CN203480169U - Polarized light irradiation device for optical alignment - Google Patents
Polarized light irradiation device for optical alignment Download PDFInfo
- Publication number
- CN203480169U CN203480169U CN201320577519.7U CN201320577519U CN203480169U CN 203480169 U CN203480169 U CN 203480169U CN 201320577519 U CN201320577519 U CN 201320577519U CN 203480169 U CN203480169 U CN 203480169U
- Authority
- CN
- China
- Prior art keywords
- light source
- ultraviolet
- polarized light
- light
- illumination device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Liquid Crystal (AREA)
- Polarising Elements (AREA)
Abstract
The utility model provides a polarized light irradiation device for optical alignment. The polarized light irradiation device for optical alignment comprises a light source portion and a polarization component, wherein the light source portion is used for irradiating ultraviolet rays. The polarization component comprises a first face irradiated by the ultraviolet rays and a second face opposite to the first face and irradiating polarization light of the ultraviolet rays. The light source portion is provided with a bar-shaped lamp and an auxiliary light source. The bar-shaped lamp irradiates the ultraviolet rays to the first side. The auxiliary light source is arranged in the mode that the ultraviolet rays are irradiated by the polarization component in the area, with a large difference relative to a reference direction, of a polarization axis of the polarization light in the irradiation area of a workpiece, namely the four corners of the irradiation area, and the polarization light is emitted from the second face and corresponds to the ultraviolet rays. The polarized light irradiation device can control deviation of the polarization axis in the irradiation area of the workpiece, and enables sufficient ultraviolet rays to be irradiated to the workpiece.
Description
Technical field
Embodiment of the present utility model relates to a kind of smooth orientation polarized light illumination device.
Background technology
Current, instead the i.e. technology of friction (rubbing) operation is processed in the orientation of the alignment film of liquid crystal panel (panel), and light alignment technique (for example, with reference to patent documentation 1 and patent documentation 2) is just attracted attention.Light orientation used in light alignment technique possesses with polarized light illumination device: as bar-shaped lamp (lamp) and grid (grid) polarizer of linear light source.This kind of light orientation polarized light illumination device, make the ultraviolet ray of polarization axle of the prescribed direction in ultraviolet ray that bar-shaped lamp irradiates by lattice polarization element, the ultraviolet ray of passing through is exposed to workpiece (work) etc., carry out whereby the orientation of alignment film and process.
Prior art document
Patent documentation
Patent documentation 1: Japanese Patent Laid-Open 2006-184747 communique
Patent documentation 2: Japanese Patent Laid-Open 2011-145381 communique
Yet, in prior art, the deviation of the polarization axle in the irradiation region of expectation inhibition workpiece, and the ultraviolet ray of enough light quantities can be exposed to workpiece.
Utility model content
The purpose of this utility model is to provide a kind of smooth orientation polarized light illumination device, can suppress the deviation of the polarization axle in the irradiation region of workpiece, and the ultraviolet ray of enough light quantities can be exposed to workpiece.
The light orientation of embodiment possesses light source portion and the polarizer of irradiation ultraviolet radiation with polarized light illumination device.Polarizer has: the 1st, by described ultraviolet ray, irradiated; And the 2nd, with described the 1st face in opposite directions, and penetrate described ultraviolet polarized light.Described light source portion possesses irradiates the 1st ultraviolet the 1st light source and the 2nd light source to described the 1st.Described the 2nd light source is configured to: for polarization axle in irradiation region, described polarized light the region large with respect to the difference of reference direction, via described polarizer, irradiate the 2nd ultraviolet ray, described polarized light is from described the 2nd ejaculation corresponding to described the 1st ultraviolet ray.
The light orientation of embodiment possesses light source portion and the polarizer of irradiation ultraviolet radiation with polarized light illumination device.Polarizer has: by described ultraviolet ray, irradiated the 1st and with described the 1st face in opposite directions and penetrate the 2nd of described ultraviolet polarized light, described light source portion comprises: the 1st light source, to described the 1st, irradiate the 1st ultraviolet ray; And the 2nd light source, described the 2nd light source is configured to: for the low region of illumination in irradiation region, described polarized light, via described polarizer, irradiate the 2nd ultraviolet ray, described polarized light is from described the 2nd ejaculation corresponding to described the 1st ultraviolet ray.
The light orientation of embodiment is disposed a plurality of with described the 1st light source in polarized light illumination device, described the 2nd light source is provided with a plurality of, and described at least one, the 2nd light source is disposed between described the 1st light source.
