RU2017102266A3 - - Google Patents
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- Publication number
- RU2017102266A3 RU2017102266A3 RU2017102266A RU2017102266A RU2017102266A3 RU 2017102266 A3 RU2017102266 A3 RU 2017102266A3 RU 2017102266 A RU2017102266 A RU 2017102266A RU 2017102266 A RU2017102266 A RU 2017102266A RU 2017102266 A3 RU2017102266 A3 RU 2017102266A3
- Authority
- RU
- Russia
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ITMI20141157 | 2014-06-26 | ||
| ITMI2014A001157 | 2014-06-26 | ||
| PCT/IB2015/054728 WO2015198235A1 (en) | 2014-06-26 | 2015-06-24 | Getter pumping system |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| RU2017102266A3 true RU2017102266A3 (enExample) | 2018-07-31 |
| RU2017102266A RU2017102266A (ru) | 2018-07-31 |
| RU2663813C2 RU2663813C2 (ru) | 2018-08-10 |
Family
ID=51398734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2017102266A RU2663813C2 (ru) | 2014-06-26 | 2015-06-24 | Геттерная насосная система |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9685308B2 (enExample) |
| EP (1) | EP3161315B1 (enExample) |
| JP (2) | JP6835592B2 (enExample) |
| KR (1) | KR102154893B1 (enExample) |
| CN (1) | CN107076133B (enExample) |
| RU (1) | RU2663813C2 (enExample) |
| WO (1) | WO2015198235A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7365693B2 (ja) * | 2016-11-04 | 2023-10-20 | ティーエーイー テクノロジーズ， インコーポレイテッド | マルチスケール捕捉タイプ真空ポンピングを用いた高性能ｆｒｃの改良された持続性のためのシステムおよび方法 |
| CN112012908A (zh) * | 2020-09-01 | 2020-12-01 | 宁波盾科新材料有限公司 | 一种吸气泵及使用该吸气泵的移动储罐 |
| US20250264093A1 (en) * | 2022-08-01 | 2025-08-21 | Saes Getters S.P.A. | Snap-on getter pump assembly and its use |
| GB2628573A (en) * | 2023-03-29 | 2024-10-02 | Edwards Ltd | Gas capture element |
| WO2025209901A1 (en) | 2024-04-04 | 2025-10-09 | Saes Getters S.P.A. | High-performance getter pump |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2034633C3 (de) * | 1969-07-24 | 1979-10-25 | S.A.E.S. Getters S.P.A., Mailand (Italien) | Kartusche für eine Getterpumpe |
| JPS53131511A (en) * | 1977-04-22 | 1978-11-16 | Hitachi Ltd | Non-evaporation type cetter pump |
| JPH03189380A (ja) * | 1989-12-20 | 1991-08-19 | Jeol Ltd | ゲッタポンプ |
| JPH0667870U (ja) * | 1991-02-02 | 1994-09-22 | 株式会社日本製鋼所 | 高真空排気装置 |
| US5154582A (en) | 1991-08-20 | 1992-10-13 | Danielson Associates, Inc. | Rough vacuum pump using bulk getter material |
| IT1255438B (it) * | 1992-07-17 | 1995-10-31 | Getters Spa | Pompa getter non evaporabile |
| US5685963A (en) * | 1994-10-31 | 1997-11-11 | Saes Pure Gas, Inc. | In situ getter pump system and method |
| US5972183A (en) * | 1994-10-31 | 1999-10-26 | Saes Getter S.P.A | Getter pump module and system |
| US5911560A (en) | 1994-10-31 | 1999-06-15 | Saes Pure Gas, Inc. | Getter pump module and system |
| IT1274478B (it) | 1995-05-11 | 1997-07-17 | Getters Spa | Insieme di riscaldamento per pompe getter e purificatori di gas |
| IT237018Y1 (it) * | 1995-07-10 | 2000-08-31 | Getters Spa | Pompa getter perfezionata in particolare per uno strumento dianalisi chimiche portatile |
