CN2635678Y - Multi-function rolling film-coating machine - Google Patents

Multi-function rolling film-coating machine Download PDF

Info

Publication number
CN2635678Y
CN2635678Y CN 03273145 CN03273145U CN2635678Y CN 2635678 Y CN2635678 Y CN 2635678Y CN 03273145 CN03273145 CN 03273145 CN 03273145 U CN03273145 U CN 03273145U CN 2635678 Y CN2635678 Y CN 2635678Y
Authority
CN
China
Prior art keywords
chamber
vacuum
film
target
film coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 03273145
Other languages
Chinese (zh)
Inventor
盛钢
胡显奇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TANDANI VACUUM SURFACE TECHNOLOGY Co Ltd SHENZHEN CITY
Original Assignee
TANDANI VACUUM SURFACE TECHNOLOGY Co Ltd SHENZHEN CITY
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TANDANI VACUUM SURFACE TECHNOLOGY Co Ltd SHENZHEN CITY filed Critical TANDANI VACUUM SURFACE TECHNOLOGY Co Ltd SHENZHEN CITY
Priority to CN 03273145 priority Critical patent/CN2635678Y/en
Application granted granted Critical
Publication of CN2635678Y publication Critical patent/CN2635678Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Abstract

Disclosed is a multipurpose roll coater which can do continuously spray plating on both sides of flexible coiled materials. The utility model is a vacuum chamber which takes a shape of arched gate. A reeling chamber and an unreeling chamber are arranged at the lower part of the vacuum chamber. Three separated vacuum plating chambers are arranged in the internal of arch shaped chamber, which are communicated with the reeling and unreeling chamber. A roller shaft conducting system and a tension sensor are arranged at position of center axis of the vacuum plating chamber. Film coating targets are symmetrically arranged in the vacuum plating chambers. The utility model adopts physical vapor deposit technology. The flexible coiled materials in the vacuum chambers can be spray plated on both sides at the same time through the tension adjustment of the roller shaft conducting system and the tension sensor and through the deposit of the target materials particles injected by the film coating targets. The roll coater allows target materials with different components to be used in to produce single film or multilayer multiple functional mixed film which can be used widely in conductive thin film made from flexible coiled materials as organic foam et cetera, and multiple functional film for metallized fabrics.

