CN106835051B - Wire winding film plating machine - Google Patents

Wire winding film plating machine Download PDF

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Publication number
CN106835051B
CN106835051B CN201710209133.3A CN201710209133A CN106835051B CN 106835051 B CN106835051 B CN 106835051B CN 201710209133 A CN201710209133 A CN 201710209133A CN 106835051 B CN106835051 B CN 106835051B
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China
Prior art keywords
wire
guide roller
roller
coating
vacuum chamber
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CN201710209133.3A
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Chinese (zh)
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CN106835051A (en
Inventor
陈自新
朱海锋
郑立冬
李伟
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Wuxi Gr Vacuum Technology Co ltd
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Wuxi Gr Vacuum Technology Co ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0207Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the work being an elongated body, e.g. wire or pipe
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention relates to a wire winding film plating machine, which comprises a vacuum chamber, wherein a winding system with a wire, a film plating system for plating films on the surface of the wire, a water-cooled copper plate for cooling and a silicone oil spraying device for spraying silicone oil are arranged in the vacuum chamber; the structure has small and compact volume, and the invention can realize silver plating, gold, nickel and other metal materials or silicon oxide and other nonmetallic materials on the wire, and the wire after plating can be used in the fields of absorbable and disassembly-free operation wire in the medical industry and the like. The silicone oil spraying device can spray protective materials on the surface of the wire rod, so that the service life of the wire rod is greatly prolonged. The design of the coating chamber can recycle precious metal materials deposited on the chamber wall during working, thereby greatly reducing the coating cost. In the invention, the wire is folded for multiple times, so that the deposition time is multiplied, and the utilization rate of the target is greatly improved.