The light orientation of embodiment is configured in described irradiation region in the outer part with described the 2nd light source in polarized light illumination device compared with described the 1st light source.
The light orientation of embodiment has the illuminating part of linearity with described the 1st light source in polarized light illumination device, described the 2nd light source forms shortlyer than the illuminating part of described the 1st light source, and described the 2nd light source disposes a plurality of along the length direction of the illuminating part of described the 1st light source.
(effect of utility model)
According to the utility model, a kind of smooth orientation polarized light illumination device can be provided, can suppress the deviation of the polarization axle in the irradiation region of workpiece, and the ultraviolet ray of enough light quantities can be exposed to workpiece.
Accompanying drawing explanation
Fig. 1 means the stereographic map of the schematic configuration of polarized light illumination device for the light orientation of embodiment.
Fig. 2 means the side view of the schematic configuration of polarized light illumination device for the light orientation of embodiment.
Fig. 3 means the planimetric map of the schematic configuration of polarized light illumination device for the light orientation of embodiment.
Fig. 4 means the light orientation of the embodiment 1 of the embodiment planimetric map of the schematic configuration of polarized light illumination device.
Fig. 5 means the light orientation of the embodiment 2 of the embodiment side view of the schematic configuration of polarized light illumination device.
Reference numeral:
1: light orientation polarized light illumination device
10: light source portion
11: bar-shaped lamp (the 1st light source)
12,12a: secondary light source (the 2nd light source)
13: reflecting material
20: polarization portion
21: frame member
22: polarizer
22a: the 1st
22b: the 2nd
LD: irradiation region
PA, PA1, PA2: polarization axle
RD: reference direction
UA1: ultraviolet ray (the 1st ultraviolet ray)
UA2: ultraviolet ray (the 2nd ultraviolet ray)
UB1, UB2: ultraviolet ray (polarized light)
W: workpiece
Y1: arrow
Embodiment
The light orientation of the embodiment that below will illustrate and embodiment 1 possesses the light source portion 10 and polarizer 22 of irradiation ultraviolet radiation UA1, UA2 with polarized light illumination device 1.Polarizer 22 has: the 1st 22a, is irradiated by ultraviolet UA1, UA2; And the 2nd 22b, with the 1st 22a in opposite directions and the polarized light that penetrates ultraviolet UA1, UA2 be ultraviolet UB1, UB2.Light source portion 10 possesses bar-shaped lamp 11 and secondary light source 12.11 couples of the 1st 22a irradiation ultraviolet radiation UA1 of bar-shaped lamp.Secondary light source 12 is configured to: for polarization axle PA1 in the irradiation region LD of workpiece W, ultraviolet UB1 the region large with respect to the difference of reference direction RD, be four jiaos of irradiation region LD, via polarizer 22, carry out irradiation ultraviolet radiation UA2, described ultraviolet UB1 penetrates from the 2nd 22b corresponding to ultraviolet UA1.
And the light orientation of the embodiment that below will illustrate and embodiment 1 possesses the light source portion 10 and polarizer 22 of irradiation ultraviolet radiation UA1, UA2 with polarized light illumination device 1.Polarizer 22 has: the 1st 22a, is irradiated by ultraviolet UA1, UA2; And the 2nd 22b, with the 1st 22a in opposite directions and the polarized light that penetrates ultraviolet UA1, UA2 be ultraviolet UB1, UB2.Light source portion 10 possesses bar-shaped lamp 11 and secondary light source 12.11 couples of the 1st 22a irradiation ultraviolet radiation UA1 of bar-shaped lamp.Secondary light source 12 is configured to: for the two ends of the Y direction of the 1st low 22a of the illumination of the ultraviolet UA1 in the 1st 22a, irradiation ultraviolet radiation UA2.
And the light orientation of the embodiment 2 of the embodiment that below will illustrate is with in polarized light illumination device 1, bar-shaped lamp 11 disposes a plurality of, and secondary light source 12 is provided with a plurality of, and at least one secondary light source 12 is disposed at 11, described bar-shaped lamp.
And the light orientation of the embodiment 2 of the embodiment that below will illustrate is with in polarized light illumination device 1, the more bar-shaped lamp 11 of secondary light source 12 is configured in irradiation region LD in the outer part.
