TW201623948A - Particle detection apparatus and metal mask detection apparatus - Google Patents

Abstract

A particle detection apparatus and a metal mask detection apparatus are disclosed. The particle detection apparatus comprises a detection light source and an image detector. The detection light source has a first light source and a second light source, respectively providing a first ribbon beam and a second ribbon beam incident to a surface of a metal. The image detector has a lens and a linear image sensor. The lens has a light axis perpendicular to the surface of the metal and receives focuses the light there from onto the linear image sensor. Long axis's of the first and second ribbon beam is along a first direction and the line image sensor is also along the first direction. The first ribbon beam is incident to a detected region at an incident angle, higher than or equal to 45-degrees and lower than 90-degrees. The first light source and the second light source are bilateral symmetry and so the incident angle of the second ribbon beam is equal to that of the first ribbon beam. The surface of the metal has a plural hairlines thereon.

Description

Impurity particle detecting device and metal mask detecting device

The present invention relates to an impurity particle detecting device and a metal mask detecting device, and more particularly to an impurity particle detecting device and a metal mask detecting device for detecting a metal surface having a grain.

Organic light-emitting diode (OLED) display technology has the advantages of low operating voltage, thin thickness, active illumination, full color without backlight, no viewing angle limitation, high response speed, and easy fabrication. Therefore, OLED displays have become a next-generation display technology with considerable development potential. With consumers' expectations for high image quality of electronic products, the image resolution of OLED displays must be developed toward high pixels (SVGA, XGA, SXGA...), and metal masks in OLED repeated evaporation processes (Metal Mask) Inevitably, high-precision dimensional tolerance requirements must also be met.

The main function of metal masks in OLED displays is to provide masks for high resolution vapor deposition mass production processes of different color luminescent films. If there are impurity particles on the metal mask for vapor deposition, the precision of each organic light-emitting layer will be seriously affected, thereby affecting the uniformity of the image quality of the OLED display (uneven Mura or Moire).

However, during the evaporation process, the organic material may adhere to the metal mask, for example, to the surface of the metal mask, or may be partially or completely blocked in the opening. This causes the evaporation accuracy of the subsequent evaporation process to be significantly reduced. Furthermore, the metal mask is not easy to prepare and costly, so the metal mask is not only used in one evaporation process, but is continuously reused in a plurality of vapor deposition processes. Also, between each evaporation process, the metal mask must be transported back and forth to the equipment chamber where the evaporation process is to be performed. Therefore, the metal mask is inevitably contaminated, such as organic materials that have been adhered to the previous evaporation process or adhered to the metal due to the handling process. Impurity particles such as fibers, dirt, and dust on the mask.

In summary, in order to maintain the vapor deposition precision, after completing an evaporation process, it is necessary to clean the metal mask and confirm that the impurity particles attached thereto have been reliably removed.

The present invention provides an impurity particle detecting device and a metal mask detecting device which can detect impurity particles on a metal surface to confirm whether the metal surface is clean.

In one embodiment of the present invention, the present invention provides an impurity particle detecting device for detecting foreign particles of a metal surface of a level. The impurity particle detecting device includes a detecting light source and an image sensor. The detecting light source has a first light source and a second light source to respectively provide a first strip beam and a second strip beam to the metal surface. The image sensor has a lens and a strip-shaped sensing member for receiving light from the metal surface to focus on the strip-shaped sensing member and one of the optical axes of the lens is perpendicular to the metal surface. The long axis of the first strip beam and the second strip beam is a front-rear direction, and one of the long-axis directions of the strip-shaped sensing elements is a front-rear direction, and the first strip-shaped beam is incident on the metal surface at a first incident angle. In the detection area, the first incident angle is an angle greater than or equal to 45 degrees and less than 90 degrees, and the second illumination source is bilaterally symmetric with the first illumination source, so that the second ribbon beam is incident on a second incident angle of the metal surface. The angle is the same as the angle of the first angle of incidence, and the metal surface has a plurality of stripe paths in the left and right direction.

In another embodiment of the present invention, the present invention provides a metal mask detecting apparatus comprising a machine table, a socket and an impurity particle detecting device. The machine base has a conveying device and a frame body. The frame system is arranged above the conveying device. The conveying device has a rectangular one seat for fixing a frame having a rectangle, so that the frame can be first with respect to the frame body. The horizontal axial displacement, wherein the placement seat has a frame with at least one metal mask attached thereto, and the metal surface has a plurality of stripe paths in the same direction. When the frame is fixed to the placement seat, the plurality of stripe paths are in the left-right direction. The socket is disposed on the frame body and is axially displaceable relative to the frame body in a second horizontal direction, and the second horizontal axis is perpendicular to the first horizontal axis. The impurity particle detecting device is disposed on the socket and vertically displaceable relative to the socket, and the impurity particle detecting device comprises a first arc groove, a first light source, a second arc groove, a second light source and a An image sensor, the first illumination source, is movably disposed in the first arcuate groove for providing a first strip beam of all the lines of the first first arcuate slot to be incident on one of the detection regions of the metal mask And the first curved slot is an arc groove with the detection zone as an axis, and the second The arcuate groove is opposite to the center point of the detection zone by the first arcuate groove, the mirror is horizontally symmetrical, and the second illumination source is movably disposed in the second arcuate groove for providing a vertical second One of the lines of the arcuate groove is a second strip beam, and the second strip beam is incident on the detection zone.

