CN220183375U

CN220183375U - Composite copper foil winding coating device

Info

Publication number: CN220183375U
Application number: CN202321482251.9U
Authority: CN
Inventors: 易伟华; 张迅; 李景艳; 阳威; 彭顺明
Original assignee: WG Tech Jiangxi Co Ltd
Current assignee: WG Tech Jiangxi Co Ltd
Priority date: 2023-06-12
Filing date: 2023-06-12
Publication date: 2023-12-15
Anticipated expiration: 2033-06-12

Abstract

The utility model relates to a composite copper foil winding and coating device which comprises an unreeling mechanism, a sputtering coating mechanism, an ICP (inductively coupled plasma) ionization mechanism, a cooling system, a reeling mechanism and a tension control mechanism, wherein the unreeling mechanism, the double-sided coating mechanism, the surface ICP ionization treatment and the reeling mechanism can be sequentially carried out on a base material, the cooling system cools the base material in the double-sided coating and the surface ICP ionization treatment processes, and the tension control mechanism controls the speeds of the unreeling mechanism and the reeling mechanism so that the base material is leveled and uniformly moved in the winding and coating process, and the problems of uneven coating and wrinkling of the film material caused by unstable tension are avoided. Through reasonable design of device components, the composite copper foil winding and coating device is used for preparing composite copper foil, and has higher yield and production efficiency.

Description

Composite copper foil winding coating device

Technical Field

The utility model relates to the technical field of composite copper foil preparation, in particular to a composite copper foil winding and coating device.

Background

With the wide application of the composite copper foil in secondary batteries, the market demand is increased, and the composite copper foil produced by film coating gradually becomes a main current collector material in the market. The conventional winding coating device is limited in production efficiency, yield control and the like for preparing the composite copper foil, has more limitation on a coating substrate, and is necessary to be improved in order to meet the requirement of mass production.

Disclosure of Invention

Based on the problems, the utility model provides the composite copper foil winding and coating device which can finish a plurality of procedures in the production of the composite copper foil in a flow line manner and has higher production efficiency and yield.

In one aspect of the present utility model, there is provided a composite copper foil winding and plating apparatus comprising: the device comprises an unreeling mechanism, a sputtering coating mechanism, an ICP (inductively coupled plasma) ionization mechanism, a cooling system, a reeling mechanism and a tension control mechanism;

the substrate is sequentially conveyed among the unreeling mechanism, the sputtering coating mechanism, the ICP ionization mechanism, the tension control mechanism and the reeling mechanism;

in the conveying process, the sputtering coating mechanism carries out double-sided coating on the substrate to prepare a coated substrate; the ICP ionization mechanism carries out ICP ionization treatment on the surface of the coating substrate to prepare a protective layer;

the cooling system is respectively communicated with the sputtering coating mechanism and the ICP ionization mechanism through pipelines and is used for cooling the base material;

the tension control mechanism is used for controlling the speed of the unreeling mechanism and the reeling mechanism.

In some embodiments, a barrier is provided between the sputter coating mechanism and the ICP ionization mechanism.

In some of these embodiments, the tension control mechanism includes a slide rail, a floating roller shaft, and a pneumatic pressure assembly; the sliding rail is fixedly connected to the machine body, the floating roll shaft is in sliding connection with the sliding rail, and the floating roll shaft can slide on the sliding rail; the floating roll shaft is also connected with the pneumatic pressure assembly, and the pneumatic pressure assembly is used for providing sliding thrust for the floating roll shaft;

the device is characterized in that an induction component is arranged on the sliding rail and used for inducing the position change of the floating roll shaft on the sliding rail, the position change is converted into an electric signal and fed back to the winding mechanism, and the winding speed of the coating substrate is adjusted by the winding mechanism according to the received electric signal.

In some embodiments, the sensing component is an electromagnetic sensing component or a photoelectric sensing component.

In some embodiments, the number of the sliding rails is two, and two ends of the floating roller shaft are respectively connected with one sliding rail in a sliding manner.

In some embodiments, the sputtering coating mechanism comprises a first coating cooling roller shaft, a second coating cooling roller shaft, a first copper target and a second copper target, wherein the substrate firstly passes through the first coating cooling roller shaft after being discharged from the unreeling mechanism, and the first surface of the substrate forms a first surface of a coating substrate in a sputtering area corresponding to the first copper target; and the substrate is then passed through the second coating cooling roller shaft, and the second surface of the substrate forms a second surface of the coating substrate in a sputtering area corresponding to the second copper target, so as to prepare the coating substrate.

