JP5344598B2 - Substrate holding device, defect inspection device, and defect correction device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate holding device that can cope with defect inspection or defect correction for eighth or tenth generation glass substrate. <P>SOLUTION: The substrate holding device includes: a plurality of wire supporting mechanisms (3-6) including supporting wires (7-10) that are tensioned between a fixed end and a tension end and are extended along a first direction; a stage (30) that is movably connected with each of supporting wires of the wire supporting mechanisms in the first direction; a guide means (44) for guiding the stage in the first direction; and driving devices (51, 53) for moving the stage in the first direction. Each of supporting wires of the wire supporting mechanisms is tensioned parallel to each other in the same plane, and when a substrate is placed on the plurality of supporting wires, the stage is moved in the first direction while directly facing the rear face of the substrate placed on the supporting wires. Thus, the stage is moved in the first direction while directly facing the rear face of the substrate, so that various kinds of processing can be applied to the substrate without giving an influence of the supporting wires on the substrate. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a substrate holding apparatus suitable for holding various large substrates, and a defect inspection apparatus and defect correction apparatus using the substrate holding apparatus.

  In the manufacturing process of a color filter substrate or a TFT substrate, the presence or absence of defects such as protrusion defects is inspected during the manufacturing process, and defect correction processing is performed when a defect is detected. As defect inspection for various substrates, defect inspection by transmitted illumination and defect inspection by reflected illumination are performed. When performing inspection by transparent illumination, the substrate is placed on a transparent stage, irradiated with illumination light from the back side of the substrate, and the presence or absence of defects is inspected by an optical head placed on the surface side of the substrate. Further, when correcting the protrusion defect, the substrate to be processed is held by vacuum suction, and the defect correction process is performed from the surface side using a defect correction device.

  Mother glass used in the manufacture of color filter substrates and plasma display panels tends to increase in size year by year. The size of the 8th generation glass substrate is 2200 mm × 2500 mm, and the size of the 10th generation glass substrate is 2500 mm × 3000 mm. Therefore, with the increase in size of the glass substrate, how to hold the large substrate in the substrate inspection process and defect correction process has become an important issue. For example, it is practically difficult to manufacture a transparent stage that can handle a 10th generation glass substrate, and it is difficult to perform defect inspection and defect correction by placing a large substrate on a transparent stage. It cannot be dealt with.

  As a large substrate holding device, a method using lift pins is known (for example, see Patent Document 1). In this known substrate holding method, a number of lift pins that can be tilted are arranged on a surface plate, and the substrate is supported by a number of lift pins. When a defect is inspected by transmitted illumination, an illumination head is arranged on the back side of the substrate on which lift pins are arranged, and scanning from the back side is performed while tilting the lift pins by moving the illumination head.

As another method for holding a large workpiece, a method using a wire is known (for example, see Patent Document 2). In this wire support method, a plurality of wires are stretched on a plate frame, a workpiece is arranged on the plurality of wires, and illumination light is irradiated from below the wires toward the workpiece.
JP 2009-2928 A JP 2001-108629 A

  In the holding method in which a large glass substrate is supported using a large number of lift pins, the lift pins are tilted with the movement of the illumination head. Therefore, there is a risk that the glass substrate may be damaged due to friction generated between the lift pins and the glass surface. Further, when the glass substrate is damaged, dust is generated and the processing space is contaminated. Further, in order to manufacture a large number of tiltable lift pins, a large cost is required, and the manufacturing cost of the substrate holding device is high. Further, it has been pointed out that there is a disadvantage that undesired noise and vibration are generated when the lift pin falls.

  The method of holding the workpiece with the wire has an advantage that the manufacturing cost is low. However, since illumination light is incident from below the wire when performing transmission illumination, the illumination light is shielded by the wire, and there is a drawback that uniform illumination cannot be performed over the entire surface of the workpiece. As described above, when the illumination light is shielded by the wire, there arises a problem that the inspection accuracy in the defect inspection is lowered.

  An object of the present invention is to realize a substrate holding apparatus, a defect inspection apparatus, and a defect correction apparatus that can cope with defect inspection and defect correction for a large transparent substrate, particularly a glass substrate of the eighth generation or later.