The above described features and advantages of the invention will be apparent from the following description.

1‧‧‧ Impurity particle detection device

4‧‧‧ machine

5‧‧‧Transfer device

6‧‧‧ ‧ body

7‧‧‧Frame

8‧‧‧Metal mask

9‧‧‧ socket

10‧‧‧Detection light source

16‧‧‧Metal surface

16a‧‧‧Detection area

20‧‧‧Image Sensor

22‧‧‧ lens

23‧‧‧ optical axis

24‧‧‧ Thermal Module

30‧‧‧ Four-axis fine tuning seat

31‧‧‧Clamping seat

32‧‧‧Vertical platform

33‧‧‧Rotary shaft seat

34‧‧‧Spinning base

35‧‧‧L base

36‧‧‧First Rotary Table

51‧‧‧Places

52‧‧‧Place wheel

53‧‧‧ pneumatic cylinder

54‧‧‧rails

55‧‧‧Seat

56‧‧‧Track platform

57‧‧‧Magnetic rail

61‧‧‧rails

100‧‧‧First support platform

101‧‧‧ Slider

102‧‧‧ Slider platform

122‧‧‧First light source

123‧‧‧Belt beam

124‧‧‧Motor

126‧‧‧First drive mechanism

128‧‧‧First curved slot

142‧‧‧second source of illumination

143‧‧‧Belt beam

144‧‧‧Motor

146‧‧‧Second drive mechanism

148‧‧‧Second curved groove

161‧‧‧ openings

163‧‧‧ Beam

165‧‧‧ lines

166‧‧‧Support frame

200‧‧‧second support platform

201‧‧‧Slide rails

202‧‧‧Motor

221‧‧‧Lighting mouth

261‧‧‧L-type platform

262‧‧‧ Slider

263‧‧‧ Track

264‧‧‧Track platform

265‧‧‧Motor seat

266‧‧‧ Gears

268‧‧‧Clamping parts

281‧‧‧Shade slider

282‧‧‧Shaped rails

283‧‧‧ curved platform

284‧‧‧Shaped rack

311, 312‧‧‧ holding holes

315‧‧‧ rotating block

316‧‧‧Rotating plate

319‧‧‧ square frame

321‧‧‧Vertical rails

322‧‧‧ vertical slider

323‧‧‧ vertical adjustment block

324‧‧‧ screws

328‧‧‧Perforation

329‧‧‧ vertical frame

331‧‧‧ screws

332‧‧‧ rotating block

333‧‧‧Rotating recess

334, 335‧‧‧ screws

336‧‧‧ Groove

337, 338‧‧ ‧ body blocks

339‧‧‧Rotating frame

341, 342‧‧‧ rotating blocks

343, 344‧‧‧ screws

349‧‧‧Rotary table

361, 362‧‧‧ screws

363, 364‧‧ ‧ bumps

365‧‧‧ notch

371, 372, 373, 374‧‧‧ arc-shaped screw holes

381, 382‧‧‧ clamping plate

391‧‧‧ surface

a, c, d‧‧‧ axis direction

b‧‧‧Vertical direction

θ 1‧‧‧ incident angle

θ 2‧‧‧ incident angle

The first figure is a schematic perspective view of an impurity particle detecting device according to a preferred embodiment of the present invention.

The second figure is an exploded perspective view of an impurity particle detecting device according to a preferred embodiment of the present invention.

The third figure is an exploded view of a detection light source in accordance with a preferred embodiment of the present invention.

The fourth figure is an exploded view of another perspective of the detection light source shown in the third figure.

Figure 5 is an exploded view of a four-axis fine adjustment seat in accordance with a preferred embodiment of the present invention.

The sixth figure is an exploded view of another perspective of the four-axis fine adjustment seat shown in the fifth figure.

The seventh drawing is a front view of the operation of the impurity particle detecting device.

The eighth drawing is a photograph taken by the impurity particle detecting device of the present invention.

Figure 9 is a perspective view showing the structure of a metal mask detecting device in accordance with a preferred embodiment of the present invention.

Figure 11 is a perspective view of a three-dimensional structure of a placement base in accordance with a preferred embodiment of the present invention.

1 to 3 are a view showing a preferred embodiment of the adhesive mechanism of the present invention. Referring to the first drawing, a perspective view of the impurity particle detecting device according to a preferred embodiment of the present invention is shown. The impurity particle detecting device is for detecting the presence or absence of foreign particles on a metal surface. The impurity particle detecting device includes a detecting light source 10 and an image sensor 20. In this embodiment, the detecting light source 10 includes a first light source 122 and a second light source 142; in practical applications, only a single light source may be used as the detecting light source. The first illumination source 122 and the second illumination source 142 are bilaterally symmetric to provide a symmetrical strip beam 123, 143 to a detection zone 16a of the horizontally placed metal surface 16. That is, the strip beams 123, 143 are the same in size and incident on the detection region 16a. The angles are equal but the opposite is true. The metal surface can be the surface of any metallic material, the surface of which is substantially a flat surface, such as the surface of a metal mask used in an OLED process. The angle of incidence is between an angle of greater than or equal to 45 degrees and less than 90 degrees, preferably greater than or equal to 60 degrees and equal to less than 80 degrees. In the present embodiment, the strip beams 123 and 143 are long and narrow, and the left and right narrow beams are incident on the detection region 16a of the metal surface 16, and the irradiation region is still long and narrow, and the left and right are narrow.

