CN106435516A - Magnetic control and evaporation multifunctional winding film coating machine - Google Patents
Magnetic control and evaporation multifunctional winding film coating machine Download PDFInfo
- Publication number
- CN106435516A CN106435516A CN201610956595.7A CN201610956595A CN106435516A CN 106435516 A CN106435516 A CN 106435516A CN 201610956595 A CN201610956595 A CN 201610956595A CN 106435516 A CN106435516 A CN 106435516A
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- vacuum chamber
- pump
- film
- film coating
- roller
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to a magnetic control and evaporation multifunctional winding film coating machine comprising a vacuum cavity. Vacuum air pumping systems used for keeping the high-vacuum environment in the vacuum cavity are arranged at the two ends of the vacuum cavity. The bottom of the vacuum cavity is connected with an evaporation assembly through a flange. A winding film coating work system with a flexible winding base material is further arranged in the vacuum cavity. By means of a plane target in the magnetic control and evaporation multifunctional winding film coating machine, magnetic control film coating can be independently conducted; by means of the evaporation assembly in the magnetic control and evaporation multifunctional winding film coating machine, evaporation film coating can be independently conducted; meanwhile, magnetic control film coating and evaporation film coating can also be conducted at the same time; and therefore the problem that because in the prior art, film coating machines are replaced to achieve different film coating methods, film layers where film coating is not completed are exposed in air and the coating binding force and components are influenced is solved.
Description
Technical field
The present invention relates to winding film plating field, more particularly to a kind of evaporation coating that integrates are steamed with the magnetic control of magnetic control film coating
Send out Multi-function rolling film-coating machine.
Background technology
At present, traditional winding film plating technology all only has simple function, for example, can only be evaporated plated film or can only carry out
Magnetic control film coating, carries out plated film if necessary to the different film plating process of realization and can only then change plated film machine, during machine is changed
Cause the film layer for not having plated film complete to expose and adsorb air in atmosphere, so as to adhesion and the composition of coating is affected, therefore compel to be essential
Design a kind of a kind of magnetic control evaporation Multi-function rolling film-coating machine that can meet multifunctional film-coating mode.
Content of the invention
The applicant is directed to above-mentioned existing issue, has carried out Improvement, provides a kind of magnetic control evaporation multifunction rolling around plating
Film machine, compared with a kind of traditional magnetic control evaporation Multi-function rolling film-coating machine, which not only has evaporation coating function, moreover it is possible to while entering
Row magnetic control film coating, it is to avoid needed to change film layer exposure, the reduction coating knot that machine causes to realize different film plating process in the past
Problem with composition, substantially increases plated film efficiency with joint efforts.
The technical solution adopted in the present invention is as follows：
A kind of magnetic control evaporates a kind of magnetic control of multipurpose and evaporates Multi-function rolling film-coating machine, including vacuum chamber, described true
The two ends of plenum chamber are provided for maintaining the vacuum-pumping system of high vacuum environment in the vacuum chamber, in the vacuum chamber
Bottom be connected with evaporative component by flange, also set up the winding with flexible winding base material in the inside of the vacuum chamber
Plated film work system；
The evaporative component adopts any one in vicariouss evaporation, resistance-type evaporation or electron beam evaporation, to realize
Material to be plated evaporate upwards after with the surface of the flexible winding base material in gaseous deposit to vacuum chamber；
The winding work system includes the first folding and unfolding roller and the second folding and unfolding roller, the first folding and unfolding roller and the second folding and unfolding roller
From top to bottom all by need same group of flexible winding base material of plated film be linked in sequence the first guide roller, jockey pulley, second be oriented to
It is connected with film coating roller after roller, the 3rd guide roller；Along the periphery of the film coating roller, in the vacuum chamber, also set up multiple planes
Target.
