CN107502870B - A method of improving lithium battery anode aluminium foil collector electrical property - Google Patents
A method of improving lithium battery anode aluminium foil collector electrical property Download PDFInfo
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- CN107502870B CN107502870B CN201710667756.5A CN201710667756A CN107502870B CN 107502870 B CN107502870 B CN 107502870B CN 201710667756 A CN201710667756 A CN 201710667756A CN 107502870 B CN107502870 B CN 107502870B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
- H01M4/0402—Methods of deposition of the material
- H01M4/0421—Methods of deposition of the material involving vapour deposition
- H01M4/0423—Physical vapour deposition
- H01M4/0426—Sputtering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/64—Carriers or collectors
- H01M4/66—Selection of materials
- H01M4/661—Metal or alloys, e.g. alloy coatings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/64—Carriers or collectors
- H01M4/66—Selection of materials
- H01M4/665—Composites
- H01M4/667—Composites in the form of layers, e.g. coatings
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
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Abstract
The present invention discloses a kind of method using vacuum magnetic-control sputtering deposition of aluminum film and deposits one layer of nanometer aluminium film in the aluminium foil surface of traditional anode for lithium battery collector.This method includes step: aluminium foil to be processed being cut to the size of needs, is fixed on the let off roll position of filming equipment；Adjusting equipment extremely can coating process condition；Equipment reel system is adjusted, the aluminium foil to be coated on let off roll is unfolded, adjustment aluminium foil winding tension is stable to aluminium foil；Plasma bombardment processing is carried out to aluminium foil surface using ion source；Plasma bombardment is carried out using the ion source of take-up type vacuum magnetic-controlled sputtering coating equipment, deposits certain thickness thin film aluminum in aluminium foil surface；After aluminium foil surface deposition of aluminum film, heating anneal processing is carried out under vacuum conditions.It reduces rolling aluminium foil roughness using vacuum magnetron sputtering coating film technology and improves its electric conductivity.It reduces.Lithium battery anode collector aluminium foil roughness and improve its electric conductivity.
Description
Technical field
The present invention relates to lithium battery device and lithium battery material manufacturing technology fields, and in particular to a kind of raising lithium battery is just
The method of pole aluminium foil collector electrical property.
Background technique
Lithium ion battery is mainly made of anode, cathode, diaphragm and electrolyte.The potential that battery the two poles of the earth are added in when charging is compeled
The lithium intercalation compound of anode is set to release lithium ion, by being embedded in the graphite cathode of six side's lamellar structures after diaphragm；When electric discharge
Lithium ion is then precipitated from the graphite of lamellar structure, combines again with the lithium intercalation compound of anode, and the movement of lithium ion produces
Electric current.Although the structure and charge and discharge process chemical principle of lithium ion battery are very simple, however answer in actual commercialization
It needs to consider many problems in.Such as the electric conductivity of positive and negative pole material, charge and discharge potential, activity, the structure of de- slotting lithium are steady
Qualitative energy, high rate performance and security performance etc., and stability, electric conductivity and environmental suitability of electrolyte etc..
In addition to above-mentioned factor, the internal resistance of lithium ion battery must be sufficiently small, only in this way just can guarantee the reliability used
With longer cycle life.This depends not only on positive and negative anodes activity, and has sizable relationship with collector.Lithium-ion electric
The main material of pond collector is metal foil (such as copper foil, aluminium foil), and function is that the electric current for generating cell active materials collects
Get up, to form biggish electric current output, therefore collector should come into full contact with active material, and internal resistance should be as far as possible
Small, this is also the main reason for why lithium ion battery selects the higher copper foil of price and aluminium foil.
In addition, in lithium battery batch production, due to partial size very little, the specific surface area of the materials such as phosphoric acid Asia lithium and lithium titanate
Very high, the caking property between aluminium foil is very poor, and the very easy picking etc. that occurs is bad, causes production difficulty, finished battery rate low.