Description

Wire winding film plating machine
Technical Field
The invention relates to the field of winding coating equipment, in particular to a wire winding coating machine.
Background
At present, the conventional winding coating technology cannot realize the metal coating and nonmetallic material coating on the surface of the wire, which cannot meet the requirements of customers, and a winding coating machine capable of coating the metal coating and nonmetallic material on the surface of the wire is urgently needed.
Disclosure of Invention
The applicant has made research and improvement to the above-mentioned existing problems, and provides a wire winding film plating machine, which not only can implement plating metal material and nonmetallic material on the surface of the wire, but also can implement spraying silicone oil on the surface of the wire, so that the service life of the wire is greatly prolonged.
The technical scheme adopted by the invention is as follows:
the wire winding film plating machine comprises a vacuum chamber, wherein a winding system with a wire, a film plating system for plating films on the surface of the wire, a water-cooled copper plate for cooling and a silicone oil spraying device for spraying silicone oil are arranged in the vacuum chamber, and a vacuumizing system for maintaining a high vacuum environment in the vacuum chamber is also arranged on one side of the vacuum chamber;
the vacuum pumping system has the following specific structure:
the device comprises a main valve with a main valve, wherein an inlet of the main valve is communicated with a vacuum chamber, an outlet of the main valve is connected with a rough pumping valve through a first vacuum pipe, the rough pumping valve is respectively connected with a fine pumping valve and a backing pump through a second vacuum pipe, and the fine pumping valve is also connected with a diffusion pump;
the specific structure of the winding system is as follows:
the device comprises a paying-off roller and a collecting roller, wherein the paying-off roller and the collecting roller are sequentially connected with a first guide roller, a second guide roller, a third guide roller and a fourth guide roller through the same group of wires needing coating;
the specific structure of the coating system is as follows:
comprises a coating chamber, wherein an upper plane target and a lower plane target are respectively arranged in the coating chamber.
The further technical scheme is as follows:
the wire rod sequentially passes through the first guide roller, the second guide roller and the third guide roller, is wound around the surface of the third guide roller for a first time and is turned back to the second guide roller, is wound around the surface of the second guide roller for a second time and sequentially passes through the third guide roller and the fourth guide roller;
a throttle valve for controlling the air pressure range in the vacuum chamber is also arranged at the inlet section of the vacuum chamber;
the roller releasing device comprises a roller releasing motor, a roller receiving motor, a roller releasing motor, a roller receiving motor and a roller receiving motor, wherein the roller releasing motor is connected with the output end of the roller releasing motor;
the coating chamber is arranged at the periphery of the second guide roller and the third guide roller;
an air charging pipe is arranged between the upper plane target and the lower plane target and at one side of the coating chamber, and the water-cooling copper plate and the lower plane target are both fixed on a bottom plate of the coating chamber;
and a wire pulling device for uniformly winding the wire coil is arranged between the winding roller and the fourth guide roller and in the vacuum chamber.
The beneficial effects of the invention are as follows:
the structure has small and compact volume, and the invention can realize silver plating, gold, nickel and other metal materials or silicon oxide and other nonmetallic materials on the wire, and the wire after plating can be used in the fields of absorbable and disassembly-free operation wire in the medical industry and the like. The silicone oil spraying device can spray protective materials on the surface of the wire rod, so that the service life of the wire rod is greatly prolonged. The design of the coating chamber can recycle precious metal materials deposited on the chamber wall during working, thereby greatly reducing the coating cost. In the invention, the wire is folded for multiple times, so that the deposition time is multiplied, and the utilization rate of the target is greatly improved. According to the invention, the unreeling roller and the reeling roller synchronously move by the servo motor, and the passive unreeling is not adopted, so that the internal stress of the wire is reduced, and the mechanical property of the wire is greatly improved. The design of the water-cooled copper plate can reduce the working temperature in the coating process, avoid accumulated temperature rise and reduce the internal stress of the wire rod. The wire pulling device is designed to make the winding process of the wire more uniform.
Drawings
Fig. 1 is a front view of the present invention.
Fig. 2 is a top view of the present invention.
Fig. 3 is a schematic view of the structure of the vacuum chamber in the present invention.
FIG. 4 is a schematic view of the structure of the interior of the coating chamber according to the present invention.
Fig. 5 is a schematic view of the winding of the wire on each guide roller.
Wherein: 1. a vacuum chamber; 2. a main valve; 3. a main valve; 4. a first vacuum conduit; 5. a rough pumping valve; 6. a second vacuum line; 7. a fine pumping valve; 8. a backing pump; 9. a diffusion pump; 10. a throttle valve; 11. a roller discharge motor; 12. a roller collecting motor; 13. placing a roller; 14. a first guide roller; 15. a second guide roller; 16. a film plating chamber; 17. a third guide roller; 18. a silicone oil spraying device; 19. a fourth guide roller; 20. a wire pulling device; 21. a roller is retracted; 22. an upper planar target; 23. water-cooling the copper plate; 24. an inflation tube; 25. a lower planar target.
Detailed Description
The following describes specific embodiments of the present invention.
As shown in fig. 1 and 2, the wire winding film plating machine comprises a vacuum chamber 1, a winding system with a wire, a film plating system for plating film on the surface of the wire, a water-cooled copper plate 23 for cooling and a silicone oil spraying device 18 for spraying silicone oil are arranged in the vacuum chamber 1, and a vacuumizing system for maintaining a high vacuum environment in the vacuum chamber 1 is also arranged on one side of the vacuum chamber 1.