A substrate holding device according to the present invention is a substrate holding device for supporting a substrate by a plurality of support wires stretched in parallel to each other in the same plane,
A plurality of wire support mechanisms including a support wire stretched between the fixed end and the tension end and extending along the first direction;
A moving stage movably coupled to the support wire of the wire support mechanism along the first direction;
Guide means for guiding the moving stage in a first direction;
A driving device for moving the moving stage along a first direction;
The moving stage moves along the first direction while partially displacing the support wire downward,
When the substrate is placed on the plurality of support wires, the moving stage moves relative to the substrate while directly facing the back surface of the substrate placed on the support wire.

  In the present invention, the substrate is held by using a plurality of support wires extending in parallel to each other in a plane. With respect to the size of the glass substrate that can be held, if the number of support wires is increased, a considerably large glass substrate can be held. Therefore, a substrate holding apparatus suitable for holding glass substrates of 8th generation and 10th generation is realized. Furthermore, in the present invention, since the movable stage is connected to the support wire so as to be movable in the first direction and moves while directly responding from the back side of the glass substrate, an illumination light source or a vacuum suction device is provided on the movable stage. By mounting various devices such as the above, it is possible to perform various treatments on the glass substrate without being affected by the support wire.

A defect inspection apparatus according to the present invention includes a plurality of support wires that are stretched between a fixed end and a tension end and extend in parallel with each other along a first direction, and on which a substrate is placed.
The support wire is movably connected along the first direction, and moves with respect to the substrate placed on the support wire while directly facing the back surface thereof. A moving stage that projects linear illumination light extending in a second direction orthogonal to the direction;
Guide means for guiding the moving stage along a first direction;
A stage drive mechanism for moving the moving stage in a first direction;
An optical head that is disposed on the opposite side of the stage across the substrate placed on a support wire and receives transmitted light that has exited from the stage and transmitted through the substrate;
An optical head moving mechanism for moving the optical head in synchronization with the movement of the stage;
And a signal processing device for detecting a defect based on an output signal from the optical head.

  In the defect inspection apparatus according to the present invention, line-shaped illumination light is projected from the lower side of a glass substrate placed on a plurality of support wires, and is emitted from the glass substrate by an optical head arranged on the upper side with the support wires interposed therebetween. Since the transmitted light is received, it is possible to inspect the entire surface of the large glass substrate only by scanning the moving stage and the optical head in the first direction in synchronization. As a result, the defect inspection can be performed in a short time on the 8th generation or 10th generation large glass substrates.

A defect correcting device according to the present invention includes a plurality of support wires that are stretched between a fixed end and a tension end and extend in parallel with each other along a first direction, and on which a substrate is placed,
A movable stage that is movably coupled to the support wire in the first direction and moves while facing the back surface of the substrate placed on the support wire;
Guide means for guiding the moving stage along a first direction;
A stage drive mechanism for moving the moving stage in a first direction;
A defect correcting device that is disposed on the opposite side of the stage across the substrate placed on a support wire, and corrects a protrusion defect existing on the substrate surface;
A defect correction device moving mechanism for positioning the defect correction device almost directly above the defect based on defect address information;
The moving stage has a vacuum suction means for fixing the substrate placed on the support wire, and moves to the address position of the defect along the first direction when correcting the protrusion defect. And a defect correction process is performed on the vacuum-adsorbed substrate.

  In the present invention, since the substrate is supported by a plurality of support wires extending in parallel with each other in a plane, it is possible to support an 8th generation or 10th generation large glass substrate. Furthermore, in the present invention, since there is a moving stage that moves relative to the lower side of the substrate placed on the support wire while directly facing the substrate, various devices such as an illumination light source and a vacuum suction device are mounted on the moving stage. It is possible to perform defect inspection and various kinds of processing on the substrate placed on the support wire without being affected by the support wire.

It is a diagrammatic plan view showing an example of a substrate holding device according to the present invention. 1 is a diagrammatic side view of a substrate holding device according to the present invention. It is the side view seen from the back of the substrate holding device shown in FIG.1 and FIG.2. It is a figure which shows an example of a movement stage and a pulley mechanism. It is a figure which shows an example of the test | inspection apparatus by this invention. It is a figure which shows an example of the defect correction apparatus by this invention.

