CN108624861A - The vacuum deposition apparatus of two-sided continuous coating - Google Patents
The vacuum deposition apparatus of two-sided continuous coating Download PDFInfo
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- CN108624861A CN108624861A CN201810893345.2A CN201810893345A CN108624861A CN 108624861 A CN108624861 A CN 108624861A CN 201810893345 A CN201810893345 A CN 201810893345A CN 108624861 A CN108624861 A CN 108624861A
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- roller
- evaporation
- nip rolls
- film
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of vacuum deposition apparatus of two-sided continuous coating, it includes vacuum cavity, the steering roller mechanism being arranged in vacuum cavity and two groups of evaporation mechanisms, two groups of evaporation mechanisms are setting up and down, the side for turning to roller mechanism and two groups of evaporation mechanisms being set, film to be deposited enters after the steering roller mechanism along evaporation mechanism described in another group along evaporation mechanism described in one group for continuously carrying out vacuum evaporation to the upper and lower surface of film, in this way, the present invention is by being arranged two groups of evaporation mechanisms, and setting turns to roller mechanism between two groups of evaporation mechanisms, it can realize that single work is completed at the same time and conductive metal layer is deposited on the two sides of film, the film film surface appearance that the present invention obtains is good, corrugationless and plating ceases to be busy, and improve production efficiency.
Description
Technical field
The invention belongs to vacuum evaporation technology fields, and in particular to a kind of vacuum deposition apparatus of two-sided continuous coating.
Background technology
Currently, flexible conducting material is used widely in electronics, shielding, capacitance, automobile, new energy, space flight industry,
Main Trends of The Development is that material is more and more thinner, electric conductivity requirement is higher and higher, and the thickness of material is by 10~50 μm of original hairs
It opens up to 2~16 μm, referred to as ultrathin flexible conductive material, the continuous improvement that electronic product requires the electric conductivity of conductive material,
Require the film surface coat of metal more and more thicker, while coating quality is higher and higher.
It is ultra-thin producing due to the thinner thickness of conductive material with the continuous improvement of flexible conducting material performance requirement
When flexible conducting material, it is susceptible to film corrugation, plates the problems such as ceases to be busy, overlay coating bad order, pin hole.
Invention content
For overcome the deficiencies in the prior art, the purpose of the present invention is intended to provide a kind of vacuum evaporation of two-sided continuous coating
Device.
The technical proposal of the invention is realized in this way：
The embodiment of the present invention provides a kind of vacuum deposition apparatus of two-sided continuous coating comprising vacuum cavity, setting exist
Steering roller mechanism in vacuum cavity and two groups of evaporation mechanisms, two groups of evaporation mechanisms are setting up and down, the steering roller mechanism
The side of two groups of evaporation mechanisms is set, and film to be deposited enters the edge after the steering roller mechanism along evaporation mechanism described in one group
Evaporation mechanism described in another group to the upper and lower surface of film for continuously carrying out vacuum evaporation.
In said program, the evaporation mechanism includes winding assembly, cooling component and evaporative component, the winding assembly and
Cooling component is arranged in order, and the evaporative component member is arranged in the bottom of cooling component, and two groups of steamings are arranged in the steering roller mechanism
Plate the side of the winding assembly of mechanism；For winding, unreeling and transmitting film, the cooling component is used for the winding assembly
The temperature of film surface is reduced during vapor deposition, the evaporative component is used in film surface evaporation metal coating.
In said program, the winding assembly includes retractable volume, rocker unit, and the retractable volume is for winding or unreeling
Film to be deposited；The rocker unit includes frame body, follows roller, nip rolls and guide reel, described to follow roller, nip rolls and draw
Deflector roll is successively set on frame body, described that roller is followed to be arranged close to retractable volume, and the guide reel is arranged close to cooling unit；It is described
Frame body follows roller and the film surface outermost layer of the film in retractable volume to be kept fixed around the center rotating where guiding rod for driving
Distance.
In said program, described to follow roller, nip rolls and guide reel to be respectively provided at least one
In said program, the cooling component includes cooling main drum, preceding nip rolls, rear nip rolls, the preceding nip rolls and
Nip rolls is separately positioned on the both sides of cooling main drum afterwards.