As shown in fig. 1 and 2, the specific structure of the vacuum pumping system is as follows:
the device comprises a main valve 2 with a main valve 3, wherein an inlet of the main valve 2 is communicated with a vacuum chamber 1, an outlet of the main valve 2 is connected with a rough pumping valve 5 through a first vacuum pipe 4, the rough pumping valve 5 is respectively connected with a fine pumping valve 7 and a backing pump 8 through a second vacuum pipe 6, and the fine pumping valve 7 is also connected with a diffusion pump 9.
As shown in fig. 2 and 3, the specific structure of the winding system is as follows:
the device comprises a releasing roller 13 and a receiving roller 21, wherein the releasing roller 13 is connected with the output end of a releasing roller motor 11, and the receiving roller 21 is connected with the output end of a receiving roller motor 12. The first guide roller 14, the second guide roller 15, the third guide roller 17 and the fourth guide roller 19 are sequentially connected between the pay-off roller 13 and the take-up roller 21 through the same group of wires needing coating. As shown in fig. 5, the wire rod sequentially passes through the first guide roller 14, the second guide roller 15, and is wound around and turned back to the second guide roller 15 along the surface of the third guide roller 17, and then sequentially passes through the third guide roller 17 and the fourth guide roller 19 after being wound around the surface of the second guide roller 15 for the second time, in this embodiment, the wire rod is turned back three times, and multiple turning back can be performed according to actual working conditions, so that the deposition time is increased multiple times. An air charging pipe 24 for charging working gas is arranged between the upper plane target 22 and the lower plane target 25 and at one side of the coating chamber 16, and the water-cooled copper plate 23 and the lower plane target 25 are fixed on the bottom plate of the coating chamber 16. A wire pulling device 20 for uniformly winding the wire is further provided in the vacuum chamber 1 between the take-up roller 21 and the fourth guide roller 19.
As shown in fig. 3 and 4, the specific structure of the film plating system is as follows:
the coating chamber 16 is arranged at the periphery of the second guide roller 15 and the third guide roller 17. An upper planar target 22 and a lower planar target 25 are respectively arranged in the coating chamber 16, and the upper planar target 22 and the lower planar target 25 are transversely arranged, so that the utilization rate of deposition time is highest under the condition of not reducing the area of the vacuum chamber.
A throttle valve 10 for controlling the air pressure range in the vacuum chamber 1 is also provided at the inlet section of the vacuum chamber 1.
The specific working process of the invention is as follows:
as shown in fig. 1 and 2, when the vacuum chamber 1 is closed, the backing pump 8 and the rough pump valve 5 are opened, and at this time, the gas in the vacuum chamber 1 is pumped out of the chamber through the main valve 2, the first vacuum pipe 4, the rough pump valve 5, the second vacuum pipe 6 and the backing pump. When the air pressure in the vacuum chamber 1 is reduced to below 5pa from a standard atmospheric pressure, the rough pumping valve 5 is closed, the main valve 3 is opened, and at this time, the air in the vacuum chamber 1 is pumped out of the room through the main valve 2, the diffusion pump 9 (preheating is finished in advance), the fine pumping valve 7, the second vacuum pipeline 6 and the backing pump 8. The working process is circulated until the vacuum degree required by working conditions is reached, the air pumping mode is maintained in the working process, and the vacuum is pumped to 3-10 -3 When Pa or less, the inflation tube 24 is inflated with the working gas, and the angle of the throttle valve 10 is adjusted to control the required range of the air pressure in the vacuum chamber 1. Meanwhile, the upper plane target 22 and the lower plane target 24 are electrified to carry out glow discharge, and film plating is started after the glow discharge process is stable. Starting the unreeling motor 11 and the reeling motor 12, transferring wires from the first guide roller 14 and entering the coating chamber 16, performing magnetron sputtering coating on the wires by the upper plane target 22 and the lower plane target 24 when passing through the second guide roller 15 and the third guide roller 17, reducing the working temperature by the water-cooling copper plate 23 in the working process to prevent accumulated heating, simultaneously spraying silicone oil on the surface of the wires by the silicone oil spraying device 18 in the coating process, then reeling, sequentially closing the unreeling motor 11 and the reeling motor 12 after coating is completed, closing the power supplies of the upper plane target 22 and the lower plane target 24, and closing the fine pumping valve 7 and the backing pump 8 after the diffusion pump 9 is closed and cooled. In the present invention, the upper planar target 22 and the lower planar target 24 can use direct current, intermediate frequency or radio frequency power sources, and the roller releasing motor 11 and the roller collecting motor 12 are servo motorsAnd controlling the rotation of the winding and unwinding roller in the working process.
According to the invention, silver plating, nickel and other metal materials or non-metal materials such as silicon oxide and the like can be realized on the wire, the silicon oil spraying device 18 can spray protective materials on the surface of the wire, the service life of the wire is prolonged, and in the invention, the deposition time can be multiplied by carrying out multiple foldback on the wire, so that the deposition utilization rate is greatly improved. According to the invention, the unreeling roller and the reeling roller synchronously move by the servo motor, passive unreeling is not adopted, the internal stress of the wire is greatly reduced, the working temperature in the coating process can be reduced by the design of the water-cooling copper plate, the accumulated temperature rise is avoided, and the wire reeling and winding process of the wire is more uniform by the aid of the wire reeling device.
The above description is illustrative of the invention and not limiting, the scope of the invention being defined by the appended claims, which may be modified in any manner without departing from the basic structure of the invention.

