JP5200271B1 - Polarized light irradiation device - Google Patents

Polarized light irradiation device Download PDF

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JP5200271B1
JP5200271B1 JP2012013288A JP2012013288A JP5200271B1 JP 5200271 B1 JP5200271 B1 JP 5200271B1 JP 2012013288 A JP2012013288 A JP 2012013288A JP 2012013288 A JP2012013288 A JP 2012013288A JP 5200271 B1 JP5200271 B1 JP 5200271B1
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grid
polarizing element
lamp
light
wire grid
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JP2014112119A (en
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哲也 村上
暁史 三宮
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Ushio Denki KK
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Priority to JP2012263936A priority patent/JP5590578B2/en
Priority to TW105121551A priority patent/TW201636660A/en
Priority to TW101149558A priority patent/TW201333550A/en
Priority to KR1020130006351A priority patent/KR101624774B1/en
Priority to CN201310027795.0A priority patent/CN103226264B/en
Priority to CN201610511297.7A priority patent/CN105974674A/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Polarising Elements (AREA)
  • Liquid Crystal (AREA)
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Abstract

【課題】ワイヤーグリッド偏光素子を備えた偏光光照射装置において、装置のメンテナンスの際などに、装置に取り付けられているワイヤーグリッド偏光素子のグリッド形成面に指を触れたり、物を落としたりしてグリッドを壊すといったことがないように装置を構成すること。
【解決手段】ワイヤーグリッド偏光素子のグリッド形成面を光源の方に向けて配置する。さらに、グリッド形成面の直上（偏光素子と光源との間）に、グリッド形成面をカバーするフィルタを設けてもよい。フィルタとしては偏光させたい波長の光が透過するものを用いる。
【選択図】図１In a polarized light irradiation apparatus equipped with a wire grid polarization element, a finger touches the grid forming surface of the wire grid polarization element attached to the apparatus or drops an object during maintenance of the apparatus. Configure the device so that it does not break the grid.
A grid-forming surface of a wire grid polarizing element is arranged facing a light source. Furthermore, a filter that covers the grid formation surface may be provided immediately above the grid formation surface (between the polarizing element and the light source). A filter that transmits light having a wavelength to be polarized is used.
[Selection] Figure 1

Description

本発明は、液晶素子の配向膜や、視野角補償フィルムの配向層などに所定の波長の偏光光を照射して配向を行う偏光光照射装置に関し、特にワイヤーグリッド偏光素子を使用する偏光光照射装置に関する。   The present invention relates to a polarized light irradiation apparatus that performs alignment by irradiating polarized light of a predetermined wavelength onto an alignment film of a liquid crystal element, an alignment layer of a viewing angle compensation film, and the like, and more particularly, polarized light irradiation using a wire grid polarizing element. Relates to the device.

近年、液晶パネルを始めとする液晶表示素子の配向膜や、視野角補償フィルムの配向層などの配向処理に関し、紫外線領域の波長の偏光光を照射し配向を行なう、光配向と呼ばれる技術が採用されるようになってきた。以下、光により配向を行う配向膜や、配向層を設けたフィルムなど、光により配向特性が生じる膜や層を総称して光配向膜と呼ぶ。
光配向膜は、液晶パネルの大型化と共に、例えば一辺が２０００ｍｍ以上の四角形というように大面積化している。 In recent years, a technique called photo-alignment has been adopted in which alignment is performed by irradiating polarized light with a wavelength in the ultraviolet region for alignment processing of alignment films for liquid crystal display elements such as liquid crystal panels and alignment layers for viewing angle compensation films. It has come to be. Hereinafter, films and layers in which alignment characteristics are generated by light, such as alignment films that align with light and films provided with alignment layers, are collectively referred to as photo-alignment films.
With the increase in size of the liquid crystal panel, the photo-alignment film has an increased area, for example, a square having a side of 2000 mm or more.

