200944902 六、發明說明： 【發明所屬之技術領域】 本發明是有關於液晶面板的配向膜，或將所定波長的 偏光光予以照射於視野角補償薄膜的配向層等而進行配向 的光配向用偏光光照射裝置，尤其是，關於組合線狀光源 的棒狀燈與線狀格子型偏光元件的光配向用偏光光照射裝 置° ❹ 【先前技術】 近年來，有關於液晶面板的配向膜，或視野角補償薄 膜的配向處理，成爲採用著利用將所定波長的偏光光照射 在配向膜進行配向被稱爲光配向的技術。 以下，將骰置利用上述光進行配向的配向膜成配向層 的薄膜總稱爲光配向膜。光配向膜是與液晶面板的大型化 之同時成爲大面積化（例如一邊爲2m以上的四方形）， φ 隨著此，將偏光光照射於光配向膜的偏光光照射裝置也成 爲大型化。 近年來，爲了對此種大面積的光配向膜進行光配向， 提案一種組合棒狀燈與具有線狀格子狀的格子的偏光元件 (以下，稱爲線狀格子型偏光元件）的光照射裝置（例如 參照專利文獻1或專利文獻2 )。 在光配向膜用的偏光光照射裝置中，棒狀燈時是可製 作發光長較長者。所以，使用具備因應於配向膜的寬度的 發光長的棒狀燈，若一面照射來自該燈的光，一面將配向 -4- 200944902 膜朝正交於燈的長度方向的方向移動，則可將廣泛面積的 配向膜以較短時間進行光配向處理。 在第8圖，表示組合線狀光源的棒狀燈與線狀格子型 偏光元件、的偏光光照射裝置的構成例。 在同圖中，光配向膜的工件40是例如視野角補償薄 膜的帶狀的長度工件，由送出輥R1送出，朝圖中箭號方 向搬運，如下述地利用偏光光照射被光配向處理，而利用 捲取輥R2被捲取。 偏光光照射裝置的光照射部20是具備：放射光配向 處理所必需的波長的光（紫外線）的棒狀燈21，例如高 壓水銀燈或在水銀加上其他金屬的金屬鹵化物燈，及將來 自棒狀燈21的紫外線朝工件40反射而聚光的聚光鏡22 。如上述地，棒狀燈21的長度，是使用發光部具備對應 於正交於工件4〇的搬運方向的方向的寬度的長度者。光 照射部20是燈21的長度方向配置成工件40的寬度方向 (對於搬運方向爲正交方向）。 在光照射部20的光出射側，設有偏光元件的線狀格 子型偏光元件10。來自光照射部20的光是利用線狀格子 型偏光元件10被偏光，被照射於被搬運在光照射部20下 的工件40，進行著光配向處理。 針對於線狀格子型偏光元件，例如在專利文獻3或專 利文獻4詳細地表示。 在第9圖是表示線狀格子型偏光元件的槪略的構造。 線狀格子型偏光元件10是在透射欲偏光的光的波長 -5- 200944902 (光配向時，是進行光配向所必需的紫外線的波長）的基 板（例如石英）1 Ob的表面’以間距P的等間隔平行地配 置長度比寬度還要長的複數直線狀電性導體（例如鉻或鋁 等的金屬線，以下稱爲柵極10a)者。 又，基本上，若將柵極10a的間距p變狹窄，則偏光 的光的波長變短。 當將偏光元件插入於光路中，則平行於柵極的長度方 向的偏光成分是大部分被反射，而正交的偏光成分是通過 。因此，通過線狀格子型偏光元件的光是成爲具有正交於 偏光元件的格子的長度方向的偏光軸的偏光光。 又，針對於形成格子的製造方法或材質，作改良或新 的改良，那些者有例如專利文獻5。 習知，作爲光配向用偏光光照射裝置，進行著在線狀 光源的棒狀燈組合線狀格子型偏光元件爲基於如下理由。 來自棒狀燈的光是發散光，即使在燈射出側配置偏光 元件而欲得到偏光光，也有各種角度的光會射入在偏光元件 〇 作爲偏光元件，眾知有蒸鍍膜或利用布魯斯特角（ Brek，ster’s angle )者 ° 但是，此些偏光元件是無法僅偏光以偏光元件所決定 的角射入的光，而僅以其以外的射入的光，是幾乎不會偏 光而會通過。所以，光源爲發散光時，若使用蒸鍍膜或利 用布魯斯特角的偏光元件，則與將射入於偏光元件的光作 爲平行光而使入射角度一致的情形相比較，則所得到的偏 -6 - 200944902 光光的消光比變壞。 又，也有利用有機膜的偏光元件，惟此爲長時間照射 爲了光配向所使用的紫外線的光，則特性會劣化之故，因 而作成工業性地使用。 對此，線狀格子型偏光元件是射出對於射入於偏光元 件的角度的偏光光的消光比的依存性較小，所以，即使如 從棒狀燈所射出的光的發散光，若射入角度爲±45°的範圍 ，則光所照射的領域全體全面，也可得到較優異的消光比 的偏光光。 所以，對應於光配向膜的膜的寬度設置棒狀燈的長度 ’而將光配向膜對於對於偏光光照射裝置朝一方向相對地 移動’則原理上以1支燈，可進行廣泛面積的光配向膜的 配向處理。 若在棒狀燈組合線狀格子型偏光元件，則不需要將來 自光源的光作成平行光所用的光學元件，而能低成本地製 作裝置全體。 專利文獻1:日本特開2004-163881號公報 專利文獻2:日本特開2004-144884號公報 專利文獻3:日本特開2002-328234號公報 專利文獻4:日本特表2003-508813號公報 專利文獻5:日本特開2007-178763號公報 非專利文獻 1 · H. Shitomi. et al.「Optically Controlled Alignment 〇f Liquid Crystal on Polyimide Films Exposed to Undulator Radiation」Proc. Int. Conf. 200944902 SRMS-2 Jpn. J. Appl. Phys. Vol. 3 8 ( 1 999 ) .pp. 176-179 【發明內容】 習知很多以波長 300nm~500nm的偏光光進行配向的 光配向膜，但是，最近，也成爲可製作以波長3 OOnm以 下（ 200nm〜300nm)的偏光光進行配向的光配向膜（參照 非專利文獻1 )。 @ 所以，作爲偏光光照射裝置，成爲被要求射出波長 300nm以下（ 200nm〜300nm)的偏光光的裝置，尤其是以 260nm±10nm (較佳是260nm±20nm)的波長領域可得到消 光比爲15: 1以上的偏光光的裝置。 但是，以組合棒狀燈與線狀格子型偏光元件欲製作此 種裝置，則有如下問題。 線狀格子型偏光元件的格子是藉由蝕刻所形成。所以 ，作爲格子的材料，傳統上多使用容易加工的鋁，但是， φ 以鋁形成格子時，本發明人發現了會發生以下的3個問題 〇 (1 ):在波長爲300nm以下的領域，偏光光的消光 比降低，而在大約250nm以下的波長領域，消光比成爲1 :1 (成爲不偏光）。 (2):在波長爲340nm以下的領域，藉由射入於線 狀格子型偏光元件的光的角度，透射率會變化。如上述地 ’來自棒狀燈的光是發散光。所以，射入於偏光元件的光 的角度是依場所而不相同（燈正下即在偏光元件的中央部 -8 - 200944902 ，射入角度小的光的成分較多，而在周邊部，射入角度大 的光的成分較多）。因此，藉由射入於偏光元件的光的角 度而透射率有變化，則在射出的偏光光產生照度不均勻（ 偏光光照射領域的照度分布變大）。 (3):射入於線狀格子型偏光元件的光的角度變大 ，則從偏光元件射出的偏光光的方向會變化。亦即，隨著 對偏光元件的射入角度變大，所射出的偏光光的偏光軸的 旋轉角度變大。 如上述地，射入於偏光元件的光的角度，是在偏光元 件的中央部，則射入角度小的光的成分較多，而在周邊部 ，則射入角度大的光的成分較多。所以在偏光光所照射的 照射的照射領域的中央部，即使偏光光的偏光軸的方向是 朝所期望的方向，在周邊部，偏光光的偏光軸的方向是從 所期望的方向旋轉偏離。亦即，在偏光光的照射領域，有 方向上偏差發生於偏光軸。 φ 在偏光光的照射領域，若在偏光光的照度不均勻或在 偏光軸的方向有偏差的狀態進行處理，則在配向膜，產生 無法得到所期望的配向特性的部分。 本發明是鑑於上述事項而創作者’在組合線狀光源與 線狀格子型偏光元件，而對於光配向膜照射偏光光的偏光 光照射裝置，提供即使在300nm以下的波長領域也可得 到良好的消光比的偏光光。又，在波長300nm以下的領 域，即使射入於偏光元件的光的角度不相同，透射率也不 會變化，還有，即使射入於線狀格子型偏光元件的光的角 200944902 度不相同，也不會使射出的偏光光的方向變化（偏光軸會 旋轉）的光配向用偏光光照射裝置作爲目的。 本發明人經專心檢討之結果，利用氧化鈦（TiOx )形 成線狀格子型偏光元件的格子，由此，可看出解決上述的 課題。 亦即，使用具有以氧化鈦（TiOx)所形成的格子的偏 光元件，則在300nm以下的波長領域也可得到良好的消 光比的偏光光，即使光配向膜的感度爲200〜300nm的範 圍的工件，也可有效果地進行光配向處理。 依據以上，在本發明中，一種光配向用偏光光照射裝 置’是具備將來自線狀光源的光利用線狀格子型偏光元件 予以偏光而射出的光照射部，將該光照射部的偏光光照射 至配向膜的光配向用偏光光照射裝置，其特徵爲；上述線 狀格子型偏光元件的格子是利用氧化鈦（TiOx )所形成。 在本發明，可得到以下的效果。 (1 )利用氧化鈦（TiOx )形成線狀格子型偏光元件 的格子，由此即使在300nm以下的波長領域，也可得到 良好的消光比的偏光光。 具體地說明，在260nm±20nm的範圍，可得到15 : 1 以上的消光比。 所以，使用上述線狀格子型偏光元件與線狀光源，構 成光配向用偏光光照射裝置的光照射部，由此，成爲可有 效果地進行光配向膜的感度爲200〜3 00nm的範圍的工件 的光配向。 -10- 200944902 (2) 藉由使用上述線狀格子型偏光元件，在波長 3 OOnm以下的領域中，即使射入於偏光元件的光的角度不 相同，透射率也幾乎沒有變化。 (3) 又，藉由使用上述線狀格子型偏光元件，即使 射入於線狀格子型偏光元件的光的角度不相同，射出的偏 光光的方向（偏光軸進行旋轉）也幾乎沒有變化。 【實施方式】 在第1圖表示本發明的實施例的偏光光照射裝置的構 成例。 與第8圖同樣，在光照射部6，內設有線狀的光源的 高壓水銀燈或將金屬添加於水銀的金屬鹵化物燈等的棒狀 燈2，及反射來自燈2的光的槽狀反射鏡3。又在光射出 側設有線狀格子型偏光元件1。在此，棒狀高壓水銀燈或 金屬鹵化物燈，是眾知作爲放射波長3 OOnm以下的光的 光源。 又，與第8圖不相同，在第1圖中，形成有光配向膜 的工件4，並不是帶狀工件而是在光透射性的基板上形成 有光配向膜4a的面板基板，被載於工件平台5上。該光 配向膜4a的感度是例如200〜300nm的範圍。 面板基板時，也與帶狀工件時同樣地，使用具備對應 於面板基板的寬度的發光長度的燈，對於偏光光被照射的 領域，將工件4對於燈2的長度方向朝正交方向相對地移 動而進行光配向處理。 -11 - 200944902 亦即，工件4朝圖中箭號方向被搬運，而來自光照射 部6的光是利用線狀格子型偏光元件1被偏光，而被照射 於搬運光照射部6下的工件4，而進行著光配向處理。 