Its further technical scheme is：
The vacuum-pumping system is taken out pump, is maintained pump, valve and many pipeline connections to constitute by roughing vacuum pump, booster pump, essence；
The roughing vacuum pump is using any one in sliding vane rotary pump or slide valve pump；The booster pump is lobe pump；The essence takes out pump using expansion
Any one in scattered pump or molecular pump；The maintenance pump adopts sliding vane rotary pump；
The first vacuum chamber door and the second vacuum chamber door is movably connected with the both sides of the vacuum chamber, described
One vacuum chamber door and the second vacuum chamber door make the vacuum chamber closed in closure；
In the vacuum chamber, also set up for preventing induction evaporation mode partial contamination vacuum along the periphery of the film coating roller
The fixing water-cooled baffle of chamber；
The flat target is fixed on the inwall of the vacuum chamber by gripper shoe；
Movable type water cold apron, the movable type are also set up in the bottom of the film coating roller, on the evaporative component top
Water-cooled baffle is opened and closed by external motor and gear drive control, when the movable type water cold apron is opened, by the steaming
Sending out component plated film is evaporated to the flexible winding substrate surface in vacuum chamber；
The film coating roller is liquid cooling structure, and in the external connection refrigeration machine of the film coating roller, the refrigeration machine makes plating
Deflector roll temperature control is in the range of -15 DEG C to room temperature.
Beneficial effects of the present invention are as follows：
Present configuration is simple, easy to use, can individually carry out magnetic control film coating, utilization using the flat target in the present invention
Evaporative component in the present invention individually can be evaporated plated film, while the present invention can also carry out magnetic control film coating and evaporation simultaneously
Plated film, thus avoids changing plated film machine to realize different film plating process in the past, and the film layer for causing non-plated film to complete exposes
The impact coating binding force for causing in atmosphere and the problem of composition.The present invention passes through to arrange at the two ends of vacuum chamber and can be opened and closed
The first vacuum chamber door and the second vacuum chamber door, improve the convenience of feeding, discharge and maintenance in actual mechanical process, this
It has been the characteristics design compact structure of maximum coil diameter when invention is using folding and unfolding roller difference, the design has been saved space, reduced
The work load of vacuum-pumping system needed for high vacuum environment is safeguarded under comparable configuration, reduces pumpdown time.The other present invention
Be also provided with movable type water cold apron, when do not need evaporation coating when or evaporative component do not preheat when completing, the movable type water
Cold apron is closed, and when evaporative component preheating is completed, drives its movement to open using external motor and gear drive, you can
It is evaporated plated film.
Description of the drawings
Fig. 1 is the front view of the present invention.
Fig. 2 is the top view of Fig. 1.
Fig. 3 is the structural representation for winding work system in the present invention.
Fig. 4 is the structural representation of movable type water cold apron.
Wherein：1st, vacuum-pumping system；2nd, vacuum chamber；3rd, evaporative component；4th, the first vacuum chamber door；5th, the second vacuum
Chamber door；6th, the first folding and unfolding roller；7th, the second folding and unfolding roller；801st, the first guide roller；802nd, the second guide roller；9th, jockey pulley；10th, put down
Face target；11st, film coating roller；12nd, fixing water-cooled baffle；13rd, the 3rd guide roller；14th, movable type water cold apron.
Specific embodiment
The specific embodiment of the present invention is described below.
As shown in Figure 1 and Figure 2, a kind of magnetic control evaporation Multi-function rolling film-coating machine of the present invention includes vacuum chamber 2,
It is provided for maintaining the vacuum-pumping system 1 of high vacuum environment in vacuum chamber 2 at the two ends of vacuum chamber 2, in vacuum chamber 2
Bottom be connected with evaporative component 3 by flange, the inside of vacuum chamber 2 also set up with flexible winding base material winding plating
Film work system.Above-mentioned vacuum system 1 is taken out pump, is maintained pump, valve and many pipeline connections to constitute by roughing vacuum pump, booster pump, essence；
Roughing vacuum pump is using any one in sliding vane rotary pump or slide valve pump；Booster pump is lobe pump；Essence takes out pump using diffusion pump or molecular pump
In any one；Pump is maintained to adopt sliding vane rotary pump.As shown in Fig. 2 being movably connected with first in the both sides of above-mentioned vacuum chamber 2
Vacuum chamber door 4 and the second vacuum chamber door 5, the first vacuum chamber door 4 and the second vacuum chamber door 5 make vacuum chamber in closure
Room 2 is closed.