上記のような大面積の光配向膜に対して光配向を行うために、線状の光源である棒状のランプとワイヤーグリッド状のグリッドを有する偏光素子（以下ワイヤーグリッド偏光素子）を組み合わせた偏光光照射装置が、例えば特許文献１などで提案されている。
棒状ランプは、発光長が比較的長いものを作ることができる。そのため、光配向膜の幅に応じた発光長を備えた棒状ランプを使用し、該ランプからの光を偏光して照射しながら、配向膜をランプの長手方向に直交する方向に移動させれば、広い面積の配向膜を比較的短時間で光配向処理を行なうことができる。 Polarized light that combines a rod-shaped lamp, which is a linear light source, and a polarizing element having a wire-grid grid (hereinafter referred to as a wire-grid polarizing element) to perform photo-alignment on the large-area photo-alignment film as described above. A light irradiation apparatus is proposed in Patent Document 1, for example.
A rod-shaped lamp having a relatively long light emission length can be made. Therefore, if a rod-shaped lamp having a light emission length corresponding to the width of the photo-alignment film is used and the alignment film is moved in a direction perpendicular to the longitudinal direction of the lamp while irradiating the light from the lamp with polarization, The alignment film having a large area can be photo-aligned in a relatively short time.

図４に、線状の光源である棒状ランプとワイヤーグリッド偏光素子を組み合わせた従来の偏光光照射装置の構成例を示す。
同図において、光配向膜であるワークＷは、例えば視野角補償フィルムのような帯状の長尺ワークであり、送り出しロールＲ１から送り出され、図中矢印方向に搬送されながら偏光光照射により光配向処理され、巻き取りロールＲ２により巻き取られる。
偏光光照射装置の光照射部１０は、光配向処理に必要な波長の光（紫外線）を放射する棒状ランプ１１、例えば高圧水銀ランプや水銀に他の金属を加えたメタルハライドランプと、この棒状ランプ１１からの紫外線をワークＷに向けて反射する樋状の反射鏡１２を備える。上記のように、棒状ランプ１１の長さは、発光部が、ワークＷの搬送方向に直交する方向の幅に対応する長さを備えたものを使用する。 FIG. 4 shows a configuration example of a conventional polarized light irradiation apparatus in which a rod-shaped lamp that is a linear light source and a wire grid polarization element are combined.
In the figure, a work W that is a photo-alignment film is a strip-like long work such as a viewing angle compensation film, for example, and is sent from a feed roll R1, and is photo-aligned by irradiation with polarized light while being conveyed in the direction of the arrow in the figure. Processed and taken up by take-up roll R2.
The light irradiation unit 10 of the polarized light irradiation apparatus includes a rod-shaped lamp 11 that emits light (ultraviolet rays) having a wavelength necessary for photo-alignment processing, such as a high-pressure mercury lamp or a metal halide lamp obtained by adding another metal to mercury, and the rod-shaped lamp. 11 is provided with a bowl-shaped reflecting mirror 12 that reflects the ultraviolet rays from 11 toward the workpiece W. As described above, the length of the rod-shaped lamp 11 is such that the light emitting unit has a length corresponding to the width in the direction orthogonal to the conveyance direction of the workpiece W.

光照射部１０は、ランプ１１の長手方向がワークＷの幅方向（搬送方向に対して直交方向）になるように配置する。
光照射部１０の光出射側には、偏光素子であるワイヤーグリッド偏光素子８１が設けられる。光照射部１０からの光はワイヤーグリッド偏光素子８１により偏光され、光照射部１０の下を搬送されるワークＷに照射され、光配向処理が行われる。
ワイヤーグリッド偏光素子は、偏光したい波長の光を透過する透明基板（例えばガラス基板）上にグリッド（ライン・アンド・スペース）を形成したものであり、例えば特許文献２や特許文献３にその詳細が示されている。 The light irradiation unit 10 is arranged so that the longitudinal direction of the lamp 11 is in the width direction of the workpiece W (a direction orthogonal to the transport direction).
A wire grid polarizing element 81 that is a polarizing element is provided on the light emitting side of the light irradiation unit 10. The light from the light irradiation unit 10 is polarized by the wire grid polarizing element 81 and irradiated to the workpiece W conveyed under the light irradiation unit 10 to perform a photo-alignment process.
The wire grid polarization element is formed by forming a grid (line and space) on a transparent substrate (for example, a glass substrate) that transmits light having a wavelength to be polarized. For example, Patent Document 2 and Patent Document 3 have details thereof. It is shown.

