CN104423097A - Polarized light illumination device - Google Patents
Polarized light illumination device Download PDFInfo
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- CN104423097A CN104423097A CN201410097108.7A CN201410097108A CN104423097A CN 104423097 A CN104423097 A CN 104423097A CN 201410097108 A CN201410097108 A CN 201410097108A CN 104423097 A CN104423097 A CN 104423097A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
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- Crystallography & Structural Chemistry (AREA)
- Liquid Crystal (AREA)
- Polarising Elements (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
Abstract
The invention provides a polarized light illumination device. The quantity of light emitted from the device is increased while a polarization plate is not enlarged. The polarized light illumination device comprises a light source (5), a main reflection plate (10), the polarization plate (30), and an auxiliary reflection plate (20). The light source (5) emits light containing ultraviolet. The main reflection plate (10) controls distribution of light emitted from the light source (5). The polarization plate (30) is arranged on the advancing side of the light subjected to the light distribution control of the main reflection plate (10). Light emitted from the light source (5) and the light subjected to the light distribution control of the main reflection plate (10) enter the polarization plate and then polarized light is emitted. The auxiliary reflection plate (20) is arranged between the main reflection plate (10) and the polarization plate (30) and reflects light not facing the polarization plate (30) in the light emitted from the light source (5) and the light subjected to the light distribution control of the main reflection plate (10) to the main reflection plate (10) side.
Description
Technical field
Embodiments of the present invention relate to a kind of polarized light illumination device for liquid crystal panel manufacture etc.
Background technology
As when manufacturing liquid crystal panel etc., carrying out the technology during orientation process to the alignment film of liquid crystal panel or the both alignment layers of compensation film for angular field of view etc., having technology that the polarized light by irradiating provision wavelengths to alignment film carries out luminous intensity distribution, that be referred to as so-called light orientation.As the device in order to carry out this light orientation, such as, the polarized light illumination device of the polarizer having the grid combining bar-shaped (bar-like) lamp and have wiregrating (wire grid) shape is proposed.
This polarized light illumination device has illumination part, and this illumination part comprises: the light of the wavelength needed for radiating light orientation process and ultraviolet bar-shaped lamp, and is reflected and the condenser of optically focused towards workpiece by the ultraviolet from bar-shaped lamp.Polarized light illumination device also possesses the wire grid type polarizer as polarizer at the light exit side of this illumination part.Thus, the light from illumination part is irradiated to workpiece after by wire grid type polarizer polarization, thus carries out light orientation process.
[prior art document]
[patent documentation]
[patent documentation 1] Japanese Patent Laid-Open 2009-265290 publication
Summary of the invention
The problem that the present invention will solve
Polarized light illumination device as described makes light be incident to the polarization plates such as wire grid type polarizer, and the illumination through polarization is incident upon workpiece, therefore in order to irradiate light to workpiece efficiently, effectively increases polarization plates.But, there is restriction in the size that polarization plates can make, be difficult to maximize, therefore present situation is make the shape of the reflecting plate directly over bar-shaped lamp become elliptical shape when the axis direction of bar-shaped lamp is observed, become light-focusing type by this, thus reduce the loss of light, but be nonetheless also difficult to obtain enough light quantities.
The present invention completes in view of described situation, and object is to provide the light quantity that can increase from the light of device outgoing and can not makes the polarized light illumination device that polarization plates maximizes.
Solve the means of problem
The polarized light illumination device of embodiment comprises light source, principal reflection plate, polarization plates and auxiliary reflecting plate.Light source injection bag light with violet rays.The luminous intensity distribution of principal reflection plate to the light penetrated from light source controls.Polarization plates, relative to principal reflection plate, is disposed in the working direction side being made the controlled light of luminous intensity distribution by principal reflection plate, and the incident light from light source injection of described polarization plates with made the controlled light of luminous intensity distribution and outgoing polarization light by principal reflection plate.Auxiliary reflecting plate is disposed between principal reflection plate and polarization plates, and by the light penetrated from light source and made by principal reflection plate not reflex to principal reflection plate side towards the light of polarization plates in the controlled light of luminous intensity distribution.
The effect of invention
According to the present invention, the light quantity from the light of device outgoing can be increased and polarization plates can not be made to maximize.