Please also refer to the second figure, which is an exploded perspective view of the impurity particle detecting device according to a preferred embodiment of the present invention. The detecting light source 10 and the image sensor 20 are both disposed on a first supporting platform 100. The image sensor 20 includes a strip of sensing elements (not shown) and a lens 22 that is vertically fixed to the first support platform 100. The first support platform 100 preferably has an inverted Y shape. The first illumination source 122 and the second illumination source 142 of the detection light source 10 are respectively disposed on the two side brackets of the inverted Y-shaped first support platform 100, and the image sensor 20 is disposed on the first support platform of the inverted Y shape. 100 on the center bracket. Compared with the square support platform, the inverted Y shape of the first support platform 100 can reduce the overall weight, and the grooves on the left and right sides and below can also reduce the possibility of the impurity particle detecting device colliding with the surrounding components during position adjustment. . The strip-shaped sensing member may be a photosensitive element such as a CCD or a CMOS, and its long-axis direction is a front-rear direction, which is parallel to the direction of the strip-shaped light beams 123 and 143, and is detected by the area irradiated by the strip-shaped light beams 123 and 143. In order to assist the heat dissipation of the strip-shaped sensing component, a heat-dissipating module 24 is fixed on the measuring edge of the strip-shaped sensing component above the image sensor 20, so that the temperature of the strip-shaped sensing component during operation is Controlling an operable temperature range to avoid excessive temperatures, causing excessive noise in the strip-shaped sensing member and affecting detection. The lens 22 is for receiving reflected light from the metal surface 16 to focus on the strip-shaped sensing member.

The detecting light source 10 further includes a first driving mechanism 126 and a first curved slot 128, so that the first light source 122 is movably disposed on the first by the first driving mechanism 126 and the first curved slot 128. Support platform 100. The first illumination source 122 is fixed on the first driving mechanism 126. A motor 124 provides a power to move the first drive mechanism 126 along the first arcuate slot 128 to cause the first illumination source 122 to move in an arc. The first arcuate groove 128 is a segment of a circular arc centered on the center point of the detection zone 16a, and the strip beam 123 provided by the first illumination source 122 is perpendicular to the line of the first arcuate slot 128. Therefore, when the first driving mechanism 126 drives the first light source 122 to move in the first arcuate groove 128, the distance between the first light source 122 and the detecting area 16a is constant, and the strip beam 123 maintains the illumination detecting area 16a. The influence of the movement of the first illumination source 122.

Similarly, when the detection light source 10 has the second illumination source 142, it may be further included A second drive mechanism 146 and a second arcuate slot 148 (see second figure). The second illumination source 142 is movably disposed on the first support platform 100 by the second driving mechanism 146 and the second curved slot 148. The second illumination source 142 is fixed on the second driving mechanism 146. A motor 144 provides a power to move the second drive mechanism 146 along the second arcuate slot 148, thereby causing the second illumination source 142 to move in an arc. The second arcuate groove 148 is a segment of a circular arc centered on the center point of the detection zone 16a, and is bilaterally symmetrical with the first arcuate groove 128. That is, the second arcuate groove 148 and the first arcuate groove 128 have a mirror point with the center point of the detection zone 16a, and the horizontal left and right mirrors are symmetrical. The strip beam 143 provided by the second illumination source 142 is perpendicular to the line of the second arcuate slot 148. Therefore, when the second driving mechanism 146 drives the second illumination source 142 to move in the second arcuate groove 148, the distance between the second illumination source 142 and the detection area 16a is constant, and the strip beam 143 maintains the illumination detection area 16a. The influence of the movement of the second illumination source 142.

Please refer to the first figure and the second figure at the same time, the first support platform 100 can be vertically movably disposed on a second support platform 200. Each of the two sides of the second support platform 200 has a vertical slide rail 201. The first support platform 100 has two sliders 101 arranged vertically corresponding to the slide rails 201, and the slider 101 is stuck to the groove of the corresponding slide rail 201. A slider platform 102 connects the sliders 101, and the first support platform 100 is fixed on the slider platform 102. When the slider 101 moves on the slide rail 201, the first support platform 100 can move relative to the second support platform 200. A motor 202 is fixed to the second support platform 200 and pushes the slider platform 102 to move in a vertical direction relative to the second support platform 200 when the rotating shaft thereof rotates.