以下，作爲線狀光源以棒狀燈作爲例子加以說明，惟 近年來也實用化放射紫外光的LED或LD，而直線狀地排 列配置此種LED或LD作成線狀光源也可以。又這時候， 排列LED或LD的方向相當於燈的長度方向。 在第2圖表示本發明的實施例的線狀格子型偏光元件 的構成。 如同圖所示地，藉由氧化鈦（TiOx )形成線狀格子型 偏光元件的格子。 氧化鈦的格子la是形成於透射200nm〜3 00nm的波長 的光的基板（例如石英或氟化鎂等）lb的表面。格子的 間距是150nm。又，格子la的高度是10nm以上。 又，線狀格子型偏光元件是無法製作大者之故，因而 實際上配置於光照射部6的光射出側之際，如第3圖所示 地，將相同種類的複數線狀格子型偏光元件1排列於框 lc所構成。偏光元件的個數是因應於照射偏光光的領域 的大小而適當地選擇。 在第4圖，表示射入於線狀格子型偏光元件的非偏光 光的波長，及射出的偏光光的滑光比之關係。在同圖中， 橫軸是表示光的波長（nm)，而縱軸是以對數表示消光 比者。 在第4圖中，A (菱形格子）是以氧化鈦形成格子的 -12- 200944902 情形，而B(三角標示）是以鋁形成格子的情形。又’ 子的間距兩者都是150nm。 如同圖所示地，以鋁形成格子時，在波長300nm 上的領域，可得到5 0 : 1以上的良好的消光比。但是’ 波長3 OOnm以下的領域，消光比是降低，而在波長 270nm，消光比是成爲大約 10:1，在波長約250nm， 光比是成爲約1 : 1無法得到偏光光。 對於此，以氧化鈦形成格子時，在波長300nm以 的領域的消光比，是與鋁時相比較較良好，而在波 240nm~300nm的範圍下，消光比可得到 15: 1以上的 光光。又，24 Onm以下的虛線是推測値。 如上述地，現在被要求可得到260nm±l〇nm (較佳 26〇nm±20nm)的波長領域而消光比爲15: 1以上的偏 光的裝置，惟使用以氧化鈦形成格子的線狀格子型偏光 件，就可報應於該要求。 又，理論上，即使以鋁形成格子，若將間距變狹窄 當然也可將短波長的光作成偏光。但是，實際上將間距 狹窄，則格子欠缺，或蛇行而降低射出的偏光光的品質 結果，無法得到消光比1 5 : 1以上的偏光光。在現狀， 比150nm還要狹窄的線狀格子型偏光元件很難製作出 業上可使用者。 在第5圖，表示射入於線狀格子型偏光元件的非偏 光的角度’及以該角度所射入的光的分光透射率。第ί a)圖是表示以氧化鈦形成格子時的實驗結果，而第5 格 以 在 約 消 下 長 偏 爲 光 元 變 爲 工 光 ；( (b -13- 200944902 )圖是以鋁形成格子時的實驗結果。 雙方的圖式，橫軸是表示射入於線狀格子型偏光元件 的光的波長（nm)，而縱軸是表示光的透射率（％)。分 別針對於射入於線狀格子型偏光元件的光的角度（射入角 )爲〇° (垂直射入）時，30°時、45°時加以測定。 以氧化鈦形成格子時，或是以鋁形成格子時，在波長 爲340nm以上的領域，即使射入於偏光元件的光的角度 有變化，透射率是不變。 但是，如第5 ( b )圖所示地，以鋁形成格子時，則 在波長340nm以下的領域中，當射入角變大，則在特定 波長領域中，透射率會降低。 例如，射入於偏光元件的角度爲30°的光的透射率， 是在波長270nm〜300nm的領域中，與射入角度爲0°的光 相比較，透射率有降低大約1 〇%的情形。又，在射入於偏 光元件的角度爲 45°的光的透射率，是在波長 2 80nm〜340nm的領域中，與射入角度0°的光相比較，透 射率有降低約15%的情形。 如上述地，作爲光源使用棒狀燈時，來自棒狀燈的光 是發散光，而在燈的正下方亦即在偏光元件的中央部，射 入角度小的光的成分較多，而在周邊部，則射入角度大的 光的成分較多。 因此，如上述地，當光的射入角度變大而降低光的透 射率，則在偏光光所照射的領域的周邊部，偏光光的照度 變小。因此，在偏光光照射領域的周邊部，無法充分地進 -14- 200944902 行光配向膜的光配向處理。 對於此，如第5(a)圖所示地，以氧化鈦形成格子 時，針對於射入角爲〇°，30°，45°的任一角度時，在 200nm〜300nm的波長領域中，透射率是幾乎沒有相差。 因此，在偏光光所照射的照射領域，可進行沒有偏光光的 照度不均勻（照度均勻度高）的照度。因此，在偏光光所 照射的全領域，可充分地進行光配向膜的光配向處理。 在第6圖，表示射入於線狀格子型偏光元件的非偏光 光的角度，及射出的偏光光的偏光軸的旋轉量的關係。橫 軸是表示射入於線狀格子型偏光元件的光的角度（°)， 而縱軸是表示射出的偏光光的偏光軸的旋轉量（°)。 偏光軸的旋轉量，是以射入角度爲0°時的偏光軸的方 向作爲基準，而表示由該處的旋轉角度。 又，射入於線狀格子型偏光元件的光的波長，是以氧 化鈦形成格子的偏光元件時爲254nm，而以鋁形成格子的 偏光元件時爲365nm。 如同圖所示地，以鋁形成格子時，隨著光的射角度變 大，所射出的偏光光的偏光軸的旋轉量變大，而射入角度 爲45·時，偏光軸是旋轉約6°。 如上述地，在偏光元件的中央部射入角度小的光的成 分較多，而在周邊部射入角度大的光的成分較多之故，因 而光的射入角度變大而偏光光的偏光軸的旋轉量變大，則 在偏光光所照射的領域的周邊部，偏光光的偏光軸方向從 所期望的方向會旋轉很大（會偏離）。因此，在偏光光照 -15- 200944902 射領域的周邊部，無法將光配向膜朝所期望的方向進行光 配向處理。 對於此，以氧化鈦形成格子時，即使光的射入角度有 變化，射出的偏光光的偏光軸是幾乎不會旋轉。 因此，偏光光所照射的領域全體全面，可進行沒有偏 光軸的偏差的照射，因此，有偏光光所照射的全領域可將 光配向膜朝所期望的方向進行光配向處理。 在第7圖，表示本發明的偏光光照射裝置的其他構成 例。 同圖是將具備棒狀燈2與聚光鏡3，及以氧化鈦形成 格子的線狀格子型偏光元件1的光照射部6，排列設置複 數於工件4所搬運的方向者。光配向膜4a所形成的工件 4是被載置於工件平台5上，而朝同圖的箭號方向被搬運 〇 藉由設置複數光照射部6，可增加被照射於工件4上 的光配向膜4a的偏光光的照射量之故，因而可得工件4 的搬運速度作成較快。因此，可提昇光配向的生產能力（ 每一單位的處理枚數）。 【圖式簡單說明】 第1圖是表示本發明的實施例的偏光光照射裝置的構 成例的圖式。 第2(a)圖及第2(b)圖是表示本發明的實施例的 線狀格子型偏光元件的構成例的圖式。 -16- 200944902 第3(a)圖及第3(b)圖是表示排列地配置複數偏 光元件的線狀格子型偏光元件的構成例的圖式。 第4圖是表示射入於線狀格子型偏光元件的非偏光光 的波長’與射出的偏光光的消光比之關係的圖式。 第5(a)圖及第5(b)圖是表示射入於線狀格子型 偏光元件的非偏光光的角度，與在其角度所射入的光的分 光透射率的圖式。 第ό圖是表示射入於線狀格子型偏光元件的非偏光光 的角度，與射出的偏光光的偏光軸的旋轉量之關係的圖式 〇 第7圖是表示本發明的偏光光照射裝置的其他構成例 的圖式。 第8圖是表示組合棒狀燈與線狀格子型偏光元件的偏 光光照射裝置的構成例的圖式。 第9(a)圖及第9(b)圖是表示線狀格子型偏光元 件的槪略構造的圖式。 【主要元件符號說明】 1 :線狀格子型偏光元件 1 a :線狀格子 1 b :基板 lc :框 2 :棒狀燈 3 :反射鏡 -17- 200944902 4 :工件 4a :光配向膜 5 :工件平台 6 :光照射部In the present invention, the alignment film of the liquid crystal panel or the polarized light having a predetermined wavelength is irradiated onto the alignment layer of the viewing angle compensation film to align the light for alignment. The light-emitting device, in particular, a polarized light irradiation device for light alignment of a rod-shaped lamp and a linear lattice-type polarizing element that combines linear light sources. [Prior Art] In recent years, there has been an alignment film for a liquid crystal panel, or a field of view. The alignment treatment of the angular compensation film is a technique in which alignment is performed by irradiating polarized light of a predetermined wavelength on an alignment film, which is called optical alignment. Hereinafter, a film in which an alignment film which is aligned by the above light is used as an alignment layer is collectively referred to as a photo-alignment film. In the light-aligning film, the size of the liquid crystal panel is increased to a large extent (for example, a square of 2 m or more), and φ is also increased in size as the polarized light irradiation device that irradiates the polarized light to the photo-alignment film. In recent years, in order to perform optical alignment of such a large-area