CN103869543B - Polarized light illumination device - Google Patents
Polarized light illumination device Download PDFInfo
- Publication number
- CN103869543B CN103869543B CN201310349796.7A CN201310349796A CN103869543B CN 103869543 B CN103869543 B CN 103869543B CN 201310349796 A CN201310349796 A CN 201310349796A CN 103869543 B CN103869543 B CN 103869543B
- Authority
- CN
- China
- Prior art keywords
- polarizer
- ultraviolet light
- light
- movable part
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Liquid Crystal (AREA)
- Polarising Elements (AREA)
Abstract
The present invention provides a kind of polarized light illumination device, can adjust the setting angle of polarizer rapidly so that multiple polarizers it is mutual by the direction of vibration of ultraviolet light relative to reference direction be within ± 0.1 °.The polarized light illumination device of embodiment includes linear light source, multiple 1st polarizers, movable part, the 2nd polarizer, light receiving unit and control device.Light source irradiates ultraviolet light.Multiple 1st polarizers are configured in the different location of the long side direction along light source.Movable part becomes each setting angle of more the 1st polarizers.2nd polarizer is irradiated by the ultraviolet light of the 1st polarizer.Light receiving unit receives the ultraviolet light by polarizer, polarizer.Control device controls movable part, so that the direction of vibration for each ultraviolet light for passing through multiple 1st polarizers is within ± 0.1 ° relative to reference direction according to the intensity of the ultraviolet light received.
Description
Technical field
Embodiments of the present invention are related to a kind of polarized light illumination device.
Background technology
Previously, it is using inclined in the orientation of the alignment film of the alignment film of liquid crystal display panel or angle compensation films etc. processing
Shake light irradiation device, and the polarized light illumination device includes the polarizer of linear lamp and wiregrating (wire grid).It is this inclined
The width direction of lamp and workpiece (work) is parallelly configured the light irradiation device that shakes, and by polarizer be configured at lamp and workpiece it
Between.Moreover, polarized light illumination device only makes purple of the polarizer for the direction of vibration of prescribed direction in the ultraviolet light that lamp is irradiated
Outside line passes through, by by ultraviolet light expose to workpiece etc., whereby carry out alignment film orientation processing.
[existing technical literature]
[patent document]
No. 4506412 bulletins of [patent document 1] Japanese Patent No.
Invention content
However, in the prior art, the enlargement along with liquid crystal display panel is the enlargement of workpiece, by multiple polarizations
Element configuration is in the different location of the long side direction along lamp.At this moment, polarized light illumination device is preferably more quickly to polarizer
Setting angle be adjusted so that multiple polarizers it is mutual by the direction of vibration of ultraviolet light and reference direction phase
Unanimously.
Therefore, problem to be solved by this invention is to provide a kind of polarized light illumination device, the polarizing light irradiation dress
To put for example can promptly adjust the setting angle of polarizer so that multiple polarizers it is mutual by ultraviolet light
Direction of vibration is within ± 0.1 ° relative to reference direction.
The polarized light illumination device of embodiment includes linear light source, multiple 1st polarizers, movable part, the 2nd polarization member
Part, light receiving unit and control device.Light source irradiates ultraviolet light.1st polarizer is configured at the difference along the long side direction of light source
Position.Movable part becomes the setting angle of more the 1st polarizers.2nd polarizer is by the ultraviolet light by the 1st polarizer
Irradiation.Light receiving unit receives the ultraviolet light by the 1st polarizer and the 2nd polarizer.Control device is according to the purple received
The intensity of outside line, control movable part so that the direction of vibration for the ultraviolet light for passing through the 1st polarizer relative to reference direction for ±
Within 0.1 °, the reference direction becomes the benchmark of direction of vibration.
[The effect of invention]
Polarized light illumination device can promptly adjust the setting angle of polarizer, so that multiple polarizers are mutual
By ultraviolet light direction of vibration relative to reference direction within ± 0.1 °.
Description of the drawings
Fig. 1 is the figure of the overall structure for the polarized light illumination device for representing embodiment.
Fig. 2 is the block diagram of the overall structure for the polarized light illumination device for representing embodiment.
Fig. 3 is the flow chart of an example of the processing of the control device for the polarized light illumination device for representing embodiment.
Fig. 4 is the flow chart of another of the processing of the control device for the polarized light illumination device for representing embodiment.
Fig. 5 is the plan view of the composition of the movable part for the polarized light illumination device for schematically showing embodiment.
Fig. 6 is the flat of the composition of the movable part of the polarized light illumination device for the variation 1 for schematically showing embodiment
Face figure.
Fig. 7 is the flat of the composition of the movable part of the polarized light illumination device for the variation 2 for schematically showing embodiment
Face figure.
Fig. 8 is the flat of the composition of the movable part of the polarized light illumination device for the variation 3 for schematically showing embodiment
Face figure.
Fig. 9 is the stream of an example of the processing of the control device of the polarized light illumination device for the variation 4 for representing embodiment
Cheng Tu.