In the present invention evaporative component 3 using vicariouss evaporation or resistance-type evaporation or electron beam evaporation in any one,
To realize with the surface of the flexible winding base material in gaseous deposit to vacuum chamber 2 after material to be plated evaporates upwards.Above-mentioned sensing
Formula evaporation or resistance-type evaporation or electron beam evaporation are existing known technology.
As shown in figure 3, winding work system includes the first folding and unfolding roller 6 and the second folding and unfolding roller 7, the first folding and unfolding roller in the present invention
6 maximum coil diameter is identical with the maximum coil diameter of the second folding and unfolding roller 7, and the first folding and unfolding roller 6 and the second folding and unfolding roller 7 all pass through from top to bottom
Same group of flexible winding base material of plated film is needed to be linked in sequence the first guide roller 801, jockey pulley 9, the second guide roller the 802, the 3rd
It is connected with film coating roller 11 after guide roller 13；Along the periphery of film coating roller 11, in vacuum chamber 2, also set up multiple flat targets 10.Flat
Face target 10 is fixed on the gripper shoe of vacuum chamber 2 by gripper shoe.
In vacuum chamber 2, also set up for preventing induction evaporation mode partial contamination vacuum chamber 2 along the periphery of film coating roller 11
Fixing water-cooled baffle 12.Movable type water cold apron 14 is also set up in the bottom of film coating roller 11, on 3 top of evaporative component, mobile
Formula water-cooled baffle 14 is opened and closed by external motor and gear drive control, when movable type water cold apron 14 is opened, by evaporating
Component 3 is evaporated plated film to the flexible winding substrate surface in vacuum chamber 2.
The specific work process of the present invention is as follows：
As shown in Figure 1 and Figure 2, smoke what pump was constituted when starting working by the roughing vacuum pump in vacuum system 1, booster pump and essence
Gas in working environment is extracted out by three-level system, is evacuated to fine vacuum working environment by atmospheric pressure, and when the present invention works by
Pump and essence is maintained to take out the level two work of pump composition, the fine vacuum working environment needed for thus maintaining.When being evaporated plated film
When, after the completion of component preheating to be evaporated, drive gear drive to open movable type water cold apron 14 by external motor, work as steaming
When sending out component 3 using resistance-type evaporation mode, after make membrane material vaporization to be plated to the resistance heating in evaporative component 3
Flexible winding substrate surface to vacuum chamber 2 is deposited upwards, so as to realize evaporation coating；When evaporative component 3 is using sense
When answering formula evaporation mode, sensing membrane material to be plated using electromagnetic field of high frequency makes to be deposited as vacuum chamber upwards after its vaporization
Flexible winding substrate surface in 2, so as to also realize evaporation coating；When evaporative component 3 is using electron-beam evaporation mode, profit
Membrane material to be plated being heated with electron beam makes to deposit the flexible winding base material table as in vacuum chamber 2 after its vaporization upwards
Face, so as to also realize evaporation coating.When needing to carry out magnetic control film coating, under the high vacuum environment of vacuum chamber 2, in flat target
Apply back bias voltage on 10, by the noble gases ionization in vacuum room, the metal on gas ion bombardment flat target 10 after ionization
Target, forms thin film in the particle deposition for pounding to flexible winding substrate surface.
Above-mentioned first folding and unfolding roller 6 is when making to receive roller action, and the second folding and unfolding roller 7 then puts roller action, above-mentioned first receives in the same manner
Roller 6 is put when roller action is put, the second folding and unfolding roller 7 is made to receive roller action.
The present invention can achieve flexible parent metal surface and first rotate forward using flat target sputter coating, then invert evaporation coating；Or
Evaporation coating is first rotated forward, then is inverted using flat target magnetron sputtering plating；Or in flat target sputter coating evaporation coating；Or
Person is laminated or is mixed with plated film by above-mentioned three kinds of modes, and the number of plies and composition are set as needed.
It has been the characteristics design compact structure of maximum coil diameter when the present invention is using folding and unfolding roller difference, with the maximum volume of coater
As a example by the 700mm of footpath, when receiving roller using the second folding and unfolding roller, the first folding and unfolding roller is putting the characteristic of roller certainly, and the first folding and unfolding roller and second is received
Roller center is put away from the 400mm that may be designed as the maximum coil diameter slightly larger than 1/2nd, rather than the first folding and unfolding roller and the second folding and unfolding roller
It is all 700mm during theoretical maximum coil diameter, space has been saved in the design.