light-aligning film, a light-emitting device that combines a rod-shaped lamp and a polarizing element having a linear lattice-like lattice (hereinafter referred to as a linear lattice-type polarizing element) has been proposed. (For example, refer to Patent Document 1 or Patent Document 2). In the polarized light irradiation apparatus for a light alignment film, when the rod-shaped lamp is used, it is possible to produce a longer light-emitting period. Therefore, by using a rod-shaped lamp having a long light emission in response to the width of the alignment film, when the light from the lamp is irradiated while moving the alignment -4-200944902 film in the direction orthogonal to the longitudinal direction of the lamp, the lens can be moved. The alignment film of a wide area is subjected to photoalignment treatment in a short time. Fig. 8 shows an example of the configuration of a polarized light irradiation device in which a rod-shaped lamp and a linear lattice-type polarizing element of a linear light source are combined. In the same figure, the workpiece 40 of the optical alignment film is, for example, a strip-shaped workpiece having a viewing angle compensation film, which is sent by the delivery roller R1 and conveyed in the direction of the arrow in the figure, and is irradiated by the polarized light as follows. The take-up roll R2 is taken up. The light-irradiating portion 20 of the polarized light irradiation device is a rod-shaped lamp 21 including light of a wavelength (ultraviolet light) necessary for the radiation-aligning process, for example, a high-pressure mercury lamp or a metal halide lamp in which mercury is added to other metals, and The ultraviolet ray of the rod-shaped lamp 21 is reflected toward the workpiece 40 to condense the condensing mirror 22. As described above, the length of the rod-shaped lamp 21 is a length in which the light-emitting portion has a width corresponding to a direction orthogonal to the conveyance direction of the workpiece 4A. The light irradiation unit 20 is disposed such that the longitudinal direction of the lamp 21 is in the width direction of the workpiece 40 (the direction in which the conveyance direction is orthogonal). A linear lattice-type polarizing element 10 having a polarizing element is provided on the light-emitting side of the light-irradiating portion 20. The light from the light-irradiating portion 20 is polarized by the linear lattice-type polarizing element 10, and is irradiated onto the workpiece 40 conveyed under the light-irradiating portion 20, and is subjected to light alignment processing. The linear lattice-type polarizing element is shown in detail in, for example, Patent Document 3 or Patent Document 4. Fig. 9 is a schematic view showing a schematic structure of a linear lattice-type polarizing element. The linear lattice-type polarizing element 10 is a surface of a substrate (for example, quartz) 1 Ob at a wavelength of -5 to 200944902 (the wavelength of ultraviolet rays necessary for photoalignment) when the light to be polarized is transmitted. A plurality of linear electric conductors (for example, metal wires such as chrome or aluminum, hereinafter referred to as a gate electrode 10a) having a length longer than the width are disposed in parallel at equal intervals. Further, basically, when the pitch p of the gate electrode 10a is narrowed, the wavelength of the polarized light becomes short. When the polarizing element is inserted into the optical path, the polarization component parallel to the longitudinal direction of the gate is mostly reflected, and the orthogonal polarization component passes. Therefore, the light passing through the linear lattice-type polarizing element is polarized light having a polarization axis orthogonal to the longitudinal direction of the lattice of the polarizing element. Further, for improvement or new improvement of the manufacturing method or material for forming the lattice, for example, Patent Document 5 is known. Conventionally, as a light-aligning polarizing light irradiation device, a linear lamp-type linear lattice-type polarizing element in which a linear light source is used is based on the following reasons. The light from the rod-shaped lamp is divergent light, and even if a polarizing element is disposed on the light-emitting side to obtain polarized light, light of various angles is incident on the polarizing element as a polarizing element, and a vapor deposition film or a Brewster angle is known. (Break, ster's angle) However, these polarizing elements are light that cannot be polarized only at an angle determined by the polarizing element, and only the light incident other than the polarized light passes through almost no polarized light. Therefore, when the light source is divergent light, if a vapor deposition film or a polarizing element using a Brewster angle is used, the obtained polarization is compared with a case where the light incident on the polarizing element is made to be parallel light and the incident angle is matched. 