And, the light orientation of the embodiment 1 of the embodiment that below will illustrate is with in polarized light illumination device 1, bar-shaped lamp 11 has the illuminating part of linearity, secondary light source 12 forms shortlyer than the illuminating part of bar-shaped lamp 11, and secondary light source 12 disposes a plurality of along the length direction of the illuminating part of bar-shaped lamp 11.
[embodiment]
Next, the polarized light illumination device 1 for light orientation of embodiment of the present utility model is described based on accompanying drawing.Fig. 1 means the stereographic map of the schematic configuration of polarized light illumination device for the light orientation of embodiment, Fig. 2 means the side view of the schematic configuration of polarized light illumination device for the light orientation of embodiment, and Fig. 3 means the planimetric map of the schematic configuration of polarized light illumination device for the light orientation of embodiment.
The light orientation of the embodiment shown in Fig. 1 is the surface to workpiece W (in Fig. 1 with shown in 2 chain lines) with polarized light illumination device 1, irradiate the device of ultraviolet UB1, the UB2 (shown in Fig. 2) of the polarization axle PA (Fig. 3 shown in, be also called direction of vibration) parallel with predetermined reference direction RD (in Fig. 3 with shown in some chain lines).The light orientation of embodiment with polarized light illumination device 1 such as the manufacture that is used to the alignment film of liquid crystal panel or the alignment film of compensation film for angular field of view (film) etc.The reference direction RD of polarization axle PA that exposes to ultraviolet UB1, the UB2 on workpiece W surface suitably sets according to the structure of workpiece W, purposes or desired specification.Below, the Width of workpiece W is called to X-direction, is called Y direction, is called Z-direction with the direction of Y direction and X-direction quadrature with the length direction of X-direction quadrature and workpiece W.
Light orientation with polarized light illumination device 1 as shown in Figures 1 and 2, possesses: light source portion 10, and irradiation ultraviolet radiation UA1, UA2, this ultraviolet ray UA1, UA2 are the samely to all direction vibrations; And polarization portion 20.
Ultraviolet UB1, the UB2 (polarized light that is equivalent to ultraviolet UA1, UA2) of polarization axle PA derives in polarization portion 20, and ultraviolet UB1, the UB2 of this polarization axle PA is that the ultraviolet UA1, the UA2 that by light source portion 10, are irradiated and the samely to all directions, vibrated only vibrate and form to reference direction RD.In addition, the polarization axle PA of ultraviolet UA1, UA2, UB1, UB2 refers to this ultraviolet ray UA1, UA2, UB1, the electric field of UB2 and the direction of vibration in magnetic field.
Polarizer 22 as shown in Figure 2, has: the 1st 22a, by ultraviolet UA1, UA2; Irradiate and the 2nd 22b, with the 1st 22a in opposite directions and the polarized light that penetrates ultraviolet UA1, UA2 be ultraviolet UB1, UB2.Polarizer 22 is on the substrate of quartz glass (glass) etc., uniformly-spaced and abreast disposes the lattice polarization element of the electric conductor (such as the metal wire of chromium or aluminium alloy etc.) of a plurality of linearities.The length direction of electric conductor is and reference direction RD quadrature.Comparatively it is desirable to, the spacing of electric conductor (pitch) is below 1/3 of wavelength from ultraviolet UA1, the UA2 of light source portion 10 irradiations.The ultraviolet major part of the polarization axle that the length direction with electric conductor ultraviolet UA1, UA2 that polarizer 22 makes to irradiate from light source portion 10 is parallel reflects, and makes to pass through with ultraviolet UB1, the UB2 of the polarization axle PA of the length direction quadrature of electric conductor.In addition, in present embodiment, the length direction of the electric conductor of polarizer 22 is to configure abreast with Y direction, and polarizer 22 passes through ultraviolet UB1, the UB2 of the polarization axle PA parallel with X-direction.That is,, in present embodiment, reference direction RD is parallel with X-direction.
In present embodiment, bar-shaped lamp 11 is provided with one, and is configured in the top of polarizer 22 and workpiece W.Above bar-shaped lamp 11, be provided with reflecting material 13.A part of direct irradiation of the ultraviolet UA1 that bar-shaped lamp 11 irradiates is to the 1st 22a of polarizer 22, and a remaining part is reflected material 13 reflections and exposes to the 1st 22a of polarizer 22.As reflecting material 13, can use the mirror of the paraboloidal mirror of parallel type, the oval shape mirror of light-focusing type and other shapes etc.Bar-shaped lamp 11 is to the polarizer 22 irradiation ultraviolet radiation UA1 of polarization portion 20, thereby carrys out irradiation region LD (shown in Fig. 3) the irradiation ultraviolet radiation UB1 to workpiece W surface by the polarizer 22 of polarization portion 20.
