CN109518154A - Superconducting strip cushion double-sided coating device - Google Patents
Superconducting strip cushion double-sided coating device Download PDFInfo
- Publication number
- CN109518154A CN109518154A CN201910038625.XA CN201910038625A CN109518154A CN 109518154 A CN109518154 A CN 109518154A CN 201910038625 A CN201910038625 A CN 201910038625A CN 109518154 A CN109518154 A CN 109518154A
- Authority
- CN
- China
- Prior art keywords
- directive wheel
- disk
- base band
- sputtering chamber
- wheel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 32
- 239000011248 coating agent Substances 0.000 title claims abstract description 31
- 238000000034 method Methods 0.000 claims abstract description 7
- 238000004544 sputter deposition Methods 0.000 claims description 21
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 239000002184 metal Substances 0.000 abstract description 5
- 229910052751 metal Inorganic materials 0.000 abstract description 5
- 239000007888 film coating Substances 0.000 abstract description 2
- 238000009501 film coating Methods 0.000 abstract description 2
- 238000007747 plating Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention relates to a kind of superconducting strip cushion double-sided coating devices.It is secondary around low with existing production efficiency and the technical issues of friction leave scratch can be generated to metal base band and film surface mainly to solve secondary film coating.A kind of technical solution of the present invention are as follows: superconducting strip cushion double-sided coating device, disk and closed reel are unreeled including horizontal spacing setting, in the side for unreeling disk, directive wheel a and directive wheel b is set, directive wheel a and directive wheel b is setting up and down and in same axis, directive wheel c is equipped in the left side for unreeling disk, directive wheel c with unreel directive wheel b below disk in the same horizontal line, directive wheel d is equipped in the top of directive wheel c, directive wheel c and directive wheel d are on the same axis, directive wheel e is equipped in the horizontal direction of directive wheel d, same axis is equipped with directive wheel f below directive wheel e, the directive wheel f and directive wheel g on the outside of closed reel is in the same horizontal line, base band enters closed reel from the above-mentioned each directive wheel of disk output process is unreeled, front coating apparatus is equipped on the left of the base band on directive wheel c and directive wheel d, Reverse side coating apparatus is equipped on the left of the base band on directive wheel e and directive wheel f.
Description
Technical field
The present invention relates to the coating apparatus of band, in particular to a kind of superconducting strip cushion double-sided coating device.
Background technique
Superconduction coating process is the enterprising row buffering layer plated film of metal base band after a polish at present, plates several layers of oxidation films
Layer improves the growth conditions of lower road technique superconducting layer.For normal production, at the polishing of our advanced row metal bands
Reason, this is two-sided electrochemical polish technology.But when arriving subsequent handling, the preparation of the plated film and superconducting layer of buffer layer is all single side
Production, is also the performance of only single side including final product.
If preparation can be synchronized from the back side of base band, the product of same thickness possesses two-sided buffer layer and surpasses
After conducting shell, double promotion is also had in performance.If double-sided coating is carried out to the metal base band after polishing, by existing
Equipment certainly will there was only a kind of method: be exactly normal first plating one side, carry out after completing reversely around band, film surface around inside
Portion, the back side outwardly, carry out second of plated film again after completing.In our current process flows, multiple can be to gold around band
Belong to base band and film surface generates friction and leaves the irreversible destruction such as scratch, and it is non-repeatedly to prepare the efficiency for production
It is often low.
Summary of the invention
The object of the present invention is to provide a kind of superconducting strip cushion double-sided coating devices, and it is secondary mainly to solve secondary film coating
Around low with existing production efficiency and the technical issues of friction leave scratch can be generated to metal base band and film surface.
Technical solution of the present invention are as follows: a kind of superconducting strip cushion double-sided coating device, putting including horizontal spacing setting
Reel and closed reel, unreel disk side setting directive wheel a and directive wheel b, directive wheel a and directive wheel b it is setting up and down and
Same axis is equipped with directive wheel c in the left side for unreeling disk, directive wheel c with unreel directive wheel b below disk in same horizontal line
On, directive wheel d, directive wheel c and directive wheel d are equipped on the same axis in the top of directive wheel c, in the level side of directive wheel d
To directive wheel e is equipped with, same axis is equipped with directive wheel f below directive wheel e, and directive wheel f exists with the directive wheel g on the outside of closed reel
In same horizontal line, base band enters closed reel from the above-mentioned each directive wheel of disk output process is unreeled, in directive wheel c and directive wheel d
On base band on the left of be equipped with front coating apparatus, on the left of the base band on directive wheel e and directive wheel f be equipped with reverse side coating apparatus.