6 - 200944902 The extinction ratio of light is deteriorated. Further, there is a polarizing element using an organic film. However, since light having a long-term exposure to ultraviolet light used for light alignment is deteriorated, the characteristics are deteriorated, so that it is industrially used. On the other hand, the linear lattice-type polarizing element has a small dependence on the extinction ratio of the polarized light that is incident on the polarizing element, and therefore, even if the light is emitted from the rod-shaped lamp, the light is emitted. When the angle is within the range of ±45°, the field in which the light is irradiated is comprehensive, and the polarized light having an excellent extinction ratio can be obtained. Therefore, the length of the rod-shaped lamp is set to correspond to the width of the film of the photo-alignment film, and the photo-alignment film is relatively moved in one direction for the polarized-light irradiation device. In principle, one lamp can be used for a wide area of light alignment. Orientation treatment of the membrane. When a linear lattice-type polarizing element is combined with a rod-shaped lamp, an optical element for making parallel light from the light source of the light source is not required, and the entire apparatus can be manufactured at low cost. Patent Document 1: Japanese Laid-Open Patent Publication No. 2004-163884. Patent Document 2: Japanese Patent Laid-Open Publication No. JP-A No. Hei. 5: JP-A-2007-178763, Non-Patent Document 1 · H. Shitomi. et al. "Optically Controlled Alignment 〇f Liquid Crystal on Polyimide Films Exposed to Undulator Radiation" Proc. Int. Conf. 200944902 SRMS-2 Jpn. J. Appl. Phys. Vol. 3 8 (1 999 ) .pp. 176-179 SUMMARY OF THE INVENTION Many optical alignment films which are aligned with polarized light having a wavelength of 300 nm to 500 nm are known, but recently, they have also been made. An optical alignment film that is aligned with polarized light having a wavelength of 300 nm or less (200 nm to 300 nm) (see Non-Patent Document 1). @ Therefore, as a polarized light irradiation device, it is required to emit polarized light having a wavelength of 300 nm or less (200 nm to 300 nm), and in particular, an extinction ratio of 15 in the wavelength range of 260 nm ± 10 nm (preferably 260 nm ± 20 nm) is obtained. : A device with 1 or more polarized light. However, in order to fabricate such a device by combining a rod-shaped lamp and a linear lattice-type polarizing element, there are the following problems. The lattice of the linear lattice-type polarizing element is formed by etching. Therefore, as a material of the lattice, aluminum which is easy to process is conventionally used. However, when φ is formed into a lattice of aluminum, the inventors have found that the following three problems occur: (1): in the field of wavelengths of 300 nm or less, The extinction ratio of the polarized light is lowered, and in the wavelength region of about 250 nm or less, the extinction ratio becomes 1:1 (becomes unpolarized). (2): In the field of wavelength 340 nm or less, the transmittance changes depending on the angle of light incident on the linear lattice-type polarizing element. As described above, the light from the rod lamp is divergent light. Therefore, the angle of the light incident on the polarizing element is different depending on the place (the light is directly below the center of the polarizing element -8 - 200944902, and the light having a small incident angle is more composed, and the peripheral portion is shot. There are many components of light with a large angle of incidence). Therefore, when the transmittance changes due to the angle of the light incident on the polarizing element, the illuminance unevenness is generated in the emitted polarized light (the illuminance distribution in the field of the polarized light irradiation becomes large). (3): When