Description

Multi-functional winding film coating machine
Technical field
The utility model relates to a kind of positive and negative two sides and carry out the multi-functional winding film coating machine of vacuum surface-treated continuously at flexible web.
Background technology
At present, domestic on the positive and negative two sides of flexible web, carry out vacuum surface-treated winding film coating machine continuously and be widely used on organic foam, preparing conducting film, the negative electrode that makes it to serve as plating thick nickel prepare porous metal such as nickel foam or on weaving category, non-woven fabrics, surperficial felt preparation metal is arranged to make the metallization flexible web, in order to make electromagnetic shielding or antistatic material or to be used to prepare packaging film, capacitor thin film and ito thin film etc.Though what existing installation had can carry out plated film simultaneously to the positive and negative two sides of flexible web, equipment has can not prepare multiple, multilayer film, functions of use is single, and defective such as bulky.
Summary of the invention
The purpose of this utility model is to provide a kind of multi-functional winding film coating machine, realizes that vacuum platings multiple, multilayer film are carried out on positive and negative two surfaces of flexible web continuously to be handled.
The purpose of this utility model is such realization:
A kind of multi-functional winding film coating machine is characterized in that it is the vacuum chamber of " arched door " structure of a kind of being.Below arch casing outside, leave and expose atmospheric " door opening " space.The bottom is provided with the rolling chamber and unreels the chamber in the arch casing.Near rolling chamber, the arranged outside that unreels the chamber coating chamber gate is being arranged.The arch box house is three separate vacuum film coating chambers and connects with rolling chamber, the chamber of unreeling.Be provided with roll shaft conducting system and tension pick-up in the position of coating chamber axis, tension pick-up is located at the two ends of roll shaft.On vacuum film coating chamber, be symmetrically arranged with one or more groups plated film target.The plated film target is magnetron sputtering target or arc evaporation target, and the target body of plated film target is shaped as rectangle or circular arc.
The utility model adopts physical gas phase deposition technology.It is in the coating chamber of the vacuum chamber that is the arched door structure, and flexible web by the target particle deposition that the plated film target sprays, simultaneously carries out double-sided coating to the positive and negative two sides of flexible web through the tension adjustment of control of roll shaft conducting system and tension pick-up.This winding film coating machine has multiple function, can be made up, be used the target of heterogeneity by magnetron sputtering target or arc evaporation target assembly, can prepare the coating film treatment of the mixed film of single film or multiple multilayer function in the positive and negative of flexible web.
Description of drawings
Accompanying drawing is a structural representation of the present utility model.
Wherein: 1,12-coating chamber gate, 2-unreels the chamber, 3-plated film target, 4,7, the 10-coating chamber, the 5-flexible web, 6-roll shaft conducting system, the 8-vacuum chamber, 9-vacuum chamber outer " door opening ", 11-rolling chamber, 13-drives car, 14-track, 15-tension pick-up.
The embodiment explanation
A kind of multi-functional winding film coating machine, it is the vacuum chamber 8 of " arched door " structure of a kind of being.Leave the space that exposes atmospheric " door opening " 9 below arch casing 8 outsides, the loading and unloading of plated film target can conveniently be carried out and to the maintenance of vacuum plating unit in this space.The bottom of arch casing 8 is provided with rolling chamber 11 and unreels chamber 2.The plated film retractable can be carried out to flexible web incessantly in this retractable volume chamber, also can exchange use.Near rolling chamber 11 with unreel chamber 2 arranged outside coating chamber gate 1 and gate 12 (gate omits in the accompanying drawing) are arranged.In arch casing 8, be divided into three separate vacuum film coating chambers 4,7,10 again, and with rolling chamber 11, unreel chamber 2 and connect.Be provided with roll shaft conducting system 6 and tension pick-up 15 in the position of vacuum film coating chamber 4,7,10 axis.Roll shaft conducting system 6 can make flexible web 5 do " ∩ " shape by coating chamber 4,7,10 evenly via the let off roll that unreels chamber 2 and reel, and can be sent on the wind-up roll continuously.Tension pick-up 15 is located at the two ends of roll shaft, in order to regulate control tension force.Two walls at vacuum film coating chamber 4,7,10 are symmetrically arranged with one or more groups plated film target 3.Plated film target 3 is magnetron sputtering target or arc evaporation target, and the target body of plated film target 3 is shaped as rectangle or circular arc.
The coating process of this coating equipment is such: in the vacuum chamber 8 that is " arched door " structure, flexible web 5 processes are by the tension adjustment of the roll shaft conducting system 6 and the tension pick-up 15 of electric machine control, unreel roll shaft axis of 4,7,10 in the coating chamber by what unreel chamber 2, flexible web 5 is done " ∩ " shape by coating chamber evenly by let off roll and is reeled, the positive and negative two sides of flexible web 5 receives the deposition of the target particle that sprays from every pair of plated film target 3 simultaneously and carries out double-sided coating, and is sent to continuously on the wind-up roll of rolling chamber 11.One or more groups plated film target 3 in the coating chamber can be equipped with the target of same composition, also can the target of heterogeneity be housed, thereby make two surface preparation of flexible web go out single film or prepare multiple, the multiwalled laminated film of corresponding heterogeneity respectively according to rete design.Because this coating equipment carries out plated film in vacuum chamber 8, film and flexible parent metal adhere firmly and thickness are even thus.According to the surface-treated needs of flexible web, can be with roll shaft conducting system 6 reverse operatings, plating is returned incessantly continuously according to above-mentioned operating process in rolling chamber 11 and unreel chamber 2 and exchange rotation, satisfies special process or adds the needs of thick film layers.To be processed and the processing flexibility and processing coiled material can transmit along the track of having laid 14 by through driving car 13.
As from the foregoing, this multi-functional winding film coating machine can carry out the vacuum meter face on multiple flexible web handles, as macromolecular material, chemical fabric, non-woven fabrics, mineral fibre cloth, surperficial blanket, thin metal or other flexible compound coiled materials or the like such as various cotton textiles, organic polyester form, PET, PEN, PC plastics.Be widely used in conductive film, the metallized fabrics of flexible web surface preparation such as organic bubble, as multiple functional films such as electromagnetic shielding or antistatic material or preparation packaging film, capacitor thin film, ito thin films.

