CN103226264B - Polarized light illumination device - Google Patents

Polarized light illumination device Download PDF

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Publication number
CN103226264B
CN103226264B CN201310027795.0A CN201310027795A CN103226264B CN 103226264 B CN103226264 B CN 103226264B CN 201310027795 A CN201310027795 A CN 201310027795A CN 103226264 B CN103226264 B CN 103226264B
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CN
China
Prior art keywords
light
polarizer
grid
light source
lamp
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Active
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CN201310027795.0A
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CN103226264A (en
Inventor
村上哲也
三宫晓史
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Ushio Denki KK
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Ushio Denki KK
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Priority to CN201610511297.7A priority Critical patent/CN105974674A/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Polarising Elements (AREA)
  • Liquid Crystal (AREA)
  • Optical Filters (AREA)

Abstract

The present invention provides a kind of polarized light illumination device possessing wire grid polarization element, when attending device etc., finger will not be occurred to encounter the grid protocol face of the wire grid polarization element being arranged on device, or damage grid because dropping article.The grid protocol of wire grid polarization element is configured facing to light source one side.And, it is also possible in the surface (between polarizer and light source) in grid protocol face, the filter covering grid protocol face is set.Use the filter through the light wanting the wavelength polarizing as filter.

Description

Polarized light illumination device
Technical field
The present invention relates to the alignment films to liquid crystal cell or the oriented layer etc. of angle of visual field compensation film irradiates regulation The polarized light illumination device that the polarised light of wavelength is orientated, particularly to use wire grid polarization element Polarized light illumination device.
Background technology
In recent years, the alignment films of the liquid crystal display cells with liquid crystal panel as representative or the angle of visual field are being mended In the orientation process of the oriented layer etc. repaying film, the polarised light of irradiation ultraviolet radiation band wavelength is used to carry out The technology being referred to as light orientation of orientation.Below, by the alignment films utilizing light to be orientated or be provided with The films of oriented layer etc. produce the film of orientation characteristic by light or layer is generically and collectively referred to as optical alignment film.
Optical alignment film is with the maximization of liquid crystal panel, and large area turns to as being more than 2000mm Quadrangle.
For example in patent document 1 grade, take in order to light is carried out to large-area optical alignment film described above To, propose have be combined with as linear light source bar-shaped lamp and have wiregrating shape grid polarizer (under Face, referred to as wire grid polarization element) polarized light illumination device.
Bar-shaped lamp can be made the longer lamp of length of illumination.Therefore, if using and having corresponding to alignment films The bar-shaped lamp of length of illumination of width, while making to irradiate after the light polarization of this lamp, make orientation Film moves to the direction orthogonal with the length direction of lamp, then can take wide area within a short period of time Carry out light orientation process to film.
Fig. 4 represents the existing polarised light being combined with bar-shaped lamp and wire grid polarization element as linear light source The configuration example of irradiation unit.
In the figure, the workpiece W for example, banding as the angle of visual field compensates film as optical alignment film Long size work, sent by conveying roller R1, be handled upside down along the direction of the arrow in Fig., and pass through polarised light Irradiation carries out light orientation process, is batched by takers-in R2.
The illumination part 10 of polarized light illumination device possesses: bar-shaped lamp 11, sends needed for light orientation process The light (ultraviolet) of wavelength, such as high-pressure mercury-vapor lamp or the metal adding other metals in mercury Halide lamp；And the reflective mirror 12 of elongated slot-like, by the ultraviolet from this bar-shaped lamp 11 towards workpiece W reflects.As described above, the length of the illuminating part of bar-shaped lamp 11 possesses the carrying direction with workpiece W The corresponding length of width in orthogonal direction.
Light exit portion 10 be configured to the length direction of lamp 11 become workpiece W width (relative to The orthogonal direction in carrying direction).
