JPH11250900A - Manufacture and manufacturing device for electrode for nonaqueous electrolyte secondary battery, electrode, and electrolyte secondary battery using its electrode - Google Patents

Manufacture and manufacturing device for electrode for nonaqueous electrolyte secondary battery, electrode, and electrolyte secondary battery using its electrode

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Publication number
JPH11250900A
JPH11250900A JP10045225A JP4522598A JPH11250900A JP H11250900 A JPH11250900 A JP H11250900A JP 10045225 A JP10045225 A JP 10045225A JP 4522598 A JP4522598 A JP 4522598A JP H11250900 A JPH11250900 A JP H11250900A
Authority
JP
Japan
Prior art keywords
electrode
secondary battery
electrolyte secondary
aqueous electrolyte
current collector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10045225A
Other languages
Japanese (ja)
Inventor
Takeshi Matsubara
猛 松原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP10045225A priority Critical patent/JPH11250900A/en
Publication of JPH11250900A publication Critical patent/JPH11250900A/en
Pending legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries

Landscapes

  • Cell Electrode Carriers And Collectors (AREA)
  • Secondary Cells (AREA)
  • Battery Electrode And Active Subsutance (AREA)

Abstract

PROBLEM TO BE SOLVED: To further improve conductivity between a collector and an electrode layer, achieve compactness and light weight, and provide a high voltage and a high energy density. SOLUTION: In an electrode 1 for a nonaqueous electrolyte secondary battery having a collector 2, and an electrode layer 4 on the collector 2, a conductive coating layer 3 including at least either one sort of carbon, platinum and gold, for example, is provided to be formed between the collector 2 and the electrode layer 4. As a manufacturing method for the electrode 1, etching is conducted on the surface of the collector 2 using a sputter ion beam etching device, for example, while the coating layer 3 comprising carbon or the like is formed on the collector 2 using an electron beam deposition device, for example.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は非水電解液二次電池
用電極の製造方法、製造装置、および電極ならびにこれ
を用いた非水電解液二次電池に関し、さらに詳しくは、
集電体に正極活物質層、あるいは負極活物質層を形成し
た電極の製造方法、製造装置に特徴を有する非水電解液
二次電池用電極の製造方法、製造装置、およびこれらの
製造方法あるいは製造装置で作製される電極とこの電極
を用いた非水電解液二次電池に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for manufacturing an electrode for a non-aqueous electrolyte secondary battery, an electrode, and a non-aqueous electrolyte secondary battery using the same.
A method for manufacturing an electrode in which a positive electrode active material layer or a negative electrode active material layer is formed on a current collector, a method for manufacturing an electrode for a nonaqueous electrolyte secondary battery having a manufacturing apparatus, a manufacturing apparatus, and a method for manufacturing these The present invention relates to an electrode manufactured by a manufacturing apparatus and a non-aqueous electrolyte secondary battery using the electrode.

【0002】[0002]

【従来の技術】近年、地球環境に適応した、電気自動車
あるいはハイブリッド車などのEV((Electri
c Vehicle)分野への関心が高まっており、こ
れらの電源用の二次電池では、より小型、軽量、且つエ
ネルギー密度の向上が益々望まれている。
2. Description of the Related Art In recent years, EVs (Electric vehicles) such as electric vehicles or hybrid vehicles adapted to the global environment have been developed.
The interest in the field of (c Vehicle) is increasing, and it is increasingly desired that these secondary batteries for power supply be smaller, lighter, and have higher energy density.

【0003】このような要望に応える二次電池として
は、高電圧、且つ、高エネルギー密度を有するリチウ
ム、ナトリウムおよびアルミニウムなどの金属を負極活
物質として用いる非水電解液二次電池が有望である。特
に、リチウムを用いる非水電解液リチウム二次電池は取
り扱い性が良く、また、高電圧、高エネルギー密度が得
られるので、EV用の電源として注目を集めている。
As a secondary battery meeting such a demand, a nonaqueous electrolyte secondary battery using a metal such as lithium, sodium and aluminum having a high voltage and a high energy density as a negative electrode active material is promising. . In particular, a non-aqueous electrolyte lithium secondary battery using lithium is easy to handle, and can obtain a high voltage and a high energy density.

【0004】非水電解液二次電池用電極の構成を、従来
の電極の概略構成断面図を示す図4を参照して以下に説
明する。非水電解液二次電池用の電極1は、集電体2
と、集電体2上に形成された、正極としては正極活物質
などを含む正極層、および負極としては負極活物質など
を含む負極層である電極層4とから構成されている。一
般的には、これらの電極1は集電体2の両面に電極層4
が形成される構造となっている。
The structure of an electrode for a non-aqueous electrolyte secondary battery will be described below with reference to FIG. 4 which is a schematic sectional view of a conventional electrode. The electrode 1 for a non-aqueous electrolyte secondary battery includes a current collector 2
And a positive electrode layer formed on the current collector 2 and containing a positive electrode active material as a positive electrode, and an electrode layer 4 as a negative electrode layer containing a negative electrode active material and the like as a negative electrode. Generally, these electrodes 1 are provided on both sides of a current collector 2 with electrode layers 4.
Is formed.