When the first support platform 100 is vertically moved up and down relative to the second support platform 200, the position of the strip beams 123, 143 on the metal surface 16 can be adjusted. Since the incident angles of the strip beams 123 and 143 are the same, when the irradiation areas of the strip beams 123 and 143 are completely overlapped, the area irradiated by the strip beams 123 and 143 is the detection area 16a. In order to make the image sensor 20 correctly focus, the first illumination source 122 and the second illumination source 142 can be used as a detection source as well as a focus source to provide sufficient illumination for focusing. The image sensor 20 can adjust the position of the lens 22 and/or the strip sensing member to adjust the relative distance between the lens 22 and the strip sensing member, thereby correcting the light of the detecting portion 16a to the strip shape. Measuring piece. Alternatively, the lens 22 can be vertically movably disposed on the first support platform 100, and the distance between the lens 22 and the detection area 16a can be adjusted up and down (the relative distance between the lens 22 and the strip-shaped sensing element can be maintained at this time). ), the light of the adjustment detection area 16a is correctly focused on the strip-shaped sensing member.

In this embodiment, a third light source 162 is additionally provided, and a light beam 163 (see the first figure) is provided as a focus light source, incident on the metal surface 16 at a third incident angle. In the present embodiment, the light beam 163 generated by the third light source 162 is also a strip beam, and thus can also serve as a detection light source at the same time. In practical applications, the beam can be a circular, square or other shaped beam without affecting the focus. The third light source 162 is fixed to the first support platform 100 through a support frame 166 . The light beam of the third light source 162 is closer to the metal surface 16 than the first light source 122 and the second light source 142, so the third incident angle is smaller than the incident angle of the strip beams 123 and 143. For lens 22, a smaller angle of incidence of light beam 163 provides more illumination of the metal surface (stronger reflected light intensity), making lens 22 easier to focus.

Please refer to the third and fourth figures, which are exploded views of two different viewing angles of the detecting light source according to a preferred embodiment of the present invention. Since the first illumination source, the first driving mechanism, and the first arcuate slot are the same as the second illumination source, the second driving mechanism, and the second arcuate slot, but the left and right are oppositely opposite, only the first detecting source is used here. The light source, the first driving mechanism and the first curved groove are taken as an example.

The first illumination source 122 has an elongated light-emitting opening 221 for providing a strip beam. The long axis direction of the light emitting port 221 is a horizontal direction. The first drive mechanism includes an L-shaped platform 261, a slider 262, a track 263, a rail platform 264, a motor mount 265, a gear 266 (fourth view), and a clamping member 268. The L-shaped platform 261 is connected to the slider 262, and the first illumination source 122 is disposed on the L-shaped platform 261. The track 263 is disposed on the rail platform 264. The slider 262 is snapped onto the groove of the track 263 so that the slider 262 can slide linearly on the track 263; preferably, the sliding direction is parallel to the direction of the strip beam. The clamping member 268 is coupled to the L-shaped platform 261 and can clamp the rail 263 such that the first illumination source 122 is fixed to a predetermined position on the track 263.

The curved slot includes an arcuate slider 281, an arcuate rail 282, an arcuate platform 283, and a curved rack 284. The curved rack 284 is disposed on the curved platform 283. The motor base 265 is coupled to the motor 124, the rotating sleeve of which is provided with a gear 266, and the gear 266 is engaged with the curved rack 284. The curved slider 281 is coupled to the rail platform 264 and is captured on the groove of the curved rail 282 such that the curved slider 281 can slide on the curved rail 282 in an arc. Thereby, when the motor 124 drives the gear 266 to rotate, the first illumination source 122 can move in an arc direction with respect to the curved platform 283. Preferably, the curved slide rail 282 is a circular arc, centered on the center of the detection zone 16a mentioned in the first figure, and the strip beam is perpendicular to the tangent of the curved slide rail 282. Thereby, when the first light source 122 performs the arc direction movement, the first light source 122 changes the angle of the incident angle with respect to the metal surface, and the inspection The distance of the test area 16a remains unchanged, and the strip beam still illuminates the detection area 16a. Therefore, when the detection light source of the present invention adjusts the incident angle, the strip beam can still maintain the original illumination area, that is, the detection area 16a, and the problem of re-adjusting the illumination area of the strip beam after adjusting the incident angle is avoided. Furthermore, the cross-sectional area of the strip beam varies with the distance of the illumination area from the first illumination source 122. That is to say, the illuminance of the strip beam in the detection area 16a is also related to the distance between the first illumination source 122 and the detection area 16a. When the detection light source of the present invention adjusts the incident angle, the distance between the first illumination source 122 and the detection area 16a does not change, so that the influence of the distance change contrast can be avoided.

Please refer to the fifth and sixth figures, which are exploded views of different viewing angles of the four-axis fine adjustment base according to a preferred embodiment of the present invention. The image sensor (not shown) is mounted on the four-axis fine adjustment seat 30, and four axial adjustments can be made, so that the lens of the image sensor can be perpendicular to the detection area 16a of the metal surface shown in the first figure. And the distance from the detection area 16a can be adjusted so that the image sensor can focus correctly.

The four-axis fine adjustment seat 30 includes a clamping seat 31, a vertical platform 32, a rotating shaft seat 33, a rotating base 34 and an L base 35. The clamping seat 31 includes two clamping holes 311, 312 vertically aligned with the upper and lower sides, so that the lens can be disposed on the two clamping holes 311, 312. The clamping hole 312 is formed by combining two clamping plates 381 and 382 having inner semicircular notches. By adjusting the distance between the clamping plates 381 and 382, the size of the lens can be adjusted and the lens is tight. It is clamped on the clamping plates 381, 382. The lens only passes through the clamping hole 311 without gripping the lens, so the lens can be rotated relative to the clamping hole 311.