Reference numeral：
1：Polarized light illumination device
11：Light source
12：1st polarization portion
13：Movable part
14：2nd polarizer
15：Light receiving unit
16：Mobile unit
17：Cylinder channel-shaped condenser
18：Holding member
19：1st polarizer
19a：Frame component
19b：Wire grid polarization element
20：Control device
21：Component is with movable motor (component movable part)
22：Element is with movable motor (element movable part)
22a：Output shaft
23：The movable motor of normal direction
24：Sensitive side movable part
25：Illumination photometer
61：Gear
62：Pinion gear
71：Micrometer
81：Rack
N、L：Direction
P：Axle center
Q：Trunnion axis
RD：Reference direction
ST31~ST33, ST41, ST91~ST93：Step
UA、UB：Ultraviolet light
W：Workpiece
Specific embodiment
The polarized light illumination device 1 of embodiment includes：Linear light source 11, irradiation ultraviolet light UA；Multiple 1st polarizers
19, the different location of the long side direction along the light source 11 is configured at, and the ultraviolet light UA is irradiated by the light source 11；It can
Dynamic portion 13 can change the setting angle of the multiple 1st polarizer 19；2nd polarizer 14 is configured at and the described 1st
Polarizer 19 it is opposite to position, by the ultraviolet light UB irradiations by the 1st polarizer 19；Light receiving unit 15 connects
Receive the ultraviolet light by the 1st polarizer 19 and the 2nd polarizer 14；And control device 20, according to institute
The intensity of the ultraviolet light that light receiving unit 15 is received is stated, controls the movable part 13, so as to pass through the multiple 1st polarization
The direction of vibration of the ultraviolet light UB of element 19 is within ± 0.1 ° relative to reference direction, and the reference direction becomes vibration
The benchmark in direction.
Moreover, the movable part 13 include element movable part 22, the element movable part 22 can change around
The setting angle of axle center P, the axle center P are the axle center from the light source 11 to the 1st polarizer 19.
Moreover, the intensity of the ultraviolet light that the control device 20 is received according to the light receiving unit 15, calculates institute
State the direction of vibration institute of the ultraviolet light UB of the reference direction RD of ultraviolet light UB with passing through the 1st polarizer 19 into
Angle, and the movable part 13 is controlled, so as to the angle ranging within ± 0.1 °.
Moreover, further include sensitive side movable part 24, the sensitive side movable part 24 make the 2nd polarizer 14 around
The axle center P rotations, the control device 20 make the 2nd polarizer 14 be rotated around the axle center P, calculate on one side on one side
Go out the direction of most strong the 2nd polarizer 14 of the intensity of the ultraviolet light that the light receiving unit 15 is received and the base
Angle between quasi- direction RD, as the reference direction RD with the ultraviolet light UB's by the 1st polarizer 19
Direction of vibration angulation.
Moreover, further including mobile unit 16, the mobile unit 16 makes the 2nd polarizer 14 and the light receiving unit
15 move along the long side direction of the light source 11.
[embodiment]
Secondly, with reference to the accompanying drawings, illustrate the polarized light illumination device 1 of embodiments of the present invention.Fig. 1 is to represent embodiment
Polarized light illumination device overall structure figure, Fig. 2 is the overall structure for the polarized light illumination device for representing embodiment
Block diagram, Fig. 3 are the flow charts of an example of the processing of the control device for the polarized light illumination device for representing embodiment, and Fig. 4 is table
Show the flow chart of another of the processing of the control device of the polarized light illumination device of embodiment, Fig. 5 is to schematically show
The plan view of the composition of the movable part of the polarized light illumination device of embodiment.
The polarized light illumination device 1 of embodiment shown in FIG. 1 is the table to workpiece W (being represented in Fig. 1 with two chain-dotted lines)
The device of the ultraviolet light UB of preset direction of vibration is irradiated in face, for example, alignment film or viewing angle compensation for liquid crystal display panel
The manufacture of the alignment film of film etc..The direction of vibration of the ultraviolet light UB on the surface of workpiece W is exposed to according to the construction of workpiece W, use
Way or required specification and preset.For example, in the manufacturing device of the alignment film of the liquid crystal display panel, preferably
The direction of vibration of ultraviolet light UB is set in relative to reference direction RD within ± 0.1 °.Moreover, polarized light illumination device 1 is right
Before workpiece W irradiation ultraviolet lights UB, the setting angle of the 1st polarizer 19 is adjusted, so as to adjust the ultraviolet light of workpiece W is exposed to
The direction of vibration of UB.Furthermore the width direction of workpiece W is known as X-direction, by long side orthogonal with X-direction and for workpiece W
Direction is known as Y direction, and the direction orthogonal with Y direction and X-direction is known as Z-direction.In the present embodiment, it polarizes
The direction RD on the basis of X-direction of light irradiation device 1 only will be that the ultraviolet light UB within ± 0.1 ° shines relative to reference direction RD
It is incident upon workpiece W.
Herein, so-called 1st polarizer 19 and the 2nd polarizer 14 refer to take out only in certain party from ultraviolet light UA
The element of the ultraviolet light UB of the polarized component vibrated upwards, the ultraviolet light UA are that light source 11 is irradiated, and equally all
It is vibrated on direction.The direction of vibration of so-called ultraviolet light UA, ultraviolet light UB, refer to the ultraviolet light UA, ultraviolet light UB electric field and
The direction of vibration in magnetic field.Moreover, the setting angle of so-called 1st polarizer 19, refers to around the N directions of axle center P (in Fig. 1
Be depicted with arrows) angle and the angle around the L directions of trunnion axis Q (being depicted with arrows in Fig. 1), the axle center P be
From light source 11 to the axle center of the 1st polarizer 19, the trunnion axis Q it is parallel with the long side direction of light source 11 and with from light source 11
It is orthogonal to the axle center P of the 1st polarizer 19.Furthermore in the present embodiment, axle center P is parallel with Z axis, and trunnion axis Q is put down with X-axis
Row.
