TW201437697A - Polarization light irradiation apparatus for light alignment - Google Patents

Abstract

A polarized light irradiation apparatus for light alignment that suppresses deviation of polarization axes of a work in a light irradiation zone and irradiates adequate light amount of ultraviolet to the work is provided. The polarized light irradiation apparatus for light alignment of an embodiment includes a light source portion irradiating ultraviolet and a polarization component. The polarization component includes: a first surface, being irradiated by ultraviolet, and a second surface, disposed opposite to the first surface and irradiating a polarized light of ultraviolet. The light source portion includes a bar light and an assistant light source. The bar light irradiates ultraviolet to the first surface. The assistant light source is disposed to irradiate ultraviolet via the polarization component towards an area in the light irradiation zone of the work wherein the polarization axis of the polarized light differs greatly from a reference direction, namely, towards four corners of the light irradiation zone, wherein the polarized light irradiates from the second surface relatively to the ultraviolet.

Description

Polarized light irradiation device

Embodiments of the present invention relate to a polarized light irradiation device for light alignment.

At present, as a technique of a rubbing process which is an alignment process of an alignment film of a liquid crystal panel, a light alignment technique (see, for example, Patent Document 1 and Patent Document 2) is attracting attention. The polarized light irradiation device for light alignment used in the optical alignment technique includes a rod lamp as a linear light source and a grid polarizing element. In such a light-aligning polarizing light irradiation device, ultraviolet rays having a polarization axis in a predetermined direction among ultraviolet rays irradiated by the rod-shaped lamp are passed through a grating polarizing element, and the passing ultraviolet rays are irradiated onto a workpiece or the like to perform alignment. Orientation treatment of the membrane.

Prior art literature

Patent literature

Patent Document 1: Japanese Patent Laid-Open No. 2006-184747

Patent Document 2: Japanese Patent Laid-Open Publication No. 2011-145381

However, in the prior art, it is desirable to suppress the light irradiation region of the workpiece. The deviation of the polarization axis, and ultraviolet light of a sufficient amount of light can be irradiated to the workpiece.

An object of the present invention is to provide a polarized light irradiation device for light alignment, which can suppress variations in polarization axes in a light irradiation region of a workpiece, and can irradiate ultraviolet rays of a sufficient amount of light to the workpiece.

The polarized light irradiation device for light distribution according to the embodiment includes a light source unit that irradiates ultraviolet rays and a polarizing element. The polarizing element has a first surface that is irradiated with the ultraviolet ray, and a second surface that faces the first surface and emits polarized light of the ultraviolet ray. The light source unit includes a first light source and a second light source that irradiate the first surface with the first ultraviolet light. The second light source is disposed to illuminate the second ultraviolet ray via the polarizing element in a region of the light irradiation region where the polarization axis of the polarized light has a large difference from the reference direction, and the polarized light corresponds to The first ultraviolet ray is emitted from the second surface.

The polarized light irradiation device for light distribution according to the embodiment includes a light source unit that irradiates ultraviolet rays and a polarizing element. The polarizing element includes a first surface that is irradiated with the ultraviolet ray, and a second surface that faces the first surface and emits polarized light of the ultraviolet ray, and the light source unit includes a first light source, and the first light source Irradiating the first ultraviolet ray and the second light source, wherein the second light source is disposed to illuminate the second ultraviolet ray via the polarizing element in a region of the light irradiation region where the illuminance of the polarized light is low, The polarized light is emitted from the second surface in accordance with the first ultraviolet ray.

The first light source in the polarized light irradiation device of the optical alignment of the embodiment A plurality of the second light sources are provided, and at least one of the second light sources is disposed between the first light sources.

In the light-aligning polarized light irradiation device of the embodiment, the second light source is disposed outside the light-irradiating region than the first light source.

In the polarized light irradiation device of the embodiment, the first light source has a linear light-emitting portion, and the second light source is formed shorter than a light-emitting portion of the first light source, and the second light source is along A plurality of light-emitting portions of the first light source are arranged in the longitudinal direction.

(effect of utility model)

According to the present invention, it is possible to provide a polarized light irradiation device for light alignment, which can suppress variations in polarization axes in a light irradiation region of a workpiece, and can irradiate ultraviolet rays of a sufficient amount of light to the workpiece.