In some embodiments, the cathode target of the ICP ionization mechanism is selected from the group consisting of oxidation resistant metals;

and the coated substrate is subjected to ICP ionization treatment through an ion replacement area corresponding to the ICP ionization mechanism.

In some embodiments, a first ionizing cooling roller shaft and a second ionizing cooling roller shaft are further arranged in the ion replacement area; the ICP ionization mechanism comprises a first ICP ionization mechanism and a second ICP ionization mechanism, the film-coated substrate firstly passes through the first ionization cooling roller shaft, and the first surface of the film-coated substrate is subjected to first ICP ionization treatment in an ion replacement area corresponding to the first ICP ionization mechanism; and the coated substrate is then passed through the second ionization cooling roller shaft, and the second surface of the coated substrate is subjected to second ICP ionization treatment in an ion replacement area corresponding to the second ICP ionization mechanism.

In some embodiments, the cooling system includes a high pressure pump, a coolant reservoir, and a refrigeration compressor;

the cooling liquid storage tank is used for storing cooling liquid;

the high-pressure pump is arranged on a pipeline which is respectively communicated with the cooling liquid storage tank, the sputter coating mechanism and the ICP ionization mechanism and is used for pumping the cooling liquid into the sputter coating mechanism and the ICP ionization mechanism respectively;

the refrigeration compressor is connected with the cooling liquid storage tank and used for cooling the cooling liquid in the cooling liquid storage tank.

In some embodiments, the sputter coating mechanism comprises a first coating cooling roller shaft and a second coating cooling roller shaft;

the ion replacement area of the ICP ionization mechanism is also provided with a first ionization cooling roll shaft and a second ionization cooling roll shaft;

the first film coating cooling roll shaft, the second film coating cooling roll shaft, the first ionization cooling roll shaft and the second ionization cooling roll shaft are of cylindrical structures, the cylindrical structures are provided with inner walls and outer walls, hollow cavities are formed by the inner walls and the outer walls, each hollow cavity is communicated with the cooling liquid storage tank, and cooling liquid is arranged in each hollow cavity.

The composite copper foil winding and coating device provided by the embodiment of the utility model comprises an unreeling mechanism, a sputtering coating mechanism, an ICP (inductively coupled plasma) ionization mechanism, a cooling system, a reeling mechanism and a tension control mechanism, wherein the unreeling mechanism, the double-sided coating mechanism, the surface ICP ionization treatment and the reeling mechanism can be sequentially carried out on a base material, the cooling system cools the base material in the double-sided coating and the surface ICP ionization treatment processes, and the tension control mechanism controls the speeds of the unreeling mechanism and the reeling mechanism so that the base material is leveled and uniformly moved in the winding and coating process, and the problems of uneven coating and wrinkling of the film material caused by unstable tension are avoided. Through the reasonable design of the device components, the composite copper foil winding and coating device is used for preparing the composite copper foil, and has higher yield and production efficiency.

Drawings

FIG. 1 is a schematic diagram of a structure and operation of a composite copper foil winding and coating device according to an embodiment;

FIG. 2 is a schematic diagram illustrating a front cross-section and operation of a tension control mechanism according to one embodiment;

FIG. 3 is a schematic top perspective view of a tension control mechanism according to one embodiment;

FIG. 4 is a schematic top view of a partial cross-sectional view of a floating roller shaft and rail and pneumatic pressure assembly connection area of a tension control mechanism in accordance with one embodiment;

FIG. 5 is a schematic view of a partial cross-sectional structure based on FIG. 4;

FIG. 6 is a schematic diagram of a cooling system according to an embodiment;

reference numerals illustrate:

10. a composite copper foil winding and coating device; 110. an unreeling mechanism; 120. a tension control mechanism; 121. a slide rail; 122. a floating roll shaft; 123. a pneumatic pressure assembly; 1231. a pneumatic pressure connecting rod; 1232. a cylinder; 124. an induction assembly; 1241. an electromagnetic induction assembly; 1241a, electromagnetic induction signal transmitting module; 1241b, an electromagnetic induction signal receiving module; 125. a chute; 126. carrying a roll shaft; 130. an unreeling mechanism; 140. a sputtering coating mechanism; 141. a first film-plating cooling roller shaft; 141a, an outer wall; 141b, inner wall; 142. a second film plating cooling roll shaft; 143. a first copper target; 144. a second copper target; 150. an ICP ionization mechanism; 151. a cathode target; 152. a first ionizing cooling roller shaft; 153. a second ionizing cooling roller shaft; 160. a cooling system; 161. a high pressure pump; 162. a cooling liquid storage tank; 163. a refrigeration compressor; 20. a substrate.