Polarized light illumination device 1 as shown in Figures 1 and 2, including linear light source 11；1st polarization portion 12, including polylith the 1st
Polarizer 19 (only shown in Fig. 1)；Movable part 13；2nd polarizer 14 (only shown in Fig. 1)；Light receiving unit 15；Mobile unit
16；And control device 20.Light source 11 is for example, the pipes such as high-pressure sodium lamp or metal halide lamp (metal halide lamp)
Type lamp, including at least linear illumination region.The long side direction of illumination region is configured to and the X-direction Cheng Ping in Fig. 1 by light source 11
Row.Light source 11 is from linear illumination region, such as the ultraviolet light UA that illumination wavelength is 200nm to 400nm.The purple that light source 11 is irradiated
Outside line UA is the ultraviolet light for having various direction of vibration ingredients, i.e., so-called unpolarized ultraviolet light.Light source 11 can also be set as
Lower composition：Making for example being capable of light emitting diode (light-emitting of the illumination wavelength for the ultraviolet light UA of 200nm to 400nm
Diode, LED) chip, laser diode (laser diode), organic electroluminescent (electroluminescence, EL) etc.
Miniature lamp be separately configured to linear.
Moreover, in the present embodiment, light source 11 is configured at the top of workpiece W.In addition, in the top of light source 11, setting
There is cylinder channel-shaped condenser 17 of the section for ellipse.The ultraviolet light UA of a channel-shaped condenser 17 is exposed to by cylinder slot from light source 11
Shape condenser 17 reflects and is formed as directional light, is irradiated to workpiece W.
1st polarization portion 12 be with light source 11 it is opposite to and be configured, irradiated by ultraviolet light UA, the ultraviolet light UA is from light source
11 irradiate and are reflected by cylinder channel-shaped condenser 17.1st polarization portion 12 includes holding member 18 and multiple 1st polarizers
19.Holding member 18 is formed as the frame-shaped of the length roughly equal with light source 11 for keeping multiple 1st polarizers 19.It protects
It holds component 18 and multiple 1st polarizers 19 is accommodated in inside.Moreover, holding member 18 is put down in its long side direction with X-direction
In the state of row, it is positioned and secured between workpiece W and light source 11 by detent mechanism (not shown).
Multiple 1st polarizers 19 are abreast configured at the long side direction along light source 11 i.e. along the different location of X-direction.
Multiple 1st polarizers 19 are accommodated in holding member 18, irradiate ultraviolet light UA by light source 11.1st polarizer 19 such as Fig. 5 institutes
Show, including frame component 19a and wire grid polarization element 19b, the wire grid polarization element 19b is accommodated in frame component 19a.Frame component
19a is accommodated in holding member 18.Wire grid polarization element 19b is that equally spaced configured in parallel has on the substrate of quartz glass etc.
The element of multiple linear electric conductors (such as metal wire of chromium or aluminium alloy etc.).The spacing of electric conductor is preferably from light source
Less than 1/3 wavelength of the ultraviolet light UA of 11 irradiations.Wire grid polarization element 19b make from the ultraviolet light UA that light source 11 irradiates with electricity
The most of of polarized component that the long side direction of conductor is parallel is reflected, and make orthogonal with the long side direction of electric conductor polarize
Divide and pass through.Furthermore in the present embodiment, the 1st polarizer 19 is needed the long side direction of electric conductor is parallel with Y-axis and is matched
It puts, so as to which the ultraviolet light UB that direction of vibration is only made to be X-direction passes through.
Movable part 13 can change the setting angle of the 1st polarizer 19.Movable part 13 including component as shown in Figure 1, use
Movable motor 21 (being equivalent to component movable part), multiple element movable motor 22 (being equivalent to element movable part) and multiple
The movable motor 23 of normal direction (being equivalent to normal direction movable part).
The movable motor 21 of component can change the setting angle around the N directions of axle center P of holding member 18, described
Axle center P is the axle center (be equivalent to axle center from from light source to 1st polarizer) parallel with Z axis.It is equipped on holding member 18
The movable motor 21 of one component.
Multiple element is corresponded with movable motor 22 with the 1st polarizer 19, and can change the 1st corresponding polarization
The setting angle around the N directions of axle center P of element 19.In the present embodiment, as shown in figure 5, by element with movable horse
Output shaft 22a up to 22 is directly mounted on frame component 19a, so as to which element is inclined to frame component 19a and wiregrating with movable motor 22
The element 19b that shakes integrally changes the setting angle around the N directions of axle center P.Moreover, in the present embodiment, the 1st polarization member
Part 19 be wire grid polarization element 19b can be parallel to certainly the position of light source 11 to around the N directions of axle center P for example about ± 1
Range rotation below spending.
Multiple movable motors 23 of normal direction are corresponded with the 1st polarizer 19, and can change corresponding the 1st partially
Shake the setting angle around the L directions of trunnion axis Q of element 19, and the trunnion axis Q is parallel with X-axis.In the present embodiment,
The movable motor 23 of normal direction changes the setting angle around the L directions of trunnion axis Q of wiregrating polarizer 19b.
2nd polarizer 14 be disposed in the 1st polarizer 19 it is opposite to position, passed through the 1st polarizer 19
Ultraviolet light UB irradiates.2nd polarizer 14 is configured at the lower section in the 1st polarization portion 12, and is configured at and clips the 1st between light source 11
The position in polarization portion 12.Moreover, the 2nd polarizer 14 is by sensitive side movable part 24 (shown in Fig. 1) and along around the axis
The N directions of heart P rotate.In the present embodiment, the 2nd polarizer 14 is formed as the size of illuminated following ultraviolet light UB, institute
It states ultraviolet light UB and passes through the 1st polarizer 19 in multiple 1st polarizers 19.2nd polarizer 14 is in quartz glass
Deng substrate on equally spaced configured in parallel have multiple linear electric conductors (such as metal wire of chromium or aluminium alloy etc.).Conductance
The spacing of body is preferably less than the 1/3 of the wavelength of ultraviolet light UA irradiated from light source 11.2nd polarizer 14 makes by the 1st
Most of reflection of the polarized component parallel with the long side direction of electric conductor in the ultraviolet light UB of polarizer 19, and make and conductance
The polarized component that the long side direction of body is orthogonal passes through.