1‧‧‧Light aligning device for polarized light

10‧‧‧Light source department

11‧‧‧ rod light (first light source)

12, 12a‧‧‧Auxiliary light source (2nd light source)

13‧‧‧Reflective material

20‧‧ ‧Polarization

21‧‧‧Box components

22‧‧‧Polarizing element

22a‧‧‧1st

22b‧‧‧2nd

LD‧‧‧Lighting area

PA, PA1, PA2‧‧‧ polarization axis

RD‧‧‧ benchmark direction

UA1‧‧‧UV (1st UV)

UA2‧‧‧UV (2nd UV)

UB1, UB2‧‧‧ ultraviolet (polarized light)

W‧‧‧Workpiece

Y1‧‧‧ arrow

FIG. 1 is a perspective view showing a schematic configuration of a polarized light irradiation device for optical alignment according to an embodiment.

FIG. 2 is a side view showing a schematic configuration of a polarized light irradiation device for optical alignment according to an embodiment.

3 is a plan view showing a schematic configuration of a polarized light irradiation device for optical alignment according to an embodiment.

FIG. 4 is a plan view showing a schematic configuration of a polarized light irradiation device for optical alignment according to a first modification of the embodiment.

FIG. 5 is a side view showing a schematic configuration of a polarized light irradiation device for optical alignment according to a second modification of the embodiment.

In the embodiment described below and the polarized light irradiation device 1 for optical alignment according to the first modification, the light source unit 10 and the polarizing element 22 that irradiate the ultraviolet rays UA1 and UA2 are provided. The polarizing element 22 has a first surface 22a that is irradiated with ultraviolet rays UA1 and UA2, and a second surface 22b that emits ultraviolet rays UB1 and UB2 which are polarized light of the ultraviolet rays UA1 and UA2, which face the first surface 22a. The light source unit 10 includes a rod lamp 11 and an auxiliary light source 12. The rod lamp 11 irradiates the first surface 22a with ultraviolet rays UA1. The auxiliary light source 12 is configured to illuminate the ultraviolet ray UA2 via the polarizing element 22 with respect to the four corners of the light irradiation region LD which is a region where the polarization axis PA1 of the ultraviolet ray UB1 is larger than the reference direction RD in the light irradiation region LD of the workpiece W. The ultraviolet ray UB1 is emitted from the second surface 22b in accordance with the ultraviolet ray UA1.

Further, in the embodiment described below and the polarized light irradiation device 1 for optical alignment according to the first modification, the light source unit 10 and the polarizing element 22 that irradiate the ultraviolet rays UA1 and UA2 are provided. The polarizing element 22 has a first surface 22a that is irradiated with ultraviolet rays UA1 and UA2, and a second surface 22b that emits ultraviolet rays UB1 and UB2 which are polarized light of the ultraviolet rays UA1 and UA2, which face the first surface 22a. The light source unit 10 includes a rod lamp 11 and an auxiliary light source 12. The rod lamp 11 irradiates the first surface 22a with ultraviolet rays UA1. The auxiliary light source 12 is disposed so that the ultraviolet ray UA2 is irradiated to both ends of the first surface 22a of the first surface 22a in which the illuminance of the ultraviolet ray UA1 is low in the Y-axis direction.

Further, in the polarized light irradiation device 1 for optical alignment according to the second modification of the embodiment to be described below, a plurality of the rod lamps 11 are disposed, a plurality of auxiliary light sources 12 are provided, and at least one auxiliary light source 12 is disposed in the 11 bars.

Further, in the polarized light irradiation device 1 for optical alignment according to the second modification of the embodiment to be described below, the auxiliary light source 12 is disposed outside the light irradiation region LD than the rod lamp 11.

Further, in the polarized light irradiation device 1 for optical alignment according to the first modification of the embodiment to be described below, the rod-shaped lamp 11 has a linear light-emitting portion, and the auxiliary light source 12 is formed shorter than the light-emitting portion of the rod-shaped lamp 11, and A plurality of auxiliary light sources 12 are arranged along the longitudinal direction of the light-emitting portion of the rod-shaped lamp 11.

[Embodiment]

Next, a polarized light irradiation device 1 for light alignment according to an embodiment of the present invention will be described based on the drawings. 1 is a perspective view showing a schematic configuration of a polarized light irradiation device for optical alignment according to an embodiment, and FIG. 2 is a side view showing a schematic configuration of a polarized light irradiation device for optical alignment according to an embodiment, and FIG. 3 is a view showing a light alignment of the embodiment. A plan view of a schematic structure of a device irradiated with polarized light.