In said program, the nip rolls, preceding nip rolls and rear nip rolls are using roller, adhesive tape roller, multistage roller or open
Width roller.
In said program, the nip rolls, preceding nip rolls and rear nip rolls cross roller using smooth surface or hair side crosses roller.
In said program, the evaporative component is using resistance-type evaporation, the evaporation of Medium frequency induction crucible or electron beam evaporation.
In said program, the steering roller mechanism includes first crossing roller, second crossing roller, third and cross roller, and described first crosses roller
Roller is crossed close to the side for the cooling component for being separately positioned on two groups of evaporation mechanisms with third, and described second, which crosses roller, is arranged in the first mistake
Roller and third are crossed between roller.
Further include the first observation window and the second observation window, first observation window and second in said program
The working condition that two groups of evaporation mechanisms of observation are respectively used on vacuum cavity is arranged in observation window.
Compared with prior art, the embodiment of the present invention provides a kind of vacuum deposition apparatus of two-sided continuous coating comprising
Vacuum cavity, the steering roller mechanism being arranged in vacuum cavity and two groups of evaporation mechanisms, two groups of evaporation mechanisms are setting up and down,
The side for turning to roller mechanism and two groups of evaporation mechanisms being arranged, film to be deposited enter along evaporation mechanism described in one group through described
It is used to continuously carry out vacuum evaporation to the upper and lower surface of film along evaporation mechanism described in another group after turning to roller mechanism, in this way, this
Invention turns to roller mechanism by the way that setting between two groups of evaporation mechanisms and two groups of evaporation mechanisms is arranged, and can realize that single works
It is completed at the same time and conductive metal layer is deposited on the two sides of film, the film film surface appearance that the present invention obtains is good, and corrugationless and plating are empty
Line, and improve production efficiency.
Description of the drawings
Fig. 1 is a kind of structural schematic diagram of the vacuum deposition apparatus of two-sided continuous coating of the embodiment of the present invention.
Reference numeral is as follows：
1 --- --- turning to roller mechanism, 21, --- first crosses roller, 22 --- second cross roller, 23 --- for vacuum cavity, 2
Three cross roller, 3 --- --- --- retractable volume, 312 --- rocker unit, 313 --- framves of winding assembly, 311 of evaporation mechanism, 31
Body, 314 --- follow roller, 315 --- nip rolls, 316 --- guide reel, 32 --- cooling component, 321 --- cooling main drum,
322 --- --- rear nip rolls, the 33 --- sights of evaporative component, 4 --- the first observation window, 5 --- second of preceding nip rolls, 323
Examine form.
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
The embodiment of the present invention provides a kind of vacuum deposition apparatus of two-sided continuous coating, as shown in Figure 1, vacuum cavity 1, setting
Steering roller mechanism 2 and two groups of evaporation mechanisms 3 in vacuum cavity 1 are set, two groups of evaporation mechanisms 3 are setting up and down, described turn
The side of two groups of evaporation mechanisms 3 is set to roller mechanism 2, and film to be deposited enters along evaporation mechanism 3 described in one group to be turned through described
Along evaporation mechanism 3 described in another group for continuously carrying out vacuum evaporation to the upper and lower surface of film after to roller mechanism 2.
The present invention has upper and lower two evaporation mechanisms, and the evaporation mechanism from upside can be used to unreel the evaporation mechanism of downside
The two ways that winding and the evaporation mechanism from downside unreel upside works, this two groups of working methods can be realized two-sided
The function of continuous vacuum evaporation plated film, the present invention is by two groups of evaporation mechanisms setting up and down, and each of two groups of evaporation mechanisms
Component be correspondingly arranged up and down and two groups of evaporation mechanisms between setting turn to roller mechanism, can realize single work be completed at the same time
Conductive metal layer is deposited on the two sides of film, the film film surface appearance that the present invention obtains is good, corrugationless and plating ceases to be busy, and carries
High efficiency.
Wherein, the evaporation mechanism 3 includes winding assembly 31, cooling component 32 and evaporative component 33, the winding assembly
31 and cooling component 32 be arranged in order, 33 yuan of the evaporative component is arranged in the bottom of cooling component 32, the steering roller mechanism 2
31 sides of the winding assembly of two groups of evaporation mechanisms 3 are set；The winding assembly 31 is used to winding, unreel and transmitting film,
The cooling component 32 is used to during vapor deposition reduce the temperature of film surface, and the evaporative component 33 is used in film surface
Evaporation metal coating.