Herein, under bar-shaped lamp 11, as shown in Figure 2, UA1 is to inject the 1st 22a with the 1st the vertical or subvertical angle of 22a in ultraviolet ray, even not under bar-shaped lamp 11, in the central authorities of the X-direction of the 1st 22a, ultraviolet UA1 injects abreast with Y direction.Therefore,, in the central authorities of Y direction and the central authorities of X-direction of irradiation region LD, as shown in Figure 3, the polarization axle PA of the ultraviolet UB1 corresponding with ultraviolet UA1 is very little with respect to the difference (angulation) of reference direction RD.
But, at the Y direction of irradiation region LD and the two ends of X-direction, be four jiaos of irradiation region LD, ultraviolet UA1 is that the two tilts to inject the 1st 22a across with Y direction and X-direction.Therefore, compare with the polarization axle PA of the ultraviolet UB1 Y direction of irradiation region LD and the central authorities of X-direction near, at the Y direction of irradiation region LD and the two ends of X-direction, be four jiaos of irradiation region LD, the polarization axle PA1 of ultraviolet UB1 (in Fig. 3 with shown in dotted line) will tilt from reference direction RD.That is, the polarization axle PA1 of the ultraviolet UB1 penetrating from the 2nd 22b accordingly with ultraviolet UA1 from bar-shaped lamp 11 is with respect to the difference of reference direction RD, is that four jiaos of irradiation region LD become large at the Y direction of irradiation region LD and the two ends of X-direction.Like this, the Y direction of irradiation region LD and the two ends of X-direction are four jiaos of irradiation region LD, become region in the LD of irradiation region, large with respect to the difference of reference direction RD with the polarization axle PA1 of the ultraviolet UB1 penetrating from the 2nd 22b accordingly from the ultraviolet UA1 of bar-shaped lamp 11.
And, compared with the central authorities of the Y direction of the 1st 22a of polarizer 22, the two ends of the Y direction of the 1st 22a, from the illumination step-down of the ultraviolet UA1 of bar-shaped lamp 11.Like this, the two ends of the Y direction of the 1st 22a, become in the 1st 22a, from the low region of illumination of the ultraviolet UA1 of bar-shaped lamp 11.
In present embodiment, secondary light source 12 is provided with two as shown in Figures 2 and 3, and is configured in side by side the top of polarizer 22 and workpiece W with bar-shaped lamp 11.Secondary light source 12 is configured in irradiation region LD Y direction compared with bar-shaped lamp 11 in the outer part.Secondary light source 12 position that both distance of the configurable Z-direction counting from workpiece W equates with bar-shaped lamp 11, the also distance of the configurable Z-direction counting from the workpiece W position different from bar-shaped lamp 11.The Z-direction of secondary light source 12 and the position of Y direction are as long as come as required suitably to select.
And, in present embodiment, when overlooking, as shown in Figures 2 and 3, secondary light source 12 is configured in outside compared with the two ends of the Y direction of the 1st 22a of irradiation region LD and polarizer 22, but also can compared with the two ends of the Y direction of the 1st 22a of irradiation region LD and polarizer 22, be configured in as required inner side.Secondary light source 12 is configured to as shown in Figure 2: the two ends irradiation ultraviolet radiation UA2 to the Y direction of the 1st of irradiation region LD and polarizer 22 the 22a.The two ends irradiation ultraviolet radiation UA2 of the Y direction of 12 couples of the 1st 22a of secondary light source, and the two ends irradiation ultraviolet radiation UA2 to the Y direction of irradiation region LD.When secondary light source 12 is configured in the position that the distance of the Z-direction of counting from workpiece W equates with bar-shaped lamp 11, comparatively it is desirable to, when overlooking, secondary light source 12 is configured in the position that the distance counted from the two ends of the Y direction of irradiation region LD equates with bar-shaped lamp 11.In addition, in present embodiment, secondary light source 12 is to be configured in the position that the distance of the Z-direction of counting from workpiece W equates with bar-shaped lamp 11, and when overlooking, and secondary light source 12 is configured in the position that the distance counted from the two ends of the Y direction of irradiation region LD equates with bar-shaped lamp 11.