光路中にワイヤーグリッド偏光素子を挿入すると、入射する光のうち、グリッドの長手方向に平行な偏光成分は大部分が反射もしくは吸収され、グリッドの長手方向に直交する偏光成分は通過する。したがって、ワイヤーグリッド偏光素子を通過した光は、偏光素子のグリッドの長手方向に直交する方向の偏光軸を有する偏光光となる。
光配向処理には紫外線領域の偏光光が使用される。ワイヤーグリッド偏光素子に入射する光を偏光光にするためには、透明基板に形成するグリッドの幅や間隔は、偏光する光の波長よりも短くする（例えば１００ｎｍ）必要がある。
そのため、グリッドの形成には微細な加工技術が必要であり、半導体集積回路製造に使われるリソグラフィ技術やエッチング技術が利用されるが、そこで使用されるリソグラフィ装置やエッチング装置が加工できるワークの大きさには限界がある。そのため、ワイヤーグリッド偏光素子は大型のものができず、現状製作できる大きさは直径３００ｍｍ程度までである。 When a wire grid polarization element is inserted in the optical path, most of the incident light that is parallel to the longitudinal direction of the grid is reflected or absorbed, and the polarized component that is orthogonal to the longitudinal direction of the grid passes. Therefore, the light that has passed through the wire grid polarization element becomes polarized light having a polarization axis in a direction orthogonal to the longitudinal direction of the grid of the polarization element.
For the photo-alignment treatment, polarized light in the ultraviolet region is used. In order to make the light incident on the wire grid polarization element into polarized light, the width and spacing of the grid formed on the transparent substrate must be shorter than the wavelength of the polarized light (for example, 100 nm).
For this reason, a fine processing technique is required to form the grid, and the lithography technique and etching technique used for manufacturing semiconductor integrated circuits are used. The size of the work that can be processed by the lithography apparatus and etching apparatus used there. Has its limits. Therefore, the wire grid polarizing element cannot be made large, and the size that can be manufactured at present is up to about 300 mm in diameter.

そこで、例えば特許文献４には、発光長の長い棒状の光源、例えば長さ１ｍから３ｍといった棒状の高圧水銀ランプやメタルハライドランプに応じた、大きな（長い）偏光素子が必要な場合は、矩形のワイヤーグリッド偏光素子を複数、グリッドの方向をそろえ、フレームの中にランプの長手方向に沿って並べ、一つの偏光素子ユニットとして使用することが提案されている。   Therefore, for example, in Patent Document 4, when a large (long) polarizing element corresponding to a rod-shaped light source having a long light emission length, for example, a rod-shaped high-pressure mercury lamp or a metal halide lamp having a length of 1 m to 3 m is necessary, It has been proposed that a plurality of wire grid polarization elements are aligned and arranged in the frame along the longitudinal direction of the lamp and used as one polarization element unit.

特開２０１１−１４５３８１号公報JP 2011-145382 A 特開２００２−３２８２３４号公報JP 2002-328234 A 特表２００３−５０８８１３号公報Japanese translation of PCT publication No. 2003-508813 特許第４５０６４１２号公報Japanese Patent No. 4506212

上記したように、ワイヤーグリッド偏光素子のグリッドは微細な加工により製造され、グリッドの幅や間隔は例えば１００ｎｍであるため、誤って指で触れたり、その上に物を落としたりすると、グリッド構造が壊れてしまい、偏光素子としての役目を果たさなくなる。しかし、微細であるため、透明基板（ガラス）の表面にグリッドが形成されていることが、肉眼ではわかりにくい。
そのため、偏光光照射装置の保守点検の際などに、装置に取り付けられている偏光素子のグリッド形成面にあやまって触れてしまったり、偏光素子の上に何か物を落としてしまったりして、微細なグリッドを壊してしまうことが考えられる。 As described above, the grid of the wire grid polarizing element is manufactured by fine processing, and the width and interval of the grid are, for example, 100 nm. Therefore, if the finger is accidentally touched or an object is dropped on the grid structure, It will break and will no longer serve as a polarizing element. However, since it is fine, it is difficult for the naked eye to see that a grid is formed on the surface of the transparent substrate (glass).
Therefore, during maintenance and inspection of the polarized light irradiation device, it touches the grid forming surface of the polarizing element attached to the device, or drops something on the polarizing element, It may be possible to break the fine grid.

本発明は上記した問題点を考慮してなされたものであり、本発明の目的は、線状の光源と、この光源からの光を偏光するワイヤーグリッド偏光素子とを備えた偏光光照射装置において、装置のメンテナンスの際などに、装置に取り付けられているワイヤーグリッド偏光素子のグリッド形成面に指を触れたり、物を落としたりしてグリッドを壊すといったことがないように装置を構成することである。   The present invention has been made in consideration of the above-described problems, and an object of the present invention is a polarized light irradiation apparatus including a linear light source and a wire grid polarizing element that polarizes light from the light source. By configuring the device so that it does not break the grid by touching the grid forming surface of the wire grid polarizing element attached to the device or dropping an object during maintenance of the device, etc. is there.

