KR102154893B1 - 게터 펌핑 시스템 - Google Patents

게터 펌핑 시스템 Download PDF

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Publication number
KR102154893B1
KR102154893B1 KR1020167031408A KR20167031408A KR102154893B1 KR 102154893 B1 KR102154893 B1 KR 102154893B1 KR 1020167031408 A KR1020167031408 A KR 1020167031408A KR 20167031408 A KR20167031408 A KR 20167031408A KR 102154893 B1 KR102154893 B1 KR 102154893B1
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KR
South Korea
Prior art keywords
getter
linear
pumping system
heaters
cartridges
Prior art date
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KR1020167031408A
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English (en)
Korean (ko)
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KR20170026331A (ko
Inventor
안토니오 보누치
파올로 마니니
파브리지오 시비에로
피에르지오르지오 소나토
Original Assignee
사에스 게터스 에스.페.아.
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Publication of KR20170026331A publication Critical patent/KR20170026331A/ko
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Publication of KR102154893B1 publication Critical patent/KR102154893B1/ko
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020167031408A 2014-06-26 2015-06-24 게터 펌핑 시스템 Active KR102154893B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ITMI20141157 2014-06-26
ITMI2014A001157 2014-06-26
PCT/IB2015/054728 WO2015198235A1 (en) 2014-06-26 2015-06-24 Getter pumping system

Publications (2)

Publication Number Publication Date
KR20170026331A KR20170026331A (ko) 2017-03-08
KR102154893B1 true KR102154893B1 (ko) 2020-09-11

Family

ID=51398734

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020167031408A Active KR102154893B1 (ko) 2014-06-26 2015-06-24 게터 펌핑 시스템

Country Status (7)

Country Link
US (1) US9685308B2 (enExample)
EP (1) EP3161315B1 (enExample)
JP (2) JP6835592B2 (enExample)
KR (1) KR102154893B1 (enExample)
CN (1) CN107076133B (enExample)
RU (1) RU2663813C2 (enExample)
WO (1) WO2015198235A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7365693B2 (ja) * 2016-11-04 2023-10-20 ティーエーイー テクノロジーズ， インコーポレイテッド マルチスケール捕捉タイプ真空ポンピングを用いた高性能ｆｒｃの改良された持続性のためのシステムおよび方法
CN112012908A (zh) * 2020-09-01 2020-12-01 宁波盾科新材料有限公司 一种吸气泵及使用该吸气泵的移动储罐
US20250264093A1 (en) * 2022-08-01 2025-08-21 Saes Getters S.P.A. Snap-on getter pump assembly and its use
GB2628573A (en) * 2023-03-29 2024-10-02 Edwards Ltd Gas capture element
WO2025209901A1 (en) 2024-04-04 2025-10-09 Saes Getters S.P.A. High-performance getter pump

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001357814A (ja) 2000-06-15 2001-12-26 Jeol Ltd 極高真空スパッタイオンポンプ
JP2011517836A (ja) 2008-03-28 2011-06-16 サエス ゲッターズ ソチエタ ペル アツィオニ ゲッタポンプ及びイオンポンプを具備する複合排気システム

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2034633C3 (de) * 1969-07-24 1979-10-25 S.A.E.S. Getters S.P.A., Mailand (Italien) Kartusche für eine Getterpumpe
JPS53131511A (en) * 1977-04-22 1978-11-16 Hitachi Ltd Non-evaporation type cetter pump
JPH03189380A (ja) * 1989-12-20 1991-08-19 Jeol Ltd ゲッタポンプ
JPH0667870U (ja) * 1991-02-02 1994-09-22 株式会社日本製鋼所 高真空排気装置
US5154582A (en) 1991-08-20 1992-10-13 Danielson Associates, Inc. Rough vacuum pump using bulk getter material
IT1255438B (it) * 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US5972183A (en) * 1994-10-31 1999-10-26 Saes Getter S.P.A Getter pump module and system
US5911560A (en) 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
IT1274478B (it) 1995-05-11 1997-07-17 Getters Spa Insieme di riscaldamento per pompe getter e purificatori di gas
IT237018Y1 (it) * 1995-07-10 2000-08-31 Getters Spa Pompa getter perfezionata in particolare per uno strumento dianalisi chimiche portatile
FR2750248B1 (fr) * 1996-06-19 1998-08-28 Org Europeene De Rech Dispositif de pompage par getter non evaporable et procede de mise en oeuvre de ce getter
FR2760089B1 (fr) 1997-02-26 1999-04-30 Org Europeene De Rech Agencement et procede pour ameliorer le vide dans un systeme a vide tres pousse
IT1295340B1 (it) * 1997-10-15 1999-05-12 Getters Spa Pompa getter ad elevata velocita' di assorbimento di gas
IT1302694B1 (it) * 1998-10-19 2000-09-29 Getters Spa Dispositivo di schermatura mobile in funzione della temperatura trapompa getter e pompa turbomolecolare collegate in linea.
JP3565153B2 (ja) * 2000-09-26 2004-09-15 日産自動車株式会社 ゲッタ装置およびセンサ
JP3828487B2 (ja) * 2002-12-24 2006-10-04 三菱電機株式会社 非蒸発型ゲッター
CN200958468Y (zh) * 2006-10-25 2007-10-10 北京有色金属研究总院 一种使用安全大抽速吸气剂泵
JP5194534B2 (ja) * 2007-04-18 2013-05-08 パナソニック株式会社 真空処理装置
ITMI20090402A1 (it) * 2009-03-17 2010-09-18 Getters Spa Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica
CN201865882U (zh) * 2010-11-26 2011-06-15 中国航天科工集团第二研究院二○三所 一种用于氢原子频标的外加热式钛基吸气剂泵
ITMI20120872A1 (it) 2012-05-21 2013-11-22 Getters Spa Leghe getter non evaporabili particolarmente adatte per l'assorbimento di idrogeno e azoto
ITMI20121732A1 (it) 2012-10-15 2014-04-16 Getters Spa Pompa getter
ITMI20131921A1 (it) 2013-11-20 2015-05-21 Getters Spa Leghe getter non evaporabili particolarmente adatte per l'assorbimento di idrogeno e monossido di carbonio
TWI660125B (zh) * 2014-04-03 2019-05-21 義大利商沙斯格特斯公司 吸氣泵

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001357814A (ja) 2000-06-15 2001-12-26 Jeol Ltd 極高真空スパッタイオンポンプ
JP2011517836A (ja) 2008-03-28 2011-06-16 サエス ゲッターズ ソチエタ ペル アツィオニ ゲッタポンプ及びイオンポンプを具備する複合排気システム

Also Published As

Publication number Publication date
CN107076133B (zh) 2019-06-18
US20170076925A1 (en) 2017-03-16
CN107076133A (zh) 2017-08-18
RU2017102266A3 (enExample) 2018-07-31
US9685308B2 (en) 2017-06-20
EP3161315B1 (en) 2017-12-20
RU2017102266A (ru) 2018-07-31
KR20170026331A (ko) 2017-03-08
RU2663813C2 (ru) 2018-08-10
EP3161315A1 (en) 2017-05-03
WO2015198235A1 (en) 2015-12-30
JP2017522481A (ja) 2017-08-10
JP2019203201A (ja) 2019-11-28
JP6835592B2 (ja) 2021-02-24

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