CN103869543A - Polarized light irradiation device - Google Patents
Polarized light irradiation device Download PDFInfo
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- CN103869543A CN103869543A CN201310349796.7A CN201310349796A CN103869543A CN 103869543 A CN103869543 A CN 103869543A CN 201310349796 A CN201310349796 A CN 201310349796A CN 103869543 A CN103869543 A CN 103869543A
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- polarizer
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- movable part
- polarized light
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Abstract
The invention provides a polarized light irradiation device. The polarized light irradiation device can adjust installation angles of polarization elements rapidly, and thus the vibration direction of ultraviolet light through a plurality of polarization element is within +/-0.1 degree relative to the reference direction. The polarized light irradiation device comprises a linear light source, a plurality of first polarization elements, a movable part, a second polarization element, a light receiving unit and a control device. The light source irradiates ultraviolet light. The plurality of first polarization elements are arranged at different positions in the long side direction of the light source. The movable part changes the installation angles of the plurality of first polarization elements. The second polarization element is irradiated by ultraviolet light through the first polarization elements. The light receiving part receives ultraviolet light through the polarization elements. The control device controls the movable part according to the intensity of the received ultraviolet light and thus the vibration direction of ultraviolet light through the plurality of polarization element is within +/-0.1 degree relative to the reference direction.
Description
Technical field
Embodiments of the present invention relate to a kind of polarized light illumination device.
Background technology
Previously, in the orientation of the alignment film of liquid crystal panel or the alignment film of viewing angle compensation film etc. is processed, be to use polarized light illumination device, described polarized light illumination device comprises the lamp of wire and the polarizer of wiregrating (wire grid).This polarized light illumination device configures the Width of lamp and workpiece (work) abreast, and polarizer is disposed between lamp and workpiece.And polarized light illumination device only makes the ultraviolet ray of the direction of vibration that in ultraviolet ray that lamp irradiates, polarizer is prescribed direction pass through, and the ultraviolet ray of being passed through is exposed to workpiece etc., carries out whereby the orientation processing of alignment film.
[prior art document]
[patent documentation]
No. 4506412 communique of [patent documentation 1] Jap.P.
Summary of the invention
But in the prior art, the maximization that is accompanied by liquid crystal panel is the maximization of workpiece, and multiple described polarizers are disposed at along the diverse location of the long side direction of lamp.At this moment, polarized light illumination device is preferably more promptly adjusted the setting angle of polarizer, so that multiple polarizer ultraviolet direction of vibration passing through is each other consistent with reference direction.
Therefore, problem to be solved by this invention is to provide a kind of polarized light illumination device, described polarized light illumination device for example can promptly be adjusted the setting angle of polarizer so that multiple polarizer ultraviolet direction of vibration passing through each other with respect to reference direction in ± 0.1 °.
The polarized light illumination device of embodiment comprises linear light source, multiple the 1st polarizer, movable part, the 2nd polarizer, light receiving unit and control device.Light source irradiation ultraviolet radiation.The 1st polarizer is disposed at along the diverse location of the long side direction of light source.Movable part changes the setting angle of multiple the 1st polarizers.The 2nd polarizer is passed the ultraviolet ray irradiation of the 1st polarizer.Light receiving unit receives by the ultraviolet ray of the 1st polarizer and the 2nd polarizer.Control device, according to received ultraviolet intensity, is controlled movable part, so that be in ± 0.1 ° by the ultraviolet direction of vibration of the 1st polarizer with respect to reference direction, described reference direction becomes the benchmark of direction of vibration.
[effect of invention]
Polarized light illumination device can promptly be adjusted the setting angle of polarizer so that multiple polarizer ultraviolet direction of vibration passing through each other with respect to reference direction in ± 0.1 °.
Brief description of the drawings
Fig. 1 is the figure that represents the entirety formation of the polarized light illumination device of embodiment.
Fig. 2 is the block diagram that represents the entirety formation of the polarized light illumination device of embodiment.
Fig. 3 is the process flow diagram that represents an example of the processing of the control device of the polarized light illumination device of embodiment.
Fig. 4 is another the routine process flow diagram that represents the processing of the control device of the polarized light illumination device of embodiment.
Fig. 5 is the planimetric map that schematically shows the formation of the movable part of the polarized light illumination device of embodiment.
Fig. 6 is the planimetric map that schematically shows the formation of the movable part of the polarized light illumination device of the variation 1 of embodiment.
Fig. 7 is the planimetric map that schematically shows the formation of the movable part of the polarized light illumination device of the variation 2 of embodiment.
Fig. 8 is the planimetric map that schematically shows the formation of the movable part of the polarized light illumination device of the variation 3 of embodiment.
Fig. 9 is the process flow diagram that represents an example of the processing of the control device of the polarized light illumination device of the variation 4 of embodiment.