Light exit side at illumination part 10 is provided with the wire grid polarization element 81 as polarizer.Come Polarized by wire grid polarization element 81 from the light of illumination part 10, under illumination part 10 The workpiece W of carrying is irradiated, and carries out light orientation process.
Wire grid polarization element is at transparency carrier (the such as glass through the light wanting the wavelength polarizing Glass substrate) on define the element of grid (L/S), for example show at patent document 2 or patent document 3 Go out it to describe in detail.
If inserting wire grid polarization element in the optical path, then in incident light, the length direction with grid is put down Most of polarized component of row is reflected or absorbed, and the polarized component orthogonal with the length direction of grid Pass through.Therefore, the light having passed through wire grid polarization element becomes the length with the grid with polarizer The polarised light of the polarizing axis in the orthogonal direction in direction.
The polarised light of ultra-violet bands is used in light orientation process.In order to wire grid polarization unit will be incided The light of part is made polarised light, and width or the interval of formation grid on the transparent substrate need than polarization The wavelength of light is short (such as 100nm).
Therefore, being formed of grid needs fine process technology, in utilizing semiconductor integrated circuit to manufacture The photoetching technique being used or etching technique make, but lithographic equipment as used herein or Etaching device In the size of the workpiece that can process restricted.Therefore, wire grid polarization element can not be Large components, The size that can make at present reaches diameter about 300mm.
It is therefoie, for example, propose following technical scheme at patent document 4: at needs length of illumination Long rod type light source, such as bar-shaped high-pressure mercury-vapor lamp or the metal-halide lamp pair with a length of 1m～3m During relatively big (length) polarizer answered, multiple rectangle wiregrating polarizer is made to align with grid direction And in the frame along the length direction arrangement of lamp, for use as a polarizer.
Patent document 1 Japanese Unexamined Patent Publication 2011-145381 publication
Patent document 2 Japanese Unexamined Patent Publication 2002-328234 publication
Patent document 3 Japanese Unexamined Patent Application Publication 2003-508813 publication
No. 4506412 publications of patent document 4 Japanese Patent No.
As described above, the grid of wire grid polarization element is manufactured by retrofit, the width of grid Or it is spaced for example, 100nm, if therefore encounter hand because of maloperation, or drop on it article, then net Lattice structure destroys, it is impossible to play the effect as polarizer.But, due to finely, although thoroughly Define grid on the surface of bright substrate (glass), but naked eyes are difficult to differentiate.
Therefore, it is possible in view of when repair and maintenance polarized light illumination device etc., encounter because of maloperation The grid protocol face of the polarizer being arranged on device, or some article drop on polarizer, Damage fine grid.
Content of the invention
The present invention is to consider that above-mentioned problem is made, and it is an object of the invention to, is possessing wire Light source and make the polarized light illumination device of wire grid polarization element of the light polarization from this light source, During attending device etc., finger will not be occurred to encounter the grid-shaped of the wire grid polarization element being arranged on device One-tenth face, or the situation of grid is damaged because dropping article.
In order to solve above-mentioned technical problem, the net of the wire grid polarization element of polarized light illumination device will be used for Trellis becomes facing to light source one side configuration.That is, it in the lamp box constituting illumination part, is formed without line The outside facing to lamp box (light fixture) of the grid of grid polarizer.
Further, the surface (between polarizer and light source) in the grid protocol face of wiregrating polarizer It is provided with the filter for protecting grid protocol face.Filter uses through the wavelength wanting polarization The filter of light.
Invention effect:
Owing to being configured on the outer wall cover light source the light exit wound of bullet being formed, wire grid polarization element Grid protocol is facing to light source one side, so grid protocol face will not be contacted from lamp box is external.For example, Even if touching polarizer, due to towards outside lamp box for not being the face in grid protocol face, so Grid will not be destroyed.
Additionally, by being arranged above filter in grid protocol face, for example, even if safeguarding lamp When in case, hand is difficult to encounter grid surface, even if article drop and are also prevented from filter and drop to grid Formation face.Thus, grid will not be destroyed.
