CN106835051A - Wire rod winding film coating machine - Google Patents

Wire rod winding film coating machine Download PDF

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Publication number
CN106835051A
CN106835051A CN201710209133.3A CN201710209133A CN106835051A CN 106835051 A CN106835051 A CN 106835051A CN 201710209133 A CN201710209133 A CN 201710209133A CN 106835051 A CN106835051 A CN 106835051A
Authority
CN
China
Prior art keywords
wire rod
roller
guide roller
vacuum chamber
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201710209133.3A
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Chinese (zh)
Other versions
CN106835051B (en
Inventor
陈自新
朱海锋
郑立冬
李伟
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuxi Guangrun Vacuum Technology Co Ltd
Original Assignee
Wuxi Guangrun Vacuum Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuxi Guangrun Vacuum Technology Co Ltd filed Critical Wuxi Guangrun Vacuum Technology Co Ltd
Priority to CN201710209133.3A priority Critical patent/CN106835051B/en
Publication of CN106835051A publication Critical patent/CN106835051A/en
Application granted granted Critical
Publication of CN106835051B publication Critical patent/CN106835051B/en
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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0207Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the work being an elongated body, e.g. wire or pipe
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Abstract

The present invention relates to wire rod winding film coating machine, including vacuum chamber, the reel system of wire rod is provided with the inside of the vacuum chamber, for the coating system in wire rod surface coating, for the water-cooled copper plate for cooling down and spray silicone oil device for spraying silicone oil, also set up the pumped vacuum systems for keeping high vacuum environment in vacuum chamber in the side of the vacuum chamber;This structural volume is compact succinct, and the nonmetallic materials such as the metal material such as silver-plated, golden, nickel or silica on wire rod can be realized using the present invention, and the wire rod after plated film can be used for the absorbable of medical industry and exempt to tear the fields such as type operation wire rod open.Spray silicone oil device can spray protectiveness material in wire surface, greatly improve the life-span of wire rod.The design of coating chamber can recycle the precious metal material recovery being deposited on during work on locular wall, substantially reduce coating cost.Wire rod is carried out into many times in the present invention turn back that sedimentation time can be made to be multiplied, substantially increase the utilization rate of target.