Reference numeral:
1: polarized light illumination device
11: light source
12: the 1 polarization portions
13: movable part
14: the 2 polarizers
15: light receiving unit
16: mobile unit
17: cylinder groove shape condenser
18: retaining member
19: the 1 polarizers
19a: frame member
19b: wire grid polarization element
20: control device
21: movable motor for member (member movable part)
22: movable motor for element (element movable part)
22a: output shaft
23: the movable motor of normal direction
24: sensitive side movable part
25: illuminometer
61: gear
62: pinion wheel
71: micrometer
81: tooth bar
N, L: direction
P: axle center
Q: transverse axis
RD: reference direction
ST31～ST33, ST41, ST91～ST93: step
UA, UB: ultraviolet ray
W: workpiece
Embodiment
The polarized light illumination device 1 of embodiment comprises: linear light source 11, irradiation ultraviolet radiation UA; Multiple the 1st polarizers 19, are disposed at along the diverse location of the long side direction of described light source 11, and are irradiated described ultraviolet UA by described light source 11; Movable part 13, can change the setting angle of described multiple the 1st polarizers 19; The 2nd polarizer 14, be disposed at relative with described the 1st polarizer 19 to position, the described ultraviolet UB that is passed described the 1st polarizer 19 irradiates; Light receiving unit 15 receives by the described ultraviolet ray of described the 1st polarizer 19 and described the 2nd polarizer 14; And control device 20, the described ultraviolet intensity receiving according to described light receiving unit 15, control described movable part 13, so that the direction of vibration of the described ultraviolet UB by described multiple the 1st polarizers 19 is in ± 0.1 ° with respect to reference direction, described reference direction becomes the benchmark of direction of vibration.
And described movable part 13 comprises movable part 22 for element, described element can change round the setting angle of axle center P with movable part 22, and described axle center P is the axle center to described the 1st polarizer 19 from described light source 11.
And, the described ultraviolet intensity that described control device 20 receives according to described light receiving unit 15, the direction of vibration angulation of the described reference direction RD that calculates described ultraviolet UB and the described ultraviolet UB by described the 1st polarizer 19, and described movable part 13 is controlled so that the angle ranging from ± 0.1 ° in.
And, also comprise sensitive side movable part 24, described sensitive side movable part 24 makes described the 2nd polarizer 14 rotate round described axle center P, described control device 20 one sides make described the 2nd polarizer 14 rotate round described axle center P, one side calculates the angle between direction and the described reference direction RD of described the 2nd polarizer 14 that described ultraviolet intensity that described light receiving unit 15 receives is the strongest, as described reference direction RD and the direction of vibration angulation of described ultraviolet UB that passes through described the 1st polarizer 19.
And, also comprising mobile unit 16, described mobile unit 16 makes described the 2nd polarizer 14 and described light receiving unit 15 move along the long side direction of described light source 11.
[embodiment]
Secondly, with reference to the accompanying drawings, the polarized light illumination device 1 of embodiments of the present invention is described.Fig. 1 is the figure that represents the entirety formation of the polarized light illumination device of embodiment, Fig. 2 is the block diagram that represents the entirety formation of the polarized light illumination device of embodiment, Fig. 3 is the process flow diagram that represents an example of the processing of the control device of the polarized light illumination device of embodiment, Fig. 4 is another the routine process flow diagram that represents the processing of the control device of the polarized light illumination device of embodiment, and Fig. 5 is the planimetric map that schematically shows the formation of the movable part of the polarized light illumination device of embodiment.
The polarized light illumination device 1 of the embodiment shown in Fig. 1 is the device of the ultraviolet UB of the predefined direction of vibration of surface irradiation to workpiece W (representing with two dot-and-dash lines in Fig. 1), for example,, for the manufacture of the alignment film of liquid crystal panel or the alignment film of viewing angle compensation film etc.The direction of vibration that exposes to the surperficial ultraviolet UB of workpiece W presets according to the structure of workpiece W, purposes or desired specification.For example, in the manufacturing installation of using at the alignment film of described liquid crystal panel, preferably by the direction of vibration of ultraviolet UB with respect to reference direction RD be set in ± 0.1 ° in.And polarized light illumination device 1 before to workpiece W irradiation ultraviolet radiation UB, is adjusted the setting angle of the 1st polarizer 19, thereby adjust the direction of vibration of the ultraviolet UB that exposes to workpiece W.Moreover, the Width of workpiece W is called to X-direction, by orthogonal with X-direction and for the long side direction of workpiece W is called Y direction, will be called Z-direction with Y direction and the orthogonal direction of X-direction.In the present embodiment, polarized light illumination device 1, taking X-direction as reference direction RD, only exposes to workpiece W by being ± 0.1 ° with respect to reference direction RD with interior ultraviolet UB.