Claims (3)

1, a kind of multi-functional winding film coating machine is characterized in that it is a vacuum chamber that is " arched door " structure, leaves to expose atmospheric " door opening " space below arch casing outside; The bottom of arch casing is provided with the rolling chamber and unreels the chamber, near the rolling chamber, unreel the outside and be provided with the coating chamber gate; The arch box house is divided into three separate vacuum film coating chambers and connects with rolling chamber, the chamber of unreeling, on the position of vacuum film coating chamber axis, be provided with roll shaft conducting system and tension pick-up, tension pick-up is located at the two ends of roll shaft, is symmetrically arranged with the plated film target at vacuum film coating chamber.
2, multi-functional winding film coating machine according to claim 1 is characterized in that the plated film target is magnetron sputtering target or arc evaporation target.
3, multi-functional winding film coating machine according to claim 1 is characterized in that the target body of plated film target is shaped as rectangle or circular arc.
CN 03273145 2003-06-24 2003-06-24 Multi-function rolling film-coating machine Expired - Fee Related CN2635678Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 03273145 CN2635678Y (en) 2003-06-24 2003-06-24 Multi-function rolling film-coating machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 03273145 CN2635678Y (en) 2003-06-24 2003-06-24 Multi-function rolling film-coating machine

Publications (1)

Publication Number Publication Date
CN2635678Y true CN2635678Y (en) 2004-08-25

Family

ID=34301359

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 03273145 Expired - Fee Related CN2635678Y (en) 2003-06-24 2003-06-24 Multi-function rolling film-coating machine

Country Status (1)

Country Link
CN (1) CN2635678Y (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106256415A (en) * 2015-06-18 2016-12-28 中国石油化工股份有限公司 A kind of organic steam separation film continuous preparation device and application thereof
CN106835051A (en) * 2017-03-31 2017-06-13 无锡光润真空科技有限公司 Wire rod winding film coating machine
CN107254671A (en) * 2017-08-07 2017-10-17 深圳市烯谷能源控股有限公司 A kind of double-face vacuum plated film up- coiler
CN107557761A (en) * 2017-08-23 2018-01-09 中国科学院过程工程研究所 A kind of volume to volume device and its control method for being used for the serialization growth two-dimensional material on ribbon wire material
CN107841723A (en) * 2017-10-30 2018-03-27 深圳市西陆光电技术有限公司 One kind is without glue flexible double copper-clad plate processing DC sputtering device
CN109554680A (en) * 2019-02-12 2019-04-02 浙江德佑新材料科技有限公司 A kind of devices of coiled vacuum coating machine
CN110438467A (en) * 2019-09-16 2019-11-12 林初赢 A kind of winding magnetic control sputtering coating machine
CN112795895A (en) * 2021-03-31 2021-05-14 辽宁分子流科技有限公司 Vacuum film penetrating mechanism for winding type vacuum film coating machine
CN112813400A (en) * 2021-03-31 2021-05-18 辽宁分子流科技有限公司 Double-sided multi-station winding type vacuum coating machine
CN112853275A (en) * 2021-03-31 2021-05-28 辽宁分子流科技有限公司 Continuous winding vacuum coating method for ultrathin base film
CN113201722A (en) * 2021-04-15 2021-08-03 佛山市天定五金制品有限公司 Vacuum plasma coating method and device for strip