We experimentally found that the hydrophily of electrode aluminium foil is related to itself institutional framework and surface roughness, directly influence
Engagement capacity, adhesive ability with positive active material.Aluminium foil must have preferable adhesion strength to positive active material, with
Just positive electrode material is uniformly coated and does not fall off, otherwise influence whether the internal resistance of cell and service life cycle etc., this requires make
To have certain roughness for the foil surface of electrode collector, but surface roughness is not the fixture that is the bigger the better, fixture with
The increase fixture of surface roughness, the surface being easily wetted become easier to wetting, the more preferable fixture of hydrophily, fixture and it is difficult
The surface of wetting become increasingly difficult to wetting, hydrophily it is worse.Active substances in cathode materials and the big collector foil of surface roughness
Contact is poor, adhesive force is low, easy to fall off, and fixture will have a direct impact on electrical property and the service life of battery.
There is presently no international standard and national technical standard, lithium battery industries generally to want for lithium battery anode collector aluminium foil
Aluminium foil surface roughness Rz≤2.0um is sought, and uses rolling aluminium foil.
To sum up, this field needs a kind of to reduce tradition rolling lithium battery anode collector aluminium foil roughness and improve it and lead
The production method of electrical property.
Summary of the invention
In view of the defects and deficiencies of the prior art, the present invention intends to provide a kind of raising lithium battery anode aluminium foil collection
The method of electrode electrical property, it reduces rolling aluminium foil roughness using vacuum magnetron sputtering coating film technology and improves its electric conductivity
Energy.
To achieve the above object, the technical solution adopted by the present invention is that:
A method of lithium battery anode aluminium foil collector electrical property is improved, the side of vacuum magnetic-control sputtering deposition of aluminum film is utilized
Method deposits one layer of nanometer aluminium film in the aluminium foil surface of traditional anode for lithium battery collector, to improve leading for positive collector electrode
Electrical property.
As a preferred solution of the present invention, this method it the following steps are included:
A, using take-up type vacuum magnetic-controlled sputtering coating equipment, by traditional lithium battery collector aluminium foil to be processed net
Change and be cut to the sizes of needs in room, then by aluminum foil coil on dismountable fixture, will plated film aluminium foil be fixed on takeup type
The let off roll position of vacuum magnetron sputtering coating film equipment prepares magnetic control sputtering plating aluminium film；
B, take-up type vacuum magnetic-controlled sputtering coating equipment is operated, adjustment equipment extremely can coating process condition；
C, equipment reel system is adjusted, the aluminium foil to be coated on let off roll is unfolded, adjustment aluminium foil winding tension to aluminium
Foil is stable；
D, aluminium foil surface is carried out at plasma bombardment using the ion source of take-up type vacuum magnetic-controlled sputtering coating equipment
Reason, removing aluminium foil surface oxide layer, removal surface spike, reduces aluminium foil surface roughness；
E, plasma bombardment is carried out using the ion source of take-up type vacuum magnetic-controlled sputtering coating equipment, it is heavy in aluminium foil surface
The certain thickness thin film aluminum of product；
F, after aluminium foil surface deposition of aluminum film, heating anneal processing is carried out under vacuum conditions, eliminates the metal inside aluminium foil
Stress.
As a preferred solution of the present invention, the breadth size after aluminium foil is cut in the step a are as follows: 0.2-0.6m.
It as a preferred solution of the present invention, can coating process condition in the step b are as follows: background vacuum 5x10-3Pa, plating
Film vacuum degree 3x10-1Pa。
As a preferred solution of the present invention, equipment reel system is adjusted in the step c includes: setting winding speed:
0.5-1.5m/s, setting aluminium foil winding tension control range: 5-30N.
As a preferred solution of the present invention, step d intermediate ion source bombardment processing process conditions are as follows: setting ion source function
Rate 0.2-3kw, bombardment speed: 0.5-1.5m/s.
As a preferred solution of the present invention, the aluminium film thickness range through plasma bombardment sputter is in the step e:
250nm-350nm；
As a preferred solution of the present invention, in the step f after aluminium foil surface deposition of aluminum film, vacuum annealing process temperature is set
Set range: 80-200 DEG C；
As a preferred solution of the present invention, further include having step: the aluminium foil after plated film is unloaded, to its performance checking, inspection
It is vacuum-packed after looking into, packaging vacuum degree remains less than 600Pa.