Here, so-called the 1st polarizer 19 and the 2nd polarizer 14, refer to the element that takes out the ultraviolet UB of the polarized component only vibrating from ultraviolet UA on specific direction, and described ultraviolet UA is that light source 11 irradiates, and the vibration in all directions of the same ground.The direction of vibration of so-called ultraviolet UA, ultraviolet UB, refers to described ultraviolet UA, the electric field of ultraviolet UB and the direction of vibration in magnetic field.And, the setting angle of so-called the 1st polarizer 19, refer to round the angle of the N direction (representing with arrow in Fig. 1) of axle center P and round the angle of the L direction (representing with arrow in Fig. 1) of transverse axis Q, described axle center P is the axle center to the 1st polarizer 19 from light source 11, and the long side direction of described transverse axis Q and light source 11 is parallel and with orthogonal to the axle center P of the 1st polarizer 19 from light source 11.Moreover in the present embodiment, axle center P is parallel with Z axis, transverse axis Q is parallel with X-axis.
Polarized light illumination device 1 as shown in Figures 1 and 2, comprises linear light source 11; The 1st polarization portion 12, comprises polylith the 1st polarizer 19 (only shown in Fig. 1); Movable part 13; The 2nd polarizer 14 (only shown in Fig. 1); Light receiving unit 15; Mobile unit 16; And control device 20.Light source 11 is for example, the tube lamps such as high-pressure sodium lamp or metal halide lamp (metal halide lamp) at least comprise the illuminating part of wire.Light source 11 is configured to the long side direction of illuminating part to become parallel with the X-direction in Fig. 1.Light source 11 is from the illuminating part of wire, the ultraviolet UA that for example illumination wavelength is 200nm to 400nm.The ultraviolet UA that light source 11 irradiates is the ultraviolet ray with various direction of vibration compositions, i.e. so-called unpolarized ultraviolet ray.Light source 11 also can be made as following formation: for example make can illumination wavelength light emitting diode (the light-emitting diode of the ultraviolet UA that is 200nm to 400nm, LED) miniature lamp of chip, laser diode (laser diode), organic electroluminescent (electroluminescence, EL) etc. is configured to linearity separately.
And in the present embodiment, light source 11 is disposed at the top of workpiece W.In addition,, above light source 11, being provided with cross section is oval-shaped cylinder groove shape condenser 17.Expose to a ultraviolet UA of groove shape condenser 17 from light source 11 and reflect and be formed as directional light by cylinder groove shape condenser 17, irradiate to workpiece W.
The 1st polarization portion 12 be relative with light source 11 to and configure, irradiated by ultraviolet UA, described ultraviolet UA irradiates and reflects by cylinder groove shape condenser 17 from light source 11.The 1st polarization portion 12 comprises retaining member 18 and multiple the 1st polarizer 19.Retaining member 18, for keeping multiple the 1st polarizers 19, is formed as the frame shape of the length roughly equal with light source 11.Retaining member 18 is accommodated with multiple the 1st polarizers 19 in inner side.And retaining member 18, under its long side direction state parallel with X-direction, is located and is fixed between workpiece W and light source 11 by not shown detent mechanism.
Multiple the 1st polarizers 19 are disposed at along the long side direction of light source 11 abreast along the diverse location of X-direction.Multiple the 1st polarizers 19 are accommodated in retaining member 18, by light source 11 irradiation ultraviolet radiation UA.The 1st polarizer 19 as shown in Figure 5, comprises frame member 19a and wire grid polarization element 19b, and described wire grid polarization element 19b is accommodated in frame member 19a.Frame member 19a is accommodated in retaining member 18.Wire grid polarization element 19b be on the substrate of quartz glass etc. equally spaced configured in parallel have the element of the electric conductor (metal wire of such as chromium or aluminium alloy etc.) of multiple linearities.Below 1/3 of the wavelength of the ultraviolet UA that the spacing of electric conductor is preferably irradiated from light source 11.The major part of the polarized component parallel with the long side direction of electric conductor reflection in the ultraviolet UA that wire grid polarization element 19b makes to irradiate from light source 11, and the polarized component orthogonal with the long side direction of electric conductor passed through.Moreover in the present embodiment, the 1st polarizer 19 need to be by parallel with Y-axis the long side direction of electric conductor and configure, be that the ultraviolet UB of X-direction passes through thereby only make direction of vibration.
Member can change the setting angle of the N direction round axle center P of retaining member 18 with movable motor 21, described axle center P is the axle center (be equivalent to from axle center from light source to 1st polarizer) parallel with Z axis.Movable motor 21 for a member is installed on retaining member 18.
