TW201333550A - Polarized light irradiating device - Google Patents

Polarized light irradiating device Download PDF

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TW201333550A
TW201333550A TW101149558A TW101149558A TW201333550A TW 201333550 A TW201333550 A TW 201333550A TW 101149558 A TW101149558 A TW 101149558A TW 101149558 A TW101149558 A TW 101149558A TW 201333550 A TW201333550 A TW 201333550A
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light
polarizing element
wire grid
grating
light source
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TW101149558A
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TWI560473B (en
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Tetsuya Murakami
Akifumi Sangu
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Ushio Electric Inc
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/30Polarising elements
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133788Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Polarising Elements (AREA)
  • Liquid Crystal (AREA)
  • Optical Filters (AREA)

Abstract

An object of the present invention is such that in a polarized light irradiating device that comprises a wire grid polarization element, the device is constructed in such a way that during the maintenance of the device, the optic grid is not subject to damage caused by finger contact or articles falling on a grid forming surface of the wire grid polarization element of the device. The solution of the present invention is that an arrangement is made such that the grid forming surface of the wire grid polarization element faces a light source. As such, it is feasible to dispose an optic filter that protects the grid forming surface exactly above the grid forming surface (between the polarization element and the light source).

Description

偏光光線照射裝置 Polarized light irradiation device

本發明係關於對液晶元件的配向膜及視角補償薄膜(viewing angle compensation film)的配向層等照射所定波長的偏光光線來進行配向的偏光光線照射裝置,尤其關於使用線柵偏光元件的偏光光線照射裝置。 The present invention relates to a polarized light illuminating device that aligns a polarizing ray of a predetermined wavelength with an alignment film of a liquid crystal element, an alignment layer of a viewing angle compensation film, and the like, and particularly relates to polarized light irradiation using a wire grid polarizing element. Device.

近來,關於以液晶面板為首之液晶顯示元件的配向膜及視角補償薄膜的配向層等之配向處理,逐漸採用照射紫外線區域之波長的偏光光線來進行配向之稱為光配向的技術。以下,將設置藉由光線來進行配向之配向膜或配向層的薄膜等,將藉由光線產生配向特性的膜或層總稱稱為光配向膜。 Recently, the alignment treatment of the alignment film of the liquid crystal display element including the liquid crystal panel and the alignment layer of the viewing angle compensation film has been gradually adopted as a technique of aligning the polarized light of the wavelength of the ultraviolet ray region. Hereinafter, a film or layer which forms an alignment film by an ray to align the light, and a film or layer which generates an alignment property by light is collectively referred to as a photo-alignment film.

光配向膜係伴隨液晶面板的大型化,例如像一邊為2000mm以上的四角形地大面積化。 The light-aligning film system is increased in size as shown in the square shape of 2000 mm or more in accordance with the increase in size of the liquid crystal panel.

為了對於前述般之大面積的光配向膜進行光配向,例如專利文獻1等提案有組合了身為線狀光源之棒狀的燈管與具有線柵狀之光柵的偏光元件(以下稱為線柵偏光元件)的偏光光線照射裝置。 In order to perform optical alignment of the light-aligning film having a large area as described above, for example, Patent Document 1 proposes a light-emitting element in which a rod-shaped light tube which is a linear light source and a grating having a wire grid shape are combined (hereinafter referred to as a line). A polarized light irradiation device of a gate polarizing element).

棒狀燈管係可製作發光長度較長者。為此,使用具備因應光配向膜的寬度之發光長度的棒狀燈管,一邊使來自該燈管的光線偏光來進行照射,一邊使配向膜往正交於燈管之配向膜之長邊方向的方向移動的話,可在比較短的時 間對廣泛面積的配向膜作光配向處理。 A rod-shaped tube system can produce a longer length of illumination. For this reason, a rod-shaped bulb having a light-emitting length corresponding to the width of the photo-alignment film is used, and the light from the tube is polarized and irradiated, and the alignment film is oriented in the longitudinal direction of the alignment film orthogonal to the tube. If the direction is moving, it can be shorter. The optical alignment treatment is performed on a wide area of the alignment film.