Embodiment
The polarized light illumination device 1 of the embodiment below illustrated comprises light source 5, principal reflection plate 10, polarization plates 30 and auxiliary reflecting plate 20.Light source 5 penetrates bag light with violet rays.The luminous intensity distribution of principal reflection plate 10 to the light penetrated from light source 5 controls.Polarization plates 30, relative to principal reflection plate 10, is disposed in the working direction side being made the controlled light of luminous intensity distribution by principal reflection plate 10, and the light that penetrates from light source 5 of incidence with made the controlled light of luminous intensity distribution and outgoing polarization light by principal reflection plate 10.Auxiliary reflecting plate 20 is disposed between principal reflection plate 10 and polarization plates 30, and by the light penetrated from light source 5 and made by principal reflection plate 10 not reflex to principal reflection plate 10 side towards the light of polarization plates 30 in the controlled light of luminous intensity distribution.
And the polarized light illumination device 1 of the embodiment below illustrated also comprises the bandpass filter 35 of the light only transmitting specific wavelength, and bandpass filter 35 is disposed between auxiliary reflecting plate 20 and polarization plates 30.
And, in the polarized light illumination device 1 of the embodiment below illustrated, principal reflection plate 10 be the light that makes to penetrate from light source 5 to the reflecting plate of the light-focusing type of polarization plates 30 optically focused, the light exposing to auxiliary reflecting plate 20 from light source 5 reflects towards light source 5 by auxiliary reflecting plate 20.
And, in the polarized light illumination device 1 of the embodiment below illustrated, light source 5 is formed as wire, and the shape of the boosting reflector 21 when assisting reflecting plate 20 is observed in the direction along the axle center of light source 5, is formed by a part of shape of the circle centered by the axle center of light source 5.
[embodiment]
Secondly, with reference to the accompanying drawings the polarized light illumination device of embodiment is described.Fig. 1 is the exploded perspective view of the formation of the polarized light illumination device representing embodiment.Fig. 2 is the sectional view that the X-direction of the polarized light illumination device shown in Fig. 1 is observed.In the manufacture of polarized light illumination device 1 shown in this figure such as the alignment film of liquid crystal panel or the alignment film of compensation film for angular field of view etc.Expose to the structure of reference direction according to workpiece W of the ultraviolet polarization axle on the surface of workpiece W, purposes or required specification and suitably set.Below, the Width of workpiece W is called X-direction, by orthogonal with X-direction and the long side direction (also referred to as conveyance direction) of workpiece W is called Y direction, the direction orthogonal with Y direction and X-direction is called Z-direction.In addition, about the direction parallel with Z axis, by represent Z-direction arrow front end towards direction be called top, by with represent Z-direction arrow front end towards direction in opposite directions, direction be called below.
The polarized light illumination device 1 of present embodiment comprises: light source 5, injection bag light with violet rays; Principal reflection plate 10, controls the luminous intensity distribution of the light penetrated from light source 5; And polarization plates 30, be disposed in the working direction side being made the controlled light of luminous intensity distribution by principal reflection plate 10 relative to principal reflection plate 10, and the light that penetrates from light source 5 of incidence with made the controlled light of luminous intensity distribution and outgoing polarization light by principal reflection plate 10.Wherein, light source 5 is light source that is bar-shaped or wire.
And, light source 5 is the lumiline lamp such as high-pressure mercury-vapor lamp or the metal halide lamp having enclosed the metal halide such as iron or iodine in high-pressure mercury-vapor lamp further such as having enclosed the rare gas such as mercury, argon gas, xenon in the glass tube of ultraviolet permeability, at least has the illuminating part of linearity.The long side direction of the illuminating part of light source 5 is parallel with X-direction, and the length of the illuminating part of light source 5 is longer than the width of workpiece W.Light source 5 can such as comprise from the illuminating part injection of wire the ultraviolet light that wavelength is 200nm to 400nm, and the light that light source 5 penetrates is the unpolarized light of what is called with various polarization axle composition.
And, principal reflection plate 10 with light source 5 face in opposite directions, there is the primary reflection surface 11 of the light that reflection is penetrated from light source 5, the shape that shape when the direction along the axle center being formed as bar-shaped light source 5 of primary reflection surface 11 is observed and axis direction are observed, namely X-direction observes the shape that lower shape is a part of opening of ellipse.Principal reflection plate 10 is arranged in the mode of the position of a focus of 2 focuses of the ellipse of primary reflection surface 11 using the lamp center C in the axle center as light source 5 and arranges, another focus side opening.Principal reflection plate 10 is so-called light-focusing type reflecting plate, that is, primary reflection surface 11 becomes the shape of an oval part as described, thus when light source 5 is configured in the position of a focus, makes the light penetrated from light source 5 to another near focal point optically focused.And, principal reflection plate 10 with opening in the Z-axis direction towards and arrange.