Wherein, the winding assembly 31 include retractable volume 311, rocker unit 312, the retractable volume 311 for wind or
Person unreels film to be deposited；The rocker unit 312 includes frame body 313, follows roller 314, nip rolls 315 and guide reel 316,
It is described that roller 314, nip rolls 315 and guide reel 316 is followed to be successively set on frame body 313, it is described to follow roller 314 close to retractable volume
311 settings, the guide reel 316 are arranged close to cooling unit 32；The frame body 313 is around the center rotating where guiding rod 316
It is followed at a distance from roller 314 and the film surface outermost layer of the film in retractable volume 311 be kept fixed for driving.
The rocker unit 312 is when winding or unreeling, with increasing or reducing for the coiled strip at retractable volume 311, rocker list
Member 312, which has, follows locomotive function, and frame body 313 is rotated using the axle center where guiding rod 316 as the center of circle, to make frame body
313 swing, and then enable that roller 314 is followed to keep with the film surface outermost layer of the film of retractable volume 311 always in rocker unit 312
A certain distance, to ensure that retractable volume process film surface is smooth；
Nip rolls 315 is used for film surface roll up to receiving/releasing and flattens, and the effect for unreeling flattening is to ensure film surface into cold
Before main drum 321 film surface planarization effects, the effect for winding flattening is to ensure that the flatness of winding film surface and overall winding are outer
See effect；
Guide reel 316 crosses roller using common, and its role is to conduct guiding film surface, can also be used as tension-sensing roller makes
With.
Wherein, the cooling component 32 includes cooling main drum 321, preceding nip rolls 322, rear nip rolls 323, is flattened before described
Roller 322 and rear nip rolls 323 are separately positioned on the both sides of cooling main drum 321.
The main function of cooling main drum 321 is to provide amount of cooling water for film, the heat transfer that evaporation process is formed to equipment
Outside keeps film surface to complete vapor deposition process under the state of temperature of reduction；
Preceding nip rolls 322 is used to open up in advance when film enters cooling main drum 321 as the nip rolls for entering cooling main drum 321
It is flat, it ensures that it is substantially flat to enter the film of cooling main 321 drum surface of drum, ensures the complete of the main drum of film surface and cooling 321 in this way
Fitting；When nip rolls 323 is as the nip rolls for going out cooling main drum 321 afterwards, acted on for flattening dragging using its, ensure film surface with
The tension fit-state of cooling main drum 321；Nip rolls 322 and rear flattening before being respectively set before and after passing in and out cooling main drum 321
Roller 323 can ensure perfectly patch drum type state, and then ensure good heat-conducting effect, reduce film surface corrugation and plate going out for ceases to be busy
It is existing.
Wherein, the nip rolls 315, preceding nip rolls 322 and the optimal optional roller or adhesive tape of rear nip rolls 323
Roller can also select multistage roller, expander etc., can also be changed to common roller excessively with the same function, can be smooth surface
Roller is crossed, can also be that the hair side with certain friction coefficient crosses roller, can all replace, which can also combine replacement, uses, in addition,
It is described that follow roller 314, nip rolls 315 and guide reel 316 to be respectively provided at least one.
Wherein, evaporative component 33 is using resistance-type evaporation, the evaporation of Medium frequency induction crucible or electron beam evaporation.
Evaporative component 33 is used to conductive metal being evaporated to gaseous state under vacuum as evaporation source, and gaseous metal molecule is true
The aerial film surface that diffuses to forms the coat of metal；Resistance-type evaporation, the evaporation of Medium frequency induction crucible, electricity can be used in the type of evaporation source
Beamlet evaporation etc..
Wherein, it includes first crossing roller 21, second and crossing roller 22, third and cross roller 23 to turn to roller mechanism 2, and described first crosses 21 He of roller
Third crosses roller 23 close to the side for the cooling component 32 for being separately positioned on two groups of evaporation mechanisms 3, and described second, which crosses the setting of roller 22, exists
First roller 21 and third excessively is crossed between roller 23.