【0005】非水電解液二次電池のさらなる高エネルギ
ー密度化を図るためには集電体2と電極層4との間の導
電性の向上を図ることが不可欠であり、電極層4を構成
する活物質に粉末を用いる種類の二次電池では集電体2
に金属箔を使用するのが一般的である。この金属箔であ
る集電体2表面に金属酸化物などが残留していると、電
極層4と集電体2との間の接触抵抗が大となり、この金
属酸化物などを除去して集電体2と電極層4との間の導
電性の向上を図る効果的な方法が望まれていた。
In order to further increase the energy density of the non-aqueous electrolyte secondary battery, it is indispensable to improve the conductivity between the current collector 2 and the electrode layer 4. In a secondary battery of a type using powder as an active material,
It is common to use a metal foil. If metal oxide or the like remains on the surface of the current collector 2 which is a metal foil, the contact resistance between the electrode layer 4 and the current collector 2 becomes large, and the metal oxide or the like is removed to collect the metal oxide. An effective method for improving the conductivity between the conductor 2 and the electrode layer 4 has been desired.

【0006】[0006]

【発明が解決しようとする課題】本発明は、集電体と電
極層との間のさらなる導電性の向上を図り、小型、軽量
であるとともに、高電圧、且つ、高エネルギー密度を有
する非水電解液二次電池用電極の製造方法、製造装置、
および電極ならびにこれを用いた非水電解液二次電池を
提供することを課題とする。
SUMMARY OF THE INVENTION The present invention aims at further improving the conductivity between a current collector and an electrode layer, and is a non-aqueous material having a small size, light weight, high voltage and high energy density. Method for producing electrode for electrolyte secondary battery, production apparatus,
It is another object of the present invention to provide an electrode and a non-aqueous electrolyte secondary battery using the same.

【0007】[0007]

【課題を解決するための手段】本発明の非水電解液二次
電池用電極の製造方法では、正極活物質として少なくと
もリチウム、ナトリウムおよびアルミニウムのいずれか
1種の金属を含む複合酸化物を含有する正極層を集電体
上に形成した正極、あるいは、負極活物質として少なく
とも炭素、リチウム、ナトリウムおよびアルミニウムの
いずれか1種を含む負極層を集電体上に形成した負極を
作製する非水電解液二次電池用電極の製造方法におい
て、集電体に電極層を形成する工程の前に、減圧雰囲気
中で、プラズマエッチング、例えば平行平板型エッチン
グ、リアクティブイオンエッチング、ECR(Elec
tron Cyclotron Resonance)
エッチング、マグネトロン型エッチングなどのスパッタ
エッチング、およびスパッタイオンビームエッチングお
よびリアクティブイオンビームエッチングなどのイオン
ビームエッチングのいずれか1つの方法を用いて集電体
表面をエッチングするエッチング工程と、導電性を有す
る少なくとも炭素、白金、および金のいずれか1種を含
む被膜層を、例えば蒸着、電子ビーム蒸着、スパッタ、
イオンプレーティング、CVD(Chemical V
apor Deposition)、プラズマCVDお
よびイオン注入のいずれか1つの方法を用いて集電体上
に形成する工程とを有することを特徴とする。この場
合、エッチング工程と、集電体上に形成する工程とを同
時に行うこともできる。
According to the method for producing an electrode for a non-aqueous electrolyte secondary battery of the present invention, a composite oxide containing at least one of lithium, sodium and aluminum as a positive electrode active material is contained. Non-aqueous solution for producing a positive electrode having a positive electrode layer formed on a current collector or a negative electrode having a negative electrode layer containing at least one of carbon, lithium, sodium and aluminum as a negative electrode active material formed on a current collector In the method for manufacturing an electrode for an electrolyte secondary battery, before the step of forming an electrode layer on the current collector, plasma etching, for example, parallel plate etching, reactive ion etching, ECR (Elect) is performed in a reduced pressure atmosphere.
tron Cyclotron Resonance)
An etching step of etching the current collector surface by using any one of etching, sputter etching such as magnetron type etching, and ion beam etching such as sputter ion beam etching and reactive ion beam etching; and A coating layer containing at least one of carbon, platinum, and gold is formed by, for example, evaporation, electron beam evaporation, sputtering,
Ion plating, CVD (Chemical V
forming on the current collector by using any one of the following methods: apor deposition, plasma CVD, and ion implantation. In this case, the etching step and the step of forming on the current collector can be performed simultaneously.

【0008】本発明の非水電解液二次電池用電極の製造
装置では、正極活物質として少なくともリチウム、ナト
リウムおよびアルミニウムのいずれか1種の金属を含む
複合酸化物の正極層を集電体上に形成する正極、あるい
は、負極活物質として少なくとも炭素、リチウム、ナト
リウムおよびアルミニウムのいずれか1種を含む負極層
を集電体上に形成する負極を作製する手段を有する非水
電解液二次電池用電極の製造装置において、電極層を形
成する手段が、減圧雰囲気中で、プラズマエッチング、
例えば平行平板型エッチング、リアクティブイオンエッ
チング、ECRエッチング、マグネトロン型エッチング
などのスパッタエッチングおよび例えばスパッタイオン
ビームエッチングおよびリアクティブイオンビームエッ
チングなどのイオンビームエッチングのいずれか一つの
装置を用いて集電体表面をエッチングするエッチング手
段と、導電性を有する少なくとも炭素、白金、および金
のいずれか一種を含む被膜層を、例えば蒸着、電子ビー
ム蒸着、スパッタ、イオンプレーティング、CVD、プ
ラズマCVDおよびイオン注入のいずれか1つの装置を
用いて集電体上に形成する手段とを有することを特徴と
する。
In the apparatus for producing an electrode for a non-aqueous electrolyte secondary battery according to the present invention, a positive electrode layer of a composite oxide containing at least one of lithium, sodium and aluminum as a positive electrode active material is formed on a current collector. Non-aqueous electrolyte secondary battery having means for forming a positive electrode formed on a negative electrode or a negative electrode for forming a negative electrode layer containing at least one of carbon, lithium, sodium and aluminum as a negative electrode active material on a current collector In the apparatus for manufacturing an electrode for use, means for forming an electrode layer is plasma etching,
For example, a current collector can be formed by using any one of apparatuses such as sputter etching such as parallel plate etching, reactive ion etching, ECR etching, and magnetron etching and ion beam etching such as sputter ion beam etching and reactive ion beam etching. Etching means for etching the surface, and a conductive coating layer containing at least one of carbon, platinum, and gold, for example, evaporation, electron beam evaporation, sputtering, ion plating, CVD, plasma CVD and ion implantation Means for forming on a current collector using any one of the devices.

