CN107076133B - 吸气剂泵送系统 - Google Patents

吸气剂泵送系统 Download PDF

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Publication number
CN107076133B
CN107076133B CN201580024517.7A CN201580024517A CN107076133B CN 107076133 B CN107076133 B CN 107076133B CN 201580024517 A CN201580024517 A CN 201580024517A CN 107076133 B CN107076133 B CN 107076133B
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CN
China
Prior art keywords
getter
box
pumping system
square metre
linear
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CN201580024517.7A
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English (en)
Chinese (zh)
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CN107076133A (zh
Inventor
安东尼奥·博努奇
保罗·马尼尼
法布里齐奥·西维耶罗
皮耶尔乔治·索纳托
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SAES Getters SpA
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SAES Getters SpA
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Publication of CN107076133A publication Critical patent/CN107076133A/zh
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
CN201580024517.7A 2014-06-26 2015-06-24 吸气剂泵送系统 Active CN107076133B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ITMI20141157 2014-06-26
ITMI2014A001157 2014-06-26
PCT/IB2015/054728 WO2015198235A1 (en) 2014-06-26 2015-06-24 Getter pumping system

Publications (2)

Publication Number Publication Date
CN107076133A CN107076133A (zh) 2017-08-18
CN107076133B true CN107076133B (zh) 2019-06-18

Family

ID=51398734

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580024517.7A Active CN107076133B (zh) 2014-06-26 2015-06-24 吸气剂泵送系统

Country Status (7)

Country Link
US (1) US9685308B2 (enExample)
EP (1) EP3161315B1 (enExample)
JP (2) JP6835592B2 (enExample)
KR (1) KR102154893B1 (enExample)
CN (1) CN107076133B (enExample)
RU (1) RU2663813C2 (enExample)
WO (1) WO2015198235A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7365693B2 (ja) * 2016-11-04 2023-10-20 ティーエーイー テクノロジーズ， インコーポレイテッド マルチスケール捕捉タイプ真空ポンピングを用いた高性能ｆｒｃの改良された持続性のためのシステムおよび方法
CN112012908A (zh) * 2020-09-01 2020-12-01 宁波盾科新材料有限公司 一种吸气泵及使用该吸气泵的移动储罐
US20250264093A1 (en) * 2022-08-01 2025-08-21 Saes Getters S.P.A. Snap-on getter pump assembly and its use
GB2628573A (en) * 2023-03-29 2024-10-02 Edwards Ltd Gas capture element
WO2025209901A1 (en) 2024-04-04 2025-10-09 Saes Getters S.P.A. High-performance getter pump

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0742370A1 (en) * 1995-05-11 1996-11-13 Saes Getters S.P.A. Heating assembly for getter pumps and gas purifiers
CN1215799A (zh) * 1997-10-15 1999-05-05 工程吸气公司 高气体吸附速度的吸气泵
CN200958468Y (zh) * 2006-10-25 2007-10-10 北京有色金属研究总院 一种使用安全大抽速吸气剂泵
CN201865882U (zh) * 2010-11-26 2011-06-15 中国航天科工集团第二研究院二○三所 一种用于氢原子频标的外加热式钛基吸气剂泵
CN102356236A (zh) * 2009-03-17 2012-02-15 工程吸气公司 包括吸气泵和离子泵的组合泵送系统
WO2014060879A1 (en) * 2012-10-15 2014-04-24 Saes Getters S.P.A. Getter pump

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2034633C3 (de) * 1969-07-24 1979-10-25 S.A.E.S. Getters S.P.A., Mailand (Italien) Kartusche für eine Getterpumpe
JPS53131511A (en) * 1977-04-22 1978-11-16 Hitachi Ltd Non-evaporation type cetter pump
JPH03189380A (ja) * 1989-12-20 1991-08-19 Jeol Ltd ゲッタポンプ
JPH0667870U (ja) * 1991-02-02 1994-09-22 株式会社日本製鋼所 高真空排気装置
US5154582A (en) 1991-08-20 1992-10-13 Danielson Associates, Inc. Rough vacuum pump using bulk getter material
IT1255438B (it) * 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US5972183A (en) * 1994-10-31 1999-10-26 Saes Getter S.P.A Getter pump module and system
US5911560A (en) 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
IT237018Y1 (it) * 1995-07-10 2000-08-31 Getters Spa Pompa getter perfezionata in particolare per uno strumento dianalisi chimiche portatile
FR2750248B1 (fr) * 1996-06-19 1998-08-28 Org Europeene De Rech Dispositif de pompage par getter non evaporable et procede de mise en oeuvre de ce getter
FR2760089B1 (fr) 1997-02-26 1999-04-30 Org Europeene De Rech Agencement et procede pour ameliorer le vide dans un systeme a vide tres pousse
IT1302694B1 (it) * 1998-10-19 2000-09-29 Getters Spa Dispositivo di schermatura mobile in funzione della temperatura trapompa getter e pompa turbomolecolare collegate in linea.
JP2001357814A (ja) 2000-06-15 2001-12-26 Jeol Ltd 極高真空スパッタイオンポンプ
JP3565153B2 (ja) * 2000-09-26 2004-09-15 日産自動車株式会社 ゲッタ装置およびセンサ
JP3828487B2 (ja) * 2002-12-24 2006-10-04 三菱電機株式会社 非蒸発型ゲッター
JP5194534B2 (ja) * 2007-04-18 2013-05-08 パナソニック株式会社 真空処理装置
EP2260502B1 (en) 2008-03-28 2023-05-03 SAES GETTERS S.p.A. Combined pumping system comprising a getter pump and an ion pump
ITMI20120872A1 (it) 2012-05-21 2013-11-22 Getters Spa Leghe getter non evaporabili particolarmente adatte per l'assorbimento di idrogeno e azoto
ITMI20131921A1 (it) 2013-11-20 2015-05-21 Getters Spa Leghe getter non evaporabili particolarmente adatte per l'assorbimento di idrogeno e monossido di carbonio
TWI660125B (zh) * 2014-04-03 2019-05-21 義大利商沙斯格特斯公司 吸氣泵

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0742370A1 (en) * 1995-05-11 1996-11-13 Saes Getters S.P.A. Heating assembly for getter pumps and gas purifiers
CN1215799A (zh) * 1997-10-15 1999-05-05 工程吸气公司 高气体吸附速度的吸气泵
CN200958468Y (zh) * 2006-10-25 2007-10-10 北京有色金属研究总院 一种使用安全大抽速吸气剂泵
CN102356236A (zh) * 2009-03-17 2012-02-15 工程吸气公司 包括吸气泵和离子泵的组合泵送系统
CN201865882U (zh) * 2010-11-26 2011-06-15 中国航天科工集团第二研究院二○三所 一种用于氢原子频标的外加热式钛基吸气剂泵
WO2014060879A1 (en) * 2012-10-15 2014-04-24 Saes Getters S.P.A. Getter pump

Also Published As

Publication number Publication date
US20170076925A1 (en) 2017-03-16
CN107076133A (zh) 2017-08-18
RU2017102266A3 (enExample) 2018-07-31
US9685308B2 (en) 2017-06-20
EP3161315B1 (en) 2017-12-20
RU2017102266A (ru) 2018-07-31
KR20170026331A (ko) 2017-03-08
KR102154893B1 (ko) 2020-09-11
RU2663813C2 (ru) 2018-08-10
EP3161315A1 (en) 2017-05-03
WO2015198235A1 (en) 2015-12-30
JP2017522481A (ja) 2017-08-10
JP2019203201A (ja) 2019-11-28
JP6835592B2 (ja) 2021-02-24

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