Multiple elements are corresponding one by one with the 1st polarizer 19 with movable motor 22, and can change the setting angle of the N direction round axle center P of corresponding the 1st polarizer 19.In the present embodiment, as shown in Figure 5, element is directly installed on to frame member 19a with the output shaft 22a of movable motor 22 upper, thereby element changes round the setting angle of the N direction of axle center P to frame member 19a and wire grid polarization element 19b integratedly with movable motor 22.And in the present embodiment, the 1st polarizer 19 is that the position that wire grid polarization element 19b can be parallel to light source 11 certainly for example rotates in the following scope of approximately ± 1 degree to the N direction round axle center P.
The movable motor 23 of multiple normal directions is corresponding one by one with the 1st polarizer 19, and can change the setting angle of the L direction round transverse axis Q of corresponding the 1st polarizer 19, and described transverse axis Q is parallel with X-axis.In the present embodiment, the movable motor 23 of normal direction changes the setting angle of the L direction round transverse axis Q of wiregrating polarizer 19b.
The 2nd polarizer 14 be disposed in relative with the 1st polarizer 19 to position, the ultraviolet UB that is passed the 1st polarizer 19 irradiates.The 2nd polarizer 14 is disposed at the below of the 1st polarization portion 12, and is disposed at the position that clips the 1st polarization portion 12 between light source 11.And the 2nd polarizer 14 is by sensitive side movable part 24 (shown in Fig. 1) and along the N direction rotation round described axle center P.In the present embodiment, the 2nd polarizer 14 is formed as the size of illuminated following ultraviolet UB, and described ultraviolet UB is by the 1st polarizer 19 in multiple the 1st polarizers 19.The 2nd polarizer 14 on the substrate of quartz glass etc. equally spaced configured in parallel have the electric conductor (metal wire of such as chromium or aluminium alloy etc.) of multiple linearities.Below 1/3 of the wavelength of the ultraviolet UA that the spacing of electric conductor is preferably irradiated from light source 11.The 2nd polarizer 14 makes the major part reflection of polarized component parallel with the long side direction of electric conductor in the ultraviolet UB by the 1st polarizer 19, and the polarized component orthogonal with the long side direction of electric conductor passed through.
Secondly,, with reference to Fig. 3 and Fig. 4, an example of the processing of the setting angle adjustment of the 1st polarizer 19 of the control device 20 of the polarized light illumination device 1 of embodiment is described.Moreover setting angle adjustment is to carry out following time: changed the 1st polarization portion 12 entirety during together with retaining member 18 or while having changed at least one the 1st polarizer 19 in multiple the 1st polarizers 19 of the 1st polarization portion 12 etc.
In the present embodiment, setting angle adjustment is made as the setting angle of the 1st polarizer 19 setting angle that only makes following ultraviolet UB pass through, described ultraviolet UB is taking X-direction as reference direction RD, direction of vibration with respect to reference direction RD be ± 0.1 ° with interior ultraviolet UB.That is, in the present embodiment, reference direction RD (representing with a dot-and-dash line in Fig. 1) is parallel with X-axis, and described reference direction RD becomes by the benchmark of the direction of vibration of the ultraviolet UB of the 1st polarizer 19.Moreover so-called reference direction RD, refers to the straight line polarized component (also referred to as direction of vibration) that passes through the ultraviolet UB of the 1st polarizer 19 when the 1st polarizer 19 is positioned to desirable setting angle.
First,, when send the instruction of adjusting action from operator, the control device 20 of polarized light illumination device 1 starts the processing that setting angle is adjusted.In the processing of adjusting at setting angle, control device 20, in the step ST31 shown in Fig. 3, is made as N=1, enters to step T32.
In step ST32, control device 20 the 2nd polarizer 14 and light receiving unit 15 are positioned to be positioned in multiple the 1st polarizers 19 on mobile unit 16 one end the 1st polarizer 19 below.And control device 20 is lit a lamp to light source 11, irradiate the same ground ultraviolet UA of vibration in all directions to the 1st polarizer 19, and by sensitive side movable part 24, the 2nd polarizer 14 is rotated.So, only make following ultraviolet UB pass through to the 2nd polarizer 14, described ultraviolet UB be in ultraviolet UA with the ultraviolet UB of the orthogonal polarized component of the electric conductor of the wire grid polarization element 19b of the 1st polarizer 19, the i.e. orthogonal ultraviolet UB of the electric conductor of the wire grid polarization element 19b of direction of vibration and the 1st polarizer 19.And the 2nd polarizer 14 also only makes following ultraviolet ray pass through, described ultraviolet ray be with the 1st polarizer 19 similarly with the ultraviolet ray of the orthogonal polarized component of electric conductor, the i.e. orthogonal ultraviolet ray of the electric conductor of direction of vibration and the 2nd polarizer 14.So light receiving unit 15 only receives following ultraviolet ray, described ultraviolet ray be the same ground that irradiates of light source 11 in all directions in the ultraviolet UA of vibration by the ultraviolet ray of the 1st polarizer 19 and the 2nd polarizer 14.