【0009】本発明の電極は、少なくとも、集電体と、
集電体上に電極層を有する非水電解液二次電池用電極に
おいて、集電体と電極層との間に形成された、例えば少
なくとも炭素、白金および金のいずれか1種を含む導電
性の被膜層を有することを特徴とする。
The electrode of the present invention comprises at least a current collector,
In an electrode for a nonaqueous electrolyte secondary battery having an electrode layer on a current collector, a conductive material containing at least one of carbon, platinum, and gold formed between the current collector and the electrode layer, for example. Characterized by having a coating layer of

【0010】本発明の非水電解液二次電池は、請求項1
4に記載の電極を用いて作製されたことを特徴とする。
The non-aqueous electrolyte secondary battery of the present invention is characterized in that
The electrode is manufactured using the electrode described in Item 4.

【0011】上述した手段による作用を以下に述べる。
集電体に電極層を形成する前に、集電体表面をプラズマ
エッチング、スパッタエッチングあるいはイオンビーム
エッチングすることにより、集電体表面の酸化膜などが
除去されるとともに、酸化膜などが除去された集電体上
に良好な導電性を有する被膜層が形成されるので、後に
集電体上に形成される電極層との間の導電性の向上を図
ることができる。また、この製造方法または製造装置を
用いて作製した電極を用いて作製された非水電解液二次
電池の高エネルギー密度化を図ることができる。
The operation of the above means will be described below.
Before forming the electrode layer on the current collector, the surface of the current collector is subjected to plasma etching, sputter etching, or ion beam etching to remove an oxide film and the like on the current collector surface and to remove the oxide film and the like. Since the coating layer having good conductivity is formed on the current collector, the conductivity between the film layer and an electrode layer formed later on the current collector can be improved. Further, it is possible to increase the energy density of a nonaqueous electrolyte secondary battery manufactured using an electrode manufactured using this manufacturing method or manufacturing apparatus.

【0012】[0012]

【発明の実施の形態】本発明は、正極活物質あるいは負
極活物質などを含む電極層を集電体上に形成した非水電
解液二次電池用電極の製造方法、製造装置、および電極
ならびにこれを用いた非水電解液二次電池に適用でき
る。
BEST MODE FOR CARRYING OUT THE INVENTION The present invention relates to a method and apparatus for manufacturing an electrode for a non-aqueous electrolyte secondary battery in which an electrode layer containing a positive electrode active material or a negative electrode active material is formed on a current collector. It can be applied to a non-aqueous electrolyte secondary battery using this.

【0013】非水電解液二次電池用電極の構成を、本発
明の電極の概略断面構成図である図1を参照して説明す
る。一般に、非水電解液二次電池を構成する電極1の負
極の集電体2には銅箔、正極の集電体2にはアルミニウ
ム箔などが用いられ、電極1の製造では、圧延、電解精
錬などによって得られた例えば厚さがほぼ20μmの金
属箔の集電体2に、例えば60μmのスラリー状の活物
質とバインダーなどを混合した塗料を塗布、乾燥させた
後、プレスを行い、集電体2と活物質を含む電極層4と
の平滑化と厚さの均一化を図っている。電極1は、集電
体2の両面に電極層4が形成される構造となっている。
The structure of the electrode for a non-aqueous electrolyte secondary battery will be described with reference to FIG. 1 which is a schematic sectional view of the electrode of the present invention. Generally, copper foil is used for the negative electrode current collector 2 of the electrode 1 constituting the nonaqueous electrolyte secondary battery, and aluminum foil or the like is used for the positive electrode current collector 2. For example, a paint in which a slurry-like active material of 60 μm is mixed with a binder and the like is applied to a current collector 2 of a metal foil having a thickness of, for example, approximately 20 μm obtained by refining and the like, dried, and then pressed. The electric body 2 and the electrode layer 4 containing the active material are smoothed and the thickness is made uniform. The electrode 1 has a structure in which electrode layers 4 are formed on both surfaces of a current collector 2.

