TWI563250B - Particle detection apparatus and metal mask detection apparatus - Google Patents

Particle detection apparatus and metal mask detection apparatus

Info

Publication number
TWI563250B
TWI563250B TW103143911A TW103143911A TWI563250B TW I563250 B TWI563250 B TW I563250B TW 103143911 A TW103143911 A TW 103143911A TW 103143911 A TW103143911 A TW 103143911A TW I563250 B TWI563250 B TW I563250B
Authority
TW
Taiwan
Prior art keywords
detection apparatus
metal mask
particle
particle detection
mask detection
Prior art date
Application number
TW103143911A
Other languages
Chinese (zh)
Other versions
TW201623948A (en
Inventor
Hsu Hui Huang
Yi Chieh Chao
Chih Hao Chen
Chien Nan Chen
Original Assignee
Shuz Tung Machinery Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shuz Tung Machinery Ind Co Ltd filed Critical Shuz Tung Machinery Ind Co Ltd
Priority to TW103143911A priority Critical patent/TWI563250B/en
Publication of TW201623948A publication Critical patent/TW201623948A/en
Application granted granted Critical
Publication of TWI563250B publication Critical patent/TWI563250B/en

Links

TW103143911A 2014-12-16 2014-12-16 Particle detection apparatus and metal mask detection apparatus TWI563250B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW103143911A TWI563250B (en) 2014-12-16 2014-12-16 Particle detection apparatus and metal mask detection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW103143911A TWI563250B (en) 2014-12-16 2014-12-16 Particle detection apparatus and metal mask detection apparatus

Publications (2)

Publication Number Publication Date
TW201623948A TW201623948A (en) 2016-07-01
TWI563250B true TWI563250B (en) 2016-12-21

Family

ID=56984664

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103143911A TWI563250B (en) 2014-12-16 2014-12-16 Particle detection apparatus and metal mask detection apparatus

Country Status (1)

Country Link
TW (1) TWI563250B (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001296105A (en) * 2000-04-12 2001-10-26 Nikon Corp Surface-position detecting apparatus, and aligner and aligning method using the detecting apparatus
TW201131161A (en) * 2009-09-25 2011-09-16 Ube Industries Method for inspecting surface of and method of making resin substrate formed with metal pattern
TW201326777A (en) * 2011-12-28 2013-07-01 Ind Tech Res Inst Optical characteristics capturing system and optical characteristics method for inspecting a flexible display
CN103364405A (en) * 2012-03-27 2013-10-23 三星电机株式会社 Surface defect detecting apparatus and control method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001296105A (en) * 2000-04-12 2001-10-26 Nikon Corp Surface-position detecting apparatus, and aligner and aligning method using the detecting apparatus
TW201131161A (en) * 2009-09-25 2011-09-16 Ube Industries Method for inspecting surface of and method of making resin substrate formed with metal pattern
TW201326777A (en) * 2011-12-28 2013-07-01 Ind Tech Res Inst Optical characteristics capturing system and optical characteristics method for inspecting a flexible display
CN103364405A (en) * 2012-03-27 2013-10-23 三星电机株式会社 Surface defect detecting apparatus and control method thereof

Also Published As

Publication number Publication date
TW201623948A (en) 2016-07-01

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