Detailed Description

In order that the utility model may be readily understood, a more complete description of the utility model will be rendered by reference to the appended drawings. Preferred embodiments of the present utility model are shown in the drawings. This utility model may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the mechanism or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

It will be understood that when an element is referred to as being "fixed to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.

In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

Furthermore, the figures are not to be taken as 1:1, and the relative dimensions of the various elements are drawn by way of example only in the drawings to facilitate an understanding of the utility model, and are not necessarily drawn to true scale, the proportions in the drawings not being limiting to the utility model.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs. The terminology used herein in the description of the utility model is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.

Referring to fig. 1, an embodiment of the present utility model provides a composite copper foil winding and coating device 10, which includes: unreeling mechanism 110, sputter coating mechanism 140, ICP ionization mechanism 150, cooling system 160, reeling mechanism 130 and tension control mechanism 120.

Wherein the unreeling mechanism 110 is used for unreeling the substrate 20 to be coated.

The sputter coating mechanism 140 is used for coating the double-sided film on the substrate 20 unreeled by the unreeling mechanism 110 to prepare a coated substrate.

The ICP ion mechanism 150 is used to perform ICP ion treatment on the surface of the coated substrate to prepare a protective layer. The ICP ionization treatment in the utility model is to add high-frequency energy provided by a radio frequency generator to an induction coupling coil to ionize working gas to generate charged ions, the charged ions do high-speed motion under the action of a high-frequency alternating electromagnetic field, collide gas atoms to ionize the charged ions rapidly and largely, bombard the surface of a composite copper foil and an ICP cathode target material to ionize copper on the surface of the composite copper foil and antioxidant metal in the ICP cathode target material, the copper ions and the antioxidant metal ions are separated from constraint in an ion replacement area to collide with each other and replace, and finally the alloy antioxidant layer formed on the surface of the composite copper foil by the antioxidant metal and copper is deposited on the surface of the composite copper foil.

The cooling system 160 is respectively connected to the sputter coating mechanism 140 and the ICP ionization mechanism 150 via a pipeline (not shown), and the cooling system 160 is used for cooling the substrate 20.

The winding mechanism 130 is used for winding the substrate 20 subjected to the sputtering coating and the ICP ionization treatment.

The tension control mechanism 120 is used to control the speed of the unwind mechanism 110 and the wind-up mechanism 130.

During operation of the apparatus, the substrate 20 is transferred in sequence between the unwind mechanism 110, the sputter coating mechanism 140, the ICP ionization mechanism 150, the tension control mechanism 120, and the wind-up mechanism 130.

During the transfer, the sputter coating mechanism 140 applies a double-sided coating to the substrate 20 to prepare a coated substrate. The ICP ionization mechanism 150 performs ICP ionization treatment on the surface of the coated substrate to prepare a protective layer.

The above-mentioned compound copper foil winding coating device 10 includes unreeling mechanism 110, sputter coating mechanism 140, ICP ionization mechanism 150, cooling system 160, reeling mechanism 130 and tension control mechanism 120, can unreel, two-sided coating, surface ICP ionization processing, the rolling to the substrate in proper order, cooling system cools off the substrate in two-sided coating, surface ICP ionization processing, tension control mechanism 120 controls the speed of unreeling mechanism 110 and reeling mechanism 130 and makes substrate 20 level and smooth in winding coating process, even removal, avoid leading to uneven coating and film material wrinkling problem because of tension is unstable. Through the reasonable design of the device components, the composite copper foil winding and coating device 10 has higher yield and production efficiency when being used for preparing the composite copper foil.

Referring to fig. 2-5, in some embodiments, the tension control mechanism 120 includes a slide rail 121, a floating roller shaft 122, and a pneumatic pressure assembly 123; the sliding rail 121 is fixedly connected to the machine body, the floating roll shaft 122 is in sliding connection with the sliding rail 121, and the floating roll shaft 123 can slide on the sliding rail 121; the floating roll shaft 122 is also connected to a pneumatic pressure assembly 123, the pneumatic pressure assembly 123 being configured to provide a sliding thrust to the floating roll shaft 122; the coated substrate 20 is discharged from the unreeling mechanism 110, passes through the floating roll shaft 122 and is retracted by the reeling mechanism 130;

the sliding rail 121 is provided with an induction component 124, and the induction component 124 is used for inducing the position change of the floating roller 122 on the sliding rail 121, converting the position change into an electrical signal, feeding the electrical signal back to the winding mechanism 130, and adjusting the winding speed of the substrate 20 by the winding mechanism 130 according to the received electrical signal.