【0014】本発明はこの電極層4を形成する前に、集
電体2表面をプラズマエッチング、スパッタエッチング
あるいはイオンビームエッチングのいずれか一つの方法
によりエッチングを行い、さらにエッチング面に、良好
な導電性を有する被膜層3を形成することにより、後に
形成される電極層4と集電体2との間の導電性の向上を
図ることを特徴とするものである。
According to the present invention, before forming the electrode layer 4, the surface of the current collector 2 is etched by any one of plasma etching, sputter etching and ion beam etching. By forming the coating layer 3 having the property, the conductivity between the electrode layer 4 to be formed later and the current collector 2 is improved.

【0015】以下、電極層4を形成する前に行うエッチ
ング工程について説明する。集電体2表面をエッチング
する第1の方法としては、減圧雰囲気中で反応性ガスを
用いる円筒型プラズマエッチング装置などを用いるプラ
ズマエッチングがある。第2の方法としては、例えば、
減圧雰囲気中で、直流、交流または高周波電界などで不
活性ガスをプラズマ化して試料表面をエッチングする平
行平板型エッチング、リアクティブイオンエッチング、
ECRエッチング、マグネトロン型エッチング装置など
を用いるスパッタエッチングがある。第3の方法として
は、減圧雰囲気中で不活性ガスのイオンビームを照射す
るスパッタイオンビームエッチング、リアクティブイオ
ンビームエッチング装置などを用いるイオンビームエッ
チングがある。これらのうちのいずれか1つの方法を用
いることができる。
Hereinafter, an etching step performed before forming the electrode layer 4 will be described. As a first method for etching the surface of the current collector 2, there is plasma etching using a cylindrical plasma etching apparatus using a reactive gas in a reduced-pressure atmosphere. As a second method, for example,
In a reduced-pressure atmosphere, a parallel plate etching, a reactive ion etching, in which an inert gas is turned into plasma by a direct current, an alternating current or a high-frequency electric field to etch the sample surface,
There are ECR etching and sputter etching using a magnetron type etching apparatus. As a third method, there are sputter ion beam etching in which an inert gas ion beam is irradiated in a reduced-pressure atmosphere, and ion beam etching using a reactive ion beam etching apparatus or the like. Any one of these methods can be used.

【0016】次に、集電体2表面をエッチングした後
に、集電体2表面に、例えば通常の蒸着法、電子ビーム
蒸着法、スパッタ法、イオンプレーティング法、CVD
法、プラズマCVD法およびイオン注入法のいずれか1
つの方法を用いて導電性の被膜層3の形成を行う。
Next, after the surface of the current collector 2 is etched, the surface of the current collector 2 is subjected to, for example, a normal evaporation method, an electron beam evaporation method, a sputtering method, an ion plating method, a CVD method, or the like.
Method, plasma CVD, or ion implantation
The conductive coating layer 3 is formed using two methods.

【0017】また、不活性ガスのイオンビームを用いて
スパッタイオンビームエッチングする工程と、被膜層3
を蒸着により形成する工程とを同時に行うこともでき
る。これを真空成膜装置の概略構成図である図2を参照
して以下に説明する。この真空成膜装置5は、従来の電
子ビームを用いた真空蒸着装置にアルゴンなどのイオン
ビーム照射装置8を付加したものである。すなわち、真
空室6内で真空排気装置7により排気された減圧雰囲気
中で、イオンビーム照射装置8から出射された高速の例
えばアルゴンなどのイオンビーム9を例えばロール状の
アルミニウム箔または銅箔の集電体2上に照射する。同
時に、電子ビーム照射装置10から例えば炭素、金およ
び白金のいずれかを充填した蒸発源ルツボ12に電子ビ
ーム11を照射して、この電子ビーム11により溶解し
蒸発した蒸発原子13を集電体2上に蒸着し、被膜層3
を形成する。これにより、エッチング工程と被膜層3を
形成する工程とを同時に行うことができるので、スルー
プットの向上などに寄与することができる。さらに詳し
い説明を以下に述べる。
A step of performing sputter ion beam etching using an inert gas ion beam;
Can be performed simultaneously with the step of forming by vapor deposition. This will be described below with reference to FIG. 2 which is a schematic configuration diagram of a vacuum film forming apparatus. This vacuum film forming apparatus 5 is obtained by adding an ion beam irradiation apparatus 8 such as argon to a conventional vacuum evaporation apparatus using an electron beam. That is, in a reduced-pressure atmosphere evacuated by the vacuum evacuation device 7 in the vacuum chamber 6, the high-speed ion beam 9 of, for example, argon emitted from the ion beam irradiation device 8 is collected into, for example, a roll of aluminum foil or copper foil. Irradiate on the electric body 2. At the same time, the electron beam irradiation device 10 irradiates an electron beam 11 to an evaporation source crucible 12 filled with, for example, any one of carbon, gold and platinum, and evaporates the evaporated atoms 13 dissolved and evaporated by the electron beam 11 into the current collector 2 Deposited on the coating layer 3
To form Thus, the etching step and the step of forming the coating layer 3 can be performed at the same time, which can contribute to an improvement in throughput and the like. Further details are described below.