Light receiving unit 15 receives the ultraviolet light by the 1st polarizer 19 and the 2nd polarizer 14.Light receiving unit 15 is configured
In the lower section of the 2nd polarizer 14.Light receiving unit 15 represents what is received to the output of illumination photometer (illuminance meter) 25
The information of ultraviolet light, illumination photometer 25 calculates the intensity of received ultraviolet light, and is connect to the output of control device 20 is calculated
The intensity of the ultraviolet light of receipts.
Mobile unit 16 makes the 2nd polarizer 14 and light receiving unit 15 integrally be moved along the long side direction of light source 11.It moves
The structure comprising well-known motor, ball screw (ball screw) and the linear guide (linear guide) etc. of moving cell 16
Into.
Control device 20 is respectively controlled the above-mentioned inscape for forming polarized light illumination device 1, shines polarised light
Injection device 1 carries out workpiece W the irradiation of ultraviolet light UB.Moreover, control device 20 makes before to workpiece W irradiation ultraviolet lights UB
Polarized light illumination device 1 carries out the adjustment of the setting angle of the 1st polarizer 19.Furthermore control device 20 is with (not shown) micro-
It is formed, and be connected with display unit, operating unit (not shown) based on processor (microprocessor), it is described micro-
Processor includes for example being filled by the calculation process that central processing unit (central processing unit, CPU) etc. is formed
It puts, read-only memory (read only memory, ROM), random access memory (random access memory, RAM)
Deng the display unit shows the state of processing action, and the operating unit is registered for operator (operator) in processing
Whens holding information etc..
Secondly, with reference to Fig. 3 and Fig. 4, illustrate the 1st polarization of the control device 20 of the polarized light illumination device 1 of embodiment
An example of the processing of the setting angle adjustment of element 19.Furthermore setting angle adjustment is carried out following when：Together with holding structure
Part 18 replaced together the 1st polarization portion 12 it is whole when or replaced in multiple 1st polarizers 19 in the 1st polarization portion 12
During at least one 1 polarizer 19 etc..
In the present embodiment, the setting angle of the 1st polarizer 19 is set as only making following ultraviolet by setting angle adjustment
Line UB by setting angle, the ultraviolet light UB is the direction RD on the basis of X-direction, and direction of vibration is relative to reference direction
RD is the ultraviolet light UB within ± 0.1 °.That is, in the present embodiment, reference direction RD (being represented in Fig. 1 with a chain-dotted line) and X
Axis is parallel, and the reference direction RD becomes the benchmark of the direction of vibration of the ultraviolet light UB by the 1st polarizer 19.Furthermore institute
Reference direction RD is called, by the ultraviolet of the 1st polarizer 19 when referring to the 1st polarizer 19 being positioned at ideal setting angle
The linear polarization ingredient (also referred to as direction of vibration) of line UB.
First, when the instruction that adjustment action is sent out from operator, the control device 20 of polarized light illumination device 1 starts to pacify
Fill the processing of angle adjustment.In the processing of setting angle adjustment, in the step ST31 shown in Fig. 3 of control device 20, it is set as N
=1, enter to step T32.
In step ST32, control device 20 positions the 2nd polarizer 14 and light receiving unit 15 in mobile unit 16
Positioned at the lower section of the 1st polarizer 19 of one end in multiple 1st polarizers 19.Also, control device 20 is to light source
11 carry out lighting, the ultraviolet light UA equally vibrated in all directions are irradiated to the 1st polarizer 19, and by sensitive side
Movable part 24 and rotate the 2nd polarizer 14.Then, following ultraviolet light UB is only made to pass through to the 2nd polarizer 14, the purple
Outside line UB is the purple of polarized component orthogonal with the electric conductor of the wire grid polarization element 19b of the 1st polarizer 19 in ultraviolet light UA
Ultraviolet light UB outside line UB, i.e. direction of vibration orthogonal with the electric conductor of the wire grid polarization element 19b of the 1st polarizer 19.Moreover,
2nd polarizer 14 also only passes through following ultraviolet light, the ultraviolet light be in the same manner as the 1st polarizer 19 with electric conductor just
The ultraviolet light of the polarized component of friendship, i.e. the direction of vibration ultraviolet light orthogonal with the electric conductor of the 2nd polarizer 14.Then, light
Unit 15 only receives following ultraviolet light, the ultraviolet light be vibrated in all directions as light source 11 irradiates it is ultraviolet
Pass through the 1st polarizer 19 and the ultraviolet light of the 2nd polarizer 14 in line UA.
At this moment, since the 1st polarizer 19 only makes that ultraviolet light UB passes through and the 2nd polarizer 14 is rotating, by
The rotation of the intensity for the ultraviolet light that light unit 15 is received and the 2nd polarizer 14 is linked and is changed, described ultraviolet
Line is the ultraviolet light that illumination photometer 25 is exported to control device 20.Then, control device 20 calculates the purple that light receiving unit 15 is received
The position of most strong the 2nd polarizer 14 around the N directions of axle center P of the intensity of outside line.Then, control device 20 makes on one side
2nd polarizer 14 is rotated around axle center P, calculate on one side the intensity of ultraviolet light that is received of light receiving unit 15 it is most strong the 2nd
The rotation angle around the N directions of axle center P counted from reference direction RD of the position of polarizer 14.Then, control dress
Put the position of the 2nd most strong polarizer 14 of the intensity of ultraviolet light that 20 calculating light receiving units 15 are received from reference direction RD
The rotation angle counted is (that is, the direction of most strong the 2nd polarizer 14 of the intensity for the ultraviolet light that light receiving unit 15 is received and base
Angle between quasi- direction RD), as reference direction RD and the direction of vibration institute by the ultraviolet light UB of the 1st polarizer 19 into
Angle.