於圖4揭示組合身為線狀光源之棒狀燈管與線柵偏光元件的先前之偏光光線照射裝置之構造例的圖。 Fig. 4 is a view showing a configuration example of a conventional polarized light irradiation device which combines a rod-shaped light tube and a wire grid polarizing element which are linear light sources.

於同圖中,身為光配向膜的工件W係例如如視角補償薄膜之帶狀長條工件,從輸送輥R1被送出,一邊被搬送至圖中箭頭方向,一邊藉由偏光光線照射來進行光配向處理,而被捲繞輥R2捲繞。 In the same figure, the workpiece W which is a light alignment film is, for example, a strip-shaped elongated workpiece such as a viewing angle compensation film, which is sent out from the transport roller R1 and conveyed to the direction of the arrow in the figure while being irradiated by polarized light. The light is aligned and wound by the winding roller R2.

偏光光線照射裝置的光照射部10係具備放射光配向處理所需之波長之光線(紫外線)的棒狀燈管11,例如高壓水銀燈及水銀之外加入其他金屬的金屬鹵素燈,與將來自棒狀燈管11之紫外線朝向工件W反射的溝狀反射鏡12。如前述般,棒狀燈管11的長度係使用發光部具備對應與工件W的搬送方向正交之方向的寬度之長度者。 The light-irradiating portion 10 of the polarized light irradiation device is provided with a rod-shaped bulb 11 that emits light of a wavelength (ultraviolet light) required for the light-aligning treatment, for example, a high-pressure mercury lamp and a metal-halogen lamp in which other metals are added in addition to mercury, and The ultraviolet light of the bulb 11 is directed toward the groove mirror 12 reflected by the workpiece W. As described above, the length of the rod-shaped bulb 11 is such that the light-emitting portion has a length corresponding to the width in the direction orthogonal to the conveyance direction of the workpiece W.

光照射部10係以燈管11的長邊方向成為工件W的寬度方向(對於搬送方向正交的方向)之方式配置。 The light-irradiating portion 10 is disposed such that the longitudinal direction of the bulb 11 is the width direction of the workpiece W (the direction orthogonal to the transport direction).

於光照射部10的光射出側,設置有身為偏光元件之線柵偏光元件81。來自光照射部10的光線係藉由線柵偏光元件81偏光,被照射至搬送於光照射部10之下的工件W,進行光配向處理。 A wire grid polarizing element 81 as a polarizing element is provided on the light emitting side of the light irradiation unit 10. The light from the light-irradiating portion 10 is polarized by the wire grid polarizing element 81, and is irradiated to the workpiece W conveyed under the light-irradiating portion 10 to perform optical alignment processing.

線柵偏光元件係在透射欲偏光的波長之光線的透明基板(例如玻璃基板)上形成光柵(line and space)者,例如專利文獻2及專利文獻3有詳細揭示。 The wire grid polarizing element is formed by forming a line and a space on a transparent substrate (for example, a glass substrate) that transmits light of a wavelength to be polarized, and is disclosed in, for example, Patent Document 2 and Patent Document 3.

於光路徑中插入線柵偏光元件的話,射入之光線中平行於光柵的長邊方向之偏光成分的大部分會被反射或吸收 ,正交於光柵的長邊方向之偏光成分則會透射。所以,通過線柵偏光元件的光線係成為具有與偏光元件之光柵的長邊方向正交之方向的偏光軸之偏光光線。 When a wire grid polarizing element is inserted in the light path, most of the polarized light component of the incident light parallel to the longitudinal direction of the grating is reflected or absorbed. The polarization component orthogonal to the longitudinal direction of the grating is transmitted. Therefore, the light passing through the wire grid polarizing element is a polarized light having a polarization axis in a direction orthogonal to the longitudinal direction of the grating of the polarizing element.