【0018】集電体2は、例えば送りロール14から送
り出され、ガイドロール17、18に支持されながら、
キャンロール15上で蒸着され、巻き取りロール16に
巻き取られる。キャンロール15は集電体2が熱的損傷
を受ける虞がある場合には、冷却機構(不図示)を内蔵
することもできる。このとき蒸発源ルツボ12から蒸発
した蒸発原子13は、アルゴンのイオンビーム9により
電離および加速されて集電体2上に蒸着される。また、
集電体2は、DC電源(不図示)により負に印加されて
いるので、集電体2の表面はアルゴンのイオンビーム9
によりスパッタイオンビームエッチングされる。以上の
工程により、集電体2表面の酸化物および油脂などが除
去され、抵抗成分となる金属酸化物などの生成を防止す
るとともに、さらに、その上に緻密な炭素、白金および
金などの良好な導電性と耐酸化性を有する被膜層3を形
成することができる。したがって、後に形成される電極
層4との間の接触抵抗を低減することができ、この集電
体2、被膜層3および電極層4を用いて構成された電極
1を用いて作製される非水電解液二次電池のエネルギー
密度を大とし、電池特性を向上させることができる。
The current collector 2 is sent out from, for example, a feed roll 14 and supported by guide rolls 17 and 18.
It is vapor-deposited on a can roll 15 and wound up by a take-up roll 16. In the case where the current collector 2 is likely to be thermally damaged, the can roll 15 may incorporate a cooling mechanism (not shown). At this time, the evaporated atoms 13 evaporated from the evaporation source crucible 12 are ionized and accelerated by the argon ion beam 9 and are deposited on the current collector 2. Also,
Since the current collector 2 is negatively applied by a DC power source (not shown), the surface of the current collector 2 has an ion beam 9 of argon.
Is used to perform sputter ion beam etching. Through the above steps, the oxides and fats and the like on the surface of the current collector 2 are removed, thereby preventing the formation of metal oxides and the like serving as resistance components. The coating layer 3 having excellent conductivity and oxidation resistance can be formed. Therefore, the contact resistance with the electrode layer 4 to be formed later can be reduced, and the current collector 2, the coating layer 3, and the non-electrode 1 formed using the electrode 1 formed using the electrode layer 4 can be reduced. The energy density of the water electrolyte secondary battery can be increased, and the battery characteristics can be improved.

【0019】以下、上記の図2を参照して説明した事例
の真空成膜装置5を、正極および負極の集電体2に電極
層4を形成する工程を有する非水電解液二次電池用の電
極1の製造に適用し、これらの電極1を用いて作製した
非水電解液二次電池の実施例と従来の非水電解液二次電
池の比較例について説明する。
Hereinafter, the vacuum film forming apparatus 5 of the case described with reference to FIG. 2 is used for a non-aqueous electrolyte secondary battery having a process of forming an electrode layer 4 on a current collector 2 of a positive electrode and a negative electrode. An example of a non-aqueous electrolyte secondary battery manufactured using these electrodes 1 and a comparative example of a conventional non-aqueous electrolyte secondary battery will be described.

【0020】実施例1 非水電解液二次電池の実施例1として、以下の条件で作
製した。正極として、電極1を以下のように作製した。
圧延によって製造された厚さほぼ20μmのアルミニウ
ム箔の集電体2の両面に、真空成膜装置5を用いて、ア
ルゴンのイオンビーム9によりスパッタイオンビームエ
ッチングを行いつつ、炭素を充填した蒸発源ルツボ12
に電子ビーム11を照射して蒸着を行い、ほぼ100n
mの炭素からなる被膜層3を形成した。次に、リチウム
マンガンスピネル酸化物粉末の正極活物質と導電助剤と
して黒鉛粉末、炭素粉末をそれぞれ90、5.94、
0.06重量部と結着剤のポリフッ化ビニリデン4重量
部とを混合し、この混合物をN−メチル−2−ピロリド
ンに分散させてスラリー状にした電極層4をアルミニウ
ム箔の被膜層3の蒸着面に塗布、乾燥後プレスし帯状の
電極1とした。電極1の成形後の合材厚さはほぼ140
μmである。
Example 1 A non-aqueous electrolyte secondary battery was fabricated as Example 1 under the following conditions. Electrode 1 was produced as a positive electrode as follows.
Evaporation source filled with carbon while performing sputtering ion beam etching with argon ion beam 9 on both surfaces of current collector 2 of aluminum foil having a thickness of about 20 μm manufactured by rolling using vacuum film forming apparatus 5. Crucible 12
Is irradiated with an electron beam 11 to perform vapor deposition, and approximately 100 n
A coating layer 3 made of m carbon was formed. Next, graphite powder and carbon powder as a positive electrode active material of lithium manganese spinel oxide powder and a conductive auxiliary were respectively 90, 5.94,
0.06 parts by weight and 4 parts by weight of polyvinylidene fluoride as a binder were mixed, and this mixture was dispersed in N-methyl-2-pyrrolidone to form a slurry. It was coated on the deposition surface, dried and pressed to obtain a strip-shaped electrode 1. The thickness of the composite material after forming the electrode 1 is approximately 140
μm.