上記課題を解決するため、偏光光照射装置に使用するワイヤーグリッド偏光素子のグリッド形成面を光源の方に向けて配置する。即ち、光照射部を構成するランプハウスにおいて、ワイヤーグリッド偏光素子のグリッドが形成されていない面がランプハウス（灯具）の外側に向くようにする。   In order to solve the above-mentioned problem, the grid forming surface of the wire grid polarizing element used in the polarized light irradiation device is arranged facing the light source. That is, in the lamp house constituting the light irradiation unit, the surface of the wire grid polarizing element on which the grid is not formed is directed to the outside of the lamp house (lamp).

さらに、ワイヤーグリッド偏光素子のグリッド形成面の直上（偏光素子と光源との間）に、グリッド形成面を保護するフィルタを設ける。フィルタは偏光させたい波長の光が透過するものを用いる。   Further, a filter for protecting the grid forming surface is provided immediately above the grid forming surface of the wire grid polarizing element (between the polarizing element and the light source). A filter that transmits light having a wavelength to be polarized is used.

ワイヤーグリッド偏光素子のグリッド形成面が光源の方を向いているので、ランプハウスの外からでは、グリッド形成面に触れることがない。たとえ偏光素子に触れたとしても、ランプハウスの外側を向いているのはグリッド形成面ではない面であるので、グリッドを壊すことがない。
また、グリッド形成面の直上にフィルタを設けることにより、例えば、ランプハウス内をメンテナンスしている場合であっても、グリッド面には手が触れにくくなるし、物を落としてもフィルタがグリッド形成面への落下を防ぐ。これによりグリッドを壊すことがない。 Since the grid forming surface of the wire grid polarization element faces the light source, the grid forming surface is not touched from outside the lamp house. Even if the polarizing element is touched, the grid is not broken because the surface facing the outside of the lamp house is not the grid forming surface.
In addition, by providing a filter directly above the grid formation surface, for example, even when the inside of the lamp house is being maintained, it becomes difficult to touch the grid surface, and even if an object is dropped, the filter forms the grid. Prevent falling to the surface. This will not break the grid.

本発明が対象とする偏光光照射装置のランプハウス（灯具）の概略構成を示す図である。It is a figure which shows schematic structure of the lamp house (lamp) of the polarized light irradiation apparatus which this invention makes object . 偏光素子ユニットの構造を示す図である。It is a figure which shows the structure of a polarizing element unit. 本発明の実施例の偏光光照射装置のランプハウス（灯具）の概略構成を示す図である。It is a diagram showing a schematic configuration of a lamp house of the polarized light irradiation apparatus of the real施例of the present invention (lamp). 従来の偏光光照射装置の構成例を示す図である。It is a figure which shows the structural example of the conventional polarized light irradiation apparatus.

図１は、本発明が対象とする偏光光照射装置のランプハウス（灯具）の概略構成を示す図である。同図は、ランプハウスの長手方向に対して直交する方向の断面図である。なお、同図においては、ランプの点灯装置などの構成については省略して示している。
ランプハウス１は、光照射部１０と、その上部に水冷式の冷却機（ラジエータ）２０と送風機（ブロア）３０とを備える。光照射部１０は、ランプ１１とランプ１１からの光を反射する反射ミラー１２とを有している。図中実線の矢印で示すように、ランプ１１からの光は、直接または反射ミラー１２により反射されて、ワイヤーグリッド偏光素子８１を介してワークＷに照射される。
ブロア３０は、ランプ１１点灯時にランプ１１や反射ミラー１２を冷却する冷却風を発生させ、ラジエータ２０は、ランプ１１や反射ミラー１２を冷却した冷却風の温度を下げるはたらきをする。 FIG. 1 is a diagram showing a schematic configuration of a lamp house (lamp) of a polarized light irradiation apparatus targeted by the present invention. This figure is a cross-sectional view in a direction perpendicular to the longitudinal direction of the lamp house. In the figure, the configuration of the lamp lighting device is omitted.
The lamp house 1 includes a light irradiation unit 10, and a water-cooled cooler (radiator) 20 and a blower (blower) 30 at an upper portion thereof. The light irradiation unit 10 includes a lamp 11 and a reflection mirror 12 that reflects light from the lamp 11. As indicated by solid arrows in the figure, the light from the lamp 11 is reflected directly or by the reflecting mirror 12 and is irradiated onto the workpiece W via the wire grid polarizing element 81.
The blower 30 generates cooling air that cools the lamp 11 and the reflecting mirror 12 when the lamp 11 is lit, and the radiator 20 serves to lower the temperature of the cooling air that has cooled the lamp 11 and the reflecting mirror 12.