Principal reflection plate 10, along being formed as bar-shaped light source 5, extends relative to light source 5 abreast with described shape.In addition, principal reflection plate 10, in the part of the opposition side of the oval opening side of primary reflection surface 11, is the best part vicinity in the curvature of ellipse, forms the space and space part 12 of to open in circumferential direction or the Y direction overhead of ellipse.Namely, space part 12 is formed in the opposition side of the oval opening side of primary reflection surface 11 in the Z-axis direction when observing from light source 5.Principal reflection plate 10 utilizes this space part 12, and the space of oval inner and outer is communicated with.And principal reflection plate 10 is configured to base material and comprises glass, become the Cold Mirrors (cold mirror) being formed primary reflection surface 11 by multilayer film.
And polarization plates 30 can extract the light of the polarization axle only vibrated in reference direction from following light, describedly only penetrate from light source 5 and there is the light of the various polarization axle compositions vibrated in all directions equably.In addition, generally the light of the polarization axle only vibrated in reference direction is called linear polarization.And polarization axle is the electric field of light and the direction of vibration in magnetic field.
Polarization plates 30, relative to light source 5 and principal reflection plate 10, is disposed in the oval opening side place of primary reflection surface 11 in the Z-axis direction.Principal reflection plate 10 as light-focusing type reflecting plate arranges in the mode that can make light and be concentrated on this polarization plates 30.And the surrounding in the X-direction of polarization plates 30 and Y direction is surrounded by polarization plates framework 31, and polarization plates 30 is kept by polarization plates framework 31 thus.
Polarization plates 30 becomes following wire grid polarization element, that is, by the substrates such as quartz glass equally spaced the electric conductor (such as, the metal wire such as chromium or aluminium alloy) of the multiple linearity of configured in parallel form.The long side direction of electric conductor is orthogonal with reference direction.The spacing of electric conductor it is desirable to less than 1/3 of the ultraviolet wavelength penetrated from light source 5.Polarization plates 30 reflects or absorbs the ultraviolet major part of the polarization axle parallel with the long side direction of electric conductor the ultraviolet penetrated from light source 5, makes the ultraviolet of the polarization axle orthogonal with the long side direction of electric conductor pass through and irradiate towards workpiece W.
In addition, in present embodiment, long side direction and the Y direction of the electric conductor of polarization plates 30 configure abreast, and the ultraviolet of the polarization axle parallel with X-direction is passed through.Namely, in present embodiment, reference direction is parallel with X-direction.
Between polarization plates 30 and light source 5, arrange the bandpass filter 35 of the light only transmitting the specific wavelength penetrated from light source 5, bandpass filter 35 with polarization plates 30 close to or the state that contacts and arranging.This bandpass filter 35 comprises known bandpass filter, can pass through the ultraviolet of the provision wavelengths such as such as 254nm or 365nm the light penetrated from light source 5, and limits the light transmission of other wavelength.And, bandpass filter 35 in the same manner as polarization plates 30, with towards Z-direction towards and arrange, and the surrounding in the X-direction of bandpass filter 35 and Y direction is surrounded by wave filter framework 36.Thus, bandpass filter 35 is kept by wave filter framework 36.
And then, between principal reflection plate 10 and polarization plates 30, arrange auxiliary reflecting plate 20, this auxiliary reflecting plate 20 make the light that penetrates from light source 5 and made by principal reflection plate 10 the controlled light of luminous intensity distribution not towards the light of polarization plates 30 to principal reflection plate 10 lateral reflection.Specifically, between the part that auxiliary reflecting plate 20 is disposed in principal reflection plate 10 split shed and bandpass filter 35, or between light source 5 and bandpass filter 35, auxiliary reflecting plate 20 arranges with state that is close with bandpass filter 35 or that contact.
This auxiliary reflecting plate 20 with light source 5 or principal reflection plate 10 face in opposite directions, there is the boosting reflector 21 of reflection from the light of light source 5 or principal reflection plate 10.The shape that the axis direction being formed as bar-shaped light source 5 of boosting reflector 21 is observed, the shape that namely X-direction is observed becomes a part of shape of the circle of circular a part of opening.
Auxiliary reflecting plate 20 is positioned at the mode of the position at the center of the circle of boosting reflector 21 with lamp center C and arranges, and becomes position Z-direction is positioned at than the center of circle is removed gained shape by the part of principal reflection plate 10 side.Thus, auxiliary reflecting plate 20 opening towards the side that light source 5 or principal reflection plate 10 are positioned in the Z-axis direction.