Brief description
Fig. 1 is the lamp box (light fixture) of the polarized light illumination device representing the first embodiment of the present invention Summary construction diagram.
Fig. 2 is the structure chart representing polarizer unit.
Fig. 3 is the lamp box (light fixture) of the polarized light illumination device representing the second embodiment of the present invention Summary construction diagram.
Fig. 4 is the figure of the configuration example representing existing polarized light illumination device.
Description of reference numerals:
1 lamp box (light fixture)
10 illumination parts
11 bar-shaped lamps
12 reflective mirrors
20 coolers (cooler)
30 air blasts (pressure fan)
40 next doors
50 ventilating paths
60 outer walls
70 optical emission exits
80 polarizer unit
81 wire grid polarization elements (Polarizer)
The holding frame of 82 Polarizers
83 shadow shields
90 filter units
91 filters
The holding frame of 92 filters
93 supporting rods
G wiregrating
W workpiece
Detailed description of the invention
Fig. 1 is the lamp box (light fixture) of the polarized light illumination device representing the first embodiment of the present invention Summary construction diagram.This figure is the sectional view in the direction orthogonal with the length direction of lamp box.Additionally, at this In figure, the structure of the ignition device etc. omitting lamp represents.
Lamp box 1 possesses: illumination part 10, and the water-cooled cooler on the top of illumination part 10 is (cold But device) 20；And pressure fan (air blast) 30.Illumination part 10 have lamp 11 and reflection from The reflective mirror 12 of the light of lamp 11.As shown in solid arrow in figure, from the light of lamp 11 directly or by instead It is irradiated to workpiece W via wire grid polarization element 81 after light microscopic 12 reflection.
Air blast 30 produces the cooling wind cooling down lamp 11 or reflective mirror 12 when lamp 11 lighting, Cooler 20 plays the effect of the temperature reducing the cooling wind cooling down lamp 11 or reflective mirror 12.
Illumination part 10 is surrounded by next door 40, and the outer wall 60 of lamp box 1 has covered the outside in next door 40. Form gap between next door 40 and outer wall 60.This gap becomes the ventilating path 50 that cooling wind passes through.
Cooling wind as shown in phantom in FIG., is sent from air blast 30 and is passed through ventilating path 50, from reflective The light exit side of mirror 12 is introduced in illumination part 10 to lamp 11 or reflective mirror 12 while cooling Inner side, by cooled after cooler 20, then be sent from air blast 30.
Additionally, define optical emission exit 70 on the outer wall 60 of lamp box 1, pass through in optical emission exit 70 The light irradiating from illumination part 10 to workpiece W.
Being mounted with polarizer unit 80 on this optical emission exit 70, this polarizer unit 80 has Wire grid polarization element 81, wire grid polarization element 81 makes the light polarization by optical emission exit 70.
The wire grid polarization element 81 of polarizer unit 80 is through the ripple for carrying out light orientation process Wiregrating (hereinafter referred to as grid) is defined on one surface of the transparency carrier (glass substrate) of long light G.Here, the formation of grid G configures facing to lamp 11 side (inner side of outer wall 60).
At Fig. 1, the grid G of wire grid polarization element 81 left and right directions in figure extends.
Fig. 2 is the structure chart representing polarizer unit 80.Fig. 2 (a) is polarizer unit 80 Top view, Fig. 2 (b) is the side cross-sectional view of polarizer unit 80, Fig. 2 (c) be polarization unit The stereogram of part unit 80.
Polarizer unit 80 is along rod by multiple wire grid polarization elements (hereinafter referred to as Polarizer) 81 Keep in the length direction (left and right directions of Fig. 2) of shape lamp 12 is arranged in framework (holding frame) 82 Unit.Holding frame 82 is from clamping each Polarizer 81 up and down.
It between adjacent Polarizer and Polarizer, is provided with the gap of 1mm～2mm degree.In order to right Accurate so that the direction of Polarizer grid G each other is parallel, utilize this gap to make Polarizer 81 in rotary moving Carry out position adjustment.Additionally, this gap is covered by the shadow shield 83 of polarizer unit 80, with Just will not be from this clearance leakage no polarization light.
As described above, as shown in Fig. 2 (b), each wire grid polarization element (Polarizer) 81 is configured to The formation face of grid G is positioned at lamp (light source) side (inner side of lamp box).
Fig. 3 is the lamp box (light fixture) of the polarized light illumination device representing the second embodiment of the present invention Summary construction diagram.As Fig. 1, this figure is the sectional view in the direction orthogonal with the length direction of lamp box.