Also, control device 20 is driven (control) according to the situation of the angle to the movable motor 22 of element, with
The direction of vibration angulation for making the reference direction RD and ultraviolet light UB by the 1st polarizer 19 is within ± 0.1 °.This
Sample one, the intensity for the ultraviolet light that control device 20 is received according to light receiving unit 15, calculate reference direction RD with by the 1st partially
Shake element 19 ultraviolet light UB direction of vibration angulation, the element of movable part 13 is controlled with movable motor 22,
So as to it the angle ranging within ± 0.1 °.Then, when the vibration of reference direction RD and the ultraviolet light UB by the 1st polarizer 19
Direction angulation reaches preset when allowing below angle such as 0.1 °, and control device 20 terminates one
The setting angle adjustment of 1 polarizer 19, enters to step ST33.
In step ST33, control device 20 determines whether to finish the setting angle tune of the 1st all polarizers 19
It is whole, if not yet terminated, N=N+1 is set as in step ST34, is back to step ST32.Then, control device 20 is to movement
Unit 16 is driven, and the 2nd polarizer 14 and light receiving unit 15 are positioned to the lower section of another the 1st polarizer 19, with
Just now it was carried out similarly setting angle adjustment.So, control device 20 repeats step ST32 to step ST34, until
Until the setting angle adjustment for terminating the 1st all polarizers 19, the installation of multiple 1st polarizers 19 is carried out successively one by one
Angle adjusts.When the setting angle adjustment for terminating the 1st all polarizers 19, control device 20 terminates setting angle adjustment
Processing.
When the setting angle adjustment for terminating the 1st all polarizers 19, pass through the purple of the 1st all polarizers 19
The direction of vibration of outside line UB is parallel with reference direction RD or the direction of vibration of the ultraviolet light UB and reference direction RD formed by
Angle is allows below angle i.e. less than ± 0.1 °.In this way, the ultraviolet light that control device 20 is received according to light receiving unit 15
Intensity controls the element of movable part 13 with movable motor 22, so as to come from light source by multiple 1st polarizers 19
The direction of vibration of 11 ultraviolet light UB is within ± 0.1 ° relative to reference direction RD.
Moreover, when 12 entirety of the 1st polarization portion has been replaced, when multiple 1st polarizers 19 by purple
The direction of vibration of outside line UB for when being mutually parallel, the polarized light illumination device 1 of present embodiment to component with movable motor 21 into
Row controls and carries out setting angle adjustment, and the multiple 1st polarizer 19 is accommodated in advance in holding member 18.At this moment, exist
In step ST41 in Fig. 4, the 2nd polarizer 14 and light receiving unit 15 are positioned at more by control device 20 in mobile unit 16
The lower section of arbitrary 1st polarizer 19 in a 1st polarizer 19.Also, control device 20 carries out light source 11 lighting, and
And make sensitive side movable part 24 that the 2nd polarizer 14 be allowed to rotate.
Then, control device 20 calculates the most strong N around axle center P of the intensity of ultraviolet light that light receiving unit 15 is received
The position of 2nd polarizer 14 in direction.It is most strong that control device 20 calculates the intensity of ultraviolet light that light receiving unit 15 is received
The rotation angle around the N directions of axle center P counted from reference direction RD of the position of 2nd polarizer 14.Control device
20 by the rotation angle counted from reference direction RD of the position of the 2nd most strong polarizer 14 of the intensity of ultraviolet light, as base
The direction of vibration angulation of quasi- direction RD and the ultraviolet light UB by the 1st polarizer 19.Control device 20 is according to described
The situation of angle is driven (control) to the movable motor 21 of component, so that reference direction RD is with passing through the 1st polarizer 19
Ultraviolet light UB direction of vibration angulation within ± 0.1 °.Also, as reference direction RD and pass through the 1st polarizer
The direction of vibration angulation of 19 ultraviolet light UB is when allowing below angle, control device 20 terminates setting angle adjustment.
The polarized light illumination device 1 of the composition is the 2nd polarization of setting between the 1st polarizer 19 and light receiving unit 15
Element 14, and the intensity of the ultraviolet light received according to light receiving unit 15, control device 20 control movable part 13.Cause
This, polarized light illumination device 1 is grasped by advance through direction of vibration of ultraviolet light of the 2nd polarizer 14 etc., can be speculated
Pass through the direction of vibration of the ultraviolet light UB of the 1st polarizer 19.Therefore, polarized light illumination device 1 can be speculated through the 1st polarization
The direction of vibration of the ultraviolet light UB of element 19, therefore controlled by movable part 13, it can make through multiple 1 polarization members
The direction of vibration of the ultraviolet light UB of part 19 is within ± 0.1 ° relative to reference direction RD.Therefore, polarized light illumination device 1 can be with
The setting angle of 1st polarizer 19 is adjusted so that multiple 1st polarizers 19 by ultraviolet light UB shake
Dynamic direction is within ± 0.1 ° relative to reference direction RD.
Moreover, in polarized light illumination device 1, the movable motor 22 of the element of movable part 13 can be changed as setting angle
N directions setting angle, the N directions are around from light source 11 to the axle center P of the 1st polarizer 19.Therefore, polarised light shines
Injection device 1 controls element with movable motor 22 by control device 20, can make through multiple 1st polarizers 19
The direction of vibration of ultraviolet light UB is within ± 0.1 ° relative to reference direction RD.
Moreover, polarized light illumination device 1 by prespecified by direction of vibration of ultraviolet light of the 2nd polarizer etc.,
The intensity of ultraviolet light that can be received according to light receiving unit 15 easily calculates reference direction RD and passes through the 1st polarizer
The direction of vibration angulation of 19 ultraviolet light UB.Therefore, polarized light illumination device 1 by element with movable motor 22 into
Row control, can make by the direction of vibration of the ultraviolet light UB of the 1st polarizer 19 relative to reference direction RD for ± 0.1 ° with
It is interior.