光照射部１０は隔壁４０により囲まれており、その外側をランプハウス１の外壁６０が覆っている。隔壁４０と外壁６０との間には隙間が形成されている。この隙間は、冷却風が通過する通風路５０となる。
冷却風は、図中点線で示すとおり、ブロア３０から送り出されて通風路５０を通り、反射ミラー１２の光出射側から、ランプ１１や反射ミラー１２を冷却しつつ光照射部１０の内側に引き込まれ、ラジエータ２０を通過して冷却され、再びブロア３０により送り出される。 The light irradiation unit 10 is surrounded by a partition wall 40, and the outer wall 60 of the lamp house 1 covers the outside. A gap is formed between the partition wall 40 and the outer wall 60. This gap becomes the ventilation path 50 through which the cooling air passes.
As shown by the dotted line in the figure, the cooling air is sent out from the blower 30, passes through the ventilation path 50, and is drawn from the light emission side of the reflection mirror 12 to the inside of the light irradiation unit 10 while cooling the lamp 11 and the reflection mirror 12. Then, it passes through the radiator 20, is cooled, and is sent out by the blower 30 again.

また、ランプハウス１の外壁６０には、光照射部１０からワークＷに向かって照射される光が通過する光出射口７０が形成されている。
この光出射口７０には、ここを通過する光を偏光するワイヤーグリッド偏光素子８１を有する偏光素子ユニット８０が取り付けられる。
偏光素子ユニット８０のワイヤーグリッド偏光素子８１は、光配向処理を行うための波長の光を透過する透明基板（ガラス基板）の一方の表面に、ワイヤーグリッド（以下グリッドともいう）Ｇを形成したものである。ここでグリッドＧの形成面をランプ１１側に向けて配置する。
図1においてワイヤーグリッド偏光素子８１のグリッドＧは、図面左右方向に延びている。 Further, a light emission port 70 through which light irradiated from the light irradiation unit 10 toward the workpiece W passes is formed in the outer wall 60 of the lamp house 1.
A polarizing element unit 80 having a wire grid polarizing element 81 that polarizes light passing therethrough is attached to the light exit port 70.
The wire grid polarizing element 81 of the polarizing element unit 80 is obtained by forming a wire grid (hereinafter also referred to as a grid) G on one surface of a transparent substrate (glass substrate) that transmits light having a wavelength for performing optical alignment processing. It is. Here, the formation surface of the grid G is arranged facing the lamp 11 side.
In FIG. 1, the grid G of the wire grid polarizing element 81 extends in the horizontal direction of the drawing.

図２は、偏光素子ユニット８０の構造を示す図である。図２（ａ）は偏光素子ユニット８０の平面図、図２（ｂ）は偏光素子ユニット８０の側断面図、図２（ｃ）は偏光素子ユニット８０の斜視図である。
偏光素子ユニット８０は、複数のワイヤーグリッド偏光素子（以下偏光板ともいう）８１を、棒状ランプ１２の長手方向（図２の左右方向）に沿ってフレーム（保持枠）８２内に並べて保持したものである。保持枠８２は上下から各偏光板８１を挟み込むようにして保持する。 FIG. 2 is a diagram showing the structure of the polarizing element unit 80. 2A is a plan view of the polarizing element unit 80, FIG. 2B is a side sectional view of the polarizing element unit 80, and FIG. 2C is a perspective view of the polarizing element unit 80.
The polarizing element unit 80 includes a plurality of wire grid polarizing elements (hereinafter also referred to as polarizing plates) 81 arranged and held in a frame (holding frame) 82 along the longitudinal direction of the rod-shaped lamp 12 (left and right direction in FIG. 2). It is. The holding frame 82 holds the polarizing plates 81 from above and below.