It is with the difference of the structure of the first embodiment of Fig. 1, (lamp on polarizer unit 80 Side), it is configured with the filter 90 in grid G face for protecting Polarizer 81.Filter 90 with partially Tabula rasa 81 is same, has been arranged multiple filter along the length direction of lamp 12 in holding frame 92 91.As shown in solid arrow in figure, from lamp 11 light directly or reflected by reflective mirror 12 and via Filter 90 and Polarizer 81 irradiate workpiece W.
The holding frame 82 of polarizer unit 80 erects the supporting rod forming parts as ventilation path 93, supporting rod 93 is provided with the holding frame 92 of filter.As filter 91, can use Quartz plate through the wavelength of the ultraviolet polarizing.In addition it is also possible to use in blocking light orientation process Unwanted visible ray or the interferential filter of ultrared formation interference.
If the overlapping filter 91 of contact on Polarizer 81, it is likely that hurt the grid of Polarizer 81 G, therefore arranges interval to configure both.If this interval is narrower, then cools down wind and be difficult at Polarizer 81 Upper flowing, it is possible to cause Polarizer 81 by the heat heating from lamp 11, therefore cooling wind energy is set The sufficient interval of enough flowings.But, if being spaced excessive, then can not protect the grid of Polarizer 81 G forms face, it is desirable to be set as the interval that finger can not enter degree.
A case as the inaccessiable interval of finger can enumerate IP(International Protection The International Protection) specification.It is by IEC(International Electrotechnical Commission) 60529(1989) made Fixed, be also in JIS(Japanese Industrial Standards) in by C0920(1993) specify, as The protection content of human body, in the case of finger, the protection content shown with relative machine is set as diameter Below 12.5mm.
Therefore, it is intended that the interval between Polarizer 81 and filter 91 is set to 5mm-12.5mm.
Along the length direction of polarizer unit 80 and filter 90 at both sides (left and right directions of Fig. 1) Separate and multiple supporting rod 93 can be set by cooling down the interval of wind.
In addition, supporting rod 93 is due to for being used for forming ventilation path between Polarizer 81 and filter 91 The ventilating path in footpath forms parts, therefore, as long as ventilating path and the parts not being bar-like can be formed ?.
For example, it is possible to the parts of the bulk for rectangle, being formed can be (uncommon by the through hole cooling down wind Hope a diameter of more than 5mm) tabular or the parts of wall-like also permissible.Further, as long as can keep The parts mesh members at the interval between polarizer unit 80 and filter 90 is also permissible.
In addition, when the plate-shaped member being shaped as through hole or mesh members, ventilating opening will be become The size of the diameter of hole or net is set as the above-mentioned size that can enter finger i.e. below diameter 12.5mm If (being i.e. able to ensure that the hole of a diameter of 5mm-12.5mm of ventilation), even if by polarizer list Interval between unit 80 and filter 90 expands the cooling wind to flow enough, and finger does not reaches partially yet The grid G of tabula rasa 81 forms face, can protect grid G.
Additionally, in the above-described embodiments, bar-shaped lamp is illustrated as the example of light source, but The present invention also can be suitable for the structure of multiple LED line shape arrangement of injection ultraviolet.

Claims (1)

1. a polarized light illumination device, possesses the light source of wire, makes the light polarization from this light source Polarizer and cover above-mentioned light source and be formed with the optical emission exit making the light from this light source pass through Outer wall, it is characterised in that
Above-mentioned polarizer is the wire grid polarization element being formed with wiregrating on the transparent substrate,
By above-mentioned wire grid polarization element define wiregrating facing to light source side configuration, and at above-mentioned line It is spaced apart finger by supporting rod and above-mentioned wire grid polarization element between grid polarizer with above-mentioned light source The interval of degree can not be entered to arrange the filter of transmission light.
CN201310027795.0A 2012-01-25 2013-01-24 Polarized light illumination device Active CN103226264B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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JP2012013288A JP5200271B1 (en) 2012-01-25 2012-01-25 Polarized light irradiation device
JP2012-013288 2012-01-25

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JP5958491B2 (en) * 2014-03-31 2016-08-02 ウシオ電機株式会社 Polarized light irradiation device
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CN103226264A (en) 2013-07-31
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