於光配向處理使用紫外線區域的偏光光線。對於為了使射入至線柵偏光元件的光線成為偏光光線來說,形成於透明基板之光柵的寬度及間隔必須比偏光之光線的波長還短(例如100nm)。 The polarized light in the ultraviolet region is used in the light alignment treatment. In order to make the light incident on the wire grid polarizing element into a polarized light, the width and interval of the grating formed on the transparent substrate must be shorter than the wavelength of the polarized light (for example, 100 nm).

因此,光柵的形成需要細微的加工技術,利用使用於半導體製造之微影技術及蝕刻技術來製作,因此,在此使用之微影裝置及蝕刻裝置可加工之工件的大小有所限制。因此,無法作出大型的線柵偏光元件,現狀可製作的大小係到直徑300mm程度為止。 Therefore, the formation of the grating requires a fine processing technique, and is fabricated by using lithography techniques and etching techniques for semiconductor fabrication. Therefore, the size of the workpiece that can be processed by the lithography apparatus and the etching apparatus used herein is limited. Therefore, it is not possible to make a large-sized wire grid polarizing element, and the current size can be made up to a diameter of 300 mm.

因此,例如專利文獻4提案有在需要因應發光長度較長之棒狀光源,例如長度1m至3m等之棒狀的高壓水銀燈或金屬鹵素燈之較大(較長)的偏光元件時,將複數個矩形的線柵偏光元件對齊於光柵的方向,在框架中沿著燈管的長邊方向並排,作為一個偏光元件來使用。 Therefore, for example, Patent Document 4 proposes that when a rod-shaped light source having a long light-emitting length, for example, a large (long) polarizing element of a rod-shaped high-pressure mercury lamp or a metal halide lamp having a length of 1 m to 3 m is required, The rectangular wire grid polarizing elements are aligned in the direction of the grating and are arranged side by side along the longitudinal direction of the tube in the frame to be used as a polarizing element.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本特開2011-145381號公報 [Patent Document 1] Japanese Laid-Open Patent Publication No. 2011-145381

[專利文獻2]日本特開2002-328234號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2002-328234

[專利文獻3]日本特表2003-508813號公報 [Patent Document 3] Japanese Patent Publication No. 2003-508813

[專利文獻4]日本專利第4506412號公報 [Patent Document 4] Japanese Patent No. 4506412

如上所述,線柵偏光元件的光柵藉由細微的加工來製造,光柵的寬度及間隔為例如100nm,故不小心手指接觸或物品掉落於其上的話,會破壞光柵構造,無法發揮作為偏光元件的作用功效。但是,因為細微,在透明基板(玻璃)的表面形成光柵之狀況難以以肉眼確認。 As described above, the grating of the wire grid polarizing element is manufactured by fine processing, and the width and interval of the grating are, for example, 100 nm, so that accidental finger contact or falling of an object thereon may damage the grating structure and fail to function as a polarized light. The function of the component. However, it is difficult to visually confirm the condition of forming a grating on the surface of a transparent substrate (glass) because of the fineness.

因此,在偏光光線照射裝置之維護檢查時等,可能會有不小心接觸到安裝在裝置之偏光元件的光柵形成面或某些物品掉落在偏光元件上,破壞了細微的光柵之狀況。 Therefore, during the maintenance inspection of the polarized light irradiation device, etc., there may be a case where the grating forming surface of the polarizing element mounted on the device or some of the articles are dropped on the polarizing element, and the fine grating is broken.

本發明係有鑒於前述之問題點所發明者,本發明的目的係於具備線狀光源與使來自該光源之光線偏光之線柵偏光元件的偏光光線照射裝置中,在裝置的維護時等,以不會有手指接觸到安裝於裝置之線柵偏光元件的光柵形成面或物品掉落而破壞光柵之狀況的方式來構成裝置。 The present invention has been made in view of the above problems, and an object of the present invention is to provide a polarized light irradiation device including a linear light source and a wire grid polarizing element that polarizes light from the light source, during maintenance of the device, and the like. The device is constructed in such a manner that the finger is not in contact with the grating forming surface of the wire grid polarizing element mounted on the device or the article is dropped to break the condition of the grating.