Directive wheel c and directive wheel d is arranged in sputtering chamber a, and front coating apparatus is fixed on sputtering chamber a inner wall, guiding
It takes turns e and directive wheel f to be arranged in sputtering chamber b, reverse side coating apparatus is fixed on sputtering chamber b inner wall, sputtering chamber a and sputtering chamber b
Upper end is located in adapter cavity by adapter cavity connection by the base band of directive wheel d and directive wheel e.
The beneficial effects of the present invention are: point two chambers successively carry out base band by the way of once preparing double-sided coating
The plated film on two sides.The efficiency of double-sided coating is substantially increased, and reduces multiple coiling bring risk, unit cost
Superconducting tape, which just has, has double superconductivity.
Detailed description of the invention
Fig. 1 is schematic structural view of the invention.
Fig. 2 is plated film base band of the present invention XRD test result figure end to end.
Fig. 3 is plated film base band roughness result figure of the present invention.
In figure: 1- unreels disk, 2- closed reel, 3- directive wheel a, 4- directive wheel b, 5- directive wheel c, 6- directive wheel d, 7- guiding
Wheel e, 8- directive wheel f, 9- directive wheel g, 10- base band, the front 11- coating apparatus, 12- reverse side coating apparatus, 13- sputtering chamber a,
14- sputtering chamber b, 15- adapter cavity.
Specific embodiment
Referring to Fig.1, a kind of superconducting strip cushion double-sided coating device unreels disk 1 and receipts including horizontal spacing setting
Reel 2, it is setting up and down and same in side setting the directive wheel a3 and directive wheel b4, directive wheel a3 and directive wheel b4 for unreeling disk 1
One axis is equipped with directive wheel c5 in the left side for unreeling disk 1, directive wheel c5 with unreel directive wheel b4 below disk in same level
On line, directive wheel d6, directive wheel c5 and directive wheel d6 are equipped on the same axis in the top of directive wheel c5, directive wheel d6's
Horizontal direction is equipped with directive wheel e7, and same axis is equipped with directive wheel f8,2 outside directive wheel f8 and closed reel below directive wheel e7
Directive wheel g9 in the same horizontal line, base band 10 enters closed reel 2 by above-mentioned each directive wheel from unreeling the output of disk 1,
Front coating apparatus 11(Chinese Academy of Sciences Shenyang scientific instrument share is equipped on the left of base band 10 on directive wheel c5 and directive wheel d6
Co., Ltd), reverse side coating apparatus 12(Chinese Academy of Sciences Shenyang is equipped on the left of the base band 10 on directive wheel e7 and directive wheel f8
Scientific instrument limited liability company).
Directive wheel c5 and directive wheel d6 is arranged in sputtering chamber a13, and front coating apparatus 11 is fixed on sputtering chamber a13 inner wall
On, directive wheel e7 and directive wheel f8 are arranged in sputtering chamber b14, and reverse side coating apparatus 12 is fixed on sputtering chamber b14 inner wall, is splashed
Chamber a13 and the upper end sputtering chamber b14 are penetrated by 15 connection of adapter cavity, is located at transition by the base band 10 of directive wheel d6 and directive wheel e7
In chamber 15.
When work, base band 10 is from disk 1 is unreeled, and approach sputtering chamber a13 carries out first time front plated film, using transition
Chamber 15 reaches sputtering chamber b14, carries out second of back side coating film, is eventually returned in closed reel 2.Once just complete tow sides plating
Film.
XRD test result is shown in Fig. 2 to the long band plated film base band in 1000 obtained end to end, test condition: LMO(46.10)-omg,
FWHM=3.3.Roughness 1.7nm is shown in Fig. 3, test condition: 9.5*9.5 μm.