Above description is explanation of the invention, is not that limited range of the present invention is referring to right to the restriction that invents
Require, in the case of the basic structure without prejudice to the present invention, the present invention can make any type of modification.
Claims (7)
1. a kind of magnetic control evaporates Multi-function rolling film-coating machine, it is characterised in that：Including vacuum chamber (2), in the vacuum chamber
(2) two ends are provided for maintaining the vacuum-pumping system (1) of the interior high vacuum environment of the vacuum chamber (2), in the vacuum
The bottom of chamber (2) is connected with evaporative component (3) by flange, is also set up with flexibility in the inside of the vacuum chamber (2)
The winding film plating work system of winding base material；
Described evaporative component (3) are treated with realization using any one in vicariouss evaporation, resistance-type evaporation or electron beam evaporation
Plate after material evaporates upwards with the surface of the flexible winding base material in gaseous deposit to vacuum chamber (2)；
The winding work system includes the first folding and unfolding roller (6) and the second folding and unfolding roller (7), the first folding and unfolding roller (6) and second
Folding and unfolding roller (7) from top to bottom all by need same group of flexible winding base material of plated film be linked in sequence the first guide roller (801),
Power roller (9), the second guide roller (802), the 3rd guide roller (13) are connected with film coating roller (11) afterwards；Along the outer of the film coating roller (11)
In week, in the vacuum chamber (2), also set up multiple flat targets (10).
2. a kind of magnetic control evaporates Multi-function rolling film-coating machine as claimed in claim 1, it is characterised in that：The vacuum suction system
System (1) is taken out pump, is maintained pump, valve and many pipeline connections to constitute by roughing vacuum pump, booster pump, essence；The roughing vacuum pump adopts blade
Any one in pump or slide valve pump；The booster pump is lobe pump；The essence takes out pump using appointing in diffusion pump or molecular pump
Meaning is a kind of；The maintenance pump adopts sliding vane rotary pump.
3. a kind of magnetic control evaporates Multi-function rolling film-coating machine as claimed in claim 1, it is characterised in that：In the vacuum chamber
(2) both sides are movably connected with the first vacuum chamber door (4) and the second vacuum chamber door (5), the first vacuum chamber door
(4) and the second vacuum chamber door (5) closure when make the vacuum chamber (2) closed.
4. a kind of magnetic control evaporates Multi-function rolling film-coating machine as claimed in claim 1, it is characterised in that：In the vacuum chamber
(2), in, along the periphery of the film coating roller (11), the fixing water for preventing induction evaporation mode partial contamination vacuum chamber (2) is also set up
Cold apron (12).
5. a kind of magnetic control evaporates Multi-function rolling film-coating machine as claimed in claim 1, it is characterised in that：Flat target (10)
It is fixed on the inwall of the vacuum chamber (2) by gripper shoe.
6. a kind of magnetic control evaporates Multi-function rolling film-coating machine as claimed in claim 1, it is characterised in that：In the film coating roller
(11) bottom, on the evaporative component (3) top, movable type water cold apron (14), the movable type water cold apron are also set up
(14) opened and closed by external motor and gear drive control, when described movable type water cold apron (14) open, by the steaming
Sending out component (3) plated film is evaporated to the flexible winding substrate surface in vacuum chamber (2).