為了解決前述課題,將使用於偏光光線照射裝置之線柵偏光元件的光柵形成面,朝向光源之方向配置。亦即,於構成光照射部的燈室中,使未形成線柵偏光元件的光柵之面朝向燈室(燈具)的外側。 In order to solve the above problems, the grating forming surface of the wire grid polarizing element used in the polarized light irradiation device is disposed in the direction of the light source. That is, in the lamp chamber constituting the light-irradiating portion, the surface of the grating on which the wire grid polarizing element is not formed is directed to the outside of the lamp chamber (lamp).

進而,於線柵偏光元件的光柵形成面的正上(偏光元件與光源之間),設置保護光柵形成面的濾光器。濾光器 係使用欲偏光之波長的光線可透射者。 Further, a filter for protecting the grating forming surface is provided directly above the grating forming surface of the wire grid polarizing element (between the polarizing element and the light source). Filter It is transmitted by light that uses the wavelength of the light to be polarized.

因為在形成於覆蓋光源之外壁的光射出口,將線柵偏光元件以光柵形成面朝向光源之方向之方式配置,所以,從燈室外無法接觸光柵形成面。例如即使接觸到偏光元件,因為朝向燈室的外側的並不是光柵形成面之面,也不會破壞光柵。 Since the wire grid polarizing element is disposed so that the grating forming surface faces the light source in the light exiting opening formed on the outer wall of the light source, the grating forming surface cannot be contacted from the outside of the lamp. For example, even if it is in contact with the polarizing element, since the outer side of the lamp chamber is not the surface of the grating forming surface, the grating is not broken.

又,藉由在光柵形成面的正上設置濾光器,例如即使在維護燈室內之狀況中,手指也難以接觸到光柵面,即使物品掉落,濾光器也可防止其落下至光柵形成面。因此,不會破壞光柵。 Further, by providing a filter directly above the grating forming surface, for example, even in the condition of maintaining the lamp chamber, the finger hardly contacts the grating surface, and even if the article falls, the filter can prevent it from falling to the grating formation. surface. Therefore, the grating is not destroyed.

圖1係揭示本發明第1實施例之偏光光線照射裝置的燈室(燈具)之概略構造的圖。同圖係對於燈室的長邊方向正交之方向的剖面圖。再者,於同圖中,省略揭示燈管的點燈裝置等之構造。 Fig. 1 is a view showing a schematic configuration of a lamp chamber (lamp) of a polarized light irradiation device according to a first embodiment of the present invention. The same figure is a cross-sectional view in the direction in which the longitudinal direction of the lamp chamber is orthogonal. In the same figure, the structure of the lighting device or the like for explaining the lamp tube is omitted.

燈室1係具備光照射部10、於其上部之水冷式的冷卻機(散熱器)20與送風機(吹氣機)30。光照射部10係具有燈管11與反射來自燈管11之光線的反射鏡12。如圖中實線的箭頭所示,來自燈管11的光線係直接或被反射鏡12反射,透過線柵偏光元件81而照射至工件W。 The lamp chamber 1 includes a light irradiation unit 10, a water-cooled cooler (heat sink) 20 and an air blower (air blower) 30 on the upper portion thereof. The light irradiation unit 10 has a bulb 11 and a mirror 12 that reflects light from the bulb 11. As indicated by the solid arrows in the figure, the light from the bulb 11 is directly or reflected by the mirror 12, and is transmitted to the workpiece W through the wire grid polarizing element 81.

吹氣機30係在燈管11點燈時產生冷卻燈管11及反 射鏡12的冷卻風,散熱器20係具有降低冷卻燈管11及反射鏡12之冷卻風的溫度之作用。 The blower 30 generates a cooling lamp 11 and a counter when the lamp 11 is lit. The cooling air of the mirror 12 has a function of lowering the temperature of the cooling air for cooling the bulb 11 and the mirror 12.