隣り合う偏光板と偏光板の間には、１ｍｍから２ｍｍ程度の隙間が設けられる。偏光板どうしのグリッドＧの方向が平行になるように合せるために、この隙間を使って偏光板８１を回転移動させて位置調整する。そして、この隙間は、ここから無偏光光が漏れないように、偏光素子ユニット８０において遮光板８３により覆われている。
上記したように、各ワイヤーグリッド偏光素子（偏光板）８１は、図２（ｂ）に示すように、グリッドＧの形成面がランプ（光源）側（ランプハウスの内側）になるように配置される。 A gap of about 1 mm to 2 mm is provided between adjacent polarizing plates. In order to align the direction of the grid G between the polarizing plates, the polarizing plate 81 is rotationally moved using this gap to adjust the position. This gap is covered with a light shielding plate 83 in the polarizing element unit 80 so that non-polarized light does not leak from here.
As described above, each wire grid polarizing element (polarizing plate) 81 is arranged so that the grid G is formed on the lamp (light source) side (inside the lamp house) as shown in FIG. The

図３は、本発明の実施例の偏光光照射装置のランプハウス（灯具）の概略構成を示す図である。図１と同様に、同３は、ランプハウスの長手方向に対して直交する方向の断面図である。
図1の偏光光照射装置の構成との違いは、偏光素子ユニット８０の上（ランプ側）に、偏光板８１のグリッドＧ面を保護するためのフィルタ９０を配置したことである。フィルタ９０は、偏光板８１と同様に、複数のフィルタ板９１を保持枠９２内に、ランプ１２の長手方向に沿って並べて配置したものである。図中実線の矢印で示すように、ランプ１１からの光は、直接または反射ミラー１２により反射され、フィルタ９０と偏光板８１を介してワークＷに照射される。
Figure 3 is a diagram showing a schematic configuration of a lamp house of the polarized light irradiation apparatus of the real施例of the present invention (lamp). Similar to FIG. 1, FIG. 3 is a cross-sectional view in a direction orthogonal to the longitudinal direction of the lamp house.
The difference from the configuration of the polarized light irradiation device in FIG. 1 is that a filter 90 for protecting the grid G surface of the polarizing plate 81 is disposed on the polarizing element unit 80 (on the lamp side). Like the polarizing plate 81, the filter 90 has a plurality of filter plates 91 arranged in a holding frame 92 along the longitudinal direction of the lamp 12. As indicated by solid arrows in the figure, the light from the lamp 11 is reflected directly or by the reflecting mirror 12 and is applied to the workpiece W through the filter 90 and the polarizing plate 81.

フィルタ板の保持枠９２は、偏光素子ユニット８０の保持枠８２の上に支持棒９３を立て、その上に取り付けている。フィルタ板９１としては、偏光する紫外線の波長を透過する石英板を使用することができる。また、光配向処理には必要がない可視光や赤外線を遮断する干渉を形成した干渉フィルタを使用しても良い。
偏光板８１の上にフィルタ板９１を接触させて重ねると、偏光板８１のグリッドＧが傷む可能性があるので、両者は間隔をあけて配置する。この間隔は、狭いと、偏光板８１上を冷却風が流れにくくなり、偏光板８１がランプ１１からの熱で加熱する可能性があるので、十分な冷却風が流れる間隔を設ける。しかし、間隔をあけすぎると、偏光板８１のグリッドＧ形成面を保護できなくなるので、指が入らないような程度の間隔にすることが望ましい。 The filter plate holding frame 92 has a support rod 93 placed on the holding frame 82 of the polarizing element unit 80 and is mounted thereon. As the filter plate 91, a quartz plate that transmits the wavelength of polarized ultraviolet light can be used. Moreover, you may use the interference filter which formed the interference which interrupts | blocks visible light and infrared rays which are not required for a photo-alignment process.
Since the grid G of the polarizing plate 81 may be damaged when the filter plate 91 is brought into contact with the polarizing plate 81 and overlapped, the two are arranged with a gap therebetween. If this interval is narrow, it is difficult for the cooling air to flow on the polarizing plate 81, and the polarizing plate 81 may be heated by the heat from the lamp 11. Therefore, a sufficient interval for the cooling air to flow is provided. However, if the interval is too large, the grid G forming surface of the polarizing plate 81 cannot be protected, so it is desirable that the interval be such that a finger cannot enter.

なお、上記実施例においては、光源として棒状のランプを例にして説明したが、紫外線を出射するＬＥＤを複数線状に並べて構成したものでも、本発明は適用できる。   In the above-described embodiment, a rod-shaped lamp is described as an example of the light source. However, the present invention can be applied to a configuration in which LEDs that emit ultraviolet rays are arranged in a plurality of lines.