【0021】負極として、電極1を以下のように作製し
た。圧延により製造された厚さ15μmの銅箔の集電体
2の両面に、真空成膜装置5を用いて、アルゴンのイオ
ンビーム9によりスパッタイオンビームエッチングを行
いつつ、炭素を充填した蒸発源ルツボ12に電子ビーム
11を照射して蒸着を行い、約100nmの被膜層3を
形成した。黒鉛粉末90重量部の負極活物質と結着剤で
あるポリフッ化ビニリデン10重量部とを混合し、この
混合物をN−メチル−2−ピロリドンに分散させてスラ
リー状にした電極層4を銅箔の被膜層3の蒸着面に塗
布、乾燥後プレスし帯状の電極1とした。電極1の成形
後の合材厚さはほぼ100μmである。
An electrode 1 was prepared as a negative electrode as follows. An evaporation source crucible filled with carbon was sputter-ion-beam-etched on both surfaces of a current collector 2 made of a 15-μm-thick copper foil by rolling with an ion beam 9 of argon using a vacuum film forming apparatus 5. Vapor deposition was performed by irradiating the electron beam 11 to 12 to form a coating layer 3 of about 100 nm. The electrode layer 4 obtained by mixing 90 parts by weight of the graphite powder with 10 parts by weight of polyvinylidene fluoride as a binder and dispersing the mixture in N-methyl-2-pyrrolidone to form a slurry is a copper foil. The coating layer 3 was coated on the deposition surface, dried and pressed to form a strip-shaped electrode 1. The thickness of the composite material after forming the electrode 1 is approximately 100 μm.

【0022】実施例2 非水電解液二次電池の実施例2として、以下の条件で作
製した。正極として、電極1を以下のように作製した。
実施例1の正極と同様な条件で作製し、アルミニウム箔
の集電体2への炭素からなる被膜層3の蒸着厚さを50
nmとした。
Example 2 A non-aqueous electrolyte secondary battery was produced as Example 2 under the following conditions. Electrode 1 was produced as a positive electrode as follows.
The cathode was manufactured under the same conditions as those of the positive electrode of Example 1, and the deposition thickness of the carbon coating layer 3 on the aluminum foil current collector 2 was set to 50.
nm.

【0023】負極として、電極1を以下のように作製し
た。実施例1の負極と同様な条件で電極1を作製し、銅
箔の集電体2への炭素からなる被膜層3の蒸着厚さを5
0nmとした。
An electrode 1 was prepared as a negative electrode as follows. The electrode 1 was prepared under the same conditions as those of the negative electrode of Example 1, and the thickness of the coating layer 3 made of carbon on the current collector 2 was 5
It was set to 0 nm.

【0024】比較例 非水電解液二次電池の比較例として、以下の条件で作製
した。正極として、電極1を実施例1と同様な条件で作
製し、アルミニウム箔の集電体2への炭素からなる被膜
層3の蒸着を行わなかったものである。
COMPARATIVE EXAMPLE As a comparative example of a non-aqueous electrolyte secondary battery, it was manufactured under the following conditions. An electrode 1 was prepared as a positive electrode under the same conditions as in Example 1 and the coating layer 3 made of carbon was not deposited on the aluminum foil current collector 2.

【0025】負極として、電極1を実施例1と同様な条
件で作製し、銅箔の集電体2への炭素からなる被膜層3
の蒸着を行わなかったものである。
As a negative electrode, an electrode 1 was prepared under the same conditions as in Example 1, and a carbon coating layer 3 was formed on a current collector 2 of copper foil.
Was not deposited.

【0026】電極1の電気抵抗の測定 上記の実施例1,2および比較例の非水電解液二次電池
用の電極1の電気抵抗を測定し、[表1]に結果を示
す。表1から、実施例1,2の電極1は、比較例の電極
1と比較して、集電体2の表面をスパッタイオンビーム
エッチングするとともに、炭素からなる被膜層3を形成
したことにより、電気抵抗が低下することがわかる。
Measurement of Electric Resistance of Electrode 1 The electric resistance of the electrode 1 for the non-aqueous electrolyte secondary batteries of Examples 1 and 2 and Comparative Example was measured, and the results are shown in Table 1. From Table 1, the electrodes 1 of Examples 1 and 2 were compared with the electrode 1 of the comparative example by performing the sputter ion beam etching on the surface of the current collector 2 and forming the coating layer 3 made of carbon. It can be seen that the electric resistance decreases.

【0027】[0027]

【表1】 [Table 1]

【0028】上記の実施例1,2および比較例の非水電
解液二次電池について、放電特性を測定した。放電深度
DOD(Depth of Discharge)に対
する放電出力(エネルギー密度)を測定した結果を図3
に示す。
The discharge characteristics of the non-aqueous electrolyte secondary batteries of Examples 1 and 2 and Comparative Example were measured. FIG. 3 shows a result of measuring a discharge output (energy density) with respect to a discharge depth DOD (Depth of Discharge).
Shown in

【0029】上記の結果から、電極1の集電体2に電極
層4を形成する前に、集電体2の金属箔の表面をスパッ
タイオンビームエッチングするとともに、例えば炭素か
らなる被膜層3を蒸着により形成することにより、電極
1の内部抵抗が減少し、この電極1を用いて作製した非
水電解液二次電池の放電特性などが向上し、本発明の有
効性が確認できた。
From the above results, before the electrode layer 4 is formed on the current collector 2 of the electrode 1, the surface of the metal foil of the current collector 2 is subjected to sputter ion beam etching, and the coating layer 3 made of, for example, carbon is formed. By forming by vapor deposition, the internal resistance of the electrode 1 was reduced, the discharge characteristics of the non-aqueous electrolyte secondary battery manufactured using the electrode 1 were improved, and the effectiveness of the present invention was confirmed.