光照射部10係被間隔壁40包圍,燈室1的外壁60覆蓋其外側。間隔壁40與外壁60之間形成有間隙。此間隙係成為冷卻風通過的通風路徑50。 The light irradiation portion 10 is surrounded by the partition wall 40, and the outer wall 60 of the lamp chamber 1 covers the outer side thereof. A gap is formed between the partition wall 40 and the outer wall 60. This gap is the ventilation path 50 through which the cooling air passes.

冷卻風係如圖中虛線所示,從吹氣機30送出而通過通風路徑50,由反射鏡12的光射出部,一邊冷卻燈管11及反射鏡12一邊被吸入至光照射部10的內側,通過散熱器20而被冷卻,再次藉由吹氣機30送出。 The cooling air system is sent out from the air blower 30 and passes through the air passage 50 through the air passage 50, and is cooled by the light emitting portion of the mirror 12 while being cooled to the inside of the light irradiation portion 10 while cooling the bulb 11 and the mirror 12. It is cooled by the radiator 20 and sent again by the blower 30.

又,於燈室1的外壁60,形成有從光照射部10朝向工件W照射之光線通過的光射出口70。 Further, a light exit port 70 through which the light irradiated from the light irradiation unit 10 toward the workpiece W passes is formed on the outer wall 60 of the lamp chamber 1.

於此光射出口70,安裝有具有使通過之光線偏光之線柵偏光元件81的偏光元件單元80。 A light-emitting element unit 80 having a wire grid polarizing element 81 that polarizes the passing light is attached to the light exit port 70.

偏光元件單元80的線柵偏光元件81係在透射用以進行光配向處理的波長之光線的透明基板(玻璃基板)一方之表面,形成線柵(以下也稱為光柵)G者。在此,將光柵G的形成面朝向燈管11側(外壁60的內側)配置。 The wire grid polarizing element 81 of the polarizing element unit 80 is a surface of a transparent substrate (glass substrate) that transmits light of a wavelength for performing optical alignment processing, and forms a wire grid (hereinafter also referred to as a grating) G. Here, the formation surface of the grating G is disposed toward the side of the bulb 11 (inside of the outer wall 60).

於圖1中線柵偏光元件81的光柵G係往圖面左右方向延伸。 In Fig. 1, the grating G of the wire grid polarizing element 81 extends in the left-right direction of the drawing.

圖2係揭示偏光元件單元80之構造的圖。圖2(a)係偏光元件單元80的俯視圖,圖2(b)係偏光元件單元80的側剖面圖,圖2(c)係偏光元件單元80的立體圖。 FIG. 2 is a view showing the configuration of the polarizing element unit 80. 2(a) is a plan view of the polarizing element unit 80, FIG. 2(b) is a side cross-sectional view of the polarizing element unit 80, and FIG. 2(c) is a perspective view of the polarizing element unit 80.

偏光元件單元80係將複數線柵偏光元件(以下也稱為偏光板)81,沿著棒狀燈管12的長邊方向(圖2的左 右方向)並排於框架(保持框)82內來保持者。保持框82係由上下挾持各偏光板81並加以保持。 The polarizing element unit 80 is a plurality of wire grid polarizing elements (hereinafter also referred to as polarizing plates) 81 along the longitudinal direction of the rod-shaped tube 12 (left of FIG. 2) The right direction) is placed side by side in the frame (holding frame) 82 to hold the holder. The holding frame 82 holds and holds the respective polarizing plates 81 from above and below.

在相鄰之偏光板與偏光板之間,設置有1mm至2mm程度的間隙。為了以偏光板彼此之光柵G的方向成為平行之方式進行對合,使用此間隙,使偏光板81旋轉移動來進行位置調整。然後,此間隙係以偏光光線不會從此洩露之方式,於偏光元件單元80中被遮光板83覆蓋。 A gap of about 1 mm to 2 mm is provided between the adjacent polarizing plate and the polarizing plate. In order to perform the alignment so that the directions of the gratings G of the polarizing plates are parallel, the gap is used to rotate the polarizing plate 81 to perform position adjustment. Then, this gap is covered by the light shielding plate 83 in the polarizing element unit 80 so that the polarized light does not leak therefrom.