The light-aligning polarized light irradiation device 1 of the embodiment shown in Fig. 1 is a surface of the workpiece W (shown by a two-dot chain line in Fig. 1), and is irradiated with a predetermined reference direction RD (a little chain line in Fig. 3). Shown is a device of ultraviolet rays UB1, UB2 (shown in Figure 2) of a parallel polarization axis PA (shown in Figure 3, also referred to as the direction of vibration). The light-aligning polarized light irradiation device 1 of the embodiment is used, for example, in the production of an alignment film of a liquid crystal panel or an alignment film of a viewing angle compensation film. Irradiation to the surface of the workpiece W The reference direction RD of the polarization axis PA of the ultraviolet rays UB1 and UB2 is appropriately set in accordance with the structure, use, or required specifications of the workpiece W. Hereinafter, the width direction of the workpiece W is referred to as an X-axis direction, the direction orthogonal to the X-axis direction, the longitudinal direction of the workpiece W is referred to as a Y-axis direction, and the direction orthogonal to the Y-axis direction and the X-axis direction is referred to as a Z-axis direction.

As shown in FIGS. 1 and 2, the light-aligning polarized light irradiation device 1 includes a light source unit 10 that irradiates ultraviolet rays UA1 and UA2, and the ultraviolet rays UA1 and UA2 vibrate in all directions, and a polarizing unit 20.

The polarizing unit 20 derives the ultraviolet rays UB1 and UB2 of the polarization axis PA (corresponding to the polarized light of the ultraviolet rays UA1 and UA2), and the ultraviolet rays UB1 and UB2 of the polarization axis PA are ultraviolet rays UA1 which are irradiated by the light source unit 10 and vibrate in the same direction in all directions. The UA 2 is formed only by vibrating in the reference direction RD. Further, the polarization axes PA of the ultraviolet rays UA1, UA2, UB1, and UB2 refer to the vibration directions of the electric field and the magnetic field of the ultraviolet rays UA1, UA2, UB1, and UB2.

The polarizing unit 20 is disposed to face the light source unit 10 and is irradiated with ultraviolet rays UA1 and UA2 from the light source unit 10. As shown in FIG. 1 , the polarizing unit 20 includes an elongated frame-shaped frame member 21 and a polarizing element 22 housed in the frame member 21 . The longitudinal direction of the frame member 21 is parallel to the X-axis direction.

As shown in FIG. 2, the polarizing element 22 has the first surface 22a, the ultraviolet rays UA1 and UA2, the second surface 22b, and the ultraviolet rays UB1 and UB2 which are opposite to the first surface 22a and emit polarized light of the ultraviolet rays UA1 and UA2. The polarizing element 22 is a grating polarizing element in which a plurality of linear electric conductors (for example, metal wires such as chromium or aluminum alloy) are arranged at equal intervals and in parallel on a substrate such as quartz glass. Conductance The longitudinal direction of the body is orthogonal to the reference direction RD. Preferably, the pitch of the electric conductor is 1/3 or less of the wavelength of the ultraviolet rays UA1 and UA2 irradiated from the light source unit 10. The polarizing element 22 reflects most of the ultraviolet rays of the polarization axis parallel to the longitudinal direction of the electric conductor of the ultraviolet rays UA1 and UA2 irradiated from the light source unit 10, and ultraviolet rays of the polarization axis PA orthogonal to the longitudinal direction of the electric conductor. UB1 and UB2 pass. Further, in the present embodiment, the longitudinal direction of the electric conductor of the polarizing element 22 is arranged in parallel with the Y-axis direction, and the polarizing element 22 passes the ultraviolet rays UB1 and UB2 of the polarization axis PA parallel to the X-axis direction. That is, in the present embodiment, the reference direction RD is parallel to the X-axis direction.