The clamping plates 381, 382 are fixed to a rotating plate 316, and a rotating block 315 (fifth figure) is fixed below the rotating plate 316. The rotating plate 316 has four arcuate screw holes 371, 372, 373, 374 to be screwed to a square frame 319 of the clamping seat 31 through the arcuate screw holes 371, 372, 373, 374. A first rotary table 36 is fixed to the square frame 319 and has two projections 363, 364 to form a notch 365 (fifth view). The rotating block 315 is located within the recess 365. The two screws 361 and 362 are respectively screwed into the two protrusions 363 and 364 to respectively push against the opposite sides of the rotating block 315. By adjusting the two screws 361, 362, the position of the rotating block 315 at the notch 365 can be adjusted, so that the rotating plate 316 can be rotated relative to the holder 31 in the axial direction a. The curved screw holes 371, 372, 373, and 374 are elliptical screw holes. When the rotating plate 316 rotates, the screws above the curved screw holes 371, 372, 373, 374 provide a space for rotational rotation when the rotating plate 316 and the clamping seat 31 are not locked, and can be fixedly rotated when locked. Plate 316 is no longer rotating.

Since the lens is clamped by the clamping plates 381, 382, the rotation of the rotating plate 316 is provided by the screws 361, 362, and the angle of the lens on the a-axis can be adjusted; that is, the strip-shaped sensing member on the lens can be adjusted. The long axis direction can be fine-tuned to an appropriate angle. The long axis direction of the strip-shaped sensing member is preferably parallel to the strip beam, that is, the front-rear direction.

The vertical platform 32 includes two vertical slides 321 , four vertical slides 322 , a vertical adjustment block 323 , a screw 324 and a vertical frame 329 . The two vertical slide rails 321 are connected to the holders 31 in parallel with each other, and the vertical sliders 322 are connected to the vertical frame 329 and the two of them correspond to the vertical slide rails 321. The vertical rail 321 is clamped to the groove of the corresponding vertical slider 322, so that the holder 31 can move in the vertical direction with respect to the vertical platform 32. The two vertical slide rails 321 are parallel to each other, and the amount of movement other than the vertical axis caused by the gap between the vertical slider 322 and the vertical slide rail 321 can be reduced. The vertical adjustment block 323 is fixed to the vertical frame 329. The screw 324 is screwed into the vertical adjustment block 323 to push against a surface 391 of the square frame 319 of the holder 31, thereby adjusting the relative position of the holder 31 and the vertical platform 32 in the vertical direction b.

The rotating shaft seat 33 includes a rotating block 332, a rotating recess 333, two screws 334, 335, and a rotating frame 339. A screw 331 passes through a perforation 328 of one of the vertical frames 329 to engage the rotating frame 339 and the vertical frame 329, and rotates the rotating frame 339 and the vertical frame 329 with respect to the axial direction d. The rotating block 332 is fixed to the vertical frame 329 on one side opposite to the two vertical sliders 322. The rotary recess 333 is disposed on the rotating frame 339 and has a recess 336. The rotating block 332 is located in the recess 336, and the two screws 334 and 335 are respectively screwed into the bumps on both sides of the recess 336 to push against opposite sides of the rotating block 332, thereby adjusting the relative angles of the rotating frame 339 and the vertical frame 329. .

The rotating base 34 has two rotating blocks 341, 342, two screws 343, 344 and a rotating table 349. In addition, the rotating shaft base 33 further includes two body blocks 337, 338 which are respectively screwed to the two side walls of the rotating frame 339. The rotary table 349 is fixed on the two body blocks 337, 338. The two rotating blocks 341, 342 are disposed above and below the same side of the rotating table 349. The two screws 343, 344 are each screwed into the two rotating blocks 341, 342 to push against the back surface of the rotating frame 339. By adjusting the two screws 343, 344, the rotating frame 339 can be finely adjusted in the axial direction c with respect to the rotating table 349. The screw holes on the upper and lower sides of the two body blocks 337 and 338 are elliptical screw holes. When the screw is not locked, the rotating shaft seat 33 can rotate in the axial direction c with respect to the rotating base 34. When the screw is locked, the relative angle between the rotating shaft base 33 and the rotating base 34 is fixed. The spin base 34 is fixed to the L base 35.

The curved platform 283 shown in the third figure is erected on the first support platform 100 shown in the first figure together with the L base 35 shown in the fifth figure. Thereby, when the first support platform 100 moves in the vertical direction relative to the second support platform 200, the detection light source 10 and the image sensor 20 can be synchronously moved. As mentioned above, the detection light source 10 has at least two axial adjustments, and the image sensor 20 has at least four axial adjustments that can be further adjusted to the desired position and angle in accordance with the application environment.