And the radial Shang Congdeng center C distance to the outer end of principal reflection plate 10 of radius ratio centered by the C of lamp center of boosting reflector 21 is large.Therefore, the part that is positioned at of principal reflection plate 10 and auxiliary reflecting plate 20 both sides in the Z-axis direction, auxiliary reflecting plate 20 is positioned at the outside in the radial direction centered by the C of lamp center.
Auxiliary reflecting plate 20, along being formed as bar-shaped light source 5, extends relative to light source 5 abreast with described shape.In addition, the auxiliary part of reflecting plate 20 in the opposition side of the circular open side of boosting reflector 21, the space of being opened by circumferential direction or the Y direction overhead in circle and form peristome 22.
Specifically, peristome 22, on auxiliary reflecting plate 20, is formed at boosting reflector 21 from the nearest vicinity of bandpass filter 35, and the width of the peristome 22 in Y direction is slightly larger than the width of the polarization plates 30 on equidirectional.Auxiliary reflecting plate 20 is that when observing with Z-direction, peristome 22 comprises the mode in the region arranging polarization plates 30 and arranges with the position relationship of polarization plates 30.And auxiliary reflecting plate 20 is configured to base material and comprises glass in the same manner as principal reflection plate 10, becomes the Cold Mirrors being formed boosting reflector 21 by multilayer film.
The polarized light illumination device 1 of present embodiment comprises formation as described above, below, is described its effect.Fig. 3 is the key diagram of the irradiating state of the light represented in the polarized light illumination device shown in Fig. 1.In polarized light illumination device 1, when carrying out orientation process to workpiece W such as the alignment film of liquid crystal panel or the alignment films of compensation film for angular field of view, while by the carrying device (omit diagram) of workpiece W, workpiece W is transported on the arrow Y1 direction parallel with Y direction, penetrates bag light with violet rays from light source 5.
The light of a part from the light that light source 5 penetrates, towards the direction of the peristome 22 of auxiliary reflecting plate 20, is incident to the L1 of bandpass filter 35(such as Fig. 3 by peristome 22).Bandpass filter 35 only transmits ultraviolet and not through the light beyond ultraviolet, and from the face only outgoing ultraviolet of the opposition side in the face of light incident side.
Be incident to polarization plates 30 from the ultraviolet of bandpass filter 35 outgoing, this polarization plates 30 be arranged in the auxiliary reflecting plate 20 of bandpass filter 35 be positioned at the opposition side of side.The width of the peristome 22 in the Y direction of the peristome 22 of auxiliary reflecting plate 20 is slightly larger than the width of polarization plates 30, peristome 22 comprises the mode in the region arranging polarization plates 30 and arranges when observing with Z-direction, be therefore almost all incident to polarization plates 30 from peristome 22 outgoing and through the ultraviolet of bandpass filter 35.
Polarization plates 30 by the ultraviolet major part of the polarization axle parallel with the long side direction of the electric conductor forming polarization plates 30 in incident ultraviolet, and by means of only the ultraviolet of the polarization axle orthogonal with the long side direction of electric conductor.Thus, polarization plates 30 only make the ultraviolet that vibrates in reference direction from bandpass filter 35 be positioned at the opposition side in the face of side face be converged to focal point F and outgoing.From the Ultraviolet radiation vibrated in reference direction of polarization plates 30 outgoing to workpiece W, to workpiece W, the ultraviolet only vibrated in this reference direction is utilized to carry out orientation process.
And the light of the primary reflection surface 11 towards principal reflection plate 10 from the light that light source 5 penetrates is reflected by primary reflection surface 11, and its part is towards the direction (such as, the L2 of Fig. 3) of the peristome 22 of auxiliary reflecting plate 20.Light towards peristome 22 is incident to bandpass filter 35 by peristome 22, only outgoing ultraviolet.Polarization plates 30 is incident to, only the ultraviolet that vibrates in reference direction of outgoing exposed to workpiece W and carry out orientation process from the ultraviolet of bandpass filter 35 outgoing.
In addition, the primary reflection surface 11 of principal reflection plate 10 is arranged to the mode of polarization plates 30 optically focused can make the light that penetrates from light source 5, and thus, principal reflection plate 10 can control the luminous intensity distribution of the light penetrated from light source 5.Therefore, the major part of the light reflected by primary reflection surface 11, towards the peristome 22 of auxiliary reflecting plate 20, through bandpass filter 35 and polarization plates 30, becomes the ultraviolet that vibrates in reference direction thus and exposes to workpiece W.