the angle of the light incident on the linear lattice-type polarizing element increases, the direction of the polarized light emitted from the polarizing element changes. In other words, as the angle of incidence of the polarizing element increases, the angle of rotation of the polarization axis of the emitted polarized light increases. As described above, the angle of the light incident on the polarizing element is such that in the central portion of the polarizing element, the amount of light having a small incident angle is large, and in the peripheral portion, the amount of light having a large incident angle is large. . Therefore, in the central portion of the irradiation field of the irradiation to which the polarized light is irradiated, even if the direction of the polarization axis of the polarized light is in a desired direction, the direction of the polarization axis of the polarized light is rotationally deviated from the desired direction in the peripheral portion. That is, in the field of irradiation of polarized light, a deviation in direction occurs in the polarization axis. φ In the field of irradiation of polarized light, when the illuminance of the polarized light is not uniform or the direction of the polarization axis is deviated, the alignment film is in a portion where the desired alignment characteristics are not obtained. In view of the above, the present invention provides a polarized light irradiation device that combines a linear light source and a linear lattice-type polarizing element with a polarized light for a light alignment film, and is excellent in a wavelength region of 300 nm or less. The extinction ratio of polarized light. Further, in the field of the wavelength of 300 nm or less, even if the angle of the light incident on the polarizing element is not the same, the transmittance does not change, and the angle of the light incident on the linear lattice-type polarizing element is different at 200944902 degrees. The optical alignment light-emitting device that does not change the direction of the emitted polarized light (the polarization axis rotates) is not intended. As a result of intensive review, the present inventors have solved the above problems by forming a lattice of a linear lattice-type polarizing element using titanium oxide (TiOx). In other words, when a polarizing element having a lattice formed of titanium oxide (TiOx) is used, a polarized light having a good extinction ratio can be obtained in a wavelength region of 300 nm or less, even if the sensitivity of the photoalignment film is in the range of 200 to 300 nm. The workpiece can also be optically aligned for effect. According to the present invention, a polarized light irradiation device for light alignment is provided with a light irradiation portion that emits light from a linear light source by polarizing a linear lattice-type polarizing element, and polarized light of the light irradiation portion The polarized light irradiation device for light alignment which is irradiated to the alignment film is characterized in that the lattice of the linear lattice-type polarizing element is formed of titanium oxide (TiOx). In the present invention, the following effects can be obtained. (1) A lattice of a linear lattice-type polarizing element is formed by using titanium oxide (TiOx), whereby a polarized light having a good extinction ratio can be obtained even in a wavelength region of 300 nm or less. Specifically, an extinction ratio of 15:1 or more can be obtained in the range of 260 nm ± 20 nm. Therefore, by using the linear lattice-type polarizing element and the linear light source to form the light-irradiating portion of the polarized light irradiation device for light alignment, the sensitivity of the optical alignment film can be effectively made to be in the range of 200 to 300 nm. The light alignment of the workpiece. -10-200944902 (2) By using the above-described linear lattice-type polarizing element, in the field of wavelengths of 3,000 nm or less, even if the angle of light incident on the polarizing element is not the same, the transmittance hardly changes. (3) Further, by using the linear lattice-type polarizing element, even if the angle of the light incident on the linear lattice-type polarizing element is different, the direction of the emitted polarized light (rotation of the polarization axis) hardly changes. [Embodiment] Fig. 1 shows an example of the configuration of a polarized light