The light source unit 10 includes a rod-shaped lamp 11 (corresponding to a first light source) and a plurality of auxiliary light sources 12 (corresponding to a second light source). The rod lamp 11 is, for example, a tube type lamp such as a high pressure mercury lamp or a metal halide lamp, and has at least a linear light emitting portion. The longitudinal direction of the light-emitting portion of the rod-shaped lamp 11 is parallel to the X-axis direction, and the length of the light-emitting portion of the rod-shaped lamp 11 is longer than the width of the workpiece W. The rod-shaped lamp 11 is irradiated with, for example, ultraviolet ray UA1 (corresponding to the first ultraviolet ray) having a wavelength of 200 nm to 400 nm from the linear light-emitting portion. The ultraviolet ray UA1 irradiated by the rod lamp 11 is an ultraviolet ray having various polarization axis components, that is, so-called non-polarized ultraviolet ray. In the present invention, as the first light source, for example, a light emitting diode (LED) chip or a laser diode capable of irradiating ultraviolet rays UA1 having a wavelength of 200 nm to 400 nm can be used. A small lamp such as an organic electroluminescence (EL) element is arranged in a straight line.

In the present embodiment, the rod lamp 11 is provided with one and is disposed in the polarizing element. 22 and the top of the workpiece W. Above the rod lamp 11, a reflecting material 13 is provided. A part of the ultraviolet ray UA1 irradiated by the rod lamp 11 is directly irradiated onto the first surface 22a of the polarizing element 22, and the remaining part is reflected by the reflecting material 13 and is irradiated onto the first surface 22a of the polarizing element 22. As the reflecting material 13, a parallel type parabolic mirror, a condensing type elliptical mirror, a mirror of another shape, or the like can be used. The rod lamp 11 irradiates the polarizing element 22 of the polarizing portion 20 with the ultraviolet ray UA1, and the light illuminating region LD (shown in FIG. 3) on the surface of the workpiece W is irradiated with the ultraviolet ray UB1 by the polarizing element 22 of the polarizing portion 20.

Here, immediately below the rod-shaped lamp 11, as shown in FIG. 2, the ultraviolet ray UA1 is incident on the first surface 22a at an angle perpendicular or nearly perpendicular to the first surface 22a, even if it is not directly below the rod-shaped lamp 11, In the center of the X-axis direction of the first surface 22a, the ultraviolet ray UA1 is also incident in parallel with the Y-axis direction. Therefore, in the center of the light irradiation region LD in the Y-axis direction and the center in the X-axis direction, as shown in FIG. 3, the difference in the polarization axis PA of the ultraviolet ray UB1 corresponding to the ultraviolet ray UA1 with respect to the reference direction RD (the angle formed) very small.

However, in the four corners of the light irradiation region LD at both ends in the Y-axis direction and the X-axis direction of the light-irradiating region LD, the ultraviolet ray UA1 is obliquely incident on the first surface 22a so as to intersect with both the Y-axis direction and the X-axis direction. Therefore, compared with the polarization axis PA of the ultraviolet ray UB1 in the vicinity of the center of the light irradiation region LD in the Y-axis direction and the X-axis direction, the light irradiation region LD is the both ends in the Y-axis direction and the X-axis direction of the light irradiation region LD. At the four corners, the polarization axis PA1 of the ultraviolet ray UB1 (shown by a broken line in FIG. 3) is inclined from the reference direction RD. In other words, the polarization axis PA1 of the ultraviolet ray UB1 emitted from the second surface 22b corresponding to the ultraviolet ray UA1 from the rod lamp 11 is relative to the reference direction RD. The difference is that the four corners of the light irradiation region LD at both ends in the Y-axis direction and the X-axis direction of the light irradiation region LD become large. In this way, the four corners of the light irradiation region LD in the Y-axis direction and the X-axis direction, that is, the four corners of the light-irradiating region LD, are emitted from the second surface 22b in the light-irradiating region LD corresponding to the ultraviolet ray UA1 from the rod-shaped lamp 11. A region where the polarization axis PA1 of the ultraviolet ray UB1 is large with respect to the reference direction RD.

In addition, the illuminance of the ultraviolet ray UA1 from the rod-shaped lamp 11 at both ends of the first surface 22a in the Y-axis direction is lower than the center of the first surface 22a of the polarizing element 22 in the Y-axis direction. In this way, both ends of the first surface 22a in the Y-axis direction are regions in which the illuminance of the ultraviolet ray UA1 from the rod-shaped lamp 11 in the first surface 22a is low.