  1 to 3 are views showing an example of a substrate holding device according to the present invention. FIG. 1 is a diagrammatic plan view seen from above, and FIG. 2 is a diagram seen from the side of the substrate holding device of FIG. FIG. 3 is a schematic side view of the substrate holding device of FIG. 1 as viewed from the rear. 2A is a diagrammatic side view taken along line II-II in FIG. 1, and FIG. 2B is a diagrammatic side view taken along line III-III. FIG. 3 shows the wire support mechanism with the components on the tension end side removed, and mainly shows the arrangement of the moving stage and the guide member. As shown in FIGS. 2 and 3, the substrate holding apparatus according to the present invention has a gantry 1, and the base 2 is arranged on the gantry 1 through a vibration isolating member. Various members are arranged on the base 2. On the base 2, the 1st-4th wire support mechanisms 3-6 by which a glass substrate is mounted are provided. In this example, four sets of wire support mechanisms are used for the sake of clarity, but the glass substrate can be supported using a number of wire support mechanisms such as eight or ten sets. Each of the wire support mechanisms 3 to 6 has support wires 7 to 10, and the glass substrate 11 is placed on the four support wires. The support wires 7 to 10 are stretched so as to be parallel to each other in the same plane. Since the first to fourth wire support mechanisms have the same structure, the first wire support mechanism 3 shown in FIG. 2A will be described.

  One end of the support wire 7 is fixed to the fixed shaft 21 via the pulley 20 to be a fixed end. The pulley 20 and the fixed shaft 21 are fixed to a support plate 22, and the support plate 22 is fixed to the base 2. The other end of the support wire 7 is connected to the spring 25 via the pulley 23 and the connection bar 24, and the other end of the spring 25 is fixed to the support plate 26. The support plate 26 is fixed to the base 2. The support wire 7 is maintained in a state where a predetermined tension is applied by the tension of the spring 25. Each pulley has a circumferential groove, and each support wire is held in the circumferential groove. Accordingly, the support wire 7 is stretched so that a predetermined tension acts between the fixed end and the tension end on which the tension acts, and extends substantially in parallel in a plane that supports the glass substrate 11. The other support wires 8 to 10 are stretched by the same structure, and the four support wires 7 to 10 extend in parallel to each other in a plane that supports the substrate. Here, let the extending direction of a support wire be a 1st direction.

  The moving stage 30 is connected to the four support wires 7 to 10 so as to be movable along the first direction. The moving stage 30 has a base member 31 that extends in a second direction orthogonal to the first direction. The base member 31 is mounted with an illumination light source, a surface plate, or the like according to the purpose of inspection, and is formed into an appropriate shape according to the purpose of inspection or the member to be mounted. The base member 31 is provided with first to fourth pulley mechanisms 32 to 35 that are respectively connected to the support wires 7 to 10. Each pulley mechanism functions to translate the moving stage in the first direction along the support wire. Since the four pulley mechanisms have the same structure, only the first pulley mechanism 32 will be described, and description of the other pulley mechanisms will be omitted.

  4 is a view showing an example of a pulley mechanism provided on the moving stage 30, FIG. 4B is a side view showing one support plate 40a removed, and FIG. 4B is a diagrammatic side view seen from the rear. . The pulley mechanism has a pair of support plates 40a and 40b fixed to the base member 31, and four pulleys 41a to 41d are rotatably connected to these support plates. The two pulleys 41a and 41b located on the upper side are located at the same height in the horizontal direction and are separated in the first direction. The remaining two pulleys 41c and 41d are located on the lower side, located at the same height in the horizontal direction, and separated in the first direction. Each pulley is formed with a substantially semicircular groove into which the support wire is inserted, and the support wire is held in the groove of the pulley.

  The two support plates 40a and 40b are fixed to the bottom plate 42 while being separated from each other in a second direction orthogonal to the first direction. Two sliders 43 a and 43 b are attached to the bottom plate 42. These sliders 43 a and 43 b are engaged with a guide rail 44 disposed on the base member 2 of the gantry 1. That is, four guide rails 44 to 47 extending in parallel with each other along the first direction are arranged on the base 2 on the gantry side. The first pulley mechanism 32 is connected to the guide rail 44 through the sliders 43a and 43b so as to be movable in the first direction. The second to fourth pulley mechanisms 33 to 35 are also movably connected to the guide rails 45 to 47 via a slider. Accordingly, the moving stage 30 is connected to the four guide rails 44 to 47 provided on the base 2 through the four pulley mechanisms 32 to 35 so as to be movable in the first direction. .