And, from the light that light source 5 penetrates not towards the major part of the light in the direction of the direction of the peristome 22 of auxiliary reflecting plate 20 or primary reflection surface 11 towards the boosting reflector 21 of auxiliary reflecting plate 20, and to be reflected by boosting reflector 21.Boosting reflector 21 because becoming the shape of the circle centered by the C of lamp center, so to penetrate and light (such as, L3, L4 of Fig. 3) towards boosting reflector 21 reflects (such as L3', the L4' of Fig. 3) to the direction of light source 5 from light source 5.In this way towards the part of the light in the direction of light source 5 through light source 5, and the light of another part is by near light source 5, thus this light towards initial advance from light source 5 to boosting reflector 21 time the reverse direction in direction.Thus, this light towards the direction of the primary reflection surface 11 of principal reflection plate 10, and is reflected by primary reflection surface 11.
Namely, penetrated by light source 5 and directly reversion occur and towards the direction of light source 5 towards light working direction on boosting reflector 21 of the boosting reflector 21 of auxiliary reflecting plate 20, by light source 5 or by near it, thus towards primary reflection surface 11 direction and reflected by primary reflection surface 11.The light reflected by primary reflection surface 11 penetrates with from light source 5 and in the same manner as the light directly reflected towards primary reflection surface 11 by primary reflection surface 11, major part is towards the peristome 22 of auxiliary reflecting plate 20, and through bandpass filter 35 and polarization plates 30, become the ultraviolet that vibrates in reference direction thus and expose to workpiece W.
The wide part reflected by primary reflection surface 11 as described, towards peristome 22, and through bandpass filter 35 and polarization plates 30, becomes the ultraviolet that vibrates in reference direction thus and exposes to workpiece W.
In the polarized light illumination device 1 of present embodiment, by the light beyond the light of the direct peristome 22 towards auxiliary reflecting plate 20 in the light that penetrates from light source 5, to be reflected and guide openings portion 22 by principal reflection plate 10 and auxiliary reflecting plate 20, the most light penetrated can be exposed to workpiece W as the ultraviolet vibrated in reference direction thus from light source 5.
And when as described by polarized light illumination device 1 irradiation ultraviolet radiation, the light source 5 as light source generates heat luminescence, and the air that temperature uprises because of this heat flows upward, and spreads from space part 12 to the top of principal reflection plate 10.Thus, the temperature of polarized light illumination device 1 can not become too high, and by Ultraviolet radiation to workpiece W.
And relative to the polarized light illumination device 40 not arranging auxiliary reflecting plate 20, the change of the light quantity when people such as inventor arrange auxiliary reflecting plate 20 to polarized light illumination device 1 is tested.Fig. 8 is the key diagram about the polarized light illumination device not arranging auxiliary reflecting plate.First, as existing polarized light illumination device, the polarized light illumination device 40 not arranging auxiliary reflecting plate 20 is described.This polarized light illumination device 40 is in the same manner as the polarized light illumination device 1 of present embodiment, and have the light source 5 of wire as light source, and comprise principal reflection plate 10, this principal reflection plate 10 has the primary reflection surface 11 formed by a part of shape of ellipse.
And, arrange in the open side of principal reflection plate 10 and only transmit ultraviolet bandpass filter 35, the opposition side arranging the side of light source 5 or principal reflection plate 10 in bandpass filter 35, arrange make through light polarization and the polarization plates 30 of outgoing.In the polarized light illumination device 40 that auxiliary reflecting plate 20 is not set, because of the auxiliary reflecting plate 20 of nothing, so from light source 5 directly or to be reflected by the primary reflection surface 11 of principal reflection plate 10 and not through the light of bandpass filter 35 with polarization plates 30, covered by wave filter framework 36 or polarization plates framework 31, workpiece W can not be exposed to thus.
The people such as inventor by test, and obtain relative to the light quantity being exposed to workpiece W side by polarized light illumination device 40, the light quantity that exposed to workpiece W side by the polarized light illumination device 1 of present embodiment.