The auxiliary light source 12 is disposed to illuminate the ultraviolet rays via the polarizing element 22 at both ends of the Y-axis direction of the first surface 22a and the Y-axis direction of the light-irradiating region LD and the four corners of the light-irradiating region LD at both ends in the X-axis direction. UA2 (equivalent to the second ultraviolet light). Similarly to the rod-shaped lamp 11, the auxiliary light source 12 is a tubular lamp such as a high-pressure mercury lamp or a metal halide lamp, and has at least a linear light-emitting portion, and the longitudinal direction of the linear light-emitting portion is parallel to the X-axis direction, and The length of the light emitting portion is longer than the width of the workpiece W. The auxiliary light source 12 illuminates, for example, the ultraviolet ray UA2 having a wavelength of 200 nm to 400 nm from the linear light-emitting portion. The ultraviolet ray UA2 irradiated by the auxiliary light source 12 is ultraviolet light having various polarization axis components, that is, so-called non-polarized ultraviolet light. For the light source of the auxiliary light source 12, a light source different from the rod-shaped light source 11 may be used, for example, a light source of at least one of a light-emitting method, a lamp length, a light-emitting length, a lamp diameter, a light distribution, and an electrode shape. Further, the lighting condition or the lighting method of the auxiliary light source 12 may be different from the case of the rod-shaped light source 11. Preferably, the wave of light emitted from the rod-shaped light source 11 The band of the light emitted from the segment and the auxiliary light source 12 is relatively close in the wavelength band used for the light distribution process. For example, in the use of the ultraviolet ray UA1 having a wavelength of 365 nm, an ultrahigh pressure mercury lamp having a lamp length shorter than the rod light source 11 or the like can be used as the auxiliary light source 12. Further, a light source that is an ultraviolet ray irradiation device that combines an ultrahigh pressure mercury lamp, an elliptical mirror, a mirror, or the like may be used as the auxiliary light source 12. Further, the ultrahigh pressure mercury lamp includes a translucent airtight container formed of a vibrating quartz glass or the like and having a discharge space formed therein, and a pair of electrodes housed in a translucent airtight container. Further, in the use mainly using ultraviolet UA1 having a wavelength of 254 nm, a low-pressure mercury lamp having an emission spectrum having a wavelength of 254 nm can be used as the auxiliary light source 12. Further, in the present invention, as the second light source, for example, an LED chip capable of irradiating the ultraviolet ray UA1 having a wavelength of 200 nm to 400 nm, a laser diode, or a small lamp such as an organic EL may be disposed in a linear shape.

In the present embodiment, the auxiliary light source 12 is provided as shown in FIGS. 2 and 3, and is disposed above the polarizing element 22 and the workpiece W in parallel with the rod-shaped lamp 11. The auxiliary light source 12 is disposed outside the rod-shaped lamp 11 in the Y-axis direction of the light-irradiating region LD. The auxiliary light source 12 may be disposed at a position equal to the rod-shaped lamp 11 from the workpiece W in the Z-axis direction, or may be disposed at a position different from the rod-shaped lamp 11 in the Z-axis direction from the workpiece W. . The position of the auxiliary light source 12 in the Z-axis direction and the Y-axis direction may be appropriately selected as needed.

Further, in the present embodiment, as shown in FIGS. 2 and 3, the auxiliary light source 12 is smaller than the light irradiation region LD and the first surface 22a of the polarizing element 22 in plan view. Although it is arrange|positioned by the both ends of the axial direction of the illuminating area LD and the polarizing element 22, and the both ends of the 1st surface 22a of the polarizing element 22 in the Y-axis direction. As shown in FIG. 2, the auxiliary light source 12 is disposed to irradiate the ultraviolet ray UA2 to both ends of the light irradiation region LD and the first surface 22a of the polarizing element 22 in the Y-axis direction. The auxiliary light source 12 irradiates the both ends of the first surface 22a in the Y-axis direction with the ultraviolet ray UA2, and irradiates the both ends of the light irradiation region LD in the Y-axis direction with the ultraviolet ray UA2. When the auxiliary light source 12 is disposed at a position equal to the rod-shaped lamp 11 from the workpiece W, it is preferable that the auxiliary light source 12 is disposed in the Y-axis direction from the light irradiation region LD in plan view. The distance between the ends of the rod is equal to the position of the rod lamp 11. Further, in the present embodiment, the auxiliary light source 12 is disposed at a position equal to the rod-shaped lamp 11 at a distance in the Z-axis direction from the workpiece W, and the auxiliary light source 12 is disposed in the Y from the light irradiation region LD in plan view. The distance between the both ends of the axial direction is equal to the position of the rod lamp 11.