After above-mentioned technology, the invention has the following beneficial effects: 1, using ion source to aluminium foil surface carry out plasma Hong
Processing is hit, so that the roughness of aluminium foil surface reduces, the oxide layer on surface is removed, and improves the electric conductivity of aluminium foil collector
Energy.2, it rolls aluminium foil in aluminium foil surface deposition film aluminium using direct-current vacuum magnetron sputtering technique and passes through plasma deposition aluminium film
Afterwards, coarse surface crater is filled and led up, and further reduced aluminium foil surface roughness；The thin film aluminum of surface deposition, improves aluminium
The electric conductivity of foil.3, it after aluminium foil surface deposition of aluminum film, is made annealing treatment under vacuum conditions, eliminates the metal inside aluminium foil
Stress improves the mechanical performance of aluminium foil.4, the aluminium foil after plated film unloads, and to being vacuum-packed after its performance checking, prevents sky
Gas oxidation.
Figure of description
The present invention will be further described below with reference to the drawings.
Fig. 1 is process principle figure of the invention；
Fig. 2 is the structure and handling principle schematic diagram of the embodiment of the present invention；
Specific embodiment
Below in conjunction with embodiment of the present invention, the technology in embodiment of the present invention is clearly and completely described,
Obviously, described embodiment is only a part of scheme of the present invention, rather than whole embodiments.Based in the present invention
Embodiment, every other embodiment party obtained by those of ordinary skill in the art without making creative efforts
Case shall fall within the protection scope of the present invention.
Refering to what is shown in Fig. 1, the present embodiment is using the method for vacuum magnetic-control sputtering deposition of aluminum film in traditional anode for lithium battery
The aluminium foil surface of collector deposits one layer of nanometer aluminium film, to improve the electric conductivity of positive collector electrode.In order to realize this hair
Bright purpose, this implementation 1 use SJ-RTR-SDH350 take-up type vacuum magnetic-controlled sputtering coating equipment, refering to what is shown in Fig. 2, this
The test procedure of embodiment is as follows:
A, using SJ-RTR-SDH350 take-up type vacuum magnetic-controlled sputtering coating equipment, by traditional lithium battery collection to be processed
Electrode cuts the breadth size of 0.2-0.6M with entire rolls of aluminum foil in purification room, then aluminum foil coil is set around SJ-RTR-SDH350
On standby dedicated 3 cun of fixtures, will plated film aluminium foil and fixture be fixed on the let off roll of take-up type vacuum magnetic-controlled sputtering coating equipment
Aluminium foil is unfolded about 6 meters of length and is drawn across ion source, DC cathode, heater, arrival wind-up roll around plated film home roll by position, will
Aluminium foil head is solid on wind-up roll with high temperature gummed tape, aluminium foil tightness is manually adjusted, after so that aluminium foil is adjacent to plated film home roll completely
Prepare magnetic control sputtering plating aluminium film；
B, SJ-RTR-SDH350 take-up type vacuum magnetic-controlled sputtering coating equipment is operated, background vacuum is taken out and reaches 5x10-3Pa
Mass flowmenter is opened afterwards and is filled with high-purity argon gas, and adjustment flow controller makes vacuum chamber vacustat in 3x10-1Pa；
C, SJ-RTR-SDH350 take-up type vacuum magnetic-controlled sputtering coating equipment reel system is run, it will be on let off roll
Aluminium foil to be coated is unfolded on plated film home roll, the accurate adjustment aluminium foil winding tension in the tension range of 5-30N, until aluminium foil is run
Prepare investment plated film after stabilization；
D, operation SJ-RTR-SDH350 take-up type vacuum magnetic-controlled sputtering coating equipment volume ion source system to aluminium foil surface into
The processing of row plasma bombardment, adjustment ion source power 0.2-3kw, bombardment speed: 0.5-1.5m/s, ion source occur it is equal from
Daughter implements plasma bombardment, removing aluminium foil surface oxide layer, removal surface spike, so that aluminium foil surface is thick to aluminium foil surface
Rugosity reduces；
E, SJ-RTR-SDH350 take-up type vacuum magnetic-controlled sputtering coating equipment direct-current vacuum magnetic control sputtering plating aluminium target system is run
System, in the thin film aluminum of aluminium foil surface selective deposition 180nm, 300nm, 500nm thickness, aluminium foil surface is deposited by aluminium ion
Afterwards, coarse surface crater is filled and led up by aluminium ion, further decreases aluminium foil surface roughness；
F, the very hot system of SJ-RTR-SDH350 take-up type vacuum magnetic-controlled sputtering coating equipment vacuum is run, in vacuum state
Under to after the completion of deposition of aluminum film aluminium foil surface carry out heating anneal processing, eliminate aluminium foil inside metal stresses；
G, after the completion of aluminium foil plated film, SJ-RTR-SDH350 take-up type vacuum magnetic-controlled sputtering coating equipment vacuum breaker is operated, it will
Aluminium foil after plated film unloads, the performances such as conductivity of taking a sample to check, resistivity and roughness, and it is true that polyethylene vacuum belt is carried out after inspection
Vacuum remains less than 600Pa in empty sealed package, bag.