Claims (4)

1. Wire winding coating machine, its characterized in that: the device comprises a vacuum chamber (1), wherein a winding system with wires, a coating system for coating the surfaces of the wires, a water-cooled copper plate (23) for cooling and a silicone oil spraying device (18) for spraying silicone oil are arranged in the vacuum chamber (1), and a vacuumizing system for maintaining a high vacuum environment in the vacuum chamber (1) is further arranged on one side of the vacuum chamber (1);
the vacuum pumping system has the following specific structure:
the device comprises a main valve (2) with a main valve (3), wherein an inlet of the main valve (2) is communicated with a vacuum chamber (1), an outlet of the main valve (2) is connected with a rough pumping valve (5) through a first vacuum pipe (4), the rough pumping valve (5) is respectively connected with a fine pumping valve (7) and a backing pump (8) through a second vacuum pipe (6), and the fine pumping valve (7) is also connected with a diffusion pump (9);
the specific structure of the winding system is as follows:
the device comprises a releasing roller (13) and a collecting roller (21), wherein the releasing roller (13) is connected with the output end of a releasing roller motor (11), the collecting roller (21) is connected with the output end of a collecting roller motor (12), and a first guide roller (14), a second guide roller (15), a third guide roller (17) and a fourth guide roller (19) are sequentially connected between the releasing roller (13) and the collecting roller (21) through the same group of wires needing coating; the wire rod sequentially passes through the first guide roller (14), the second guide roller (15) and is wound and turned back to the second guide roller (15) along the surface of the third guide roller (17), and then sequentially passes through the third guide roller (17) and the fourth guide roller (19) after being wound for the second time along the surface of the second guide roller (15);
the specific structure of the coating system is as follows:
comprises a coating chamber (16), an upper plane target (22) and a lower plane target (25) are respectively arranged in the coating chamber (16), and an air inflation tube (24) is arranged between the upper plane target (22) and the lower plane target (25) and at one side of the coating chamber (16); a wire pulling device (20) for uniformly winding the wire is arranged between the winding roller (21) and the fourth guide roller (19) in the vacuum chamber (1); vacuum pumping to 3 x 10 in the vacuum chamber (1) -3 When Pa is lower, working gas is filled into the air charging tube (24), the upper plane target (22) and the lower plane target (24) are subjected to glow discharge by applying voltage, after the glow discharge process is stable, the roller discharging motor (11) and the roller collecting motor (12) are started, wires are transferred by the first guide roller (14) and enter the coating chamber (16), when passing through the second guide roller (15) and the third guide roller (17), magnetron sputtering coating materials are carried out on the wires by the upper plane target (22) and the lower plane target (25), the reduction of the working temperature is realized by the water-cooling copper plate (23) in the working process, the accumulated temperature rise is prevented, and meanwhile, the wires can be coiled after silicone oil is sprayed on the surfaces of the wires by the silicone oil spraying device (18) in the coating process.
2. The wire-wound coating machine of claim 1, wherein: a throttle valve (10) for controlling the air pressure range in the vacuum chamber (1) is also arranged at the inlet section of the vacuum chamber (1).
3. The wire-wound coating machine of claim 1, wherein: the coating chamber (16) is arranged at the periphery of the second guide roller (15) and the third guide roller (17).
4. The wire-wound coating machine of claim 1, wherein: the water-cooled copper plate (23) and the lower plane target (25) are both fixed on the bottom plate of the coating chamber (16).
CN201710209133.3A 2017-03-31 2017-03-31 Wire winding film plating machine Active CN106835051B (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
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CN106835051A CN106835051A (en) 2017-06-13
CN106835051B true CN106835051B (en) 2023-07-11

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110983285A (en) * 2019-12-31 2020-04-10 广东腾胜科技创新有限公司 Vacuum winding coating equipment capable of simultaneously coating multiple rolls of base materials
CN111378952A (en) * 2020-04-29 2020-07-07 义乌市森煌科技有限公司 Winding type film coating machine

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2635678Y (en) * 2003-06-24 2004-08-25 深圳市坦达尼真空表面技术有限公司 Multi-function rolling film-coating machine
CN105925962A (en) * 2016-06-30 2016-09-07 电子科技大学 Metal organic deposition winding film coating machine capable of achieving double-sided continuous multi-layer film coating
CN106435516A (en) * 2016-10-27 2017-02-22 无锡光润真空科技有限公司 Magnetic control and evaporation multifunctional winding film coating machine
CN206570398U (en) * 2017-03-31 2017-10-20 无锡光润真空科技有限公司 Wire rod winding film coating machine

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2635678Y (en) * 2003-06-24 2004-08-25 深圳市坦达尼真空表面技术有限公司 Multi-function rolling film-coating machine
CN105925962A (en) * 2016-06-30 2016-09-07 电子科技大学 Metal organic deposition winding film coating machine capable of achieving double-sided continuous multi-layer film coating
CN106435516A (en) * 2016-10-27 2017-02-22 无锡光润真空科技有限公司 Magnetic control and evaporation multifunctional winding film coating machine
CN206570398U (en) * 2017-03-31 2017-10-20 无锡光润真空科技有限公司 Wire rod winding film coating machine

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