【0030】[0030]

【発明の効果】本発明の非水電解液二次電池用電極の製
造方法、製造装置によれば、集電体と電極層との間の導
電性の向上が図られた電極を作製できる。そして、この
電極を用いて作製した非水電解液二次電池は、高エネル
ギー密度化を図ることができる。
According to the method and apparatus for manufacturing an electrode for a non-aqueous electrolyte secondary battery of the present invention, an electrode having improved conductivity between a current collector and an electrode layer can be manufactured. The non-aqueous electrolyte secondary battery manufactured using this electrode can achieve high energy density.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明の電極の概略構成断面図である。FIG. 1 is a schematic cross-sectional view of an electrode according to the present invention.

【図2】 本発明の真空成膜装置を示す概略構成図であ
る。
FIG. 2 is a schematic configuration diagram showing a vacuum film forming apparatus of the present invention.

【図3】 本発明の非水電解液二次電池の放電特性を示
し、DODとエネルギー密度の関係図である。
FIG. 3 is a graph showing the discharge characteristics of the non-aqueous electrolyte secondary battery of the present invention, showing the relationship between DOD and energy density.

【図4】 従来の電極の概略構成断面図である。FIG. 4 is a schematic cross-sectional view of a conventional electrode.

【符号の説明】[Explanation of symbols]

1…電極、2…集電体、3…被膜層、4…電極層、5…
真空成膜装置、6…真空室、7…真空排気装置、8…イ
オンビーム照射装置、9…イオンビーム、10…電子ビ
ーム照射装置、11…電子ビーム、12…蒸発源ルツ
ボ、13…蒸発原子、14…送りロール、15…キャン
ロール、16…巻き取りロール、17,18…ガイドロ
ール
DESCRIPTION OF SYMBOLS 1 ... Electrode, 2 ... Current collector, 3 ... Coating layer, 4 ... Electrode layer, 5 ...
Vacuum film forming device, 6 vacuum chamber, 7 vacuum exhaust device, 8 ion beam irradiation device, 9 ion beam, 10 electron beam irradiation device, 11 electron beam, 12 evaporation source crucible, 13 evaporated atoms , 14: feed roll, 15: can roll, 16: take-up roll, 17, 18: guide roll

フロントページの続き (51)Int.Cl.6 識別記号 FI H01M 10/40 H01M 10/40 Z Continued on the front page (51) Int.Cl. 6 Identification code FI H01M 10/40 H01M 10/40 Z

Claims (16)