In the coating process, the tension of the substrate 20 may be changed to some extent due to stretching, thermal deformation, thickness change after coating, and the like of the substrate 20. The slide rail 121 on the tension control mechanism 120 is provided with the sensing component 124, the floating roller 122 generates a sliding thrust under the action of the pneumatic pressure component 123, when the tension of the film plating substrate 20 and the tension of the floating roller 122 are balanced, the floating roller 122 stays at the fixed position of the slide rail 121, when the tension changes, the floating roller 122 can displace on the slide rail 121, the sensing component 124 senses that a signal changes and then converts the signal into an electric signal to be transmitted to the winding mechanism 130, the winding mechanism 130 adjusts the winding speed according to the received electric signal so as to adjust the tension, so that the tension is kept stable, further the problems of uneven film plating and film wrinkling caused by unstable tension in the production process are effectively solved, and the yield and the production efficiency of film plating products can be effectively improved in the film plating process of wide and ultrathin substrates.

It is understood that the electrical signal may be, for example, a current signal or a voltage signal, etc.

In one embodiment, the sensing element 124 is an electromagnetic sensing element 1241 or a photoelectric sensing element.

In one embodiment, there are two sliding rails 121, and two ends of the floating roller shaft 122 are slidably connected to one of the sliding rails 121.

In one embodiment, a sliding groove 125 is formed on the surface of each sliding rail 121, and two ends of the floating roller shaft 122 respectively penetrate into the sliding groove 125 to be connected with the corresponding sliding rail 121;

the induction component 124 is an electromagnetic induction component 1241, the electromagnetic induction component 1241 includes an electromagnetic induction signal transmitting module 1241a and an electromagnetic induction signal receiving module 1241b, at least one electromagnetic induction signal transmitting module 1241a is disposed on each sliding groove 121, a plurality of electromagnetic induction signal receiving modules 1241b are disposed inside each sliding groove 121 along the sliding direction of the floating roller shaft 122 at different positions, and the signals sent by the electromagnetic induction signal transmitting modules 1241a are received by different electromagnetic induction signal receiving modules 1241b along the sliding direction of the floating roller shaft 122 and can be converted into different electrical signals.

In one embodiment, the tension control mechanism 120 further includes a signal control component, one end of the signal control component is connected to the electromagnetic induction signal receiving module 1241b, the other end of the signal control component is connected to the winding mechanism 130, the electrical signal converted by the electromagnetic induction signal receiving module 1242b is fed back to the signal control component, and the signal control component controls the winding speed of the winding mechanism 130 according to the electrical signal. It will be appreciated that the signal control component may be, for example, a PLC controller. It will be appreciated that when the electromagnetic induction signal receiving module 1241b is specifically matched with the electrical signal receiving module of the winding mechanism 130, no additional signal control component may be required, otherwise, the additional signal control component is required to transmit an electrical signal and control the winding speed of the winding mechanism 130, where the electrical signal receiving module of the winding mechanism 130 may be, for example, a frequency converter.

In one embodiment, the pneumatic pressure assembly 123 includes a pneumatic pressure link 1231 and a cylinder 1232, with one end of the pneumatic pressure link 1321 being connected to the cylinder 1232 and the other end being connected to the floating roller shaft 122.

In one embodiment, in the tension control mechanism 120, a carrying roller shaft 126 is further disposed between the floating roller shaft 122 and the unreeling mechanism 110 and/or between the floating roller shaft 122 and the reeling mechanism 130, and the carrying roller shaft 126 is used for carrying and transferring the coated substrate 20.

Alternatively, there are two carrying rollers 126, one of which is disposed between the floating roller 122 and the unreeling mechanism 110, and the other of which is disposed between the floating roller 127 and the reeling mechanism 130.

Referring again to fig. 1, in one embodiment, the sputter coating mechanism 140 includes a first coating chill roll shaft 141, a second coating chill roll shaft 142, a first copper target 143, and a second copper target 144.

The first copper target 143 is disposed around the first plating film cooling roller shaft 141. During sputter coating, the substrate 20 passes between the first copper target 143 and the first coating chill roll shaft 141. The first copper target 143 is sputter deposited on the first surface of the substrate 20 to form a coating film, and the first coating film cooling roller 141 cools the second surface of the substrate 20, so that the substrate 20 is cooled entirely, and breakdown is avoided.