  In this example, a line-shaped illumination light source 48 is mounted on the base member 31 of the moving stage 30, and transmitted illumination is performed on the glass substrate 11 from below. As the illumination light source 48, a linear illumination light source in which a plurality of LEDs are arranged in a line along a second direction orthogonal to the first direction that is the moving direction of the moving stage 30 is used. In this case, the line-shaped light beam emitted from the illumination light source 48 is converted into line-shaped illumination light having a substantially uniform luminance distribution via the diffusion plate 49 and is directly incident on the back surface of the glass substrate 11. That is, since the moving stage directly faces the glass substrate, the illumination light emitted from the illumination light source 48 is directly incident on the glass substrate without being blocked by the support wire. In this example, an LED array is used as an illumination light source, but a light source device in which various light sources such as a halogen lamp and a xenon lamp are arranged in a line can be used. Furthermore, it is also possible to use a light source that emits linear illumination light such as a fluorescent lamp. In particular, a fluorescent lamp is suitable as a light source device because it emits illumination light having a substantially uniform brightness in the longitudinal direction. It is also possible to arrange a light-shielding mask having a slit-shaped opening on the front surface of the illumination light source 48 and project line-shaped illumination light toward the substrate to be inspected.

  Next, the relative movement of the moving stage 30 with respect to the support wire 7 and the glass substrate 11 will be described with reference to FIG. The stage 30 is assumed to move in the direction of arrow a. In FIG. 4, attention is focused on the portion of the support wire located on the right side of the second pulley 41b. With the relative movement of the stage 30 with respect to the support wire 7, the support wire approaches the second pulley 41b, and the pulley 41b changes its direction by an angle of 90 ° and is displaced downward. Subsequently, it contacts the fourth pulley 41d, changes direction by 90 °, and moves relative to the horizontal direction. Subsequently, it contacts the third pulley 41c, changes its direction by 90 ° and is displaced upward. Subsequently, it comes into contact with the first pulley 41a, changes its direction by 90 ° and moves relatively in the horizontal direction.

  As described above, as the moving stage 30 moves, the support wire 7 is partially displaced toward the lower side of the moving stage 30, moves below the base member 31 in the horizontal direction, and then toward the upper side. Displace. As a result, even if the moving stage moves, the base member 31 and the various members and devices mounted on the base member always face the glass substrate 11 directly, and illumination light and the like are not blocked by the support wire. Furthermore, even if a part of the support wire is displaced downward as the stage moves, the length of contact with the glass substrate of the support wire increases by the length displaced downward. Even so, the glass substrate is always supported by a support wire having a fixed length. Therefore, even if the stage moves, the holding state of the glass substrate held on the support wire does not change. Further, when the moving stage is moved, the contact relationship between the glass substrate 11 and the support wire 7 is such that the support wire is displaced downward at the portion where the glass substrate and the support wire are in contact. Moreover, the part of the support wire in a non-contact state is only pushed up sequentially from the lower side. Therefore, there is no friction between the glass substrate and the support wire due to the contact and release of the support wire and the glass substrate.

  Next, the moving mechanism of the moving stage 30 will be described. This will be described with reference to FIGS. 1, 2B and 3. FIG. A drive belt 51 is attached to the base member 31 of the stage 30. The movement of the drive belt 51 causes the stage to reciprocate along the first direction. As shown in FIGS. 1 and 2B, the drive belt 51 is stretched between a rotary pulley 52 and a rotary shaft 54 of a motor 53. The rotating pulley 52 is rotatably mounted between the two support plates 55 a and 55 b via a rotation shaft, and the support plates 55 a and 55 b are fixed to the base 2. The motor 53 is fixed to the base 2 via a support member. Further, an encoder (not shown) is connected to the motor 53, and the position of the moving stage 30 in the first direction is detected by the encoder. The output from the encoder is supplied to a control circuit (not shown).

  Referring to FIG. 2B, when the motor 53 is rotationally driven so as to pull the drive belt 51 positioned on the upper side in the right direction, the moving stage 30 travels on the guide rails 44 to 47 in the right direction via the slider. . Further, when the motor 53 is driven to rotate so as to pull the drive belt positioned on the lower side in the right direction, the moving stage 30 travels in the left direction. At this time, the support wire 7 is only displaced locally, and the length for supporting the glass substrate is always kept constant, so that the moving stage 30 is not affected by the holding state of the glass substrate. It can reciprocate along the direction.