如上所述,各線柵偏光元件(偏光板)81係如圖2(b)所示,以光柵G的形成面成為燈管(光源)側(燈室的內側)之方式配置。 As described above, each of the wire grid polarizing elements (polarizing plates) 81 is disposed such that the surface on which the grating G is formed becomes the lamp (light source) side (inside of the lamp chamber) as shown in FIG. 2(b).

圖3係揭示本發明第2實施例之偏光光線照射裝置的燈室(燈具)之概略構造的圖。與圖1相同,同圖係正交於燈室的長邊方向之方向的剖面圖。 Fig. 3 is a view showing a schematic configuration of a lamp chamber (lamp) of a polarized light irradiation device according to a second embodiment of the present invention. The same as Fig. 1, the same drawing is a cross-sectional view orthogonal to the longitudinal direction of the lamp chamber.

與圖1之第1實施例的構造之不同係在偏光元件單元80上(燈管側),配置用以保護偏光板81的光柵G面的濾光器90。濾光器90係與偏光板81相同,將複數濾光器板91在保持框92內,沿著燈管11的長邊方向並排配置者。如圖中實線的箭頭所示,來自燈管11的光線係直接或被反射鏡12反射,透過濾光器90與偏光板81而照射至工件W。 The difference from the configuration of the first embodiment of Fig. 1 is that a filter 90 for protecting the grating G face of the polarizing plate 81 is disposed on the polarizing element unit 80 (on the side of the lamp). The filter 90 is the same as the polarizing plate 81, and the plurality of filter plates 91 are arranged side by side in the longitudinal direction of the bulb 11 in the holding frame 92. As indicated by the solid arrows in the figure, the light from the bulb 11 is directly or reflected by the mirror 12, and is transmitted through the filter 90 and the polarizing plate 81 to the workpiece W.

濾光器板的保持框92係在偏光元件單元80的保持框82上豎立身為通風路徑形成構件的支持棒93,並安裝於其上。作為濾光器板91,可使用透射偏光的紫外線之波長的石英板。又,使用形成有遮斷光配向處理中不需要之 可視光及紅外線的干涉膜之干涉濾光器亦可。 The holding frame 92 of the filter plate is erected on the holding frame 82 of the polarizing element unit 80 as a support rod 93 as a ventilation path forming member, and is mounted thereon. As the filter plate 91, a quartz plate that transmits a wavelength of polarized ultraviolet light can be used. Moreover, it is not necessary to use the formation of the blocked light alignment process. Interference filters for visible light and infrared interference films are also available.

在偏光板81上接觸重疊濾光器板91的話,因為可損傷偏光板81的光柵G之可能性,所以兩者隔開間隔來配置。此間隔過於狹小的話,因為有冷卻風難以流動於偏光板81上,偏光板81會因來自燈管11的熱而被加熱之可能性,所以,設置冷卻風可流動之充分的間隔。但是,間隔過寬的話,因為無法保護偏光板81的光柵G形成面,所以,設為手指無法進入之程度的間隔為佳。 When the overlapping filter plate 91 is brought into contact with the polarizing plate 81, since the possibility of the grating G of the polarizing plate 81 can be damaged, the two are arranged at intervals. When the interval is too narrow, since it is difficult for the cooling air to flow on the polarizing plate 81, the polarizing plate 81 may be heated by the heat from the bulb 11, so that a sufficient interval at which the cooling air can flow is provided. However, if the interval is too wide, since the grating G forming surface of the polarizing plate 81 cannot be protected, it is preferable to set the interval at which the finger cannot enter.