Claims (2)
1. a kind of superconducting strip cushion double-sided coating device unreels disk and closed reel, feature including horizontal spacing setting
It is: it is setting up and down in the side setting directive wheel a and directive wheel b, directive wheel a and directive wheel b that unreel disk and in same axis,
The left side for unreeling disk is equipped with directive wheel c, directive wheel c with unreel directive wheel b below disk in the same horizontal line, in directive wheel
The top of c is equipped with directive wheel d, directive wheel c and directive wheel d on the same axis, is equipped with directive wheel in the horizontal direction of directive wheel d
Same axis is equipped with directive wheel f, directive wheel f and the directive wheel g on the outside of closed reel in same horizontal line below e, directive wheel e
On, base band enters closed reel from the above-mentioned each directive wheel of disk output process is unreeled, and the base band on directive wheel c and directive wheel d is left
Side is equipped with front coating apparatus, and reverse side coating apparatus is equipped on the left of the base band on directive wheel e and directive wheel f.
2. superconducting strip cushion double-sided coating device according to claim 1, it is characterized in that: directive wheel c and directive wheel d
It is arranged in sputtering chamber a, front coating apparatus is fixed on sputtering chamber a inner wall, and directive wheel e and directive wheel f are arranged in sputtering chamber b
Interior, reverse side coating apparatus is fixed on sputtering chamber b inner wall, and sputtering chamber a and the upper end sputtering chamber b are by adapter cavity connection, by leading
It is located in adapter cavity to the base band of wheel d and directive wheel e.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910038625.XA CN109518154A (en) | 2019-01-16 | 2019-01-16 | Superconducting strip cushion double-sided coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910038625.XA CN109518154A (en) | 2019-01-16 | 2019-01-16 | Superconducting strip cushion double-sided coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109518154A true CN109518154A (en) | 2019-03-26 |
Family
ID=65798827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910038625.XA Pending CN109518154A (en) | 2019-01-16 | 2019-01-16 | Superconducting strip cushion double-sided coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109518154A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111029032A (en) * | 2019-11-18 | 2020-04-17 | 西部超导材料科技股份有限公司 | Method for improving surface quality of NbTi superconducting wire |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1327081A (en) * | 2001-05-29 | 2001-12-19 | 深圳市坦达尼真空表面技术有限公司 | Vacuum evaporation coating method and equipment for organic foamed material |
| CN1851040A (en) * | 2006-05-25 | 2006-10-25 | 电子科技大学 | Continuous preparation method of dual-face superconducting strip cushion |
| KR100998851B1 (en) * | 2010-05-27 | 2010-12-08 | 한국기계연구원 | An method of forming buffer layers for superconducting tape |
| CN102255040A (en) * | 2011-04-13 | 2011-11-23 | 电子科技大学 | Continuous preparation method of double-sided superconducting strip buffer layer |
| CN103741121A (en) * | 2013-12-24 | 2014-04-23 | 北京北印东源新材料科技有限公司 | Double-sided coating device for soft base material |
| CN104611680A (en) * | 2015-02-09 | 2015-05-13 | 常州工学院 | Magnetron sputtering winding plating equipment capable of rapid target exchanging and double-sided reciprocating continuous high-efficient plating |
| CN104674180A (en) * | 2015-02-09 | 2015-06-03 | 常州工学院 | Quick target-exchange double-sided reciprocating continuous-coating magnetron sputtering winding coating machine |
| CN105702379A (en) * | 2016-02-24 | 2016-06-22 | 上海上创超导科技有限公司 | High-temperature superconductor tape serialization rapid heating device |
| CN108149214A (en) * | 2018-02-05 | 2018-06-12 | 苏州新材料研究所有限公司 | High production capacity film deposition apparatus and film batch production method |
| CN209508401U (en) * | 2019-01-16 | 2019-10-18 | 上海上创超导科技有限公司 | Superconducting strip cushion double-sided coating device |
-
2019