The 2nd most strong polarizer 14 of the ultraviolet light that polarized light illumination device 1 is received light receiving unit 15 from benchmark
The rotation angle that direction RD is counted, the direction of vibration as the ultraviolet light UB by the 1st polarizer 19.Therefore, polarised light shines
Injection device 1 can easily and securely speculate the direction of vibration of the ultraviolet light UB by the 1st polarizer 19.Therefore, it is expected that
The setting angle of 1st polarizer 19 can be adjusted so that multiple 1st polarizers 19 by ultraviolet light UB
Direction of vibration relative to reference direction RD within ± 0.1 °.
Polarized light illumination device 1 includes mobile unit 16, and the mobile unit 16 makes the 2nd polarizer 14 and light receiving unit
15 move along the long side direction of light source 11, therefore need not correspond to each of each 1st polarizer 19 and set the 2nd polarizer
14 and light receiving unit 15.Therefore, polarized light illumination device 1 can be less than the quantity of the 2nd polarizer 14 and light receiving unit 15
Multiple 1st polarizers 19 can be directed to multiple 1st polarizers 19, utilize one group of the 2nd polarizer 14 and light receiving unit 15
The setting angle of 1st polarizer 19 is adjusted.Therefore, polarized light illumination device 1 can inhibit the increase of parts count
Or enlargement.
[1~variation of variation 3]
Secondly, with reference to the accompanying drawings, illustrate the polarized light illumination device of 1~variation of variation 3 of embodiments of the present invention
1.Fig. 6 is the plan view of the composition of the movable part of the polarized light illumination device for the variation 1 for schematically showing embodiment, figure
7 be the plan view of the composition of the movable part of the polarized light illumination device for the variation 2 for schematically showing embodiment, and Fig. 8 is
Schematically show the plan view of the composition of the movable part of the polarized light illumination device of the variation 3 of embodiment.Furthermore scheming
In 6 to Fig. 8, pair part identical with embodiment mark the same symbol, and omit the description.
In variation 1, as shown in fig. 6, the frame component 19a of movable 22 and the 1st polarizer 19 of motor of element it
Between be provided with more than at least one gear 61.In variation 1, it is engaged by pinion gear (pinion) 62 with 61 phase of gear, and
The setting angle of the 1st polarizer 19 is adjusted with movable motor 22 using element, the pinion gear 62 is installed on element
On output shaft 22a with movable motor 22.
In variation 2, as shown in fig. 7, being provided with micrometer on the frame component 19a of the 1st polarizer 19
(micrometer) the push-in screw of 71 grades.In variation 2, by the movable motor 22 of element, micrometer 71 is pushed away
Or draw, and the setting angle of the 1st polarizer 19 is adjusted.
In variation 3, as shown in Fig. 8 (a) and Fig. 8 (b), in the outer rim setting of the frame component 19a of the 1st polarizer 19
There is rack (rack) 81.In variation 3, pinion gear 62 is engaged on rack 81, the pinion gear 62 is installed on element use
On the output shaft 22a of movable motor 22.In variation 3, by the movable motor 22 of element, by the movable motor 22 of element
Pinion gear 62 is rotated, the setting angle of the 1st polarizer 19 is adjusted whereby.Moreover, the side of wire grid polarization element 19b
To the embodiment that can also be set as relative to Fig. 1, the direction being rotated by 90 ° can be according to the purposes of polarized light illumination device 1
And it sets in due course.
[variation 4]
Secondly, with reference to the accompanying drawings, illustrate the polarized light illumination device 1 of the variation 4 of embodiments of the present invention.Fig. 9 is table
Show the flow chart of an example of the processing of the control device of the polarized light illumination device of the variation 4 of embodiment.
In variation 4, in the processing of setting angle adjustment, in the step ST91 shown in Fig. 9 of control device 20, one
Lighting is carried out in face of light source 11, the 2nd polarizer 14 is rotated by sensitive side movable part 24, makes the 2nd polarizer 14 on one side
And light receiving unit 15 is moved from the lower section of the lower direction other end of the one end in the 1st polarization portion 12.Also, control device 20 and the 2nd
The movement of polarizer 14 and light receiving unit 15 links, and is entered information, and described information is represented through multiple 1 polarizations
The intensity of each in element 19 and the ultraviolet light by the 2nd polarizer 14.Also, control device 20 calculates the benchmark
Direction RD and the direction of vibration angulation by each ultraviolet light UB of the 1st polarizer 19.Control device 20 calculates base
When quasi- direction RD is with the direction of vibration angulation by the ultraviolet light UB of the 1st all polarizers 19, step is entered to
ST92。
In step ST92, control device 20 drives each element with movable motor 22 according to the situation of the angle
Dynamic (control) so that the direction of vibration angulation of ultraviolet light UBs of the reference direction RD with passing through the 1st polarizer 19 be ±
Within 0.1 °.Then, step ST93 is entered to.
In step ST93,20 one side of control device rotates the 2nd polarizer 14 by sensitive side movable part 24, on one side
The 2nd polarizer 14 and light receiving unit 15 is made to be moved from the lower section of the lower direction other end of the one end in the 1st polarization portion 12.Then,
The direction of vibration angulation of 20 determinating reference direction RD of the control device and ultraviolet light UB by each 1st polarizer 19 is
It is no to allow angle such as 0.1 degree hereinafter, if there is more than the 1st polarizer 19 for allowing angle, then to be preset
2nd polarizer 14 and light receiving unit 15 are positioned at the lower section more than the 1st polarizer 19 for allowing angle, according to light list
15 intensity of ultraviolet light that are received of member, element is controlled with movable motor 22 so that the angle ranging from allow angle with
Under.So, control device 20 carries out the setting angle adjustment of the 1st all polarizers 19.1~variation of variation 4
Polarized light illumination device 1 can obtain the effect identical with the embodiment.