At this moment, due to the 1st polarizer 19 only make ultraviolet UB by and the 2nd polarizer 14 rotation, therefore the ultraviolet intensity that light receiving unit 15 receives and the rotation of the 2nd polarizer 14 link and change, and described ultraviolet ray is the ultraviolet ray that illuminometer 25 is exported to control device 20.Then, control device 20 calculates the position of the 2nd polarizer 14 of the N direction round axle center P that ultraviolet intensity that light receiving unit 15 receives is the strongest.Then, control device 20 one side makes the 2nd polarizer 14 round axle center P rotation, and one side calculates the anglec of rotation of the N direction round axle center P of counting from reference direction RD of the position of the 2nd polarizer 14 that ultraviolet intensity that light receiving unit 15 receives is the strongest.Then, control device 20 calculate the 2nd polarizer 14 that ultraviolet intensity that light receiving unit 15 receives is the strongest position the anglec of rotation of counting from reference direction RD (, angle between direction and the reference direction RD of the 2nd polarizer 14 that ultraviolet intensity that light receiving unit 15 receives is the strongest), the direction of vibration angulation as reference direction RD with the ultraviolet UB by the 1st polarizer 19.
And control device 20, according to the situation of described angle, drives (control) to element with movable motor 22, so that reference direction RD is in ± 0.1 ° with the direction of vibration angulation of the ultraviolet UB by the 1st polarizer 19.So, the ultraviolet intensity that control device 20 receives according to light receiving unit 15, calculate the direction of vibration angulation of reference direction RD and the ultraviolet UB by the 1st polarizer 19, the element of movable part 13 is controlled with movable motor 22 so that the angle ranging from ± 0.1 ° in.Then, when reference direction RD and the direction of vibration angulation of the ultraviolet UB by the 1st polarizer 19 reach predefined for example when 0.1 ° of grade is allowed below angle, control device 20 finishes the setting angle adjustment of described the 1st polarizer 19, enters to step ST33.
In step ST33, control device 20 determines whether the setting angle adjustment of the 1st all polarizer 19 that is through with, if not yet finished, in step ST34, is made as N=N+1, is back to step ST32.Then, control device 20 drives mobile unit 16, the 2nd polarizer 14 and light receiving unit 15 is positioned to the below of another the 1st polarizer 19, and just now similarly carries out setting angle adjustment.So, control device 20 repeats step ST32 to step ST34, adjusts until finish the setting angle of the 1st all polarizers 19, carries out successively one by one the setting angle adjustment of multiple the 1st polarizers 19.In the time finishing the setting angle adjustment of the 1st all polarizers 19, control device 20 finishes the processing that setting angle is adjusted.
In the time finishing the setting angle adjustment of the 1st all polarizers 19, the direction of vibration of ultraviolet UB by the 1st all polarizers 19 is parallel with reference direction RD, or the direction of vibration of described ultraviolet UB and reference direction RD angulation for allow angle be below ± below 0.1 °.Like this, the ultraviolet intensity that control device 20 receives according to light receiving unit 15, the element of movable part 13 is controlled with movable motor 22, so that the direction of vibration of the ultraviolet UB from light source 11 by multiple the 1st polarizers 19 is in ± 0.1 ° with respect to reference direction RD.
And, changing in the situations such as the 1st polarization portion 12 entirety, when the direction of vibration of the ultraviolet UB being passed through of multiple the 1st polarizers 19 is when being parallel to each other, the polarized light illumination device 1 of present embodiment is controlled and carries out setting angle adjustment with movable motor 21 member, and described multiple the 1st polarizers 19 are accommodated in retaining member 18 in advance.At this moment, in the step ST41 in Fig. 4, control device 20 on mobile unit 16, the 2nd polarizer 14 and light receiving unit 15 are positioned in multiple the 1st polarizers 19 the 1st polarizer 19 arbitrarily below.And control device 20 is lit a lamp to light source 11, and make sensitive side movable part 24 allow the 2nd polarizer 14 rotate.
Then, control device 20 calculates the position of the 2nd polarizer 14 of the N direction round axle center P that ultraviolet intensity that light receiving unit 15 receives is the strongest.Control device 20 calculates the anglec of rotation of the N direction round axle center P of counting from reference direction RD of the position of the 2nd polarizer 14 that ultraviolet intensity that light receiving unit 15 receives is the strongest.Control device 20 is the anglec of rotation of counting from reference direction RD of the position of the 2nd the strongest ultraviolet intensity polarizer 14, the direction of vibration angulation as reference direction RD with the ultraviolet UB by the 1st polarizer 19.Control device 20, according to the situation of described angle, drives (control) to member with movable motor 21, so that reference direction RD is in ± 0.1 ° with the direction of vibration angulation of the ultraviolet UB by the 1st polarizer 19.And when the direction of vibration angulation of reference direction RD and the ultraviolet UB by the 1st polarizer 19 is when allowing below angle, control device 20 finishes setting angle adjustment.