The light orientation of the embodiment of aforementioned structure carrys out conveyance workpiece W with polarized light illumination device 1 along the arrow Y1 direction parallel with Y direction, and from bar-shaped lamp 11 and secondary light source 12 irradiation ultraviolet radiation UA1, UA2.So these ultraviolet UA1, UA2 are irradiated to the 1st 22a, by polarizer 22, polarization axle PA ultraviolet UB1, the UB2 parallel with reference direction RD penetrates towards the irradiation region on workpiece W surface LD from the 2nd 22b.
Now, at the Y direction of the irradiation region on workpiece W surface LD and the two ends of X-direction, be four jiaos of irradiation region LD, the polarization axle PA1 (shown in the dotted line Fig. 3) of the ultraviolet UB1 penetrating from the 2nd 22b accordingly with ultraviolet UA1 from bar-shaped lamp 11 is with respect to the difference large (tilting with respect to reference direction RD) of reference direction RD.And, at the Y direction of the irradiation region on workpiece W surface LD and the two ends of X-direction, be four jiaos of irradiation region LD, the polarization axle PA2 (shown in some chain lines Fig. 3) of the ultraviolet UB2 penetrating from the 2nd 22b accordingly with ultraviolet UA2 from secondary light source 12 is with respect to the difference large (with respect to reference direction RD inclination) of reference direction RD.
Now, in present embodiment, secondary light source 12 is to be configured in the position that the distance of the Z-direction of counting from workpiece W equates with bar-shaped lamp 11, and when overlooking, and secondary light source 12 is configured in the position that the distance counted from the two ends of the Y direction of irradiation region LD equates with bar-shaped lamp 11.Therefore, at the Y direction of irradiation region LD and the two ends of X-direction, be four jiaos of irradiation region LD, the ultraviolet ray polarization axle PA1 of UB1 and the polarization axle PA2 of ultraviolet UB2 tilt each other inversely with respect to reference direction RD, and equate with respect to the degree of tilt of reference direction RD.Therefore, the inclination of the polarization axle PA2 of the inclination of the polarization axle PA1 of the ultraviolet UB1 penetrating from the 2nd 22b accordingly with ultraviolet UA1 and the ultraviolet UB2 that penetrates from the 2nd 22b accordingly with ultraviolet UA2 offsets, can make the Y direction of irradiation region LD on workpiece W surface and the polarization axle PA of the ultraviolet UB of four jiaos that the two ends of X-direction are irradiation region LD as shown in the solid line in Fig. 3, be parallel to reference direction RD.
And, central authorities in the Y direction of the irradiation region on workpiece W surface LD, the ultraviolet UB1 being penetrated from the 2nd 22b accordingly by the ultraviolet UA1 with from bar-shaped lamp 11 irradiates, and at the two ends of the Y direction of the irradiation region on workpiece W surface LD, the ultraviolet UB2 being penetrated from the 2nd 22b accordingly by the ultraviolet UA2 with from secondary light source 12 irradiates.
Like this, light orientation is the irradiation region LD for workpiece W (in Fig. 1 with shown in 2 chain lines) surface with polarized light illumination device 1, without light quantity, irradiate unevenly ultraviolet UB1, the UB2 of the polarization axle PA parallel with X-direction, to carry out the orientation of alignment film, process.
The light orientation of the embodiment of aforementioned structure possesses secondary light source 12 with polarized light illumination device 1, this secondary light source 12 is the two ends of Y direction of four jiaos and the 1st 22a of irradiation region LD for the Y direction of irradiation region LD and the two ends of X-direction, irradiation ultraviolet radiation UA2.Therefore, light orientation will to the two ends of the Y direction of irradiation region LD and X-direction be four jiaos of irradiation region LD with polarized light illumination device 1, irradiates the ultraviolet UB2 corresponding with ultraviolet UA2 from secondary light source 12.