| FR2750248B1 (fr) * | 1996-06-19 | 1998-08-28 | Org Europeene De Rech | Dispositif de pompage par getter non evaporable et procede de mise en oeuvre de ce getter |
| FR2760089B1 (fr) | 1997-02-26 | 1999-04-30 | Org Europeene De Rech | Agencement et procede pour ameliorer le vide dans un systeme a vide tres pousse |
| IT1295340B1 (it) * | 1997-10-15 | 1999-05-12 | Getters Spa | Pompa getter ad elevata velocita' di assorbimento di gas |
| IT1302694B1 (it) * | 1998-10-19 | 2000-09-29 | Getters Spa | Dispositivo di schermatura mobile in funzione della temperatura trapompa getter e pompa turbomolecolare collegate in linea. |
| JP2001357814A (ja) | 2000-06-15 | 2001-12-26 | Jeol Ltd | 極高真空スパッタイオンポンプ |
| JP3565153B2 (ja) * | 2000-09-26 | 2004-09-15 | 日産自動車株式会社 | ゲッタ装置およびセンサ |
| JP3828487B2 (ja) * | 2002-12-24 | 2006-10-04 | 三菱電機株式会社 | 非蒸発型ゲッター |
| CN200958468Y (zh) * | 2006-10-25 | 2007-10-10 | 北京有色金属研究总院 | 一种使用安全大抽速吸气剂泵 |
| JP5194534B2 (ja) * | 2007-04-18 | 2013-05-08 | パナソニック株式会社 | 真空処理装置 |
| EP2260502B1 (en) | 2008-03-28 | 2023-05-03 | SAES GETTERS S.p.A. | Combined pumping system comprising a getter pump and an ion pump |
| ITMI20090402A1 (it) * | 2009-03-17 | 2010-09-18 | Getters Spa | Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica |
| CN201865882U (zh) * | 2010-11-26 | 2011-06-15 | 中国航天科工集团第二研究院二○三所 | 一种用于氢原子频标的外加热式钛基吸气剂泵 |
| ITMI20120872A1 (it) | 2012-05-21 | 2013-11-22 | Getters Spa | Leghe getter non evaporabili particolarmente adatte per l'assorbimento di idrogeno e azoto |
| ITMI20121732A1 (it) | 2012-10-15 | 2014-04-16 | Getters Spa | Pompa getter |
| ITMI20131921A1 (it) | 2013-11-20 | 2015-05-21 | Getters Spa | Leghe getter non evaporabili particolarmente adatte per l'assorbimento di idrogeno e monossido di carbonio |
| TWI660125B (zh) * | 2014-04-03 | 2019-05-21 | 義大利商沙斯格特斯公司 | 吸氣泵 |
-
2015
- 2015-06-24 KR KR1020167031408A patent/KR102154893B1/ko active Active
- 2015-06-24 RU RU2017102266A patent/RU2663813C2/ru active
- 2015-06-24 WO PCT/IB2015/054728 patent/WO2015198235A1/en not_active Ceased
- 2015-06-24 US US15/308,057 patent/US9685308B2/en active Active
- 2015-06-24 JP JP2016567349A patent/JP6835592B2/ja active Active
- 2015-06-24 EP EP15741603.3A patent/EP3161315B1/en active Active
- 2015-06-24 CN CN201580024517.7A patent/CN107076133B/zh active Active
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2019
- 2019-07-30 JP JP2019139803A patent/JP2019203201A/ja not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| CN107076133B (zh) | 2019-06-18 |
| US20170076925A1 (en) | 2017-03-16 |
| CN107076133A (zh) | 2017-08-18 |
| US9685308B2 (en) | 2017-06-20 |
| EP3161315B1 (en) | 2017-12-20 |
| RU2017102266A (ru) | 2018-07-31 |
| KR20170026331A (ko) | 2017-03-08 |
| KR102154893B1 (ko) | 2020-09-11 |
| RU2663813C2 (ru) | 2018-08-10 |
| EP3161315A1 (en) | 2017-05-03 |
| WO2015198235A1 (en) | 2015-12-30 |
| JP2017522481A (ja) | 2017-08-10 |
| JP2019203201A (ja) | 2019-11-28 |
| JP6835592B2 (ja) | 2021-02-24 |