The polarized light illumination device 1 of described formation is that the 2nd polarizer 14 is set between the 1st polarizer 19 and light receiving unit 15, and the ultraviolet intensity receiving according to light receiving unit 15, and control device 20 is controlled movable part 13.Therefore, polarized light illumination device 1 passes through the ultraviolet direction of vibration of the 2nd polarizer 14 etc. by grasp in advance, can infer by the direction of vibration of the ultraviolet UB of the 1st polarizer 19.Therefore, polarized light illumination device 1 can be inferred by the direction of vibration of the ultraviolet UB of the 1st polarizer 19, therefore by movable part 13 is controlled, the direction of vibration that can make the ultraviolet UB by multiple the 1st polarizers 19 with respect to reference direction RD in ± 0.1 °.Therefore, polarized light illumination device 1 can be adjusted the setting angle of the 1st polarizer 19 so that the direction of vibration of the ultraviolet UB passing through of multiple the 1st polarizers 19 with respect to reference direction RD in ± 0.1 °.
And in polarized light illumination device 1, the element of movable part 13 can change the setting angle as the N direction of setting angle with movable motor 22, described N direction is round the axle center P to the 1st polarizer 19 from light source 11.Therefore, polarized light illumination device 1 is controlled with movable motor 22 element by control device 20, the direction of vibration that can make the ultraviolet UB by multiple the 1st polarizers 19 with respect to reference direction RD in ± 0.1 °.
And, polarized light illumination device 1 is by predetermining ultraviolet direction of vibration by the 2nd polarizer etc., the ultraviolet intensity that can receive according to light receiving unit 15, easily calculates the direction of vibration angulation of reference direction RD and the ultraviolet UB by the 1st polarizer 19.Therefore, polarized light illumination device 1 is by controlling with movable motor 22 element, the direction of vibration that can make the ultraviolet UB by the 1st polarizer 19 with respect to reference direction RD in ± 0.1 °.
The anglec of rotation of counting from reference direction RD of the strongest the 2nd polarizer 14 of ultraviolet ray that polarized light illumination device 1 receives light receiving unit 15, as the direction of vibration of the ultraviolet UB by the 1st polarizer 19.Therefore, polarized light illumination device 1 can easily and exactly be inferred by the direction of vibration of the ultraviolet UB of the 1st polarizer 19.Therefore, can expect to adjust the setting angle of the 1st polarizer 19 so that the direction of vibration of the ultraviolet UB passing through of multiple the 1st polarizers 19 with respect to reference direction RD in ± 0.1 °.
Polarized light illumination device 1 comprises mobile unit 16, described mobile unit 16 makes the 2nd polarizer 14 and light receiving unit 15 move along the long side direction of light source 11, therefore need not corresponding to each the 1st polarizer 19 each and the 2nd polarizer 14 and light receiving unit 15 are set.Therefore, polarized light illumination device 1 can make the quantity of the 2nd polarizer 14 and light receiving unit 15 be less than multiple the 1st polarizers 19, can be for multiple the 1st polarizers 19, utilize one group of the 2nd polarizer 14 and light receiving unit 15 to adjust the setting angle of the 1st polarizer 19.Therefore, polarized light illumination device 1 can suppress increase or the maximization of part number.
[variation 1～variation 3]
Secondly, with reference to the accompanying drawings, the polarized light illumination device 1 of the variation 1～variation 3 of embodiments of the present invention is described.Fig. 6 is the planimetric map that schematically shows the formation of the movable part of the polarized light illumination device of the variation 1 of embodiment, Fig. 7 is the planimetric map that schematically shows the formation of the movable part of the polarized light illumination device of the variation 2 of embodiment, and Fig. 8 is the planimetric map that schematically shows the formation of the movable part of the polarized light illumination device of the variation 3 of embodiment.Moreover in Fig. 6 to Fig. 8, to the part mark same-sign identical with described embodiment, and description thereof is omitted.
In variation 1, as shown in Figure 6, between element is with movable motor 22 and the frame member 19a of the 1st polarizer 19, be provided with more than at least 1 gear 61.In variation 1, by pinion wheel (pinion) 62 and gear 61 phase interlocks, and utilizing the movable motor 22 of element to adjust the setting angle of the 1st polarizer 19, described pinion wheel 62 is installed on the output shaft 22a of the movable motor 22 of element.
In variation 2, as shown in Figure 7, on the frame member 19a of the 1st polarizer 19, be provided with the screw that pushes of micrometer (micrometer) 71 grades.In variation 2, by movable motor 22 for element, micrometer 71 is pushed away or drawn, and the setting angle of the 1st polarizer 19 is adjusted.