irradiation device according to an embodiment of the present invention. Similarly to the eighth embodiment, a high-pressure mercury lamp in which a linear light source is provided in the light-irradiating portion 6, a rod-shaped lamp 2 such as a metal halide lamp in which metal is added to mercury, and a groove-shaped reflection reflecting light from the lamp 2 are provided. Mirror 3. Further, a linear lattice-type polarizing element 1 is provided on the light-emitting side. Here, a rod-shaped high-pressure mercury lamp or a metal halide lamp is known as a light source that emits light having a wavelength of 300 nm or less. Further, unlike FIG. 8, in the first drawing, the workpiece 4 on which the photo-alignment film is formed is not a strip-shaped workpiece but a panel substrate on which the photo-alignment film 4a is formed on the light-transmissive substrate, and is loaded. On the workpiece platform 5. The sensitivity of the light alignment film 4a is, for example, in the range of 200 to 300 nm. In the case of the panel substrate, a lamp having a light-emitting length corresponding to the width of the panel substrate is used in the same manner as in the case of the strip-shaped workpiece, and the workpiece 4 is opposed to the longitudinal direction of the lamp 2 in the direction orthogonal to the direction in which the polarized light is irradiated. Move and perform optical alignment processing. -11 - 200944902, that is, the workpiece 4 is conveyed in the direction of the arrow in the figure, and the light from the light-irradiating portion 6 is polarized by the linear lattice-type polarizing element 1, and is irradiated to the workpiece under the light-emitting portion 6 4, while performing optical alignment processing. In the following, as a linear light source, a rod-shaped lamp will be described as an example. However, in recent years, LEDs or LDs that emit ultraviolet light have been put into practical use, and such LEDs or LDs may be arranged in a line to form a linear light source. At this time, the direction in which the LEDs or LDs are arranged corresponds to the length direction of the lamps. Fig. 2 is a view showing the configuration of a linear lattice-type polarizing element according to an embodiment of the present invention. As shown in the figure, a lattice of a linear lattice-type polarizing element is formed by titanium oxide (TiOx). The lattice la of titanium oxide is a surface of a substrate (e.g., quartz, magnesium fluoride, or the like) lb formed to transmit light having a wavelength of 200 nm to 300 nm. The pitch of the grid is 150 nm. Further, the height of the lattice la is 10 nm or more. In addition, since the linear lattice-type polarizing element cannot be made large, it is actually disposed on the light-emitting side of the light-irradiating portion 6, and as shown in Fig. 3, the same type of complex linear lattice-type polarized light is used. The elements 1 are arranged in a frame lc. The number of the polarizing elements is appropriately selected in accordance with the size of the field in which the polarized light is irradiated. Fig. 4 shows the relationship between the wavelength of the non-polarized light incident on the linear lattice-type polarizing element and the sliding ratio of the emitted polarized light. In the same figure, the horizontal axis represents the wavelength (nm) of light, and the vertical axis represents the extinction ratio in logarithms. In Fig. 4, A (diamond lattice) is a case where -12-200944902 is formed by titanium oxide, and B (triangular indication) is a case where lattice is formed of aluminum. The spacing of the sub-heads is both 150 nm. As shown in the figure, when a lattice is formed of aluminum, a good extinction ratio of 50:1 or more can be obtained in a field at a wavelength of 300 nm. However, in the field of wavelengths below 30,000 nm, the extinction ratio is lowered, and at the wavelength of 270 nm, the extinction ratio is about 10:1, and at a wavelength of about 250 nm, the light ratio is about 1:1, and polarized light cannot be obtained. In this case, when the lattice is formed of titanium oxide, the extinction ratio in the field of 300 nm is better than that in the aluminum phase, and in the range of 240 nm to 300 nm, the extinction ratio can obtain 15:1 or more. . Moreover, the dotted line below 24 Onm is speculated. As described above, a device having a wavelength range of 260 nm ± 1 〇 nm (preferably 26 〇 nm ± 20 nm) and an extinction