The film surface that roller mechanism 2 is used to connect upper and lower two groups of evaporation mechanisms 3 is turned to, free film length is reduced；First mistake roller 21,
Second crosses roller 22, third crosses roller 23 and common plain roller may be used, and can also use various forms of nip rolls, can also group
It closes and uses.
Vacuum cavity 1 provides vacuum working environment, the first observation window 4 and the second observation window for entire group evaporation mechanism
5 are arranged the working condition for the evaporative component 33 that two groups of evaporation mechanisms 3 of observation are respectively used on vacuum cavity 1.
A kind of course of work of the vacuum deposition apparatus of two-sided continuous coating provided in an embodiment of the present invention is：It uses with certainly
On unreel lower part winding for, coiled strip be placed on upside evaporation mechanism 3 retractable volume 311 on, coiled strip pass through upside follow roller 314
Afterwards, into the nip rolls of upside 315, enter the main drum 321 of cooling of the cooling component 32 of upside by guide reel 316 later, this
When film surface be inside that the faces A are located at cooling main drum 321, the faces B are located at the outside of cooling main drum 321 and face evaporative component 33, B
Face is coated with metal conducting layer first on the evaporation mechanism 3 of upside；
The faces B of film surface are deposited after turning to roller mechanism 2 and turning to, specifically, after nip rolls 323 later, according to
It is secondary through first cross roller 21, second and cross roller 22, third cross roller 23, into after the preceding nip rolls 322 of downside cooling component 32, film into
Enter the main drum 321 of cooling of downside, film surface becomes the faces B in the inside of the main drum of cooling 321 at this time, and the faces A are in the outside of the main drum of cooling 321
And the evaporative component 33 below face, the faces A are also coated with metal conducting layer on the evaporation mechanism 3 of downside；Finally, under
After the rear nip rolls 323 of side cooling component 32, the rocker unit 312 through downside is finally wound by the retractable volume of downside 311.Through
It crosses such plated film and can be realized to be completed at the same time on film and all plate conductive metal layer on film surface two sides.
The present invention is suitable for the vacuum evaporation coating membrane process compared with thin material, such as 2~30 μm of plastic films, laminated film, paper
, the base materials such as cloth vacuum environment evaporation coating process；Optimally, this system be more suitable for 2~8 μm of plastic film such as PET,
The evaporation coating process in vacuum environment such as PEN, PI, PP, PE and non-woven fabrics, thin paper.
Embodiment 1
The present embodiment 1 unreels a diameter of 600mm, substrate material PET, PI etc., and evaporation source is Medium frequency induction crucible, earthenware
Fine copper particle, purity >=99.995% of copper are put into crucible；
The present embodiment 1 is used to unreel the pattern of top winding under, is worn material sequence and is：The retractable volume 311 of downside → under
Preceding 322 → downside of nip rolls of 316 → downside of guide reel of the 315 → downside of nip rolls for following 314 → downside of roller of side it is cold
Rear 323 → third of nip rolls of main 321 → downside of drum crosses roller 23 → the second and crosses the rear exhibition that roller 22 → the first crosses 21 → upside of roller
The nip rolls of 316 → upside of guide reel of preceding 322 → upside of nip rolls of the main 321 → upside of drum of cooling of 323 → upside of plain-barreled roll
The retractable volume 311 for following 314 → upside of roller of 315 → upside, cooling main drum use coolant liquid circulating cooling, cooling temperature -20
DEG C, plated film under conditions of vacuum≤5 × 10-2Pa once can be simultaneously in base material with the film-passing speed of 100~600m/min
Two sides obtainsThe copper coating of thickness, this method film surface appearance is good, corrugationless, no plating ceases to be busy.