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106256415A (en) * 2015-06-18 2016-12-28 中国石油化工股份有限公司 A kind of organic steam separation film continuous preparation device and application thereof
CN106256415B (en) * 2015-06-18 2018-11-02 中国石油化工股份有限公司 A kind of organic steam seperation film continuous preparation device and its application
CN106835051A (en) * 2017-03-31 2017-06-13 无锡光润真空科技有限公司 Wire rod winding film coating machine
CN106835051B (en) * 2017-03-31 2023-07-11 无锡光润真空科技有限公司 Wire winding film plating machine
CN107254671A (en) * 2017-08-07 2017-10-17 深圳市烯谷能源控股有限公司 A kind of double-face vacuum plated film up- coiler
CN107557761B (en) * 2017-08-23 2020-09-22 中国科学院过程工程研究所 Roll-to-roll device for continuously growing two-dimensional material on strip/wire and control method thereof
CN107557761A (en) * 2017-08-23 2018-01-09 中国科学院过程工程研究所 A kind of volume to volume device and its control method for being used for the serialization growth two-dimensional material on ribbon wire material
CN107841723A (en) * 2017-10-30 2018-03-27 深圳市西陆光电技术有限公司 One kind is without glue flexible double copper-clad plate processing DC sputtering device
CN109554680A (en) * 2019-02-12 2019-04-02 浙江德佑新材料科技有限公司 A kind of devices of coiled vacuum coating machine
CN109554680B (en) * 2019-02-12 2024-02-09 浙江德佑新材料科技有限公司 Winding type vacuum coating machine
CN110438467A (en) * 2019-09-16 2019-11-12 林初赢 A kind of winding magnetic control sputtering coating machine
CN112795895A (en) * 2021-03-31 2021-05-14 辽宁分子流科技有限公司 Vacuum film penetrating mechanism for winding type vacuum film coating machine
CN112813400A (en) * 2021-03-31 2021-05-18 辽宁分子流科技有限公司 Double-sided multi-station winding type vacuum coating machine
CN112853275A (en) * 2021-03-31 2021-05-28 辽宁分子流科技有限公司 Continuous winding vacuum coating method for ultrathin base film
CN112853275B (en) * 2021-03-31 2023-07-25 辽宁分子流科技有限公司 Continuous winding vacuum coating method for ultrathin base film
CN112813400B (en) * 2021-03-31 2024-05-24 泊肃叶科技(沈阳)有限公司 Double-sided multi-station winding type vacuum coating machine
CN112795895B (en) * 2021-03-31 2024-06-25 泊肃叶科技(沈阳)有限公司 Vacuum film penetrating mechanism for winding type vacuum film plating machine
CN113201722A (en) * 2021-04-15 2021-08-03 佛山市天定五金制品有限公司 Vacuum plasma coating method and device for strip
CN113201722B (en) * 2021-04-15 2023-10-24 佛山市天定五金制品有限公司 Strip vacuum plasma coating method and device

Similar Documents

Publication Publication Date Title
CN2635678Y (en) Multi-function rolling film-coating machine
Chang et al. Ultra-thin metal composites for electromagnetic interference shielding
CN107393979B (en) A kind of transparent electrode and its preparation method and application based on ultrathin metallic film
CN102021576B (en) Method for continuously producing flexible copper clad laminates
CN1332060C (en) Device and method for vacuum film formation
CN101108546A (en) Flexible material and method of manufacturing the same and use thereof
CN101348896A (en) Winding type two-sided coating equipment
CN107245701A (en) A kind of many target material magnetic sputtering winding film coating machines and film plating process
CN108624861A (en) The vacuum deposition apparatus of two-sided continuous coating
KR20110123909A (en) Metal-deposited nano fiber complex and method of manufacturing the same
CN108624860A (en) A kind of two-sided round-trip continuous vacuum coating equipment
Chen et al. Fabrication of copper-coated glass fabric composites through electroless plating process
CN2910966Y (en) High speed winding multi-layered electric capacity thin film coating apparatus
CN1865487A (en) Process for making bacteriostatic backing material with silver film
Schwarz et al. Types and processing of electro-conductive and semiconducting materials for smart textiles
CN109355634A (en) The vacuum deposition apparatus of two-sided continuous coating
CN101886253A (en) Flexible material vacuum coating machine utilizing Penning discharge source
TWI833814B (en) Manufacturing device and manufacturing method of resin film with metal film
CN207468716U (en) A kind of double-face vacuum plated film up- coiler
Ingole et al. Substrate dependent morphological and electrochemical properties of V 2 O 5 thin films prepared by spray pyrolysis
CN212833997U (en) Device based on scribble ultra-thin copper layer on PET carrier
WO2021157493A1 (en) Transparent electroconductive layer, transparent electroconductive sheet, touch sensor, light control element, photoelectric conversion element, heat ray control member, antenna, electromagnetic wave shield member, and image display device
CN107254671A (en) A kind of double-face vacuum plated film up- coiler
CN112930421B (en) Apparatus and method for producing resin film with metal film
KR20040031719A (en) Continuous surface-treating apparatus for film shape polymer and continuous surface-treating method thereof

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
C57 Notification of unclear or unknown address
DD01 Delivery of document by public notice

Addressee: Hu Xianqi

Document name: Notification of Termination of Patent Right

C19 Lapse of patent right due to non-payment of the annual fee
CF01 Termination of patent right due to non-payment of annual fee