Fig. 4 is the key diagram about the condition of carrying out the polarized light illumination device tested.Fig. 5 is the key diagram of the auxiliary reflecting plate about the polarized light illumination device carrying out testing.Test between polarized light illumination device 1, polarized light illumination device 40, described polarized light illumination device 1, the distance of polarized light illumination device 40 Shi Jiangcongdeng center C to polarization plates 30 be 115mm, effective length of illumination of light source 5 (length of X-direction) is 800mm, length be that the foursquare polarization plates 30 of 50mm arranges 8 pieces in the X-axis direction and forms.And, in the polarized light illumination device 1 being provided with auxiliary reflecting plate 20, the width of the peristome 22 of the auxiliary reflecting plate 20 in Y direction is set to 70mm, the radius of boosting reflector 21 is set to 96.9mm to test.In addition, auxiliary reflecting plate 20 is fixed by the auxiliary reflecting plate framework 25 of the part being disposed in peristome 22, and the width of peristome 22 and 70mm become auxiliary reflecting plate framework 25 distance each other in Y direction.
Make light source 5 luminous by described polarized light illumination device 1, polarized light illumination device 40, and the ultraviolet using excellent will prosperous (USHIO) Electric Co., Ltd to manufacture adds up quantometer UVD-S254 is used as ultraviolet analyzer, the ultraviolet amount through polarization plates 30 is measured.As a result, when the light quantity of the polarized light illumination device 40 not arranging auxiliary reflecting plate 20 is set to 1.0, in the polarized light illumination device 1 possessing auxiliary reflecting plate 20, confirm that light quantity is 1.2.
In the polarized light illumination device 1 of above embodiment, between principal reflection plate 10 and polarization plates 30, arrange auxiliary reflecting plate 20, this auxiliary reflecting plate 20 does not directly reflex to principal reflection plate 10 side towards the light of polarization plates 30 by what penetrate from light source 5 or principal reflection plate 10 or reflect, therefore this light can be reflected by principal reflection plate 10 after towards polarization plates 30.Thus, effectively can utilize in the existing polarized light illumination device 40 not possessing auxiliary reflecting plate 20, not be incident to polarization plates 30 and the direct light from light source 5 that loses, and can increase through polarization plates 30 and the amount of the light irradiated towards workpiece W.As a result, the light quantity from the light of polarized light illumination device 1 outgoing can be increased and polarization plates 30 can not be made to maximize.
And, the light arriving boosting reflector 21 to reflect but not directly to polarization plates 30 lateral reflection towards principal reflection plate 10 by auxiliary reflecting plate 20, and reflect from principal reflection plate 10 towards polarization plates 30, therefore can make the emergent light from polarization plates 30 can not significantly outgoing diffusely.Thus, within the scope of ultraviolet irradiation, the irradiation that illumination can not significantly change can be carried out.As a result, the irradiating state of the light from polarized light illumination device 1 outgoing can be made to become the state be more suitable for, and can light quantity be increased.
And, in principal reflection plate 10 side of polarization plates 30, arrange the bandpass filter 35 only transmitting the light of specific wavelength, auxiliary reflecting plate 20 is disposed in principal reflection plate 10 side of bandpass filter 35, therefore after can making more light transmission bandpass filter 35, through polarization plates 30.Thus, more ultraviolet can be made to be incident to polarization plates 30 from bandpass filter 35, thus the most of ultraviolet vibrated in reference direction can be made to expose to workpiece W from polarization plates 30.As a result, can effectively carry out the orientation process of workpiece W and polarization plates 30 can not be made to maximize.
And principal reflection plate 10 becomes the light-focusing type reflecting plate being concentrated on polarization plates 30, thus can make more positively to increase towards the amount of the light of polarization plates 30.And auxiliary reflecting plate 20 makes the light exposing to auxiliary reflecting plate 20 from light source 5 reflect towards light source 5, therefore can make not towards the light of polarization plates 30 from light source 5 side towards principal reflection plate 10.Thus, can will not expose to polarization plates 30 or principal reflection plate 10 from light source 5 and be irradiated to the light of auxiliary reflecting plate 20, towards polarization plates 30 after being reflected by principal reflection plate 10.As a result, can make more positively increase from the light quantity of the light of polarized light illumination device 1 outgoing and polarization plates 30 can not be made to maximize.
And, the shape of the boosting reflector 21 when assisting reflecting plate 20 is observed in direction along the axle center of light source 5, formed by a part of shape of the circle centered by the axle center of light source 5, therefore can make to be irradiated to the light of boosting reflector 21 more positively towards light source 5 lateral reflection from light source 5.Thus, make the light being irradiated to boosting reflector 21 more positively from light source 5 towards principal reflection plate 10, and reflected by the direction of principal reflection plate 10 to polarization plates 30.Namely, by the auxiliary reflecting plate 20 of the circle centered by the C of lamp center is disposed in polarization plates 30 top, and the light from light source 5 that can make not to be incident to polarization plates 30 in existing polarized light illumination device 40 and lose more positively is incident to polarization plates 30.As a result, can make more positively increase from the light quantity of the light of polarized light illumination device 1 outgoing and polarization plates 30 can not be made to maximize.