And secondary light source 12 is to be configured in the position that the distance of the Z-direction of counting from workpiece W equates with bar-shaped lamp 11, and when overlooking, secondary light source 12 is configured in the position that the distance counted from the two ends of the Y direction of irradiation region LD equates with bar-shaped lamp 11.Therefore, the Y direction of irradiation region LD and the two ends of X-direction are the polarization axle PA1 of ultraviolet UB1 and the polarization axle PA2 of ultraviolet UB2 at four jiaos of places of irradiation region LD, with respect to reference direction RD, tilt inversely each other, and equate with respect to the degree of tilt of reference direction RD.Therefore, at the Y direction of irradiation region LD and the two ends of X-direction, be four jiaos of irradiation region LD, the ultraviolet ray inclination of polarization axle PA1 of UB1 and the inclination of the polarization axle PA2 of ultraviolet UB2 offset, can make the polarization axle PA of ultraviolet UB1, UB2 as shown in the solid line in Fig. 3, be parallel to reference direction RD, can suppress the polarization axle PA of ultraviolet UB1, UB2 from the inclination of reference direction RD generation.The deviation that therefore, can suppress the polarization axle PA of ultraviolet UB1, UB2 in the LD of irradiation region.
And because the ultraviolet UA2 from secondary light source 12 is irradiated at two ends to the Y direction of the 1st 22a, two ends that therefore can be to the Y direction of irradiation region LD, irradiate the ultraviolet UB2 corresponding with ultraviolet UA2 from secondary light source 12.Therefore, the number of secondary light source 12 can either be suppressed, for minimum, ultraviolet UB1, the UB2 of enough light quantities can be exposed to workpiece W again.Thereby light orientation can suppress the deviation of the polarization axle PA of ultraviolet UB1, UB2 in the irradiation region LD of workpiece W with polarized light illumination device 1, ultraviolet UB1, the UB2 of enough light quantities can be exposed to workpiece W.
[embodiment 1]
Next, the polarized light illumination device 1 for light orientation of the embodiment 1 of embodiment of the present utility model is described based on accompanying drawing.Fig. 4 means the light orientation of the embodiment 1 of the embodiment planimetric map of the schematic configuration of polarized light illumination device.In addition, in Fig. 4, for the part identical with aforementioned embodiments, also description thereof is omitted for mark same-sign.
In aforementioned embodiments, use the structure secondary light source 12 identical with bar-shaped lamp 11.But, in the utility model, as long as can suppress the inclination to the polarization axle PA of ultraviolet UB1, the UB2 of the two ends irradiation of the Y direction of irradiation region LD, can as shown in Figure 4, suitably select length, power input, shape (such as spherical) etc. to use secondary light source 12a.In embodiment 1 shown in Fig. 4, use the bar-shaped lamp form shortlyer than the illuminating part of bar-shaped lamp 11 to be used as secondary light source 12a, correspond respectively to four jiaos of irradiation region LD and be provided with four secondary light source 12a.In embodiment 1, secondary light source 12a disposes a plurality of (in the example shown in Fig. 4, being 2) along the length direction of the illuminating part of bar-shaped lamp 11.In embodiment 1, when overlooking, secondary light source 12a is located at outside compared with the two ends of the Y direction of the two ends of the Y direction of the 1st 22a of polarizer 22 and irradiation region LD.
The light orientation of embodiment 1 is same with polarized light illumination device 1 and embodiment, can suppress the deviation of the polarization axle PA of ultraviolet UB1, UB2 in the irradiation region LD of workpiece W, ultraviolet UB1, the UB2 of enough light quantities can be exposed to workpiece W.
[embodiment 2]
Next, the polarized light illumination device 1 for light orientation of the embodiment 2 of embodiment of the present utility model is described based on accompanying drawing.Fig. 5 means the light orientation of the embodiment 2 of the embodiment side view of the schematic configuration of polarized light illumination device.In addition, in Fig. 5, for the part identical with aforementioned embodiments, also description thereof is omitted to mark identical symbol.
In aforementioned embodiments, be provided with one as the bar-shaped lamp 11 of the 1st light source.But, in the utility model, also can as shown in Figure 5, a plurality of bar-shaped lamps 11 as the 1st light source be set.In embodiment 2, be provided with to parallel to each other and devices spaced apart two bar-shaped lamps 11.And, in embodiment 2, a secondary light source 12 in a plurality of secondary light sources 12 is configured in 11, two bar-shaped lamps, two secondary light sources 12 are configured in outside compared with the two ends of the Y direction of two bar-shaped lamps 11 and irradiation region LD, thereby are configured in irradiation region LD in the outer part compared with two bar-shaped lamps 11.In a word, in the utility model, as long as at least one secondary light source 12 in a plurality of secondary light sources 12 is configured in 11, a plurality of bar-shaped lamps.
The light orientation of embodiment 2 with polarized light illumination device 1 and embodiment similarly, can suppress the deviation of the polarization axle PA of ultraviolet UB1, UB2 in the irradiation region LD of workpiece W, ultraviolet UB1, the UB2 of enough light quantities can be exposed to workpiece W.