7. a kind of magnetic control evaporates Multi-function rolling film-coating machine as claimed in claim 1, it is characterised in that：Film coating roller (11)
For liquid cooling structure, in the external connection refrigeration machine of the film coating roller (11), the refrigeration machine make film coating roller temperature control-
15 DEG C to room temperature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610956595.7A CN106435516B (en) | 2016-10-27 | 2016-10-27 | Magnetic control evaporation multifunctional winding film coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610956595.7A CN106435516B (en) | 2016-10-27 | 2016-10-27 | Magnetic control evaporation multifunctional winding film coating machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106435516A true CN106435516A (en) | 2017-02-22 |
| CN106435516B CN106435516B (en) | 2020-04-21 |
Family
ID=58180052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610956595.7A Active CN106435516B (en) | 2016-10-27 | 2016-10-27 | Magnetic control evaporation multifunctional winding film coating machine |
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| Country | Link |
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| CN (1) | CN106435516B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106835051A (en) * | 2017-03-31 | 2017-06-13 | 无锡光润真空科技有限公司 | Wire rod winding film coating machine |
| CN107236933A (en) * | 2017-08-03 | 2017-10-10 | 肇庆市科润真空设备有限公司 | The filming equipment and method of a kind of flexible parent metal coating thick film |
| CN107557735A (en) * | 2017-10-17 | 2018-01-09 | 东莞市典雅五金制品有限公司 | Cathode arc target assembly and vacuum multi-arc ion plating machine |
| CN108642469A (en) * | 2018-07-09 | 2018-10-12 | 布勒莱宝光学设备（北京）有限公司 | Flexible product winding-type vacuum coater |
| CN110643969A (en) * | 2018-06-27 | 2020-01-03 | 北京铂阳顶荣光伏科技有限公司 | Vacuum evaporation equipment |
| CN110791744A (en) * | 2019-11-27 | 2020-02-14 | 无锡光润真空科技有限公司 | Split type multi-process vacuum coating device |
| CN111378952A (en) * | 2020-04-29 | 2020-07-07 | 义乌市森煌科技有限公司 | Winding type film coating machine |
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| CN104674175A (en) * | 2015-02-09 | 2015-06-03 | 常州工学院 | High-efficiency single-side reciprocating continuous-coating magnetron sputtering winding coating machine |
| CN104674182A (en) * | 2015-02-09 | 2015-06-03 | 常州工学院 | Magnetron sputtering winding coating machine capable of continuously coating in single-sided reciprocated way |
| CN104674176A (en) * | 2015-02-09 | 2015-06-03 | 常州工学院 | High-efficiency magnetron sputtering winding coating machine capable of continuously coating in double-sided reciprocated way |
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Patent Citations (5)
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| JP2001303249A (en) * | 2000-04-19 | 2001-10-31 | Hirano Koon Kk | Surface treatment apparatus for strip-like sheet |
| CN2844137Y (en) * | 2005-08-25 | 2006-12-06 | 北京有色金属研究总院 | Multifunctional continuous film plating device |
| CN104674175A (en) * | 2015-02-09 | 2015-06-03 | 常州工学院 | High-efficiency single-side reciprocating continuous-coating magnetron sputtering winding coating machine |
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| CN104674176A (en) * | 2015-02-09 | 2015-06-03 | 常州工学院 | High-efficiency magnetron sputtering winding coating machine capable of continuously coating in double-sided reciprocated way |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106835051A (en) * | 2017-03-31 | 2017-06-13 | 无锡光润真空科技有限公司 | Wire rod winding film coating machine |
| CN106835051B (en) * | 2017-03-31 | 2023-07-11 | 无锡光润真空科技有限公司 | Wire winding film plating machine |
| CN107236933A (en) * | 2017-08-03 | 2017-10-10 | 肇庆市科润真空设备有限公司 | The filming equipment and method of a kind of flexible parent metal coating thick film |
| CN107236933B (en) * | 2017-08-03 | 2024-02-02 | 肇庆市科润真空设备有限公司 | Coating equipment and method for thick film coating of flexible substrate |
| CN107557735A (en) * | 2017-10-17 | 2018-01-09 | 东莞市典雅五金制品有限公司 | Cathode arc target assembly and vacuum multi-arc ion plating machine |
| CN110643969A (en) * | 2018-06-27 | 2020-01-03 | 北京铂阳顶荣光伏科技有限公司 | Vacuum evaporation equipment |
| CN108642469A (en) * | 2018-07-09 | 2018-10-12 | 布勒莱宝光学设备（北京）有限公司 | Flexible product winding-type vacuum coater |
| CN110791744A (en) * | 2019-11-27 | 2020-02-14 | 无锡光润真空科技有限公司 | Split type multi-process vacuum coating device |
| CN111378952A (en) * | 2020-04-29 | 2020-07-07 | 义乌市森煌科技有限公司 | Winding type film coating machine |
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|---|---|
| CN106435516B (en) | 2020-04-21 |
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