Next, please refer to the seventh drawing, which is a front view of the operation of the impurity particle detecting device. First, the impurity particle detecting device is first calibrated to obtain a better detection effect. The first light source 122, the second light source 142, and the third light source 162 respectively generate strip beams 123, 143, and the light beam 163 is irradiated onto the detection region 16a (or the calibration reference plate) of the metal surface 16. The lens 22 is perpendicular to the metal surface 16 to align the detection zone 16a, i.e., the detection zone 16a is positioned on an optical axis 23 of the lens 22. The front end of the lens 22 can be rotated to adjust the equivalent focal length of the lens, that is, to adjust the magnification of the lens. A detection control system (not shown) controls the motor 202 (see the first figure) to move the lens 22 to a predetermined height from the metal surface 16. The predetermined height is determined by the specifications of the lens. Then, the user manually performs the four-axis adjustment of the image sensor 20 and the two-axis adjustment of the second illumination source 142 and the third illumination source 162, so that the lens 22 correctly focuses the detection area 16a and the impurity particle detecting device. The false detection rate and the detection rate reach an optimal balance point.

In general, the greater the angle of incidence of light incident on a plane, the weaker the intensity of the light reflected by the plane received by the observation of the vertical plane (eg, the lens of the present invention). Therefore, compared to the strip beams 123, 143, the light beam 163 is incident on the metal surface 16 at a relatively close incident angle θ 1 , and the light reflected by the metal surface 16 is strong, which is suitable for focusing. In contrast, the strip beams 123, 143 are incident at a relatively large incident angle θ 2 , and the intensity of light reflected by the metal surface 16 is weak. However, the impurity particles are not as flat as the metal surface, and in principle, the intensity of the light reflected by the impurity particles is less changed by the incident angle. Thereby, at a larger incident angle, the brightness of the light reflected by the impurity particles can be compared with the brightness of the light reflected by the metal surface, so that the impurity particles are more easily detected.

Of course, in actual operation, the incident angle affects the detection rate and the false detection rate, and the 100% detection rate and the 0% false detection rate are the most ideal. However, the larger the angle of incidence, the higher the contrast of light, the lower the false detection rate, but the overall brightness also decreases, so the detection rate also decreases. Conversely, the smaller the angle of incidence, the higher the overall brightness, and the higher the detection rate. However, the contrast of light is low, so the false detection rate will also rise. Furthermore, how much the brightness of the light reflected by the impurity particles is related to the size and shape of the impurity particles affects the relationship between the angle and the brightness of the reflection. Therefore, it is not necessarily the larger incident angle that the best impurity particle detection can be obtained. The first illumination source 122 and the second illumination source 142 of the present invention can adjust the incident angle θ 2 by the arcuate groove and the driving mechanism. The arcuate grooves of the first illumination source 122 and the second illumination source 142 correspond to each other, and the first strip beam 123 and the second strip beam 143 are perpendicular to the tangent of the respective arcuate slots. During the adjustment of the incident angle, the first illumination source 122 and the second illumination source 142 can rotate the detection region 16a to be equidistant from the detection region 16a and the incident angles of the first illumination source 122 and the second illumination source 142 can be symmetric. Adjustment. Therefore, the first strip beam 123 and the second strip beam 143 after adjusting the incident angle can still remain incident to the detection region 16.

Please refer to the eighth drawing, which is a photograph taken by the impurity particle detecting device of the present invention. As shown in the photograph, the metal surface 16 has a plurality of openings 161 and a plurality of stripe paths 165. The plurality of stripe paths 165 are formed on the metal surface 16 during the manufacturing process, and are arranged in the same direction. The lines shown in the photograph are in the left-right direction. The texture is mainly composed of stripes between the concave and convex. In order to prevent the plurality of stripe paths 165 from interfering with the determination of the impurity particles by the impurity particle detecting means, the light traveling directions of the strip beams 123, 143 of the first light source 122 and the second light source 142 are perpendicular to the arrangement direction of the plurality of stripe paths and No component. For example, the arrangement direction of the plurality of stripe paths is the left-right direction, and the long axes of the strip beams 123 and 143 are the front-rear direction, and the incident direction (the light advancing direction) is the left-right direction and is incident downward to the metal surface 16, so There is no component in the direction of alignment (front and rear direction) perpendicular to the complex stripe path. As described above, under the irradiation of the strip beams 123 and 143, the streaks of the unevenness and the undulations are less likely to cause shadows, and the light beams 123 and 143 are not easily banded by the side faces of the plurality of stripe paths. That is, it is possible to prevent the complex stripe path 165 of the metal surface 16 from detecting an image having a large contrast and a strong contrast, and affecting the detection of the impurity particles.

Furthermore, the first illumination source 122 and the second illumination source 142 corresponding to the left and right sides are used as the dual detection light source, and the shadow that may be generated by the single direction illumination when the single detection source is used can be eliminated, and the accuracy of the detection and determination can be further improved.