  Next, an inspection apparatus using the substrate holding apparatus according to the present invention will be described. 5A and 5B are diagrams showing an example of an inspection apparatus according to the present invention. FIG. 5A is a schematic plan view, and FIG. 5B is a schematic side view as viewed from the rear (first direction). It is. In addition, the same code | symbol is attached | subjected and demonstrated about the component same as the member used in FIGS. 1-4. In this example, a line-shaped illumination beam is projected from the lower side of the glass substrate 11 to be inspected, and the transmitted light transmitted through the substrate 11 is received by the inspection head arranged on the upper side of the glass substrate 11 so as to prevent foreign matter or the like on the glass substrate 11. An example of performing inspection will be described. The glass substrate 11 is placed on the four support wires 7 to 10. At this time, the glass substrate can be placed on the support wire by inserting the handler holding the glass substrate between the wire support mechanisms.

  The moving stage 30 uses a stage having the structure shown in FIG. That is, the linear illumination light source 48 in which a plurality of LEDs are arranged along the second direction on the support substrate is mounted on the support member 31 that extends in a direction orthogonal to the extending direction of the support wire. The line illumination light source 48 emits a line illumination beam extending in a second direction orthogonal to the extending direction of the support wire. A diffusion plate 49 is disposed above the illumination light source 48. Therefore, a linear illumination beam with substantially uniform luminance is incident on the back surface of the glass substrate 11. A light shielding mask having a line-shaped opening may be disposed between the illumination light source 48 and the diffusion plate 49 or on the upper side of the diffusion plate. In addition, a cylindrical lens having a focusing property in the first direction can be arranged.

  An inspection head 61 supported by a gantry structure 60 is arranged on the upper side of the glass substrate 11. Linear motors 62 a and 62 b and guide rails 63 a and 63 b extending in the first direction are arranged on the sides on both sides of the base 2 so as to correspond to the gantry structure 60. The gantry structure 60 is reciprocated along the first direction by the linear motors 62a and 62b while being guided by the two guide rails 63a and 63b. The inspection head 61 has a line sensor array 64 arranged in the second direction, and receives the transmitted light emitted from the line-shaped illumination light source 48 and transmitted through the glass substrate 11 by the line sensor array 64.

  In defect inspection, the moving stage 30 and the inspection head 61 located on the lower side of the glass substrate 11 are moved in the first direction in synchronization. Due to the synchronous movement of the stage and the inspection head, the entire surface of the glass substrate 11 is scanned with illumination light. When a defect such as a foreign substance defect exists on the glass substrate 11, the amount of light received by each light receiving element of the line sensor array decreases from a specified value. Therefore, an output signal from each light receiving element of the line sensor array is supplied to the signal processing device, and a defect existing in the glass substrate is detected by comparing the output signal with a threshold value. Therefore, during this scanning, the output signal from each light receiving element of the line sensor array is compared with a threshold value, and if an output signal lower than the threshold value is generated, a defect detection signal is generated. At the same time, address information in the first direction (X direction) of the gantry structure and address information in the second direction (Y direction), which is position information of the light receiving elements of the line sensor, are output. As a result, the defect and its address information can be output. The inspection apparatus can inspect the entire surface of the large glass substrate only by scanning the moving stage 30 and the detection head 61 in one direction in synchronization.

  Next, the defect correction apparatus according to the present invention will be described. 6A and 6B are diagrams showing a defect correcting apparatus having a substrate holding apparatus according to the present invention. FIG. 6A is a schematic plan view, and FIG. 6B is a line showing the relationship between the moving stage and the correcting head. FIG. In addition, the same code | symbol is attached | subjected and demonstrated to the component same as the member used in FIGS. For example, in a color filter substrate, a defect correcting device that removes or corrects a protrusion defect existing on the surface of the substrate using an abrasive tape has been put into practical use. In this example, a defect correcting apparatus suitable for correcting a protrusion defect existing on the surface of a color filter substrate will be described. The substrate 11 to be defect-corrected is placed on the four support wires 7 to 10 by the handler. The gantry structure 60 is equipped with a correction head 70 that corrects the protrusion defect. The correction head 70 is connected to a drive mechanism (not shown) such as a ball screw, and is mounted so as to be movable in the Y direction perpendicular to the X direction, which is the extending direction of the support wires 7 to 10. The gantry structure 60 can be freely moved in the X direction by linear motors 62a and 62b and guide rails 63a and 63b. In addition, a linear encoder (not shown) is arranged along the guide rail to detect the position of the gantry structure in the X direction and output it to the controller. Accordingly, the correction head 70 can move in the X and Y directions based on the defect address information detected by the defect inspection apparatus, and can be positioned immediately above the defect.