Description

Wire rod winding film coating machine
Technical field
The present invention relates to winding film plating apparatus field, more particularly to wire rod winding film coating machine.
Background technology
At present, traditional winding film plating technology cannot realize that, in wire rod plating metal on surface and nonmetallic materials, it cannot expire Sufficient customer demand, in the urgent need to design it is a kind of can be in wire rod plating metal on surface or the winding film coating machine of nonmetallic materials.
The content of the invention
The applicant is directed to above-mentioned existing issue, has carried out Improvement, there is provided a kind of wire rod winding film coating machine, it is not only Can realize to wire surface metallization and nonmetallic materials, moreover it is possible to realize spraying silicone oil in wire surface, substantially increase The service life of wire rod.
The technical solution adopted in the present invention is as follows:
Wire rod winding film coating machine, including vacuum chamber, the winding system of wire rod is provided with the inside of the vacuum chamber System, for the coating system in wire rod surface coating, for the water-cooled copper plate for cooling down and spray silicone oil device for spraying silicone oil, The pumped vacuum systems for keeping high vacuum environment in vacuum chamber is also set up in the side of the vacuum chamber;
The concrete structure of the pumped vacuum systems is as follows:
Including the main valve with main valve valve, the entrance of the main valve is connected with vacuum chamber, and the outlet of the main valve is led to The first vacuum tube connection roughing valve door is crossed, the roughing valve door connects essence and takes out valve and prime respectively by the second vacuum pipe Pump, the essence is taken out valve and is also connected with diffusion pump;
The concrete structure of the reel system is as follows:
Including putting roller and receiving roller, it is described put roller and receive be linked in sequence first by needing same group of wire rod of plated film between roller Guide roller, the second guide roller, the 3rd guide roller and the 4th guide roller;
The concrete structure of the coating system is as follows:
Including setting coating chamber, in being respectively provided with upper flat target and lower plane target in the coating chamber.
Its further technical scheme is:
The wire rod sequentially once winds and turns back by the first guide roller, the second guide roller and along the 3rd guiding roller surface To the second guide roller, sequentially by the 3rd guide roller and the 4th guide roller after then being wound along the second guide roller surface second;
The choke valve for controlling air pressure range in vacuum chamber is also set up in the entrance of the vacuum chamber;
Described to put roller and be connected with the output end for putting roller motor, the roller of receiving is connected with the output end of receipts roller motor;
The coating chamber is arranged at the second guide roller, the periphery of the 3rd guide roller;
Gas tube, the water-cooled are also set up between the upper flat target and lower plane target, in the side of the coating chamber Copper coin is both secured on the base plate of coating chamber with lower plane target;
Uniformly dialled for winding wire coil in receiving between roller and the 4th guide roller, being also set up in the vacuum chamber Line apparatus.
Beneficial effects of the present invention are as follows:
This structural volume is compact succinct, and the metal material such as silver-plated, golden, nickel or oxygen on wire rod can be realized using the present invention The nonmetallic materials such as SiClx, the wire rod after plated film can be used for the absorbable of medical industry and exempt to tear the fields such as type operation wire rod open.Spray silicon Oily device can spray protectiveness material in wire surface, greatly improve the life-span of wire rod.The design of coating chamber can make work When be deposited on precious metal material recovery on locular wall and recycle, substantially reduce coating cost.Wire rod is carried out in the present invention Turning back for many times can make sedimentation time be multiplied, and substantially increase the utilization rate of target.Roller is put in the present invention, roller is received by servo electricity Machine is synchronized with the movement, and it does not use and passively unreels, and reduces the internal stress of wire rod, substantially increases the mechanical performance of wire rod.Water-cooled The design of copper coin can make operating temperature reduction in coating process, it is to avoid accumulation heats up, and can also reduce the internal stress of wire rod.Dial traditional thread binding The design put is more uniformly distributed the winding winding process of wire rod.
Brief description of the drawings
Fig. 1 is front view of the invention.
Fig. 2 is top view of the present invention.
Fig. 3 is the structural representation inside vacuum chamber in the present invention.
Fig. 4 is the structural representation inside coating chamber in the present invention.
Fig. 5 is winding schematic diagram of the wire rod on each guide roller.
Wherein:1st, vacuum chamber;2nd, main valve;3rd, main valve valve;4th, the first vacuum pipe;5th, roughing valve door;6th, second is true Vacant duct;7th, essence takes out valve;8th, fore pump;9th, diffusion pump;10th, choke valve;11st, roller motor is put;12nd, roller motor is received;13rd, put Roller;14th, the first guide roller;15th, the second guide roller;16th, coating chamber;17th, the 3rd guide roller;18th, silicone oil device is sprayed;19th, the 4th Guide roller;20th, thread-moving device;21st, roller is received;22nd, upper flat target;23rd, water-cooled copper plate;24th, gas tube;25th, lower plane target.
Specific embodiment
Specific embodiment of the invention is illustrated below.
As shown in Figure 1 and Figure 2, wire rod winding film coating machine includes vacuum chamber 1, and line is provided with the inside of vacuum chamber 1 The reel system of material, for the coating system in wire rod surface coating, for cool down water-cooled copper plate 23 and for spraying silicone oil Spray silicone oil device 18, also set up for keeping the vacuumizing for high vacuum environment in vacuum chamber 1 to be in the side of vacuum chamber 1 System.