Referring to a ninth drawing, a perspective view of a metal mask detecting device according to a preferred embodiment of the present invention is shown. A machine table 4 has a conveyor 5 and a frame 6. The frame body 6 is spanned above the conveyor 5. The conveying device 5 comprises a rectangular one-piece seating 51. In the middle of the placement base 51, there is a slot 55 for fixing a rectangular frame 7. At least one of the frame 7 is attached The metal mask 8 is, for example, attached to the periphery of the frame 7 on both sides of the metal mask 8. When the frame 7 is fixed to the placement base 51, the metal cover 8 is horizontal. The conveyor 5 has two slide rails 54 on both sides, and a magnetic rail 57 is disposed between each side of the two slide rails 54 to programably control the placement base 51 in a first horizontal axis (ie, front and rear direction) according to a control command. The precise displacement, for example, causes the metal mask 8 on the frame 7 to move to a predetermined initial position below the frame 6. The frame body 6 has two slide rails 61, and a socket 9 is movably disposed on the slide rails 61. For example, the second support platform 200 shown in the first and second figures can be used as the socket 9 of the embodiment. . The impurity particle detecting device 1 (herein indicated by a broken line) is disposed on the socket 9 so that the impurity particle detecting device 1 can be displaced relative to the frame 6 in a second horizontal axis (ie, the left-right direction), and the first The two horizontal axes are perpendicular to the first horizontal axis.

Please also refer to the tenth embodiment, which is a schematic perspective view of a placement base according to a preferred embodiment of the present invention. Each of the four sides of the inside of the placing base 51 has at least one placing wheel 52, wherein the three side placing wheels 52 are respectively connected to a pneumatic cylinder 53, and the pneumatic cylinder 53 is fixed to the placing base 51, and the last side is placed. The wheel 52 is fixed to the placement base 51. In the present embodiment, there are seven placement wheels 52 and five pneumatic cylinders 53. On the upper right side of the tenth figure, the two placement wheels 52 are directly fixed on the placement base 51, and the three placement sides are disposed on the three sides. The pulley 52 is connected to the placement base 51 through the pneumatic cylinder 53. In addition, the pneumatic cylinder 53 on the lower right side is an adjustable stroke pneumatic cylinder, and can control the rod moving distance of the pneumatic cylinder. The outer side of the placement wheel 52 is made of a plastic material to avoid wear around the placement base 51 when it collides with the placement base 51. Moreover, the placement wheel 52 can roll, avoiding the wear concentration of the placement wheel 52 itself when the placement wheel 52 collides with the placement seat 51, and rapidly changing the size of the placement wheel 52 affects the positioning accuracy of the frame 7, and can be extended The number of uses of the placement wheel 52. The setting wheel 52 is replaceable and can be replaced when the wear is reached to a certain extent.

When the frame 7 is placed on the placement base 51, the pneumatic cylinder 53 pushes the placement wheel 52 toward the inside of the placement base 51 to push against the side of the frame 7. Thus, the frame 7 is fixed to the placement base 51 by the placement wheel 52. Since the upper right side of the placement wheel 52 is directly fixed to the placement base 51, the position is fixed and can be used as a reference for the axial direction when the frame 7 is positioned. The pneumatic cylinder 53 on the lower right side is an adjustable stroke pneumatic cylinder. Therefore, the position of the position can be controlled as the frame 7 and the other axial reference can be adjusted according to the frame size and size. location point.

Since the seat 55 of the placing base 51 has a rectangular shape, it corresponds to the rectangular shape of the frame 7, and the long side of the frame 7 is longer than the short side of the housing 55. Therefore, when the frame 7 is placed in the housing 55, the long side of the frame 7 must correspond to the long side of the housing 55 so that the frame 7 can be placed in the housing 55. in this way, It is ensured that the direction of the grain on the metal mask 8 is a predetermined direction. In this embodiment, the predetermined direction is the second horizontal direction.

Each of the two sides of the placement base 51 has a rail platform 56 that is movably coupled to the two sides of the conveyor 5 with two slide rails 54, respectively. Moreover, the track platform 56 has a magnetron (not shown) that interacts with the magnetic rail 57 to provide power for the placement of the mount 51.

Please refer to the ninth figure. When the frame 7 is fixed, the placement base 51 is moved by the conveying device 5 to a predetermined initial position below the frame 6. Then, the first support platform 100 (see the first figure) of the impurity particle detecting device 1 is lowered to a predetermined height with respect to the socket 9 (for example, the second support platform 200 shown in the first figure). The metal mask 8 will sag slightly from the center due to gravity. Therefore, the predetermined height can be determined by scanning the metal mask 8 in advance to obtain an average level, thereby compensating for the influence due to gravity. Next, the impurity particle detecting device 1 starts scanning detection. The socket 9 is controlled to move at a predetermined speed with the impurity particle detecting device 1 in the second horizontal axis, for example, scanning from the left side to the right side, and then scanning from the right side to the left side, thus repeating. Whenever the impurity particle detecting device 1 scans one line (ie, scanning from the leftmost side to the far right side or from the rightmost side to the leftmost side), the conveying device 5 will move the placing seat 51 by a predetermined distance, and then the impurity particle detecting device 1 Then scan the next line. The predetermined distance is determined according to the length of the strip-shaped sensing member of the image sensor, so that the scanned line image can be assembled into a complete metal mask image, and the photograph shown in the eighth figure is the obtained metal. Mask a portion of the image.

The metal mask detecting device determines the position of the impurity particles on the metal mask based on the image of the metal mask, and accordingly controls a laser (not shown) to remove the impurity particles by the laser beam. The metal mask detecting device may scan the metal mask one or more times to confirm that the impurity particles are completely removed or cleared to a certain amount or less.