Embodiment 2
The present embodiment 2 unreels a diameter of 600mm, substrate material PET, PI etc., and evaporation source is conductive ceramic evaporation boat,
Aluminium wire is sent into above evaporation boat in a manner of wire feed, purity >=99.95% of aluminium；
The present embodiment 2 is used so that from the pattern for above unreeling lower part winding, wearing material sequence is：The retractable volume 311 of upside → on
Preceding 322 → upside of nip rolls of 316 → upside of guide reel of the 315 → upside of nip rolls for following 314 → upside of roller of side it is cold
The rear nip rolls 323 → the first of main 321 → upside of drum crosses roller 21 → the second and crosses the rear exhibition that 22 → third of roller crosses 23 → downside of roller
The nip rolls of 316 → downside of guide reel of preceding 322 → downside of nip rolls of the main 321 → downside of drum of cooling of 323 → downside of plain-barreled roll
The retractable volume 311 for following 314 → downside of roller of 315 → downside, cooling main drum use coolant liquid circulating cooling, cooling temperature -15
DEG C, plated film under conditions of vacuum≤6.7 × 10-2Pa once can be simultaneously in base with the film-passing speed of 100~600m/min
Material two sides obtainsThe aluminium coat of thickness, this method film surface appearance is good, corrugationless, no plating ceases to be busy.
The foregoing is only a preferred embodiment of the present invention, is not intended to limit the scope of the present invention.
Claims (10)
1. a kind of vacuum deposition apparatus of two-sided continuous coating, which is characterized in that it includes vacuum cavity (1), is arranged in vacuum
Steering roller mechanism (2) in cavity (1) and two groups of evaporation mechanisms (3), two groups of evaporation mechanisms (3) setting symmetrical above and below, institute
State turn to roller mechanism (2) be arranged two groups of evaporation mechanisms (3) side, film to be deposited along evaporation mechanism (3) described in one group into
Enter after the steering roller mechanism (2) along evaporation mechanism (3) described in another group for continuously being carried out very to the upper and lower surface of film
Sky vapor deposition.
2. the vacuum deposition apparatus of two-sided continuous coating according to claim 1, which is characterized in that the evaporation mechanism
(3) include winding assembly (31), cooling component (32) and evaporative component (33), the winding assembly (31) and cooling component (32)
It is arranged in order, in the bottom of cooling component (32), the steering roller mechanism (2) is arranged two groups for evaporative component (33) the member setting
The side of the winding assembly (31) of evaporation mechanism (3)；The winding assembly (31) is for winding, unreeling and transmitting film, institute
Temperature of the cooling component (32) for reducing film surface during vapor deposition is stated, the evaporative component (33) is used in film table
Face evaporation metal coating.
3. the vacuum deposition apparatus of two-sided continuous coating according to claim 2, which is characterized in that the winding assembly
(31) include retractable volume (311), rocker unit (312), the retractable volume (311) is used to wind or unreel to be deposited thin
Film；The rocker unit (312) includes frame body (313), follows roller (314), nip rolls (315) and guide reel (316), it is described with
It is successively set on frame body (313) with roller (314), nip rolls (315) and guide reel (316), it is described to follow roller (314) close to receipts
(311) setting is unreeled, the guide reel (316) is arranged close to cooling unit (32)；The frame body (313) is around guiding rod (316)
The center rotating at place is for driving the film surface outermost layer for following roller (314) and the film in retractable volume (311) to be kept fixed
Distance.
4. the vacuum deposition apparatus of two-sided continuous coating according to claim 3, which is characterized in that described to follow roller
(314), nip rolls (315) and guide reel (316) are respectively provided at least one.
5. the vacuum deposition apparatus of two-sided continuous coating according to claim 3, which is characterized in that the cooling component
(32) include cooling main drum (321), preceding nip rolls (322), rear nip rolls (323), the preceding nip rolls (322) and rear nip rolls
(323) both sides of cooling main drum (321) are separately positioned on.
6. the vacuum deposition apparatus of two-sided continuous coating according to claim 4, which is characterized in that the nip rolls
(315), preceding nip rolls (322) and rear nip rolls (323) are all made of roller, adhesive tape roller, multistage roller or expander.
7. the vacuum deposition apparatus of two-sided continuous coating according to claim 4, which is characterized in that the nip rolls
(315), preceding nip rolls (322) and rear nip rolls (323) are all made of that smooth surface crosses roller or hair side crosses roller.
8. the vacuum deposition apparatus of two-sided continuous coating according to claim 2, which is characterized in that the evaporative component
(33) resistance-type evaporation, the evaporation of Medium frequency induction crucible or electron beam evaporation are used.