- 2019-01-16 CN CN201910038625.XA patent/CN109518154A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1327081A (en) * | 2001-05-29 | 2001-12-19 | 深圳市坦达尼真空表面技术有限公司 | Vacuum evaporation coating method and equipment for organic foamed material |
| CN1851040A (en) * | 2006-05-25 | 2006-10-25 | 电子科技大学 | Continuous preparation method of dual-face superconducting strip cushion |
| KR100998851B1 (en) * | 2010-05-27 | 2010-12-08 | 한국기계연구원 | An method of forming buffer layers for superconducting tape |
| CN102255040A (en) * | 2011-04-13 | 2011-11-23 | 电子科技大学 | Continuous preparation method of double-sided superconducting strip buffer layer |
| CN103741121A (en) * | 2013-12-24 | 2014-04-23 | 北京北印东源新材料科技有限公司 | Double-sided coating device for soft base material |
| CN104611680A (en) * | 2015-02-09 | 2015-05-13 | 常州工学院 | Magnetron sputtering winding plating equipment capable of rapid target exchanging and double-sided reciprocating continuous high-efficient plating |
| CN104674180A (en) * | 2015-02-09 | 2015-06-03 | 常州工学院 | Quick target-exchange double-sided reciprocating continuous-coating magnetron sputtering winding coating machine |
| CN105702379A (en) * | 2016-02-24 | 2016-06-22 | 上海上创超导科技有限公司 | High-temperature superconductor tape serialization rapid heating device |
| CN108149214A (en) * | 2018-02-05 | 2018-06-12 | 苏州新材料研究所有限公司 | High production capacity film deposition apparatus and film batch production method |
| CN209508401U (en) * | 2019-01-16 | 2019-10-18 | 上海上创超导科技有限公司 | Superconducting strip cushion double-sided coating device |
Non-Patent Citations (1)
| Title |
|---|
| 赵晓辉;陶伯万;熊杰;刘兴钊;李言荣;: "双面高温超导带材研究进展", 中国材料进展, no. 03 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111029032A (en) * | 2019-11-18 | 2020-04-17 | 西部超导材料科技股份有限公司 | Method for improving surface quality of NbTi superconducting wire |
| CN111029032B (en) * | 2019-11-18 | 2021-07-06 | 西部超导材料科技股份有限公司 | Method for improving surface quality of NbTi superconducting wire |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN209508401U (en) | Superconducting strip cushion double-sided coating device | |
| US11910727B2 (en) | Ultra-thin film superconducting tapes | |
| JP4268645B2 (en) | Rare earth tape oxide superconductor and composite substrate used therefor | |
| CN107502870B (en) | A method of improving lithium battery anode aluminium foil collector electrical property | |
| CN110770925A (en) | High-temperature superconducting wire for improving engineering current density | |
| CN106030732B (en) | High frequency transformer magnetic core and its manufacturing method | |
| CN106716559B (en) | Superconducting wire substrate and its manufacturing method and superconducting wire | |
| CN109518154A (en) | Superconducting strip cushion double-sided coating device | |
| CN105869782A (en) | Preparation method of high-temperature superconducting line | |
| CN111415784A (en) | Compound processing production line of many specifications cable | |
| CN110004427A (en) | Flexible continuity magnetron sputtering deposition plating work chamber partition method | |
| CN104716118B (en) | A kind of atomic thin plating palladium copper bonding wire and preparation method thereof | |
| CN213950178U (en) | High efficiency tinned wire winding and unwinding devices | |
| CN104716250A (en) | Extremely fine gold free silver alloy gold-plating bonding wire and manufacture method thereof | |
| GB1172026A (en) | Superconducting Windings | |
| CN218532314U (en) | Lithium strip rolling device | |
| CN116904956A (en) | Roll-to-roll magnetron sputtering coating device | |
| CN106835051B (en) | Wire winding film plating machine | |
| CN208279102U (en) | A kind of actinobacillus device of superconductor electromagnetic wire | |
| CN108103470A (en) | A kind of automatic control reel system | |
| CN106104709B (en) | Equipment for manufacturing ceramic thread | |
| CN209835302U (en) | Copper line processing is with copper line around stake | |
| US8309495B2 (en) | Method for the production of a superconducting electrical conductor, and a superconducting conductor | |
| CN215577774U (en) | Shielding wire and electronic product | |
| CN206976501U (en) | Battery core component, lithium battery and mobile terminal |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20190326 |