As shown in Figure 1 and Figure 2, the concrete structure of pumped vacuum systems is as follows:
Including the main valve 2 with main valve valve 3, the entrance of main valve 2 is connected with vacuum chamber 1, and the outlet of main valve 2 is by the The connection roughing valve of one vacuum tube 4 door 5, roughing valve door 5 is connected essence by the second vacuum pipe 6 and takes out valve 7 and fore pump 8 respectively, Essence is taken out valve 7 and is also connected with diffusion pump 9.
As shown in Figure 2 and Figure 3, the concrete structure of reel system is as follows:
Including putting roller 13 and receiving roller 21, put roller 13 and be connected with the output end for putting roller motor 11, receive roller 21 and receive roller motor 12 Output end connection.Put roller 13 and receive roller 21 between by need same group of wire rod of plated film be linked in sequence the first guide roller 14, Second guide roller 15, the 3rd guide roller 17 and the 4th guide roller 19.As shown in figure 5, wire rod is sequentially by the first guide roller 14, Two guide rollers 15 and once being wound along the surface of the 3rd guide roller 17 are turned back to the second guide roller 15, then along the second guide roller 15 Sequentially by the 3rd guide roller 17 and the 4th guide roller 19 after surface second winding, wire rod is turned back for three times in the present embodiment, Many times can also be carried out according to actual condition to turn back, sedimentation time is multiplied.In upper flat target 22 and lower plane target 25 it Between, in the side of coating chamber 16 also set up the gas tube 24 for being filled with working gas, water-cooled copper plate 23 is equal with lower plane target 25 It is fixed on the base plate of coating chamber 16.Also set up for making line between the guide roller 19 of roller 21 and the 4th is received, in vacuum chamber 1 Material circumvolution is around uniform thread-moving device 20.
As shown in Figure 3, Figure 4, the concrete structure of coating system is as follows:
Including setting coating chamber 16, coating chamber 16 is arranged at the second guide roller 15, the periphery of the 3rd guide roller 17.In plated film Be respectively provided with flat target 22 and lower plane target 25 in room 16, above-mentioned upper flat target 22 and lower plane target 25 be it is laterally disposed, It is laterally disposed so that sedimentation time utilization rate is reached into highest in the case where vacuum chamber area is not reduced.
The choke valve 10 for controlling air pressure range in vacuum chamber 1 is also set up in the entrance of above-mentioned vacuum chamber 1.
Specific work process of the invention is as follows:
As shown in Figure 1 and Figure 2, after vacuum chamber 1 is closed, fore pump 8, roughing valve 5 are opened, now in vacuum chamber 1 Gas passes through outside main valve 2, the first vacuum pipe 4, roughing valve the 5, second vacuum pipe 6 of door and prime pumped room.Work as vacuum chamber When air pressure in room 1 is reduced to below 5pa by a standard atmospheric pressure, roughing valve door 5 is closed, open main valve valve 3, now very Gas in plenum chamber 1 takes out valve 7, the second vacuum pipe 6 and fore pump 8 via main valve 2, diffusion pump 9 (preheating in advance is completed), essence It is evacuated to outdoor.The above-mentioned course of work is circulated up to vacuum needed for operating mode and above-mentioned air suction mode is kept in the course of the work, treated Vacuum is evacuated to 3*10-3During below Pa, working gas is filled with gas tube 24, vacuum is controlled by adjusting the angle of choke valve 10 Scope needed for air pressure in chamber 1.Upper flat target 22 carries out glow discharge with the making alive of lower plane target 24 simultaneously, treats glow discharge Start plated film after process stabilization.Startup is put roller motor 11 and receives roller motor 12, and wire rod is transmitted by the first guide roller 14 and enters plating Inside film room 16, magnetic control is carried out by upper flat target 22 and lower plane target 24 when by the second guide roller 15, three guide rollers 17 Sputter coating material is realized the reduction of operating temperature by water-cooled copper plate 23 in the course of the work on wire rod, prevents accumulation from heating up, Simultaneously can also be coiled again after wire surface spray silicone oil by spray silicone oil device 18 in coating process, closed successively after the completion of plated film Close and put roller motor 11 and receive roller motor 12, the power supply of flat target 22 and lower plane target 24 in closing treats that diffusion pump 9 is closed and cooled down Essence is closed afterwards takes out valve 7 and fore pump 8.Flat target 22 is gone up in the present invention and lower plane target 24 can be used direct current, intermediate frequency or video Power supply, it is above-mentioned put roller motor 11 and receive roller motor 12 be servomotor, in the course of the work control folding and unfolding roller rotation.
The present invention can realize the metal materials such as silver-plated on wire rod, nickel or such as silica nonmetallic materials, spray silicone oil Device 18 can spray protectiveness material in wire surface, improve the life-span of wire rod, and wire rod is carried out into many times of foldings in the present invention Returning can make sedimentation time be multiplied, and substantially increase deposition utilization rate.Roller is put in the present invention, roller is received by servomotor synchronization Motion, it does not use and passively unreels, and greatly reduces the internal stress of wire rod, and the design of water-cooled copper plate can make to be worked in coating process Temperature reduction, it is to avoid accumulation heats up, the winding winding process for being related to make wire rod of thread-moving device is more uniformly distributed.
Above description is explanation of the invention, is not the restriction to inventing, and limited range of the present invention is referring to right It is required that, in the case of without prejudice to basic structure of the invention, the present invention can make any type of modification.

