CN211772356U - Winding type fiber film coating device in magnetron sputtering - Google Patents
Winding type fiber film coating device in magnetron sputtering Download PDFInfo
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- CN211772356U CN211772356U CN201922161541.3U CN201922161541U CN211772356U CN 211772356 U CN211772356 U CN 211772356U CN 201922161541 U CN201922161541 U CN 201922161541U CN 211772356 U CN211772356 U CN 211772356U
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Abstract
The utility model provides a roll up formula fibre coating film device in magnetron sputtering, includes fibre silk thread, vacuum chamber, elevating platform and target support, the inside position department that is located target support one side of vacuum chamber is equipped with unwinding device, and the position department of opposite side is equipped with the coiling mechanism, the inside left bank of filaments that is close to unwinding device position that is equipped with of vacuum chamber, the inside right bank of filaments that is close to coiling mechanism position that is equipped with of vacuum chamber, the fibre silk thread is followed unwinding device and is followed the back and expand the back and carry out the rolling by the coiling mechanism between left bank of filaments and right bank of filaments. The utility model has the advantages that: the device design simple structure is reasonable, and convenient to use uses this device to carry out magnetron sputtering coating film for the fibre line, and the fibre silk thread moves around between the pulley, and the effective coating film's of fibre silk thread stroke increases for the surface of fibre silk thread obtains abundant coating film, has guaranteed the comprehensive and the homogeneity of fibre coating film, has also guaranteed the efficiency of coating film.
Description
Technical Field
The utility model relates to a vacuum magnetron sputtering coating film technical field, concretely relates to winding formula fibre coating film device in magnetron sputtering.
Background
The fiber coating has great value in practical application, the metal-plated fiber is a composite fiber taking metal as a sheath and non-metal fiber as a core, and the metal-plated fiber can be divided into the following parts according to the metal of the coating: the composite fiber has the advantages of keeping the flexibility and mechanical property of the original core fiber, along with the reflection performance and conductivity to electromagnetic waves and infrared rays, prolonging the service life and the like according to different coatings. For example, the metal-plated glass fiber has good electromagnetic wave reflection performance, so the metal-plated glass fiber is used as an interference wire for resisting radar in military, and the silver-plated glass fiber can be welded and can be used as a lead; the aluminized glass fiber can reflect a large amount of heat energy and can be used as high-temperature protective clothing and the like.
In the prior art, the fiber is coated with a film by an electrochemical method, but when the fiber is coated with aluminum by the method, pollution is easily caused, and the aluminum film is not very dense. The magnetron sputtering related to the device is one of physical vapor deposition, has the advantage of strong film adhesion and has no pollution to the environment. However, because the fiber is fine, it is difficult to ensure that the surface of the fiber can be completely and uniformly coated in the magnetron sputtering coating process, and therefore, how to ensure the completeness and uniformity of the coating becomes a technical problem to be solved in the present invention.
SUMMERY OF THE UTILITY MODEL
To the above problems existing in the prior art, an object of the present invention is to provide a winding fiber coating device in magnetron sputtering for improving the coating comprehensiveness and uniformity.
The utility model discloses technical scheme as follows:
the utility model provides a roll up formula fibre coating film device in magnetron sputtering, its characterized in that includes fibre silk thread, vacuum chamber, elevating platform and target support, the inside position department that is located target support one side of vacuum chamber is equipped with unwinding device, and the position department of opposite side is equipped with the coiling mechanism, the inside left creel that is close to unwinding device position that is equipped with of vacuum chamber, the inside right creel that is close to coiling mechanism position that is equipped with of vacuum chamber, the fibre silk thread is rolled up by the coiling mechanism after launching between left creel and right creel after being emitted from unwinding device.
A roll up formula fibre coating film device in magnetron sputtering, a serial communication port, unwinding device includes motor, supporting seat, pinion, gear wheel, transmission shaft, receipts silk reel and supporting seat, the pinion sets up on the motor, and pinion and gear wheel meshing set up, the transmission shaft is worn to establish on the supporting seat, and its one end links to each other with the gear wheel, and the other end links to each other with the reel.