[variation]
In addition, in described polarized light illumination device 1, auxiliary reflecting plate 20 arranges under the state be fixed, but auxiliary reflecting plate 20 also can be arranged to removable.Such as, auxiliary reflecting plate 20 can make the auxiliary reflecting plate 20 of both sides Y direction being arranged in peristome 22 one or two move, by making auxiliary reflecting plate 20 move, peristome 22 also can be set as can opening and closing.Can opening and closing by like this peristome 22 being set as, not only by lighting and the light-off of light source 5, ultraviolet irradiation or non-irradiated are carried out in the opening and closing also by peristome 22.Thus, the lighting of light source 5 and the switching times of light-off can be reduced, thus the long lifetime of light source 5 can be realized.And, after firm lighting when luminescence still unstabilized light source 5 soon, by peristome 22 opening and closing under the state of lighting that maintain light source 5, even if thus when switching to irradiating state from ultraviolet non-irradiated state, also ultraviolet stable at short notice can be irradiated.
And in described polarized light illumination device 1, principal reflection plate 10 and auxiliary reflecting plate 20 are that base material is formed by glass and reflecting surface is formed by multilayer film, and principal reflection plate 10 or auxiliary reflecting plate 20 also can be arranged by the material beyond described.Principal reflection plate 10 or auxiliary reflecting plate 20 such as also entirety can comprise the metals such as aluminium.And the primary reflection surface 11 of principal reflection plate 10 or the boosting reflector 21 of auxiliary reflecting plate 20 also can not be formed by strict elliptical shape or toroidal.
Fig. 6 is the key diagram of the variation of the polarized light illumination device representing embodiment.Primary reflection surface 11 or boosting reflector 21 such as shown in Figure 6, also can comprise many straight lines of the curve being similar to elliptic ideal shape SE or circular ideal shape SR.By making primary reflection surface 11 or boosting reflector 21 comprise many straight lines as described, and principal reflection plate 10 can be made, auxiliary reflecting plate 20 is shaped by the bending machining of sheet metal, thus the shaping of principal reflection plate 10 or auxiliary reflecting plate 20 becomes easy.As described, principal reflection plate 10 or auxiliary reflecting plate 20 can have nothing to do in material or formation, just can the reflecting surface of suitable reflected light as long as formed by required shape, no matter then material or how form.
And in described polarized light illumination device 1, light source 5 uses tubular so-called discharge lamp to be described, but light source 5 also can use the lamp beyond discharge lamp.With regard to light source 5, as long as the ultraviolet light emitting diode (Light-EmittingDiode of wavelength 200nm to 400nm such as can be penetrated, LED) chip, laser diode (laser diode), organic electroluminescent (electroluminescence, etc. EL) miniature lamp separates and is configured to linearity etc. and penetrates the lamp of bag light with violet rays, then also can be the lamp beyond discharge lamp.
Fig. 7 is the key diagram of the variation of the polarized light illumination device representing embodiment.Light source 5 such as shown in Figure 7, also can comprise multiple semiconductor elements 7 of the side being disposed in angle rod 6.Because of during compared with use lamp, the wavelength of semiconductor element 7 has more selectivity, so without the need to using bandpass filter 35 that the light of the specific wavelengths such as ultraviolet just can be made to be incident to polarization plates 30.Therefore, by using semiconductor element 7 in light source 5, and bandpass filter 35 can be omitted.
Several embodiment of the present invention is illustrated, but described embodiment is exemplarily pointed out, be not intended to limit scope of invention.Described embodiment can be implemented by other various forms, can carry out various omission, conversion, change in the scope of purport not departing from invention.Described embodiment or its distortion be included in scope of invention or purport, and with in the scope of its equalization.
Accompanying drawing explanation
Fig. 1 is the exploded perspective view of the formation of the polarized light illumination device representing embodiment.
Fig. 2 is the sectional view that the X-direction of the polarized light illumination device shown in Fig. 1 is observed.
Fig. 3 is the key diagram of the irradiating state of the light represented in the polarized light illumination device shown in Fig. 1.
Fig. 4 is the key diagram about the condition of carrying out the polarized light illumination device tested.