And, the light orientation of embodiment 2 is with in polarized light illumination device 1, secondary light source 12 is configured in as 11, the bar-shaped lamp of the 1st light source, the deviation that therefore can further suppress the polarization axle PA in the irradiation region LD of workpiece W, can expose to workpiece W by ultraviolet UB1, the UB2 of enough light quantities.
Some embodiments of the present utility model and embodiment are illustrated, but these embodiments and embodiment are only illustration, are not intended to limit the scope of utility model.These embodiments and embodiment can implement with other variety of way, in the scope of purport that does not depart from utility model, can carry out various omissions, replacement, change.These embodiments and embodiment are included in the scope or purport of utility model, are included in equally in the utility model recorded in claims and impartial scope thereof.
Claims (8)
1. a light orientation polarized light illumination device, is characterized in that, comprising:
Light source portion, irradiation ultraviolet radiation; And
Polarizer, have the 1st of being irradiated by described ultraviolet ray and with described the 1st face in opposite directions and penetrate the 2nd of described ultraviolet polarized light,
Described smooth orientation is characterised in that with polarized light illumination device,
Described light source portion comprises:
The 1st light source, irradiates the 1st ultraviolet ray to described the 1st; And
The 2nd light source, described the 2nd light source is configured to: for polarization axle in irradiation region, described polarized light the region large with respect to the difference of reference direction, via described polarizer, irradiate the 2nd ultraviolet ray, described polarized light is from described the 2nd ejaculation corresponding to described the 1st ultraviolet ray.
2. smooth orientation polarized light illumination device according to claim 1, is characterized in that,
Described the 1st light source disposes a plurality of,
Described the 2nd light source is provided with a plurality of, and described at least one, the 2nd light source is disposed between described the 1st light source.
3. smooth orientation polarized light illumination device according to claim 1, is characterized in that,
Described the 2nd light source is configured in described irradiation region in the outer part compared with described the 1st light source.
4. smooth orientation polarized light illumination device according to claim 1, is characterized in that,
Described the 1st light source has the illuminating part of linearity,
Described the 2nd light source forms shortlyer than the illuminating part of described the 1st light source, and described the 2nd light source disposes a plurality of along the length direction of the illuminating part of described the 1st light source.
5. a light orientation polarized light illumination device, is characterized in that, comprising:
Light source portion, irradiation ultraviolet radiation; And
Polarizer, have the 1st of being irradiated by described ultraviolet ray and with described the 1st face in opposite directions and penetrate the 2nd of described ultraviolet polarized light,
Described smooth orientation is characterised in that with polarized light illumination device,
Described light source portion comprises:
The 1st light source, irradiates the 1st ultraviolet ray to described the 1st; And
The 2nd light source, described the 2nd light source is configured to: for the low region of illumination in irradiation region, described polarized light, via described polarizer, irradiate the 2nd ultraviolet ray, described polarized light is from described the 2nd ejaculation corresponding to described the 1st ultraviolet ray.
6. smooth orientation polarized light illumination device according to claim 5, is characterized in that,
Described the 1st light source disposes a plurality of,
Described the 2nd light source is provided with a plurality of, and described at least one, the 2nd light source is disposed between described the 1st light source.
7. smooth orientation polarized light illumination device according to claim 5, is characterized in that,
Described the 2nd light source is configured in described irradiation region in the outer part compared with described the 1st light source.