ratio of 15: 1 or more is required, but a linear lattice in which lattices are formed by using titanium oxide is used. Type polarizers can be reimbursed for this requirement. Further, in theory, even if a lattice is formed of aluminum, if the pitch is narrowed, it is of course possible to polarize light of a short wavelength. However, in practice, when the pitch is narrow, the lattice is lacking, or the quality of the emitted polarized light is reduced by serpentine, and the polarized light having an extinction ratio of 1 5 : 1 or more cannot be obtained. In the current situation, a linear lattice type polarizing element which is narrower than 150 nm is difficult to manufacture as an industrial user. In Fig. 5, the angle ' of the non-polarized light incident on the linear lattice-type polarizing element and the spectral transmittance of the light incident at the angle are shown. The figure ί a) shows the experimental result when the lattice is formed by titanium oxide, and the fifth grid is changed to the work light at about the long wavelength; (b-13-200944902) is a lattice formed of aluminum The results of the experiment are as follows: the horizontal axis represents the wavelength (nm) of the light incident on the linear lattice-type polarizing element, and the vertical axis represents the transmittance (%) of the light. When the angle (injection angle) of the light of the linear lattice-type polarizing element is 〇° (vertical incident), it is measured at 30° and 45°. When the lattice is formed of titanium oxide or when the lattice is formed of aluminum, In the field of wavelength 340 nm or more, even if the angle of light incident on the polarizing element changes, the transmittance does not change. However, as shown in Fig. 5 (b), when the lattice is formed of aluminum, the wavelength is 340 nm. In the following fields, when the incident angle becomes large, the transmittance is lowered in a specific wavelength region. For example, the transmittance of light incident on the polarizing element at an angle of 30° is in the field of wavelengths of 270 nm to 300 nm. Medium, the transmittance is reduced compared to the light with an angle of incidence of 0° In the case of about 1%, the transmittance of light incident on the polarizing element at an angle of 45° is in the field of the wavelength of 80 nm to 340 nm, and the transmittance is compared with the light having an incident angle of 0°. In the case where the rod-shaped lamp is used as the light source, the light from the rod-shaped lamp is divergent light, and the injection angle is small immediately below the lamp, that is, in the central portion of the polarizing element. There are many components of light, and there are many components of light having a large angle of incidence in the peripheral portion. Therefore, as described above, when the incident angle of light is increased to reduce the transmittance of light, it is irradiated by polarized light. In the peripheral portion of the field, the illuminance of the polarized light is reduced. Therefore, in the peripheral portion of the field of polarized light irradiation, the light alignment treatment of the light alignment film of the light can not be sufficiently carried out. For this, as in the fifth (a) As shown in the figure, when the lattice is formed of titanium oxide, the transmittance is almost no difference in the wavelength range of 200 nm to 300 nm with respect to the incident angle of 〇°, 30°, and 45°. In the field of illumination illuminated by polarized light, no polarized light can be applied The illuminance of the illuminance is not uniform (the illuminance uniformity is high). Therefore, the optical alignment treatment of the photoalignment film can be sufficiently performed in all areas irradiated with the polarized light. Fig. 6 shows the incident on the linear lattice-type polarizing element. The relationship between the angle of the non-polarized light and the amount of rotation of the polarization axis of the emitted polarized light. The horizontal axis represents the angle (°) of the light incident on the linear lattice-type polarizing element, and the vertical axis represents the polarized light emitted. The amount of rotation of the polarization axis of the light (°) The amount of rotation of the polarization axis is based on the direction of the polarization axis when the incident angle is 0°, and indicates the angle of rotation from the position. The wavelength of light of