作為手指無法進入的間隔之一例,可舉出IP(International Protection)規格。此係在IEC60529(1989年)所制定,JIS也訂定於C0920(1993年),所以,作為對於人體的保護內容,在手指之狀況中,對於機器的保護內容係揭示為直徑12.5mm以下。 An example of the interval in which the finger cannot enter is an IP (International Protection) standard. This is established in IEC 60529 (1989), and JIS is also defined in C0920 (1993). Therefore, as a protection for the human body, in the case of a finger, the protection content of the machine is revealed to be 12.5 mm or less in diameter.

所以,偏光板81與濾光器板91之間隔從5mm至12.5mm為佳。 Therefore, the distance between the polarizing plate 81 and the filter plate 91 is preferably from 5 mm to 12.5 mm.

支持棒93係沿著偏光元件單元80與濾光器90的長邊方向,於兩側(圖1的左右方向)隔開冷卻風可通過的間隔而設置複數個。 The support bar 93 is provided along the longitudinal direction of the polarizing element unit 80 and the optical filter 90, and is provided on the both sides (the horizontal direction in FIG. 1) by a space through which the cooling air can pass.

再者,支持棒93係因為是用以在偏光板81與濾光器板91之間形成通風路徑的通風路徑形成構件,只要可形成通風路徑的話,不是形成棒狀者亦可。 Further, the support rod 93 is a ventilation path forming member for forming a ventilation path between the polarizing plate 81 and the filter plate 91, and may be formed as a rod as long as a ventilation path can be formed.

例如,作為矩形之區塊狀者亦可,作為形成冷卻風可通過之貫通孔(直徑5mm以上為佳)的板狀或壁狀者亦可。又,只要可保持偏光元件單元80與濾光器90之間隔 者的話,作為網狀者亦可。 For example, it may be a plate-like shape or a wall shape which is a through-hole (a diameter of 5 mm or more) through which a cooling air can pass, as a block shape of a rectangular shape. Also, as long as the distance between the polarizing element unit 80 and the filter 90 can be maintained If you are a person, you can also use it as a mesh.

再者,設為形成貫通孔之板狀的構件或網狀的構件時,將成為通風口的孔或網的直徑大小,設為前述之手指無法進入之大小的直徑12.5mm以下(亦即,可確保通風之直徑5mm~12.5mm的孔)的話,即使將偏光元件單元80與濾光器90之間的間隔,擴張為冷卻風可充分流動的間隔,手指也不會接觸到偏光板81的光柵G形成面,可保護到光柵G。 In the case of a plate-shaped member or a mesh-like member that forms a through-hole, the diameter of the hole or the mesh that serves as the vent is 12.5 mm or less in diameter that the finger can not enter (that is, When the hole having a diameter of 5 mm to 12.5 mm is ensured, even if the interval between the polarizing element unit 80 and the filter 90 is expanded to an interval at which the cooling air can flow sufficiently, the finger does not come into contact with the polarizing plate 81. The grating G forms a face and is protected to the grating G.

再者,於前述實施例中,作為光源以棒狀的燈管為例來進行說明,但是,即使將射出紫外線之LED並排成複數線狀所構成者,本發明也可適用。 Further, in the above-described embodiment, a light-emitting tube having a rod shape as an example of a light source has been described as an example. However, the present invention is also applicable to a case where LEDs emitting ultraviolet rays are arranged in a plurality of lines.

1‧‧‧燈室(燈具) 1‧‧‧light room (lamps)

10‧‧‧光照射部 10‧‧‧Lighting Department

11‧‧‧棒狀燈管 11‧‧‧ rod-shaped tube

12‧‧‧反射鏡 12‧‧‧Mirror

20‧‧‧散熱器(冷卻機) 20‧‧‧ radiator (cooler)

30‧‧‧吹氣機(送風機) 30‧‧‧Blowing machine (air blower)

40‧‧‧間隔壁 40‧‧‧ partition wall

50‧‧‧通風路徑 50‧‧‧ ventilation path

60‧‧‧外壁 60‧‧‧ outer wall

70‧‧‧光射出口 70‧‧‧Light exit

80‧‧‧偏光元件單元 80‧‧‧Polarized element unit

81‧‧‧線柵偏光元件(偏光板) 81‧‧‧Wire grid polarizing element (polarizing plate)