A second copper target 144 is disposed about the second film plating chill roll shaft 142. During sputter coating, the substrate 20 passes between the second copper target 144 and the second coating chill roll shaft 142. The second copper target 144 is sputter deposited on the second surface of the substrate 20 to form a coating, and the second coating cooling roller 142 cools the first surface of the substrate 20 to cool the substrate 20 as a whole, thereby avoiding breakdown.

The substrate 20 is released from the unreeling mechanism 110 and then passes through the first film coating cooling roller shaft 141, and the first surface of the substrate 20 forms the first surface of the film coating substrate in the sputtering region corresponding to the first copper target 143. The substrate 20 is then passed over a second coating chill roll shaft 142, the second surface of which forms a second surface of the coated substrate in a sputtered region corresponding to the second copper target 143, to produce a coated substrate.

In some of these embodiments, the number of first copper targets 143 is at least one. Optionally, the number of first copper targets 143 is a plurality, e.g., 2, 3, 4, or more.

In some of these embodiments, the number of second copper targets 144 is at least one. Optionally, the number of second copper targets 144 is a plurality, e.g., 2, 3, 4, or more.

In some of these embodiments, the ICP ionization mechanism 150 employs an oxidation resistant metal as the cathode target 151. Optionally, the oxidation resistant metal comprises one or more of nickel, zinc, titanium, and chromium.

The coated substrate 20 is subjected to ICP ion exchange treatment in an ion exchange region corresponding to the ICP ion exchange unit 150. The surface of the antioxidation metal and the surface of the coating substrate are ionized and are separated from the binding and collide with each other so as to be replaced, and finally, an alloy antioxidation layer of the antioxidation metal and copper is formed on the surface of the coating substrate by deposition. The device is used for carrying out ICP (inductively coupled plasma) ionization treatment on the coating substrate, so that a compact protective layer is formed on the surface of the coating substrate, and compared with the method for preparing the antioxidant layer by adopting the traditional acid-base electrolysis process, the process is simplified, and the efficiency is higher.

It should be understood that the ion substitution region described in the present utility model refers to a region where the oxidation-resistant metal and the metal atoms on the surface of the composite copper foil 20 are bombarded by gas ions, and after ionization and detachment, the oxidation-resistant metal ions and the copper ions can collide with each other and be substituted, the region of the ion substitution region being related to the width of the ICP cathode target 151, the wider the ICP cathode target 151, the larger the region of the ion substitution region, and vice versa, the smaller the region of the ion substitution region.

In some of these embodiments, a first ionizing cooling roller 152 and a second ionizing cooling roller 153 are also provided in the ion exchange zone. The ICP ionization mechanism 150 includes a first ICP ionization mechanism (not shown) and a second ICP ionization mechanism (not shown). The coated substrate is first passed through a first ionizing and cooling roller 152, and the first surface of the coated substrate is subjected to a first ICP ionization treatment in an ion exchange region corresponding to a first ICP ionization mechanism (not shown). The coated substrate is then passed over a second ionizing chill roll shaft 153, and the second surface of the coated substrate is subjected to a second ICP ionization process in an ion exchange region corresponding to a second ICP ionization mechanism (not shown).

In one embodiment, the working gas used to perform the ICP ionization process is an inert gas.

Optionally, the inert gas comprises argon or helium.

In one embodiment, the power of the power supply for performing ICP ionization treatment is 5KW to 10KW. It is understood that the power of the power supply for performing the ICP ionization process may be adjusted according to the thickness of the oxidation preventing layer, and is not limited to the above power supply, and may be other values in other embodiments.

In some of these embodiments, a barrier is provided between the sputter coating mechanism 140 and the ICP ionization mechanism 150.

Referring to FIG. 6, in some embodiments, a cooling system 160 includes a high pressure pump 161, a coolant reservoir 162, and a refrigeration compressor 163.

Wherein the coolant reservoir 162 is used to store a coolant.

The high-pressure pump 161 is disposed on a pipe in which the coolant reservoir 162 communicates with the sputter coating mechanism 140 and the ICP ion mechanism 150, respectively, and pumps the coolant into the sputter coating mechanism 140 and the ICP ion mechanism 150, respectively.

The refrigerating compressor 163 is connected to the coolant reservoir 162 for cooling the coolant in the coolant reservoir 162.