  When correcting the protrusion defect, address information in the X direction of the defect is supplied from the controller to the driving device of the gantry structure 60, and address information in the Y direction is supplied to the driving device that drives the correction head. Further, address information in the X direction of the defect is supplied to the driving means for driving the moving stage 30. As a result, as shown in FIG. 6B, the moving stage 30 and the correction head 70 are positioned so as to face each other across the substrate 11.

  As shown in FIG. 6B, the correction head 70 has an optical head 71 and a tape polishing head 72. The defect can be observed by the optical head 71 and the height of the defect can be measured. Further, the protrusion defect can be removed or corrected by the tape polishing head 72. Further, the correction head 70 has a Z-axis direction drive mechanism (not shown), and can lower the polishing head in the Z-axis direction.

  The moving stage 30 has a vacuum suction means mounted on the base member 31. That is, the surface plate 80 in which an air flow path is formed in the base member 31 is disposed. The inlet of the surface plate 80 is connected to a switching valve 82 via a pipe 81, and the switching valve 82 is connected to a negative pressure pump 83 and a positive pressure pump 84. When the moving stage 30 moves to the defective address position, the negative pressure pump 83 is activated. The substrate 11 is vacuum-sucked on the surface plate 80 by negative pressure, and the substrate 11 is fixed on the surface plate 80. While the substrate 11 is vacuum-held on the surface plate, a predetermined correction process is performed on the substrate by the correction head 70.

  Defect correction processing will be described. When the operator specifies a defect detected earlier or inputs defect address information, the gantry structure 60 moves in the Y direction based on the defect address information, and the correction head 70 moves in the X direction. The optical head 71 is located immediately above the defect. At the same time, the moving stage 30 moves in the X direction and is located immediately below the defect position of the substrate. Subsequently, the negative pressure pump 83 is operated, the substrate 11 is vacuum-sucked by the surface plate 80, and the substrate is kept stationary. In a state where the substrate is held on the surface plate, the operator optically observes the defect with the optical head 71 and examines whether correction is necessary. Further, the height of the defect is detected using an optical head.

  If it is determined that a defect needs to be corrected, the correction head 70 moves so that the tape polishing head 72 is positioned directly above the defect. For example, as the correction process, the correction head 70 is lowered by a distance corresponding to the height of the projection defect, for example, and the polishing tape is run during that time. Then, the protrusion defect can be polished and removed by the traveling polishing tape. When the correction process is completed, the operation of the negative pressure pump 83 is stopped and the vacuum suction is released. Subsequently, the positive pressure pump 84 is operated to supply an air flow between the surface plate 80 and the substrate 11 so that the substrate is locally levitated. Then, the moving stage 30 can be moved relative to the substrate while the substrate is locally levitated to move to the address position of the next defect. It is also possible to move the moving stage 30 to the defective address position without operating the positive pressure pump 84.

  The present invention is not limited to the above-described embodiments, and various modifications and changes can be made. For example, in the above-described embodiments, the illumination light source and the vacuum suction device are exemplified as the devices mounted on the moving stage, but various devices and means can be mounted according to the purpose.