Fig. 5 is the key diagram of the auxiliary reflecting plate about the polarized light illumination device carrying out testing.
Fig. 6 is the key diagram of the variation of the polarized light illumination device representing embodiment.
Fig. 7 is the key diagram of the variation of the polarized light illumination device representing embodiment.
Fig. 8 is the key diagram about the polarized light illumination device not arranging auxiliary reflecting plate.
The explanation of symbol
1,40: polarized light illumination device
5: light source
6: angle rod
7: semiconductor element
10: principal reflection plate
11: primary reflection surface
12: space part
20: auxiliary reflecting plate
21: boosting reflector
22: peristome
25: auxiliary reflecting plate framework
30: polarization plates
31: polarization plates framework
35: bandpass filter
36: wave filter framework
C: lamp center
L1, L2, L3, L4, L3', L4': light
SE: elliptic ideal shape
SR: circular ideal shape
W: workpiece
X, Y, Z: axle
Y1: arrow
Claims (4)
1. a polarized light illumination device, is characterized in that, comprising:
Light source, injection bag light with violet rays;
Principal reflection plate, controls the luminous intensity distribution of the light penetrated from described light source;
Polarization plates, relative to described principal reflection plate, be disposed in the working direction side being made the controlled light of luminous intensity distribution by described principal reflection plate, and the incident light penetrated from described light source of described polarization plates with made the controlled light of luminous intensity distribution and outgoing polarization light by described principal reflection plate; And
Auxiliary reflecting plate, is disposed between described principal reflection plate and described polarization plates, and by the light penetrated from described light source and made by described principal reflection plate not reflex to described principal reflection plate side towards the light of described polarization plates in the controlled light of luminous intensity distribution.
2. polarized light illumination device according to claim 1, is characterized in that:
Also comprise the bandpass filter of the light only transmitting specific wavelength,
Described bandpass filter is disposed between described auxiliary reflecting plate and described polarization plates.
3. polarized light illumination device according to claim 1 and 2, is characterized in that:
Described principal reflection plate is the light that makes to penetrate from the described light source reflecting plate to the light-focusing type of described polarization plates optically focused,
Described auxiliary reflecting plate makes to reflect towards described light source from described light source irradiation to the light of described auxiliary reflecting plate.
4. polarized light illumination device according to claim 1 and 2, is characterized in that:
Described light source is formed as wire,
The shape of reflecting surface during described auxiliary reflecting plate is observed in direction along the axle center of described light source, is formed by a part of shape of the circle centered by the axle center of described light source.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-187042 | 2013-09-10 | ||
| JP2013187042A JP6326746B2 (en) | 2013-09-10 | 2013-09-10 | Polarized light irradiation device |
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| Publication Number | Publication Date |
|---|---|
| CN104423097A true CN104423097A (en) | 2015-03-18 |
| CN104423097B CN104423097B (en) | 2019-03-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410097108.7A Active CN104423097B (en) | 2013-09-10 | 2014-03-14 | Polarized light illumination device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6326746B2 (en) |
| CN (1) | CN104423097B (en) |
| TW (1) | TWI585466B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105511166A (en) * | 2016-01-27 | 2016-04-20 | 京东方科技集团股份有限公司 | Orientation equipment, orientation film preparation method and display substrate |
| CN110998450A (en) * | 2017-08-09 | 2020-04-10 | 株式会社V技术 | Exposure device for photo-alignment |
| CN111856745A (en) * | 2019-04-30 | 2020-10-30 | 上海微电子装备（集团）股份有限公司 | Light irradiation device |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6610931B2 (en) * | 2015-09-18 | 2019-11-27 | 東芝ライテック株式会社 | Polarized light irradiation device |
| JP2018006535A (en) * | 2016-06-30 | 2018-01-11 | ウシオ電機株式会社 | Semiconductor light-emitting device |
| JP2018199096A (en) * | 2017-05-25 | 2018-12-20 | 岩崎電気株式会社 | Ultraviolet irradiator |
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| CN110998450A (en) * | 2017-08-09 | 2020-04-10 | 株式会社V技术 | Exposure device for photo-alignment |
| CN111856745A (en) * | 2019-04-30 | 2020-10-30 | 上海微电子装备（集团）股份有限公司 | Light irradiation device |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201510577A (en) | 2015-03-16 |
| TWI585466B (en) | 2017-06-01 |
| CN104423097B (en) | 2019-03-12 |
| JP6326746B2 (en) | 2018-05-23 |
| JP2015055647A (en) | 2015-03-23 |
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