１ ランプハウス（灯具）
１０ 光照射部
１１ 棒状ランプ
１２ 反射ミラー
２０ ラジエータ（冷却機）
３０ ブロア（送風機）
４０ 隔壁
５０ 通風路
６０ 外壁
７０ 光出射口
８０ 偏光素子ユニット
８１ ワイヤーグリッド偏光素子（偏光板）
８２ 偏光板の保持枠
８３ 遮光板
９０ フィルタユニット
９１ フィルタ板
９２ フィルタ板の保持枠
９３ 支持棒
Ｇ ワイヤーグリッド
Ｗ ワーク 1 Lamphouse
DESCRIPTION OF SYMBOLS 10 Light irradiation part 11 Rod-shaped lamp 12 Reflection mirror 20 Radiator (cooling machine)
30 Blower (blower)
40 Partition 50 Ventilation path 60 Outer wall 70 Light exit 80 Polarizing element unit 81 Wire grid polarizing element (polarizing plate)
82 Polarizing plate holding frame 83 Shading plate 90 Filter unit 91 Filter plate 92 Filter plate holding frame 93 Support rod G Wire grid W Workpiece

Claims (1)

線状の光源と、該光源からの光を偏光する偏光素子とを備えた偏光光照射装置において、
上記偏光素子は透明基板上にワイヤーグリッドを形成したワイヤーグリッド偏光素子であって、
上記ワイヤーグリッド偏光素子は、ワイヤーグリッドを形成した面を光源側に向けて配置され、かつ上記ワイヤーグリッド偏光素子と上記光源との間に、光を透過するフィルタが支持棒により指が入らない程度の間隔をあけて設けられていることを特徴とする偏光光照射装置。 In a polarized light irradiation apparatus comprising a linear light source and a polarizing element that polarizes light from the light source,
The polarizing element is a wire grid polarizing element in which a wire grid is formed on a transparent substrate,
The wire grid polarizing element is disposed with the surface on which the wire grid is formed facing the light source side , and a filter that transmits light is not inserted by the support rod between the wire grid polarizing element and the light source. A polarized light irradiation apparatus characterized by being provided with an interval of .
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104423097A (en) * 2013-09-10 2015-03-18 东芝照明技术株式会社 Polarized light illumination device
JP2015090386A (en) * 2013-11-05 2015-05-11 ウシオ電機株式会社 Polarized light irradiation apparatus
JP2015197514A (en) * 2014-03-31 2015-11-09 ウシオ電機株式会社 Polarized light irradiation device
CN112394556A (en) * 2020-12-17 2021-02-23 江西富益特显示技术有限公司 Attached equipment of full-automatic polaroid

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5648734B1 (en) * 2013-11-19 2015-01-07 岩崎電気株式会社 Light irradiation device
JP6187348B2 (en) * 2014-03-25 2017-08-30 東芝ライテック株式会社 Polarized light irradiation device
JP6500204B2 (en) * 2015-04-14 2019-04-17 株式会社ブイ・テクノロジー Polarized light irradiation device
JP2016153920A (en) * 2016-05-19 2016-08-25 ウシオ電機株式会社 Polarization light irradiation device
CN108121101B (en) * 2016-11-29 2020-11-20 上海微电子装备（集团）股份有限公司 Wire grid unit and protection device thereof
JP6870391B2 (en) * 2017-03-06 2021-05-12 ウシオ電機株式会社 Light irradiation device

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003090902A (en) * 2001-09-19 2003-03-28 Dainippon Printing Co Ltd Antireflection imparting film and antireflection processing method using the same
JP2004163881A (en) * 2002-07-12 2004-06-10 Eastman Kodak Co Apparatus and method for exposing substrate to uv irradiation
JP2004271558A (en) * 2003-03-05 2004-09-30 Ricoh Opt Ind Co Ltd Polarizing optical element and its manufacturing method
JP2005062674A (en) * 2003-08-19 2005-03-10 Sanyo Electric Co Ltd Plate-like optical component
JP2006126464A (en) * 2004-10-28 2006-05-18 Ushio Inc Polarizer unit and polarized light irradiation device
JP2007279458A (en) * 2006-04-07 2007-10-25 Miraial Kk Sub-wavelength grating optical element
JP2008052078A (en) * 2006-08-25 2008-03-06 Fujifilm Corp Optical film manufacturing method, optical film, polarizing plate, transfer material, liquid crystal display apparatus and polarized uv ray exposure apparatus
JP2009251544A (en) * 2008-04-11 2009-10-29 Mitsubishi Electric Corp Light transmission plate and method of manufacturing the same
JP2010085917A (en) * 2008-10-02 2010-04-15 Asahi Kasei E-Materials Corp Transparent heat-ray reflecting film and heat-ray shielding windowpane using the same
JP2012118452A (en) * 2010-12-03 2012-06-21 Asahi Kasei E-Materials Corp Polarization-converting light source device and projection type liquid crystal display device using the same