In said embodiment, the established angle around the N directions of axle center P for carrying out the 1st polarizer 19 is disclosed
The example of the adjustment of degree, but in the present invention, normal direction can also be controlled and polarize member to the 1st movable motor 23
The setting angle in the L directions of part 19 is adjusted, and the L directions are around the trunnion axis Q parallel with the long side direction of light source 11.
As the method being adjusted around the setting angle in the L directions of trunnion axis Q of 19 to the 1st light-emitting component, such as just like
Lower method, that is, the central portion of the long leg in the figure of the 1st polarizer 19, so that the 1st polarizer can be revolved along direction L
Turn mode and rotary shaft (not shown) etc. is set, the short leg of the 1st polarizer 19 is made using the movable motor 23 of normal direction
It is moved along Z-direction.Alternatively, along at least one short leg of the 1st polarizer 19, so that the 1st polarizer can be along direction L
The mode of rotation and rotary shaft (not shown) is set, make another of the 1st polarizer 19 using the movable motor 23 of normal direction
Short leg is moved along Z-direction, can also adjust the setting angle in L directions whereby.For example, when multiple 1st polarizers 19
When face direction can be respectively relative to the face direction of workpiece W and ensure the depth of parallelism, normal side can also be omitted from movable part 13
To movable motor 23 (normal direction movable part).Moreover, additionally can be omitted component, with movable motor 21, (component is with movably
Portion), and movable part 13 is set as the only multiple element composition of movable motor 22 (element movable part).At this moment, Ke Yijian
Change the composition of polarized light illumination device 1.
Moreover, in said embodiment, on one side rotating the 2nd polarizer 14, received on one side using light receiving unit 15
Ultraviolet light.However, in the present invention, can not also rotate the 2nd polarizer 14, and received using light receiving unit 15 ultraviolet
Line.At this moment, as long as control device 20 is by the advance direction of vibration or intensity for grasping the ultraviolet light by the 2nd polarizer 14
Deng, and the intensity of the ultraviolet light received according to light receiving unit 15, thus it is speculated that pass through the vibration of the ultraviolet light UB of the 1st polarizer 19
Direction.
In addition, in said embodiment, the 1st polarizer 19 is to pass through following ultraviolet light UB, the ultraviolet light UB
Direction of vibration relative to X-direction (reference direction RD) within ± 0.1 °.But in the present invention, pass through the 1st polarization member
The direction of vibration of the ultraviolet light UB of part 19 is not particularly limited, and can also be fitted according to the goods number or type of workpiece W
Work as change.
Above it is stated that several embodiments and variation of the present invention, but the embodiment and variation are conducts
Example plays suggesting effect, it is therefore intended that limits the range of invention.The embodiment and variation can pass through other various sides
Formula is implemented, in the range of without departing from inventive concept, can carry out it is various omit, displacement, change.The embodiment and
Variation is contained in the range or purport of invention, in the same manner as this, be contained in claims recorded invention and its
In equal range.
Claims (4)
1. a kind of polarized light illumination device, it is characterised in that including：
Linear light source irradiates ultraviolet light；
Multiple 1st polarizers are configured at the different location of the long side direction along the light source, and irradiate institute by the light source
State ultraviolet light；
Movable part can change the setting angle of the multiple 1st polarizer；
2nd polarizer, be configured at it is opposite with the 1st polarizer to position, by the institute by the 1st polarizer
State ultraviolet light irradiation；
Light receiving unit receives the ultraviolet light by the 1st polarizer and the 2nd polarizer；
Mobile unit makes the 2nd polarizer and the light receiving unit be moved along the long side direction of the light source；And
Control device, the intensity of the ultraviolet light received according to the light receiving unit, controls the movable part, so as to pass through
The direction of vibration of the ultraviolet light of the multiple 1st polarizer is the benchmark within ± 0.1 ° relative to reference direction
Direction becomes the benchmark of direction of vibration；
The light receiving unit is moved by the mobile unit, for each institute by the multiple 1st polarizer
The intensity for stating ultraviolet light is detected.
2. polarized light illumination device according to claim 1, which is characterized in that
The movable part includes element movable part, and the element movable part can change the setting angle around axle center,
The axle center is the axle center from the light source to the 1st polarizer.
3. polarized light illumination device according to claim 2, which is characterized in that
The intensity of the ultraviolet light that the control device is received according to the light receiving unit, calculates the described of the ultraviolet light
Reference direction and the direction of vibration angulation of the ultraviolet light by the 1st polarizer, and to the movable part
It is controlled, so as to the angle ranging within ± 0.1 °.