By the above method, the result obtained is as shown in table 1 to table 3.
Table 1: aluminium foil sputter aluminium film front and rear surfaces electrical property compares
As shown in table 1, it is deposited by the aluminium film of 180nm, 300nm, 500nm thickness, discovery increases aluminium foil with film thickness
Conductivity is also gradually increased, and conductivity no longer increases after deposition of aluminum film thickness is more than 300nm, there is reduction trend instead；Simultaneously
Resistivity is gradually reduced also with the increase of aluminium film thickness, when deposition of aluminum film thickness is more than 300nm, resistivity no longer reduce and
Be presented increase tendency, preferably plated film with a thickness of 250-350nm, optimal value is 300nm.
Table 2: aluminium foil sputter aluminium film front and rear surfaces roughness ratio compared with
As shown in table 2, it is deposited by the aluminium film of 180nm, 300nm, 500nm thickness, discovery increases aluminium foil with film thickness
Surface roughness is gradually lowered, and roughness no longer reduces after deposition of aluminum film thickness is more than 300nm, there is increase tendency instead.
Table 3: positive electrode sticks degree and compares before and after aluminium foil sputter aluminium film
As shown in table 3, it is deposited by the aluminium film of 180nm, 300nm, 500nm thickness, finds the aluminium by surface aluminizer
Foil, the material Adhering capacity after coating active electrode material are improved.
In the description of this specification, reference term " embodiment ", " some embodiments ", " an implementation
The description of example ", " some embodiments ", " example ", " specific example " or " some examples " etc. means to combine the embodiment or example
Particular features, structures, materials, or characteristics described are included at least one embodiment or example of the invention.In this explanation
In book, schematic expression of the above terms be may not refer to the same embodiment or example.Moreover, the specific spy of description
Sign, structure, material or feature can be combined in any suitable manner in any one or more of the embodiments or examples.
The above content is specific embodiment is combined, further detailed description of the invention, and it cannot be said that this hair
Bright specific implementation is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs, it is not taking off
Under the premise of from present inventive concept, a number of simple deductions or replacements can also be made.
Claims (8)
1. a kind of method for improving lithium battery anode aluminium foil collector electrical property, it is characterised in that deposited using vacuum magnetic-control sputtering
The method of aluminium film deposits one layer of nanometer aluminium film in the aluminium foil surface of traditional anode for lithium battery collector, to improve positive collection
The electric conductivity of electrode；The following steps are included:
A, using take-up type vacuum magnetic-controlled sputtering coating equipment, by traditional lithium battery collector aluminium foil to be processed in purification room
Inside be cut to the size of needs, then by aluminum foil coil on dismountable fixture, will plated film aluminium foil be fixed on take-up type vacuum
The let off roll position of magnetic-controlled sputtering coating equipment prepares magnetic control sputtering plating aluminium film；
B, take-up type vacuum magnetic-controlled sputtering coating equipment is operated, adjustment equipment extremely can coating process condition；
C, equipment reel system is adjusted, the aluminium foil to be coated on let off roll is unfolded, adjustment aluminium foil winding tension to aluminium foil is transported
Row is stablized；
D, plasma bombardment processing, stripping are carried out to aluminium foil surface using the ion source of take-up type vacuum magnetic-controlled sputtering coating equipment
From aluminium foil surface oxide layer, removal surface spike, aluminium foil surface roughness is reduced；
E, plasma bombardment is carried out using the ion source of take-up type vacuum magnetic-controlled sputtering coating equipment, deposits one in aluminium foil surface
Determine the thin film aluminum of thickness；
F, after aluminium foil surface deposition of aluminum film, heating anneal processing is carried out under vacuum conditions, eliminates the metal stresses inside aluminium foil.