In the light-aligning polarized light irradiation device 1 of the embodiment, the workpiece W is transported in the direction of the arrow Y1 parallel to the Y-axis direction, and the ultraviolet rays UA1 and UA2 are irradiated from the rod-shaped lamp 11 and the auxiliary light source 12. Then, the ultraviolet rays UA1 and UA2 are irradiated onto the first surface 22a, and the ultraviolet rays UB1 and UB2 having the polarization axis PA parallel to the reference direction RD passing through the polarizing element 22 are emitted from the second surface 22b toward the light irradiation region LD on the surface of the workpiece W.

At this time, the ultraviolet rays emitted from the second surface 22b corresponding to the ultraviolet ray UA1 from the rod lamp 11 at the four corners of the light irradiation region LD at both ends in the Y-axis direction and the X-axis direction of the light irradiation region LD on the surface of the workpiece W Polarization axis PA1 of UB1 (figure The difference shown in the dotted line in 3 is large with respect to the reference direction RD (inclination with respect to the reference direction RD). Further, at the four corners of the light irradiation region LD at both ends in the Y-axis direction and the X-axis direction of the light irradiation region LD on the surface of the workpiece W, the ultraviolet ray UB2 emitted from the second surface 22b corresponding to the ultraviolet ray UA2 from the auxiliary light source 12 The polarization axis PA2 (shown by the one-dot chain line in FIG. 3) is large (the inclination with respect to the reference direction RD) with respect to the reference direction RD.

At this time, in the present embodiment, the auxiliary light source 12 is disposed at a position equal to the rod-shaped lamp 11 at a distance in the Z-axis direction from the workpiece W, and the auxiliary light source 12 is disposed in the light-irradiating region LD in plan view. The distance between the both ends of the Y-axis direction is equal to the position of the rod-shaped lamp 11. Therefore, in the four directions of the light irradiation region LD at both ends in the Y-axis direction and the X-axis direction of the light irradiation region LD, the polarization axis PA1 of the ultraviolet ray UB1 and the polarization axis PA2 of the ultraviolet ray UB2 are oppositely inclined with respect to each other with respect to the reference direction RD. And the inclination with respect to the reference direction RD is equal. Therefore, the inclination of the polarization axis PA1 of the ultraviolet ray UB1 emitted from the second surface 22b corresponding to the ultraviolet ray UA1 cancels the inclination of the polarization axis PA2 of the ultraviolet ray UB2 emitted from the second surface 22b corresponding to the ultraviolet ray UA2, and the workpiece can be made The polarization axis PA of the ultraviolet ray UB at the four corners of the light irradiation region LD at both ends in the Y-axis direction and the X-axis direction of the light irradiation region LD on the W surface is parallel to the reference direction RD as indicated by a solid line in FIG.

In the center of the Y-axis direction of the light-irradiated area LD on the surface of the workpiece W, the ultraviolet ray UB1 emitted from the second surface 22b corresponding to the ultraviolet ray UA1 from the rod-shaped lamp 11 is irradiated, and the light-irradiated area on the surface of the workpiece W is irradiated. Both ends of the LD in the Y-axis direction are corresponding to the ultraviolet ray UA2 from the auxiliary light source 12 from the second The ultraviolet ray UB2 emitted from the surface 22b is irradiated.

In this way, the light-aligning light illuminating device 1 is irradiated with the ultraviolet light UB1 of the polarization axis PA parallel to the X-axis direction with respect to the light irradiation region LD on the surface of the workpiece W (shown by the two-dot chain line in FIG. 1). , UB2, for the alignment treatment of the alignment film.

The polarized light irradiation device 1 for light distribution according to the embodiment of the above-described configuration includes the auxiliary light source 12, which is the four corners of the light irradiation region LD at both ends in the Y-axis direction and the X-axis direction of the light-irradiating region LD, and the first Both ends of the surface 22a in the Y-axis direction are irradiated with ultraviolet rays UA2. Therefore, the polarized light irradiation device 1 irradiates the four corners of the light irradiation region LD in the Y-axis direction and the X-axis direction, that is, the ultraviolet ray UB2 corresponding to the ultraviolet ray UA2 from the auxiliary light source 12.