In variation 3, as shown in Fig. 8 (a) and Fig. 8 (b), be provided with tooth bar (rack) 81 in the outer rim of the frame member 19a of the 1st polarizer 19.In variation 3, on tooth bar 81, pinion wheel 62 in interlock, and described pinion wheel 62 is installed on the output shaft 22a of the movable motor 22 of element.In variation 3, by movable motor 22 for element, with movable motor 22, pinion wheel 62 is rotated by element, whereby the setting angle of the 1st polarizer 19 is adjusted.And the direction of wire grid polarization element 19b also can be made as the embodiment with respect to Fig. 1, the direction of 90-degree rotation can be set according to the purposes of polarized light illumination device 1 in good time.
[variation 4]
Secondly, with reference to the accompanying drawings, the polarized light illumination device 1 of the variation 4 of embodiments of the present invention is described.Fig. 9 is the process flow diagram that represents an example of the processing of the control device of the polarized light illumination device of the variation 4 of embodiment.
In variation 4, in the processing of adjusting at setting angle, control device 20 is in the step ST91 shown in Fig. 9, one faces light source 11 lights a lamp, by sensitive side movable part 24, the 2nd polarizer 14 is rotated, one side makes the 2nd polarizer 14 and light receiving unit 15 move from the below of the lower direction other end of one end of the 1st polarization portion 12.And the movement of control device 20 and the 2nd polarizer 14 and light receiving unit 15 links, and is transfused to information, described information represent by multiple the 1st polarizers 19 each and by the ultraviolet intensity of the 2nd polarizer 14.And, control device 20 calculate described reference direction RD with by each the direction of vibration angulation of ultraviolet UB of the 1st polarizer 19.When control device 20 calculates reference direction RD and passes through the direction of vibration angulation of ultraviolet UB of the 1st all polarizers 19, enter to step ST92.
In step ST92, control device 20 is according to the situation of described angle, each element is driven to (control) with movable motor 22, so that reference direction RD is in ± 0.1 ° with the direction of vibration angulation of the ultraviolet UB by the 1st polarizer 19.Then, enter to step ST93.
In step ST93, control device 20 one sides rotate the 2nd polarizer 14 by sensitive side movable part 24, and one side makes the 2nd polarizer 14 and light receiving unit 15 move from the below of the lower direction other end of one end of the 1st polarization portion 12.Then, whether control device 20 determinating reference direction RD are that predefined for example 0.1 degree etc. is allowed below angle with the direction of vibration angulation of the ultraviolet UB by each the 1st polarizer 19, exceed the 1st polarizer 19 of allowing angle if existed, the 2nd polarizer 14 and light receiving unit 15 are positioned to exceed the below of the 1st polarizer 19 of allowing angle, the ultraviolet intensity receiving according to light receiving unit 15, element is controlled with movable motor 22, allowed below angle so that the angle ranging from.So, control device 20 carries out the setting angle adjustment of the 1st all polarizers 19.The polarized light illumination device 1 of variation 1～variation 4 can obtain the effect identical with described embodiment.
In said embodiment, disclose the example of the adjustment of the setting angle of the N direction round axle center P of carrying out the 1st polarizer 19, but in the present invention, also can control and the setting angle of L direction to the 1st polarizer 19 is adjusted the movable motor 23 of normal direction, described L direction is round the transverse axis Q parallel with the long side direction of light source 11.The method of adjusting as the setting angle of 19 the L direction round transverse axis Q to the 1st light-emitting component, for example there is following method,, the central portion of the long leg in the figure of the 1st polarizer 19, so that the 1st polarizer can arrange turning axle (without diagram) etc. along the mode of direction L rotation, utilize the movable motor 23 of normal direction that the short leg of the 1st polarizer 19 is moved along Z-direction.Or, along at least one short leg of the 1st polarizer 19, so that the 1st polarizer can arrange turning axle (without diagram) along the mode of direction L rotation, utilize the movable motor 23 of normal direction that another short leg of the 1st polarizer 19 is moved along Z-direction, also can adjust whereby the setting angle of L direction.For example, when the face direction of multiple the 1st polarizers 19 can be respectively with respect to the face direction of workpiece W and while guaranteeing the depth of parallelism, also can omit the movable motor 23 of normal direction (normal direction movable part) in movable part 13.And, can omit in addition movable motor 21 for member (member movable part), and movable part 13 is made as to the formation of only having movable motor 22 for multiple elements (element movable part).At this moment, can simplify the formation of polarized light illumination device 1.