In some of these embodiments, the cooling system 160 communicates with the first film cooling roll shaft 141, the second film cooling roll shaft 142, the first ionizing cooling roll shaft 152, and the second ionizing cooling roll shaft 153, respectively, for adjusting the temperatures of the first film cooling roll shaft 141, the second film cooling roll shaft 142, the first ionizing cooling roll shaft 152, and the second ionizing cooling roll shaft 153.

As an example, referring to fig. 6, the first coating film cooling roller shaft 141 has a cylindrical structure. A closed hollow cavity is formed between the inner wall 141b and the outer wall 141a of the cylindrical structure. The hollow cavity is in communication with a coolant reservoir 162 via a conduit, and coolant circulates between the first film-coating cooling roller 141 and the coolant reservoir 162.

It is understood that the second plating film cooling roller shaft 142, the first ionizing cooling roller shaft 152, and the second ionizing cooling roller shaft 153 have a similar structure to the first plating film cooling roller shaft 141.

In some of these embodiments, the difference in radius between the inner wall 141b and the outer wall 141a is 15mm to 20mm.

In some of these embodiments, the temperature of the cooling fluid is from-100℃to 25 ℃.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples merely represent a few embodiments of the present utility model, which facilitate a specific and detailed understanding of the technical solutions of the present utility model, but are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. It should be understood that, based on the technical solutions provided by the present utility model, those skilled in the art obtain technical solutions through logical analysis, reasoning or limited experiments, all of which are within the scope of protection of the appended claims. The scope of the patent is therefore intended to be covered by the appended claims, and the description and drawings may be interpreted as illustrative of the contents of the claims.

Claims

1. A composite copper foil winding and film plating device, comprising: the device comprises an unreeling mechanism, a sputtering coating mechanism, an ICP (inductively coupled plasma) ionization mechanism, a cooling system, a reeling mechanism and a tension control mechanism;

2. The composite copper foil winding and coating device according to claim 1, wherein a barrier is provided between the sputter coating mechanism and the ICP ionization mechanism.

3. The composite copper foil winding and film plating device according to claim 1, wherein the tension control mechanism comprises a slide rail, a floating roll shaft and a pneumatic pressure assembly; the sliding rail is fixedly connected to the machine body, the floating roll shaft is in sliding connection with the sliding rail, and the floating roll shaft can slide on the sliding rail; the floating roll shaft is also connected with the pneumatic pressure assembly, and the pneumatic pressure assembly is used for providing sliding thrust for the floating roll shaft;

4. The composite copper foil winding and coating device according to claim 3, wherein the induction component is an electromagnetic induction component or a photoelectric induction component.

5. The composite copper foil winding and coating device according to claim 4, wherein the number of the sliding rails is two, and two ends of the floating roll shaft are respectively connected with one sliding rail in a sliding manner.

6. The composite copper foil winding and coating device according to claim 1, wherein the sputtering and coating mechanism comprises a first coating and cooling roller shaft, a second coating and cooling roller shaft, a first copper target and a second copper target, wherein the substrate passes through the first coating and cooling roller shaft after being discharged from the unreeling mechanism, and the first surface of the substrate forms a first surface of a coating substrate in a sputtering area corresponding to the first copper target; and the substrate is then passed through the second coating cooling roller shaft, and the second surface of the substrate forms a second surface of the coating substrate in a sputtering area corresponding to the second copper target, so as to prepare the coating substrate.

7. The composite copper foil winding and coating device according to claim 1, wherein the cathode target of the ICP ionization mechanism is selected from oxidation resistant metals;

8. The composite copper foil winding and coating device according to claim 7, wherein a first ionizing and cooling roller and a second ionizing and cooling roller are further provided in the ion exchange area; the ICP ionization mechanism comprises a first ICP ionization mechanism and a second ICP ionization mechanism, the film-coated substrate firstly passes through the first ionization cooling roller shaft, and the first surface of the film-coated substrate is subjected to first ICP ionization treatment in an ion replacement area corresponding to the first ICP ionization mechanism; and the coated substrate is then passed through the second ionization cooling roller shaft, and the second surface of the coated substrate is subjected to second ICP ionization treatment in an ion replacement area corresponding to the second ICP ionization mechanism.

9. The composite copper foil winding and film plating device according to claim 1, wherein the cooling system comprises a high-pressure pump, a cooling liquid storage tank and a freezing compressor;

the cooling liquid storage tank is used for storing cooling liquid;

10. The composite copper foil winding and coating device according to claim 9, wherein the sputter coating mechanism comprises a first coating cooling roll shaft and a second coating cooling roll shaft;