The winding type fiber film coating device in magnetron sputtering is characterized in that the unwinding device comprises a supporting seat, a transmission shaft, a wire unwinding winding drum and a supporting seat, the transmission shaft penetrates through the supporting seat, and one end of the transmission shaft is connected with the winding drum.
The winding type fiber coating device in magnetron sputtering is characterized in that the left lead frame comprises a support frame, a small pulley II, a large pulley VIII, a large pulley VI, a large pulley II, a large pulley IV and a lead-out through hole, the lead-out through hole is formed in the support frame, the large pulley VIII and the large pulley IV are arranged on the upper portion and the lower portion of the lead-out through hole, the large pulley VI and the large pulley II are arranged on the front portion and the rear portion of the lead-out through hole, and the small pulley II is arranged on the upper portion of the lead-out through hole.
The utility model provides a coiling formula fibre coating film device in magnetron sputtering, a serial communication port, right side silk frame includes support frame, big pulley VII, big pulley III, big pulley V, big pulley I, small pulley I and inlet wire through-hole, the inlet wire through-hole sets up on the support frame, big pulley VII and big pulley III set up in inlet wire through-hole top and bottom position department, big pulley V sets up in inlet wire through-hole front and back position department with big pulley I, small pulley I sets up in inlet wire through-hole dead ahead position department.
The utility model has the advantages that: the device design simple structure is reasonable, and convenient to use uses this device to carry out magnetron sputtering coating film for the fibre line, and the fibre silk thread moves around between the pulley, and the stroke of the effective coating film of fibre silk thread increases for the surface of fibre silk thread obtains abundant coating film, has guaranteed the comprehensiveness and the homogeneity of fibre coating film, has also guaranteed the efficiency of coating film, has important meaning to the manufacturing field of fibre coating film.
Drawings
Fig. 1 is a schematic view of the installation of the present invention;
FIG. 2 is a partial structure diagram of the present invention;
FIG. 3 is a drawing of the structure of the wire frame of the present invention;
FIG. 4 is a schematic view of the left wire frame of the present invention;
FIG. 5 is a schematic view of the right frame of the present invention;
in the figure: 1-sealing cover, 2-lifting platform, 3-left wire frame, 4-wire winding reel, 5-supporting bearing, 6-supporting seat, 7-transmission shaft, 8-big gear, 9-small gear, 10-motor, 11-fiber silk thread, 12-target support, 13-target, 14-cavity, 15-right wire frame, 16-wire unwinding reel, 17-supporting frame, 18-small pulley II, 19-big pulley VIII, 20-big pulley VI, 21-big pulley II, 22-big pulley IV, 23-small pulley VII, 24-big pulley V, 25-big pulley III, 26-big pulley I and 27-small pulley I.
Detailed Description
The technical scheme of the utility model is further described below with the accompanying drawings of the specification:
as shown in fig. 1-5, a winding type fiber coating device in magnetron sputtering comprises a sealing cover 1, a lifting table 2, a left wire frame 3, a wire winding drum 4, a supporting bearing 5, a supporting seat 6, a transmission shaft 7, a large gear 8, a small gear 9, a motor 10, a fiber wire 11, a target support 12, a target 13, a vacuum cavity 14, a right wire frame 15, a wire unwinding drum 16, a supporting frame 17, a small pulley II 18, a large pulley VIII 19, a large pulley VI 20, a large pulley II 21, a large pulley IV 22, a small pulley VII 23, a large pulley V24, a large pulley III 25, a large pulley I26 and a small pulley I27.
Example (b):
a winding type fiber coating device in magnetron sputtering comprises a fiber silk thread 11, a vacuum cavity 14, a lifting platform 2 and a target material support 12, wherein a sealing cover 1 is arranged at the top of the vacuum cavity 14, the lifting platform 2 is arranged on the sealing cover 1, the target material support 12 is arranged at the bottom of the vacuum cavity 14, a target material 13 is placed on the target material support 12, a cathode is connected to the target material 13, an anode is connected to the lifting platform 2, after the power is on, a part of target atoms sputtered from the target material 13 impact on the fiber silk thread 11, and finally, the target atoms deposit on the surface of the fiber silk thread 11.