Further, the auxiliary light source 12 is disposed at a position equal to the rod-shaped lamp 11 at a distance in the Z-axis direction from the workpiece W, and the auxiliary light source 12 is disposed at both ends in the Y-axis direction from the light-irradiating region LD in plan view. The calculated distance is equal to the position of the rod lamp 11. Therefore, both the Y-axis direction and the X-axis direction of the light-irradiating region LD, that is, the polarization axis PA1 of the ultraviolet ray UB1 and the polarization axis PA2 of the ultraviolet ray UB2 at the four corners of the light-irradiating region LD are inclined opposite to each other with respect to the reference direction RD. And the inclination with respect to the reference direction RD is equal. Therefore, in the four directions of the light irradiation region LD at both ends in the Y-axis direction and the X-axis direction of the light irradiation region LD, the inclination of the polarization axis PA1 of the ultraviolet UB1 cancels the inclination of the polarization axis PA2 of the ultraviolet UB2, and the ultraviolet ray UB1 can be made. The polarization axis PA of UB2 is shown by the solid line in FIG. In the reference direction RD, it is possible to suppress the inclination of the polarization axis PA of the ultraviolet rays UB1 and UB2 from the reference direction RD. Therefore, variations in the polarization axes PA of the ultraviolet rays UB1 and UB2 in the light irradiation region LD can be suppressed.

Further, since both ends of the first surface 22a in the Y-axis direction are irradiated with the ultraviolet ray UA2 from the auxiliary light source 12, both ends of the light-irradiating region LD in the Y-axis direction can be irradiated with the ultraviolet ray UA2 corresponding to the auxiliary light source 12. UV UB2. Therefore, it is possible to suppress the number of the auxiliary light sources 12 to the minimum and to irradiate the workpieces W with the ultraviolet rays UB1 and UB2 of a sufficient amount of light. Therefore, the polarized light irradiation device 1 for light alignment can suppress variations in the polarization axes PA of the ultraviolet rays UB1 and UB2 in the light irradiation region LD of the workpiece W, and can irradiate the workpieces W with the ultraviolet rays UB1 and UB2 having a sufficient amount of light.

[Modification 1]

Next, a polarized light irradiation device 1 for optical alignment according to a first modification of the embodiment of the present invention will be described with reference to the drawings. FIG. 4 is a plan view showing a schematic configuration of a polarized light irradiation device for optical alignment according to a first modification of the embodiment. In FIG. 4, the same portions as those in the above-described embodiments are denoted by the same reference numerals, and their description is omitted.

In the foregoing embodiment, the auxiliary light source 12 having the same structure as the rod lamp 11 is used. However, in the present invention, as long as the inclination of the polarization axes PA of the ultraviolet rays UB1 and UB2 irradiated to both ends of the light irradiation region LD in the Y-axis direction can be suppressed, the length, the input power, and the like can be appropriately selected as shown in FIG. The auxiliary light source 12a is used in a shape (for example, a spherical shape) or the like. In the first modification shown in FIG. 4, a rod-shaped lamp formed shorter than the light-emitting portion of the rod-shaped lamp 11 is used as the auxiliary light source 12a, which corresponds to illumination. Four auxiliary light sources 12a are provided at the four corners of the shot area LD. In the first modification, the auxiliary light source 12a is disposed along the longitudinal direction of the light-emitting portion of the rod-shaped lamp 11 (two in the example shown in FIG. 4). In the first modification, the auxiliary light source 12a is provided on both sides of the first surface 22a of the polarizing element 22 in the Y-axis direction and both ends of the light irradiation region LD in the Y-axis direction.

Similarly to the embodiment, the polarized light irradiation device 1 for the light distribution of the first modification can suppress variations in the polarization axes PA of the ultraviolet rays UB1 and UB2 in the light irradiation region LD of the workpiece W, and can irradiate the ultraviolet rays UB1 and UB2 having a sufficient amount of light to the same. Workpiece W.

[Modification 2]

Next, a polarized light irradiation device 1 for optical alignment according to a second modification of the embodiment of the present invention will be described with reference to the drawings. FIG. 5 is a side view showing a schematic configuration of a polarized light irradiation device for optical alignment according to a second modification of the embodiment. In FIG. 5, the same portions as those in the above-described embodiments are denoted by the same reference numerals, and their description is omitted.

In the above embodiment, a rod-shaped lamp 11 as a first light source is provided. However, in the present invention, as shown in FIG. 5, a plurality of rod-shaped lamps 11 as the first light source may be provided. In the second modification, two rod-shaped lamps 11 are provided in parallel with each other and at intervals. Further, in the second modification, one of the plurality of auxiliary light sources 12 is disposed between the two rod lamps 11, and the two auxiliary light sources 12 are in the Y-axis direction of the two rod lamps 11 and the light irradiation region LD. The both ends are disposed on the outer side, and are disposed outside the light irradiation region LD than the two rod lamps 11. In short, in the present invention, It suffices that at least one of the plurality of auxiliary light sources 12 is disposed between the plurality of rod lamps 11.