Claims (7)

1. wire rod winding film coating machine, it is characterised in that:Including vacuum chamber (1), band is set in the inside of the vacuum chamber (1) Have wire rod reel system, for the coating system in wire rod surface coating, for cool down water-cooled copper plate (23) and for spraying Spray silicone oil device (18) of silicone oil is applied, is also set up for keeping vacuum chamber (1) Nei Gaozhen in the side of the vacuum chamber (1) The pumped vacuum systems of Altitude;
The concrete structure of the pumped vacuum systems is as follows:
Including the main valve (2) with main valve valve (3), the entrance of the main valve (2) is connected with vacuum chamber (1), the main valve (2) outlet connects roughing valve door (5) by the first vacuum tube (4), and roughing valve door (5) is by the second vacuum pipe (6) Connection essence takes out valve (7) and fore pump (8) respectively, and the essence is taken out valve (7) and is also connected with diffusion pump (9);
The concrete structure of the reel system is as follows:
It is described to put between roller (13) and receipts roller (21) by needing same group of wire rod of plated film including putting roller (13) and receiving roller (21) Be linked in sequence the first guide roller (14), the second guide roller (15), the 3rd guide roller (17) and the 4th guide roller (19);
The concrete structure of the coating system is as follows:
Including setting coating chamber (16), upper flat target (22) and lower plane target (25) are respectively provided with the coating chamber (16).
2. wire rod winding film coating machine as claimed in claim 1, it is characterised in that:The wire rod is sequentially by the first guide roller (14), the second guide roller (15) and once being wound along the 3rd guide roller (17) surface is turned back to the second guide roller (15), Ran Houyan Sequentially by the 3rd guide roller (17) and the 4th guide roller (19) after second guide roller (15) surface second winding.
3. wire rod winding film coating machine as claimed in claim 1, it is characterised in that:In the vacuum chamber (1) entrance also It is provided for controlling the choke valve (10) of vacuum chamber (1) interior air pressure range.
4. wire rod winding film coating machine as claimed in claim 1, it is characterised in that:It is described to put roller (13) and put roller motor (11) Output end is connected, and the roller (21) of receiving is connected with the output end of receipts roller motor (12).
5. wire rod winding film coating machine as claimed in claim 1, it is characterised in that:The coating chamber (16) is arranged at the second guiding The periphery of roller (15), the 3rd guide roller (17).
6. wire rod winding film coating machine as claimed in claim 1, it is characterised in that:In the upper flat target (22) and lower plane target (25) gas tube (24), the water-cooled copper plate (23) and lower plane target are also set up between, in the side of the coating chamber (16) (25) it is both secured on the base plate of coating chamber (16).
7. wire rod winding film coating machine as claimed in claim 1, it is characterised in that:In receive roller (21) and the 4th guide roller (19) it Between, also set up for making wire coil wind uniform thread-moving device (20) in the vacuum chamber (1).
CN201710209133.3A 2017-03-31 2017-03-31 Wire winding film plating machine Active CN106835051B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710209133.3A CN106835051B (en) 2017-03-31 2017-03-31 Wire winding film plating machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710209133.3A CN106835051B (en) 2017-03-31 2017-03-31 Wire winding film plating machine

Publications (2)

Publication Number Publication Date
CN106835051A true CN106835051A (en) 2017-06-13
CN106835051B CN106835051B (en) 2023-07-11

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110983285A (en) * 2019-12-31 2020-04-10 广东腾胜科技创新有限公司 Vacuum winding coating equipment capable of simultaneously coating multiple rolls of base materials
CN111378952A (en) * 2020-04-29 2020-07-07 义乌市森煌科技有限公司 Winding type film coating machine

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2635678Y (en) * 2003-06-24 2004-08-25 深圳市坦达尼真空表面技术有限公司 Multi-function rolling film-coating machine
CN105925962A (en) * 2016-06-30 2016-09-07 电子科技大学 Metal organic deposition winding film coating machine capable of achieving double-sided continuous multi-layer film coating
CN106435516A (en) * 2016-10-27 2017-02-22 无锡光润真空科技有限公司 Magnetic control and evaporation multifunctional winding film coating machine
CN206570398U (en) * 2017-03-31 2017-10-20 无锡光润真空科技有限公司 Wire rod winding film coating machine

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2635678Y (en) * 2003-06-24 2004-08-25 深圳市坦达尼真空表面技术有限公司 Multi-function rolling film-coating machine
CN105925962A (en) * 2016-06-30 2016-09-07 电子科技大学 Metal organic deposition winding film coating machine capable of achieving double-sided continuous multi-layer film coating
CN106435516A (en) * 2016-10-27 2017-02-22 无锡光润真空科技有限公司 Magnetic control and evaporation multifunctional winding film coating machine
CN206570398U (en) * 2017-03-31 2017-10-20 无锡光润真空科技有限公司 Wire rod winding film coating machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110983285A (en) * 2019-12-31 2020-04-10 广东腾胜科技创新有限公司 Vacuum winding coating equipment capable of simultaneously coating multiple rolls of base materials
CN111378952A (en) * 2020-04-29 2020-07-07 义乌市森煌科技有限公司 Winding type film coating machine

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