An unwinding device is arranged at the position, located on one side of the target support 12, of the bottom of the vacuum cavity 14, a winding device is arranged at the position on the other side of the vacuum cavity, a left wire frame 3 is arranged inside the vacuum cavity 14 and close to the unwinding device, a right wire frame 15 is arranged inside the vacuum cavity 14 and close to the winding device, and the fiber silk threads 11 are unwound between the left wire frame 3 and the right wire frame 15 after being discharged from the unwinding device and then wound by the winding device.
In this embodiment, the winding device includes a motor 10, a support base 6, a pinion 9, a gearwheel 8, a transmission shaft 7, a wire winding drum 4 and the support base 6, the pinion 9 is arranged on the motor, the pinion 9 is meshed with the gearwheel 8, the transmission shaft 7 is arranged on the support base 6 in a penetrating manner, and one end of the transmission shaft is connected with the gearwheel 8 while the other end is connected with the drum 4; the motor 10 drives the pinion 9 to rotate, the pinion 9 drives the bull gear 8 to rotate, and the bull gear 8 drives the transmission shaft 7 to rotate through key connection; the section of the extending end of the wire winding reel 4 is rectangular, the wire winding reel 4 is driven by the transmission shaft 7 to rotate by directly inserting the rectangular groove of the transmission shaft 7, and the wire winding reel 4 drives the wire unwinding reel 16 to rotate. The support bearing 5 is placed in a counter bore of the support seat 6, and the whole winding device is supported by force, and the support seat 6 is fixed on the surface of the vacuum chamber 14 by screws.
The unwinding device and the winding device are basically the same in structure, the unwinding device is less than the winding device in structure by a motor 10, a pinion 9 and a gearwheel 8, the unwinding device comprises a supporting seat 6, a transmission shaft 7, a wire unwinding winding drum 16 and the supporting seat 6, the transmission shaft 7 is arranged on the supporting seat 6 in a penetrating mode, and one end of the transmission shaft is connected with the winding drum 4.
The left screw frame 3 comprises a supporting frame 17, a small pulley II 18, a large pulley VIII 19, a large pulley VI 20, a large pulley II 21, a large pulley IV 22 and an outgoing line through hole, wherein the small pulley II 18, the large pulley VIII 19, the large pulley VI 20, the large pulley II 21 and the large pulley IV 22 are all installed on the supporting frame 17 through pulley frames. The wire outlet through hole is formed in the supporting frame 17, the large pulley VIII 19 and the large pulley IV 22 are arranged on the upper portion and the lower portion of the wire outlet through hole, the large pulley VI 20 and the large pulley II 21 are arranged on the front portion and the rear portion of the wire outlet through hole, and the small pulley II 18 is located on the upper portion of the wire outlet through hole.
Right side silk frame 15 includes support frame 17, big pulley VII 23, big pulley V24, big pulley III 25, big pulley V24, big pulley I26, small pulley I27 and inlet wire through-hole, and big pulley VII 23, big pulley V24, big pulley III 25, big pulley V24, big pulley I26, small pulley I27 all install on support frame 17 through the pulley, and the inlet wire through-hole sets up on support frame 17, big pulley VII 23 and big pulley III 25 set up in inlet wire through-hole top and bottom position department, and big pulley V24 and big pulley I26 set up in inlet wire through-hole front and back position department, and small pulley I27 sets up in inlet wire through-hole dead ahead position department.
The fiber silk thread 11 enters from the inlet wire through hole of the right silk frame 15, and winds back and forth between the pulleys of the right silk frame 15 and the left silk frame 3, and then exits from the outlet wire through hole of the right silk frame 15, and the specific line of the fiber silk thread 11 winding is as follows: the wire releasing reel 16 → the small pulley I27 → the large pulley I26 → the large pulley II 21 → the large pulley III 25 → the large pulley IV 22 → the large pulley V24 → the large pulley VI 20 → the large pulley VII 23 → the large pulley VIII 19 → the small pulley II 18 → the wire retracting reel 4.