In any event, anyone can obtain sufficient teaching from the description of the above examples, and it is understood that the present invention is indeed different from the prior art, and is industrially usable and progressive. It is the invention that has indeed met the patent requirements and has filed an application in accordance with the law.

10‧‧‧Detection light source

16‧‧‧Metal surface

16a‧‧‧Detection area

20‧‧‧Image Sensor

22‧‧‧ lens

24‧‧‧ Thermal Module

100‧‧‧First support platform

102‧‧‧ Slider platform

122‧‧‧First light source

123‧‧‧Belt beam

124‧‧‧Motor

126‧‧‧First drive mechanism

128‧‧‧First curved slot

142‧‧‧second source of illumination

143‧‧‧Belt beam

144‧‧‧Motor

146‧‧‧Second drive mechanism

Claims (8)

An impurity particle detecting device for detecting impurity particles of a metal surface of a level, comprising: a detecting light source having a first light source and a second light source to respectively provide a first strip beam and a second a strip beam incident on the metal surface; and an image sensor having a lens and a strip-shaped sensing member for receiving light from the metal surface to focus to the strip-shaped sensing member and the lens An optical axis is perpendicular to the metal surface; wherein a longitudinal axis of the first strip beam and the second strip beam is a front-rear direction, and a long axis of the strip-shaped sensing member is a front-rear direction, the first strip shape The light beam is incident on a detection area of the metal surface at a first incident angle. The first incident angle is an angle greater than or equal to 45 degrees and less than 90 degrees. The second illumination source is bilaterally symmetric with the first illumination source. A second incident angle of the second strip beam incident on the metal surface is at an angle equal to the angle of the first incident angle, and the metal surface has a plurality of stripe paths in the left-right direction. The impurity particle detecting device according to claim 1, wherein the angle between the first incident angle and the second incident angle is an angle greater than or equal to 60 degrees and less than or equal to 80 degrees. The impurity particle detecting device of claim 1, wherein the detecting light source further comprises a third light source for providing a light beam incident on the metal surface at a third incident angle, the image sensor being The light beam of the third illumination source is in focus to adjust at least the lens and the strip-shaped sensing component In one of the cases, the third incident angle is an angle less than 45 degrees and greater than or equal to 0 degrees. The impurity particle detecting device of claim 1, further comprising a moving mechanism, wherein the detecting light source and the image sensor are disposed on the moving mechanism, so that the detecting light source and the image sensor are opposite Horizontal movement on the metal surface. The impurity particle detecting device of claim 1, wherein the detecting light source further comprises a first arcuate groove, a second arcuate groove, a first driving mechanism and a second driving mechanism, the first The driving mechanism is movably disposed in the first curved slot, the first light source is fixed to the first driving mechanism, and the second light source is fixed to the second driving mechanism, wherein the second driving mechanism Removably disposed in the second curved slot and corresponding to the first driving mechanism and the first curved slot, and the first strip beam and the second strip beam are perpendicular to the first arc slot respectively The first light source and the first light source and the first drive mechanism are respectively along the first arc groove and the second arc groove The second illumination source is rotated about the detection area to maintain an equidistant distance with the detection area and symmetrically adjust the first incident angle and the second incident angle, and the first strip beam and the second strip beam are maintained Injected into the detection zone. A metal mask detecting device comprises: a machine having a conveying device and a frame, the frame system spanning over the conveying device, the conveying device has a rectangular one seat for fixing the rectangle a frame such that the frame is axially displaceable relative to the frame body in a first horizontal direction, wherein the placement seat has a frame attached thereto a metal mask having a plurality of stripe paths in the same direction. When the frame is fixed to the placement seat, the plurality of stripe roads are in a left-right direction; a socket is disposed on the frame body and can be opposite The frame body is axially displaced by a second horizontal axis, and the second horizontal axis is perpendicular to the first horizontal axis; and an impurity particle detecting device is disposed on the socket and vertically displaceable relative to the socket The impurity particle detecting device includes a first arcuate groove, a first light source, a second arc groove, a second light source, and an image sensor. The first light source is movably disposed on the The first arcuate groove is configured to provide a first strip beam perpendicular to a line of the first arcuate groove to be incident on a detection area of the metal mask, and the first arcuate groove is used for the detection The area is an arc groove of an axis, the second arc groove, and the first arc groove is a mirror point with a center point of the detection area, and the horizontal left and right mirrors are symmetrical, and the second illumination source is Movably disposed in the second arcuate groove for providing one of the lines perpendicular to the second arcuate groove Two band-shaped light beam, the light beam incident on the second strip-shaped detection zone. The metal mask detecting device of claim 6, wherein an angle between the first strip beam and one of the horizontal planes is the same as an angle between the second strip beam and the horizontal plane, and the angle of the angle is An angle greater than 0 degrees and less than or equal to 45 degrees. The metal mask detecting device of claim 6, wherein the four sides of the interior of the mounting seat each have at least one placement wheel, and wherein the one of the placement wheels is fixed to the placement seat The other three of the placement wheels are connected to the pneumatic cylinder and the pneumatic cylinder is fixed on the placement seat, wherein the air pressure is When the cylinder is in motion, the corresponding placement wheels are moved toward the inside of the placement seat to push and fix the frame.