8. smooth orientation polarized light illumination device according to claim 5, is characterized in that,
Described the 1st light source has the illuminating part of linearity,
Described the 2nd light source forms shortlyer than the illuminating part of described the 1st light source, and described the 2nd light source disposes a plurality of along the length direction of the illuminating part of described the 1st light source.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013064604A JP2014191072A (en) | 2013-03-26 | 2013-03-26 | Polarized light irradiation device |
| JP2013-064604 | 2013-03-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203480169U true CN203480169U (en) | 2014-03-12 |
Family
ID=50228471
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320577519.7U Expired - Lifetime CN203480169U (en) | 2013-03-26 | 2013-09-17 | Polarized light irradiation device for optical alignment |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2014191072A (en) |
| CN (1) | CN203480169U (en) |
| TW (1) | TWI553355B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106125407A (en) * | 2015-05-06 | 2016-11-16 | Wi-A株式会社 | Light alignment apparatus |
| CN109426036A (en) * | 2017-08-28 | 2019-03-05 | 优志旺电机株式会社 | Polarized light illumination device and polarizing light irradiation method |
| CN110888267A (en) * | 2019-11-26 | 2020-03-17 | Tcl华星光电技术有限公司 | Liquid crystal alignment device and operation method thereof |
| WO2020119080A1 (en) * | 2018-12-15 | 2020-06-18 | 深圳市华星光电半导体显示技术有限公司 | Ultraviolet irradiation device used for liquid crystal alignment |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6439351B2 (en) * | 2014-09-26 | 2018-12-19 | 東芝ライテック株式会社 | UV irradiation equipment |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4604661B2 (en) * | 2004-11-05 | 2011-01-05 | ウシオ電機株式会社 | Polarized light irradiation device for photo-alignment |
| WO2007074533A1 (en) * | 2005-12-27 | 2007-07-05 | Hitachi, Displays, Ltd. | Polarized irradiation method for light orientation and device thereof |
| JP4968165B2 (en) * | 2008-04-24 | 2012-07-04 | ウシオ電機株式会社 | Polarized light irradiation device for photo-alignment |
| JP2012203294A (en) * | 2011-03-28 | 2012-10-22 | Ushio Inc | Polarization element unit and polarization light irradiation apparatus |
-
2013
- 2013-03-26 JP JP2013064604A patent/JP2014191072A/en active Pending
- 2013-09-17 CN CN201320577519.7U patent/CN203480169U/en not_active Expired - Lifetime
- 2013-09-18 TW TW102133743A patent/TWI553355B/en not_active IP Right Cessation
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106125407A (en) * | 2015-05-06 | 2016-11-16 | Wi-A株式会社 | Light alignment apparatus |
| CN109426036A (en) * | 2017-08-28 | 2019-03-05 | 优志旺电机株式会社 | Polarized light illumination device and polarizing light irradiation method |
| WO2020119080A1 (en) * | 2018-12-15 | 2020-06-18 | 深圳市华星光电半导体显示技术有限公司 | Ultraviolet irradiation device used for liquid crystal alignment |
| CN110888267A (en) * | 2019-11-26 | 2020-03-17 | Tcl华星光电技术有限公司 | Liquid crystal alignment device and operation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014191072A (en) | 2014-10-06 |
| TW201437697A (en) | 2014-10-01 |
| TWI553355B (en) | 2016-10-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203480169U (en) | Polarized light irradiation device for optical alignment | |
| TWI620889B (en) | Light irradiation device | |
| KR101982845B1 (en) | Light irradiation device | |
| CN103592821B (en) | Novel LED (light-emitting diode) light source system for ultraviolet exposure machine | |
| EP1930745A2 (en) | Lens and backlight unit, liquid crystal display having the same and method thereof | |
| WO2011162323A1 (en) | Led illumination device | |
| JP5282669B2 (en) | Light irradiation device | |
| JP4765433B2 (en) | Ultraviolet irradiation device and light irradiation method | |
| US20150009668A1 (en) | Reflector, illuminator and the use thereof | |
| JP2014013277A (en) | Exposure equipment | |
| CN104100899A (en) | Multi-array LED chip for embodying cut-off line and head lamp having the same | |
| CN104423097A (en) | Polarized light illumination device | |
| CN204044470U (en) | Ultraviolet lamp | |
| KR101110516B1 (en) | Light s0urce f0r exp0sure | |
| CN101262034A (en) | Ellipse LED | |
| TWI558044B (en) | Continuous spectrum generation apparatus and assembling method thereof | |
| CN104272019A (en) | Optical semiconductor lighting device | |
| US20180341154A1 (en) | Light irradiation device, liquid crystal alignment method, and apparatus | |
| CN103105737A (en) | Photolithography apparatus adopting spliced multiple light sources | |
| US9706609B2 (en) | Large area high-uniformity UV source with many small emitters | |
| JP6138705B2 (en) | Lighting device and display device | |
| Kang et al. | Utilization of silicone microspheres: Improving color uniformity and reducing the amount of phosphor used in white light-emitting diodes | |
| CN203705765U (en) | Polarized light irradiation device for optical alignment | |
| JP2007057861A (en) | Optical system for condensing light in square pattern and uv ray irradiation apparatus for liquid crystal panel | |
| US20100033831A1 (en) | Liquid crystal sealing apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140312 |
|
| CX01 | Expiry of patent term |