the lattice-type polarizing element is 254 nm when the polarizing element of the lattice is formed of titanium oxide, and 365 nm when the polarizing element of the lattice is formed of aluminum. As shown in the figure, when the lattice is formed of aluminum, as the angle of incidence of the light increases, the amount of rotation of the polarization axis of the emitted polarized light becomes large, and when the incident angle is 45·, the polarization axis is rotated by about 6°. . As described above, since a large amount of light having a small angle is incident in the central portion of the polarizing element, and a large amount of light having a large angle of incidence in the peripheral portion is formed, the incident angle of the light is increased, and the polarized light is large. When the amount of rotation of the polarization axis is increased, the polarization axis direction of the polarized light is greatly rotated (deviated) from the desired direction in the peripheral portion of the region where the polarized light is irradiated. Therefore, in the peripheral portion of the field of polarized light -15-200944902, the light alignment film cannot be optically aligned in a desired direction. In this case, when the lattice is formed of titanium oxide, even if the incident angle of light changes, the polarization axis of the emitted polarized light hardly rotates. Therefore, the field in which the polarized light is irradiated is comprehensive and the irradiation without the deviation of the polarization axis can be performed. Therefore, the entire region irradiated with the polarized light can perform the optical alignment treatment in the desired direction. Fig. 7 shows another configuration example of the polarized light irradiation device of the present invention. In the same figure, the light-irradiating portion 6 including the rod-shaped lamp 2, the condensing mirror 3, and the linear lattice-type polarizing element 1 in which lattices are formed of titanium oxide is arranged in a plurality of directions in which the workpiece 4 is transported. The workpiece 4 formed by the optical alignment film 4a is placed on the workpiece stage 5, and is transported in the direction of the arrow in the same figure. By providing the plurality of light irradiation portions 6, the light alignment on the workpiece 4 can be increased. The irradiation amount of the polarized light of the film 4a is such that the conveyance speed of the workpiece 4 can be made faster. Therefore, the production capacity of light alignment (the number of processing per unit) can be improved. [Brief Description of the Drawings] Fig. 1 is a view showing a configuration example of a polarized light irradiation device according to an embodiment of the present invention. 2(a) and 2(b) are views showing a configuration example of a linear lattice-type polarizing element according to an embodiment of the present invention. -16-200944902 Fig. 3(a) and Fig. 3(b) are diagrams showing a configuration example of a linear lattice-type polarizing element in which a plurality of polarizing elements are arranged in alignment. Fig. 4 is a view showing the relationship between the wavelength ' of the non-polarized light incident on the linear lattice-type polarizing element and the extinction ratio of the emitted polarized light. Figs. 5(a) and 5(b) are diagrams showing the angles of the non-polarized light incident on the linear lattice-type polarizing element and the spectral transmittance of the light incident at the angle. FIG. 7 is a view showing the relationship between the angle of the non-polarized light incident on the linear lattice-type polarizing element and the amount of rotation of the polarization axis of the emitted polarized light. FIG. 7 is a view showing the polarized light irradiation device of the present invention. The schema of the other constituent examples. Fig. 8 is a view showing a configuration example of a polarized light irradiation device that combines a rod-shaped lamp and a linear lattice-type polarizing element. Figs. 9(a) and 9(b) are diagrams showing a schematic structure of a linear lattice-type polarizing element. [Description of main component symbols] 1 : Linear lattice type polarizing element 1 a : Linear lattice 1 b : Substrate lc : Frame 2 : Rod lamp 3 : Mirror -17 - 200944902 4 : Work piece 4a : Light alignment film 5 : Workpiece platform 6: light irradiation unit
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