And in said embodiment, one side is rotated the 2nd polarizer 14, one side utilizes light receiving unit 15 to receive ultraviolet ray.But, in the present invention, can also not make the 2nd polarizer 14 rotate, and utilize light receiving unit 15 to receive ultraviolet ray.At this moment, control device 20 is as long as by grasping by ultraviolet direction of vibration or the intensity etc. of the 2nd polarizer 14 in advance, and the ultraviolet intensity receiving according to light receiving unit 15 is inferred by the direction of vibration of the ultraviolet UB of the 1st polarizer 19.
In addition, in said embodiment, the 1st polarizer 19 is that following ultraviolet UB is passed through, and the direction of vibration of described ultraviolet UB is in ± 0.1 ° with respect to X-direction (reference direction RD).But in the present invention, the direction of vibration of the ultraviolet UB by the 1st polarizer 19 is not particularly limited, and also can suitably change according to the goods number of workpiece W or kind.
Some embodiments of the present invention and variation have below been described, but described embodiment and variation are to play suggesting effect as example, do not intend to limit scope of invention.Described embodiment and variation can be implemented by other variety of way, not departing from the scope of inventive concept, can carry out various omissions, displacement, change.Described embodiment and variation are contained in scope of invention or purport, therewith similarly, are contained in the invention recorded in claims and equal scope thereof.
Claims (5)
1. a polarized light illumination device, is characterized in that comprising:
Linear light source, irradiation ultraviolet radiation;
Multiple the 1st polarizers, are disposed at along the diverse location of the long side direction of described light source, and are irradiated described ultraviolet ray by described light source;
Movable part, can change the setting angle of described multiple the 1st polarizers;
The 2nd polarizer, be disposed at relative with described the 1st polarizer to position, the described ultraviolet ray that is passed described the 1st polarizer is irradiated;
Light receiving unit, receives by the described ultraviolet ray of described the 1st polarizer and described the 2nd polarizer; And
Control device, the described ultraviolet intensity receiving according to described light receiving unit, control described movable part, so that be in ± 0.1 ° by the described ultraviolet direction of vibration of described multiple the 1st polarizers with respect to reference direction, described reference direction becomes the benchmark of direction of vibration.
2. polarized light illumination device according to claim 1, is characterized in that,
Described movable part comprises element movable part, and described element can change the setting angle round axle center with movable part, and described axle center is the axle center to described the 1st polarizer from described light source.
3. polarized light illumination device according to claim 2, is characterized in that,
The described ultraviolet intensity that described control device receives according to described light receiving unit, calculate described ultraviolet described reference direction and pass through the described ultraviolet direction of vibration angulation of described the 1st polarizer, and described movable part is controlled so that the angle ranging from ± 0.1 ° in.
4. polarized light illumination device according to claim 3, characterized by further comprising:
Sensitive side movable part, makes described the 2nd polarizer rotate round described axle center,
Described control device one side makes described the 2nd polarizer rotate round described axle center, one side calculates the angle between direction and the described reference direction of described the 2nd polarizer that described ultraviolet intensity that described light receiving unit receives is the strongest, as described reference direction with pass through the described ultraviolet direction of vibration angulation of described the 1st polarizer.
According to claim 1 to arbitrary described polarized light illumination device in claim 4, characterized by further comprising:
Mobile unit, makes described the 2nd polarizer and described light receiving unit move along the long side direction of described light source.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012273804A JP6201310B2 (en) | 2012-12-14 | 2012-12-14 | Polarized light irradiation device |
| JP2012-273804 | 2012-12-14 |
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| CN103869543A true CN103869543A (en) | 2014-06-18 |
| CN103869543B CN103869543B (en) | 2018-06-29 |
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| JP (1) | JP6201310B2 (en) |
| CN (1) | CN103869543B (en) |
| TW (1) | TWI565978B (en) |
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| CN106125407A (en) * | 2015-05-06 | 2016-11-16 | Wi-A株式会社 | Light alignment apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP5862616B2 (en) * | 2013-07-17 | 2016-02-16 | ウシオ電機株式会社 | Polarizing light irradiation apparatus for photo-alignment and polarized light irradiation method for photo-alignment |
| JP2016064378A (en) * | 2014-09-25 | 2016-04-28 | 東芝ライテック株式会社 | Light irradiation device and light irradiation method |
| US20160231176A1 (en) * | 2015-02-05 | 2016-08-11 | Polarization Solutions, Llc | Light irradiation device having polarization measuring mechanism |
| JP6610931B2 (en) * | 2015-09-18 | 2019-11-27 | 東芝ライテック株式会社 | Polarized light irradiation device |
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Also Published As
| Publication number | Publication date |
|---|---|
| TWI565978B (en) | 2017-01-11 |
| TW201423170A (en) | 2014-06-16 |
| JP6201310B2 (en) | 2017-09-27 |
| JP2014119566A (en) | 2014-06-30 |
| CN103869543B (en) | 2018-06-29 |
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