In the polarized light irradiation device 1 for the optical alignment according to the second modification, the variation of the polarization axes PA of the ultraviolet rays UB1 and UB2 in the light irradiation region LD of the workpiece W can be suppressed, and the ultraviolet rays UB1 and UB2 having a sufficient amount of light can be irradiated. To the workpiece W.

Further, in the polarized light irradiation device 1 for optical alignment according to the second modification, since the auxiliary light source 12 is disposed between the rod lamps 11 as the first light source, the polarization axis PA in the light irradiation region LD of the workpiece W can be further suppressed. The deviation can illuminate the workpiece W with more sufficient amounts of ultraviolet rays UB1, UB2.

The embodiments and the modifications of the present invention have been described, but the embodiments and the modifications are merely illustrative and are not intended to limit the scope of the invention. The embodiments and the modifications can be implemented in various other forms, and various omissions, substitutions and changes can be made without departing from the scope of the invention. The embodiments and the modifications are intended to be included within the scope and spirit of the invention, and are intended to be included within the scope of the invention.

1‧‧‧Light aligning device for polarized light

10‧‧‧Light source department

11‧‧‧ rod light (first light source)

12‧‧‧Auxiliary light source (2nd light source)

13‧‧‧Reflective material

20‧‧ ‧Polarization

21‧‧‧Box components

22‧‧‧Polarizing element

22a‧‧‧1st

22b‧‧‧2nd

LD‧‧‧Lighting area

UA1‧‧‧UV (1st UV)

UA2‧‧‧UV (2nd UV)

UB1, UB2‧‧‧ ultraviolet (polarized light)

W‧‧‧Workpiece

Y1‧‧‧ arrow

Claims (8)

A polarized light irradiation device for light alignment, comprising: a light source unit that emits ultraviolet light; and a polarizing element having a first surface irradiated with the ultraviolet light and a polarized light that is opposite to the first surface and emits the ultraviolet light In the polarized light irradiation device according to the second aspect, the light source unit includes: a first light source that irradiates the first surface with the first ultraviolet ray; and a second light source that is disposed in the second light source a region in which a difference in polarization axis of the polarized light with respect to a reference direction is large in a light irradiation region, and the second ultraviolet ray is irradiated via the polarizing element, wherein the polarized light corresponds to the first ultraviolet ray The second surface is emitted. The polarized light irradiation device for optical alignment according to claim 1, wherein a plurality of the first light sources are disposed, a plurality of the second light sources are provided, and at least one of the second light sources is disposed in the first 1 between the light sources. The polarized light irradiation device for optical alignment according to claim 1, wherein the second light source is disposed outside the light irradiation region than the first light source. The polarized light irradiation device for optical alignment according to any one of claims 1 to 3, wherein the first light source has a linear light-emitting portion. The second light source is formed shorter than the light emitting portion of the first light source, and the second light source is disposed along the longitudinal direction of the light emitting portion of the first light source. A polarized light irradiation device for light alignment, comprising: a light source unit that emits ultraviolet light; and a polarizing element having a first surface irradiated with the ultraviolet light and a polarized light that is opposite to the first surface and emits the ultraviolet light In the polarized light irradiation device according to the second aspect, the light source unit includes: a first light source that irradiates the first surface with the first ultraviolet ray; and a second light source that is disposed in the second light source The second ultraviolet ray is irradiated to the region of the light irradiation region where the illuminance of the polarized light is low, and the polarized light is emitted from the second surface in response to the first ultraviolet ray. The polarized light irradiation device for optical alignment according to claim 5, wherein a plurality of the first light sources are disposed, a plurality of the second light sources are provided, and at least one of the second light sources is disposed in the first 1 between the light sources. The polarized light irradiation device for optical alignment according to claim 5, wherein the second light source is disposed outside the light irradiation region than the first light source. The polarized light irradiation device for optical alignment according to any one of claims 5 to 5, wherein the first light source has a linear light-emitting portion. The second light source is formed shorter than the light emitting portion of the first light source, and the second light source is disposed along the longitudinal direction of the light emitting portion of the first light source.