【特許請求の範囲】[Claims] 【請求項1】 少なくとも、集電体上に電極層を形成す
る工程を有する非水電解液二次電池用電極の製造方法に
おいて、 前記集電体上に前記電極層を形成する工程の前に、 減圧雰囲気中で、プラズマエッチング、スパッタエッチ
ングおよびイオンビームエッチングのいずれか1つの方
法を用いて前記集電体表面をエッチングするエッチング
工程と、 前記集電体表面に導電性を有する被膜層を形成する工程
とを有することを特徴とする非水電解液二次電池用電極
の製造方法。
1. A method for producing an electrode for a non-aqueous electrolyte secondary battery, comprising at least a step of forming an electrode layer on a current collector, wherein the step of forming the electrode layer on the current collector comprises: An etching step of etching the current collector surface using one of plasma etching, sputter etching, and ion beam etching in a reduced pressure atmosphere; and forming a conductive coating layer on the current collector surface. And producing a non-aqueous electrolyte secondary battery electrode.
【請求項2】 前記電極層が正極活物質および負極活物
質のいずれか1種を含有することを特徴とする請求項1
に記載の非水電解液二次電池用電極の製造方法。
2. The method according to claim 1, wherein the electrode layer contains any one of a positive electrode active material and a negative electrode active material.
3. The method for producing an electrode for a non-aqueous electrolyte secondary battery according to item 1.
【請求項3】 前記正極活物質が、少なくともリチウ
ム、ナトリウムおよびアルミニウムのいずれか1種の金
属を含む複合酸化物を有することを特徴とする請求項2
に記載の非水電解液二次電池用電極の製造方法。
3. The positive electrode active material has a composite oxide containing at least one metal of lithium, sodium and aluminum.
3. The method for producing an electrode for a non-aqueous electrolyte secondary battery according to item 1.
【請求項4】 前記負極活物質が、少なくとも炭素、リ
チウム、ナトリウムおよびアルミニウムのいずれか1種
を含むことを特徴とする請求項2に記載の非水電解液二
次電池用電極の製造方法。
4. The method for producing an electrode for a non-aqueous electrolyte secondary battery according to claim 2, wherein the negative electrode active material contains at least one of carbon, lithium, sodium and aluminum.
【請求項5】 前記エッチング工程と、前記被膜層を形
成する工程とを同時に行うことを特徴とする請求項1に
記載の非水電解液二次電池用電極の製造方法。
5. The method for producing an electrode for a non-aqueous electrolyte secondary battery according to claim 1, wherein the etching step and the step of forming the coating layer are performed simultaneously.
【請求項6】 前記被膜層を形成する工程が、 真空蒸着、電子ビーム蒸着、スパッタ、イオンプレーテ
ィング、CVD、プラズマCVDおよびイオン注入のい
ずれか1つの方法を用いることを特徴とする請求項1に
記載の非水電解液二次電池用電極の製造方法。
6. The method according to claim 1, wherein the step of forming the coating layer uses any one of vacuum deposition, electron beam deposition, sputtering, ion plating, CVD, plasma CVD, and ion implantation. 3. The method for producing an electrode for a non-aqueous electrolyte secondary battery according to item 1.
【請求項7】 前記被膜層が少なくとも炭素、白金およ
び金のいずれか1種を含むことを特徴とする請求項1に
記載の非水電解液二次電池用電極の製造方法。
7. The method for producing an electrode for a non-aqueous electrolyte secondary battery according to claim 1, wherein the coating layer contains at least one of carbon, platinum and gold.
【請求項8】 少なくとも、集電体上に電極層を形成す
る手段を有する非水電解液二次電池用電極の製造装置に
おいて、 前記電極層を形成する手段が、 減圧雰囲気中で、プラズマエッチング、スパッタエッチ
ングおよびイオンビームエッチングのいずれか1つの装
置を用いて前記集電体表面をエッチングするエッチング
手段と、 前記集電体表面に導電性を有する被膜層を形成する手段
とを有することを特徴とする非水電解液二次電池用電極
の製造装置。
8. An apparatus for manufacturing an electrode for a non-aqueous electrolyte secondary battery having at least a means for forming an electrode layer on a current collector, wherein the means for forming the electrode layer is plasma-etched in a reduced-pressure atmosphere. Etching means for etching the surface of the current collector using one of sputter etching and ion beam etching; and means for forming a conductive coating layer on the surface of the current collector. For manufacturing a non-aqueous electrolyte secondary battery electrode.
【請求項9】 前記電極層が正極活物質および負極活物
質のいずれか1種を含有することを特徴とする請求項8
に記載の非水電解液二次電池用電極の製造装置。
9. The method according to claim 8, wherein the electrode layer contains one of a positive electrode active material and a negative electrode active material.
3. The apparatus for producing an electrode for a non-aqueous electrolyte secondary battery according to claim 1.
【請求項10】 前記正極活物質が、少なくともリチウ
ム、ナトリウムおよびアルミニウムのいずれか1種の金
属を含む複合酸化物を有することを特徴とする請求項9
に記載の非水電解液二次電池用電極の製造装置。
10. The positive electrode active material has a composite oxide containing at least one metal of lithium, sodium and aluminum.
3. The apparatus for producing an electrode for a non-aqueous electrolyte secondary battery according to claim 1.
【請求項11】 前記負極活物質が少なくとも炭素、リ
チウム、ナトリウムおよびアルミニウムのいずれか1種
を含むことを特徴とする請求項9に記載の非水電解液二
次電池用電極の製造装置。
11. The apparatus for manufacturing an electrode for a non-aqueous electrolyte secondary battery according to claim 9, wherein the negative electrode active material contains at least one of carbon, lithium, sodium and aluminum.
【請求項12】 前記被膜層を形成する手段が、 真空蒸着、電子ビーム蒸着、スパッタ、イオンプレーテ
ィング、CVD、プラズマCVDおよびイオン注入のい
ずれか1つの装置を用いることを特徴とする請求項8に
記載の非水電解液二次電池用電極の製造装置。
12. The apparatus according to claim 8, wherein the means for forming the coating layer uses any one of vacuum deposition, electron beam deposition, sputtering, ion plating, CVD, plasma CVD, and ion implantation. 3. The apparatus for producing an electrode for a non-aqueous electrolyte secondary battery according to claim 1.
【請求項13】 前記被膜層が少なくとも炭素、白金お
よび金のいずれか1種を含むことを特徴とする請求項8
に記載の非水電解液二次電池用電極の製造装置。
13. The method according to claim 8, wherein the coating layer contains at least one of carbon, platinum and gold.
3. The apparatus for producing an electrode for a non-aqueous electrolyte secondary battery according to claim 1.
【請求項14】 少なくとも、集電体と、前記集電体上
に形成された電極層を有する非水電解液二次電池用電極
において、 前記集電体と前記電極層との間に形成された導電性の被
膜層を有することを特徴とする電極。
14. An electrode for a non-aqueous electrolyte secondary battery having at least a current collector and an electrode layer formed on the current collector, wherein the electrode is formed between the current collector and the electrode layer. An electrode having a conductive coating layer.
【請求項15】 前記被膜層が少なくとも炭素、白金お
よび金のいずれか1種を含むことを特徴とする請求項1
4に記載の電極。
15. The method according to claim 1, wherein the coating layer contains at least one of carbon, platinum and gold.
5. The electrode according to 4.
【請求項16】 請求項14に記載の電極を用いて作製
されたことを特徴とする非水電解液二次電池。
16. A non-aqueous electrolyte secondary battery manufactured using the electrode according to claim 14. Description:
JP10045225A 1998-02-26 1998-02-26 Manufacture and manufacturing device for electrode for nonaqueous electrolyte secondary battery, electrode, and electrolyte secondary battery using its electrode Pending JPH11250900A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10045225A JPH11250900A (en) 1998-02-26 1998-02-26 Manufacture and manufacturing device for electrode for nonaqueous electrolyte secondary battery, electrode, and electrolyte secondary battery using its electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10045225A JPH11250900A (en) 1998-02-26 1998-02-26 Manufacture and manufacturing device for electrode for nonaqueous electrolyte secondary battery, electrode, and electrolyte secondary battery using its electrode

Publications (1)

Publication Number Publication Date
JPH11250900A true JPH11250900A (en) 1999-09-17

Family

ID=12713335

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JPH11250900A (en)

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* Cited by examiner, † Cited by third party
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US6743369B2 (en) 2000-12-22 2004-06-01 Sanyo Electric Co., Ltd. Method for manufacturing electrode for secondary battery
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