When the allocation position of the illumination photometer 6 in workbench 2 is the position by irradiation area, surveyed in the state of closer workpiece W
Determine illumination, thus more preferably.
In addition, even if illumination photometer 6 is located at the position separated from workbench 2, it can also be referred to as " being installed on work sometimes
Platform ".For example, making it be held in arm in the side for the workbench 2 for being fixed on one end of arm, in other end fixation illumination photometer 6
In construction, the illumination photometer 6 is alternatively mounted to workbench 2.
In addition, illumination photometer 6 can be that the analyzer (optical splitter) that illumination is measured is radiated to light splitting.
In the respective embodiments described above, the contour shape of the vertical view of workbench 2 is square, but is implementing the present application
When, it is not necessary to it is defined in square.Can also be triangle, pentagon, circle etc..In the case of circle, it is assumed that be configured to, phase
Two illumination photometers 6 are installed on side with 180 ° of intervals for round center or four illumination photometers 6 are installed with 90 ° of intervals.
In addition, the light irradiation device of the respective embodiments described above is polarization light emitting apparatus for light orientation, but the present application
Also other light irradiation devices can be configured to.For example, the processing of the light such as the solidification in order to carry out light-cured resin can be configured to
And to the device of workpiece W irradiation lights.Additionally it is possible to as being configured to the visual examination of product, various analyses light processing with
Outer purposes and the device for carrying out light irradiation.
In the respective embodiments described above, additionally it is possible to using as disclosed in Japanese Unexamined Patent Publication 2014-174352 publications
Composition：Two workbench is clipped irradiation area and workbench is respectively configured in the both sides of X-direction, and it is kept work respectively
Part W and alternately pass through irradiation area, thus to each workpiece W carry out light irradiation.In this case, for illumination photometer, Ke Yian
Loaded on a workbench, two can also be installed on.It is being installed in the case of two, when the workbench for making to be installed on a side
The Y-direction position of illumination photometer, be installed on the opposing party workbench illumination photometer Y-direction position it is mutually different when, Neng Gouyu
Above-mentioned situation similarly obtains the distribution of illumination or light quantity, therefore more preferably.
In addition, irradiation area turns into the rectangle that Y-direction is long side direction, but this is not essential condition or X
Direction (carrying direction) is the rectangle or square of long side direction.
Auxiliary travel mechanism 4 has the meaning for the optional position that illumination photometer 6 is configured to Y-direction, but therefore, auxiliary is moved
As long as the direction that the direction of the movement of motivation structure 4 intersects with X-direction, is not necessarily required to be Y-direction (with X-direction in straight
The direction at angle).
In addition, on light source, the example that bar-shaped light source 11 is configured along the Y direction is illustrated, but this
It is the example for configuring the illuminating part of strip along the Y direction.In addition, also sometimes spot light is arranged as linear and makes it
It is of equal value with bar-shaped light source (illuminating part of wire).Also, in the case where bar-shaped light source is configured in X direction, if this
The light source of sample is arranged with multiple in the Y direction, then can be considered as in the Y direction and be arranged with spot light, therefore, it is possible to make it similarly
Work.
Claims (10)
1. a kind of light irradiation device, possesses：Light illuminator, to irradiation area irradiation light；Workbench, in upside holding object；
And carrying mechanism, along to make movable workbench and conveying object by the transport road that the state of irradiation area is set, its
It is characterised by,
In the side of workbench, the illumination photometer being measured to the illumination of the light from light illuminator is installed.
2. a kind of light irradiation device, possesses：Light illuminator, to irradiation area irradiation light；Workbench, in upside holding object；
And carrying mechanism, along to make movable workbench and conveying object by the transport road that the state of irradiation area is set, its
It is characterised by,
The illumination photometer being measured to the illumination of the light from light illuminator, the installation site of illumination photometer are installed on the table
For the light from light illuminator is not blocked relative to object, and the position that the light from light illuminator is not blocked by object
Put.
3. light irradiation device as described in claim 1 or 2, it is characterised in that
Above-mentioned illumination photometer is arranged on the position by above-mentioned irradiation area.
4. light irradiation device as described in claim 1 or 2, it is characterised in that
It is provided with the θ travel mechanisms for making above-mentioned workbench be rotated by axle of above-below direction.
5. light irradiation device as claimed in claim 1, it is characterised in that
The contour shape of the vertical view of above-mentioned workbench has at least one corner,
Above-mentioned illumination photometer, which is respectively arranged in, clips corner and two adjacent sides.
6. light irradiation device as claimed in claim 1, it is characterised in that
The contour shape of the vertical view of above-mentioned workbench to be square,
Above-mentioned illumination photometer is provided with least one on each side.
7. light irradiation device as claimed in claim 6, it is characterised in that
Above-mentioned illumination is calculated as, the illumination photometer being respectively mounted on the side on relative side in above-mentioned square contour shape,
Not be located in the same straight line that the side of above-mentioned transport road is upwardly extended, or be provided with make above-mentioned workbench using above-below direction as
Axle rotates and makes the θ mechanisms of postural change.
8. light irradiation device as claimed in claim 1, it is characterised in that
The contour shape of the vertical view of above-mentioned workbench is the shape with two relative sides,
Above-mentioned illumination photometer is separately mounted on the side on relative side, also, each illumination photometer is not located in above-mentioned transport road
The same straight line that upwardly extends of side on, or be provided with and make above-mentioned workbench rotate by axle of above-below direction to make postural change
θ mechanisms.
9. light irradiation device as described in claim 1 or 2, it is characterised in that
Possesses the auxiliary travel mechanism moved linearly on the direction for making above-mentioned workbench intersect in the direction with above-mentioned transport road.
10. light irradiation device as described in claim 1 or 2, it is characterised in that
Possess and carry out light quantity computing unit that is accumulative and calculating accumulative light quantity to the measured value of above-mentioned illumination photometer and store to be counted
The storage part of the light quantity calculated.
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| CN110057549A (en) * | 2019-04-08 | 2019-07-26 | 深圳市华星光电技术有限公司 | A kind of light illumination detection method and system |
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| CN108844625A (en) * | 2018-07-11 | 2018-11-20 | 商洛市虎之翼科技有限公司 | A kind of auxiliary device of luminance detection |
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Also Published As
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| CN107102480B (en) | 2021-05-04 |
| JP6597149B2 (en) | 2019-10-30 |
| JP2017072769A (en) | 2017-04-13 |
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