The working process is as follows:
firstly, the fiber silk thread 11 is wound in the thread groove of the silk unwinding reel 16, the silk unwinding reel 16 is inserted into the shaft, then the fiber silk thread 11 sequentially passes through the pulleys according to the route, and finally the end of the fiber silk thread 11 is fixed in the thread groove of the silk winding reel 4. After the sealing cover 1 is closed, the equipment is started, when the equipment normally works, the vacuum pump starts to pump out gas, and after a certain vacuum degree is reached, the lifting platform 2 is controlled to descend to reach the specified height. Applying an electric field, enabling a part of target atoms sputtered from the target material 13 to impact on the fiber yarn 11 and deposit, starting the motor 10, when the motor 10 drives the yarn winding reel 4 to rotate, the yarn unwinding reel 16 sends the fiber yarn 11, the yarn winding reel 4 winds the fiber yarn 11, and the surface coating of the fiber yarn 11 begins.
Claims (5)
1. The utility model provides a roll up formula fibre coating film device in magnetron sputtering, its characterized in that, includes fibre silk thread (11), vacuum chamber (14), elevating platform (2) and target support (12), vacuum chamber (14) inside is equipped with unwinding device in the position department that is located target support (12) one side, and the position department of opposite side is equipped with coiling mechanism, vacuum chamber (14) inside is equipped with left bank of wires (3) being close to unwinding device position, and vacuum chamber (14) inside is equipped with right bank of wires (15) being close to coiling mechanism position, fibre silk thread (11) are rolled up by coiling mechanism after launching between left bank of wires (3) and right bank of wires (15) from unwinding device.
2. The winding type fiber coating device in magnetron sputtering according to claim 1, wherein the unwinding device comprises a motor (10), a support seat (6), a pinion (9), a gearwheel (8), a transmission shaft (7), a winding drum (4) and the support seat (6), the pinion (9) is arranged on the motor, the pinion (9) is meshed with the gearwheel (8), the transmission shaft (7) is arranged on the support seat (6) in a penetrating manner, and one end of the transmission shaft is connected with the gearwheel (8) while the other end is connected with the winding drum (4).
3. The winding type fiber coating device in magnetron sputtering as claimed in claim 1, wherein the unwinding device comprises a support base (6), a transmission shaft (7), a wire unwinding reel (16) and the support base (6), the transmission shaft (7) is arranged on the support base (6) in a penetrating way, and one end of the transmission shaft is connected with the reel (4).
4. The winding type fiber coating device in magnetron sputtering as claimed in claim 1, wherein the left lead frame comprises a support frame (17), a small pulley II (18), a large pulley VIII (19), a large pulley VI (20), a large pulley II (21), a large pulley IV (22) and a wire outlet through hole, the wire outlet through hole is formed in the support frame (17), the large pulley VIII (19) and the large pulley IV (22) are arranged above and below the wire outlet through hole, the large pulley VI (20) and the large pulley II (21) are arranged in the front and rear positions of the wire outlet through hole, and the small pulley II (18) is arranged above the wire outlet through hole.
5. The winding type fiber coating device in magnetron sputtering as claimed in claim 1, wherein the right guide frame comprises a support frame (17), a large pulley VII (23), a large pulley III (25), a large pulley V (24), a large pulley I (26), a small pulley I (27) and a wire inlet through hole, the wire inlet through hole is arranged on the support frame (17), the large pulley VII (23) and the large pulley III (25) are arranged at the upper and lower positions of the wire inlet through hole, the large pulley V (24) and the large pulley I (26) are arranged at the front and rear positions of the wire inlet through hole, and the small pulley I (27) is arranged at the position right in front of the wire inlet through hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922161541.3U CN211772356U (en) | 2019-12-05 | 2019-12-05 | Winding type fiber film coating device in magnetron sputtering |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922161541.3U CN211772356U (en) | 2019-12-05 | 2019-12-05 | Winding type fiber film coating device in magnetron sputtering |
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| CN211772356U true CN211772356U (en) | 2020-10-27 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110846892A (en) * | 2019-12-05 | 2020-02-28 | 浙江工业大学 | Winding type fiber film coating device in magnetron sputtering |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110846892A (en) * | 2019-12-05 | 2020-02-28 | 浙江工业大学 | Winding type fiber film coating device in magnetron sputtering |
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