82‧‧‧偏光板的保持框 82‧‧‧Position plate retaining frame

83‧‧‧遮光板 83‧‧ ‧ visor

90‧‧‧濾光器單元 90‧‧‧Filter unit

91‧‧‧濾光器板 91‧‧‧Filter plate

92‧‧‧濾光器板的保持框 92‧‧‧Retaining frame of the filter plate

93‧‧‧支持棒 93‧‧‧Support bar

G‧‧‧線柵 G‧‧‧ wire grid

R1‧‧‧輸送輥 R1‧‧‧ conveying roller

R2‧‧‧捲繞輥 R2‧‧‧ winding roller

W‧‧‧工件 W‧‧‧Workpiece

[圖1]揭示本發明第1實施例之偏光光線照射裝置的燈室(燈具)之概略構造的圖。 Fig. 1 is a view showing a schematic configuration of a lamp chamber (lamp) of a polarized light irradiation device according to a first embodiment of the present invention.

[圖2]揭示偏光元件單元之構造的圖。 FIG. 2 is a view showing the configuration of a polarizing element unit.

[圖3]揭示本發明第2實施例之偏光光線照射裝置的燈室(燈具)之概略構造的圖。 Fig. 3 is a view showing a schematic configuration of a lamp chamber (lamp) of a polarized light irradiation device according to a second embodiment of the present invention.

[圖4]揭示先前的偏光光線照射裝置之構造例的圖。 Fig. 4 is a view showing a configuration example of a conventional polarized light irradiation device.

1‧‧‧燈室(燈具) 1‧‧‧light room (lamps)

10‧‧‧光照射部 10‧‧‧Lighting Department

11‧‧‧棒狀燈管 11‧‧‧ rod-shaped tube

12‧‧‧反射鏡 12‧‧‧Mirror

20‧‧‧散熱器 20‧‧‧ radiator

30‧‧‧吹氣機 30‧‧‧Blowing machine

40‧‧‧間隔壁 40‧‧‧ partition wall

50‧‧‧通風路徑 50‧‧‧ ventilation path

60‧‧‧外壁 60‧‧‧ outer wall

70‧‧‧光射出口 70‧‧‧Light exit

80‧‧‧偏光元件單元 80‧‧‧Polarized element unit

81‧‧‧線柵偏光元件 81‧‧‧Wire grid polarizing element

82‧‧‧保持框 82‧‧‧ Keep box

G‧‧‧線柵 G‧‧‧ wire grid

W‧‧‧工件 W‧‧‧Workpiece

Claims (3)

一種偏光光線照射裝置,係具備線狀的光源、使來自該光源之光線偏光的偏光元件、及覆蓋前述光源,形成來自光源之光線通過之光射出口的外壁,其特徵為:前述偏光元件,係在透明基板上形成線柵的線柵偏光元件;前述線柵偏光元件,係於形成在前述外壁之光射出口,將形成線柵之面朝向光源側來配置。 A polarized light illuminating device comprising: a linear light source; a polarizing element that polarizes light from the light source; and an outer wall that covers the light source and forms a light exiting passage from the light source, wherein the polarizing element is A wire grid polarizing element is formed on a transparent substrate, and the wire grid polarizing element is disposed on a light exit port formed on the outer wall, and the surface on which the wire grid is formed faces the light source side. 如申請專利範圍第1項所記載之偏光光線照射裝置,其中,在前述線柵偏光元件與前述光源之間,設置有透射光線的濾光器。 The polarized light irradiation device according to claim 1, wherein a light transmitting filter is provided between the wire grid polarizing element and the light source. 如申請專利範圍第2項所記載之偏光光線照射裝置,其中,前述濾光器,係藉由通風路徑形成構件,在與前述線柵偏光元件之間隔開手指無法插入程度的間隔來設置。 The polarized light irradiation device according to claim 2, wherein the filter is provided by a ventilation path forming member at an interval spaced apart from the wire grid polarizing element by a finger.
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