4. polarized light illumination device according to claim 3, it is characterised in that further include：
Sensitive side movable part makes the 2nd polarizer be rotated around the axle center,
The control device makes the 2nd polarizer be rotated around the axle center on one side, calculates the light receiving unit on one side
Angle between the direction of most strong the 2nd polarizer of the intensity of the ultraviolet light that is received and the reference direction,
As the reference direction and the direction of vibration angulation of the ultraviolet light by the 1st polarizer.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012273804A JP6201310B2 (en) | 2012-12-14 | 2012-12-14 | Polarized light irradiation device |
| JP2012-273804 | 2012-12-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103869543A CN103869543A (en) | 2014-06-18 |
| CN103869543B true CN103869543B (en) | 2018-06-29 |
Family
ID=50908247
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310349796.7A Active CN103869543B (en) | 2012-12-14 | 2013-08-12 | Polarized light illumination device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6201310B2 (en) |
| CN (1) | CN103869543B (en) |
| TW (1) | TWI565978B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5862616B2 (en) * | 2013-07-17 | 2016-02-16 | ウシオ電機株式会社 | Polarizing light irradiation apparatus for photo-alignment and polarized light irradiation method for photo-alignment |
| JP2016064378A (en) * | 2014-09-25 | 2016-04-28 | 東芝ライテック株式会社 | Light irradiation device and light irradiation method |
| US20160231176A1 (en) * | 2015-02-05 | 2016-08-11 | Polarization Solutions, Llc | Light irradiation device having polarization measuring mechanism |
| JP6240654B2 (en) * | 2015-05-06 | 2017-11-29 | ウィア・コーポレーション | Optical alignment device |
| JP6610931B2 (en) * | 2015-09-18 | 2019-11-27 | 東芝ライテック株式会社 | Polarized light irradiation device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1378654A (en) * | 1999-09-07 | 2002-11-06 | 莫科斯泰克公司 | Improved wire-grid polarizing splitter |
| JP2002328234A (en) * | 2001-03-05 | 2002-11-15 | Eastman Kodak Co | Wire grid polarizer |
| CN1475819A (en) * | 2002-07-12 | 2004-02-18 | ��˹���´﹫˾ | Equipment of radiation supporting base and method |
| JP2006098087A (en) * | 2004-09-28 | 2006-04-13 | Hitachi Displays Ltd | Optically anisotropic axis measuring instrument and liquid crystal panel manufacturing method |
| JP2006126464A (en) * | 2004-10-28 | 2006-05-18 | Ushio Inc | Polarizer unit and polarized light irradiation device |
| JP2006234913A (en) * | 2005-02-22 | 2006-09-07 | Dainippon Printing Co Ltd | Apparatus of manufacturing optical element for liquid crystal display device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006323060A (en) * | 2005-05-18 | 2006-11-30 | Ushio Inc | Polarized-light irradiating device |
| JP5935546B2 (en) * | 2012-07-02 | 2016-06-15 | 東芝ライテック株式会社 | Polarized light irradiation device |
-
2012
- 2012-12-14 JP JP2012273804A patent/JP6201310B2/en active Active
-
2013
- 2013-08-12 CN CN201310349796.7A patent/CN103869543B/en active Active
- 2013-08-14 TW TW102129147A patent/TWI565978B/en active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1378654A (en) * | 1999-09-07 | 2002-11-06 | 莫科斯泰克公司 | Improved wire-grid polarizing splitter |
| JP2002328234A (en) * | 2001-03-05 | 2002-11-15 | Eastman Kodak Co | Wire grid polarizer |
| CN1475819A (en) * | 2002-07-12 | 2004-02-18 | ��˹���´﹫˾ | Equipment of radiation supporting base and method |
| JP2006098087A (en) * | 2004-09-28 | 2006-04-13 | Hitachi Displays Ltd | Optically anisotropic axis measuring instrument and liquid crystal panel manufacturing method |
| JP4568064B2 (en) * | 2004-09-28 | 2010-10-27 | 株式会社 日立ディスプレイズ | Optical anisotropic axis measuring device |
| JP2006126464A (en) * | 2004-10-28 | 2006-05-18 | Ushio Inc | Polarizer unit and polarized light irradiation device |
| JP2006234913A (en) * | 2005-02-22 | 2006-09-07 | Dainippon Printing Co Ltd | Apparatus of manufacturing optical element for liquid crystal display device |
| JP4610368B2 (en) * | 2005-02-22 | 2011-01-12 | 大日本印刷株式会社 | Manufacturing apparatus for optical elements for liquid crystal display devices |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI565978B (en) | 2017-01-11 |
| TW201423170A (en) | 2014-06-16 |
| JP6201310B2 (en) | 2017-09-27 |
| JP2014119566A (en) | 2014-06-30 |
| CN103869543A (en) | 2014-06-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103869543B (en) | Polarized light illumination device | |
| CN101566762B (en) | Polarized light irradiation device for light aligning | |
| TWI416229B (en) | Polarized light irradiation device | |
| CN103376598B (en) | Polarized ultraviolet irradiation unit | |
| TW200707541A (en) | Exposure method, exposure device, and device manufacturing method | |
| WO2014006942A1 (en) | Exposure apparatus | |
| TWI585466B (en) | Polarized light illuminating device | |
| CN106547050A (en) | A kind of polarization maintaining optical fibre polarization principal axis alignment device | |
| TW201514592A (en) | Polarized light radiating device for optical orientation and polarized light radiating method for optical orientation | |
| CN106886069B (en) | Lamp changing table | |
| TWI613460B (en) | Polarized light irradiation device | |
| JP6240654B2 (en) | Optical alignment device | |
| JP5344598B2 (en) | Substrate holding device, defect inspection device, and defect correction device | |
| JP5728353B2 (en) | Image acquisition apparatus and image acquisition method | |
| JP2013182085A (en) | Polarization exposure device | |
| WO2020235477A1 (en) | Visual observation assistance device | |
| JP7225756B2 (en) | Inspection device, inspection method | |
| JP2015106015A (en) | Polarized light irradiation device, polarized light irradiation method and polarized light irradiation program | |
| JP2017215613A (en) | Polarized light irradiation device | |
| CN102735424B (en) | Led lamp light distribution tester | |
| CN107085273A (en) | Polarizer unit and polarized light illumination device | |
| CN103941413B (en) | Light irradiation device | |
| KR20120064020A (en) | Light exposure device and light exposure method | |
| JP6714992B2 (en) | Polarized light irradiation device and polarized light irradiation method | |
| JP2019074563A (en) | Polarization device and method for manufacturing photo-alignment film |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |