TWI490611B - Light directed with polarized light - Google Patents
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- TWI490611B TWI490611B TW098104059A TW98104059A TWI490611B TW I490611 B TWI490611 B TW I490611B TW 098104059 A TW098104059 A TW 098104059A TW 98104059 A TW98104059 A TW 98104059A TW I490611 B TWI490611 B TW I490611B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
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- Engineering & Computer Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Polarising Elements (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Description
本發明是有關於液晶面板的配向膜,或將所定波長的偏光光予以照射於視野角補償薄膜的配向層等而進行配向的光配向用偏光光照射裝置,尤其是,關於組合線狀光源的棒狀燈與線狀格子型偏光元件的光配向用偏光光照射裝置。The present invention relates to an alignment film for a liquid crystal panel, or a polarized light irradiation device for aligning light having a predetermined wavelength of polarized light applied to an alignment layer of a viewing angle compensation film, and more particularly, relating to a combined linear light source. A polarized light irradiation device for light alignment of a rod-shaped lamp and a linear lattice-type polarizing element.
近年來,有關於液晶面板的配向膜,或視野角補償薄膜的配向處理,成為採用著利用將所定波長的偏光光照射在配向膜進行配向被稱為光配向的技術。In recent years, an alignment film of a liquid crystal panel or an alignment treatment of a viewing angle compensation film has been used, and a technique of aligning polarized light having a predetermined wavelength on an alignment film is referred to as photoalignment.
以下,將設置利用上述光進行配向的配向膜成配向層的薄膜總稱為光配向膜。光配向膜是與液晶面板的大型化之同時成為大面積化(例如一邊為2m以上的四方形),隨著此,將偏光光照射於光配向膜的偏光光照射裝置也成為大型化。Hereinafter, a film in which an alignment film provided by the above-described light is aligned as an alignment layer is collectively referred to as a photo-alignment film. In the light-aligning film, the size of the liquid crystal panel is increased (for example, a square shape of 2 m or more), and the polarized light irradiation device that irradiates the polarized light to the photo-alignment film is also increased in size.
近年來,為了對此種大面積的光配向膜進行光配向,提案一種組合棒狀燈與具有線狀格子狀的格子的偏光元件(以下,稱為線狀格子型偏光元件)的光照射裝置(例如參照專利文獻1或專利文獻2)。In recent years, in order to perform light alignment of such a large-area light alignment film, a light irradiation device that combines a rod-shaped lamp and a polarizing element having a linear lattice-like lattice (hereinafter referred to as a linear lattice-type polarizing element) has been proposed. (For example, refer to Patent Document 1 or Patent Document 2).
在光配向膜用的偏光光照射裝置中,棒狀燈時是可製作發光長較長者。所以,使用具備因應於配向膜的寬度的發光長的棒狀燈,若一面照射來自該燈的光,一面將配向 膜朝正交於燈的長度方向的方向移動,則可將廣泛面積的配向膜以較短時間進行光配向處理。In the polarized light irradiation device for a light alignment film, when the rod-shaped lamp is used, it is possible to produce a longer light emission. Therefore, a rod-shaped lamp having a long light emission corresponding to the width of the alignment film is used, and when the light from the lamp is irradiated, the alignment is performed. When the film is moved in a direction orthogonal to the longitudinal direction of the lamp, the alignment film of a wide area can be subjected to photoalignment treatment in a short time.
在第8圖,表示組合線狀光源的棒狀燈與線狀格子型偏光元件的偏光光照射裝置的構成例。Fig. 8 shows an example of the configuration of a polarized light irradiation device that combines a rod-shaped lamp of a linear light source and a linear lattice-type polarizing element.
在同圖中,光配向膜的工件40是例如視野角補償薄膜的帶狀的長度工件,由送出輥R1送出,朝圖中箭號方向搬運,如下述地利用偏光光照射被光配向處理,而利用捲取輥R2被捲取。In the same figure, the workpiece 40 of the optical alignment film is, for example, a strip-shaped workpiece having a viewing angle compensation film, which is sent by the delivery roller R1 and conveyed in the direction of the arrow in the figure, and is irradiated by the polarized light as follows. The take-up roll R2 is taken up.
偏光光照射裝置的光照射部20是具備:放射光配向處理所必需的波長的光(紫外線)的棒狀燈21,例如高壓水銀燈或在水銀加上其他金屬的金屬鹵化物燈,及將來自棒狀燈21的紫外線朝工件40反射而聚光的聚光鏡22。如上述地,棒狀燈21的長度,是使用發光部具備對應於正交於工件40的搬運方向的方向的寬度的長度者。光照射部20是燈21的長度方向配置成工件40的寬度方向(對於搬運方向為正交方向)。The light-irradiating portion 20 of the polarized light irradiation device is a rod-shaped lamp 21 including light of a wavelength (ultraviolet light) necessary for the radiation-aligning process, for example, a high-pressure mercury lamp or a metal halide lamp in which mercury is added to other metals, and The ultraviolet ray of the rod-shaped lamp 21 is reflected toward the workpiece 40 to condense the condensing mirror 22. As described above, the length of the rod-shaped lamp 21 is a length in which the light-emitting portion has a width corresponding to a direction orthogonal to the conveyance direction of the workpiece 40. The light irradiation unit 20 is disposed such that the longitudinal direction of the lamp 21 is in the width direction of the workpiece 40 (the direction orthogonal to the conveyance direction).
在光照射部20的光出射側,設有偏光元件的線狀格子型偏光元件10。來自光照射部20的光是利用線狀格子型偏光元件10被偏光,被照射於被搬運在光照射部20下的工件40,進行著光配向處理。A linear lattice-type polarizing element 10 having a polarizing element is provided on the light emitting side of the light-irradiating portion 20. The light from the light-irradiating portion 20 is polarized by the linear lattice-type polarizing element 10, and is irradiated onto the workpiece 40 conveyed under the light-irradiating portion 20, and is subjected to a light alignment process.
針對於線狀格子型偏光元件,例如在專利文獻3或專利文獻4詳細地表示。The linear lattice-type polarizing element is shown in detail in, for example, Patent Document 3 or Patent Document 4.
在第9圖是表示線狀格子型偏光元件的概略的構造。Fig. 9 is a view showing a schematic structure of a linear lattice-type polarizing element.
線狀格子型偏光元件10是在透射欲偏光的光的波長 (光配向時,是進行光配向所必需的紫外線的波長)的基板(例如石英)10b的表面,以間距P的等間隔平行地配置長度比寬度還要長的複數直線狀電性導體(例如鉻或鋁等的金屬線,以下稱為柵極10a)者。The linear lattice-type polarizing element 10 is at the wavelength of light that transmits the light to be polarized (On the surface of a substrate (for example, quartz) 10b (the wavelength of ultraviolet rays necessary for light alignment), a plurality of linear electric conductors having a length longer than the width are arranged in parallel at equal intervals of the pitch P (for example, A metal wire such as chromium or aluminum is hereinafter referred to as a gate electrode 10a).
又,基本上,若將柵極10a的間距P變狹窄,則偏光的光的波長變短。Further, basically, when the pitch P of the gate electrode 10a is narrowed, the wavelength of the polarized light is shortened.
當將偏光元件插入於光路中,則平行於柵極的長度方向的偏光成分是大部分被反射,而正交的偏光成分是通過。因此,通過線狀格子型偏光元件的光是成為具有正交於偏光元件的格子的長度方向的偏光軸的偏光光。When the polarizing element is inserted into the optical path, the polarization component parallel to the longitudinal direction of the gate is mostly reflected, and the orthogonal polarization component passes. Therefore, the light that has passed through the linear lattice-type polarizing element is polarized light having a polarization axis that is orthogonal to the longitudinal direction of the lattice of the polarizing element.
又,針對於形成格子的製造方法或材質,作改良或新的改良,那些者有例如專利文獻5。Further, for the improvement of the manufacturing method or material for forming the lattice, for example, Patent Document 5 is proposed.
習知,作為光配向用偏光光照射裝置,進行著在線狀光源的棒狀燈組合線狀格子型偏光元件為基於如下理由。Conventionally, as a light-aligning polarizing light irradiation device, a linear lamp-type linear lattice-type polarizing element in which a linear light source is used is based on the following reasons.
來自棒狀燈的光是發散光,即使在燈射出側配置偏光元件而欲得到偏光光,也有各種角度的光會射入在偏光元件。The light from the rod-shaped lamp is divergent light, and even if a polarizing element is disposed on the light-emitting side and the polarized light is to be obtained, light of various angles is incident on the polarizing element.
作為偏光元件,眾知有蒸鍍膜或利用布魯斯特角(Brek,ster’s angle)者。As the polarizing element, there are known a vapor deposition film or a Brewster angle (Brek, ster's angle).
但是,此些偏光元件是無法僅偏光以偏光元件所決定的角射入的光,而僅以其以外的射入的光,是幾乎不會偏光而會通過。所以,光源為發散光時,若使用蒸鍍膜或利用布魯斯特角的偏光元件,則與將射入於偏光元件的光作為平行光而使入射角度一致的情形相比較,則所得到的偏 光光的消光比變壞。However, such polarizing elements are light that cannot be polarized only at an angle determined by the polarizing element, and light that is incident only by the other elements is transmitted without being polarized. Therefore, when the light source is divergent light, if a vapor deposition film or a polarizing element using a Brewster angle is used, the obtained polarization is compared with a case where the light incident on the polarizing element is parallel light and the incident angle is made uniform. The extinction ratio of light is deteriorated.
又,也有利用有機膜的偏光元件,惟此為長時間照射為了光配向所使用的紫外線的光,則特性會劣化之故,因而作成工業性地使用。Further, there is a polarizing element using an organic film. However, since light having a long-term exposure to ultraviolet light used for light alignment is deteriorated, the characteristics are deteriorated, and thus it is industrially used.
對此,線狀格子型偏光元件是射出對於射入於偏光元件的角度的偏光光的消光比的依存性較小,所以,即使如從棒狀燈所射出的光的發散光,若射入角度為±45°的範圍,則光所照射的領域全體全面,也可得到較優異的消光比的偏光光。On the other hand, the linear lattice-type polarizing element has a small dependence on the extinction ratio of the polarized light that is incident on the polarizing element, and therefore, even if the light is emitted from the rod-shaped lamp, the light is emitted. When the angle is within the range of ±45°, the field in which the light is irradiated is comprehensive, and the polarized light having an excellent extinction ratio can be obtained.
所以,對應於光配向膜的膜的寬度設置棒狀燈的長度,而將光配向膜對於對於偏光光照射裝置朝一方向相對地移動,則原理上以1支燈,可進行廣泛面積的光配向膜的配向處理。Therefore, the length of the rod-shaped lamp is set corresponding to the width of the film of the photo-alignment film, and the photo-alignment film is relatively moved in one direction for the polarized light irradiation device, and in principle, one lamp can be used for a wide area of light alignment. Orientation treatment of the membrane.
若在棒狀燈組合線狀格子型偏光元件,則不需要將來自光源的光作成平行光所用的光學元件,而能低成本地製作裝置全體。When a linear lattice-type polarizing element is combined with a rod-shaped lamp, it is not necessary to make the light from the light source an optical element for parallel light, and the entire apparatus can be manufactured at low cost.
專利文獻1:日本特開2004-163881號公報Patent Document 1: Japanese Patent Laid-Open Publication No. 2004-163881
專利文獻2:日本特開2004-144884號公報Patent Document 2: Japanese Laid-Open Patent Publication No. 2004-144884
專利文獻3:日本特開2002-328234號公報Patent Document 3: Japanese Laid-Open Patent Publication No. 2002-328234
專利文獻4:日本特表2003-508813號公報Patent Document 4: Japanese Patent Publication No. 2003-508813
專利文獻5:日本特開2007-178763號公報Patent Document 5: Japanese Laid-Open Patent Publication No. 2007-178763
非專利文獻1:H. Shitomi. et al. 「Optically Controlled Alignment of Liquid Crystal on Polyimide Films Exposed to Undulator Radiation」 Proc. Int. Conf. SRMS-2 Jpn. J. Appl. Phys. Vol. 38 (1999) .pp. 176-179Non-Patent Document 1: H. Shitomi. et al. "Optically Controlled Alignment of Liquid Crystal on Polyimide Films Exposed to Undulator Radiation" Proc. Int. Conf. SRMS-2 Jpn. J. Appl. Phys. Vol. 38 (1999) .pp. 176-179
習知很多以波長300nm~500nm的偏光光進行配向的光配向膜,但是,最近,也成為可製作以波長300nm以下(200nm~300nm)的偏光光進行配向的光配向膜(參照非專利文獻1)。In many cases, a light alignment film which is aligned with polarized light having a wavelength of 300 nm to 500 nm is known. Recently, an optical alignment film which is aligned with polarized light having a wavelength of 300 nm or less (200 nm to 300 nm) can be produced (see Non-Patent Document 1). ).
所以,作為偏光光照射裝置,成為被要求射出波長300nm以下(200nm~300nm)的偏光光的裝置,尤其是以260nm±10nm(較佳是260nm±20nm)的波長領域可得到消光比為15:1以上的偏光光的裝置。Therefore, as a polarized light irradiation device, it is required to emit polarized light having a wavelength of 300 nm or less (200 nm to 300 nm), and in particular, an extinction ratio of 15 in a wavelength range of 260 nm ± 10 nm (preferably 260 nm ± 20 nm) is obtained: A device of polarized light of 1 or more.
但是,以組合棒狀燈與線狀格子型偏光元件欲製作此種裝置,則有如下問題。However, in order to fabricate such a device by combining a rod-shaped lamp and a linear lattice-type polarizing element, there are the following problems.
線狀格子型偏光元件的格子是藉由蝕刻所形成。所以,作為格子的材料,傳統上多使用容易加工的鋁,但是,以鋁形成格子時,本發明人發現了會發生以下的3個問題。The lattice of the linear lattice-type polarizing element is formed by etching. Therefore, as a material of the lattice, aluminum which is easy to process is conventionally used, but when the lattice is formed of aluminum, the inventors have found that the following three problems occur.
(1):在波長為300nm以下的領域,偏光光的消光比降低,而在大約250nm以下的波長領域,消光比成為1:1(成為不偏光)。(1): In the field of wavelengths of 300 nm or less, the extinction ratio of polarized light is lowered, and in the wavelength range of about 250 nm or less, the extinction ratio becomes 1:1 (becomes unpolarized).
(2):在波長為340nm以下的領域,藉由射入於線狀格子型偏光元件的光的角度,透射率會變化。如上述地,來自棒狀燈的光是發散光。所以,射入於偏光元件的光的角度是依場所而不相同(燈正下即在偏光元件的中央部 ,射入角度小的光的成分較多,而在周邊部,射入角度大的光的成分較多)。因此,藉由射入於偏光元件的光的角度而透射率有變化,則在射出的偏光光產生照度不均勻(偏光光照射領域的照度分布變大)。(2): In a field having a wavelength of 340 nm or less, the transmittance changes due to the angle of light incident on the linear lattice-type polarizing element. As described above, the light from the rod lamp is divergent light. Therefore, the angle of the light incident on the polarizing element is different depending on the place (the light is directly below the center of the polarizing element) There are many components of light having a small incident angle, and a large amount of light having a large angle of incidence at the peripheral portion. Therefore, when the transmittance changes due to the angle of the light incident on the polarizing element, the illuminance unevenness is generated in the emitted polarized light (the illuminance distribution in the field of the polarized light irradiation becomes large).
(3):射入於線狀格子型偏光元件的光的角度變大,則從偏光元件射出的偏光光的方向會變化。亦即,隨著對偏光元件的射入角度變大,所射出的偏光光的偏光軸的旋轉角度變大。(3): When the angle of light incident on the linear lattice-type polarizing element increases, the direction of the polarized light emitted from the polarizing element changes. In other words, as the angle of incidence of the polarizing element increases, the angle of rotation of the polarization axis of the emitted polarized light increases.
如上述地,射入於偏光元件的光的角度,是在偏光元件的中央部,則射入角度小的光的成分較多,而在周邊部,則射入角度大的光的成分較多。所以在偏光光所照射的照射的照射領域的中央部,即使偏光光的偏光軸的方向是朝所期望的方向,在周邊部,偏光光的偏光軸的方向是從所期望的方向旋轉偏離。亦即,在偏光光的照射領域,有方向上偏差發生於偏光軸。As described above, the angle of the light incident on the polarizing element is such that in the central portion of the polarizing element, the amount of light having a small incident angle is large, and in the peripheral portion, the amount of light having a large incident angle is large. . Therefore, in the central portion of the irradiation region of the irradiation to which the polarized light is irradiated, even if the direction of the polarization axis of the polarized light is in a desired direction, the direction of the polarization axis of the polarized light is rotationally deviated from the desired direction in the peripheral portion. That is, in the field of irradiation of polarized light, a direction deviation occurs in the polarization axis.
在偏光光的照射領域,若在偏光光的照度不均勻或在偏光軸的方向有偏差的狀態進行處理,則在配向膜,產生無法得到所期望的配向特性的部分。In the field of irradiation of polarized light, when the illuminance of the polarized light is not uniform or the direction of the polarizing axis is deviated, the alignment film is in a portion where the desired alignment characteristics are not obtained.
本發明是鑑於上述事項而創作者,在組合線狀光源與線狀格子型偏光元件,而對於光配向膜照射偏光光的偏光光照射裝置,提供即使在300nm以下的波長領域也可得到良好的消光比的偏光光。又,在波長300nm以下的領域,即使射入於偏光元件的光的角度不相同,透射率也不會變化,還有,即使射入於線狀格子型偏光元件的光的角 度不相同,也不會使射出的偏光光的方向變化(偏光軸會旋轉)的光配向用偏光光照射裝置作為目的。In view of the above, the present invention provides a polarized light irradiation device that combines a linear light source and a linear lattice-type polarizing element with a polarized light for an optical alignment film, and provides a wavelength region of 300 nm or less. The extinction ratio of polarized light. Further, in the field of the wavelength of 300 nm or less, even if the angle of the light incident on the polarizing element is not the same, the transmittance does not change, and even the angle of the light incident on the linear lattice-type polarizing element The light distribution is not the same, and the direction of the polarized light that is emitted is not changed (the polarization axis is rotated).
本發明人經專心檢討之結果,利用氧化鈦(TiOx)形成線狀格子型偏光元件的格子,由此,可看出解決上述的課題。As a result of intensive review, the present inventors have solved the above problems by forming a lattice of a linear lattice-type polarizing element using titanium oxide (TiOx).
亦即,使用具有以氧化鈦(TiOx)所形成的格子的偏光元件,則在300nm以下的波長領域也可得到良好的消光比的偏光光,即使光配向膜的感度為200~300nm的範圍的工件,也可有效果地進行光配向處理。In other words, when a polarizing element having a lattice formed of titanium oxide (TiOx) is used, a polarized light having a good extinction ratio can be obtained in a wavelength region of 300 nm or less, even if the sensitivity of the photoalignment film is in the range of 200 to 300 nm. The workpiece can also be optically aligned for effect.
依據以上,在本發明中,一種光配向用偏光光照射裝置,是具備將來自線狀光源的光利用線狀格子型偏光元件予以偏光而射出的光照射部,將該光照射部的偏光光照射至配向膜的光配向用偏光光照射裝置,其特徵為;上述線狀格子型偏光元件的格子是利用氧化鈦(TiOx)所形成。According to the present invention, in the polarized light irradiation device for light alignment, the light-irradiating portion that emits light from the linear light source by polarizing the linear lattice-type polarizing element and emits the polarized light of the light-emitting portion The polarized light irradiation device for light alignment which is irradiated to the alignment film is characterized in that the lattice of the linear lattice-type polarizing element is formed of titanium oxide (TiOx).
在本發明,可得到以下的效果。In the present invention, the following effects can be obtained.
(1)利用氧化鈦(TiOx)形成線狀格子型偏光元件的格子,由此即使在300nm以下的波長領域,也可得到良好的消光比的偏光光。(1) The lattice of the linear lattice-type polarizing element is formed by using titanium oxide (TiOx), whereby a polarized light having a good extinction ratio can be obtained even in a wavelength region of 300 nm or less.
具體地說明,在260nm±20nm的範圍,可得到15:1以上的消光比。Specifically, an extinction ratio of 15:1 or more can be obtained in the range of 260 nm ± 20 nm.
所以,使用上述線狀格子型偏光元件與線狀光源,構成光配向用偏光光照射裝置的光照射部,由此,成為可有效果地進行光配向膜的感度為200~300nm的範圍的工件的光配向。Therefore, by using the linear lattice-type polarizing element and the linear light source to form the light-irradiating portion of the light-aligning polarizing light irradiation device, the workpiece having the sensitivity of the optical alignment film of 200 to 300 nm can be effectively produced. Light alignment.
(2)藉由使用上述線狀格子型偏光元件,在波長300nm以下的領域中,即使射入於偏光元件的光的角度不相同,透射率也幾乎沒有變化。(2) By using the above-described linear lattice-type polarizing element, in the field of wavelength 300 nm or less, even if the angle of light incident on the polarizing element is not the same, the transmittance hardly changes.
(3)又,藉由使用上述線狀格子型偏光元件,即使射入於線狀格子型偏光元件的光的角度不相同,射出的偏光光的方向(偏光軸進行旋轉)也幾乎沒有變化。(3) Further, by using the linear lattice-type polarizing element, even if the angle of the light incident on the linear lattice-type polarizing element is different, the direction of the emitted polarized light (rotation of the polarization axis) hardly changes.
在第1圖表示本發明的實施例的偏光光照射裝置的構成例。Fig. 1 shows an example of the configuration of a polarized light irradiation device according to an embodiment of the present invention.
與第8圖同樣,在光照射部6,內設有線狀的光源的高壓水銀燈或將金屬添加於水銀的金屬鹵化物燈等的棒狀燈2,及反射來自燈2的光的槽狀反射鏡3。又在光射出側設有線狀格子型偏光元件1。在此,棒狀高壓水銀燈或金屬鹵化物燈,是眾知作為放射波長300nm以下的光的光源。Similarly to the eighth embodiment, a high-pressure mercury lamp in which a linear light source is provided in the light-irradiating portion 6, a rod-shaped lamp 2 such as a metal halide lamp in which metal is added to mercury, and a groove-shaped reflection reflecting light from the lamp 2 are provided. Mirror 3. Further, a linear lattice-type polarizing element 1 is provided on the light-emitting side. Here, a rod-shaped high-pressure mercury lamp or a metal halide lamp is known as a light source that emits light having a wavelength of 300 nm or less.
又,與第8圖不相同,在第1圖中,形成有光配向膜的工件4,並不是帶狀工件而是在光透射性的基板上形成有光配向膜4a的面板基板,被載於工件平台5上。該光配向膜4a的感度是例如200~300nm的範圍。Further, unlike FIG. 8, in the first drawing, the workpiece 4 on which the photo-alignment film is formed is not a strip-shaped workpiece but a panel substrate on which the photo-alignment film 4a is formed on the light-transmissive substrate, and is loaded. On the workpiece platform 5. The sensitivity of the photo-alignment film 4a is, for example, in the range of 200 to 300 nm.
面板基板時,也與帶狀工件時同樣地,使用具備對應於面板基板的寬度的發光長度的燈,對於偏光光被照射的領域,將工件4對於燈2的長度方向朝正交方向相對地移動而進行光配向處理。In the case of the panel substrate, a lamp having a light-emitting length corresponding to the width of the panel substrate is used in the same manner as in the case of the strip-shaped workpiece, and the workpiece 4 is opposed to the longitudinal direction of the lamp 2 in the direction orthogonal to the direction in which the polarized light is irradiated. Move and perform optical alignment processing.
亦即,工件4朝圖中箭號方向被搬運,而來自光照射部6的光是利用線狀格子型偏光元件1被偏光,而被照射於搬運光照射部6下的工件4,而進行著光配向處理。In other words, the workpiece 4 is conveyed in the direction of the arrow in the figure, and the light from the light-irradiating portion 6 is polarized by the linear lattice-type polarizing element 1 and is irradiated onto the workpiece 4 under the light-emitting portion 6 to be carried. Light alignment treatment.
以下,作為線狀光源以棒狀燈作為例子加以說明,惟近年來也實用化放射紫外光的LED或LD,而直線狀地排列配置此種LED或LD作成線狀光源也可以。又這時候,排列LED或LD的方向相當於燈的長度方向。Hereinafter, a linear light source will be described as an example of a rod-shaped light source. However, in recent years, LEDs or LDs that emit ultraviolet light have been put into practical use, and such LEDs or LDs may be arranged in a line in a line to form a linear light source. At this time, the direction in which the LEDs or LDs are arranged corresponds to the length direction of the lamps.
在第2圖表示本發明的實施例的線狀格子型偏光元件的構成。Fig. 2 shows the configuration of a linear lattice-type polarizing element according to an embodiment of the present invention.
如同圖所示地,藉由氧化鈦(TiOx)形成線狀格子型偏光元件的格子。As shown in the figure, a lattice of a linear lattice-type polarizing element is formed by titanium oxide (TiOx).
氧化鈦的格子1a是形成於透射200nm~300nm的波長的光的基板(例如石英或氟化鎂等)1b的表面。格子的間距是150nm。又,格子1a的高度是10nm以上。The lattice 1a of titanium oxide is a surface of a substrate (for example, quartz or magnesium fluoride) 1b which is formed to transmit light having a wavelength of 200 nm to 300 nm. The pitch of the grid is 150 nm. Further, the height of the lattice 1a is 10 nm or more.
又,線狀格子型偏光元件是無法製作大者之故,因而實際上配置於光照射部6的光射出側之際,如第3圖所示地,將相同種類的複數線狀格子型偏光元件1排列於框1c所構成。偏光元件的個數是因應於照射偏光光的領域的大小而適當地選擇。In addition, since the linear lattice-type polarizing element cannot be made large, it is actually disposed on the light-emitting side of the light-irradiating portion 6, and as shown in Fig. 3, the same type of complex linear lattice-type polarized light is used. The elements 1 are arranged in a frame 1c. The number of the polarizing elements is appropriately selected in accordance with the size of the field in which the polarized light is irradiated.
在第4圖,表示射入於線狀格子型偏光元件的非偏光光的波長,及射出的偏光光的滑光比之關係。在同圖中,橫軸是表示光的波長(nm),而縱軸是以對數表示消光比者。Fig. 4 shows the relationship between the wavelength of the non-polarized light incident on the linear lattice-type polarizing element and the sliding ratio of the emitted polarized light. In the same figure, the horizontal axis represents the wavelength (nm) of light, and the vertical axis represents the extinction ratio in logarithms.
在第4圖中,A(菱形格子)是以氧化鈦形成格子的 情形,而B(三角標示)是以鋁形成格子的情形。又,格子的間距兩者都是150nm。In Fig. 4, A (diamond lattice) is a lattice formed of titanium oxide. In the case, B (triangular indication) is a case where a lattice is formed of aluminum. Also, the pitch of the grid is both 150 nm.
如同圖所示地,以鋁形成格子時,在波長300nm以上的領域,可得到50:1以上的良好的消光比。但是,在波長300nm以下的領域,消光比是降低,而在波長約270nm,消光比是成為大約10:1,在波長約250nm,消光比是成為約1:1無法得到偏光光。As shown in the figure, when a lattice is formed of aluminum, a good extinction ratio of 50:1 or more can be obtained in a region having a wavelength of 300 nm or more. However, in the field of wavelengths of 300 nm or less, the extinction ratio is lowered, and at a wavelength of about 270 nm, the extinction ratio is about 10:1, and at a wavelength of about 250 nm, the extinction ratio is about 1:1, and polarized light cannot be obtained.
對於此,以氧化鈦形成格子時,在波長300nm以下的領域的消光比,是與鋁時相比較較良好,而在波長240nm~300nm的範圍下,消光比可得到15:1以上的偏光光。又,240nm以下的虛線是推測值。In this case, when the lattice is formed of titanium oxide, the extinction ratio in the region of wavelength 300 nm or less is better than that in the case of aluminum, and in the range of wavelengths of 240 nm to 300 nm, the extinction ratio can obtain polarized light of 15:1 or more. . Further, a broken line of 240 nm or less is an estimated value.
如上述地,現在被要求可得到260nm±10nm(較佳為260nm±20nm)的波長領域而消光比為15:1以上的偏光光的裝置,惟使用以氧化鈦形成格子的線狀格子型偏光元件,就可報應於該要求。As described above, it is now required to obtain a polarized light having a wavelength range of 260 nm ± 10 nm (preferably 260 nm ± 20 nm) and an extinction ratio of 15:1 or more, but using a linear lattice-type polarized light in which lattices are formed by using titanium oxide. Components can be reimbursed for this requirement.
又,理論上,即使以鋁形成格子,若將間距變狹窄,當然也可將短波長的光作成偏光。但是,實際上將間距變狹窄,則格子欠缺,或蛇行而降低射出的偏光光的品質,結果,無法得到消光比15:1以上的偏光光。在現狀,為比150nm還要狹窄的線狀格子型偏光元件很難製作出工業上可使用者。Further, in theory, even if the lattice is formed of aluminum, if the pitch is narrowed, it is of course possible to polarize the short-wavelength light. However, in actuality, the pitch is narrowed, the lattice is lacking, or the quality of the emitted polarized light is reduced by meandering, and as a result, polarized light having an extinction ratio of 15:1 or more cannot be obtained. In the current situation, linear lattice-type polarizing elements which are narrower than 150 nm are difficult to manufacture industrially.
在第5圖,表示射入於線狀格子型偏光元件的非偏光光的角度,及以該角度所射入的光的分光透射率。第5(a)圖是表示以氧化鈦形成格子時的實驗結果,而第5(b )圖是以鋁形成格子時的實驗結果。In Fig. 5, the angle of the non-polarized light incident on the linear lattice-type polarizing element and the spectral transmittance of the light incident at the angle are shown. Figure 5(a) shows the experimental results when the lattice is formed of titanium oxide, and the fifth (b) The graph is an experimental result when the lattice is formed of aluminum.
雙方的圖式,橫軸是表示射入於線狀格子型偏光元件的光的波長(nm),而縱軸是表示光的透射率(%)。分別針對於射入於線狀格子型偏光元件的光的角度(射入角)為0°(垂直射入)時,30°時、45°時加以測定。In the drawings, the horizontal axis represents the wavelength (nm) of light incident on the linear lattice-type polarizing element, and the vertical axis represents the transmittance (%) of light. When the angle (injection angle) of the light incident on the linear lattice-type polarizing element is 0° (vertical incident), it is measured at 30° and 45°, respectively.
以氧化鈦形成格子時,或是以鋁形成格子時,在波長為340nm以上的領域,即使射入於偏光元件的光的角度有變化,透射率是不變。When a lattice is formed of titanium oxide or a lattice is formed of aluminum, in a field having a wavelength of 340 nm or more, even if the angle of light incident on the polarizing element changes, the transmittance does not change.
但是,如第5(b)圖所示地,以鋁形成格子時,則在波長340nm以下的領域中,當射入角變大,則在特定波長領域中,透射率會降低。However, when the lattice is formed of aluminum as shown in Fig. 5(b), in the field of wavelength 340 nm or less, when the incident angle is increased, the transmittance is lowered in the specific wavelength region.
例如,射入於偏光元件的角度為30°的光的透射率,是在波長270nm~300nm的領域中,與射入角度為0°的光相比較,透射率有降低大約10%的情形。又,在射入於偏光元件的角度為45°的光的透射率,是在波長280nm~340nm的領域中,與射入角度0°的光相比較,透射率有降低約15%的情形。For example, the transmittance of light incident on the polarizing element at an angle of 30° is a case where the transmittance is reduced by about 10% in the field of the wavelength of 270 nm to 300 nm as compared with the light having an incident angle of 0°. Further, the transmittance of light incident on the polarizing element at an angle of 45° is a case where the transmittance is reduced by about 15% in the field of the wavelength of 280 nm to 340 nm as compared with the light having an incident angle of 0°.
如上述地,作為光源使用棒狀燈時,來自棒狀燈的光是發散光,而在燈的正下方亦即在偏光元件的中央部,射入角度小的光的成分較多,而在周邊部,則射入角度大的光的成分較多。As described above, when a rod-shaped lamp is used as the light source, the light from the rod-shaped lamp is divergent light, and the light incident on the center of the polarizing element directly under the lamp has a large amount of light having a small angle of incidence. In the peripheral portion, there are many components of light having a large angle of incidence.
因此,如上述地,當光的射入角度變大而降低光的透射率,則在偏光光所照射的領域的周邊部,偏光光的照度變小。因此,在偏光光照射領域的周邊部,無法充分地進 行光配向膜的光配向處理。Therefore, as described above, when the incident angle of light is increased to lower the transmittance of light, the illuminance of the polarized light becomes smaller at the peripheral portion of the region where the polarized light is irradiated. Therefore, in the peripheral part of the field of polarized light irradiation, it is not possible to fully advance Light alignment treatment of the light-aligning film.
對於此,如第5(a)圖所示地,以氧化鈦形成格子時,針對於射入角為0°,30°,45°的任一角度時,在200nm~300nm的波長領域中,透射率是幾乎沒有相差。因此,在偏光光所照射的照射領域,可進行沒有偏光光的照度不均勻(照度均勻度高)的照度。因此,在偏光光所照射的全領域,可充分地進行光配向膜的光配向處理。In this case, when the lattice is formed of titanium oxide as shown in Fig. 5(a), in the wavelength range of 200 nm to 300 nm, the incident angle is 0°, 30°, or 45°. The transmittance is almost no difference. Therefore, in the irradiation field in which the polarized light is irradiated, the illuminance in which the illuminance is not uniform (the illuminance uniformity is high) without the polarized light can be performed. Therefore, the light alignment treatment of the photoalignment film can be sufficiently performed in all fields irradiated with the polarized light.
在第6圖,表示射入於線狀格子型偏光元件的非偏光光的角度,及射出的偏光光的偏光軸的旋轉量的關係。橫軸是表示射入於線狀格子型偏光元件的光的角度(°),而縱軸是表示射出的偏光光的偏光軸的旋轉量(°)。Fig. 6 shows the relationship between the angle of the non-polarized light incident on the linear lattice-type polarizing element and the amount of rotation of the polarization axis of the emitted polarized light. The horizontal axis represents the angle (°) of the light incident on the linear lattice-type polarizing element, and the vertical axis represents the rotation amount (°) of the polarization axis of the emitted polarized light.
偏光軸的旋轉量,是以射入角度為0°時的偏光軸的方向作為基準,而表示由該處的旋轉角度。The amount of rotation of the polarization axis is based on the direction of the polarization axis when the incident angle is 0°, and indicates the rotation angle from the position.
又,射入於線狀格子型偏光元件的光的波長,是以氧化鈦形成格子的偏光元件時為254nm,而以鋁形成格子的偏光元件時為365nm。In addition, the wavelength of light incident on the linear lattice-type polarizing element was 254 nm when the polarizing element of the lattice was formed of titanium oxide, and 365 nm when the polarizing element of the lattice was formed of aluminum.
如同圖所示地,以鋁形成格子時,隨著光的射角度變大,所射出的偏光光的偏光軸的旋轉量變大,而射入角度為45°時,偏光軸是旋轉約6°。As shown in the figure, when the lattice is formed of aluminum, as the angle of incidence of the light becomes larger, the amount of rotation of the polarization axis of the emitted polarized light becomes larger, and when the incident angle is 45°, the polarization axis is rotated by about 6°. .
如上述地,在偏光元件的中央部射入角度小的光的成分較多,而在周邊部射入角度大的光的成分較多之故,因而光的射入角度變大而偏光光的偏光軸的旋轉量變大,則在偏光光所照射的領域的周邊部,偏光光的偏光軸方向從所期望的方向會旋轉很大(會偏離)。因此,在偏光光照 射領域的周邊部,無法將光配向膜朝所期望的方向進行光配向處理。As described above, since a large amount of light having a small angle is incident in the central portion of the polarizing element, and a large amount of light having a large angle of incidence in the peripheral portion is formed, the incident angle of the light is increased, and the polarized light is large. When the amount of rotation of the polarization axis is increased, the polarization axis direction of the polarized light is greatly rotated (deviated) from the desired direction in the peripheral portion of the region where the polarized light is irradiated. Therefore, in polarized lighting In the peripheral portion of the field, the light alignment film cannot be optically aligned in a desired direction.
對於此,以氧化鈦形成格子時,即使光的射入角度有變化,射出的偏光光的偏光軸是幾乎不會旋轉。In this case, when the lattice is formed of titanium oxide, even if the incident angle of light changes, the polarization axis of the emitted polarized light hardly rotates.
因此,偏光光所照射的領域全體全面,可進行沒有偏光軸的偏差的照射,因此,有偏光光所照射的全領域可將光配向膜朝所期望的方向進行光配向處理。Therefore, since the field in which the polarized light is irradiated is comprehensive and the irradiation without the deviation of the polarization axis can be performed, the light alignment film can be subjected to the photoalignment process in a desired direction in all areas irradiated with the polarized light.
在第7圖,表示本發明的偏光光照射裝置的其他構成例。Fig. 7 shows another configuration example of the polarized light irradiation device of the present invention.
同圖是將具備棒狀燈2與聚光鏡3,及以氧化鈦形成格子的線狀格子型偏光元件1的光照射部6,排列設置複數於工件4所搬運的方向者。光配向膜4a所形成的工件4是被載置於工件平台5上,而朝同圖的箭號方向被搬運。In the same figure, the light-irradiating portion 6 including the rod-shaped lamp 2, the condensing mirror 3, and the linear lattice-type polarizing element 1 in which lattices are formed of titanium oxide is arranged in a plurality of directions in which the workpiece 4 is transported. The workpiece 4 formed by the optical alignment film 4a is placed on the workpiece stage 5 and conveyed in the direction of the arrow in the same figure.
藉由設置複數光照射部6,可增加被照射於工件4上的光配向膜4a的偏光光的照射量之故,因而可得工件4的搬運速度作成較快。因此,可提昇光配向的生產能力(每一單位的處理枚數)。By providing the plurality of light irradiation units 6, the amount of irradiation of the polarized light of the light alignment film 4a irradiated on the workpiece 4 can be increased, so that the conveyance speed of the workpiece 4 can be made faster. Therefore, the production capacity of the light alignment (the number of processes per unit) can be improved.
1‧‧‧線狀格子型偏光元件1‧‧‧Linear lattice type polarizing element
1a‧‧‧線狀格子1a‧‧‧Linear lattice
1b‧‧‧基板1b‧‧‧Substrate
1c‧‧‧框1c‧‧‧ box
2‧‧‧棒狀燈2‧‧‧ rod lights
3‧‧‧反射鏡3‧‧‧Mirror
4‧‧‧工件4‧‧‧Workpiece
4a‧‧‧光配向膜4a‧‧‧Light alignment film
5‧‧‧工件平台5‧‧‧Workpiece platform
6‧‧‧光照射部6‧‧‧Lighting Department
第1圖是表示本發明的實施例的偏光光照射裝置的構成例的圖式。Fig. 1 is a view showing a configuration example of a polarized light irradiation device according to an embodiment of the present invention.
第2(a)圖及第2(b)圖是表示本發明的實施例的線狀格子型偏光元件的構成例的圖式。2(a) and 2(b) are diagrams showing a configuration example of a linear lattice-type polarizing element according to an embodiment of the present invention.
第3(a)圖及第3(b)圖是表示排列地配置複數偏光元件的線狀格子型偏光元件的構成例的圖式。3(a) and 3(b) are diagrams showing a configuration example of a linear lattice-type polarizing element in which a plurality of polarizing elements are arranged in alignment.
第4圖是表示射入於線狀格子型偏光元件的非偏光光的波長,與射出的偏光光的消光比之關係的圖式。Fig. 4 is a view showing the relationship between the wavelength of the non-polarized light incident on the linear lattice-type polarizing element and the extinction ratio of the emitted polarized light.
第5(a)圖及第5(b)圖是表示射入於線狀格子型偏光元件的非偏光光的角度,與在其角度所射入的光的分光透射率的圖式。FIGS. 5( a ) and 5 ( b ) are diagrams showing the angles of the non-polarized light incident on the linear lattice-type polarizing element and the spectral transmittance of the light incident at the angle.
第6圖是表示射入於線狀格子型偏光元件的非偏光光的角度,與射出的偏光光的偏光軸的旋轉量之關係的圖式。Fig. 6 is a view showing the relationship between the angle of the non-polarized light incident on the linear lattice-type polarizing element and the amount of rotation of the polarization axis of the emitted polarized light.
第7圖是表示本發明的偏光光照射裝置的其他構成例的圖式。Fig. 7 is a view showing another configuration example of the polarized light irradiation device of the present invention.
第8圖是表示組合棒狀燈與線狀格子型偏光元件的偏光光照射裝置的構成例的圖式。Fig. 8 is a view showing a configuration example of a polarized light irradiation device that combines a rod-shaped lamp and a linear lattice-type polarizing element.
第9(a)圖及第9(b)圖是表示線狀格子型偏光元件的概略構造的圖式。Figs. 9(a) and 9(b) are diagrams showing a schematic structure of a linear lattice-type polarizing element.
1‧‧‧線狀格子型偏光元件1‧‧‧Linear lattice type polarizing element
2‧‧‧棒狀燈2‧‧‧ rod lights
3‧‧‧反射鏡3‧‧‧Mirror
4‧‧‧工件4‧‧‧Workpiece
4a‧‧‧光配向膜4a‧‧‧Light alignment film
5‧‧‧工件平台5‧‧‧Workpiece platform
6‧‧‧光照射部6‧‧‧Lighting Department
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JP2008113421A JP4968165B2 (en) | 2008-04-24 | 2008-04-24 | Polarized light irradiation device for photo-alignment |
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TWI490611B true TWI490611B (en) | 2015-07-01 |
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KR (1) | KR101234406B1 (en) |
CN (1) | CN101566762B (en) |
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JP2009265290A (en) | 2009-11-12 |
TWI516847B (en) | 2016-01-11 |
KR20090112546A (en) | 2009-10-28 |
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CN101566762B (en) | 2013-09-04 |
CN101566762A (en) | 2009-10-28 |
TW200944902A (en) | 2009-11-01 |
TW201520661A (en) | 2015-06-01 |
KR101234406B1 (en) | 2013-02-18 |
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