DESCRIPTION OF SYMBOLS 1 Base 2 Base 3-6 Wire support mechanism 7-10 Support wire 11 Board | substrate 20 Pulley 30 Moving stage 31 Base member 32-35 Pulley mechanism 41a-41d Pulley 43a, 43b Slider 44 Guide rail

Claims (10)

A substrate holding device for supporting a substrate by a plurality of support wires stretched in parallel to each other in the same plane,
A plurality of wire support mechanisms including a support wire stretched between the fixed end and the tension end and extending along the first direction;
A moving stage movably coupled to the support wire of the wire support mechanism along the first direction;
Guide means for guiding the moving stage in a first direction;
A driving device for moving the moving stage along a first direction;
The moving stage moves along the first direction while partially displacing the support wire downward,
When the substrate is placed on the plurality of support wires, the moving stage moves relative to the substrate while directly facing the back surface of the substrate placed on the support wire. apparatus. The substrate holding apparatus according to claim 1, wherein the moving stage is provided for each support wire, fixed to the base member, extending in a second direction orthogonal to the first direction, and the base member. A plurality of pulley mechanisms,
The pulley mechanism includes a plurality of pulleys including a corresponding support wire and positioned in a plane orthogonal to the base member, and a groove that engages with the support wire is formed on the outer peripheral surface of each pulley. A substrate holding device. 3. The substrate holding apparatus according to claim 2, wherein each pulley mechanism includes a first pulley and a second pulley positioned above the moving stage and spaced apart in a first direction, and a third and a second pulley positioned below the moving stage. A fourth pulley,
When the moving stage moves in the first direction, the support wire is arranged in the order of the first pulley located on the upper side, the third and fourth pulleys located on the lower side, and the second pulley located on the upper side. The substrate holding device is characterized in that it moves relative to the moving stage.   4. The substrate holding apparatus according to claim 1, wherein the base member is provided with a light source device that emits a linear light beam extending in the second direction, and a moving stage. A substrate holding device characterized by directly scanning a back surface of a substrate placed on a support wire with a line-shaped light beam in accordance with the movement of the substrate.   4. The substrate holding apparatus according to claim 1, wherein a vacuum suction device connected to a negative pressure pump and a positive pressure pump via a switching valve is mounted on and supported by the base member. A substrate holding apparatus characterized in that when processing a substrate placed on a wire, the substrate is fixed by vacuum suction. A plurality of support wires that are stretched between the fixed end and the tension end and extend in parallel with each other along the first direction, and on which the substrate is placed;
The support wire is movably connected along the first direction, and moves with respect to the substrate placed on the support wire while directly facing the back surface thereof. A moving stage that projects linear illumination light extending in a second direction orthogonal to the direction;
Guide means for guiding the moving stage along a first direction;
A stage drive mechanism for moving the moving stage in a first direction;
An optical head disposed on the opposite side of the moving stage across the substrate placed on a support wire, and receiving transmitted light that has exited from the moving stage and passed through the substrate;
An optical head moving mechanism for moving the optical head in synchronization with the movement of the moving stage;
A defect inspection apparatus comprising: a signal processing apparatus that performs defect detection based on an output signal from an optical head.   7. The defect inspection apparatus according to claim 6, wherein the optical head includes a line sensor in which a plurality of light receiving elements are arranged along the second direction, and the signal processing apparatus outputs an output signal from the line sensor. A defect inspection apparatus for performing defect determination by comparing a signal with a reference signal.   The defect inspection apparatus according to claim 6 or 7, wherein a position detection device that detects a position of the stage in the first direction is provided, and position information output from the position detection device is supplied to the signal processing device, The signal processing device uses the position information output from the position detection device as the address in the first direction as the address information of the detected defect, and the array information of the light receiving elements of the line sensor as the address in the second direction. A defect inspection apparatus characterized by being used. A plurality of support wires that are stretched between the fixed end and the tension end and extend in parallel with each other along the first direction, and on which the substrate is placed;
A movable stage that is movably coupled to the support wire in the first direction and moves while facing the back surface of the substrate placed on the support wire;
Guide means for guiding the moving stage along a first direction;
A stage driving mechanism for moving the moving stage in the first direction;
A defect correcting device that is disposed on the opposite side of the stage across the substrate placed on a support wire, and corrects a protrusion defect existing on the substrate surface;
A defect correction device moving mechanism for positioning the defect correction device almost directly above the defect based on defect address information;
The moving stage has a vacuum suction means for fixing the substrate placed on the support wire, and moves to the address position of the defect along the first direction when correcting the protrusion defect. A defect correction apparatus, wherein a defect correction process is performed on a vacuum-adsorbed substrate.   The defect correction apparatus according to claim 9, wherein the defect correction apparatus includes a tape polishing apparatus that polishes and corrects defects using a traveling polishing tape, and a tape polishing process in a state where the substrate is vacuum-adsorbed on a moving stage. A defect correcting device characterized in that is performed.

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