2. a kind of method for improving lithium battery anode aluminium foil collector electrical property according to claim 1, it is characterised in that
Breadth size after aluminium foil is cut in the step a are as follows: 0.2-0.6m.
3. a kind of method for improving lithium battery anode aluminium foil collector electrical property according to claim 1, it is characterised in that
It can coating process condition in the step b are as follows: background vacuum 5x10-3Pa, plated film vacuum degree 3x10-1Pa.
4. a kind of method for improving lithium battery anode aluminium foil collector electrical property according to claim 1, it is characterised in that
It includes: setting winding speed that equipment reel system is adjusted in the step c: 0.5-1.5m/s, setting aluminium foil winding tension control
Range: 5-30N.
5. a kind of method for improving lithium battery anode aluminium foil collector electrical property according to claim 1, it is characterised in that
Step d intermediate ion source bombardment processing process conditions are as follows: setting ion source power 0.2-3kw, bombardment speed: 0.5-1.5m/
s。
6. a kind of method for improving lithium battery anode aluminium foil collector electrical property according to claim 1, it is characterised in that
Aluminium film thickness range in the step e through plasma bombardment sputter is: 250nm-350nm.
7. a kind of method for improving lithium battery anode aluminium foil collector electrical property according to claim 1, it is characterised in that
In the step f after aluminium foil surface deposition of aluminum film, vacuum annealing process temperature setting range: 80-200 DEG C.
8. a kind of method for improving lithium battery anode aluminium foil collector electrical property according to claim 1, it is characterised in that
Further include having step: the aluminium foil after plated film is unloaded, to its performance checking, be vacuum-packed after inspection, packaging vacuum degree is protected
It holds and is less than 600Pa.
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| CN201610665447X | 2016-08-12 | ||
| CN201610665447.XA CN106435494A (en) | 2016-08-12 | 2016-08-12 | Method for improving electrical performance of positive electrode collector electrode of lithium battery |
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| CN107502870B true CN107502870B (en) | 2019-09-03 |
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| CN106282950A (en) * | 2016-08-12 | 2017-01-04 | 深圳市第四能源科技有限公司 | A kind of method improving cathode of lithium battery aluminium foil colelctor electrode electrical property |
| CN106960960A (en) * | 2017-05-11 | 2017-07-18 | 天津理工大学 | A kind of preparation method of the flexible current-collecting body for the cycle performance for improving lithium ion battery negative material |
| CN109402589A (en) * | 2019-01-02 | 2019-03-01 | 重庆天齐锂业有限责任公司 | A kind of magnetron sputtering prepares the method and system of super thin metal lithium film |
| CN111082004A (en) * | 2019-12-05 | 2020-04-28 | 重庆天齐锂业有限责任公司 | Preparation method of lithium-copper composite foil |
| CN113278934A (en) * | 2021-04-26 | 2021-08-20 | 深圳市新邦薄膜科技有限公司 | Method for continuously depositing copper plating film by vacuum sputtering |
| CN116179978B (en) * | 2023-02-22 | 2024-10-01 | 江西华创新材有限公司 | Annealing process of lithium electric copper foil |
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2016
- 2016-08-12 CN CN201610665447.XA patent/CN106435494A/en active Pending
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2017
- 2017-08-07 CN CN201710667756.5A patent/CN107502870B/en active Active
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| JPH11250900A (en) * | 1998-02-26 | 1999-09-17 | Sony Corp | Manufacture and manufacturing device for electrode for nonaqueous electrolyte secondary battery, electrode, and electrolyte secondary battery using its electrode |
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| KR101631838B1 (en) * | 2009-03-17 | 2016-06-20 | 도요 알루미늄 가부시키가이샤 | Aluminum member covered with conductive coat and process for production of same |
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| CN104662713A (en) * | 2012-09-26 | 2015-05-27 | 昭和电工株式会社 | Negative electrode for secondary batteries, and secondary battery |
| KR20150009285A (en) * | 2013-07-16 | 2015-01-26 | 삼성에스디아이 주식회사 | Electron collector structure and electrode and lithium battery containing the electron collector structure |
| CN105186004A (en) * | 2015-10-09 | 2015-12-23 | 南阳师范学院 | Copper current collector for lithium-ion battery anodes as well as preparation method and application of copper current collector |
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| CN106435494A (en) | 2017-02-22 |
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