9. the vacuum deposition apparatus of two-sided continuous coating according to claim 2, which is characterized in that the steering roller mechanism
(2) include first cross roller (21), second cross roller (22), third crosses roller (23), described first crosses roller (21) and third crosses roller (23)
Close to the side for the cooling component (32) for being separately positioned on two groups of evaporation mechanisms (3), described second, which crosses roller (22), is arranged first
It crosses roller (21) and third is crossed between roller (23).
10. according to the vacuum deposition apparatus of two-sided continuous coating described in any one of claim 1-9, which is characterized in that its
Further include the first observation window (4) and the second observation window (5), first observation window (4) and the second observation window (5) are set
Set the working condition that two groups of evaporation mechanisms (3) of observation are respectively used on vacuum cavity (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810893345.2A CN108624861A (en) | 2018-08-07 | 2018-08-07 | The vacuum deposition apparatus of two-sided continuous coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810893345.2A CN108624861A (en) | 2018-08-07 | 2018-08-07 | The vacuum deposition apparatus of two-sided continuous coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108624861A true CN108624861A (en) | 2018-10-09 |
Family
ID=63689158
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810893345.2A Withdrawn CN108624861A (en) | 2018-08-07 | 2018-08-07 | The vacuum deposition apparatus of two-sided continuous coating |
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|---|---|---|---|---|
| CN109355634A (en) * | 2018-12-12 | 2019-02-19 | 安徽金美新材料科技有限公司 | The vacuum deposition apparatus of two-sided continuous coating |
| CN110600264A (en) * | 2019-09-02 | 2019-12-20 | 海宁钟江智能科技有限公司 | Capacitor film and double-sided metal stacking process thereof |
| CN110597422A (en) * | 2019-09-02 | 2019-12-20 | 海宁钟江智能科技有限公司 | Aluminum metal grid capacitor touch film and manufacturing method thereof |
| CN114318241A (en) * | 2022-02-15 | 2022-04-12 | 福建华佳彩有限公司 | Visual line source crucible device and material monitoring method thereof |
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| CN115725951A (en) * | 2022-12-16 | 2023-03-03 | 江门市兆业科技有限公司 | Preparation method of metallized film with two-sided continuous deposition coating |
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2018
- 2018-08-07 CN CN201810893345.2A patent/CN108624861A/en not_active Withdrawn
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| CN109355634A (en) * | 2018-12-12 | 2019-02-19 | 安徽金美新材料科技有限公司 | The vacuum deposition apparatus of two-sided continuous coating |
| CN110600264A (en) * | 2019-09-02 | 2019-12-20 | 海宁钟江智能科技有限公司 | Capacitor film and double-sided metal stacking process thereof |
| CN110597422A (en) * | 2019-09-02 | 2019-12-20 | 海宁钟江智能科技有限公司 | Aluminum metal grid capacitor touch film and manufacturing method thereof |
| CN110597422B (en) * | 2019-09-02 | 2023-01-06 | 海宁光圣晶体材料有限公司 | Aluminum metal grid capacitor touch film and manufacturing method thereof |
| CN114369809A (en) * | 2021-12-17 | 2022-04-19 | 重庆金美新材料科技有限公司 | High polymer material surface plating device and plating method |
| CN114369809B (en) * | 2021-12-17 | 2023-11-03 | 重庆金美新材料科技有限公司 | High polymer material surface plating device and plating method |
| CN114481033A (en) * | 2021-12-30 | 2022-05-13 | 昆山鑫美源电子科技有限公司 | Preparation equipment and preparation method of composite current collector |
| CN114481033B (en) * | 2021-12-30 | 2024-03-12 | 昆山鑫美源电子科技有限公司 | Preparation equipment and preparation method of composite current collector |
| CN114481034A (en) * | 2022-01-04 | 2022-05-13 | 重庆金美新材料科技有限公司 | Preparation method, equipment and system of composite metal foil |
| CN114318241A (en) * | 2022-02-15 | 2022-04-12 | 福建华佳彩有限公司 | Visual line source crucible device and material monitoring method thereof |
| WO2024008038A1 (en) * | 2022-07-05 | 2024-01-11 | 无锡先导智能装备股份有限公司 | Apparatus for lithium supplementation by evaporation deposition |
| CN115725951A (en) * | 2022-12-16 | 2023-03-03 | 江门市兆业科技有限公司 | Preparation method of metallized film with two-sided continuous deposition coating |
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