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5089700A (en) 1990-01-30 1992-02-18 Amdata, Inc. Apparatus for infrared imaging inspections
US6243199B1 (en) 1999-09-07 2001-06-05 Moxtek Broad band wire grid polarizing beam splitter for use in the visible wavelength region
US6532111B2 (en) 2001-03-05 2003-03-11 Eastman Kodak Company Wire grid polarizer
JP2003131212A (en) * 2001-10-25 2003-05-08 Matsushita Electric Ind Co Ltd Projection type display device
JP4063042B2 (en) * 2002-10-23 2008-03-19 ウシオ電機株式会社 Polarized light irradiation device for photo-alignment
JP4622695B2 (en) * 2004-08-27 2011-02-02 日本ビクター株式会社 Projection display
JP4604661B2 (en) * 2004-11-05 2011-01-05 ウシオ電機株式会社 Polarized light irradiation device for photo-alignment
JP4606242B2 (en) * 2005-05-09 2011-01-05 富士フイルム株式会社 Ultraviolet irradiation device, functional film, and polarizing plate and liquid crystal display device using the same
JP2006323060A (en) * 2005-05-18 2006-11-30 Ushio Inc Polarized-light irradiating device
JP4424296B2 (en) * 2005-10-13 2010-03-03 ウシオ電機株式会社 UV irradiation equipment
JP5287737B2 (en) 2010-01-13 2013-09-11 ウシオ電機株式会社 Polarized light irradiation device
JP5056991B1 (en) * 2012-02-02 2012-10-24 ウシオ電機株式会社 Polarized light irradiation device

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003090902A (en) * 2001-09-19 2003-03-28 Dainippon Printing Co Ltd Antireflection imparting film and antireflection processing method using the same
JP2004163881A (en) * 2002-07-12 2004-06-10 Eastman Kodak Co Apparatus and method for exposing substrate to uv irradiation
JP2004271558A (en) * 2003-03-05 2004-09-30 Ricoh Opt Ind Co Ltd Polarizing optical element and its manufacturing method
JP2005062674A (en) * 2003-08-19 2005-03-10 Sanyo Electric Co Ltd Plate-like optical component
JP2006126464A (en) * 2004-10-28 2006-05-18 Ushio Inc Polarizer unit and polarized light irradiation device
JP2007279458A (en) * 2006-04-07 2007-10-25 Miraial Kk Sub-wavelength grating optical element
JP2008052078A (en) * 2006-08-25 2008-03-06 Fujifilm Corp Optical film manufacturing method, optical film, polarizing plate, transfer material, liquid crystal display apparatus and polarized uv ray exposure apparatus
JP2009251544A (en) * 2008-04-11 2009-10-29 Mitsubishi Electric Corp Light transmission plate and method of manufacturing the same
JP2010085917A (en) * 2008-10-02 2010-04-15 Asahi Kasei E-Materials Corp Transparent heat-ray reflecting film and heat-ray shielding windowpane using the same
JP2012118452A (en) * 2010-12-03 2012-06-21 Asahi Kasei E-Materials Corp Polarization-converting light source device and projection type liquid crystal display device using the same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104423097A (en) * 2013-09-10 2015-03-18 东芝照明技术株式会社 Polarized light illumination device
CN104423097B (en) * 2013-09-10 2019-03-12 东芝照明技术株式会社 Polarized light illumination device
JP2015090386A (en) * 2013-11-05 2015-05-11 ウシオ電機株式会社 Polarized light irradiation apparatus
JP2015197514A (en) * 2014-03-31 2015-11-09 ウシオ電機株式会社 Polarized light irradiation device
CN112394556A (en) * 2020-12-17 2021-02-23 江西富益特显示技术有限公司 Attached equipment of full-automatic polaroid

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